A dynamic adaptive thermal radiation modulator based on metasurface and its manufacturing method

Abstract

The present invention discloses a dynamic adaptive thermal radiation modulator based on a metasurface and a manufacturing method thereof. The modulator includes a metal metasurface layer at the top, a thermal expansion layer in the middle, and a substrate at the bottom. The modulator can radiate heat from an object outward through the 8-13μm band, realizing dynamic adaptive regulation of the radiation process. The thermal radiation modulator structure designed by the present invention includes a metal metasurface structure layer, a thermal expansion material layer, and a metal substrate layer. As the ambient temperature changes, the expansion or contraction of the thermal expansion material can control the disconnection and connection of the metal metasurface structure, that is, control the absorption and reflection of the structure in the atmospheric window band, ultimately realizing the switching of the "on" and "off" states of the radiative cooling function to achieve passive adaptive thermal radiation modulation.

Description

Technical Field

[0001] The present invention relates to a dynamic adaptive thermal radiation modulator based on a metasurface and a manufacturing method thereof, belonging to the fields of radiation cooling, photon thermal management and flexible metasurfaces. Background Art

[0002] In recent years, the frequent occurrence of extreme hot weather has led to a massive increase in cooling energy demand. Radiative cooling cools objects by absorbing the smallest electromagnetic radiation in the "atmospheric window" (8-13μm) and radiating heat into outer space (a cooling source). Its zero-energy, zero-pollution advantages have far-reaching implications for building an energy-efficient and environmentally friendly society.

[0003] Kirchhoff's radiation law states that the ratio of the power emitted to the power absorbed by all objects at the same temperature is equal, meaning that a good radiation absorber is also a good radiation emitter. Therefore, infrared absorbers can radiate energy into the cold outer space through an "atmospheric window," achieving radiative cooling. Through the rational design of plasmonic metasurfaces, all properties of the incident electromagnetic wave, including phase, frequency, polarization, and amplitude, can be manipulated.

[0004] According to the control mechanism, the dynamic control of radiative cooling can be divided into two categories: active and passive. Active control requires additional external field drive, such as the introduction of an external electric field. Compared with active control, passive control does not require additional control and is easier to apply. However, it is also more difficult to achieve passive control. The key technology is how to combine suitable materials with physical design. On the other hand, since cooling needs usually occur during the day when the sun is directly shining, reducing solar energy absorption in the design of the thermal radiation modulator is also a key design factor in order to avoid the thermal radiation modulator from getting hot due to solar radiation. Summary of the Invention

[0005] In order to solve the problem that existing thermal radiation modulators are unable to independently sense changes in ambient temperature and make corresponding thermal regulation behaviors, the present invention adopts a metasurface structure to design an infrared absorber to achieve thermal radiation modulation, thereby solving the problem that the current thermal radiation modulators are difficult to achieve adaptive dynamic control.

[0006] In order to achieve the above technical objectives, the technical solution of the present invention is:

[0007] A design method for a dynamic adaptive thermal radiation modulator based on a metasurface, characterized by comprising the following steps:

[0008] (1) Using a finite-difference time-domain algorithm, a radiation modulator structure is set up, which includes a metal metasurface structure layer at the top, a thermal expansion layer in the middle, and a metal base layer at the bottom;

[0009] (2) Determine the initial conditions of the simulation, including fixing the thickness of the metal substrate layer, setting the boundary conditions of the modulator structure to periodic boundaries, and the wavelength range of the incident wave to the solar radiation band of 0.3-2 μm and the "atmospheric window" band of 8-13 μm;

[0010] (3) The structural shape, parameters, thickness of the metal metasurface structure layer, the thickness of the intermediate thermal expansion layer, and the ambient temperature are sequentially changed, and the absorption spectrum of the radiation modulator is calculated using FDTD solution software;

[0011] (4) Calculating the radiation power of the thermal radiation modulator corresponding to the structural shape of the corresponding metal metasurface based on the absorptivity corresponding to each band in the absorption spectrum;

[0012] (5) The net cooling power of the modulator is calculated by the radiation power formula. According to the net cooling power, the structure of the corresponding metal metasurface structure layer is screened through continuous optimization to obtain a thermal radiation modulator.

[0013] A dynamic adaptive thermal radiation modulator based on a metasurface was designed, comprising a metal metasurface layer on top, a thermal expansion layer in the middle, and a substrate at the bottom. The modulator can radiate heat within an object into outer space through the 8-13μm band, achieving dynamic adaptive regulation of the radiation process.

[0014] Furthermore, the metal super surface layer has a honeycomb structure.

[0015] Furthermore, each side of the honeycomb structure is a disconnected structure.

[0016] Furthermore, the material of the metal super surface layer and the substrate is gold, silver or copper.

[0017] Furthermore, the material of the thermal expansion layer is polydimethylsiloxane or polyvinyl pyrrolidone.

[0018] Furthermore, the width of each side of the honeycomb structure is 120-210 nm, and the thickness of the honeycomb structure is 150-300 nm.

[0019] Furthermore, the thickness of the thermal expansion layer is 100-250 nm.

[0020] Furthermore, each side of the honeycomb structure is disconnected at a midpoint.

[0021] Furthermore, it also includes a method for making a dynamic adaptive thermal radiation modulator based on a metasurface, which includes the following steps: making a substrate; forming a thermal expansion layer on the substrate; forming an etching layer on the thermal expansion layer; etching a microstructure inside the etching layer by etching technology; depositing metal into the microstructure to form a metal metasurface layer; removing the etching layer, cleaning the sample surface, and obtaining a thermal radiation modulator.

[0022] Furthermore, it also includes a heat dissipation method based on a dynamic adaptive thermal radiation modulator of a metasurface, which is characterized in that: a thermal radiation modulator is set on an object, and when the internal temperature of the object starts to rise from room temperature, the heat of the object is conducted to the thermal radiation modulator, so that the structure of the thermal radiation modulator changes, thereby radiating the heat of the object outward in the 8-13μm band.

[0023] Furthermore, it also includes the application of a heat dissipation method based on a dynamic adaptive thermal radiation modulator of a metasurface in buildings.

[0024] Furthermore, it also includes the application of a heat dissipation method of a dynamic adaptive thermal radiation modulator based on a metasurface in active optoelectronic devices.

[0025] By adopting the above-mentioned technical solution, the present invention has the following beneficial effects compared with the prior art: the thermal radiation modulator designed by the present invention has a metal metasurface structure layer, a thermal expansion material layer and a metal base layer. As the ambient temperature changes, the expansion or contraction of the thermal expansion material can control the disconnection and connection of the metal metasurface structure, that is, control the absorption and reflection of the structure in the atmospheric window band, and ultimately realize the switching of the "on" and "off" states of the radiation cooling function to achieve passive adaptive thermal radiation modulation. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The accompanying drawings, as part of the present invention, are intended to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are intended to explain the present invention but do not constitute undue limitations thereon. Obviously, the drawings described below are merely examples, and those skilled in the art can derive other drawings based on these drawings without inventive effort.

[0027] Figure 1 Schematic diagram of the three-dimensional structure of the thermal radiation modulator in the present invention (wherein 1 is the top honeycomb metal supersurface layer, 2 is the middle thermal expansion layer, and 3 is the bottom substrate);

[0028] Figure 2 A three-dimensional top view of the thermal radiation modulator structure of the present invention;

[0029] Figure 3 A three-dimensional side view of the thermal radiation modulator structure of the present invention;

[0030] Figure 4 (a) and 4(b) are the absorption spectrum responses of the thermal radiation modulator of the present invention in the solar radiation band and the "atmospheric window" band at different ambient temperatures;

[0031] Figure 5(a) and 5(b) are the absorptivity spectra and equivalent impedance of the thermal radiation modulator in the “atmospheric window” band in the “on” and “off” states of the present invention;

[0032] FIG6( a ) is a diagram showing the electric field distribution at the middle cross section (xy plane) of the honeycomb layer of the thermal radiation modulator of the present invention at a wavelength of 10.5 μm;

[0033] FIG6( b ) is a diagram showing the electric field distribution at the middle cross section (xy plane) of the PDMS thermal expansion layer of the thermal radiation modulator of the present invention at a wavelength of 10.5 μm;

[0034] FIG6( c ) is a diagram showing the electric field distribution at the interface (xy plane) between the PDMS thermal expansion layer and the Ag substrate layer of the thermal radiation modulator of the present invention at a wavelength of 10.5 μm;

[0035] FIG6( d ) is a diagram showing the electric field distribution in the yz plane of the thermal radiation modulator of the present invention at a wavelength of 10.5 μm;

[0036] Figure 7 (a), 7(b) and 7(c) show the effects of different geometric parameters on the absorption performance of the “atmospheric window” band of the thermal radiation modulator in the present invention when the cooling function is “on”;

[0037] Figure 8 This is a manufacturing flow chart of the thermal radiation modulator in the present invention.

[0038] Figure 9 This is a diagram of the array structure of the thermal radiation modulator of the present invention.

[0039] It should be noted that these drawings and textual descriptions are not intended to limit the conceptual scope of the present invention in any way, but rather to illustrate the concept of the present invention for those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. The following embodiments are used to illustrate the present invention but are not used to limit the scope of the present invention.

[0041] In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the present invention.

[0042] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; and direct or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0043] The present invention designs a dynamic adaptive thermal radiation modulator based on a metasurface through the following design method, which includes the following steps:

[0044] (1) Using a finite-difference time-domain algorithm, a radiation modulator structure is set up, which includes a metal metasurface structure layer at the top, a thermal expansion layer in the middle, and a metal base layer at the bottom;

[0045] (2) Determine the initial conditions of the simulation, including fixing the thickness of the metal substrate layer, setting the boundary conditions of the modulator structure to periodic boundaries, and the wavelength range of the incident wave to the solar radiation band of 0.3-2 μm and the "atmospheric window" band of 8-13 μm;

[0046] (3) The structural shape, parameters, thickness of the metal metasurface structure layer, the thickness of the intermediate thermal expansion layer, and the ambient temperature are sequentially changed, and the absorption spectrum of the radiation modulator is calculated using FDTD solution software;

[0047] (4) Calculating the radiation power of the thermal radiation modulator corresponding to the structural shape of the corresponding metal metasurface based on the absorptivity corresponding to each band in the absorption spectrum;

[0048] (5) The net cooling power of the modulator is calculated by the radiation power formula. According to the net cooling power, the structure of the corresponding metal metasurface structure layer is screened through continuous optimization to obtain a thermal radiation modulator.

[0049] As attached Figure 1-3 As shown in the figure, it is a schematic diagram of the dynamic adaptive thermal radiation modulator based on the metasurface designed by the present invention. It is a sandwich structure consisting of a metal metasurface layer on the top, a thermal expansion layer in the middle and a substrate at the bottom. The metal metasurface layer exemplified in the figure is a hexagonal honeycomb structure, and the sides of the honeycomb structure are disconnected structures (the figure exemplifies the disconnection at the midpoint of each side, and can also be disconnected according to three equal parts, four equal parts, irregular equal parts, etc.), wherein the metal metasurface layer can also be a polygonal structure such as a rectangle or square, Px and Py represent the period of the unit cell, w and h represent the side width and height of the honeycomb metasurface, respectively, and t1 and t2 represent the thickness of the thermal expansion layer and the substrate, respectively.

[0050] To better understand the performance of the thermal radiation modulator of the present invention, the inventors provide the following analysis using silver as the material for the honeycomb metal metasurface layer and substrate, and PDMS (polydimethylsiloxane) as the thermal expansion layer. Alternatively, the metal can be gold, copper, or other materials, and the thermal expansion layer can also be made of PVP (polyvinyl pyrrolidone).

[0051] As attached Figure 4 The figure shows the absorption spectrum response of the thermal radiation modulator of the present invention in the solar radiation band (0.3-2 μm) and the "atmospheric window" band (8-13 μm) at different ambient temperatures. When in use, the thermal radiation modulator of the present invention is covered on an object. When the temperature inside the object changes from room temperature (e.g., 25°C) to a high temperature (e.g., 35°C), heat is transferred to the modulator. Due to the high thermal expansion coefficient (9.6×10-4K-1) of the modulator's PDMS material, the modulator expands and begins to absorb in the 8-13 μm band. According to Kirchhoff's radiation law, the modulator is now a radiation emitter in the atmospheric window band, radiating the heat inside the object through the atmospheric window to outer space, thereby lowering the temperature inside the object. When the temperature inside the object changes from a high temperature (e.g., 35°C) to room temperature (e.g., 25°C), the modulator is no longer a thermal radiation emitter. At this time, heat is no longer radiated to outer space through the atmospheric window, thereby maintaining the temperature of the object.

[0052] Furthermore, because the honeycomb structure's edges are disconnected, rising internal temperatures cause the PDMS material to expand, and the gaps between the disconnected edges gradually increase from zero. This causes the radiation modulator to be "on," radiating energy in the 8-13μm band, enabling cooling. Based on the expansion coefficient, at 35°C, the gaps are approximately 30nm, achieving near-perfect infrared absorption at a wavelength of 10.5μm.

[0053] When the internal temperature of the object drops to room temperature, due to the contraction of the PDMS material, the gaps at the disconnected positions of the honeycomb structure become 0. At this time, the modulator is in the "off" state and no longer radiates heat outward, thus achieving adaptive thermal radiation modulation. Figure 4 It can be seen that no matter whether the modulator is in the "on" (high temperature state) or "off" (room temperature state), the modulator exhibits extremely low absorption rate in the entire solar spectrum range (0.3-2μm), that is, the modulator does not absorb solar radiation energy. Therefore, the thermal radiation modulator in the present invention is suitable for both night and day.

[0054] In order to better understand the physical mechanism of absorption within the atmospheric window when the cooling function of the thermal radiation modulator is in the "on" state, the present invention also studies the effective impedance, electromagnetic field and current intensity distribution of the thermal radiation modulator.

[0055] As attached Figure 5 (a) shows the absorption spectrum of the thermal radiation modulator. When the radiation cooling function is in the "on" state, a near-perfect absorption peak is obtained at a wavelength of 10.5 μm.

[0056] As attached Figure 5 (b) shows the equivalent impedance of the thermal radiation modulator in the "on" state. The relationship between the effective impedance Z and the absorptivity of the thermal radiation modulator can be expressed as:

[0057]

[0058] where Z0 is the free-space impedance. Therefore, at a wavelength of 10.5 μm, the real and imaginary parts of the effective impedance, Re(Z), are close to 1 and 0, respectively, indicating near-perfect impedance matching between the thermal radiation modulator and free space. Consequently, the thermal radiation modulator proposed in this invention can achieve a near-100% absorptivity within the "atmospheric window," effectively radiating all thermal radiation within the atmospheric window wavelength band.

[0059] As shown in FIG6 , when the wavelength is 10.5 μm, the electric field distribution of the thermal radiation modulator in each structural cross section is in the cooling function “on” state.

[0060] As shown in FIG6(a), at the middle cross section of the honeycomb layer (xy plane), the electric field energy is mainly concentrated at the edges of the honeycomb metasurface and the central disconnections of each edge.

[0061] As shown in FIG6(b), at the middle cross section of the PDMS thermal expansion layer (xy plane), the electric field energy is mainly concentrated at the positions corresponding to the two sides of the central disconnection of each side of the honeycomb metasurface.

[0062] As shown in FIG6(c), at the interface between the PDMS thermal expansion layer and the Ag substrate layer (xy plane), the electric field energy is mainly concentrated at the positions corresponding to the two sides of the central disconnection of the honeycomb metasurface.

[0063] As can be seen from FIG. 6 (ac), the electric field energy is mainly concentrated at the position of the honeycomb structure, from which it can be analyzed that this is Fabry-Perot resonance (FPR).

[0064] Further analysis of the current intensity distribution of the thermal radiation modulator in the yz plane, as shown in Figure 6(d), reveals a clear surface current loop, confirming that the entire structure can be considered an FPR cavity. Specifically, the silver substrate and the honeycomb metasurface layer can be considered the two reflectors of the cavity. Multiple reflections of the incident wave in the FPR cavity produce coherent interference, ultimately achieving perfect absorption.

[0065] The present invention quantitatively analyzes the cooling performance of the proposed thermal radiation modulator, taking into account factors such as thermal radiation, convection, and conduction. The net cooling power of the thermal radiation modulator can be obtained by the following formula:

[0066] P cooling (T)=P rad (T)-P atm (T amb )-P sun -P cond+conv (2)

[0067] Among them, the power emitted by the thermal radiation modulator itself is:

[0068]

[0069] The incident radiation power from the atmosphere is:

[0070]

[0071] Solar radiation power absorbed by the structure:

[0072]

[0073] Non-radiative heat power of the structure due to conduction and convection:

[0074] P cond+conv =h cond+conv (T amb -T) (6)

[0075] in It represents the spectral radiance of a black body at temperature T. h is Planck's constant, k B is the Boltzmann constant, c is the speed of light, λ is the wavelength, h cond+conv is the heat transfer coefficient, T amb is the ambient temperature, I AM1.5 is the standard solar spectrum irradiance distribution intensity; ε(λ,θ)=1-t(λ) 1 / cosθ It indicates that the atmospheric emissivity is related to the light incident angle, where t(λ) represents the atmospheric transmittance.

[0076] To ensure the cooling effect of the thermal radiation modulator, the net cooling power must be greater than zero. Figure 1-3 Taking the structure shown as an example, when the structural parameters satisfy Px = 5196nm, Py = 9000nm, w = 150nm, h = 200nm, t1 = 150nm, t2 = 90nm, the high temperature in the atmospheric window is set to T = 310K, the wavelength range is 8-13μm, h = 6.626×10-34J·s, kB = 1.381×10-23J / K, and c = 2.998×108m / s.

[0077] The specific calculation process is as follows:

[0078] ①The power P radiated by the structure rad :

[0079]

[0080] in: because so In summary,

[0081]

[0082] The absorption rate data obtained from the FDTD simulation is imported into Matlab and the createFit function is used to fit ε S curve, and use the intergral function to integrate the above formula to obtain P rad =862.65W / m 2 .

[0083] ②Power P caused by atmospheric radiation absorption atm :

[0084]

[0085] in: is the local average water pressure.

[0086] According to Kirchhoff's radiation law, the absorption rate α S (θ,λ) equals the emissivity ε S (θ,λ), because so In summary,

[0087]

[0088] The absorption rate data obtained from the FDTD simulation is imported into Matlab and the createFit function is used to fit ε S curve, and use the intergral function to integrate the above formula to obtain P atm =499.16W / m 2 .

[0089] ③ Solar radiation power absorbed by the structure P sun :

[0090]

[0091] The standard I provided by ASTM AM1.5The data and the emissivity of the corresponding band calculated by FDTD are imported into Matlab, and the trapezoidal numerical integration is used to obtain P sun =154.71W / m 2 .

[0092] ④ Non-radiative heat power P of the structure cond+conv :

[0093] P cond+conv =h cond+conv (T amb -T) (12)

[0094] Where: T amb =294K,h cond+conv =2~6.5, we can get P cond+conv =104W / m 2 .

[0095] Summarizing the above calculation process, the power P radiated by the structure is rad , power P caused by atmospheric radiation absorption atm , the solar radiation power absorbed by the structure P sun and the non-radiative heat power P of the structure cond+conv Calculated as 862.65W / m 2 , 499.16W / m 2 , 154.71W / m 2 and 104W / m 2 Finally, the net cooling power P of the thermal radiation modulator is calculated cooling 104.78W / m 2 , which means that under this net cooling power, the thermal radiation modulator can cool down from 35°C to 25°C. The quantitative data show that the thermal radiation modulator has excellent radiative cooling performance.

[0096] Taking into account that the PDMS layer shrinks and expands due to changes in the object's temperature, which may cause deformation of the thermal radiation modulator, the present invention further analyzes the influence of different geometric parameters on the absorption performance when the radiation cooling function is "on".

[0097] As attached Figure 7 (a) shows the absorption spectra of a thermoradiative modulator with different honeycomb heights, h. A clear redshift in the absorption spectrum is observed as h varies from 150 nm to 300 nm in 50 nm intervals. The peak absorptivity for all four cases is greater than 90%, reaching its maximum at h = 300 nm.

[0098] As attached Figure 7(b) shows the absorption spectra of the honeycomb metasurface with different side widths w. When w increases from 120 nm to 210 nm in 30 nm increments, a red shift in the absorption peak is also observed. The peak absorptivity for all four cases is greater than 95%, reaching its maximum at w = 210 nm.

[0099] As attached Figure 7 As shown in (c), when the thickness t1 of the PDMS layer increases from 100 nm to 250 nm at intervals of 50 nm, a blue shift of the absorption peak is observed. At the same time, the peak absorption rates of the four cases are all greater than 85%. When t1 = 150 nm, the absorption rate reaches its maximum value.

[0100] As attached Figure 8 As shown, the preparation steps of a unit thermal radiation modulator are given as an example:

[0101] (1) As attached Figure 8 (a) A 150 nm thick PDMS film was deposited on a 90 nm thick Ag substrate by spin coating. The substrate size was P x =5274nm, P y =9120nm, thickness t2=90nm;

[0102] (2) As attached Figure 8 (b) Spin-coating a 200 nm thick positron beam resist ZEP-520 on the sample surface obtained in step (1);

[0103] (3) As attached Figure 8 (c) A honeycomb microstructure was etched on the ZEP-520 layer using electron beam lithography (EBL). The honeycomb structure had a thickness of h = 200 nm and a side width of w = 150 nm.

[0104] (4) As attached Figure 8 (d) depositing Ag into the honeycomb microstructure of step (3) by magnetron sputtering technology to form a metal metasurface with a honeycomb structure;

[0105] (5) As attached Figure 8 (e) The ZEP-520 coating was removed and the sample surface was cleaned to obtain a thermal radiation modulator with a honeycomb-structured metal supersurface layer, a PDMS thermal expansion layer, and an Ag substrate.

[0106] Those skilled in the art will appreciate that the spin coating method, electron beam lithography, magnetron sputtering technology, etc. used in the above-mentioned preparation process are merely examples, and other methods that can obtain the same structure are also feasible. Figure 9This is the array structure diagram of the thermal radiation modulator of the present invention, which is an array structure composed of multiple units of thermal radiation modulators. The sides of the honeycomb structure in the figure are disconnected at the midpoint. By cutting the array structure, a unit of thermal radiation modulator can be obtained. At this time, the side width of the honeycomb structure at the long side is 0.5w.

[0107] Regarding the application of the thermal radiation modulator of the present invention, it is large enough to cover the surface of grain storage warehouses, airport bridges at home and abroad, high-speed rail stations, public buildings, office buildings, power and communication cabinet facilities, petrochemical storage tanks, etc., and is expected to provide a practical solution for the development of modern energy-saving buildings.

[0108] The thermal radiation modulator of the present invention can also be covered on the surface of active optoelectronic devices such as light-emitting diodes and semiconductor lasers. As is well known, in precision optoelectronic devices, a certain surface of the semiconductor laser (i.e., the radiation source, which is the main source of heat generation) is usually bonded or welded to a heat-conducting substrate. The heat generated by the semiconductor laser is mainly conducted away through the substrate, thereby avoiding the performance degradation or even failure of the laser due to excessive temperature during operation. The other surfaces of the semiconductor laser are usually heat-exchanged with the air, which has a certain auxiliary heat dissipation effect, but the heat dissipation efficiency is extremely low. By setting the thermal radiation modulator of the present invention on the surface of the semiconductor laser in contact with the air, the heat generated by the laser can be emitted through the thermal radiation modulator in the 8-13μm band, thereby reducing the temperature of the laser and further ensuring the stable and efficient operation of the laser.

[0109] Similarly, a thermal radiation modulator can also be set on the surface of a module composed of active optoelectronic devices, such as a semiconductor laser and other components are packaged through a shell, and the thermal radiation modulator is set on the shell to assist in heat dissipation of the entire module.

[0110] The technical features of the above embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0111] The above embodiments merely illustrate several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that a person skilled in the art could make numerous variations and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application.

Claims

1. A dynamic adaptive thermal radiation modulator based on a metasurface, characterized by: The modulator comprises a metal supersurface layer at the top, a thermal expansion layer in the middle and a substrate at the bottom. The modulator can radiate heat from the object outward through the 8-13 μm band, thereby realizing dynamic adaptive regulation of the radiation process. The metal supersurface layer is a honeycomb structure. Each side of the honeycomb structure is a disconnected structure. The metal supersurface layer and the substrate are made of gold, silver or copper. The thermal expansion layer is made of polydimethylsiloxane or polyvinylpyrrolidone. The width of each side of the honeycomb structure is 120-210 nm, the thickness of the honeycomb structure is 150-300 nm, and the thickness of the thermal expansion layer is 150-300 nm.

2. The metasurface-based dynamic adaptive thermal radiation modulator according to claim 1, characterized in that: Each side of the honeycomb structure is broken at a midpoint.

3. A method for manufacturing a dynamic adaptive thermal radiation modulator based on a metasurface according to any one of claims 1-2, comprising the following steps: preparing a substrate; forming a thermal expansion layer on the substrate; forming an etching layer on the thermal expansion layer; Etching a microstructure inside the etching layer by etching technology; depositing metal into the microstructure to form a metal super surface layer; The etched layer is removed, the sample surface is cleaned, and a thermal radiation modulator is obtained.

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