Fleeting beam pattern scanning hologram microscope apparatus utilizing a scanning mirror and a transfer stage

Abstract

The present invention relates to a fly-by light beam pattern scanning hologram microscope apparatus using a scanning mirror and a transfer stage. The present invention provides a fly-by light beam pattern scanning hologram microscope apparatus, comprising: a scanning light beam generating unit modulating a phase of a first light beam separated from a light source to convert the first light beam into a first spherical wave through a first lens, converting a second light beam into a second spherical wave through a second lens, and then making the first spherical wave interfere with the second spherical wave to form a scanning light beam; a scanning unit including a scanning mirror for controlling the scanning light beam in a horizontal direction to transmit it to a projection unit and a transfer stage for moving an object in a vertical direction at a rear end of the projection unit; a projection unit including a plurality of lens systems and an objective lens and projecting the scanning light beam transmitted from the scanning unit on an object plane; and a light collecting unit for detecting a light beam that has passed through the objective lens again after fluorescing or reflecting from the object, wherein the scanning light beam projected on the object plane has different patterns according to a conical angle condition and a focal point position of each of the first spherical wave and the second spherical wave formed on the scanning mirror.

Description

TECHNICAL FIELD

[0001] The present application relates to a flying-over beam pattern scanning hologram microscope apparatus using a scanning mirror and a transfer stage, and more particularly, to a flying-over beam pattern scanning hologram microscope apparatus capable of implementing a high-resolution scanning hologram microscope at high speed. BACKGROUND

[0002] A conventional optical scanning hologram microscope forms a spatially distributed beam pattern having a Fresnel zone plate by using an interferometer, forms the formed beam pattern into a high-resolution Fresnel zone pattern on an object plane by an objective lens, projects the beam pattern on an object, and scans the object by mechanically moving an object plate on which the object is placed. A hologram of the object is obtained by collecting a light beam emitted from the object by fluorescence or reflection on a Fourier plane of a condenser lens.

[0003] However, in this conventional method, since the object plate is mechanically moved, the hologram acquisition speed is slow, and it is difficult to acquire a hologram of a fluid such as a living body.

[0004] A technology as a background of the present application is disclosed in Korean Patent Registration No. 1304695 (registered on September 6, 2013). SUMMARY

[0005] [PROBLEMS TO BE SOLVED BY THE INVENTION]

[0006] The present application aims to provide a flying-over beam pattern scanning hologram microscope apparatus using a scanning mirror and a transfer stage, which is capable of implementing a high-resolution scanning hologram microscope at high speed.

[0007] [TECHNICAL SOLUTION]

[0008] The present application provides a fly-by-beam pattern scanning hologram microscope device, which comprises: a scanning beam generation unit, which modulates the phase of a first light beam separated from a light source to convert the first light beam into a first spherical wave through a first lens, converts a second light beam into a second spherical wave through a second lens, and then makes the first spherical wave and the second spherical wave interfere with each other to form a scanning light beam; a scanning unit, which comprises a scanning mirror for controlling the incident scanning light beam in a horizontal direction to be transmitted to a projection unit, so as to control the scanning position of the scanning light beam on an object in horizontal and vertical directions, and a transfer stage for moving the object in a vertical direction at the back end of the projection unit; a projection unit, which comprises a plurality of lens systems and an objective lens, and projects the scanning light beam transmitted from the scanning unit on an object plane where the object is placed; and a light collection unit, which detects the light beam that passes through the objective lens again after being fluorescent or reflected from the object, wherein, according to the focal point position and the conical angle condition of each of the first spherical wave and the second spherical wave formed on the scanning mirror, the scanning light beam projected on the object plane has different patterns.

[0009] In addition, according to the focal point position and the conical angle condition of each of the first spherical wave and the second spherical wave formed on the scanning mirror, the scanning light beam projected on the object plane can be determined as one of the following interference structures: an interference structure between converging spherical waves and plane waves on the object plane (first pattern), an interference structure between diverging spherical waves and plane waves on the object plane (second pattern), an interference structure between two diverging spherical waves on the object plane (third pattern), and an interference structure between converging spherical waves and diverging spherical waves on the object plane (fourth pattern).

[0010] In addition, the projection unit can comprise a first lens system, a second lens system and the objective lens, which are sequentially arranged between the scanning unit and the object plane, and the entrance pupil of the first lens system can be located in the scanning mirror.

[0011] Further, when the condition is a first condition, the first spherical wave and the second spherical wave can become a plane wave and a converging spherical wave, respectively, with respect to the object plane, such that the scan beam projected on the object plane has an interference structure between the converging spherical wave and the plane wave on the object plane, and the first condition can be a condition that a focal point position of the first spherical wave is the same as a position of the entrance pupil of the first lens system, a focal point position of the second spherical wave is the same as or in front of the position of the entrance pupil of the first lens system, and a conic angle of the first spherical wave and a conic angle of the second spherical wave (θ1, θ2) satisfy a condition of θ2≤θ1.

[0012] Further, when the condition is a second condition, the first spherical wave and the second spherical wave can become a plane wave and a diverging spherical wave, respectively, with respect to the object plane, such that the scan beam projected on the object plane has an interference structure between the diverging spherical wave and the plane wave on the object plane, and the second condition can be a condition that a focal point position of the first spherical wave is the same as a position of the entrance pupil of the first lens system, a focal point position of the second spherical wave is the same as or behind the position of the entrance pupil of the first lens system, and a conic angle of the first spherical wave and a conic angle of the second spherical wave (θ1, θ2) satisfy a condition of θ2≤θ1≤2θ2.

[0013] Further, when the condition is a third condition, the first spherical wave and the second spherical wave can both become diverging spherical waves with respect to the object plane, such that the scan beam projected on the object plane has an interference structure between the two diverging spherical waves on the object plane, and the third condition can be a condition that a focal point position of the first spherical wave is behind the entrance pupil of the first lens system, a focal point position of the second spherical wave is behind the focal point position of the first spherical wave, and a conic angle of the first spherical wave and a conic angle of the second spherical wave (θ1, θ2) satisfy a condition of θ2≤θ1.

[0014] Further, when the condition is a fourth condition, the first spherical wave and the second spherical wave can become a converging spherical wave and a diverging spherical wave, respectively, with respect to the object plane, so that a scanning light beam projected on the object plane has an interference structure on the object surface between the converging spherical wave and the diverging spherical wave, and the fourth condition can be a condition in which a focal point position of the first spherical wave is in front of the entrance pupil of the first lens system, a focal point position of the second spherical wave is behind the entrance pupil of the first lens system, and a conical angle of the first spherical wave and a conical angle of the second spherical wave (θ1, θ2) satisfy θ2 < θ1, and satisfy the following equation:

[0015]

[0016] Further, in response to the first condition, the first lens system can transmit the received scanning light beam to the second lens system, and the first lens system and the second lens system can satisfy the conditions of the following equations.

[0017]

[0018]

[0019]

[0020]

[0021] where θ1 and θ2 denote conical angles (converging half angles) of the first spherical wave and the second spherical wave, θ S denotes a scanning angle at the scanning mirror of the scanning unit, denotes a receiving angle of the first lens system, f1 denotes an effective focal length of the first lens system, denotes a converging angle of the front focal plane of the first lens system, and r sph1 and r sph2 denote a radius of the first spherical wave and a radius of the second spherical wave on the entrance pupil plane of the first lens system.

[0022] Further, in response to the second condition, the first lens system can transmit the received scanning light beam to the second lens system, and the first lens system and the second lens system can satisfy the conditions of the following equations.

[0023]

[0024]

[0025]

[0026]

[0027] wherein θ1 and θ2 represent the cone angles (half angles of convergence) of the first spherical wave and the second spherical wave, θ S represents a scan angle at the scan mirror of the scan unit, represents a receiving angle of the first lens system, and f1 represents an effective focal length of the first lens system, represents a convergence angle of a front focal plane of the first lens system, and r sph1 and r sph2 represent radii of the first spherical wave and the second spherical wave on an entrance pupil plane of the first lens system.

[0028] Further, in response to the third condition, the first lens system can transmit the received scan beam to the second lens system, and the first lens system and the second lens system can satisfy the following formula:

[0029]

[0030]

[0031]

[0032]

[0033] wherein θ1 and θ2 represent the cone angles (half angles of convergence) of the first spherical wave and the second spherical wave, θ S represents a scan angle at the scan mirror of the scan unit, represents a receiving angle of the first lens system, and f1 represents an effective focal length of the first lens system, represents a convergence angle of a front focal plane of the first lens system, and r sph1 and r sph2 represent radii of the first spherical wave and the second spherical wave on an entrance pupil plane of the first lens system.

[0034] Further, in response to the fourth condition, the first lens system can transmit the received scan beam to the second lens system, and the first lens system and the second lens system can satisfy the following formula:

[0035]

[0036]

[0037]

[0038]

[0039] wherein θ1 and θ2 represent the cone angles (converging half-angles) of the first spherical wave and the second spherical wave, respectively, and θ S represents a scan angle at the scan mirror of the scan unit, represents a receiving angle of the first lens system, and f1 represents an effective focal length of the first lens system, represents a converging angle of a front focal plane of the first lens system, and r sph1 and r sph2 represent the radii of the first spherical wave and the second spherical wave on an entrance pupil plane of the first lens system.

[0040] Further, in response to the first condition, the radius of the plane wave corresponding to the first spherical wave on the object plane and the radius of the converging spherical wave corresponding to the second spherical wave on the object plane can both be less than or equal to the field of view radius of the objective lens, as shown in the following equation:

[0041]

[0042] wherein θ1 and θ2 represent the cone angles (converging half-angles) of the first spherical wave and the second spherical wave, respectively, and θ S represents a scan angle at the scan mirror of the scan unit, F obj represents a field of view radius of a front focal plane of the objective lens, f0 represents an effective focal length of the objective lens, and f1 and f2 represent effective focal lengths of the first lens system and the second lens system.

[0043] Further, in response to the second condition, the radius of the plane wave corresponding to the first spherical wave on the object plane and the radius of the diverging spherical wave corresponding to the second spherical wave on the object plane can both be less than or equal to the field of view radius of the objective lens, as shown in the following equation:

[0044]

[0045] wherein θ1 and θ2 represent the cone angles (converging half-angles) of the first spherical wave and the second spherical wave, respectively, and θ S represents a scan angle at the scan mirror of the scan unit, F obj represents a field of view radius of a front focal plane of the objective lens, f0 represents an effective focal length of the objective lens, and f1 and f2 represent effective focal lengths of the first lens system and the second lens system.

[0046] Further, in response to the third condition, the radius of the diverging spherical wave on the object plane corresponding to the first spherical wave and the radius of the diverging spherical wave on the object plane corresponding to the second spherical wave can both be less than or equal to a field of view radius of a front focal plane of the objective lens, as shown in the following equation:

[0047]

[0048] where θ1 and θ2 represent a conical angle (converging half angle) of the first spherical wave and the second spherical wave, θ S represents a scan angle at the scan mirror of the scan unit, F obj represents a field of view radius of a front focal plane of the objective lens, f0 represents an effective focal length of the objective lens, and f1 and f2 represent effective focal lengths of the first lens system and the second lens system.

[0049] Further, in response to the fourth condition, the radius of the converging spherical wave on the object plane corresponding to the first spherical wave and the radius of the diverging spherical wave on the object plane corresponding to the second spherical wave can both be less than or equal to a field of view radius of a front focal plane of the objective lens, as shown in the following equation:

[0050]

[0051] where θ1 and θ2 represent a conical angle (converging half angle) of the first spherical wave and the second spherical wave, θ S represents a scan angle at the scan mirror of the scan unit, F obj represents a field of view radius of a front focal plane of the objective lens, f0 represents an effective focal length of the objective lens, and f1 and f2 represent effective focal lengths of the first lens system and the second lens system.

[0052] Further, an optical invariant of the first lens system and the second lens system can be greater than or equal to an optical invariant of the objective lens, as shown in the following equation:

[0053] I1 ≥ I obj , I2 ≥ I obj ,

[0054] where I1, I2, and I obj represent optical invariants of the first lens system, the second lens system, and the objective lens, respectively.

[0055] Further, the light collecting unit can include a beam splitter disposed between the second lens system and the objective lens and transmitting a light beam passing through the second lens system to the objective lens and reflecting a light beam reflected from the object and passing through the objective lens to the outside, a third lens system receiving the light beam reflected by the beam splitter, and a photodetector detecting the light beam passing through the third lens system, wherein a size of a detection plane of the photodetector satisfies the following equation:

[0056] or

[0057] wherein F pd represents the size of the detection plane, θ S represents a scan angle at the scan mirror of the scan unit, f1 to f3 represent effective focal lengths of the first to third lens systems, f0 represents an effective focal length of the objective lens, and F0 represents a field radius of a front focal plane of the objective lens.

[0058] Further, the light collecting unit can include a beam splitter disposed between the first lens system and the second lens system and transmitting a light beam passing through the first lens system to the second lens system and reflecting a light beam reflected from the object and passing through the second lens system to the outside, a third lens system receiving the light beam reflected by the beam splitter, a fourth lens system receiving the light beam passing through the third lens system, and a photodetector detecting the light beam passing through the fourth lens system, wherein a size of a detection plane of the photodetector satisfies the following equation:

[0059] or

[0060] wherein F pd represents the size of the detection plane, θ S represents a scan angle at the scan mirror of the scan unit, f1 to f4 represent effective focal lengths of the first to fourth lens systems, f0 represents an effective focal length of the objective lens, and F0 represents a field radius of a front focal plane of the objective lens.

[0061] Further, the light collecting unit can include a beam splitter disposed between the second lens system and the objective lens and transmitting a light beam passing through the second lens system to the objective lens and reflecting a light beam reflected from the object and passing through the objective lens to the outside, a third lens system receiving a light beam reflected by the beam splitter, a fourth lens system receiving a light beam passing through the third lens system, and a photodetector detecting a light beam passing through the fourth lens system, wherein a spatial frequency converted light distribution of an image on the object plane of the objective lens is generated on a detection plane of the photodetector, and a size of the detection plane of the photodetector satisfies the following equation:

[0062] |0.1f4NA eff |≤|F pd |,

[0063] wherein F pd represents a size of the detection plane of the photodetector, f4 represents an effective focal length of the fourth lens system, and NA eff represents an effective numerical aperture of a light beam transmitted to the object plane, and is defined as a difference (NA eff = |NA1-NA2|) between a numerical aperture (NA1) of the first spherical wave and a numerical aperture (NA2) of the second spherical wave transmitted to the object plane.

[0064] Further, the light collecting unit can include a beam splitter disposed between the first lens system and the second lens system and transmitting a light beam passing through the first lens system to the second lens system and reflecting a light beam reflected from the object and passing through the objective lens to the outside, a third lens system receiving a light beam reflected by the beam splitter, and a photodetector detecting a light beam passing through the third lens system, wherein a spatial frequency converted light distribution of an image on the object plane of the objective lens is generated on a detection plane of the photodetector, and a size of the detection plane of the photodetector satisfies the following equation:

[0065] |0.1f3NA eff |≤|F pd |,

[0066] wherein F pd represents a size of the detection plane of the photodetector, f3 represents an effective focal length of the third lens system, and NA effrepresents an effective numerical aperture of a light beam transmitted to the object plane, and is defined as a difference (|NA eff -|NA1-NA2|) between a numerical aperture (NA1) of the first spherical wave and a numerical aperture (NA2) of the second spherical wave, the first spherical wave and the second spherical wave being transmitted to the object plane.

[0067] [Advantages]

[0068] According to the present application, a high-resolution Fresnel zone pattern is formed on an objective lens surface by an objective lens as a scanning beam pattern, and a light beam reflected from an object is imaged to a detection plane of a photodetector by the objective lens while performing a fly-by scan of the pattern fly-by an object, thereby realizing a high-resolution scanning holography microscope at high speed. BRIEF DESCRIPTION OF DRAWINGS

[0069] Figure 1 is a diagram showing a fly-by beam pattern scanning holography microscope apparatus according to a first embodiment of the present application.

[0070] Figure 2 is a diagram showing a first spherical wave and a second spherical wave generation condition of a scanning beam generation unit for forming an interference structure on an object plane according to Figure 1 CASE1.

[0071] Figure 3A and Figure 3B are diagrams showing modeling of a lens system as a general optical system and an aplanatic optical system, respectively.

[0072] Figure 4 is a diagram showing a fly-by beam pattern scanning holography microscope apparatus according to a second embodiment of the present application.

[0073] Figure 5 is a diagram showing a first spherical wave and a second spherical wave generation condition of a scanning beam generation unit for forming an interference structure on an object plane according to Figure 4 CASE2.

[0074] Figure 6 is a diagram showing a fly-by beam pattern scanning holography microscope apparatus according to a third embodiment of the present application.

[0075] Figure 7 is a diagram showing a first spherical wave and a second spherical wave generation condition of a scanning beam generation unit for forming an interference structure on an object plane according to Figure 6 CASE3.

[0076] Figure 8 is a diagram showing a fly-by beam pattern scanning holography microscope apparatus according to a fourth embodiment of the present application.

[0077] Figure 9 is a diagram showing first and second spherical wave generation conditions of a scanning beam generation unit for forming an interference structure on an object plane according to Figure 8

[0078] Figures 10 to 12 is a diagram showing a modification example of the light collecting unit shown in Figure 1 DETAILED DESCRIPTION

[0079] Hereinafter, embodiments of the present application will be described in detail with reference to the accompanying drawings so that those skilled in the art to which the present application pertains can easily practice the present application. However, the present application can be implemented in various different forms and is not limited to the embodiments described herein. In order to clearly describe the present application, portions unrelated to the description are omitted from the accompanying drawings, and like parts are assigned like reference numerals throughout the specification.

[0080] It will be understood that when a part is referred to as being "connected to" another part, it can be "directly connected to" the other part or "electrically connected to" the other part with a part in between. It will be understood that the terms "comprise", "include" or "have", as used herein, specify the presence of stated elements but do not preclude the presence or addition of one or more other elements.

[0081] Hereinafter, embodiments of the present application will be described in detail with reference to the accompanying drawings so that those skilled in the art to which the present application pertains can easily practice the present application. However, the present application can be implemented in various different forms and is not limited to the embodiments described herein. In order to clearly describe the present application, portions unrelated to the description are omitted from the accompanying drawings, and like parts are assigned like reference numerals throughout the specification.

[0082] It will be understood that when a part is referred to as being "connected to" another part, it can be "directly connected to" the other part or "electrically connected to" the other part with a part in between. It will be understood that the terms "comprise", "include" or "have", as used herein, specify the presence of stated elements but do not preclude the presence or addition of one or more other elements.

[0083] The present application relates to a fly-by-beam pattern scanning hologram microscope device, and proposes an optical system structure that projects a light beam generated by a scanning beam generation unit on an object to be scanned, collects light reflected or fluorescently emitted from the object, and transmits the collected light to a photodetector.

[0084] ​​According to the present application, a high-resolution Fresnel zone pattern is formed on an object plane by an objective lens as a scanning beam pattern, the pattern performs a fly-by scan in which the pattern flies over an object, a light beam that is reflected or emitted again from the object irradiated with the scanning beam pattern by the objective lens is imaged to a detection plane of a photodetector, thereby forming an image of the object to be scanned, and the light intensity of the image on the detection plane of the photodetector is spatially condensed.

[0085] The present application mainly includes a first embodiment CASE 1 to a fourth embodiment CASE 4, and each of the embodiments is classified according to the shape of a light beam entering an object plane (a plane on which an object is placed).

[0086] In the first embodiment CASE 1 and the second embodiment CASE 2, a spherical wave and a plane wave interfere with each other and enter the object plane. However, in the first embodiment, a scanning beam formed by a converging spherical wave and a plane wave is applied to the object plane, and in the second embodiment, a scanning beam formed by a diverging spherical wave and a plane wave is applied to the object plane.

[0087] In the third embodiment CASE 3 and the fourth embodiment CASE 4, a spherical wave and a spherical wave interfere with each other and enter the object plane. However, in the third embodiment, a scanning beam formed by two diverging spherical waves is applied to the object plane, and in the fourth embodiment, a scanning beam formed by a converging spherical wave and a diverging plane wave is applied to the object plane. The four embodiments can be differently determined according to first spherical wave and second spherical wave generation conditions in a scanning beam generation unit.

[0088] Hereinafter, a fly-by beam pattern scanning hologram microscope apparatus according to embodiments of the present application will be described in more detail with reference to the accompanying drawings.

[0089] Figure 1 is a view showing a fly-by beam pattern scanning hologram microscope apparatus according to a first embodiment of the present application.

[0090] As Figure 1 shown, a fly-by beam pattern scanning hologram microscope apparatus 100 according to a first embodiment of the present application mainly includes a scanning beam generation unit 110, a scanning unit 120, a projection unit 130, and a light collection unit 140. This basic structure is also applied to the second to fourth embodiments.

[0091] First, the scanning beam generation unit 110 frequency-shifts a first light beam among first and second light beams split by a light source to convert the first light beam into a first spherical wave through a first lens 115, and converts a second light beam into a second spherical wave through a second lens 116, and interferes the first and second spherical waves to form a scanning beam.

[0092] The scanning beam generating unit 110 uses a Mach-Zehnder interferometer structure that generates a first spherical wave and a second spherical wave by splitting a light source into a first light beam and a second light beam, and then combining the generated two light beams again.

[0093] The scanning beam generating unit 110 includes a light source, a first mirror M1, a first beam splitter 111, a phase modulator 112, a second mirror M2 and a third mirror M3, a first beam expander 113 and a second beam expander 114, a first lens 115 and a second lens 116, and an interference device 117.

[0094] The light source is a portion that generates electromagnetic waves. The light source can include various devices, such as a laser generator capable of generating electromagnetic waves, a light emitting diode (LED), and a device for generating a low-coherence light beam such as halogen light having a short coherence length. Hereinafter, the light source implemented as a laser generator will be taken as a representative example.

[0095] The light beam output from the light source is transmitted to the first mirror M1, reflected, and then input to the first beam splitter 111.

[0096] The first beam splitter 111 splits the incident light beam into a first light beam and a second light beam, transmits the first light beam to the phase modulation device 112 (acousto-optic modulator), and transmits the second light beam to the third mirror M3. That is, the light beam along the first light beam path in the first beam splitter 111 is transmitted to the phase modulation device 112, and the light beam along the second light beam path is transmitted to the third mirror M3.

[0097] Here, the first beam splitter 111 can include a fiber coupler, a beam splitter, a geometric phase lens, etc., and can be implemented by a way of transmitting a light beam to the outside by guiding a free space. Here, in the case of using a device capable of in-line splitting of a light beam such as a geometric phase lens, the light beam can be split into a first light beam and a second light beam in-line. Hereinafter, it is assumed that each beam splitter is implemented as a beam splitter.

[0098] The phase modulator 112 frequency-shifts the first light beam, and transmits the frequency-shifted first light beam to the second mirror M2. The phase modulation unit 112 can offset the frequency of the first light beam by using a frequency generated by a function generator (not illustrated), and transmit the frequency-shifted first light beam to the second mirror M2. Here, the phase modulation device 112 can be implemented as various types of modulators that modulate the phase of light according to an electrical signal, including an acousto-optic modulator and an electro-optic modulator.

[0099] The first light beam reflected from the second mirror M2 is expanded by the first light beam expander 113, and then transmitted to the first lens 115. The second light beam reflected from the third mirror M3 is expanded by the second light beam expander 114, and then transmitted to the second lens 116. The light beam expanders can be implemented as collimators.

[0100] The first lens 115 is located between the first light beam expander 113 and the interference device 117, converts the expanded first light beam into a first spherical wave, and transmits the first spherical wave to the interference device 117. That is, the first lens 115 modulates the spatial distribution of the first light beam to generate the first spherical wave from the first light beam.

[0101] The second lens 116 is located between the second light beam expander 114 and the interference device 117, converts the expanded second light beam into a second spherical wave, and transmits the second spherical wave to the interference device 117. That is, the second lens 116 modulates the spatial distribution of the second light beam to generate the second spherical wave from the second light beam.

[0102] The generated first spherical wave and second spherical wave interfere with each other when passing through the interference device 117, and are transmitted to the scanning unit 120. The interference device 117 can be implemented as a beam splitter.

[0103] The interference device 117 overlaps and interferes the first light beam (first spherical wave) passing through the first lens 115 and the second light beam (second spherical wave) passing through the second lens 116, and forms a scan light beam having a Fresnel zone pattern as an interference pattern.

[0104] As described above, the scan light beam generation unit 110 converts the first light beam and the second light beam split from the light source into the first spherical wave and the second spherical wave, superimposes the first spherical wave and the second spherical wave through the interference device 117 to form a scan light beam, and transmits the formed scan light beam to the scanning unit 120.

[0105] Next, the configuration of the scanning unit will be described in more detail. Figure 1 The configuration of the scanning unit shown.

[0106] The interference pattern (scan light beam) generated between the first spherical wave and the second spherical wave generated by the scan light beam generation unit 110 is incident on the scanning unit 120. The light beam incident on the scanning unit 120 is transmitted to the first lens system 131 of the projection unit 130 via the scanning mirror 121 (x-scan mirror).

[0107] The scanning unit 120 includes a scanning mirror 121 installed at the rear end of the scanning beam generating unit 111 to scan the object in the x direction and a transfer stage 122 installed at the rear end of the projection unit 130 to scan the object in the y direction, thereby controlling the scanning position of the scanning beam with respect to the object in the horizontal and vertical directions.

[0108] The scanning mirror 121 controls the scanning beam incident from the scanning beam generating unit 110 in the horizontal direction and transmits the scanning beam to the projection unit 130. The transfer stage 122 also enables y-direction scanning of the object by the scanning beam by directly moving the object receiving the scanning beam incident from the rear end of the projection unit 130 in the vertical direction.

[0109] The transfer stage 122 is implemented so that an object plate on which the object is placed is movable in the y-axis direction and corresponds to the movable object plate. The transfer stage 122 is physically separated from the scanning mirror 121 but corresponds to a means for controlling the scanning position of the beam with respect to the object. Accordingly, the transfer stage 122 is included as a component of the scanning unit 120 together with the scanning mirror 121.

[0110] As described above, the scanning unit 120 controls the scanning beam based on the object in the horizontal direction (x direction) and the vertical direction (y direction) by using the scanning mirror 121 and the transfer stage 122.

[0111] In an embodiment of the present invention, the scanning unit 120 uses a mirror scanner. The mirror scanner has the x scanning mirror 121 that scans the object in the x direction (left-right direction) about the y axis. In the case of the present invention, the scanning unit 120 is not limited to the mirror scanner and can use a similar means or other known scanning means.

[0112] The scanning unit 120 operates by receiving a scanning control signal from a scanning control unit (not shown) within an electronic processing unit (not shown). The scanning control unit (not shown) generates a scanning control signal for controlling the scanning position of the scanning unit 120. Here, the scanning control signal can include a horizontal scanning signal and a vertical scanning signal for controlling the scanning mirror 121 and the transfer stage 122 in the horizontal and vertical directions, respectively.

[0113] At this time, the horizontal scanning signal is a signal for sequentially moving the scanning position in the horizontal direction (x-axis direction) by a preset distance unit, and has a period T for scanning movement by an arbitrary distance unit. The vertical scanning signal, which is a signal for moving the transfer stage 122 in the vertical direction, is a transfer stage control signal that can be used for horizontal scanning operation for the next y position when the horizontal scanning operation in the x-axis direction for an arbitrary y position is completed, and has a period larger than that of the horizontal scanning signal.

[0114] In response to the control signal, the optical axis of the first spherical wave and the second spherical wave rotates according to the rotation of the scanning mirror 121, and the scanning beam pattern having the rotated optical axis is transmitted to the first lens system 131 of the projection unit 130.

[0115] Here, the half angle between the non-rotating reference optical axis and the rotating optical axis is referred to as a scanning angle (θ S ). For example, it can refer to the angle by which the scanning mirror 121 rotates in a state in which the surface of the scanning mirror 121 faces the z-axis direction.

[0116] The scanning unit 120 transmits the interference beam (scanning beam) between the first spherical wave and the second spherical wave to the projection unit 130 by using the scanning mirror 121, and inputs the interference beam to the first lens system 131.

[0117] The projection unit 130 includes the first lens system 131, the second lens system 132, and the objective lens 133, which are sequentially disposed between the scanning unit 120 and the object plane, and projects the scanning beam received from the scanning unit 120 on the object plane where the object is located.

[0118] The projection unit 130 forms a high-resolution Fresnel zone pattern as the scanning beam pattern on the object plane through the objective lens 133, and performs fly-by scanning in which the pattern flies over the object.

[0119] The light collection unit 140 detects a light beam that passes through the objective lens 133 again after emitting fluorescence or being reflected from the object irradiated with the scanning beam. At this time, the light collection unit 140 includes the third lens system 142 and the photodetector 143. The light collection unit 140 forms an image of the object by imaging the light beam reflected from the object on the detection plane of the photodetector 143 through the objective lens 133, and spatially integrates and collects the light intensity of the image imaged on the detection plane. Here, of course, the detection plane can be located not only on the focal plane of the imaged image but also on the defocus plane of the imaged image.

[0120] The light collection unit 140 can collect and detect the light intensity on the detection plane of the photodetector 143 by generating an electrical signal proportional to the total amount of light. The structure of the light collection unit 140 can have various embodiments. As shown in FIG. 1, the light collection unit 140 can include a third lens system 142 and a photodetector 143.Figure 1 As shown, the light collecting unit 140 can be configured by including a second beam splitter 141 disposed between the second lens system 132 and the objective lens 133, and a third lens system 142 and a photodetector 143 disposed behind the third lens system 142.

[0121] A light beam emitted as fluorescence or reflected from the object enters the second beam splitter 141 through the objective lens 133, and the light beam is reflected by the second beam splitter 141 and transmitted to the third lens system 142 and the photodetector 143 located at the upper end.

[0122] More different structures of the light collecting unit 140 will be described again below. In addition, various structures of the light collecting unit can be applied to all of the first to fourth embodiments.

[0123] Hereinafter, the first to fourth embodiments of the present application will be described in detail with reference to Figure 1 , Figure 4 , Figure 6 and Figure 8 .

[0124] In the embodiments of the present application, the pattern of the scanning light beam projected on the object plane varies depending on the focal point positions and the conical angle conditions of the first spherical wave and the second spherical wave formed on the scanning mirror 121. Accordingly, the present application is classified into the first to fourth embodiments.

[0125] For the first to fourth embodiments Figure 2 , Figure 5 , Figure 7 and Figure 9 , the generation conditions of the first spherical wave and the second spherical wave formed on the scanning mirror 121 are different. Accordingly, the shape of the light beam actually entering the object plane also varies Figure 1 , Figure 4 , Figure 6 and Figure 8 .

[0126] In the case of the first embodiment of Figure 1 , converging spherical waves and plane waves enter the object plane. In the case of the second embodiment of Figure 4 , diverging spherical waves and plane waves enter the object plane. In the case of the third embodiment of Figure 6 , two diverging spherical waves enter the object plane. In the case of the fourth embodiment of Figure 8 , converging spherical waves and diverging spherical waves enter the object plane.

[0127] Therefore, in the embodiment of the present application, it can be seen that the scanning light beam projected on the object plane is determined as one of the four interference structures according to the focal position and the conical angle condition of the first spherical wave and the second spherical wave formed on the scanning mirror 121.

[0128] Specifically, the first interference structure projected on the object plane is an interference structure between converging spherical waves and plane waves with respect to the object plane (first pattern; Figure 1 of CASE 1), and the second interference structure is an interference structure between diverging spherical waves and plane waves (second pattern; Figure 4 of CASE 2). In addition, the third interference structure is an interference structure between two diverging spherical waves (third pattern; Figure 6 of CASE 3), and the fourth interference structure is an interference structure between converging spherical waves and diverging spherical waves (fourth pattern; refer to Figure 8 of CASE 4).

[0129] Next, the spherical wave generation conditions of the scanning light beam generation unit 110 for realizing CASE 1 to CASE 4 will be described in detail.

[0130] [CASE 1] Interference pattern between converging spherical waves and plane waves

[0131] Figure 2 is a diagram showing the first spherical wave and the second spherical wave generation conditions of the scanning light beam generation unit for forming an interference structure on the object plane according to CASE 1 of Figure 1

[0132] In the first embodiment (CASE 1), the first spherical wave and the second spherical wave become plane waves and converging spherical waves, respectively, with respect to the object plane, and the scanning light beam projected on the object plane has an interference structure between converging spherical waves and plane waves on the object plane.

[0133] As described above, in the case of CASE 1, the interference light beam pattern of the converging spherical waves and the plane waves with respect to the object plane used as the structure of the scanning light beam pattern of the object scanning has a resolution equal to or lower than the resolution of the objective lens, but increases the depth region on which the object can be located on the object plane.

[0134] To this end, the scanning light beam generation unit 110 generates the first spherical wave and the second spherical wave under the focal length and conical angle conditions shown in Figure 2

[0135] Refer to Figure 2 ​​In the CASE 1, the focal point position of the first spherical wave is the same as the position of the entrance pupil of the first lens system 131, and the focal point position of the second spherical wave is the same as the position of the entrance pupil of the first lens system 131 or is located at the front end of the first lens system 131. Further, at the same time, the CASE 1 has a condition that the conical angle θ1 of the first spherical wave is equal to or greater than the conical angle θ2 of the second spherical wave as shown below.

[0136] [Formula 1]

[0137] θ1≥θ2

[0138] Here, of course, the focal point position and the conical angle of each of the first spherical wave and the second spherical wave can be determined according to the specifications such as the focal length of the first lens 115 and the second lens 116 included in the scanning beam generating unit 110.

[0139] The projection unit 130 transmits the first spherical wave and the second spherical wave of which the optical axis is rotated, which are received from the scanning unit 120, to the objective lens 133, and the objective lens 133 transmits the received first spherical wave and the second spherical wave to the objective plane of the objective lens 133.

[0140] At this time, the entrance pupil of the first lens system 131 is located on the scanning plane of the scanning mirror 121.

[0141] The scanning beam formed by the two spherical waves is transmitted to the first lens system 131 through the scanning mirror 121. The first lens system 131 transmits the received scanning beam to the second lens system 132. Here, the entrance pupil of the second lens system 132 is preferably located at the same position as the exit pupil of the first lens system 131. The second lens system 132 transmits the scanning beam to the objective lens 133. The objective lens 133 projects the received scanning beam on the object plane. At this time, the position of the entrance pupil of the objective lens 133 is preferably located at the same position as the exit pupil of the second lens system 132.

[0142] The first light beam converted into a plane wave by the first lens system 131 and the second lens system 132 having the above-described structure on the object plane on which the object is placed and the second light beam converted into a converging spherical wave overlap. At this time, according to the scanning of the scanning unit 120, the Fresnel zone plate pattern as an interference pattern formed by overlapping the first light beam which is a plane wave and the second light beam which is a spherical wave scans the object while flying over the object.

[0143] Here, the range of the plane wave on the object plane is preferably greater than the range of the converging spherical wave to prevent deterioration of resolution. For this, the conical angle θ1 of the first spherical wave in the entrance pupil of the first lens system 131 is greater than or equal to the conical angle θ2 of the second spherical wave (θ1≥θ2).

[0144] In addition to Figure 2In addition to the focal point positions and the conical angle conditions (first conditions) of the first and second spherical waves shown, it is preferable that the first and second lens systems 131 and 132 satisfy the following Equation 2 as their subordinate conditions.

[0145] [Equation 2]

[0146]

[0147]

[0148]

[0149]

[0150] Here, θ1 and θ2 represent the conical angles (half angles of convergence) of the first and second spherical waves, and θ S represents the scanning angle at the scanning mirror 121 of the scanning unit 120, represents the acceptance angle of the first lens system, and f1 represents the effective focal length of the first lens system 131, represents the half angle of convergence of the front focal plane of the first lens system 131, and r sph1 and r sph2 represent the radii of the first and second spherical waves on the entrance pupil plane of the first lens system 131.

[0151] Here, the range of the plane waves and the spherical waves projected on the object plane can be limited according to the size of the entrance pupil of the first lens system 131 and its acceptance angle. In order to prevent the resolution of the hologram and the degradation of the field of view from being lowered due to the limitation, the scanning angle θ S of the scanning mirror 121 of the scanning unit 120, the half angles of convergence θ1 and θ2 of the respective spherical waves, and the radii r sph1 and r sph2 of the respective spherical waves on the entrance pupil plane of the first lens system 131 are preferably satisfied.

[0152] Here, the definitions of the parameters constituting the lens system can refer to the following FIG. 3. Each optical system included in the embodiments of the present application can be modeled in the form of Figure 3A or Figure 3B

[0153] Figure 3A and Figure 3B are diagrams respectively showing modeling of the lens system as a general optical system and an aplanatic optical system.

[0154] First, in the case of Figure 3A , the lens system is modeled with the principal point and the principal plane of the general optical system, and Figure 3B ​The principal point and the principal plane of the aplanatic optical system are modeled.

[0155] When the principal point and the principal plane of the first lens system 131 and the second lens system 132 are modeled, a radius of an entrance pupil of the first lens system 131 is defined as r1, an effective focal length is defined as f1, and a receiving angle is defined as Figure 3A or Figure 3B When the principal point and the principal plane of the first lens system 131 and the second lens system 132 are modeled, a radius of an entrance pupil of the first lens system 131 is defined as r1, an effective focal length is defined as f1, and a receiving angle is defined as A field radius of a front focal plane of the first lens system 131 is defined as F1 and a convergence angle is defined as

[0156] Similarly, a radius of an entrance pupil of the second lens system 132 is defined as r2, an effective focal length is defined as f2, and a receiving angle is defined as A field radius of a front focal plane of the second lens system 132 is defined as F2 and a convergence angle is defined as

[0157] The first lens system 131 transmits the first spherical wave and the second spherical wave received from the scanning unit 120 to the second lens system 132. At this time, in order to transmit the first spherical wave and the second spherical wave without phase distortion, the entrance pupil of the second lens system 132 is preferably at the same position as the exit pupil of the first lens system 131.

[0158] The second lens system 132 transmits the first spherical wave and the second spherical wave received from the first lens system 131 to the objective lens 133 through the second beam splitter 141. At this time, in order to transmit the first spherical wave and the second spherical wave without phase distortion and to make the first spherical wave incident on the object plane of the objective lens as parallel light, the entrance pupil of the objective lens 133 is preferably at the same position as the exit pupil of the second lens system 132.

[0159] Here, a radius of the entrance pupil of the objective lens 133 can be defined as r0, an effective focal length can be defined as f0, and a receiving angle can be defined as A field radius of a front focal plane of the objective lens 133 is defined as F0 and a convergence angle can be defined as

[0160] The first spherical wave passing through the first lens system 131, the second lens system 132, and the objective lens 133 becomes a plane wave on the object plane of the objective lens 133. At this time, in order to prevent a decrease in resolution due to scanning, the radius of the plane wave is preferably equal to or less than the field radius of the objective lens 133, and this can be expressed as Equation 3 below.

[0161] [Equation 3]

[0162]

[0163] Here, θ1 denotes a converging half angle of the first spherical wave, and θ S denotes a scan angle, F obj denotes a field radius of a front focal plane of the objective lens 133, f0 denotes an effective focal length of the objective lens 133, and f1 and f2 denote effective focal lengths of the first lens system and the second lens system.

[0164] In addition, the second spherical wave passing through the first lens system 131, the second lens system 132, and the objective lens 133 becomes a converging spherical wave on an object plane of the objective lens 133. At this time, in order to prevent a resolution decrease due to scanning, a radius of the converging spherical wave on the object plane is preferably equal to or smaller than a field radius of the objective lens 133, and this can be expressed as the following Equation 4.

[0165] [Equation 4]

[0166]

[0167] Here, θ2 denotes a converging half angle of the second spherical wave, and the remaining parameters are the same as in Equation 3 described above.

[0168] As described above, in order to achieve CASE 1, the conditions of Equations 3 and 4 must be satisfied together with the condition of Equation 2.

[0169] That is, both a radius of a 'plane wave' on the object plane corresponding to the first spherical wave and a radius of a 'converging spherical wave' on the object plane corresponding to the second spherical wave must be smaller than or equal to the field radius F obj of the objective lens 133.

[0170] Here, preferably, the first lens system 131 and the second lens system 132 further satisfy the condition of the following Equation 5, that is, optical invariant of the first lens system 131 and the second lens system 132 is greater than or equal to optical invariant of the objective lens 133, so as to transmit a scan beam matching a resolution and a view angle of the objective lens 133 the most.

[0171] [Equation 5]

[0172] I1 ≥ I obj , I2 ≥ I obj

[0173] Here, I1, I2, and I obj denote optical invariants of the first lens system 131, the second lens system 132, and the objective lens 133, respectively.

[0174] At this time, when the lens 131, the lens 132, and the lens 133 are each a lens model according to the first primary approximation, I obj= r0 tan θ0 = F0 tan α0, in the case of the paraxial approximation model, I obj = r0 θ0 = F0 α0, and in the case of the aplanatic lens system, I obj = r0 sin θ0 = F0 sin α0. Here, it is assumed that the lens system exists in a free space, but when the lens system exists in a medium having a refractive index of n, the optical invariant is n times.

[0175] [CASE 2] Interference pattern between diverging spherical wave and plane wave

[0176] Figure 4 is a diagram illustrating a fly-by-beam pattern scanning hologram microscope apparatus according to a second embodiment of the present application, and Figure 5 is a diagram illustrating a first spherical wave and a second spherical wave generation condition of a scanning beam generation unit for forming an interference structure on an object plane according to Figure 4 CASE 2 of the second embodiment of the present application.

[0177] As illustrated in Figure 4 , the fly-by-beam pattern scanning hologram microscope apparatus 200 according to the second embodiment of the present application mainly includes a scanning beam generation unit 210, a scanning unit 120, a projection unit 130, and a light collection unit 140. Redundant explanations of components denoted by the same reference numerals as those of the first embodiment will be omitted. Figure 1

[0178] As described above, in the case of the second embodiment, the basic structure of the apparatus is the same as that of the first embodiment, but the generated scanning beam pattern is different from that of the first embodiment. That is, the conditions of the first spherical wave and the second spherical wave obtained by the first lens 215 and the second lens 216 of the scanning beam generation unit 210 are different, and the principle is as follows.

[0179] In the second embodiment (CASE 2), the first spherical wave and the second spherical wave become a plane wave and a diverging spherical wave, respectively, with respect to the object plane, and the scanning beam projected on the object plane has an interference structure between the diverging spherical wave and the plane wave on the object plane.

[0180] As described above, in the case of CASE 2, the resolution of the structure of the scanning beam pattern used for the object scanning is equal to or higher than that of the objective lens, using the pattern of the interference beam of the diverging spherical wave and the plane wave with respect to the object plane.

[0181] To this end, the scanning beam generation unit 210 generates the first spherical wave and the second spherical wave under the focal length and conical angle conditions as illustrated in Figure 5 ​​

[0182] In the case of CASE 1, the focal point position of the first spherical wave is the same as the position of the entrance pupil of the first lens system 131, and the focal point position of the second spherical wave is longer than the focal point position of the first spherical wave so as to be located at the same position as the entrance pupil of the first lens system 131 or behind the entrance pupil of the first lens system 131. Meanwhile, the conical angles θ1 and θ2 of the first spherical wave and the second spherical wave satisfy θ1≥θ2. Figure 5

[0183] The scan beam formed by the two spherical waves is transmitted to the first lens system 131 by the scanning unit 120. The first lens system 131 transmits the received scan beam to the second lens system 132. The entrance pupil of the second lens system 132 is located at the same position as the exit pupil of the first lens system 131. The second lens system 132 transmits the scan beam to the objective lens 133. The objective lens 133 projects the received scan beam on the object plane. At this time, the position of the entrance pupil of the objective lens 133 is located at the same position as the exit pupil of the second lens system 132.

[0184] The first light beam converted into a plane wave and the second light beam converted into a divergent spherical wave by the first lens system 131 and the second lens system 132 having the above-described structure overlap on the object plane on which the object is placed. At this time, according to the scanning of the scan mirror, the Fresnel zone plate pattern in which the interference pattern is formed by overlapping the first light beam as a plane wave and the second light beam as a spherical wave scans the object while flying over the object.

[0185] Here, in order to prevent resolution degradation, the range of the plane wave as the first light beam on the object plane is preferably greater than the range of the divergent spherical wave. For this reason, as in Equation 1 described above, it is preferable to satisfy the condition that the conical angle θ1 of the first spherical wave is equal to or greater than the conical angle θ2 of the second spherical wave.

[0186] The remaining conditions (Equations 2 to 5) of the second embodiment (CASE 2) are applied in the same manner as in the first embodiment (CASE 1).

[0187] However, in the second embodiment, the first spherical wave passing through the first lens system 131, the second lens system 132, and the objective lens 133 becomes a plane wave on the object plane of the objective lens 133, and the second spherical wave passing through the first lens system 131, the second lens system 132, and the objective lens 133 becomes a divergent spherical wave on the object plane of the objective lens 133.

[0188] Therefore, in the case of the second embodiment, Equations 3 and 4 mean that the radius of the ‘plane wave’ on the object plane corresponding to the first spherical wave and the radius of the ‘divergent spherical wave’ on the object plane corresponding to the second spherical wave must both be less than or equal to the field of view radius F of the objective lens 133.​obj .

[0189] [CASE 3] Interference pattern between diverging spherical waves and diverging spherical waves

[0190] Figure 6 is a diagram showing a fly-by-beam pattern scanning hologram microscope apparatus according to a third embodiment of the present application, and Figure 7 is a diagram showing a first spherical wave and a second spherical wave generation condition of a scanning beam generation unit for forming an interference structure on an object plane according to Figure 6 CASE 3.

[0191] As shown in Figure 6 , a fly-by-beam pattern scanning hologram microscope apparatus 300 according to a third embodiment of the present application mainly includes a scanning beam generation unit 310, a scanning unit 120, a projection unit 130, and a light collection unit 140. Redundant explanations of components denoted by the same reference numerals as those of the first embodiment will be omitted. Figure 1

[0192] As described above, in the case of the third embodiment, the basic structure of the apparatus is the same as that of the first embodiment, but the generated scanning beam pattern is different from that of the first embodiment. That is, the conditions of the first spherical wave and the second spherical wave obtained by the first lens 315 and the second lens 316 of the scanning beam generation unit 310 are different, and the principle is as follows.

[0193] In the third embodiment (CASE 3), both the first spherical wave and the second spherical wave become diverging spherical waves with respect to the object plane, and the scanning beam projected on the object plane has an interference structure between the two diverging spherical waves on the object plane.

[0194] As described above, in the case of CASE 3, the pattern of the interference beam of the diverging spherical waves with respect to the object plane is used as a characteristic of the structure of the scanning beam pattern for object scanning, and the depth of field is increased.

[0195] To this end, the scanning beam generation unit 310 generates the first spherical wave and the second spherical wave under the focal length and conical angle conditions shown in Figure 7

[0196] In the case of Figure 7 , the focal point position of the first spherical wave is located behind the entrance pupil of the first lens system 131, and the focal point position of the second spherical wave is longer than that of the first spherical wave and is located further behind the focal point position of the first spherical wave. At the same time, the conical angle θ1 of the first spherical wave and the conical angle θ2 of the second spherical wave have a condition satisfying θ1≥θ2.

[0197] ​​The scanning beams formed by the two spherical waves are transmitted to the first lens system 131 by the scanning unit 120. The first lens system 131 transmits the received scanning beams to the second lens system 132. The entrance pupil of the second lens system 132 is located at the same position as the exit pupil of the first lens system 131. The second lens system 132 transmits the scanning beams to the objective lens 133. The objective lens 133 projects the received scanning beams on the object plane. At this time, the position of the entrance pupil of the objective lens 133 is located at the same position as the exit pupil position of the second lens system 132.

[0198] The first light beam converted into a diverging spherical wave and the second light beam converted into a diverging spherical wave by the first lens system 131 and the second lens system 132 having the above-described structure overlap on the object plane on which the object is placed. At this time, according to the scanning of the scanning mirror, the Fresnel zone plate pattern in which the interference pattern is formed by overlapping the first light beam as a spherical wave and the second light beam as a spherical wave scans the object while flying over the object.

[0199] Here, in order to prevent resolution degradation, the range of the spherical wave as the first light beam on the object plane is preferably greater than the range of the spherical wave as the second light beam. For this reason, as in the above-described Equation 1, it is preferable to satisfy the condition that the conical angle θ1 of the first spherical wave is equal to or greater than the conical angle θ2 of the second spherical wave.

[0200] The remaining conditions (Equations 2 to 5) of the third embodiment (CASE 3) are the same as those of the first embodiment (CASE 1). At this time, in order to transmit the first spherical wave and the second spherical wave without phase distortion and to make the first spherical wave incident on the object plane of the objective lens as a spherical wave, the entrance pupil of the objective lens 133 is preferably located at the same position as the exit pupil of the second lens system 132.

[0201] However, in the case of the third embodiment, the first spherical wave passing through the first lens system 131, the second lens system 132, and the objective lens 133 becomes a 'diverging spherical wave' on the object plane of the objective lens 133. In addition, the second spherical wave passing through the first lens system 131, the second lens system 132, and the objective lens 133 also becomes a 'diverging spherical wave' on the object plane of the objective lens 133.

[0202] Therefore, in the case of the third embodiment, Equations 3 and 4 mean that the radius of the 'diverging spherical wave' on the object plane corresponding to the first spherical wave and the radius of the 'diverging spherical wave' on the object plane corresponding to the second spherical wave must both be less than or equal to the field radius F of the objective lens 133. obj .

[0203] [CASE 4] Interference pattern between converging spherical wave and diverging spherical wave

[0204] Figure 8 is a diagram showing a fly-by-beam pattern scanning hologram microscope apparatus according to a fourth embodiment of the present application, Figure 9 is a diagram showing a fly-by-beam pattern scanning hologram microscope apparatus according to Figure 8 a first spherical wave and a second spherical wave generation condition of a scanning beam generation unit for forming an interference structure on an object plane according to CASE 4 of the present application.

[0205] As shown in Figure 8 , the fly-by-beam pattern scanning hologram microscope apparatus 400 according to the fourth embodiment of the present application mainly includes a scanning beam generation unit 410, a scanning unit 120, a projection unit 130, and a light collection unit 140. Redundant explanations of components denoted by the same reference numerals as those of the drawings will be omitted. Figure 1

[0206] As described above, in the case of the fourth embodiment, the basic structure of the apparatus is the same as that of the first embodiment, but the generated scanning beam pattern is different from that of the first embodiment. That is, the conditions of the first spherical wave and the second spherical wave obtained by the first lens 415 and the second lens 416 of the scanning beam generation unit 410 are different, and the principle is as follows.

[0207] In the fourth embodiment (CASE 4), the first spherical wave and the second spherical wave become a converging spherical wave and a diverging spherical wave, respectively, with respect to the object plane, and the scanning beam projected on the object plane has an interference structure between the converging spherical wave and the diverging spherical wave on the object plane.

[0208] As described above, in the case of CASE 4, the pattern of the interference beam of the converging spherical wave and the diverging spherical wave on the object plane is used as a characteristic of the structure of the scanning beam pattern for object scanning, and the resolution is increased more than the resolution of the objective lens.

[0209] To this end, the scanning beam generation unit 410 generates the first spherical wave and the second spherical wave under the focal length and conical angle conditions shown in Figure 9

[0210] Referring to Figure 9 , the focal point position of the first spherical wave is located in front of the entrance pupil of the first lens system 131, and the focal point position of the second spherical wave is located further back of the entrance pupil of the first lens system 131. In addition, at the same time, the conical angle θ1 of the first spherical wave and the conical angle θ2 of the second spherical wave satisfy θ2 < θ1.

[0211] ​​The scanning beam formed by the two spherical waves is transmitted to the first lens system 131 via the scanning unit 120. The first lens system 131 transmits the received scanning beam to the second lens system 132. The entrance pupil of the second lens system 132 is located at the same position as the exit pupil of the first lens system 131. The second lens system 132 transmits the scanning beam to the objective lens 133. The objective lens 133 projects the received scanning beam onto the object plane. At this time, the entrance pupil of the objective lens 133 is located at the same position as the exit pupil of the second lens system 132.

[0212] On the object plane where the object is placed, the first light beam converted into a converging spherical wave by the first lens system 131 and the second lens system 132 having the above-described structure overlaps with the second light beam converted into a diverging spherical wave. At this time, according to the scanning of the scanning mirror, the Fresnel zone plate pattern, which forms an interference pattern by overlapping the first light beam, which is a spherical wave, and the second light beam, which is a spherical wave, scans the object while flying over the object.

[0213] At this time, the range of the spherical wave as the first beam on the object plane is preferably larger than the range of the spherical wave as the second beam to prevent resolution degradation. To this end, as shown in the following formula 6, the absolute value of the difference between the cone angle θ1 of the first spherical wave and the cone angle θ2 of the second spherical wave is preferably less than 1 / 2 of the absolute value of the sum of the cone angles θ1 and θ2 of the first and second spherical waves.

[0214] [Formula 6]

[0215]

[0216] Apart from Figure 8 In addition to the focal position and cone angle conditions (fourth condition) of the two spherical waves shown, the first lens system 131 and the second lens system 132 need to satisfy the following formula 7 as their subordinate conditions.

[0217] [Formula 7]

[0218]

[0219]

[0220]

[0221]

[0222] Here, θ1 and θ2 represent the cone angles (convergence half angles) of the first and second spherical waves, θ S represents the scanning angle at the scanning mirror 121, represents a receiving angle of the first lens system 131, f1 represents an effective focal length of the first lens system 131, represents a convergence angle of the front focal plane of the first lens system 131, and r sph1 and r sph2 represents a radius of the first spherical wave and the second spherical wave on the entrance pupil plane of the first lens system 131.

[0223] In order to prevent a resolution decrease and a field of view deterioration due to a limitation on contents of the two spherical waves projected on the object plane according to a size of the entrance pupil and a receiving angle of the first lens system 131, the radius r sph1 and r sph2 The formula 7 is preferably satisfied.

[0224] The first lens system 131 transmits the first spherical wave and the second spherical wave received from the scanning unit 120 to the second lens system 132. At this time, in order to transmit the first spherical wave and the second spherical wave without phase distortion, the entrance pupil of the second lens system 132 is preferably at the same position as the exit pupil of the first lens system 131.

[0225] The second lens system 132 transmits the first spherical wave and the second spherical wave received from the first lens system 131 to the objective lens 133 through the second beam splitter 141. At this time, in order to transmit the first spherical wave and the second spherical wave without phase distortion and to make the first spherical wave incident on the object plane of the objective lens as a spherical wave, the entrance pupil of the objective lens 133 is preferably at the same position as the exit pupil of the second lens system 132.

[0226] Further, in the fourth embodiment, the first spherical wave passing through the first lens system 131, the second lens system 132, and the objective lens 133 becomes a converging spherical wave on the object plane of the objective lens 133. At this time, in order to prevent a resolution decrease due to scanning, the radius of the spherical wave is preferably equal to or smaller than a field of view radius of the objective lens 133, and this can be expressed as the following formula 8.

[0227] [Formula 8]

[0228]

[0229] Here, θ1 represents a convergence half angle of the first spherical wave, θ S represents a scanning angle, F obj represents a field of view radius of the front focal plane of the objective lens 133, f0 represents an effective focal length of the objective lens 133, and f1 and f2 represent effective focal lengths of the first lens system and the second lens system.

[0230] Further, the second spherical wave passing through the first lens system 131, the second lens system 132, and the objective lens 133 becomes a 'divergent spherical wave' on the object plane of the objective lens 133. At this time, in order to prevent resolution degradation due to scanning, the radius of the divergent spherical wave on the object plane is preferably equal to or less than the field of view radius F of the objective lens 133, and this can be expressed as the following Equation 9.

[0231] [Equation 9]

[0232]

[0233] Here, θ2 denotes the converging half angle of the second spherical wave, and the remaining parameters are the same as in Equation 3 above.

[0234] Therefore, in the case of the fourth embodiment, the radius of the 'convergent spherical wave' on the object plane corresponding to the first spherical wave and the radius of the 'divergent spherical wave' on the object plane corresponding to the second spherical wave must both be less than or equal to the field of view radius F of the objective lens 133. obj .

[0235] As shown in Equation 5, the fourth embodiment also has the condition that the optical invariant of the first lens system 131 and the second lens system 132 is equal to or greater than the optical invariant of the objective lens 133.

[0236] On the other hand, in all of the embodiments of Figure 1 , Figure 4 , Figure 6 and Figure 8 , the first lens system and the second lens system can be implemented as a normal lens, a plano-convex lens, a doublet, and a compound achromatic doublet, and are preferably a telecentric lens system in order to minimize optical axis distortion due to scanning.

[0237] Therefore, the first lens system and the second lens system can include a Plossl type eyepiece lens of U.S. Patent No. 4482217, and can include a telecentric lens. Further, the first lens system can include a compound scanning lens, and the second lens system can include a compound barrel lens.

[0238] Next, the structure of the light collection unit commonly applicable to the first to fourth embodiments will be described in more detail with reference to Figure 1 Since the configuration of the light collection unit shown in the first embodiment of the present invention is commonly applicable to the second to fourth embodiments, the Figure 1 will be described below as a representative example. Figure 1

[0239] [Light collection unit] Spatial plane light collection method

[0240] Referring to​Figure 1 The scan beam pattern generated by the scan beam generating unit 110 becomes a high-resolution Fresnel zone pattern through the objective lens 133, and irradiates the object at a designated scan position according to rotation of the scan mirror. The irradiated beam pattern is reflected by the object and transmitted to the objective lens 133. The objective lens 133 transmits the reflected beam to the third lens system 142 through the second beam splitter 141.

[0241] As described above, Figure 1 The light collecting unit 140 includes the second beam splitter 141, the third lens system 142, and the photodetector 143, and performs spatial light collection.

[0242] The second beam splitter 141 is disposed between the second lens system 132 and the objective lens 133, transmits the beam passing through the second lens system 132 to the objective lens 133, and reflects the beam reflected from the object and passing through the objective lens 133 to the third lens system 142. The photodetector 143 detects the beam passing through the third lens system 142, and can be implemented as a photodetector.

[0243] The third lens system 142 receives the beam reflected by the beam splitter 141, and transmits the beam to the photodetector 143. Here, the radius of the entrance pupil of the third lens system 142 can be defined as r3, the effective focal length can be defined as f3, and the acceptance angle can be defined as The field radius of the front focal plane of the third lens system 142 can be defined as F3, and the convergence angle can be defined as

[0244] The objective lens 133 and the third lens system 142 generate an image of the object irradiated with the Fresnel zone plate in the direction of the detection plane of the photodetector 143 at a designated scan position according to rotation of the scan mirror. In this case, when the objective lens 133 is an infinite corrected objective lens, the position of the entrance pupil of the third lens system 142 is preferably the same as that of the entrance pupil of the objective lens 133. The image of the object irradiated by the scan beam pattern is formed at the position of the exit pupil of the third lens system 142.

[0245] Here, the detection plane of the photodetector 143 is preferably located at the position where the image is formed, the size of the detection plane of the photodetector 143 is preferably equal to or greater than the size of the image on the detection plane of the reflected beam according to scanning in the entire area irradiated by the scan beam, and the irradiation area does not exceed the field of view of the objective lens 133.

[0246] Therefore, in Figure 1 In the structure of the light collecting unit 140 shown in FIG. 1, the size F pd The following Equation 10 is preferably satisfied.

[0247] [Equation 10]

[0248] or

[0249] Here, θ S denotes a scanning angle at the scanning mirror 121 of the scanning unit 120, f1 to f3 denote effective focal lengths of the first to third lens systems 131, 132, and 142, f0 denotes an effective focal length of the objective lens 133, and F o denotes a field radius of the front focal plane of the objective lens 133.

[0250] The photodetector 143 generates an electrical signal proportional to the sum of the light intensities on the detection plane, and transmits the electrical signal to an electronic processing unit (not shown). The electronic processing unit (not shown) processes the electrical signal detected by the photodetector 143 to generate a hologram of the object.

[0251] The electronic processing unit (not shown) according to each configuration can be different, and this can be referred to Korean Patent Application No. 10-2012-0002121 previously filed by the present applicant.

[0252] For example, the electronic processing unit (not shown) can include a heterodyne detector, an AD converter, a signal processing unit, a storage unit, and a scanning control unit. The heterodyne detector can generate in-phase output signals and quadrature-phase output signals by using an electrical signal received from the photodetector and a heterodyne modulation signal having a frequency Ω generated by a function generator.

[0253] The AD converter receives the in-phase signals and the quadrature-phase signals through the channels, and converts the in-phase signals and the quadrature-phase signals into digital signals. The converted digital current signals are provided to the signal processing unit together with the scanning positions of the scanning unit. The signal processing unit generates a complex hologram of the object from the converted digital signals, and the storage unit stores the generated complex hologram. The scanning control unit generates a control signal for changing the scanning positions of the scanning device every time the hologram processing is completed on a specific position of the object, and transmits the control signal to the scanning unit 120.

[0254] In Figure 1 , the position of the detection plane is the position of the exit pupil of the third lens system 142, and is preferably the image plane of the object. However, the position of the detection plane is not necessarily limited thereto, and can be located on the front side and the rear side of the image plane. Even in this case, the size of the detection plane preferably satisfies Equation 10.

[0255] On the other hand, as Figure 1As the best mode, the embodiment of the present application has been described as transmitting a scanning light beam by using the first lens system 131 and the second lens system 132. However, in the present application, the first lens system 131 and the second lens system 132 can be omitted. Figure 1 In the present application, the first lens system 131 and the second lens system 132 can be omitted. In this case, the scanning unit 120, the second beam splitter 141, the objective lens 133, and the third lens system 142 are included. In this structure, the size of the detection plane preferably satisfies Formula 11.

[0256] [Formula 11]

[0257] or

[0258] In the embodiment of the present application, as shown in Figure 1 , in the best mode, an object image is generated on the detection plane by using the objective lens 133 and the third lens system 142. However, of course, an object image can be formed on the detection plane by not using the third lens system 142 but using only the objective lens 133.

[0259] Further, in the embodiment of the present application, the second beam splitter 141 is located between the second lens system 132 and the objective lens 133 in the best mode. However, the present application is not necessarily limited to this, and a variation structure (three structures in total) as shown in Figures 10 to 12 can be additionally proposed.

[0260] Figures 10 to 12 The first to third variations of the light collecting unit as shown in Figure 1 are shown. Of course, Figures 10 to 12 the variation structure of the light collecting unit as shown in corresponds to a structure applicable to all the first to fourth embodiments of the present application.

[0261] First, in the case of the first variation of Figure 10 , the light collecting unit 150 includes the second beam splitter 151, the third lens system 152, the fourth lens system 153, and the photodetector 154. At this time, unlike Figure 1 , the second beam splitter 151 is located between the first lens system 131 and the second lens system 132, and an image is formed on the detection plane of the photodetector 154 by using the third lens system 152 and the fourth lens system 153.

[0262] That is, the second beam splitter 151 is disposed between the first lens system 131 and the second lens system 132, transmits a light beam passing through the first lens system 131 to the second lens system 132, and reflects a light beam reflected from an object and passing through the second lens system 132 back to the third lens system 152 through the objective lens 133.

[0263] The third lens system 152 receives the light beam reflected by the beam splitter, and transmits the received light beam to the fourth lens system 153. The fourth lens system 153 receives the light beam that has passed through the third lens system 152, and transmits the received light beam to the photodetector 154. Then, the photodetector 154 detects the light beam that has passed through the fourth lens system 153.

[0264] Of course, the radii of the entrance pupils of the third lens system 152 and the fourth lens system 153 can be defined as r3 and r4, the effective focal lengths can be defined as f3 and f4, the acceptance angles can be defined as The field radii of the front focal planes can be defined as F3 and F4, and the convergence angles can be defined as

[0265] In the structure of the light collecting unit 150 as Figure 10 shown, the size F pd of the detection plane of the photodetector 154 is preferably equal to or greater than the size F pd of the detection plane of the photodetector 154. S The following formula 12 is preferably satisfied.

[0266] [Formula 12]

[0267] Or

[0268] Here, F pd represents the size of the detection plane of the photodetector 154, θ S represents the scanning angle at the scanning mirror 121 of the scanning unit 120, f1 to f4 represent the effective focal lengths of the first to fourth lens systems 131, 132, 152, and 153, f0 represents the effective focal length of the objective lens 133, and F o represents the field radius of the front focal plane of the objective lens 133.

[0269] In the case of the light collecting units 140 and 150 described above with reference to Figure 1 and Figure 10 , a method using a spatial plane light collecting technique is shown. Unlike this, the light collecting units 160 and 170 shown below Figure 11 and Figure 12 correspond to a manner using a spatial frequency plane light collecting method.

[0270] [Light collecting unit] Spatial frequency plane light collecting method

[0271] First, in the case of the second modification example of Figure 11 , the light collecting unit 160 includes a second beam splitter 161, a third lens system 162, a fourth lens system 163, and a photodetector 164. Unlike Figure 1 , it can be seen that the fourth lens system is added between the third lens system and the photodetector.

[0272] The scanning beam pattern generated by the scanning beam generating unit 120 becomes a high-resolution Fresnel zone pattern through the objective lens 133, and irradiates the object at a designated scanning position according to the rotation of the scanning mirror. The irradiated beam pattern is reflected by the object and transmitted to the objective lens 133.

[0273] That is, the second beam splitter 161 transmits the light beam that has passed through the second lens system 131 to the objective lens 133, and reflects the light beam that has been reflected from the object and passed through the objective lens 133 to the third lens system 162. The third lens system 162 receives the reflected light beam and transmits the received light beam to the fourth lens system 163, and the fourth lens system 163 transmits the received beam to the detection plane of the photodetector 164.

[0274] At this time, preferably, the exit pupil of the objective lens 133 and the entrance pupil of the third lens system 162 are located on the same plane, the exit pupil of the third lens system 162 is located at the same position as the entrance pupil of the fourth lens system 163, and the detection plane of the photodetector 164 is located at the exit pupil of the fourth lens system 163. That is, preferably, the objective lens 133, the third lens system 162, and the fourth lens system 163 are positioned as an afocal system.

[0275] A spatial frequency conversion light distribution of the image on the object plane of the objective lens 133 is generated on the photodetection plane of the photodetector 164 having a photodetection structure.

[0276] At this time, as shown in Equation 13 below, the size F pd is preferably greater than or equal to 0.1 times the product of the effective numerical aperture of the scanning light beam transmitted to the object plane and the focal length of the fourth lens system 163.

[0277] [Equation 13]

[0278] |0.1f4NA eff |≤|F pd |

[0279] Here, f4 is defined as the effective focal length of the fourth lens system 163, and NA eff is the effective numerical aperture of the light beam transmitted to the object plane, and is defined as the difference NA eff = |NA1-NA2| between the numerical aperture NA1 of the first spherical wave and the numerical aperture NA2 of the second spherical wave transmitted to the object plane.

[0280] In this case, NA1 = sin(Ω1) and NA2 = sin(Ω2). Ω1 and Ω2 are the divergence angles of the light beam when viewed from the object plane. For a diverging spherical wave with positive divergence, Ω1 and Ω2 are positive. For a converging spherical wave with negative divergence, Ω1 and Ω2 are negative. For a plane wave, Ω1 and Ω2 are zero.

[0281] exist Figure 1 In the case of the first embodiment (CASE 1), since the first spherical wave is a plane wave on the object plane, NA1=0, and since the second spherical wave is a converging spherical wave on the object plane,

[0282] exist Figure 4 In the second embodiment (CASE 2), since the first spherical wave is a plane wave on the object plane, NA1=0, and since the second spherical wave is a diverging spherical wave on the object plane,

[0283] exist Figure 6 In the third embodiment (CASE 3), since the first spherical wave is a divergent spherical wave on the object plane, And since the second spherical wave is a divergent spherical wave on the object plane,

[0284] exist Figure 8 In the fourth embodiment (CASE 4), since the first spherical wave is a converging spherical wave on the object plane, And since the second spherical wave is a divergent spherical wave on the object plane,

[0285] Next, in Figure 12 In the case of the fourth modification, the light collecting unit 170 includes a second beam splitter 171, a third lens system 172 and a photodetector 173. Figure 1 Differently, the second beam splitter 171 is located between the first lens system 131 and the second lens system 132 .

[0286] The scanning beam pattern generated by the scanning beam generating unit 120 is transformed into a high-resolution Fresnel zone pattern by the objective lens 133 and irradiates the object at a designated scanning position according to the rotation of the scanning mirror. The irradiated beam pattern is reflected by the object and transmitted to the objective lens 133.

[0287] The objective lens 133 transmits the reflected light beam to the second lens system 132. The second lens system 132 receives the light beam and transmits the received light beam to the second beam splitter 171. The second beam splitter 171 receives the light beam and reflects the received light beam back to the third lens system 172. The third lens system 172 receives the light beam and transmits the received light beam to the detection plane of the photodetector 173.

[0288] At this time, preferably, the exit pupil of the objective lens 133 and the entrance pupil of the second lens system 132 are located on the same plane, the exit pupil of the second lens system 132 is located at the same position as the entrance pupil of the third lens system 172, and the detection plane of the photodetector 164 is located at the exit pupil of the third lens system 172. That is, preferably, the objective lens 133, the second lens system 132, and the third lens system 172 are positioned as an afocal system.

[0289] A spatial frequency converted light distribution of the image on the object plane of the objective lens 133 is generated on the photodetection plane of the photodetector 173 having a photodetection structure.

[0290] At this time, as shown in the following Equation 14, the size F of the detection plane of the photodetector pd is preferably greater than or equal to the effective numerical value NA of the scanning light beam transmitted to the object plane eff and less than or equal to 0.1 times the product of the focal length f3 of the third lens system 172.

[0291] [Equation 14]

[0292] |0.1f3NA eff |≤|F pd |

[0293] In this structure, in the case of the first embodiment (CASE 1) of the present application, Figure 1 since the first spherical wave is a plane wave on the object plane, NA1 = 0, and since the second spherical wave is a converging spherical wave on the object plane, NA2 = 1.

[0294] In the case of the second embodiment (CASE 2) of the present application, Figure 4 since the first spherical wave is a plane wave on the object plane, NA1 = 0, and since the second spherical wave is a diverging spherical wave on the object plane, NA2 = -1.

[0295] In the case of the third embodiment (CASE 3) of the present application, Figure 6 since the first spherical wave is a diverging spherical wave on the object plane, NA1 = -1, and since the second spherical wave is a diverging spherical wave on the object plane, NA2 = -1.

[0296] In the case of the fourth embodiment (CASE 4) of the present application, Figure 8 ​In the fourth embodiment (CASE 4), since the first spherical wave is a converging spherical wave on the object plane, And since the second spherical wave is a divergent spherical wave on the object plane,

[0297] On the other hand, Figure 1 Taking the structure of as an example, when the object is a fluorescent body, a dichroic mirror can be used instead of the second beam splitter 141. The dichroic mirror can be arranged between the scanning unit 120 and the fluorescent body, and can transmit the interference light beam incident by the scanning unit 120, transmit the interference light beam to the fluorescent body, reflect the fluorescent light beam incident from the fluorescent body, and transmit the fluorescent light beam to the photodetector 164. The dichroic mirror is a light transmission unit, and transmits the fluorescent light beam emitted from the fluorescent body to the photodetector during the scanning of the fluorescent body. The dichroic mirror is tilted at a set angle between the scanning unit and the fluorescent body. The dichroic mirror is a mirror designed to selectively reflect light according to wavelength. In this embodiment, the dichroic mirror can be designed to transmit the interference light beam and reflect the fluorescent light beam. That is, the dichroic mirror transmits the interference light beam incident by the scanning unit and transmits the interference light beam to the fluorescent body, and the dichroic mirror reflects the fluorescent light beam incident from the fluorescent body and transmits the fluorescent light beam to the photodetector. As described above, the dichroic mirror is designed to transmit the wavelength of the interference light beam and reflect the wavelength of the fluorescent light beam emitted from the fluorescent body. Here, of course, the wavelength range of each of the interference light beam and the fluorescent light beam corresponds to a value known in advance.

[0298] According to this, the interference beam (interference pattern) used to scan the phosphor is transmitted through the dichroic mirror and transmitted to the phosphor. In addition, the fluorescent beam emitted from the phosphor during scanning is immediately reflected after reaching the dichroic mirror and transmitted to the photodetector through the third lens system.

[0299] According to the present invention as described above, a high-resolution Fresnel zone pattern is formed as a scanning beam pattern on the object plane by the objective lens, and while performing fly-by scanning, the light beam reflected from the object is imaged on the detection plane of the photodetector by the objective lens, thereby realizing a high-resolution scanning holographic microscope at high speed.

[0300] The present invention has been described with reference to the embodiments shown in the accompanying drawings, but this is merely an example. It will be understood by those skilled in the art that various modifications and equivalents may be made thereto. Therefore, the true technical scope of the present invention should be defined by the technical spirit of the appended claims.

Claims

1. A fly-by beam pattern scanning hologram microscope device, comprising: a scanning beam generating unit that modulates a phase of a first beam separated from a light source to convert the first beam into a first spherical wave through a first lens, converts the second beam into a second spherical wave through a second lens, and then causes the first spherical wave and the second spherical wave to interfere with each other to form a scanning beam; a scanning unit, the scanning unit comprising a scanning mirror and a transfer table, the scanning mirror being used to control the incident scanning light beam in the horizontal direction so as to transmit it to the projection unit, thereby controlling the scanning position of the scanning light beam on the object in the horizontal and vertical directions, and the transfer table being used to move the object in the vertical direction at the rear end of the projection unit; the projection unit including a plurality of lens systems and an objective lens, and projecting the scanning light beam transmitted from the scanning unit onto an object plane on which the object is placed; as well as a light collecting unit that detects the light beam that passes through the objective lens again after fluorescing or reflecting from an object, The scanning light beam projected on the object plane has different patterns according to the focal position and cone angle conditions of each of the first spherical wave and the second spherical wave formed on the scanning mirror. Among them, according to the focal position and cone angle conditions of each of the first spherical wave and the second spherical wave formed on the scanning mirror, the scanning light beam projected on the object plane is determined to be one of the following interference structures: an interference structure between a converging spherical wave and a plane wave on the object plane, an interference structure between a diverging spherical wave and a plane wave on the object plane, an interference structure between two diverging spherical waves on the object plane, and an interference structure between a converging spherical wave and a diverging spherical wave on the object plane.

2. The fly-by beam pattern scanning hologram microscope device according to claim 1, wherein: The projection unit includes a first lens system, a second lens system and the objective lens, the first lens system, the second lens system and the objective lens are sequentially arranged between the scanning unit and the object plane, and the entrance pupil of the first lens system is located in the scanning mirror.

3. The fly-by beam pattern scanning hologram microscope device according to claim 2, wherein: When the condition is the first condition, the first spherical wave and the second spherical wave become a plane wave and a converging spherical wave, respectively, relative to the object plane, so that the scanning light beam projected on the object plane has an interference structure between the converging spherical wave and the plane wave on the object plane, and The first condition is a condition such that the focal position of the first spherical wave is the same as the position of the entrance pupil of the first lens system, the focal position of the second spherical wave is the same as the position of the entrance pupil of the first lens system or is in front of the entrance pupil of the first lens system, and the cone angle θ1 of the first spherical wave and the cone angle θ2 of the second spherical wave satisfy the condition θ2≤θ1.

4. The fly-by beam pattern scanning hologram microscope device according to claim 2, wherein: When the condition is the second condition, the first spherical wave and the second spherical wave become a plane wave and a diverging spherical wave, respectively, relative to the object plane, so that the scanning light beam projected on the object plane has an interference structure between the diverging spherical wave and the plane wave on the object plane, and The second condition is a condition such that the focal position of the first spherical wave is the same as the position of the entrance pupil of the first lens system, the focal position of the second spherical wave is the same as the position of the entrance pupil of the first lens system or is behind the entrance pupil of the first lens system, and the cone angle θ1 of the first spherical wave and the cone angle θ2 of the second spherical wave satisfy the condition θ2≤θ1≤2θ2.

5. The fly-by beam pattern scanning hologram microscope device according to claim 2, wherein: When the condition is the third condition, the first spherical wave and the second spherical wave both become divergent spherical waves relative to the object plane, so that the scanning light beam projected on the object plane has an interference structure between the two divergent spherical waves on the object plane, and The third condition is a condition such that the focal position of the first spherical wave is behind the entrance pupil of the first lens system, the focal position of the second spherical wave is behind the focal position of the first spherical wave, and the cone angle θ1 of the first spherical wave and the cone angle θ2 of the second spherical wave satisfy θ2≤θ1.

6. The fly-by beam pattern scanning hologram microscope device according to claim 2, wherein: When the condition is the fourth condition, the first spherical wave and the second spherical wave become a converging spherical wave and a diverging spherical wave, respectively, with respect to the object plane, so that the scanning light beam projected on the object plane has an interference structure between the converging spherical wave and the diverging spherical wave on the object plane, and The fourth condition is a condition that the focal position of the first spherical wave is in front of the entrance pupil of the first lens system, the focal position of the second spherical wave is behind the entrance pupil of the first lens system, and the cone angle θ1 of the first spherical wave and the cone angle θ2 of the second spherical wave satisfy θ2<θ1, and satisfy the following formula:

7. The flying beam pattern scanning hologram microscope device according to claim 3, wherein: The first lens system transmits the received scanning light beam to the second lens system, and the first lens system and the second lens system satisfy the following conditions: |θ1+θ s |≤θ′1|, |θ2+θ s |≤θ1 r | Wherein, θ1 and θ2 represent the cone angles of the first spherical wave and the second spherical wave, θ S represents the scanning angle at the scanning mirror of the scanning unit, represents the acceptance angle of the first lens system, f1 represents the effective focal length of the first lens system, represents the convergence angle of the front focal plane of the first lens system, and r sph1 and r sph2 Denotes the radius of the first spherical wave and the radius of the second spherical wave on the entrance pupil plane of the first lens system.

8. The fly-by beam pattern scanning hologram microscope device according to claim 4, wherein: The first lens system transmits the received scanning light beam to the second lens system, and the first lens system and the second lens system satisfy the following conditions: |θ1+θ s |≤θ1 r |, |θ2+θ s |≤θ1 r | Wherein, θ1 and θ2 represent the cone angles of the first spherical wave and the second spherical wave, θ S represents the scanning angle at the scanning mirror of the scanning unit, represents the acceptance angle of the first lens system, f1 represents the effective focal length of the first lens system, represents the convergence angle of the front focal plane of the first lens system, and r sph1 and r sph2 Denotes the radii of the first spherical wave and the second spherical wave at the entrance pupil plane of the first lens system.

9. The fly-by beam pattern scanning hologram microscope device according to claim 5, wherein: The first lens system transmits the received scanning light beam to the second lens system, and the first lens system and the second lens system satisfy the following conditions: |θ1+θ s |≤θ1 r |, |θ2+θ s |≤θ1 r | Wherein, θ1 and θ2 represent the cone angles of the first spherical wave and the second spherical wave, θ S represents the scanning angle at the scanning mirror of the scanning unit, represents the acceptance angle of the first lens system, f1 represents the effective focal length of the first lens system, represents the convergence angle of the front focal plane of the first lens system, and r sph1 and r sph2 Denotes the radii of the first spherical wave and the second spherical wave at the entrance pupil plane of the first lens system.

10. The fly-by beam pattern scanning hologram microscope device according to claim 6, wherein: The first lens system transmits the received scanning light beam to the second lens system, and the first lens system and the second lens system satisfy the following conditions: |θ s -θ1|≤|θ1 r |, θ2+θ s ≤θ1 r Wherein, θ1 and θ2 represent the cone angles of the first spherical wave and the second spherical wave, θ S represents the scanning angle at the scanning mirror of the scanning unit, represents the acceptance angle of the first lens system, f1 represents the effective focal length of the first lens system, represents the convergence angle of the front focal plane of the first lens system, and r sph1 and r sph2 Denotes the radii of the first spherical wave and the second spherical wave at the entrance pupil plane of the first lens system.

11. The flying beam pattern scanning hologram microscope device according to claim 7, wherein: The radius of the plane wave corresponding to the first spherical wave on the object plane and the radius of the converging spherical wave corresponding to the second spherical wave on the object plane are both less than or equal to the field of view radius of the objective lens, as shown in the following formula: Wherein, θ1 and θ2 represent the cone angles of the first spherical wave and the second spherical wave, θ S represents the scanning angle at the scanning mirror of the scanning unit, F obj denotes the field radius of the front focal plane of the objective lens, f0 denotes the effective focal length of the objective lens, and f1 and f2 denote the effective focal lengths of the first lens system and the second lens system.

12. The fly-by beam pattern scanning hologram microscope device according to claim 8, wherein: The radius of the plane wave corresponding to the first spherical wave on the object plane and the radius of the divergent spherical wave corresponding to the second spherical wave on the object plane are both less than or equal to the field of view radius of the objective lens, as shown in the following formula: Wherein, θ1 and θ2 represent the cone angles of the first spherical wave and the second spherical wave, θ S represents the scanning angle at the scanning mirror of the scanning unit, F obj denotes the field radius of the front focal plane of the objective lens, f0 denotes the effective focal length of the objective lens, and f1 and f2 denote the effective focal lengths of the first lens system and the second lens system.

13. The flying beam pattern scanning hologram microscope device according to claim 9, wherein: The radius of the divergent spherical wave corresponding to the first spherical wave on the object plane and the radius of the divergent spherical wave corresponding to the second spherical wave on the object plane are both less than or equal to the field of view radius of the objective lens, as shown in the following formula: Wherein, θ1 and θ2 represent the cone angles of the first spherical wave and the second spherical wave, θ S represents the scanning angle at the scanning mirror of the scanning unit, F obj denotes the field radius of the front focal plane of the objective lens, f0 denotes the effective focal length of the objective lens, and f1 and f2 denote the effective focal lengths of the first lens system and the second lens system.

14. The fly-by beam pattern scanning hologram microscope device according to claim 10, wherein: The radius of the converging spherical wave corresponding to the first spherical wave on the object plane and the radius of the diverging spherical wave corresponding to the second spherical wave on the object plane are both less than or equal to the field of view radius of the objective lens, as shown in the following formula: Wherein, θ1 and θ2 represent the cone angles of the first spherical wave and the second spherical wave, θ S represents the scanning angle at the scanning mirror of the scanning unit, F obj denotes the field radius of the front focal plane of the objective lens, f0 denotes the effective focal length of the objective lens, and f1 and f2 denote the effective focal lengths of the first lens system and the second lens system.

15. The flying beam pattern scanning hologram microscope device according to any one of claims 11 to 14, wherein: The optical invariance of the first lens system and the second lens system is greater than or equal to the optical invariance of the objective lens, as shown in the following formula: I1≥I obj ,I2≥I obj , Among them, I1, I2 and I obj represent the optical invariance of the first lens system, the second lens system and the objective lens, respectively.

16. The fly-by beam pattern scanning hologram microscope apparatus according to claim 2, wherein: The light collecting unit comprises: a beam splitter disposed between the second lens system and the objective lens, and transmitting the light beam passing through the second lens system to the objective lens, and reflecting the light beam reflected from the object and passing through the objective lens to the outside; a third lens system that receives the light beam reflected by the beam splitter; and a photodetector that detects the light beam passing through the third lens system, The size of the detection plane of the photodetector satisfies the following formula: or Among them, F pd represents the size of the detection plane, θ S represents a scanning angle at the scanning mirror of the scanning unit, f1 to f3 represent effective focal lengths of the first to third lens systems, f0 represents the effective focal length of the objective lens, and F0 represents the field radius of the front focal plane of the objective lens.

17. The fly-by beam pattern scanning hologram microscope apparatus according to claim 2, wherein: The light collecting unit comprises: a beam splitter disposed between the first lens system and the second lens system, and transmitting the light beam passing through the first lens system to the second lens system, and reflecting the light beam reflected from the object and passing through the second lens system through the objective lens to the outside; a third lens system receiving the light beam reflected by the beam splitter; a fourth lens system that receives the light beam that passed through the third lens system; and a photodetector that detects the light beam passing through the fourth lens system, The size of the detection plane of the photodetector satisfies the following formula: or Among them, F pd represents the size of the detection plane, θ S represents a scanning angle at the scanning mirror of the scanning unit, f1 to f4 represent effective focal lengths of the first to fourth lens systems, f0 represents the effective focal length of the objective lens, and F0 represents a field radius of a front focal plane of the objective lens.

18. The fly-by beam pattern scanning hologram microscope apparatus according to claim 2, wherein: The light collecting unit comprises: a beam splitter disposed between the second lens system and the objective lens, and transmitting the light beam passing through the second lens system to the objective lens, and reflecting the light beam reflected from the object and passing through the objective lens to the outside; a third lens system receiving the light beam reflected by the beam splitter; a fourth lens system that receives the light beam that passed through the third lens system; and a photodetector that detects the light beam passing through the fourth lens system, Wherein, a spatial frequency converted light distribution of an image on the object plane of the objective lens is generated on the detection plane of the photodetector, and the size of the detection plane of the photodetector satisfies the following formula: |0.1f4NA eff |≤|F pd |, Among them, F pd represents the size of the detection plane of the photodetector, f4 represents the effective focal length of the fourth lens system, and NA eff represents the effective numerical aperture of the light beam transmitted to the object plane and is defined as the difference NA between the numerical aperture NA1 of the first spherical wave and the numerical aperture NA2 of the second spherical wave. eff =|NA1-NA2|, the first spherical wave and the second spherical wave are transmitted to the object plane.

19. The fly-by beam pattern scanning hologram microscope apparatus according to claim 2, wherein: The light collecting unit comprises: a beam splitter disposed between the first lens system and the second lens system, and transmitting the light beam passing through the first lens system to the second lens system, and reflecting the light beam reflected from the object and passing through the second lens system through the objective lens to the outside; a third lens system that receives the light beam reflected by the beam splitter; and a photodetector that detects the light beam passing through the third lens system, Wherein, a spatial frequency converted light distribution of an image on the object plane of the objective lens is generated on the detection plane of the photodetector, and the size of the detection plane of the photodetector satisfies the following formula: |0.1f3NA eff |≤|F pd |, Among them, F pd represents the size of the detection plane of the photodetector, f3 represents the effective focal length of the third lens system, and NA eff represents the effective numerical aperture of the light beam transmitted to the object plane and is defined as the difference NA between the numerical aperture NA1 of the first spherical wave and the numerical aperture NA2 of the second spherical wave. eff =|NA1-NA2|, the first spherical wave and the second spherical wave are transmitted to the object plane.

Images