Damping structure, apparatus thereof and use in micro-led inspection apparatus

Abstract

This invention relates to a vibration damping structure and its application in MicroLED testing equipment. The vibration damping structure includes an outer base, a central base, a flexible hinge, and a particle blocking mechanism. Particles are disposed within the blocking cavity. A piston is repositionably positioned within the main pressure section to suppress the particles. One end of the pressure section is connected to the main pressure section, and the other end is connected to a self-adjusting section. Multiple blocking tubes of different lengths are correspondingly arranged on the same flexible hinge. The vibration damping device distributes multiple vibration damping structures in a circumferential array on a lower platform. This application provides a vibration damping structure with adaptive damping and flexibility. The piston of the particle blocking mechanism moves within the blocking cavity to suppress the particles. Combined with multiple blocking tubes of different lengths, the damping and flexibility are adjusted, thereby achieving an adaptive vibration suppression effect. This solves the problems of existing vibration dampers having a single adjustment structure and method, and a narrow vibration suppression bandwidth leading to limited applicable environments.

Description

Technical Field

[0001] This invention relates to the field of vibration damping devices, and more particularly to vibration damping structures and devices and their use in MicroLED testing equipment. Background Technology

[0002] With the advancement of technology and the urgent market demand for precision products, industries such as precision machining, aerospace, and precision instruments have experienced significant development. Precision equipment is highly sensitive to external vibrations; even minute vibrations can cause substantial errors in the final output response, severely impacting scientific research and industrial production. Therefore, vibration dampers are necessary to eliminate the adverse effects of vibration and ensure the normal operation of equipment.

[0003] Research on vibration dampers has been conducted for many years, with the most traditional method being passive control. Traditional spring vibration dampers, for example, primarily utilize the reaction force generated when a spring is compressed to counteract vibration. Their stiffness and damping coefficient cannot be changed, and they can only achieve good vibration reduction at specific excitation frequencies, thus limiting their application environments. Subsequently, vibration dampers based on active control emerged. These dampers utilize devices capable of outputting force, such as electromagnetic actuators. Sensors measure external excitation and control the actuator to output different forces to cope with different vibration environments. However, they cannot be widely used due to the need for large energy inputs and insufficient reliability.

[0004] Current mainstream vibration suppression technologies, whether magnetorheological dampers or air spring dampers, can achieve wide-band vibration suppression by adjusting their damping and stiffness. Compared to traditional spring dampers, hydraulic dampers offer significantly improved vibration reduction performance and exhibit excellent vibration suppression effects under specific excitation frequency bands. However, most of them have complex structures, high manufacturing costs, and the potential for gas or liquid leaks causing pollution, requiring high sealing performance. Moreover, challenges in material research and structural control result in a relatively narrow vibration suppression band, making it difficult to widely apply them to various vibration environments. Summary of the Invention

[0005] The purpose of this invention is to propose a vibration reduction structure with adaptive damping and flexibility. The structure uses a piston of a particle blocking mechanism to move in the blocking chamber to suppress the particles in the blocking chamber. Combined with multiple blocking tubes of different lengths, the damping and flexibility are adjusted to achieve the adaptive vibration suppression effect of the vibration reduction structure.

[0006] The present invention also proposes a vibration damping device, which distributes multiple vibration damping structures in a circumferential array on the lower platform.

[0007] The present invention also proposes the application of a vibration reduction structure in MicroLED testing equipment, wherein the vibration reduction structure is the aforementioned vibration reduction structure with adaptive variation in damping and flexibility.

[0008] To achieve this objective, the present invention adopts the following technical solution:

[0009] A vibration reduction structure with adaptive damping and flexibility includes: an outer seat, a central seat, a flexible hinge, and a particle blocking mechanism;

[0010] The central seat is located in the middle of the outer seat; one end of each of the multiple flexible hinges is connected to the central seat, and the other end of each flexible hinge is connected to the outer seat; each flexible hinge is provided with multiple self-adjusting sections.

[0011] The particle blocking mechanism includes: a blocking tube and a piston;

[0012] The blocking tube is provided with a blocking cavity; the blocking cavity is provided with a main pressure section and a secondary pressure section, and a particle is provided in the blocking cavity; the piston is repositionably and movablely limited to the main pressure section for pressing the particle; one end of the secondary pressure section is connected to the main pressure section, and the other end of the secondary pressure section is connected to one of the adaptive adjustment sections;

[0013] The same flexible hinge is provided with multiple blocking tubes, each of which has a different length.

[0014] Preferably, the particle blocking mechanism includes: a vacuum generator and a solenoid valve;

[0015] The vacuum generator is connected to the blocking cavity and is used to create a negative pressure in the blocking cavity; the solenoid valve is disposed corresponding to the blocking cavity and is located at the connection position between the blocking cavity and the vacuum generator.

[0016] More preferably, the piston is provided with a drive rod, and the drive rod has a hollow structure inside; the vacuum generator is connected to the blocking cavity through the hollow structure.

[0017] Preferably, the end of the adaptive adjustment part is provided with a snap-fit ​​cantilever; the snap-fit ​​cantilever between two adjacent adaptive adjustment parts can be detachably contacted, and each is provided with an attraction layer at the contact position; the attraction layer connects the two snap-fit ​​cantilever.

[0018] More preferably, the side of the flexible hinge has an adjustment opening between two adjacent adaptive adjustment portions; the snap-fit ​​cantilever is located within the adjustment opening.

[0019] Preferably, a portion of the blocking cavity is provided with two pressure segments, which are located on the same straight line or connected at an angle, and each pressure segment is connected to one of two adjacent adaptive adjustment sections.

[0020] Preferably, it further includes: a hydraulic resistance control assembly;

[0021] The hydraulic resistance control assembly includes: a hydraulic cylinder and a hydraulic adjusting spring;

[0022] The fixed end of the hydraulic cylinder is mounted on one of the central seat and the flexible hinge, and the output end of the hydraulic cylinder is connected to the other of the two; one end of the hydraulic adjusting spring contacts the central seat, and the other end of the hydraulic adjusting spring contacts the flexible hinge.

[0023] Preferably, the multiple flexible hinges are arranged in a circular array around the central seat.

[0024] A vibration damping device includes: a lower platform and the aforementioned vibration damping structure with adaptive damping and flexibility;

[0025] Multiple vibration damping structures are distributed in a circular array on the lower platform.

[0026] The application of a vibration damping structure in MicroLED testing equipment, wherein the vibration damping structure is the aforementioned vibration damping structure with adaptive variation in damping and flexibility.

[0027] The technical solution provided by this invention may include the following beneficial effects:

[0028] This application provides a vibration reduction structure with adaptive damping and flexibility. The piston of the particle blocking mechanism moves in the blocking chamber to suppress the particles in the blocking chamber. Combined with multiple blocking tubes of different lengths, the damping and flexibility are adjusted to achieve the adaptive vibration suppression effect of the vibration reduction structure. This solves the problems of the existing vibration dampers having a single adjustment structure and method, and a narrow vibration suppression frequency band, resulting in limited applicable environments. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of one embodiment of the vibration damping device;

[0030] Figure 2 This is a top view of one embodiment of the vibration damping device;

[0031] Figure 3 This is a schematic diagram of one embodiment of the vibration reduction structure;

[0032] Figure 4 yes Figure 3 Enlarged diagram of section A in the middle;

[0033] Figure 5 yes Figure 4 Enlarged schematic diagram of section B in the middle;

[0034] Figure 6 This is a schematic diagram of one embodiment of the self-locking process of the snap-fit ​​cantilever;

[0035] Figure 7 This is a schematic diagram of one embodiment of the granular component under low confining pressure.

[0036] Figure 8 This is a schematic diagram of one embodiment of a particulate component in a high-rigidity state.

[0037] in:

[0038] Outer seat 1, center seat 2, flexible hinge 3, particle blocking mechanism 4; hydraulic resistance control assembly 5; lower platform 6; upper platform 7;

[0039] Vibration reduction structure 01;

[0040] Self-adjusting section 31; snap-fit ​​cantilever 32; phase attraction layer 33;

[0041] Adjust the opening 311;

[0042] Blocking tube 41, piston 42; vacuum generator 43; solenoid valve 44;

[0043] Blocking cavity 411; Particle part 412; Drive rod 421; Hollow structure 422;

[0044] Main pressure section 4111, secondary pressure section 4112;

[0045] Hydraulic cylinder 51, hydraulic adjusting spring 52. Detailed Implementation

[0046] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0047] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0048] The technical solution of this invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0049] A vibration reduction structure with adaptive damping and flexibility includes: an outer seat 1, a central seat 2, a flexible hinge 3, and a particle blocking mechanism 4.

[0050] The central seat 2 is located in the middle of the outer seat 1; one end of each of the multiple flexible hinges 3 is connected to the central seat 2, and the other end of each flexible hinge 3 is connected to the outer seat 1; each flexible hinge 3 is provided with multiple self-adjusting sections 31.

[0051] The particle blocking mechanism 4 includes: a blocking tube 41 and a piston 42;

[0052] The blocking tube 41 is provided with a blocking cavity 411; the blocking cavity 411 is provided with a main pressure section 4111 and a secondary pressure section 4112, and the blocking cavity 411 is provided with a particle 412; the piston 42 is repositionably and movablely limited to the main pressure section 4111 for pressing the particle 412; one end of the secondary pressure section 4112 is connected to the main pressure section 4111, and the other end of the secondary pressure section 4112 is connected to one of the adaptive adjustment parts 31;

[0053] The same flexible hinge 3 is provided with a plurality of blocking tubes 41, and each blocking tube 41 has a different length.

[0054] This application provides a vibration reduction structure with adaptive damping and flexibility. The piston 42 of the particle blocking mechanism 4 moves in the blocking cavity 411 to suppress the particles 412 in the blocking cavity 411. Combined with multiple blocking tubes 41 of different lengths, the damping and flexibility are adjusted, thereby achieving the adaptive vibration suppression effect of the vibration reduction structure. This solves the problems of the existing vibration dampers having a single adjustment structure and method, and a narrow vibration suppression frequency band, resulting in limited applicable environments.

[0055] Specifically, the center seat 2 is located in the middle of the outer seat 1, and a flexible hinge 3 is provided on the outer side of the center seat 2. Multiple flexible hinges 3 fix the center seat 2 to the middle of the outer seat 1. The flexible hinge 3 used in this scheme is a simple and relatively regular elastic support with a rotation center that coincides with the geometric central axis and works by relying on limited deformation. This scheme uses the flexible hinge 3 as the connecting part, which reduces the impact of factors such as friction of the device itself on the vibration damping effect. Each flexible hinge 3 is provided with multiple blocking tubes 41. The length of each blocking tube 41 is different. The longer the length, the more particles 412 can be filled. Each blocking tube 41 has a different impact on the flexibility. The longer the blocking tube 41, the greater the impact on the reduction of flexibility, and vice versa, so as to obtain a larger flexibility adjustment range and stronger load-bearing capacity. Therefore, each blocking tube 41 represents a load-bearing level, and a single flexible hinge 3 has a multi-level frequency change capability; such as Figure 7 When the particulate 412 is under low confining pressure, it will exhibit a fluid-like state. At this time, the piston 42 can be driven to move to the main pressure section 4111. The particulate 412 in the main pressure section 4111 is pushed towards the secondary pressure section 4112, thereby compacting the particulate 412 within the blocking tube 41 by the piston 42. When the piston 42 reaches the ideal position, its position can be locked, maintaining its position unchanged, thus blocking the particulate 412 and causing it to exhibit high rigidity similar to a solid. Figure 8At this point, since the adaptive adjustment part 31 is connected to the blocking tube 41, the stiffness of the adaptive adjustment part 31 is improved to a certain extent, thereby increasing the stiffness of the flexible hinge 3. Therefore, under the action of multiple flexible hinges 3, the stiffness of the vibration damping structure 01 is improved. Furthermore, this scheme can enable the vibration damping structure 01 to change its damping function through the particle blocking mechanism 4. The damping principle of the particle component 412 lies in the fact that external excitation causes collisions, friction, and momentum changes between particles and between particles and the inner cavity, thereby consuming the energy input from external vibration and achieving the vibration damping function. In this scheme, the length of the blocking tube 41 in each stage of the multi-stage particle blocking mechanism 4 is different, and the filling amount of the particle component 412 is also different. The longer the length, the larger the filling amount. The blocking tube 41 with the largest filling amount can generate more friction and has better damping characteristics, and vice versa. Meanwhile, the insertion depth of piston 42 also affects the damping characteristics. The deeper piston 42 is inserted, the smaller the gaps between particles 412 and between particles 412 and the blocking cavity 411, and the amount of friction generated when subjected to vibration will increase accordingly. Therefore, this solution can obtain ideal damping characteristics by driving the piston 42 of different stages of particle blocking mechanism 4 to the insertion depth according to specific damping requirements.

[0056] Each blocking tube 41 has a different length, which may be the main pressure section 4111 or the secondary pressure section 4112.

[0057] The movement of piston 42 can be achieved through a known drive mechanism, such as pneumatic drive, or a combination of a cylinder, hydraulic cylinder, or motor and lead screw, etc., all known mechanisms with drive movement functions. Once piston 42 reaches the desired position, it can be locked. This locking is achieved by the drive mechanism. For example, for a cylinder, the telescopic end can be fixed by a valve, and the piston connected to the telescopic end can be locked. For the combination of motor and lead screw, the lead screw is driven to rotate by the motor, which moves the nut seat with which it is threaded, thereby moving piston 42 of the nut seat. When it is necessary to lock piston 42, simply turning off the motor will lock piston 42.

[0058] Preferably, the particle blocking mechanism 4 includes: a vacuum generator 43 and a solenoid valve 44;

[0059] The vacuum generator 43 is connected to the blocking chamber 411 and is used to create a negative pressure in the blocking chamber 411; the solenoid valve 44 is correspondingly provided to the blocking chamber 411 and is located at the connection position between the blocking chamber 411 and the vacuum generator 43.

[0060] Vacuum generator 43 is a vacuum component that uses a positive pressure gas source to generate negative pressure. It can extract the air inside the blocking chamber 411 through a pipeline (not shown) to keep the blocking chamber 411 in a negative pressure state. When the piston 42 reaches the ideal position, the piston 42 position is locked. The vacuum generator 43 is used to evacuate the blocking chamber 411 to form a pressure difference between the inside and outside of the blocking chamber 411. The atmospheric pressure F1 caused by the pressure difference will compress the blocking chamber 411, thereby increasing the confining pressure on the particle 412, causing the particle 412 to be blocked and exhibiting high rigidity (low flexibility) similar to a solid. The particle 412 at one end of the pressure section 4112 applies pressure F2 to the adaptive adjustment part 31, and the rigidity of the vibration damping structure 01 is further improved.

[0061] Meanwhile, this scheme preferably sets one solenoid valve 44 to one blocking chamber 411, that is, each load-bearing stage is equipped with one solenoid valve 44. The opening and closing of the solenoid valve 44 is controlled by the controller in the system to draw negative pressure to a specific blocking chamber 411, thereby accurately changing the flexibility (stiffness) and damping of the blocking chamber 411. A single adaptive adjustment part 31 is provided with multiple blocking tubes 41, and a single vibration damping structure is provided with multiple adaptive adjustment parts 31. Therefore, the flexibility and damping parameters of a single vibration damping structure 01 during actual operation can be different.

[0062] The solenoid valve 44 is located at the connection between the blocking chamber 411 and the vacuum generator 43. The blocking chamber 411 and the vacuum generator 43 are connected by a connecting pipe. The blocking chamber 411 can be located at any position in the connecting pipe.

[0063] More preferably, the piston 42 is provided with a drive rod 421, and the drive rod 421 has a hollow structure 422 inside; the vacuum generator 43 is connected to the blocking cavity 411 through the hollow structure 422.

[0064] The drive rod 421 is used to drive the piston 42 to move. As long as the drive rod 421 is driven to move, the piston 42 can be driven to move into the blocking chamber 411. The drive rod 421 is hollow inside, forming a hollow structure 422. The vacuum generator 43 can be connected to the blocking chamber 411 through the hollow structure 422, so that the air in the blocking chamber 411 can be extracted. It is not necessary to set up a pipeline on the side wall of the blocking chamber 411, which simplifies the structure of the particle blocking mechanism 4 and allows the size of the vibration damping structure 01 to be smaller, thereby allowing the size of the vibration damping device to be smaller.

[0065] In addition to achieving adaptive stiffness and damping through the aforementioned particle blocking mechanism 4, this solution can also be implemented in one embodiment through the self-locking structure of the adaptive adjustment unit 31, specifically as follows:

[0066] The end of the adaptive adjustment part 31 is provided with a snap-fit ​​cantilever 32; the snap-fit ​​cantilever 32 between two adjacent adaptive adjustment parts 31 can be detachably contacted, and each is provided with an attraction layer 33 at the contact position; the attraction layer 33 connects the two snap-fit ​​cantilever 32.

[0067] The flexible hinge 3 is provided with multiple self-adjusting sections 31. A snap-fit ​​cantilever 32 is provided between two adjacent self-adjusting sections 31. The snap-fit ​​cantilever 32 of one self-adjusting section 31 is in a separable contact state with the snap-fit ​​cantilever 32 of the other self-adjusting section 31; that is, the snap-fit ​​cantilever 32 can be contactably connected or separable. An attraction layer 33 is provided between the snap-fit ​​cantilever 32 at the contact position. This attraction layer 33 connects the snap-fit ​​cantilever 32 together when they contact each other. In one embodiment, the attraction layer 33 is an adhesive plate, such as a material with a high adhesion coefficient; in another embodiment, the attraction layer 33 is Velcro. In one embodiment, at least one attraction layer 33 is a magnet, and the other attraction layer 33 is a magnet or metal, and the attraction layers 33 are connected magnetically; further, the attraction layer 33 can be an electromagnet.

[0068] Therefore, when the natural frequency of the vibration damping structure 01 overlaps with the excitation force frequency, the snap-fit ​​cantilever 32 resonates and the amplitude increases rapidly in a short time. When the amplitude exceeds the distance between the two ends of the adaptive adjustment part 31, the snap-fit ​​cantilever 32 at the end will make contact. Then, the snap-fit ​​cantilever 32 drives its corresponding attraction layer 33 to connect, thereby completing the self-locking of the flexible hinge 3. At this time, the two snap-fit ​​cantilever 32 connected as one is equivalent to a rigid beam that restricts the deformation of the flexible hinge 3, thereby improving the stiffness of the device. The improvement of stiffness will cause the natural frequency of the device to increase, so that the natural frequency and the excitation force frequency are misaligned.

[0069] More preferably, the self-locking function of the flexible hinge 3 is mainly used as a bottoming protection method when the amplitude of external excitation suddenly increases significantly, and it can adaptively adjust under instantaneous large-amplitude vibration.

[0070] More preferably, the side of the flexible hinge 3 is provided with an adjustment opening 311 between two adjacent adaptive adjustment portions 31; the snap-fit ​​cantilever 32 is located within the adjustment opening 311.

[0071] The adjustment opening 311 is located on the side of the flexible hinge 3, and can be located on one side or both sides of the flexible hinge 3. The snap-fit ​​cantilever 32 is set in the adjustment opening 311. The outer diameter of the section of the flexible hinge 3 with the adjustment opening 311 is small, which makes it easy to deform. The fulcrum of the deformation is located in the adjustment opening 311, which facilitates the self-locking of the snap-fit ​​cantilever 32. In particular, when the adjustment openings 311 are set on both sides of the same section of the flexible hinge 3, the deformation of the flexible hinge 3 becomes more uniform. When the flexible hinge 3 deforms, the snap-fit ​​cantilever 32 in the adjustment opening 311 has a larger range of motion. The size, position, shape or number of adjustment openings 311 of the flexible hinge 3 can also be set as needed to achieve an adaptive adjustment.

[0072] Further optimized, part of the blocking cavity 411 is provided with two pressure sections 4112, which are located on the same straight line or connected at an angle, and each pressure section 4112 is connected to one of the two adjacent adaptive adjustment parts 31.

[0073] The two pressure-reducing sections 4112 can be located on the same straight line or at an angle to each other. For the pressure-reducing sections 4112 located on the same straight line, the atmospheric pressure caused by the pressure difference is more uniform, and the two pressure-reducing sections 4112 together form a rigid columnar structure with the best rigidity. For the pressure-reducing sections 4112 that are at an angle to each other, there are more connection positions and angles between the pressure-reducing sections 4112 and the flexible hinge 3, which can be applied to vibration reduction structures 01 with different damping and flexibility requirements.

[0074] Preferably, it further includes: a hydraulic resistance control component 5;

[0075] The hydraulic resistance control component 5 includes: a hydraulic cylinder 51 and a hydraulic adjusting spring 52;

[0076] The fixed end of the hydraulic cylinder 51 is installed on one of the central seat 2 and the flexible hinge 3, and the output end of the hydraulic cylinder 51 is connected to the other one; one end of the hydraulic adjusting spring 52 contacts the central seat 2, and the other end of the hydraulic adjusting spring 52 contacts the flexible hinge 3.

[0077] The output end of the hydraulic cylinder 51 is telescopic, and its movement provides damping, thereby achieving a vibration suppression effect. The hydraulic adjusting spring 52 is elastic and can provide buffering for the relative movement between the center seat 2 and the flexible hinge 3. Furthermore, as is generally known, the output end of the hydraulic cylinder 51 can be controlled by controlling the oil volume; therefore, this solution can also control the oil volume by changing the size of the throttle orifice or the valve core angle, thereby changing the damping force.

[0078] Preferably, the multiple flexible hinges 3 are arranged in a circular array around the central seat 2.

[0079] This design arranges the flexible hinges 3 in a circular array. The particle blocking mechanism 4 and / or hydraulic resistance control component 5 can be correspondingly set on the flexible hinges 3. Within the same vibration damping structure 01, the flexible hinges 3 and the particle blocking mechanism 4 can provide the same or different damping and flexibility. Furthermore, this design uses flexible hinges 3 instead of traditional rotary hinges. This is because traditional rotary hinges inevitably suffer from friction and clearance, which leads to a decrease in vibration damping performance. Flexible hinges 3, on the other hand, achieve the function of hinges by their own deformation. Compared with traditional hinges, this design can effectively reduce the number of kinematic pairs and components, thereby reducing the weight of the device. In particular, arranging the flexible hinges 3 in a circular array can further reduce clearance friction, thereby improving the accuracy and reliability of the device.

[0080] A vibration damping device includes: a lower platform 6 and the aforementioned vibration damping structure with adaptive damping and flexibility;

[0081] Multiple vibration damping structures 01 are distributed in a circular array on the lower platform 6.

[0082] In this scheme, both the vibration damping structure 01 and the flexible hinges 3 inside the vibration damping structure 01 are distributed in a circular array. Although they can be distributed at equal intervals in the array, the flexibility and damping parameters of different vibration damping structures 01 can be different during actual operation, and the flexibility and damping parameters of the structure inside a single vibration damping structure 01 can also be different during actual operation. This allows the vibration damping device to function in all directions to maximize the vibration suppression performance.

[0083] This design proposes a vibration damping device that can be widely used in various vibration environments and effectively suppress vibration. This device has low manufacturing cost, no leakage problem, and adjustable flexibility, damping, and natural frequency. On the one hand, it achieves adaptive stiffness enhancement by making the self-adjusting part 31 of the flexible hinge 3 stick together through resonance. On the other hand, a multi-stage particle blocking mechanism 4 is designed to simultaneously adjust flexibility, damping, and natural frequency using the blocking principle of particle 412. Moreover, there are multiple adjustment methods for the three, which can broaden the frequency band of vibration suppression as much as possible through diversified adjustment methods.

[0084] The application of a vibration damping structure in a MicroLED testing device, wherein the vibration damping structure 01 is the aforementioned vibration damping structure with adaptive changes in damping and flexibility.

[0085] The technical principles of this solution have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of this solution and should not be construed as limiting the scope of protection of this solution in any way. Based on this explanation, those skilled in the art can readily conceive of other specific embodiments of this solution without inventive effort, and these embodiments will all fall within the scope of protection of this solution.

Claims

1. A vibration reduction structure with adaptive damping and flexibility, characterized in that, include: Outer seat, center seat, flexible hinge, and particle blocking mechanism; The central seat is located in the middle of the outer seat; one end of each of the multiple flexible hinges is connected to the central seat, and the other end of each flexible hinge is connected to the outer seat; each flexible hinge is provided with multiple self-adjusting sections. The particle blocking mechanism includes: a blocking tube and a piston; The blocking tube is provided with a blocking cavity; the blocking cavity is provided with a main pressure section and a secondary pressure section, and a particle is provided in the blocking cavity; the piston is repositionably and movablely limited to the main pressure section for pressing the particle; one end of the secondary pressure section is connected to the main pressure section, and the other end of the secondary pressure section is connected to one of the adaptive adjustment sections; The same flexible hinge is provided with multiple blocking tubes, each of which has a different length.

2. The vibration reduction structure with adaptive damping and flexibility according to claim 1, characterized in that, The particle blocking mechanism includes: a vacuum generator and a solenoid valve; The vacuum generator is connected to the blocking cavity and is used to create a negative pressure in the blocking cavity; the solenoid valve is disposed corresponding to the blocking cavity and is located at the connection position between the blocking cavity and the vacuum generator.

3. The vibration reduction structure with adaptive damping and flexibility according to claim 2, characterized in that, The piston is provided with a drive rod, and the drive rod has a hollow structure inside; the vacuum generator is connected to the blocking cavity through the hollow structure.

4. The vibration reduction structure with adaptive damping and flexibility according to claim 1, characterized in that, The end of the adaptive adjustment part is provided with a snap-fit ​​cantilever; the snap-fit ​​cantilever between two adjacent adaptive adjustment parts can be detachably contacted, and each is provided with an attraction layer at the contact position; the attraction layer connects the two snap-fit ​​cantilever.

5. A vibration reduction structure with adaptive damping and flexibility according to claim 4, characterized in that, The flexible hinge has an adjustment opening on its side between two adjacent adaptive adjustment portions; the snap-fit ​​cantilever is located within the adjustment opening.

6. A vibration reduction structure with adaptive damping and flexibility according to claim 4, characterized in that, The blocking cavity is provided with two pressure sections, which are located on the same straight line or connected at an angle, and each pressure section is connected to one of the two adjacent adaptive adjustment parts.

7. A vibration reduction structure with adaptive damping and flexibility according to claim 1, characterized in that, Also includes: Hydraulic resistance control components; The hydraulic resistance control assembly includes: a hydraulic cylinder and a hydraulic adjusting spring; The fixed end of the hydraulic cylinder is mounted on one of the central seat and the flexible hinge, and the output end of the hydraulic cylinder is connected to the other of the two; one end of the hydraulic adjusting spring contacts the central seat, and the other end of the hydraulic adjusting spring contacts the flexible hinge.

8. A vibration reduction structure with adaptive damping and flexibility according to any one of claims 1-7, characterized in that, The multiple flexible hinges are arranged in a circular array around the central seat.

9. A vibration damping device, characterized in that, include: The lower platform and the damping and flexibility adaptive vibration reduction structure according to any one of claims 1-8; Multiple vibration damping structures are distributed in a circular array on the lower platform.

10. The application of a vibration damping structure in MicroLED testing equipment, characterized in that, The vibration reduction structure is a vibration reduction structure with adaptive damping and flexibility as described in any one of claims 1-8.

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