A multi-wire cutting angle reference measuring fixture and measuring method

Abstract

This invention relates to a multi-line cutting angle reference measuring fixture and method. Two sets of glass blocks of the same size are symmetrically adhered to a material plate reference surface, parallel to the plate's surface. The horizontal distance between the center points of the two sets of glass blocks along their length is 170mm. The two sets of glass blocks are cut using a normal quartz wafer cutting process. Afterwards, the material plate, the glass cut surfaces, and the testing fixture are cleaned. The material plate is then placed on the base plate of the testing fixture, with the material plate reference surface tightly fitted to the testing fixture reference strip. The dial indicator pointer touches the midpoint A of the upper and lower cut surfaces of the first set of glass blocks. The zeroing button is pressed, and the dial indicator displays 0.000mm. The dial indicator pointer then touches the midpoint B of the upper and lower cut surfaces of the second set of glass blocks, and the dial indicator reading D is recorded. B According to the formula M=D B / 0.04946 Calculates the angle adjustment range. This invention uses a glass block instead of quartz rod cutting for angle reference measurement, which greatly saves cutting time and cost, while also reducing process steps and improving testing efficiency.

Description

Technical Field

[0001] This invention belongs to the field of multi-wire cutting technology for artificial quartz wafers, and particularly relates to the field of angle reference measurement technology for multi-wire cutting of artificial quartz wafers, specifically a multi-wire cutting angle reference measurement fixture and measurement method. Background Technology

[0002] Currently, multi-wire cutting is commonly used to cut single-crystal silicon carbide rods. However, the angle reference changes with each roller change in multi-wire cutting, and trial cutting is required to determine the angle reference.

[0003] The traditional method for determining angular references is:

[0004] (1) Bonding quartz rods to a multi-wire cutting plate;

[0005] (2) Cut the bonded quartz rods using a multi-wire cutting machine;

[0006] (3) Rinse the cut quartz wafers with clean water, remove them from the material plate and place them on the cleaning rack;

[0007] (4) Boil the wafers in a pot, perform ultrasonic cleaning, and dry them in an oven;

[0008] (5) Measure the angle on a wafer angle measuring device.

[0009] Existing methods waste quartz rods, take a long time to cut, require cleaning before measurement, have complicated process steps, increase costs, and are inefficient. Summary of the Invention

[0010] To overcome the shortcomings of existing technologies, this invention provides a multi-wire cutting angle reference measurement fixture and method. It uses a glass block instead of a quartz rod for angle reference measurement, which greatly saves cutting time and cost, reduces process steps, and improves the efficiency of multi-wire cutting angle reference measurement.

[0011] This invention is specifically achieved through the following technical solution: Firstly, a multi-wire cutting angle reference measuring fixture is proposed, comprising a base plate on which a reference strip is fixed. A dial indicator bracket is provided on the side of the base plate, and the dial indicator is mounted on the bracket. A multi-wire cutting material plate is also provided on the base plate; under external force, the multi-wire cutting material plate can move along the reference strip on the base plate. Two sets of test glass are fixed on the multi-wire cutting material plate, with the bottom of each set of glass fixed to the multi-wire cutting material plate by adhesive. The two sets of glass are equal in size and shape, and are symmetrically arranged on the material plate.

[0012] The aforementioned multi-wire cutting angle reference measuring fixture consists of two glass blocks of identical size and shape for each set of glass. The upper and lower glass blocks are glued together, and the lower glass blocks of both sets are glued to the multi-wire cutting plate. During cutting, the upper glass block is cut using the normal process for cutting quartz wafers, while the lower glass block serves as a base to prevent cutting the plate during the cutting process.

[0013] The aforementioned multi-line cutting angle reference measuring fixture uses flat-ground glass.

[0014] The aforementioned multi-line cutting angle reference measuring fixture has a length, width, and thickness of 40mm, 17mm, and 6mm for each glass block.

[0015] Furthermore, the two sets of glass are defined as the first set of glass and the second set of glass, respectively. The first set of glass is fixed near the right side of the multi-wire cutting plate, and the second set of glass is fixed near the left side of the multi-wire cutting plate. The distance between the glass blocks of both sets of glass and the reference surface of the plate is 5mm. The distance between the right end of the first set of glass and the right side of the plate is 10mm, and the distance between the left end of the second set of glass and the left side of the plate is 10mm. The distance between the center points of the two sets of glass in the length direction is 170mm.

[0016] This invention also proposes a method for measuring the reference angle of multi-line cutting, which specifically includes the following steps:

[0017] (1) Bonding glass blocks

[0018] Using flat-ground glass blocks, a set of glass blocks is glued to the left and right sides of the upper surface of the material plate, parallel to the reference surface of the material plate. Each set of glass blocks includes an upper glass block and a lower glass block that are fixed together by adhesive. The horizontal distance between the center points of the two sets of glass blocks along the length direction is 170mm.

[0019] (2) Multi-wire cut glass block

[0020] After installing the new roller, wind and grind the roller; use the normal process method for cutting quartz wafers to cut the upper glass block of the two sets of glass that are bonded together in step (1), and the lower glass block as a base to avoid cutting the material plate during cutting; after cutting, a cutting surface is formed on the upper glass block;

[0021] (3) Base plane cleaning

[0022] After cutting, wipe the reference surface and bottom of the multi-wire cutting material plate clean, ensuring there are no protrusions, foreign objects, or stains; clean the glass fragments on the cut glass block, wipe the cut surface of the glass block clean, and ensure the cut surface is flat and without any marks; wipe the reference strip and base plate on the multi-wire cutting angle reference measuring fixture clean, and confirm that there are no protrusions, foreign objects, or stains.

[0023] The multi-line cutting angle reference measuring fixture includes at least a base plate and a reference strip fixed on the base plate. A dial indicator bracket is fixed on the side of the base plate, and the dial indicator is mounted on the dial indicator bracket and located above the base plate.

[0024] (4) Measurement and sorting

[0025] Place the cleaned multi-wire cutting material plate from step (3) onto the base plate of the cleaned multi-wire cutting angle reference measuring fixture, ensuring that the reference surface of the material plate and the reference surface of the reference strip of the measuring fixture are completely and tightly fitted together.

[0026] (5) Measuring distance with a dial indicator

[0027] Facing the measuring fixture, define the glass closest to the right side of the material plate as the first group of glass and the glass closest to the left side of the material plate as the second group of glass; adjust the fixed digital micrometer bracket so that the pointer of the micrometer touches the upper and lower midpoint A of the cut surface of the upper glass block of the first group of glass, and let the reading of the digital micrometer be displayed between 1.000 and 5.000. Press the zeroing key, and the micrometer will display 0.000mm;

[0028] The parallel measuring fixture reference bar is used to move the multi-wire cutting plate. During the movement, the reference surface of the plate is kept in close contact with the reference bar until the pointer of the digital micrometer contacts the midpoint B of the upper glass block of the second group of glass. The micrometer reading D is then recorded. B ;

[0029] (6) Calculate the angle

[0030] For every 0.04946 mm change in the dial indicator reading, the angle reference is adjusted by 1′, according to the formula M = D. B / 0.04946 Calculate the angle adjustment range M, if the dial indicator reading D B If the reading is positive, the angle reference is increased; if the dial indicator reading D... B If the value is negative, the angle reference is adjusted to be smaller.

[0031] In the aforementioned multi-wire cutting angle reference measurement method, the upper and lower glass blocks of each group of glass are fixed together by adhesive, and the lower glass blocks of both groups of glass are fixed to the multi-wire cutting material plate by adhesive.

[0032] Furthermore, the dimensions of the glass block are: length * width * thickness = 40mm * 17mm * 6mm.

[0033] Furthermore, the distance between the side of the two sets of glass closest to the reference surface of the material plate and the reference surface of the material plate is 5mm. The distance between the right end of the first set of glass and the right side of the material plate is 10mm, and the distance between the left end of the second set of glass and the left side of the material plate is 10mm.

[0034] Compared with existing technologies, this invention has significant advantages and beneficial effects. Through the above technical solution, this invention achieves considerable technological advancement and practicality, and has broad application value, possessing at least the following advantages:

[0035] (1) The present invention uses glass blocks instead of quartz rods for angle reference measurement, which not only saves testing costs, but also, because the glass blocks are thinner and have a lower density than quartz rods, the cutting speed is faster during testing, which greatly saves cutting time and cutting costs.

[0036] (2) The measurement method of the present invention uses glass block testing. After cutting the glass block, there is no need for cleaning, boiling, ultrasonic cleaning, oven drying and other processes, thus saving process steps and speeding up the testing efficiency.

[0037] (3) This invention uses a dial indicator to test the distance, using the formula M = D B / 0.04946, the angle adjustment range can be obtained through simple conversion. This is a brand-new angle reference measurement approach in the field. The test fixture is simple, the parts are simple in structure and few in number, and it is easy to carry out large-scale production and manufacturing. The measurement method is easy to operate, does not require high technical personnel, and is easy to promote and use.

[0038] This invention provides a multi-wire cutting angle reference measurement fixture and method through the above scheme, offering a new solution for multi-wire cutting angle reference measurement.

[0039] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0040] Figure 1 This is a schematic diagram of the test state of the multi-line cutting angle reference measurement fixture of the present invention.

[0041] Figure 2 This is a schematic diagram showing the placement of two sets of glass on a multi-wire cutting plate.

[0042] Figure 3 This is a side view of two sets of glass on a multi-wire cut sheet.

[0043] Figure 4 After the cutting is completed, Figure 2 Based on the line of sight, the midpoint A of the upper glass block of the first group of glass and the midpoint B of the upper glass block of the second group of glass are not on the same horizontal plane.

[0044] Figure 5 Therefore Figure 4 The diagram shows the angle α as an example.

[0045] [Component and Symbol Explanation]:

[0046] 1-Base plate;

[0047] 2-Reference bar;

[0048] 3-Dial indicator bracket;

[0049] 4-Dial indicator;

[0050] 5-Multi-wire cutting plate;

[0051] 6-First set of glass;

[0052] 7-Second set of glass;

[0053] 8-The first set of upper glass blocks;

[0054] 9-The lower layer of the first set of glass;

[0055] 10 - The upper glass block of the second group of glass;

[0056] 11-Second group of lower glass blocks;

[0057] 12 - Cut surface of the upper glass block in the first group of glass;

[0058] 13 - Cut surface of the upper glass block of the second group of glass. Detailed Implementation

[0059] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments and accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of them. The embodiments described and shown in the accompanying drawings can generally be implemented through various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claims, but merely to illustrate selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0060] It should be noted that the directional terms such as "up," "down," "left," and "right" described in this invention are based only on the directions shown in the accompanying drawings and do not represent a limitation on this invention.

[0061] The present invention provides a multi-wire cutting angle reference measuring fixture, such as... Figure 1As shown, the system includes a base plate 1 and a reference strip 2 fixed to the base plate 1. A dial indicator bracket 3 is provided on the side of the base plate. In one embodiment, the dial indicator bracket 3 is fixed to the side of the base plate. A dial indicator 4 is mounted on the dial indicator bracket. A multi-wire cutting plate 5 is also provided on the base plate, and the reference surface of the multi-wire cutting plate is completely and tightly fitted with the reference surface of the reference strip. Two sets of glass are fixed on the multi-wire cutting plate (hereinafter referred to as the "plate"). Each set of glass includes upper and lower glass blocks of identical size and shape. The upper glass block and the lower glass block are glued together, and the lower glass blocks of both sets of glass are fixed to the plate by adhesive. The two sets of glass are identical in size and shape, and the two sets of glass are symmetrically arranged on the plate.

[0062] The glass blocks are flat-ground glass. In one embodiment, the length, width, and thickness of each glass block are 40mm, 17mm, and 6mm, respectively.

[0063] like Figure 2 As shown, the two sets of glass are defined as the first set and the second set, respectively. The first set of glass is fixed near the right side of the material plate, and the second set of glass is fixed near the left side of the material plate. The distance between the glass blocks of both sets and the reference surface of the material plate is 5mm. The distance between the right end of the first set of glass and the right side of the material plate is 10mm, and the distance between the left end of the second set of glass and the left side of the material plate is 10mm. The horizontal distance between the center points of the two sets of glass along their length is 170mm.

[0064] The specific methods for measuring the multi-line cutting angle reference using the above scheme include:

[0065] (1) Bonding glass blocks

[0066] Using flat-ground glass blocks, glue one set of glass to each of the left and right sides of the upper surface of a rectangular sheet, parallel to the reference surface of the sheet. Each set of glass includes an upper glass block and a lower glass block fixed together with adhesive. The dimensions of the glass blocks are: length * width * thickness = 40mm * 17mm * 6mm. The distance from the reference surface of both sets of glass to the side closest to the sheet is 5mm. The right end of the glass closest to the right side of the sheet is 10mm from the right side of the sheet, and the left end of the glass closest to the left side of the sheet is 10mm from the left side of the sheet. The horizontal distance between the center points of the two sets of glass along their length is 170mm. Figure 2 The dimensions shown.

[0067] (2) Multi-wire cut glass block

[0068] After installing the new roller, the winding roller is repaired. Using the normal process method for cutting quartz wafers (existing method), the upper glass block of the two sets of glass bonded together in step (1) is cut, and the lower glass block is used as a base to avoid cutting the material plate during cutting. After cutting, a cutting surface is formed on the upper glass block.

[0069] (3) Base plane cleaning

[0070] Wipe the base surface and bottom of the cut material plate clean, ensuring there are no protrusions, foreign objects, or stains.

[0071] Clean the shards of glass from the cut glass block, leaving the uncut glass block. Wipe the cut surface of the glass block clean, ensuring that the cut surface is flat and free of marks.

[0072] Wipe the reference strip and base plate on the multi-wire cutting angle reference measuring fixture clean, and confirm that there are no protrusions, foreign objects, stains, etc.

[0073] (4) Measurement and sorting

[0074] Place the cleaned multi-wire cutting material plate from step (3) onto the cleaned multi-wire cutting angle reference measuring fixture base plate, ensuring that the reference surface of the material plate and the reference surface of the measuring fixture reference strip are completely and tightly fitted together.

[0075] (5) Measuring distance with a dial indicator

[0076] Facing the measuring fixture, define the glass closer to the left side of the material plate as the second group of glass and the glass closer to the right side of the material plate as the first group of glass. Adjust the fixed digital micrometer bracket so that the pointer of the micrometer touches the midpoint A (center point of the cut surface) of the upper glass block of the first group of glass, and let the reading of the digital micrometer be between 1.000 and 5.000. Press the zeroing button, and the micrometer will display 0.000mm.

[0077] Move the multi-wire cutting plate parallel to the measuring fixture reference bar, ensuring the plate's reference surface remains in close contact with the reference bar throughout the movement. Position the dial indicator pointer so that it contacts the midpoint B (center point of the cutting surface) of the upper glass block in the second group of glass. Record the dial indicator reading D. B .

[0078] (6) Calculate the adjustment angle

[0079] like Figure 4 and Figure 5As shown, assuming that the midpoints A and B of the upper glass block cut surfaces of the first group of glass are not on the same horizontal line, and the line connecting A and B forms an angle α with the horizontal line AC, then the length of line segment BC (i.e., the vertical distance from point B to the horizontal line AC) = the length of line segment AC × tanα. Since the length of line segment AC is 170mm, if angle α = 1′, then the length of line segment BC = 170mm × tan1′ = 170mm × tan1° / 60 = 0.04946mm. The dial indicator reading D... B This is the length of line segment BC, meaning that for every 0.04946 mm change in the dial indicator reading, the angle reference is adjusted by 1′. According to the formula M = D... B / 0.04946 Calculate the angle adjustment range M. If the dial indicator reading D B If the reading is positive, the angle reference is increased; if the dial indicator reading D... B If the displayed value is negative, the angle reference should be adjusted to a smaller value. Using the above measuring fixtures and methods, multi-wire cutting angle reference measurements can be completed conveniently and quickly.

[0080] This invention uses glass blocks instead of quartz rods for angular reference measurement, which not only saves testing costs but also, because the glass blocks are thinner and have a lower density than quartz rods, allows for faster cutting speeds during testing, significantly reducing cutting time and costs. Furthermore, the measurement method of this invention uses glass blocks, eliminating the need for cleaning, boiling, ultrasonic cleaning, and oven drying after cutting the glass blocks, thus saving process steps and accelerating testing efficiency.

[0081] The above description is merely an embodiment of the present invention and is not intended to limit the present invention in any way. The present invention can also have other embodiments based on the above structure and function, which will not be listed hereafter. Therefore, any simple modifications, equivalent changes, and alterations made by those skilled in the art to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A multi-wire cutting angle reference measuring fixture, characterized in that... The system includes a base plate (1), on which a reference strip (2) is fixed. A dial indicator bracket (3) is provided on the side of the base plate, and a dial indicator (4) is installed on the dial indicator bracket. A multi-wire cutting plate (5) is also provided on the base plate. The reference surface of the multi-wire cutting plate is completely and tightly attached to the reference surface of the reference strip, and the multi-wire cutting plate can move along the reference strip (2) on the base plate. Two sets of test glass are fixed on the multi-wire cutting plate. Each set of test glass includes two glass blocks of the same size and shape, upper and lower. The upper glass block is fixed together with the lower glass block. The lower glass blocks of both sets of test glass are fixed to the multi-wire cutting plate by adhesive. The two sets of test glass are of the same size and shape, and the two sets of test glass are symmetrically arranged on the plate. The first set of glass is fixed near the right side of the multi-wire cutting plate, and the second set of glass is fixed near the left side of the multi-wire cutting plate.

2. The multi-wire cutting angle reference measuring fixture as described in claim 1, characterized in that... The glass used is flat-ground glass.

3. The multi-wire cutting angle reference measuring fixture as described in claim 1, characterized in that... The length, width, and thickness of each glass block are 40mm, 17mm, and 6mm, respectively.

4. The multi-wire cutting angle reference measuring fixture as described in claim 1 or 3, characterized in that... The distance between the glass blocks of both sets of glass and the reference surface of the material plate is 5mm. The distance between the right end of the first set of glass and the right side of the material plate is 10mm, and the distance between the left end of the second set of glass and the left side of the material plate is 10mm. The distance between the center points of the two sets of glass in the length direction is 170mm.

5. A method for measuring the reference angle of multi-line cutting, characterized in that... The measurement is performed using the multi-line cutting angle reference measuring fixture described in claim 1. The specific method includes the following steps: (1) Bonding glass blocks Using flat-ground glass blocks, a set of glass blocks is glued to the left and right sides of the upper surface of the material plate, parallel to the reference surface of the material plate. Each set of glass blocks includes an upper glass block and a lower glass block that are fixed together by adhesive. The horizontal distance between the center points of the two sets of glass blocks along the length direction is 170mm. (2) Multi-wire cut glass block After installing the new roller, wind and grind the roller; use the normal process for cutting quartz wafers to cut the upper glass block of the two sets of glass that are bonded together in step (1), and the lower glass block as a base to avoid cutting the material plate during cutting; after cutting, a cutting surface is formed on the upper glass block; (3) Base plane cleaning After cutting, wipe the reference surface and bottom of the multi-wire cutting material plate clean, ensuring there are no protrusions, foreign objects, or stains; clean the shards of glass on the cut glass block, wipe the cut surface of the glass block clean, and ensure the cut surface is flat and without any marks; wipe the reference strip and base plate on the multi-wire cutting angle reference measuring fixture clean, and confirm that there are no protrusions, foreign objects, or stains. The multi-line cutting angle reference measuring fixture includes at least a base plate (1) and a reference strip (2) fixed on the base plate (1). A dial indicator bracket (3) is provided on the side of the base plate, and a dial indicator (4) is installed on the dial indicator bracket. (4) Measurement and sorting Place the cleaned multi-wire cutting material plate from step (3) onto the base plate of the cleaned multi-wire cutting angle reference measuring fixture, so that the reference surface of the multi-wire cutting material plate and the reference surface of the reference strip of the measuring fixture are completely and tightly fitted together. (5) Measuring distance with a dial indicator Facing the measuring fixture, define the glass closest to the right side of the material plate as the first group of glass and the glass closest to the left side of the material plate as the second group of glass; adjust the fixed digital micrometer bracket so that the pointer of the micrometer touches the upper and lower midpoint A of the cut surface of the upper glass block of the first group of glass, and let the reading of the digital micrometer be displayed between 1.000 and 5.

000. Press the zeroing key, and the micrometer will display 0.000mm; Move the multi-wire cutting plate parallel to the reference strip of the measuring fixture, ensuring that the reference surface of the plate remains in close contact with the reference strip throughout the movement. Make the pointer of the digital dial indicator contact the midpoint B of the upper and lower cut surfaces of the second set of glass blocks, and record the dial indicator reading D. B ; (6) Calculate the angle For every 0.04946 mm change in the dial indicator reading, the angle reference is adjusted by 1′, according to the formula M=D. B / 0.04946 Calculate the angle adjustment range M, if the dial indicator reading D B If the reading is positive, the angle reference is increased; if the dial indicator reading D... B If the value is negative, the angle reference is adjusted to be smaller.

6. The multi-line cutting angle reference measurement method as described in claim 5, characterized in that... The upper and lower glass blocks of each set of glass are fixed together with adhesive, and the lower glass blocks of both sets of glass are fixed to the multi-wire cutting plate with adhesive.

7. The multi-line cutting angle reference measurement method as described in claim 5 or 6, characterized in that... The dimensions of the glass block are: length * width * thickness = 40mm * 17mm * 6mm.

8. The multi-line cutting angle reference measurement method as described in claim 5 or 6, characterized in that... The distance between the side of the two sets of glass closest to the reference surface of the material plate and the reference surface of the material plate is 5mm. The distance between the right end of the first set of glass and the right side of the material plate is 10mm, and the distance between the left end of the second set of glass and the left side of the material plate is 10mm.

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