An internal-pumping thin-disc laser emitting coherent array laser and a preparation method thereof

Abstract

The application provides an internal-pumping thin slice laser emitting coherent array laser, comprising a heat sink, a pump light source, a coupling module, an internal resonant cavity and a cut-angle external cavity, the internal resonant cavity, the cut-angle external cavity and a double-wavelength reflecting layer arranged outside a front end surface of the cut-angle external cavity form a resonant cavity, the internal resonant cavity comprises, from inside the cut-angle external cavity, a semi-reflective semi-transmissive layer, a micro-structure thin slice and a double-wavelength high-reflective layer arranged in sequence from the inside of the front end surface to a rear end surface, and the double-wavelength high-reflective layer and the rear end surface of the cut-angle external cavity are attached to the heat sink. The internal-pumping thin slice laser emitting coherent array laser has the advantages of high pumping efficiency, output power, beam quality and stability, and compact structure. The application further provides a preparation method of the internal-pumping thin slice laser emitting coherent array laser.

Description

Technical Field

[0001] This invention relates to the field of laser technology, specifically to an internally pumped thin-film laser that emits a coherent array laser and its fabrication method. Background Technology

[0002] High-power all-solid-state lasers represent a key research focus and strategic priority in the international laser technology field, with significant applications in precision detection, advanced manufacturing, scientific research, and military applications. However, traditional rod-shaped and slab-shaped solid-state lasers suffer from poor thermal management. The high-power pump process causes a large amount of heat to accumulate in the gain medium, creating a temperature gradient between the inside and surface of the gain medium. This leads to thermal lensing, thermal birefringence, and thermal stress damage. These thermal effects cause wavefront distortion in the laser, affecting beam quality and limiting further increases in laser power.

[0003] Thin-plate lasers employ a thin-plate gain medium configuration with a large aperture / thickness ratio. Heat is transferred in a near-one-dimensional manner, and the beam propagation direction is parallel to the axial direction. This reduces the lateral temperature gradient, decreases heat deposition caused by pump power, and thus mitigates wavefront distortion due to temperature gradients, thereby achieving high-power, high-efficiency, and high-beam-quality laser output. Currently, thin-plate lasers have become a hot topic in solid-state laser research. Related research mainly focuses on multi-stroke pumped single-aperture thin-plate lasers. By increasing the diameter of the thin-plate gain medium to increase the laser aperture, combined with multi-stroke pumping technology, the pump light passes through the thin-plate gain medium multiple times, increasing the pump spot size and pump power, thereby achieving high-power laser output. However, under higher pump power conditions, severe thermal distortion of the gain medium leads to a decrease in beam stability and beam quality. Simultaneously, the larger laser aperture and required pump spot size pose significant challenges to resonant cavity design. Furthermore, the numerous reflective elements in the multi-stroke pumping structure can easily cause detuning of the laser beam path, becoming a bottleneck for further power scaling, beam quality improvement, and miniaturization of thin-plate lasers. How to provide a thin-film laser that can improve pump efficiency, output power, beam quality and stability, and achieve compact miniaturization is an urgent problem to be solved. Summary of the Invention

[0004] To address the shortcomings mentioned above, this invention provides an internally pumped thin-film laser for emitting coherent array laser light, comprising: a heat sink, a pump source, a coupling module, an inner resonant cavity, and a chamfered outer cavity. The inner resonant cavity, the chamfered outer cavity, and a dual-wavelength reflective layer disposed on the outer side of the front end face of the chamfered outer cavity constitute the resonant cavity. The inner resonant cavity includes a semi-reflective layer, a microstructure thin film, and a dual-wavelength high-reflectivity layer sequentially disposed from the inner side of the front end face to the rear end face inside the chamfered outer cavity. The dual-wavelength high-reflectivity layer and the rear end face of the chamfered outer cavity are all in contact with the heat sink. Pump light emitted from the pump source is incident perpendicularly to the pump surface of the chamfered outer cavity via the coupling module. The pump light is refracted multiple times within the resonant cavity to form intracavity pumping and an oscillating light array within the inner resonant cavity. The oscillating light array exits the chamfered outer cavity through the semi-reflective layer. The dual-wavelength reflective layer on the outer side of the front end face of the chamfered outer cavity reflects part of the oscillating light array back into the inner resonant cavity, forming feedback injection and achieving coherent array mode locking, thereby forming coherent array laser output.

[0005] As a further improvement of the present invention, the internal pumping thin-plate laser of the emitted coherent array laser is an external cavity internal pumping thin-plate laser of the emitted coherent array laser.

[0006] As a further improvement of the present invention, the microstructure sheet is cylindrical or prismatic in shape and made of a light-transmitting material, wherein the light-transmitting material is doped with one or more of lanthanide metal ions or transition metal ions as gain ions.

[0007] As a further improvement of the present invention, the front and rear ends of the microstructure sheet have the same microstructure, and the microstructure forms a one-dimensional or two-dimensional periodic array of light-transmitting arrays, with the number of light-transmitting arrays not less than two.

[0008] As a further improvement of the present invention, the pump source is a semiconductor laser, a fiber laser, etc. The pump light generated by the pump source is coupled through a coupling module to form a collimated or non-collimated pump beam that is perpendicularly incident on the pump surface of the chamfered external cavity in a fiber coupling or spatial optical coupling manner, and each pump surface is incident with pump light.

[0009] As a further improvement of the present invention, the dual-wavelength high-reflectivity layer has high reflectivity for both pump light and oscillating light.

[0010] As a further improvement of the present invention, the semi-reflective and semi-transparent layer partially reflects and partially transmits the oscillating light, and the reflectivity provided is sufficient for the oscillating light to enter the chamfered outer cavity. The dual-wavelength reflective layer has high reflectivity for the pump light, partially reflects and partially transmits the oscillating light, and the reflectivity provided is sufficient for the generation of laser output in the resonant cavity.

[0011] As a further improvement of the present invention, the chamfered outer cavity is divided into a coherent array mode locking layer and a pump auxiliary layer. The end face diameter of the pump auxiliary layer and the coherent array mode locking layer is larger than the diameter of the microstructure sheet, and the end face diameter of the pump auxiliary layer is smaller than or equal to the end face diameter of the coherent array mode locking layer. The front face of the pump auxiliary layer and the rear face of the coherent array mode locking layer are connected by bonding. The pump auxiliary layer is formed of the same light-transmitting material as the microstructure sheet, and the coherent array mode locking layer is formed of the same or different light-transmitting material as the microstructure sheet. Neither the pump auxiliary layer nor the coherent array mode locking layer is doped with gain ions.

[0012] As a further improvement of the present invention, the pump auxiliary layer and the coherent array mode locking layer are cylindrical or prismatic in shape, and their shapes may be the same or different. Each side of either the front face or the rear face of the pump auxiliary layer and the coherent array mode locking layer forms an angled tangent. If the front face of the coherent array mode locking layer forms an angled tangent, then one or more of the angled tangent, the rear face of the coherent array mode locking layer, and the rear face of the pump auxiliary layer are pump surfaces. If the rear face of the coherent array mode locking layer forms an angled tangent, then one or more of the angled tangent and the front face of the coherent array mode locking layer are pump surfaces. If the front face of the pump auxiliary layer forms an angled tangent, then one or more of the angled tangent and the rear face of the pump auxiliary layer are pump surfaces. If the rear face of the pump auxiliary layer forms an angled tangent, then one or more of the angled tangent, the front face of the coherent array mode locking layer, and the front face of the pump auxiliary layer are pump surfaces. When a non-angled tangent is used as a pump surface, the pump light must be able to pass through the angled tangent after incident.

[0013] As a further improvement of the present invention, a fixing groove with a shape and size matching the microstructure sheet is prepared in the pump auxiliary layer, the axis of the pump auxiliary layer, the axis of the fixing groove coincides with the axis of the microstructure sheet, and the thickness of the pump auxiliary layer is the same as the thickness of the microstructure sheet.

[0014] As a further improvement of the present invention, when the front end face, rear end face and angle sectional face of the coherent array mode locking layer and the pump auxiliary layer are used as the pump surface, the pump surface is not entirely coated with a pump light total reflection film, and space must be left for the pump light.

[0015] As a further improvement of the present invention, an angled tangent is formed on each side of the front face of the coherent array mode locking layer or the rear face of the pump auxiliary layer as the pump surface.

[0016] As a further improvement of the present invention, the pump light emitted from the pump source is coupled through a coupling module to form a collimated or non-collimated pump beam. The collimated or non-collimated pump beam is perpendicular to the pump surface of the chamfered outer cavity and then enters the pump auxiliary layer. After being reflected by the dual-wavelength high-reflection layer, it enters the pump auxiliary layer and the chamfered outer cavity in sequence to reach the dual-wavelength reflection layer. After being reflected by the dual-wavelength reflection layer, it enters the resonant cavity again. That is, the pump light is folded back multiple times in the resonant cavity to form intracavity pumping. During the folding process, the gain ions of the microstructure thin film in the inner resonant cavity absorb the pump light, and the pump light forms a uniform distribution in the microstructure thin film. Thus, the pump light forms an oscillating light array in the inner resonant cavity composed of the microstructure thin film, the dual-wavelength high-reflection layer, and the semi-reflective and semi-transparent layer. The oscillating light array is emitted out of the chamfered outer cavity through the semi-reflective and semi-transparent layer. The dual-wavelength reflection layer on the outer side of the front end face of the chamfered outer cavity reflects part of the oscillating light array back to the inner resonant cavity to form feedback injection, thereby achieving coherent array mode locking and forming coherent array laser output.

[0017] The present invention also provides a method for fabricating an internally pumped thin-film laser that emits coherent array laser light, comprising the following steps:

[0018] Step 1: Prepare microstructured thin films using etching methods;

[0019] Step 2: Deposit a semi-reflective and semi-transparent layer and a dual-wavelength high-reflectivity layer on both sides of the microstructure sheet, respectively;

[0020] Step 3: Prepare the pump-assisted layer and the coherent array mode-locking layer by machining;

[0021] Step 4: Deposit a dual-wavelength reflective layer on the front surface of the coherent array mode-locked layer, and deposit a pump light total reflection film on the rear surface of the pump auxiliary layer.

[0022] Step 5: The bonding pump auxiliary layer and the coherent array mode locking layer form a chamfered outer cavity;

[0023] Step 6: Using thermal diffusion, the microstructure sheet coated with a semi-reflective layer and a dual-wavelength high-reflectivity layer is installed into the chamfered outer cavity. The semi-reflective layer, the microstructure sheet, and the dual-wavelength high-reflectivity layer are arranged sequentially from the inner side of the front face to the rear face inside the chamfered outer cavity to form an inner resonant cavity. The inner resonant cavity, the chamfered outer cavity, and the dual-wavelength reflective layer arranged on the outer side of the front face of the chamfered outer cavity constitute a resonant cavity.

[0024] Step 7: Mount the dual-wavelength high-reflectivity layer side and the chamfered outer cavity rear end face side of the microstructure sheet onto the heat sink;

[0025] Step 8: The pump light emitted by the pump source is incident into the resonant cavity through the pump coupling module.

[0026] Compared with the prior art, the internally pumped thin-film laser for emitting coherent array laser provided by the present invention has the following advantages:

[0027] 1. The pump light is refracted multiple times in the resonant cavity and passes through the microstructure sheet to form an intracavity pump, which increases the absorption length and improves the pump efficiency, absorption efficiency and pump light distribution uniformity.

[0028] 2. By using a microstructured thin sheet as the gain medium, the periodic passing through the array and pumping can form a uniform array oscillating light, which makes the light field uniformly distributed in the gain medium, overcoming the effects of thermal lensing and thermal stress, and greatly improving the output power, beam quality and stability.

[0029] 3. The chamfered external cavity and dual-wavelength reflective layer enable the array oscillating light to form injection feedback and coherent array mode locking, thereby obtaining the output of coherent array laser and achieving near-diffraction-limited beam quality;

[0030] 4. The structure of this thin-film laser is an internally pumped thin-film laser structure, which is simple and does not require the construction of a complex spatial optical system, thus enabling the compact miniaturization of the laser. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of a heptagonal external cavity front-end pumped thin-film laser that emits coherent array laser, as disclosed in an embodiment of the present invention.

[0032] Figure 2 This is a side view of the front-end chamfered regular heptagonal external cavity of a front-end pumped thin-film laser with an output coherent array laser disclosed in an embodiment of the present invention.

[0033] Figure 3 This is a schematic diagram of the rear end face of the heptagonal external cavity with chamfered front end in an internally pumped thin-film laser with an output coherent array laser, as disclosed in an embodiment of the present invention.

[0034] Figure 4 This is a schematic diagram of the front end face of the heptagonal external cavity in an internally pumped thin-film laser with an output coherent array laser, as disclosed in an embodiment of the present invention.

[0035] Figure 5 This is a schematic diagram of a heptagonal external cavity with chamfered front end in an internally pumped thin-film laser for outputting coherent array laser, as disclosed in an embodiment of the present invention.

[0036] Figure 6 This is a schematic diagram of a microstructure sheet in a heptagonal external cavity front-end pumped thin-film laser for output coherent array laser disclosed in an embodiment of the present invention.

[0037] Figure 7This is a schematic diagram of another microstructure sheet in a heptagonal external cavity front-end pumped thin sheet laser for output coherent array laser disclosed in an embodiment of the present invention.

[0038] Figure 8 This is a schematic diagram of the pump light folding back and propagating in the resonant cavity of a heptagonal external cavity front-end pump thin-film laser that emits a coherent array laser, as disclosed in an embodiment of the present invention.

[0039] Figure 9 This is a schematic diagram of the structure of a regular pentagonal external cavity internally pumped thin-film laser with an output coherent array laser, as disclosed in an embodiment of the present invention.

[0040] Figure 10 This is a side view of the pentagonal external cavity with chamfered rear end in an internally pumped thin-film laser with an output coherent array laser disclosed in an embodiment of the present invention.

[0041] Figure 11 This is a schematic diagram of the rear end face of the pentagonal external cavity in a back-end pumped thin-film laser with an output coherent array laser, as disclosed in an embodiment of the present invention.

[0042] Figure 12 This is a schematic diagram of the front end face of the pentagonal external cavity with chamfered rear end in a back-end pumped thin-film laser for emitting coherent array lasers, as disclosed in an embodiment of the present invention.

[0043] Figure 13 This is a schematic diagram of the pentagonal external cavity with pump light incident on the back end of an internally pumped thin-film laser in an embodiment of the present invention.

[0044] Figure 14 This is a schematic diagram of the pump light folding back and propagating in the resonant cavity of an internally pumped thin-film laser with a regular pentagonal external cavity for outputting coherent array laser, as disclosed in an embodiment of the present invention.

[0045] Figure 15 This is a schematic diagram of the structure of a circular external cavity rear end pumped thin-film laser for emitting coherent array laser disclosed in an embodiment of the present invention;

[0046] Figure 16 This is a schematic diagram of the side of the front-end chamfered circular outer cavity in a rear-end pumped thin-film laser with an output coherent array laser disclosed in an embodiment of the present invention.

[0047] Figure 17 This is a schematic diagram of the rear end face of the circular external cavity with chamfered front end in an internally pumped thin-film laser with a circular external cavity for emitting coherent array laser, as disclosed in an embodiment of the present invention.

[0048] Figure 18This is a schematic diagram of the front end face of the circular external cavity with chamfered front end in an internally pumped thin-film laser with a circular external cavity for emitting coherent array laser, as disclosed in an embodiment of the present invention.

[0049] Figure 19 This is a schematic diagram of the pump light folding back and propagating in the resonant cavity of a circular external cavity pump thin-film laser with an output coherent array laser disclosed in an embodiment of the present invention.

[0050] In the picture:

[0051] 1. Pump source; 2. Heat sink; 3. Dual-wavelength high reflectivity layer; 4. Microstructure sheet; 5. Semi-reflective and semi-transparent layer; 6. Chamfered external cavity; 7. Dual-wavelength reflective layer; 8. Coupling module; 9. Pump auxiliary layer; 10. Coherent array mode locking layer. Detailed Implementation

[0052] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0053] Example 1: A heptagonal external cavity front-end pumped thin-film laser for emitting coherent array laser beams.

[0054] like Figure 1 As shown, this invention provides a heptagonal external cavity front-end chamfered pumped thin-film laser emitting coherent array laser, comprising: a heat sink 2, a pump source 1, a coupling module 8, a chamfered external cavity 6, an inner resonant cavity, and a resonant cavity. The inner resonant cavity includes a semi-reflective layer 5, a microstructure thin film 4, and a dual-wavelength high-reflectivity layer 3 sequentially arranged from the inner side of the front face to the rear face inside the chamfered external cavity 6. The dual-wavelength high-reflectivity layer 3 and the rear face of the chamfered external cavity 6 are both in contact with the heat sink 2. The inner resonant cavity, the chamfered external cavity 6, and the dual-wavelength reflective layer 7 disposed on the outer side of the front face of the chamfered external cavity 6 constitute the resonant cavity. The chamfered external cavity 6 is a front-end chamfered regular polygonal (n>3) or circular external cavity; in this embodiment, a regular heptagonal external cavity is preferred. Figure 2As shown, the front-end chamfered regular heptagonal outer cavity is divided into a coherent array mode locking layer 10 and a pump auxiliary layer 9. The pump auxiliary layer 9 and the coherent array mode locking layer 10 are connected by bonding. The front and rear ends of the pump auxiliary layer 9 and the coherent array mode locking layer 10 are both regular heptagons with the same number of sides. The front end face of the coherent array mode locking layer 10 is chamfered, and the diameter of the chamfered rear end face is larger than the diameter of the microstructure sheet. The rear end face of the coherent array mode locking layer 10 completely overlaps with the front end face of the pump auxiliary layer 9, and the dimensions of the rear end face of the coherent array mode locking layer 10 and the rear end face of the pump auxiliary layer 9 are also the same. The pump auxiliary layer 9 is formed of the same light-transmitting material as the microstructure sheet 4, and the coherent array mode locking layer 10 is formed of the same or different light-transmitting material as the microstructure sheet 4. Neither the pump auxiliary layer 9 nor the coherent array mode locking layer 10 is doped with gain ions. Figure 3 As shown, a fixing groove with a shape and size matching the microstructure sheet 4 is prepared in the pump auxiliary layer 9. The axis of the pump auxiliary layer 9, the axis of the fixing groove, and the axis of the microstructure sheet 4 are coincident. The thickness of the pump auxiliary layer 9 is the same as the thickness of the microstructure sheet 4. A pump light total reflection film is deposited on the rear end face of the pump auxiliary layer 9. Figure 3 and Figure 4 As shown, the front and rear faces of the chamfered regular heptagonal external cavity are both regular heptagons with the same number of sides. Each side of the front face forms an angled tangent as a pump surface, and the aperture of the end face with the angled tangent is larger than the aperture of the microstructure sheet 4. The pump source 1 is a semiconductor laser. The pump light generated by the pump source 1 is coupled through the coupling module 8 via fiber coupling or spatial optical coupling. In this embodiment, spatial optical coupling is preferred. Figure 5 As shown, a pump surface is formed by a chamfered regular heptagonal outer cavity at the incident front of a collimated or non-collimated pump beam, and each pump surface is subject to pump light.

[0055] The microstructured thin film 4 consists of light-transmitting materials such as YAG, YLF, YVO4, Al2O3, and SiO2, among which the light-transmitting materials are doped with Yb. 3+ 、Nd 3+ Er 3+ Lanthanide metal ions or Cr 3+ Fe 3+ Ti 3+ One or more transition metal ions are used as gain ions, and their front and rear end faces have the same microstructure, which is used to form such a structure by etching method. Figure 6 The hexagonal arrangement of cylindrical light-transmitting arrays shown, or as... Figure 7The diagram shows a cylindrical light-transmitting array arranged in a square pattern. A dual-wavelength high-reflectivity layer 3 is coated on the rear end face of the microstructure sheet 4, and a semi-reflective layer 5 is coated on the front end face. The dual-wavelength high-reflectivity layer 3 has high reflectivity for both pump and oscillation light. The semi-reflective layer 5 partially reflects and partially transmits the oscillation light, providing reflectivity sufficient for the oscillation light to enter the chamfered heptagonal outer cavity at the front end. A dual-wavelength reflective layer 7 is coated on the outer side of the front end face of the chamfered outer cavity. The dual-wavelength reflective layer 7 has high reflectivity for pump light and partially reflects and partially transmits the oscillation light, providing reflectivity sufficient for laser output in the resonant cavity. The heat sink 2 is made of copper, diamond, copper-tungsten alloy, or other materials. The dual-wavelength high-reflectivity layer 3 and the rear end face of the chamfered outer cavity 6 are both in contact with the heat sink 2 to prevent heat accumulation from degrading the beam quality and stability of the output laser.

[0056] A method for fabricating a heptagonal external cavity front-end pumped thin-film laser that emits a coherent array laser includes the following steps:

[0057] Step 1: Prepare microstructured thin films using etching methods;

[0058] Step 2: Deposit a semi-reflective layer 5 and a dual-wavelength high-reflectivity layer 3 on both sides of the microstructure sheet 4, respectively;

[0059] Step 3: Prepare the pump auxiliary layer 9 and the coherent array mode locking layer 10 by machining;

[0060] Step 4: Deposit a dual-wavelength reflective layer 7 on the front end of the coherent array mode locking layer 10, and deposit a pump light total reflection film on the rear end of the pump auxiliary layer 9.

[0061] Step 5: The bonding pump auxiliary layer 9 and the coherent array mode locking layer 10 form a front-end chamfered regular heptagonal outer cavity;

[0062] Step 6: Using thermal diffusion, the microstructure sheet 4 coated with a semi-reflective layer 5 and a dual-wavelength high-reflectivity layer 3 is installed into the front-end chamfered regular heptagonal outer cavity. The semi-reflective layer 5, the microstructure sheet 4, and the dual-wavelength high-reflectivity layer 3 are sequentially arranged from the inner side of the front face to the rear face inside the front-end chamfered regular heptagonal outer cavity to form an inner resonant cavity. The inner resonant cavity, the front-end chamfered regular heptagonal outer cavity, and the dual-wavelength reflective layer 7 arranged on the outer side of the front face of the front-end chamfered regular heptagonal outer cavity constitute a resonant cavity.

[0063] Step 7: Install one side of the dual-wavelength high-reflectivity layer 3 of the microstructure sheet 4 and the rear end face of the front-end chamfered regular heptagonal outer cavity onto the heat sink 2;

[0064] Step 8: The pump light emitted by the pump light source 1 is incident into the resonant cavity through the pump coupling module 8.

[0065] Working principle of a heptagonal external cavity front-end pumped thin-film laser emitting coherent array laser:

[0066] like Figure 1 As shown by the arrow, the pump light emitted by the pump source 1 is incident on the pump surface of the chamfered outer cavity 6 at a perpendicular angle through the coupling module 8. The pump light is reflected multiple times in the resonant cavity and forms an oscillating light array in the inner resonant cavity. The oscillating light array is emitted out of the chamfered outer cavity 6 through the semi-reflective layer 5. The dual-wavelength reflective layer 7 on the outer side of the front end of the chamfered outer cavity 6 reflects part of the oscillating light array back to the inner resonant cavity to form feedback injection, thereby achieving coherent array mode locking and forming coherent array laser output.

[0067] Specifically, the pump light emitted from the pump source 1 is coupled through the coupling module 8 to form a collimated or non-collimated pump beam, such as... Figure 8 As shown, a collimated or non-collimated pump beam is incident perpendicularly to the pump surface of the front-end chamfered regular heptagonal external cavity. It first enters the coherent array mode-locking layer 10, then the pump auxiliary layer 9. After being reflected by the total reflection film or the dual-wavelength high-reflection layer 3 at the rear end of the pump auxiliary layer 9, it sequentially enters the pump auxiliary layer 9 and the coherent array mode-locking layer 10 again, reaching the dual-wavelength reflection layer 7. After being reflected by the dual-wavelength reflection layer 7, it re-enters the resonant cavity. This means the pump light is repeatedly reflected within the resonant cavity, forming an intracavity pump. During this reflection process, the gain of the microstructure sheet 4 in the inner resonant cavity increases. Ions absorb the pump light, which forms a uniform distribution in the microstructure sheet 4. This causes the pump light to form an oscillating light array in the inner resonant cavity composed of the microstructure sheet 4, the dual-wavelength high-reflectivity layer 3, and the semi-reflective and semi-transparent layer 5. The oscillating light array is emitted through the semi-reflective and semi-transparent layer 5 and then emitted from the front-end chamfered regular heptagonal outer cavity. The dual-wavelength reflective layer 7 on the outer side of the front end face of the front-end chamfered regular heptagonal outer cavity reflects part of the oscillating light array back to the inner resonant cavity to form feedback injection. The dual-wavelength reflective layer 7 transmits part of the oscillating light array, achieving coherent array mode locking, thereby forming coherent array laser output.

[0068] Example 2: A pentagonal external cavity rear-end pumped thin-film laser for emitting coherent array laser beams.

[0069] like Figure 9 As shown, this invention provides a pentagonal external cavity rear-end chamfered pumped thin-film laser emitting coherent array laser light, including a heat sink 2, a pump source 1, a coupling module 8, a chamfered external cavity 6, an inner resonant cavity, and a resonant cavity. The inner resonant cavity includes a semi-reflective layer 5, a microstructure thin film 4, and a dual-wavelength high-reflectivity layer 3, sequentially arranged from the inner side of the front face to the rear face inside the chamfered external cavity 6. The dual-wavelength high-reflectivity layer 3 and the rear face of the chamfered external cavity 6 are all in contact with the heat sink 2. The inner resonant cavity, the chamfered external cavity 6, and the dual-wavelength reflective layer 7 disposed on the outer side of the front face of the chamfered external cavity 6 constitute the resonant cavity. The chamfered external cavity 6 is... Figure 10The external cavity shown is a chamfered regular polygonal (n>3) or circular cavity. In this embodiment, a regular pentagonal external cavity is preferred. The chamfered regular pentagonal external cavity is divided into a coherent array mode locking layer 10 and a pump auxiliary layer 9. The pump auxiliary layer 9 and the coherent array mode locking layer 10 are bonded together. The rear end face of the pump auxiliary layer 9 is chamfered, and the diameter of the chamfered rear end face is larger than the diameter of the microstructure sheet. The front and rear end faces of the pump auxiliary layer 9 and the coherent array mode locking layer 10 are both regular pentagonal. The front end face of the pump auxiliary layer 9 completely overlaps with the rear end face of the coherent array mode locking layer 10, and the front end face of the coherent array mode locking layer 10 and the front end face of the pump auxiliary layer 9 are also the same size. The pump auxiliary layer 9 is formed of the same light-transmitting material as the microstructure sheet 4, and the coherent array mode locking layer 10 is formed of the same or different light-transmitting material as the microstructure sheet 4. Neither the pump auxiliary layer 9 nor the coherent array mode locking layer 10 is doped with gain ions. Figure 11 As shown, a fixing groove with a shape and size matching the microstructure sheet 4 is fabricated in the pump auxiliary layer 9. The axis of the pump auxiliary layer 9, the axis of the fixing groove, and the axis of the microstructure sheet 4 coincide. The thickness of the pump auxiliary layer 9 is the same as the thickness of the microstructure sheet 4. A pump light total reflection film is coated on the rear end face of the pump auxiliary layer 9. If pump light is incident from the rear end face of the pump auxiliary layer 9, the rear end face of the pump auxiliary layer 9 is not entirely coated with the pump light total reflection film; space must be left for the pump light. Figure 11 and Figure 12 As shown, both the front and rear faces of the chamfered pentagonal outer cavity are regular pentagons, and each side of the rear face forms an angled tangent as a pump surface.

[0070] Pump source 1 is a semiconductor laser. The pump light generated by pump source 1 is coupled through coupling module 8 via fiber optic coupling or spatial optical coupling. In this embodiment, fiber optic coupling is preferred. Figure 13 As shown, pump surfaces are formed in the collimated or non-collimated pump beam incident on the chamfered regular pentagonal outer cavity, and each pump surface has pump light incident. The microstructure sheet 4 is made of light-transmitting materials such as YAG, YLF, YVO4, Al2O3, and SiO2, among which the light-transmitting materials are doped with Yb. 3+ 、Nd 3+ Er 3+ Lanthanide metal ions or Cr 3+ Fe 3+ Ti 3+ One or more transition metal ions are used as gain ions, and their front and rear end faces have the same microstructure, which is used to form such a structure by etching method. Figure 6 The hexagonal arrangement of cylindrical light-transmitting arrays shown, or as... Figure 7The diagram shows a cylindrical light-transmitting array arranged in a square pattern. The rear end face of the microstructure sheet 4 is coated with a dual-wavelength high-reflectivity layer 3, and the front end face is coated with a semi-reflective and semi-transparent layer 5. The dual-wavelength high-reflectivity layer 3 has high reflectivity for both pump and oscillation light. The semi-reflective and semi-transparent layer 5 partially reflects and partially transmits the oscillation light, providing reflectivity sufficient for the oscillation light to enter the rear chamfered pentagonal outer cavity. The front end of the rear chamfered pentagonal outer cavity is coated with a dual-wavelength reflective layer 7. The dual-wavelength reflective layer 7 has high reflectivity for pump light and partially reflects and partially transmits the oscillation light, providing reflectivity sufficient for laser output in the resonant cavity. The heat sink 2 is made of copper, diamond, copper-tungsten alloy, or other types of materials. The dual-wavelength high-reflectivity layer 7 and the rear end face of the chamfered outer cavity 6 are both in contact with the heat sink 2 to prevent heat accumulation from degrading the beam quality and stability of the output laser.

[0071] A method for fabricating a pentagonal external cavity back-end pumped thin-film laser that emits a coherent array laser includes the following steps:

[0072] Step 1: Prepare microstructured thin films using etching methods;

[0073] Step 2: Deposit a semi-reflective layer 5 and a dual-wavelength high-reflectivity layer 3 on both sides of the microstructure sheet 4, respectively;

[0074] Step 3: Prepare the pump auxiliary layer 9 and the coherent array mode locking layer 10 by machining;

[0075] Step 4: Deposit a dual-wavelength reflective layer 7 on the front end face of the coherent array mode locking layer 10, and deposit a pump light total reflection film on the rear end face of the pump auxiliary layer 9. If pump light is incident from the rear end face of the pump auxiliary layer 9, the rear end face of the pump auxiliary layer 9 will not be entirely coated with the pump light total reflection film, and space must be left for the pump light.

[0076] Step 5: The bonding pump auxiliary layer 9 and the coherent array mode locking layer 10 form a rear-end chamfered regular pentagonal outer cavity;

[0077] Step 6: Using thermal diffusion, the microstructure sheet 4 coated with a semi-reflective layer 5 and a dual-wavelength high-reflectivity layer 3 is installed into the rear chamfered pentagonal outer cavity. The semi-reflective layer 5, the microstructure sheet 4, and the dual-wavelength high-reflectivity layer 3 are arranged sequentially from the inner side of the front face to the rear face inside the rear chamfered pentagonal outer cavity to form an inner resonant cavity. The inner resonant cavity, the rear chamfered pentagonal outer cavity, and the dual-wavelength reflective layer 7 arranged on the outer side of the front face of the rear chamfered pentagonal outer cavity constitute a resonant cavity.

[0078] Step 7: Install one side of the dual-wavelength high-reflectivity layer 3 and the rear end face of the beveled pentagonal outer cavity of the microstructure sheet 4 onto the heat sink 2;

[0079] Step 8: The pump light emitted by the pump light source 1 is incident into the resonant cavity through the pump coupling module 8.

[0080] Working principle of a pentagonal external cavity rear-end pumped thin-film laser that emits coherent array laser:

[0081] like Figure 9 As shown, the pump light emitted by the pump source 1 is incident on the pump surface of the chamfered outer cavity 6 at a perpendicular angle through the coupling module 8. The pump light is reflected multiple times in the resonant cavity and forms an oscillating light array in the inner resonant cavity. Part of the oscillating light array is reflected back to the inner resonant cavity by the dual-wavelength reflective layer 7 to form feedback injection. Finally, part of the oscillating light array passes through the semi-reflective layer 5, the chamfered outer cavity 6 and the dual-wavelength reflective layer 7 in sequence for emission, realizing coherent array mode locking, thereby forming coherent array laser output.

[0082] Specifically, the pump light emitted from pump source 1 is coupled through coupling module 8 and output as a collimated or non-collimated pump beam, such as... Figure 14 As shown, a collimated or non-collimated pump beam is incident perpendicularly to the pump surface of the rear-end chamfered regular pentagonal external cavity. It first enters the pump auxiliary layer 9, then the coherent array mode locking layer 10, and after reflection by the dual-wavelength reflection layer 7, it sequentially enters the coherent array mode locking layer 10 and the pump auxiliary layer 9, reaching the rear end face of the pump auxiliary layer 9 or the dual-wavelength high-reflection layer 3. After total reflection by the pump light total reflection film at the rear end face of the pump auxiliary layer 9 or reflection by the dual-wavelength high-reflection layer 3, it re-enters the resonant cavity. That is, the pump light is repeatedly reflected within the resonant cavity, forming intracavity pumping. During this reflection process, the microstructure within the inner resonant cavity... The gain ions of the thin film 4 absorb the pump light, which forms a uniform distribution in the microstructure thin film 4. This causes the pump light to form an oscillating light array in the inner resonant cavity composed of the microstructure thin film 4, the dual-wavelength high reflectivity layer 3, and the semi-reflective and semi-transparent layer 5. The oscillating light array is emitted through the semi-reflective and semi-transparent layer 5 and then emitted from the rear chamfered regular pentagonal outer cavity. The dual-wavelength reflective layer 7 on the outer side of the front face of the rear chamfered regular pentagonal outer cavity reflects part of the oscillating light array back to the inner resonant cavity to form feedback injection. The dual-wavelength reflective layer 7 transmits part of the oscillating light array, realizing coherent array mode locking, thereby forming coherent array laser output.

[0083] Example 3: A circular external cavity rear-end pumped thin-film laser that emits coherent array laser light

[0084] like Figure 15 As shown, this invention provides a circular external cavity rear-end pumped thin-film laser for emitting coherent array laser light, including a heat sink 2, a pump source 1, a coupling module 8, a chamfered external cavity 6, an inner resonant cavity, and a resonant cavity. The inner resonant cavity includes a semi-reflective layer 5, a microstructure thin film 4, and a dual-wavelength high-reflectivity layer 3, sequentially arranged from the inner side of the front face to the rear face inside the chamfered external cavity 6. The dual-wavelength high-reflectivity layer 3 and the rear face of the chamfered external cavity 6 are all in contact with the heat sink 2. The inner resonant cavity, the chamfered external cavity 6, and the dual-wavelength reflective layer 7 disposed on the outer side of the front face of the chamfered external cavity 6 constitute the resonant cavity. The chamfered external cavity 6 is... Figure 16The front-end chamfered regular polygonal (n>3) or circular outer cavity is shown. In this embodiment, a circular outer cavity is preferred. The front-end chamfered circular outer cavity is divided into a coherent array mode locking layer 10 and a pump auxiliary layer 9. The pump auxiliary layer 9 and the coherent array mode locking layer 10 are bonded together. The front end face of the coherent array mode locking layer is chamfered. Both the pump auxiliary layer 9 and the coherent array mode locking layer 10 are cylindrical. The aperture of the pump auxiliary layer 9 is smaller than that of the coherent array mode locking layer 10, and the apertures of the pump auxiliary layer 9 and the coherent array mode locking layer 10 are larger than that of the microstructure sheet 4. The pump auxiliary layer 9 is formed of the same light-transmitting material as the microstructure sheet 4, and the coherent array mode locking layer 10 is formed of the same or different light-transmitting material as the microstructure sheet 4. Neither the pump auxiliary layer 9 nor the coherent array mode locking layer 10 is doped with gain ions. Figure 17 As shown, a fixing groove with a shape and size matching the microstructure sheet 4 is prepared in the pump auxiliary layer 9. The axis of the pump auxiliary layer 9, the axis of the fixing groove, and the axis of the microstructure sheet 4 are coincident. The thickness of the pump auxiliary layer 9 is the same as the thickness of the microstructure sheet 4. The rear end face and the side face of the pump auxiliary layer 9 are coated with a pump light total reflection film. If pump light is incident from the rear end face of the pump auxiliary layer 9, the rear end face of the pump auxiliary layer 9 is not entirely coated with a pump light total reflection film; space must be left for the pump light. Figure 17 and Figure 18 As shown, both the front and rear faces of the chamfered outer cavity are circular. The rear face of the coherent array mode locking layer 10 serves as the pump surface. The side and angled sections of the coherent array mode locking layer 10 are coated with a pump light total reflection film. The rear face where it is not bonded to the pump auxiliary layer 9 is also coated with a pump light total reflection film. If pump light is incident from the rear face or angled section of the coherent array mode locking layer 10, the area where the rear face of the coherent array mode locking layer 10 is not bonded to the pump auxiliary layer 9 or the angled section will not be entirely coated with a pump light total reflection film. Space must be reserved for the pump light. In this embodiment, it is preferable to reserve space for the pump light.

[0085] Pump source 1 is a semiconductor laser. The pump light generated by pump source 1 is coupled through coupling module 8 via fiber optic coupling or spatial optical coupling. In this embodiment, fiber optic coupling is preferred. Figure 19 As shown, pump surfaces are formed by chamfered circular outer cavities at the incident front of collimated or non-collimated pump beams, and each pump surface receives pump light. The microstructure sheet 4 is made of light-transmitting materials such as YAG, YLF, YVO4, Al2O3, and SiO2, with Yb doped in the light-transmitting materials. 3+ 、Nd 3+ Er 3+ Lanthanide metal ions or Cr 3+ Fe 3+ Ti 3+ One or more transition metal ions are used as gain ions, and their front and rear end faces have the same microstructure, which is used to form such a structure by etching method. Figure 6The hexagonal arrangement of cylindrical light-transmitting arrays shown, or as... Figure 7 The diagram shows a cylindrical light-transmitting array arranged in a square pattern. The rear end face of the microstructure sheet 4 is coated with a dual-wavelength high-reflectivity layer 3, and the front end face is coated with a semi-reflective and semi-transparent layer 5. The dual-wavelength high-reflectivity layer 3 has high reflectivity for both pump light and oscillation light. The semi-reflective and semi-transparent layer 5 partially reflects and partially transmits the oscillation light, providing reflectivity sufficient for the oscillation light to enter the chamfered circular outer cavity at the front end. The front end of the chamfered circular outer cavity is coated with a dual-wavelength reflective layer 7. The dual-wavelength reflective layer 7 has high reflectivity for pump light and partially reflects and partially transmits the oscillation light, providing reflectivity sufficient for laser output in the resonant cavity. The heat sink 2 is made of copper, diamond, copper-tungsten alloy, or other types of materials. The dual-wavelength high-reflectivity layer 7 and the rear end face of the chamfered outer cavity 6 are both in contact with the heat sink 2 to prevent a decrease in the beam quality and stability of the output laser due to heat accumulation.

[0086] A method for fabricating a circular external cavity rear-end pumped thin-film laser that emits a coherent array laser includes the following steps:

[0087] Step 1: Prepare microstructured thin films using etching methods;

[0088] Step 2: Deposit a semi-reflective layer 5 and a dual-wavelength high-reflectivity layer 3 on both sides of the microstructure sheet 4, respectively;

[0089] Step 3: Prepare the pump auxiliary layer 9 and the coherent array mode locking layer 10 by machining;

[0090] Step 4: Deposit a dual-wavelength reflective layer 7 on the front end face of the coherent array mode locking layer 10, and deposit a pump light total reflection film on the rear end face of the pump auxiliary layer 9. If pump light is incident from the rear end face of the pump auxiliary layer 9, the rear end face of the pump auxiliary layer 9 will not be entirely coated with the pump light total reflection film, and space must be left for the pump light.

[0091] Step 5: The bonding pump auxiliary layer 9 and the coherent array mode locking layer 10 form a front-end chamfered circular outer cavity;

[0092] Step 6: Using thermal diffusion, the microstructure sheet 4 coated with a semi-reflective layer 5 and a dual-wavelength high-reflectivity layer 3 is installed into the front chamfered circular outer cavity. The semi-reflective layer 5, the microstructure sheet 4 and the dual-wavelength high-reflectivity layer 3 are arranged sequentially from the inner side of the front face to the rear face inside the front chamfered circular outer cavity to form an inner resonant cavity. The inner resonant cavity, the front chamfered circular outer cavity and the dual-wavelength reflective layer 7 arranged on the outer side of the front face of the front chamfered circular outer cavity constitute a resonant cavity.

[0093] Step 7: Install one side of the dual-wavelength high-reflectivity layer 3 of the microstructure sheet 4 and the rear end face of the front chamfered circular outer cavity onto the heat sink 2;

[0094] Step 8: The pump light emitted by the pump light source 1 is incident into the resonant cavity through the pump coupling module 8.

[0095] Working principle of a circular external cavity rear-end pumped thin-film laser that emits coherent array laser:

[0096] like Figure 15 As shown, the pump light emitted by the pump source 1 is incident on the pump surface of the chamfered outer cavity 6 at a perpendicular angle through the coupling module 8. The pump light is reflected multiple times in the resonant cavity and forms an oscillating light array in the inner resonant cavity. Part of the oscillating light array is reflected back to the inner resonant cavity by the dual-wavelength reflective layer 7 to form feedback injection. Finally, part of the oscillating light array passes through the semi-reflective layer 5, the chamfered outer cavity 6 and the dual-wavelength reflective layer 7 in sequence for emission, realizing coherent array mode locking, thereby forming coherent array laser output.

[0097] Specifically, the pump light emitted from pump source 1 is coupled through coupling module 8 and output as a collimated or non-collimated pump beam, such as... Figure 19 As shown, a collimated or non-collimated pump beam is incident perpendicularly to the pump surface of the front-end chamfered circular outer cavity. It first enters the coherent array mode-locking layer 10, then the pump auxiliary layer 9. After total reflection by the rear end face of the pump auxiliary layer 9 (either by the total reflection film or the dual-wavelength high-reflection layer 3), the pump light sequentially enters the pump auxiliary layer 9 and the coherent array mode-locking layer 10, reaching the dual-wavelength reflection layer 7. After reflection by the dual-wavelength reflection layer 7, it re-enters the resonant cavity. This means the pump light is repeatedly reflected within the resonant cavity, forming an intracavity pump. During this reflection process, the microstructure sheet 4 in the inner resonant cavity increases... The pump light is absorbed by the gain ions, and the pump light is uniformly distributed in the microstructure thin film 4. This causes the pump light to form an oscillating light array in the inner resonant cavity composed of the microstructure thin film 4, the dual-wavelength high reflectivity layer 3, and the semi-reflective and semi-transparent layer 5. The oscillating light array is emitted through the semi-reflective and semi-transparent layer 5 and then emitted from the front chamfered circular outer cavity. The dual-wavelength reflective layer 7 on the outer side of the front chamfered circular outer cavity reflects part of the oscillating light array back to the inner resonant cavity to form feedback injection. The dual-wavelength reflective layer 7 transmits part of the oscillating light array, realizing coherent array mode locking, thereby forming coherent array laser output.

[0098] The internally pumped thin-film laser for emitting coherent array laser provided by this invention has the following advantages:

[0099] 1. The pump light is refracted multiple times in the resonant cavity and passes through the microstructure sheet 4 to form an intracavity pump, thereby increasing the absorption length and improving the pump efficiency, absorption efficiency and pump light distribution uniformity.

[0100] 2. Using a microstructure thin film 4 as the gain medium, the light can be periodically pumped through the array to form a uniform array oscillating light, so that the light field is uniformly distributed in the gain medium, overcoming the effects of thermal lensing and thermal stress, and greatly improving the output power, beam quality and stability.

[0101] 3. The chamfered external cavity 6 and the dual-wavelength reflective layer 7 enable the array oscillating light to form injection feedback, thereby obtaining the output of coherent array laser and achieving near-diffraction-limited beam quality;

[0102] 4. The structure of this thin-film laser is an internally pumped thin-film laser structure, which is simple and does not require the construction of a complex spatial optical system, thus enabling the compact miniaturization of the laser.

[0103] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. An intracavity thin-disc laser emitting coherent array laser light, comprising: The heat sink, the pump light source and the coupling module are characterized in that the internal-pumping thin-slice laser emitting coherent array laser further comprises an internal resonant cavity and a cut-angle external cavity, the internal resonant cavity, the cut-angle external cavity and a double-wavelength reflective layer arranged outside a front end surface of the cut-angle external cavity form a resonant cavity, the internal resonant cavity comprises, from inside the front end surface to a rear end surface inside the cut-angle external cavity, a semi-reflective semi-transmissive layer, a micro-structure thin slice and a double-wavelength high-reflectivity layer, and the double-wavelength high-reflectivity layer and the rear end surface of the cut-angle external cavity are attached to the heat sink, wherein the pump light source emits pump light which is incident on the pump surface of the cut-angle external cavity perpendicularly through the coupling module, the pump light forms intracavity pumping by multiple reflections in the resonant cavity and forms an oscillation light array in the internal resonant cavity, the oscillation light array is emitted out of the cut-angle external cavity through the semi-reflective semi-transmissive layer, and the double-wavelength reflective layer outside the front end surface of the cut-angle external cavity partially reflects the oscillation light array back into the internal resonant cavity to form feedback injection, so that coherent array mode locking is realized, thereby forming coherent array laser output; the cut-angle external cavity is divided into a coherent array mode locking layer and a pump auxiliary layer from front to back, the end surface aperture of the pump auxiliary layer is larger than the aperture of the micro-structure thin slice, the end surface aperture of the pump auxiliary layer is smaller than or equal to the end surface aperture of the coherent array mode locking layer, the front end surface of the pump auxiliary layer is connected to the rear end surface of the coherent array mode locking layer in a bonding manner, the pump auxiliary layer is formed of the same light-transmitting material as the micro-structure thin slice, the coherent array mode locking layer is formed of the same or different light-transmitting material as the micro-structure thin slice, and neither the pump auxiliary layer nor the coherent array mode locking layer is doped with gain ions.

2. The intracavity thin-disc laser emitting coherent array of lasers according to claim 1, characterized in that, The micro-structure thin slice is in the shape of a cylinder or a right prism and is made of light-transmitting material, wherein the light-transmitting material is doped with one or more of lanthanide ions or transition metal ions as gain ions.

3. The intracavity thin-disc laser emitting coherent array of lasers according to claim 1, characterized in that, The front and rear end surfaces of the micro-structure thin slice have the same micro-structure, the micro-structure forms a one-dimensional or two-dimensional periodic array of light-transmitting arrays, and the number of the light-transmitting arrays is not less than 2.

4. The intracavity thin-disc laser emitting coherent array of lasers according to claim 1, characterized in that, The pump light source is selected from a semiconductor laser or a fiber laser, the pump light generated by the pump light source is incident on the pump surface of the cut-angle external cavity in a fiber coupling or spatial light coupling manner through the coupling module to form a collimated or non-collimated pump light beam, and each pump surface is incident on pump light.

5. The intracavity thin-disc laser of claim 1, wherein, The double-wavelength high-reflectivity layer has high reflectivity to pump light and oscillation light.

6. The intracavity thin-disc laser emitting coherent array of lasers according to claim 1, characterized in that, The semi-reflective semi-transmissive layer partially reflects and partially transmits oscillation light, and the provided reflectivity satisfies that the oscillation light enters the cut-angle external cavity, the double-wavelength reflective layer has high reflectivity to pump light and partially reflects and partially transmits oscillation light, and the provided reflectivity satisfies that laser output is generated in the resonant cavity.

7. The internal-pumping thin-slice laser emitting coherent array laser according to claim 1, characterized in that The pump auxiliary layer and the coherent array mode-locked layer are cylindrical or prismatic, the pump auxiliary layer and the coherent array mode-locked layer are the same or different in shape, one of the front end face and the rear end face of the pump auxiliary layer and the coherent array mode-locked layer is formed with an angle facet, if the front end face of the coherent array mode-locked layer is formed with an angle facet, one or several of the angle facet or the rear end face of the coherent array mode-locked layer and the rear end face of the pump auxiliary layer is a pump face, if the rear end face of the coherent array mode-locked layer is formed with an angle facet, one or both of the angle facet and the front end face of the coherent array mode-locked layer is a pump face, if the front end face of the pump auxiliary layer is formed with an angle facet, one or both of the angle facet or the rear end face of the pump auxiliary layer is a pump face, if the rear end face of the pump auxiliary layer is formed with an angle facet, one or several of the angle facet or the front end face of the coherent array mode-locked layer and the front end face of the pump auxiliary layer is a pump face, when the non-angle facet is a pump face, the pump light can pass through the angle facet after being incident.

8. The intracavity thin-disc laser emitting coherent array of lasers according to claim 1, characterized in that, The pump auxiliary layer is prepared with a fixed groove matching the shape and size of the microstructure wafer, the axis of the pump auxiliary layer, the axis of the fixed groove and the axis of the microstructure wafer are coincident, and the thickness of the pump auxiliary layer is the same as the thickness of the microstructure wafer.

9. A method of fabricating an intracavity-pumped thin-disc laser emitting coherent arrayed laser light as claimed in claim 1, characterized in that, The method comprises the following steps: Step one, preparing the microstructure wafer by etching; Step two, plating a semi-transmission and semi-reflection layer and a double-wavelength high-reflection layer on two sides of the microstructure wafer respectively; Step three, preparing the pump auxiliary layer and the coherent array mode-locked layer by mechanical processing; Step four, plating a double-wavelength reflection layer on the front end face of the coherent array mode-locked layer and plating a pump light total reflection film on the rear end face of the pump auxiliary layer; Step five, bonding the pump auxiliary layer and the coherent array mode-locked layer to form a cut-angle external cavity; Step six, installing the microstructure wafer plated with the semi-transmission and semi-reflection layer and the double-wavelength high-reflection layer into the cut-angle external cavity by heat diffusion, the semi-transmission and semi-reflection layer, the microstructure wafer and the double-wavelength high-reflection layer arranged in the cut-angle external cavity from the inside of the front end face to the rear end face constitute an internal resonant cavity, the internal resonant cavity, the cut-angle external cavity and the double-wavelength reflection layer arranged outside the front end face of the cut-angle external cavity constitute a resonant cavity; Step seven, installing the double-wavelength high-reflection layer side of the microstructure wafer and the rear end face side of the cut-angle external cavity on a heat sink; Step eight, making the pump light emitted by the pump light source incident into the resonant cavity through a pump coupling module.

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