A six-dimensional force sensor based on shear strain detection using resistance strain gauge

Abstract

This invention discloses a resistance strain gauge six-dimensional force sensor based on shear strain detection. The sensor includes a sensor platform and resistance strain gauges. The strain gauges are mounted on the sensor platform, which is fixed in position. A load-bearing plate is also mounted on the sensor platform. Two resistance strain gauges are connected in series to form a Wheatstone bridge. The Wheatstone bridge is electrically connected to a voltage measurement terminal and a DC power supply. The voltage measurement terminal is sequentially connected to an amplifier circuit, a data acquisition unit, and a PC terminal. The resistance strain gauges of this invention can detect the shear strain of each beam under load. By connecting the resistance strain gauges into a Wheatstone bridge, corresponding load detection can be achieved. This invention's sensor is small in size, simple in structure, has minimal weight impact, low sensitivity to patch position, and high inherent sensitivity. It can accurately measure force / torque in the X, Y, and Z directions and can be used for industrial measurement.

Description

Technical Field

[0001] This invention relates to a force sensor, specifically a resistance strain six-dimensional force sensor based on shear strain detection. Background Technology

[0002] Multidimensional force sensor technology plays a vital role in human production and daily life. For example, this technology can provide biomimetic mechanical data on motion mechanisms and gait, and can be used in fields such as automation control, robotic arms, robots, and automated assembly equipment. Researchers both domestically and internationally have developed various types of multidimensional force sensors.

[0003] Currently, a six-dimensional wrist force sensor developed by Watson has been developed. This sensor adopts a three-layer structure, consisting of three vertical strain beams and two rims. The three vertical beams are arranged at 120° on the rims. This sensor has a simple structure, good lateral performance, and strong load-bearing capacity, but poor vertical performance and large inter-dimensional coupling. A planar crossbeam six-dimensional force sensor uses a planar crossbeam structure. The six-dimensional force and torque acting on the sensor are obtained through the bending strain of the beams. This sensor has high sensitivity, no radial effect, and is easy to calibrate, but poor vertical overload resistance and difficulty in improving dynamic performance. A capacitive six-dimensional force sensor indicates both three-dimensional force and three-dimensional torque through changes in capacitance. A piezoelectric six-dimensional force sensor consists of eight sealed sensitive elements and has a wide dynamic range. An optical six-dimensional force sensor uses a six-beam structure, with three beams equipped with quarter-shaped optical sensors. Three light sources at the center of the beams illuminate the three optical sensors respectively. The six-dimensional force is measured by measuring minute deformations through the optical sensors. The six-dimensional force measurement system employs an integral structure with eight vertical beams in its elastic body. Combined with a specific patch method, it can directly obtain six-dimensional force signals, improving the stiffness of the elastic body and reducing hysteresis, thus greatly enhancing its practicality. This sensor eliminates coupling in principle, simplifies signal post-processing, and offers good real-time performance.

[0004] The resistance strain gauge six-dimensional force sensor is currently the most widely used and mature type. Its basic principle is that under the action of external force, the elastic body undergoes mechanical deformation, and the strain gauge attached to the elastic body generates corresponding strain, causing a change in resistance value. This change in resistance value is then converted into voltage or current output through a Wheatstone bridge. It combines structural advantages, measurement range, cost, sensitivity, and dynamic performance.

[0005] Existing resistance strain gauge six-dimensional force sensors are mostly based on normal strain measurement. However, in most cases, the normal strain exhibits a large gradient in the patch area, making the patch position deviation highly influential. Shear strain, on the other hand, can be maintained in a nearly uniform distribution over a large area through structural design, reducing its dependence on patch position. Summary of the Invention

[0006] To address the problems existing in the background art, the present invention provides a resistance strain six-dimensional force sensor based on shear strain detection.

[0007] The technical solution adopted in this invention is:

[0008] The present invention relates to a resistance strain gauge six-dimensional force sensor based on shear strain detection, comprising a sensor platform and twelve resistance strain gauges. Each resistance strain gauge is mounted on the sensor platform, which is installed at a fixed position. A load-bearing plate is also mounted on the sensor platform. Every two resistance strain gauges are connected in series to form a Wheatstone bridge. Each Wheatstone bridge is electrically connected to its respective voltage measurement terminal and a DC power supply. Each voltage measurement terminal is sequentially electrically connected to an amplifier circuit, a data acquisition unit, and a PC terminal.

[0009] The sensor platform is integrally formed from an I-beam, a loading boss, and a fixed platform. The fixed platform is a square plate-shaped axisymmetric structure. A square through-slot perpendicular to itself is opened at the center of the square side of the fixed platform. The four groove surfaces of the square through-slot are parallel to the four outer sides of the fixed platform. The loading boss is located at the center of the square through-slot. The loading boss is a regular square prism. The four outer sides of the loading boss are connected to the four groove surfaces of the square through-slot through the I-beam. The four outer sides of the loading boss are parallel to the groove surfaces of the square through-slots they face. Twelve resistance strain gauges are mounted on the I-beam. A through-hole with a rectangular length parallel to the groove surface of the square through-slot is opened at the center of the loading boss. Through-holes with a central threaded hole parallel to the central threaded hole are opened at the symmetrical positions of the four corners of the fixed platform. One square side of the sensor platform is mounted at the fixed position through the threaded hole and four bolts. The load-bearing plate is mounted on the side of the loading boss away from the fixed position through the central threaded hole and one bolt.

[0010] The I-beams are located between the four outer sides of the loading boss and the groove surfaces of the square through slots of the fixed platform opposite to each other. The two parallel side plates of the I-beams are perpendicular to the groove surfaces of the square through slots they are connected to and parallel to the length direction of the central threaded hole. The middle plate of the I-beams is perpendicular to the groove surfaces of the square through slots they are connected to and perpendicular to the length direction of the central threaded hole. The first I-beam is located between the first threaded hole and the second threaded hole, the second I-beam is located between the second threaded hole and the third threaded hole, the third I-beam is located between the third threaded hole and the fourth threaded hole, and the fourth I-beam is located between the first threaded hole and the fourth threaded hole. Three resistance strain gauges are installed on the I-beams respectively.

[0011] One square face of the loading boss is located outside the square through slot of the fixed platform. There is a gap between one square face of the loading boss and the square face of the loading boss that is next to it. The end face of the I-beam near the slot of the square through slot is flush with one square face of the loading boss. The other square face of the loading boss is located outside the square through slot of the loading boss. There is a gap between the other square face of the loading boss and the square face of the loading boss that is next to it. The end face of the I-beam near the other square face of the loading boss is flush with the other square face of the loading boss. A load-bearing plate is installed on one square face of the loading boss through a central threaded hole and a bolt. The other square face of the fixed platform is installed at a fixed position through a threaded hole and four bolts.

[0012] The first, fifth, and tenth resistance strain gauges are mounted on the first I-beam. The first and fifth resistance strain gauges are mounted on the side of the middle plate of the first I-beam closest to the load-bearing plate, and the tenth resistance strain gauge is mounted on the side of one of the two side plates of the first I-beam closest to the first threaded hole. The third, eighth, and twelfth resistance strain gauges are mounted on the second I-beam. The third resistance strain gauge is mounted on the side of the middle plate of the second I-beam closest to the load-bearing plate, and the eighth and twelfth resistance strain gauges are mounted on the side of one of the two side plates of the second I-beam closest to the second threaded hole. The second, sixth, and... The ninth resistance strain gauge is installed on the third I-beam. The second and sixth resistance strain gauges are installed on the side of the middle plate of the third I-beam away from and near the load-bearing plate, respectively. The ninth resistance strain gauge is installed on the side of one of the two side plates of the third I-beam near the third threaded hole. The fourth, seventh, and eleventh resistance strain gauges are installed on the fourth I-beam. The fourth resistance strain gauge is installed on the side of the middle plate of the fourth I-beam near the load-bearing plate. The seventh resistance strain gauge is installed on the side of one of the two side plates of the fourth I-beam near the fourth threaded hole. The eleventh resistance strain gauge is installed on the side of the other side plate of the fourth I-beam near the first threaded hole.

[0013] The first and second resistance strain gauges, the third and fourth resistance strain gauges, the fifth and sixth resistance strain gauges, the seventh and eighth resistance strain gauges, the ninth and tenth resistance strain gauges, and the eleventh and twelfth resistance strain gauges are connected in series to form a Wheatstone bridge.

[0014] The sensor platform has the X-axis positive direction as the line connecting the center of the first threaded hole and the center of the second threaded hole, the Y-axis positive direction as the line connecting the center of the second threaded hole and the center of the third threaded hole, and the Z-axis positive direction as the straight line from one side square surface of the loading boss to the other side square surface; each resistance strain gauge includes two strain gauges connected in series, with one end of the two strain gauges close to each other at 90°.

[0015] The first resistance strain gauge includes a first strain gauge R1 and a second strain gauge R2. The fifth resistance strain gauge includes a ninth strain gauge R9 and a tenth strain gauge R10. The tenth resistance strain gauge includes a nineteenth strain gauge R19 and a twentieth strain gauge R20. The first strain gauge R1, the second strain gauge R2, the ninth strain gauge R9, and the tenth strain gauge R10 are attached to the center of the side of the intermediate plate of the first I-beam facing the positive Z-axis and are distributed in a cross shape symmetrical to the X-axis and Y-axis. The nineteenth strain gauge R19 and the twentieth strain gauge R20 are symmetrical to the plane of the intermediate plate of the first I-beam and the intersection of the two is located at the center of one of the two side plates of the first I-beam. The 90° openings of the nineteenth strain gauge R19 and the twentieth strain gauge R20 face the loading boss.

[0016] The third resistance strain gauge includes the fifth strain gauge R5 and the sixth strain gauge R6; the eighth resistance strain gauge includes the fifteenth strain gauge R15 and the sixteenth strain gauge R16; and the twelfth resistance strain gauge includes the twenty-third strain gauge R23 and the twenty-fourth strain gauge R24. The fifth strain gauge R5 and the sixth strain gauge R6 are attached to the side of the middle plate of the second I-beam facing the positive Z-axis, and the intersection of the two is located at the center of the middle plate of the second I-beam. The fifth strain gauge R5 and the sixth strain gauge R6 are symmetrical about the X-axis and have a 90° opening facing the loading boss. The fifteenth strain gauge R15, the sixteenth strain gauge R16, the twenty-third strain gauge R23, and the twenty-fourth strain gauge R24 are attached to the center of one of the two side plates of the second I-beam and are distributed in a cross shape symmetrical about the X-axis and Z-axis.

[0017] The second resistance strain gauge includes the third strain gauge R3 and the fourth strain gauge R4; the sixth resistance strain gauge includes the eleventh strain gauge R11 and the twelfth strain gauge R12; and the ninth resistance strain gauge includes the seventeenth strain gauge R17 and the eighteenth strain gauge R18. The eleventh strain gauge R11 and the twelfth strain gauge R12 are attached to the side of the intermediate plate of the third I-beam facing the positive Z-axis, and their intersection point is located at the center of the intermediate plate of the third I-beam. The eleventh strain gauge R11 and the twelfth strain gauge R12 are symmetrical about the Y-axis and have a 90° opening facing the loading boss. The third strain gauge R3 and the fourth strain gauge R4 are attached to the side of the middle plate of the third I-beam facing the negative Z-axis, and the intersection of the two is located at the center of the middle plate of the third I-beam. The second resistance strain gauge and the sixth resistance strain gauge are symmetrical to the middle plate of the third I-beam. The seventeenth strain gauge R17 and the eighteenth strain gauge R18 are symmetrical to the plane of the middle plate of the third I-beam, and the intersection of the two is located at the center of one of the two side plates of the third I-beam. The 90° openings of the seventeenth strain gauge R17 and the eighteenth strain gauge R18 face the loading boss.

[0018] The fourth resistance strain gauge includes the seventh strain gauge R7 and the eighth strain gauge R8. The seventh resistance strain gauge includes the thirteenth strain gauge R13 and the fourteenth strain gauge R14. The eleventh resistance strain gauge includes the twenty-first strain gauge R21 and the twenty-second strain gauge R22. The seventh strain gauge R7 and the eighth strain gauge R8 are attached to the side of the intermediate plate of the fourth I-beam facing the negative Z-axis, and their intersection is located at the center of the intermediate plate of the fourth I-beam. The seventh strain gauge R7 and the eighth strain gauge R8 are symmetrical about the X-axis and have a 90° opening facing the opposite direction of the loading boss. The thirteenth strain gauge... Strain gauges R13 and R14 are symmetrical about the plane containing the middle plate of the fourth I-beam, and their intersection is located at the center of one side plate of the two side plates of the fourth I-beam. The 90° openings of strain gauges R17 and R18 face the loading boss. Strain gauges R21 and R22 are symmetrical about the plane containing the middle plate of the fourth I-beam, and their intersection is located at the center of the other side plate of the two side plates of the fourth I-beam. The 90° openings of strain gauges R21 and R22 face the loading boss.

[0019] The first strain gauge R1, the second strain gauge R2, the third strain gauge R3, and the fourth strain gauge R4 are connected in series to form the first Wheatstone bridge for measuring the X-direction force Fx of the resistive strain type six-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the first strain gauge R1 and the second strain gauge R2, and the other end of the voltage measurement terminal Ui is connected between the third strain gauge R3 and the fourth strain gauge R4. One end of the DC power supply U is connected between the first strain gauge R1 and the fourth strain gauge R4, and the other end is connected between the second strain gauge R2 and the third strain gauge R3.

[0020] The fifth strain gauge R5, the sixth strain gauge R6, the seventh strain gauge R7, and the eighth strain gauge R8 are connected in series to form a second Wheatstone bridge for measuring the Y-direction force Fy of a resistive strain gauge six-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the fifth strain gauge R5 and the sixth strain gauge R6, and the other end of the voltage measurement terminal Ui is connected between the seventh strain gauge R7 and the eighth strain gauge R8. One end of the DC power supply U is connected between the fifth strain gauge R5 and the eighth strain gauge R8, and the other end is connected between the sixth strain gauge R6 and the seventh strain gauge R7.

[0021] The ninth strain gauge R9, the tenth strain gauge R10, the eleventh strain gauge R11, and the twelfth strain gauge R12 are connected in series to form the third Wheatstone bridge for measuring the Z-direction torque Mz of the resistance strain gauge type ten-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the ninth strain gauge R9 and the tenth strain gauge R10, and the other end of the voltage measurement terminal Ui is connected between the eleventh strain gauge R11 and the twelfth strain gauge R12. One end of the DC power supply U is connected between the ninth strain gauge R9 and the twelfth strain gauge R12, and the other end is connected between the tenth strain gauge R10 and the eleventh strain gauge R11.

[0022] The thirteenth strain gauge R13, the fourteenth strain gauge R14, the fifteenth strain gauge R15, and the sixteenth strain gauge R16 are connected in series to form the fourth Wheatstone bridge for measuring the X-direction torque Mx of the resistive strain gauge type ten-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the thirteenth strain gauge R13 and the fourteenth strain gauge R14, and the other end of the voltage measurement terminal Ui is connected between the fifteenth strain gauge R15 and the sixteenth strain gauge R16. One end of the DC power supply U is connected between the thirteenth strain gauge R13 and the sixteenth strain gauge R16, and the other end is connected between the fourteenth strain gauge R14 and the fifteenth strain gauge R15.

[0023] The seventeenth strain gauge R17, the eighteenth strain gauge R18, the nineteenth strain gauge R19, and the twentieth strain gauge R20 are connected in series to form the fifth Wheatstone bridge for measuring the Y-direction torque My of the resistive strain gauge type ten-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the seventeenth strain gauge R17 and the eighteenth strain gauge R18, and the other end of the voltage measurement terminal Ui is connected between the nineteenth strain gauge R19 and the twentieth strain gauge R20. One end of the DC power supply U is connected between the seventeenth strain gauge R17 and the twentieth strain gauge R20, and the other end is connected between the eighteenth strain gauge R18 and the nineteenth strain gauge R19.

[0024] The 21st strain gauge R21, the 22nd strain gauge R22, the 23rd strain gauge R23, and the 24th strain gauge R24 are connected in series to form the sixth Wheatstone bridge for measuring the Z-direction force Fz of the resistive strain gauge 10-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the 21st strain gauge R21 and the 22nd strain gauge R22, and the other end of the voltage measurement terminal Ui is connected between the 23rd strain gauge R23 and the 24th strain gauge R24. One end of the DC power supply U is connected between the 21st strain gauge R21 and the 24th strain gauge R24, and the other end is connected between the 22nd strain gauge R22 and the 23rd strain gauge R23.

[0025] The detection method of a resistance strain gauge six-dimensional force sensor includes the following steps:

[0026] Step 1: Apply different loads to the load-bearing plate, and obtain the resistance changes of each Wheatstone bridge through each voltage measurement terminal Ui. Then convert the changes into voltage changes and output them sequentially to the amplifier circuit, data acquisition unit and PC terminal. The PC terminal obtains the voltage-load relationship curve based on the relationship between the load of each force and the output voltage changes.

[0027] Step 2: When the load-bearing plate is subjected to the force to be measured, the voltage change is acquired through the PC terminal, and then the load of the force to be measured is obtained according to the voltage-load relationship curve, thus realizing the shear strain detection of the force.

[0028] The beneficial effects of this invention are:

[0029] The sensor of this invention is small in size, simple in structure, has little impact from its own weight, low sensitivity to patch position, and high sensitivity. It can accurately measure force / torque in the X, Y, and Z directions and can be used for industrial measurement. Attached Figure Description

[0030] Figure 1 This is a three-dimensional structural diagram of the resistive strain gauge six-dimensional force sensor of the present invention;

[0031] Figure 2 This is a top view of the resistive strain gauge six-dimensional force sensor of the present invention;

[0032] Figure 3 This is a cross-sectional view of the resistive strain gauge six-dimensional force sensor of the present invention;

[0033] Figure 4 This is a top view of the strain gauge distribution of the present invention;

[0034] Figure 5 This is a distribution diagram of strain gauge R13-14 of the present invention;

[0035] Figure 6 This is a distribution diagram of strain gauges R15-16 and R21-24 of the present invention;

[0036] Figure 7 This is a distribution diagram of strain gauge R19-20 of the present invention;

[0037] Figure 8 This is a distribution diagram of strain gauge R17-18 of the present invention;

[0038] Figure 9 This is a schematic diagram of a Wheatstone bridge composed of strain gauges from the present invention.

[0039] Figure 10 This is a schematic diagram of data transmission in this invention;

[0040] In the diagram: 1. First threaded hole, 2. First I-beam, 3. Second threaded hole, 4. Second I-beam, 5. Third threaded hole, 6. Third I-beam, 7. Fourth threaded hole, 8. Fourth I-beam, 9. Loading boss, 10. Center threaded hole, 11. Fixed platform. Detailed Implementation

[0041] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0042] like Figure 1 , Figure 2 , Figure 3 and Figure 10 As shown, the present invention, a resistance strain gauge six-dimensional force sensor based on shear strain detection, includes a sensor platform and twelve resistance strain gauges. Each resistance strain gauge is mounted on the sensor platform, which is installed at a fixed position. A load-bearing plate is also mounted on the sensor platform. Every two resistance strain gauges are connected in series to form a Wheatstone bridge. Each Wheatstone bridge is electrically connected to its respective voltage measurement terminal and a DC power supply. Each voltage measurement terminal is sequentially electrically connected to an amplifier circuit, a data acquisition unit, and a PC terminal.

[0043] The sensor platform is integrally formed by I-beams 2, 4, 6, and 8, a loading boss 9, and a fixed platform 11. The fixed platform 11 is a square plate-shaped axisymmetric structure. A square through-slot perpendicular to itself is formed at the center of the square side of the fixed platform 11, and the four groove surfaces of the square through-slot are parallel to the four outer sides of the fixed platform 11. The loading boss 9 is located at the center of the square through-slot. The loading boss 9 is a regular square prism, and its four outer sides are connected to the four groove surfaces of the square through-slot through I-beams 2, 4, 6, and 8, respectively. Twelve resistance strain gauges are mounted on I-beams 2, 4, 6, and 8, running on the surface of their respective square through slots. A through central threaded hole 10, parallel to the surface of the square through slot, is opened in the center of the loading boss 9. Through threaded holes 1, 3, 5, and 7, parallel to the central threaded hole 10, are opened at the symmetrical positions of the four corners of the fixed platform 11. The square surface of one side of the sensor platform is mounted at the fixed position through the threaded holes 1, 3, 5, and 7 and four bolts. The load-bearing plate is mounted on the side of the loading boss 9 away from the fixed position through the central threaded hole 10 and a bolt.

[0044] I-beams 2, 4, 6, and 8 are located between the four outer sides of the loading boss 9 and the groove surfaces of the square through slots of the fixed platform 11 they face. The two parallel side plates of I-beams 2, 4, 6, and 8 are perpendicular to the groove surfaces of the square through slots they connect to and parallel to the length direction of the central threaded hole 10. The middle plates of I-beams 2, 4, 6, and 8 are perpendicular to the groove surfaces of the square through slots they connect to and perpendicular to the length direction of the central threaded hole 10. The first I-beam 2 is located between the first threaded hole 1 and the second threaded hole 3. The second I-beam 4 is located between the second threaded hole 3 and the third threaded hole 5. The third I-beam 6 is located between the third threaded hole 5 and the fourth threaded hole 7. The fourth I-beam 8 is located between the first threaded hole 1 and the fourth threaded hole 7. Three resistance strain gauges are installed on each of the I-beams 2, 4, 6, and 8.

[0045] One square face of the loading boss 9 is located outside the square through slot of the fixed platform 11. There is a gap between one square face of the loading boss 9 and the square face of the loading boss 9 that is close to it. The end faces of the slots of the I-beams 2, 4, 6, and 8 that are close to the square through slots are flush with one square face of the loading boss 9. The other square face of the loading boss 9 is located outside the square through slot of the loading boss 9. There is a gap between the other square face of the loading boss 9 and the square face of the loading boss 9 that is close to it. The end faces of the I-beams 2, 4, 6, and 8 that are close to the square face of the loading boss 9 are flush with the square face of the loading boss 9. A load-bearing plate is installed on one square face of the loading boss 9 through the central threaded hole 10 and a bolt. The other square face of the fixed platform 11 is installed at a fixed position through the threaded holes 1, 3, 5, and 7 and four bolts.

[0046] The first, fifth, and tenth resistance strain gauges are mounted on the first I-beam 2. The first and fifth resistance strain gauges are mounted on the side of the middle plate of the first I-beam 2 closest to the load-bearing plate, and the tenth resistance strain gauge is mounted on the side of one of the two side plates of the first I-beam 2 closest to the first threaded hole 1. The third, eighth, and twelfth resistance strain gauges are mounted on the second I-beam 4. The third resistance strain gauge is mounted on the side of the middle plate of the second I-beam 4 closest to the load-bearing plate, and the eighth and twelfth resistance strain gauges are mounted on the side of one of the two side plates of the second I-beam 4 closest to the second threaded hole 3. The second, sixth, and ninth resistance strain gauges are mounted on the side of the first I-beam 4 closest to the load-bearing plate, and the tenth resistance strain gauge is mounted on the side of one of the two side plates of the second I-beam 4 closest to the second threaded hole 3. Strain gauges are installed on the third I-beam 6. The second and sixth strain gauges are installed on the side of the middle plate of the third I-beam 6 away from and near the load-bearing plate, respectively. The ninth strain gauge is installed on the side of one of the two side plates of the third I-beam 6 near the third threaded hole 5. The fourth, seventh, and eleventh strain gauges are installed on the fourth I-beam 8. The fourth strain gauge is installed on the side of the middle plate of the fourth I-beam 8 near the load-bearing plate. The seventh strain gauge is installed on the side of one of the two side plates of the fourth I-beam 8 near the fourth threaded hole 7. The eleventh strain gauge is installed on the side of the other side plate of the fourth I-beam 8 near the first threaded hole 1.

[0047] The first and second resistance strain gauges, the third and fourth resistance strain gauges, the fifth and sixth resistance strain gauges, the seventh and eighth resistance strain gauges, the ninth and tenth resistance strain gauges, and the eleventh and twelfth resistance strain gauges are connected in series to form a Wheatstone bridge.

[0048] The sensor platform takes the line connecting the center of the first threaded hole 1 and the center of the second threaded hole 3 as the positive X-axis, the line connecting the center of the second threaded hole 3 and the center of the third threaded hole 5 as the positive Y-axis, and the straight line from the other side square surface of the loading boss 9 to the other side square surface as the positive Z-axis; each resistance strain gauge includes two strain gauges connected in series, with one end of the two strain gauges close to each other at 90°.

[0049] like Figure 4 , Figure 5 , Figure 6 , Figure 7 and Figure 8As shown, the first resistance strain gauge includes a first strain gauge R1 and a second strain gauge R2; the fifth resistance strain gauge includes a ninth strain gauge R9 and a tenth strain gauge R10; and the tenth resistance strain gauge includes a nineteenth strain gauge R19 and a twentieth strain gauge R20. The first strain gauge R1, the second strain gauge R2, the ninth strain gauge R9, and the tenth strain gauge R10 are attached to the center of the side of the intermediate plate of the first I-beam 2 facing the positive Z-axis and are distributed in a cross shape symmetrical to the X-axis and Y-axis. The nineteenth strain gauge R19 and the twentieth strain gauge R20 are symmetrical to the plane of the intermediate plate of the first I-beam 2, and the intersection of the two is located at the center of one of the two side plates of the first I-beam 2. The 90° openings of the nineteenth strain gauge R19 and the twentieth strain gauge R20 face the loading boss 9.

[0050] The third resistance strain gauge includes the fifth strain gauge R5 and the sixth strain gauge R6; the eighth resistance strain gauge includes the fifteenth strain gauge R15 and the sixteenth strain gauge R16; and the twelfth resistance strain gauge includes the twenty-third strain gauge R23 and the twenty-fourth strain gauge R24. The fifth strain gauge R5 and the sixth strain gauge R6 are attached to the side of the intermediate plate of the second I-beam 4 facing the positive Z-axis, and the intersection of the two is located at the center of the intermediate plate of the second I-beam 4. The fifth strain gauge R5 and the sixth strain gauge R6 are symmetrical about the X-axis and have a 90° opening facing the loading boss 9. The fifteenth strain gauge R15, the sixteenth strain gauge R16, the twenty-third strain gauge R23, and the twenty-fourth strain gauge R24 are attached to the center of one of the two side plates of the second I-beam 4 and are distributed in a cross shape symmetrical about the X-axis and the Z-axis.

[0051] The second resistance strain gauge includes the third strain gauge R3 and the fourth strain gauge R4; the sixth resistance strain gauge includes the eleventh strain gauge R11 and the twelfth strain gauge R12; and the ninth resistance strain gauge includes the seventeenth strain gauge R17 and the eighteenth strain gauge R18. The eleventh strain gauge R11 and the twelfth strain gauge R12 are attached to the side of the intermediate plate of the third I-beam 6 facing the positive Z-axis, and their intersection point is located at the center of the intermediate plate of the third I-beam 6. The eleventh strain gauge R11 and the twelfth strain gauge R12 are symmetrical about the Y-axis and have a 90° opening facing the loading boss 9. The third strain gauge R3 and the fourth strain gauge R4 are attached to the side of the intermediate plate of the third I-beam 6 facing the negative Z-axis, and the intersection point between them is located at the center of the intermediate plate of the third I-beam 6. The second resistance strain gauge and the sixth resistance strain gauge are symmetrical to the intermediate plate of the third I-beam 6. The seventeenth strain gauge R17 and the eighteenth strain gauge R18 are symmetrical to the plane where the intermediate plate of the third I-beam 6 is located, and the intersection point between them is located at the center of one of the two side plates of the third I-beam 6. The 90° openings of the seventeenth strain gauge R17 and the eighteenth strain gauge R18 face the loading boss 9.

[0052] The fourth resistance strain gauge includes the seventh strain gauge R7 and the eighth strain gauge R8. The seventh resistance strain gauge includes the thirteenth strain gauge R13 and the fourteenth strain gauge R14. The eleventh resistance strain gauge includes the twenty-first strain gauge R21 and the twenty-second strain gauge R22. The seventh strain gauge R7 and the eighth strain gauge R8 are attached to the side of the intermediate plate of the fourth I-beam 8 facing the negative Z-axis, and their intersection is located at the center of the intermediate plate of the fourth I-beam 8. The seventh strain gauge R7 and the eighth strain gauge R8 are symmetrical about the X-axis and have a 90° opening facing the opposite direction of the loading boss 9. The thirteenth strain gauge R13... Strain gauges R13 and R14 are symmetrical about the plane containing the middle plate of the fourth I-beam 8, and their intersection is located at the center of one side plate of the two side plates of the fourth I-beam 8. The 90° openings of strain gauges R17 and R18 face the loading boss 9. Strain gauges R21 and R22 are symmetrical about the plane containing the middle plate of the fourth I-beam 8, and their intersection is located at the center of the other side plate of the two side plates of the fourth I-beam 8. The 90° openings of strain gauges R21 and R22 face the loading boss 9.

[0053] like Figure 9 As shown, the first strain gauge R1, the second strain gauge R2, the third strain gauge R3, and the fourth strain gauge R4 are connected in series to form the first Wheatstone bridge for measuring the X-direction force Fx of the resistive strain type six-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the first strain gauge R1 and the second strain gauge R2, and the other end of the voltage measurement terminal Ui is connected between the third strain gauge R3 and the fourth strain gauge R4. One end of the DC power supply U is connected between the first strain gauge R1 and the fourth strain gauge R4, and the other end is connected between the second strain gauge R2 and the third strain gauge R3.

[0054] The fifth strain gauge R5, the sixth strain gauge R6, the seventh strain gauge R7, and the eighth strain gauge R8 are connected in series to form a second Wheatstone bridge for measuring the Y-direction force Fy of a resistive strain gauge six-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the fifth strain gauge R5 and the sixth strain gauge R6, and the other end of the voltage measurement terminal Ui is connected between the seventh strain gauge R7 and the eighth strain gauge R8. One end of the DC power supply U is connected between the fifth strain gauge R5 and the eighth strain gauge R8, and the other end is connected between the sixth strain gauge R6 and the seventh strain gauge R7.

[0055] The ninth strain gauge R9, the tenth strain gauge R10, the eleventh strain gauge R11, and the twelfth strain gauge R12 are connected in series to form the third Wheatstone bridge for measuring the Z-direction torque Mz of the resistance strain gauge type ten-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the ninth strain gauge R9 and the tenth strain gauge R10, and the other end of the voltage measurement terminal Ui is connected between the eleventh strain gauge R11 and the twelfth strain gauge R12. One end of the DC power supply U is connected between the ninth strain gauge R9 and the twelfth strain gauge R12, and the other end is connected between the tenth strain gauge R10 and the eleventh strain gauge R11.

[0056] The thirteenth strain gauge R13, the fourteenth strain gauge R14, the fifteenth strain gauge R15, and the sixteenth strain gauge R16 are connected in series to form the fourth Wheatstone bridge for measuring the X-direction torque Mx of the resistive strain gauge type ten-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the thirteenth strain gauge R13 and the fourteenth strain gauge R14, and the other end of the voltage measurement terminal Ui is connected between the fifteenth strain gauge R15 and the sixteenth strain gauge R16. One end of the DC power supply U is connected between the thirteenth strain gauge R13 and the sixteenth strain gauge R16, and the other end is connected between the fourteenth strain gauge R14 and the fifteenth strain gauge R15.

[0057] The seventeenth strain gauge R17, the eighteenth strain gauge R18, the nineteenth strain gauge R19, and the twentieth strain gauge R20 are connected in series to form the fifth Wheatstone bridge for measuring the Y-direction torque My of the resistive strain gauge type ten-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the seventeenth strain gauge R17 and the eighteenth strain gauge R18, and the other end of the voltage measurement terminal Ui is connected between the nineteenth strain gauge R19 and the twentieth strain gauge R20. One end of the DC power supply U is connected between the seventeenth strain gauge R17 and the twentieth strain gauge R20, and the other end is connected between the eighteenth strain gauge R18 and the nineteenth strain gauge R19.

[0058] The 21st strain gauge R21, the 22nd strain gauge R22, the 23rd strain gauge R23, and the 24th strain gauge R24 are connected in series to form the sixth Wheatstone bridge for measuring the Z-direction force Fz of the resistive strain gauge 10-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the 21st strain gauge R21 and the 22nd strain gauge R22, and the other end of the voltage measurement terminal Ui is connected between the 23rd strain gauge R23 and the 24th strain gauge R24. One end of the DC power supply U is connected between the 21st strain gauge R21 and the 24th strain gauge R24, and the other end is connected between the 22nd strain gauge R22 and the 23rd strain gauge R23.

[0059] The detection method of the resistance strain gauge six-dimensional force sensor of the present invention includes the following steps:

[0060] Step 1: Apply different loads to the load-bearing plate, and obtain the resistance changes of each Wheatstone bridge through each voltage measurement terminal Ui. Then convert the changes into voltage changes and output them sequentially to the amplifier circuit, data acquisition unit and PC terminal. The PC terminal obtains the voltage-load relationship curve based on the relationship between the load of each force and the output voltage changes.

[0061] Step 2: When the load-bearing plate is subjected to the force to be measured, the voltage change is acquired through the PC terminal, and then the load of the force to be measured is obtained according to the voltage-load relationship curve, thus realizing the shear strain detection of the force.

[0062] like Figure 3 As shown, the height of the loading boss 9 is 1mm greater than the height of the fixed platform 11 to facilitate loading. There is a 1mm gap between the loading boss 9 and the bottom surface of the fixed platform 11 to achieve mechanical deformation. This gap can also be adjusted to achieve overload protection. The horizontally placed transverse plates of the front I-beam 2, rear I-beam 6, left I-beam 8, and right I-beam 4 are 1mm thick, and the vertically placed flanges are 1mm thick. This design ensures that the transverse plates mainly bear the shear load in the horizontal plane, while the flanges mainly bear the shear load in the vertical plane, which is more conducive to measuring shear strain. Furthermore, this design ensures a relatively uniform shear strain distribution across the plates, effectively reducing the sensitivity of the measurement results to the patch position. The front I-beam 2, rear I-beam 6, left I-beam 8, and right I-beam 4 are all positioned symmetrically in the thickness direction. This arrangement ensures that, under specific deformation, the shear strain distribution of the web plate is opposite vertically about the transverse plate axis.

[0063] When the top of the loading boss 9 is subjected to a force in the X direction, the left I-beam 8 and the right I-beam 4 are subjected to axial forces, and no shear strain is generated on the vertical plate; the front I-beam 2 and the rear I-beam 6 are subjected to shear forces and bending moments, and a certain amount of shear strain is generated on the vertical plate, but the configuration of the I-beams makes the shear strain of the vertical plate extremely small and the signs are opposite on the upper and lower sides of the central layer; when the top of the loading boss 9 is subjected to a force in the Y direction, the left I-beam 8 and the right I-beam 4 are subjected to shear forces and bending moments, and a certain amount of shear strain is generated on the vertical plate, but the configuration of the I-beams makes the shear strain of the vertical plate extremely small and the signs are opposite on the upper and lower sides of the central layer. The front I-beam 2 and rear I-beam 6 are subjected to axial force, and no shear strain is generated on the vertical plates. When the loading boss 9 is subjected to a force in the Z direction, the front I-beam 2, rear I-beam 6, left I-beam 8, and right I-beam 4 are subjected to shear force and bending moment, and a certain amount of shear strain is generated on the vertical plates. The shear strains of the two vertical plates of the front I-beam 2 have the same sign, the shear strains of the two vertical plates of the rear I-beam 6 have the same sign, the shear strains of the two vertical plates of the left I-beam 8 have the same sign, and the shear strains of the two vertical plates of the right I-beam 4 have the same sign. However, the signs of the shear strains of the two vertical plates of the front I-beam 2 and the two shear strains of the rear I-beam 6 are different. Conversely, the signs of the shear strains on the two vertical plates of the left I-beam 8 are opposite to those on the two vertical plates of the right I-beam 4; when the top of the loading boss 9 is subjected to a moment in the X direction, the front I-beam 2 and the rear I-beam 6, the left I-beam 8 and the right I-beam 4 are subjected to shear force and bending moment, and a certain degree of shear strain is generated on both vertical plates. The signs of the shear strains on the left and right sides of the front I-beam 2 are opposite, and the signs of the shear strains on the left and right sides of the rear I-beam 6 are opposite. The signs of the shear strains on the two vertical plates of the left I-beam 8 are the same as those on the two vertical plates of the right I-beam 4; when the top of the loading boss 9 is subjected to a moment in the Y direction... At the same time, shear strain is generated on the two vertical plates of the front I-beam 2, rear I-beam 6, left I-beam 8, and right I-beam 4. The signs of shear strain are opposite on the left and right sides of the vertical plates of the left I-beam 8, and opposite on the right I-beam 4. The signs of shear strain on the two vertical plates of the front I-beam 2 are the same as those on the two vertical plates of the rear I-beam 6. When the top of the loading boss 9 is subjected to a moment in the Z direction, the front I-beam 2, rear I-beam 6, left I-beam 4, and right I-beam 8 are only subjected to bending moment. The surfaces of the vertical plates are subjected to normal strain rather than shear strain, and no shear strain is generated on the vertical plates. Therefore, by setting strain gauges R21, R22, R23, and R24 and forming a Wheatstone bridge, the shear strain generated on the surfaces of the vertical plates of the left I-beam 8 and right I-beam 4 due to the Z-direction force can be measured, and the influence of other loads can be eliminated. By setting strain gauges R17, R18, R19, and R20 and forming a Wheatstone bridge, the shear strain on the surface of the vertical plates of the front I-beam 2 and the rear I-beam 6 can be measured when only the X-direction moment is applied, eliminating the influence of other loads.By setting strain gauges R13, R14, R15, and R16 and forming a Wheatstone bridge, the shear strain on the surface of the vertical plates of the left I-beam 8 and the right I-beam 4 can be measured when only the Y-direction moment is applied, eliminating the influence of other loads.

[0064] When the loading boss 9 is subjected to a force in the X direction, the front I-beam 2 and the rear I-beam 6 are subjected to shear force and bending moment, resulting in shear strain on the cross plates. The shear strain on the surface of the cross plate of the front I-beam 2 has the opposite sign to that of the rear I-beam 6. The left I-beam 8 and the right I-beam 4 are subjected to axial force and do not produce shear strain. When the loading boss 9 is subjected to a force in the Y direction, the front I-beam 2 and the rear I-beam 6 are subjected to axial force and do not produce shear strain. The left I-beam 8 and the right I-beam 4 are subjected to shear force and bending moment, resulting in shear strain on the cross plates. The shear strain on the cross plates of the left and right I-beams has the opposite sign to that of the right I-beams. The signs are opposite; when the loading boss 9 is subjected to a force in the Z direction, the cross plates of the front I-beam 2, rear I-beam 6, left I-beam 8, and right I-beam 4 mainly produce full normal strain rather than shear strain; when the top of the loading boss 9 is subjected to a moment in the X direction, the front I-beam 2 and rear I-beam 6 are mainly subjected to torsion, and the shear strain on the cross plates of the front I-beam 2 and rear I-beam 6 has opposite signs, while the cross plates of the left I-beam 8 and right I-beam 4 mainly produce bending normal stress rather than shear stress; when the top of the loading boss 9 is subjected to a moment in the Y direction, the cross plates of the left I-beam 8 and right I-beam 4 mainly produce bending normal stress rather than shear stress. It is not shear stress. The front I-beam 2 and rear I-beam 6 are subjected to torsion, and the shear stress signs on the cross plates of the front I-beam 2 and rear I-beam 6 are opposite. When the top of the loading boss 9 is subjected to a moment in the Z direction, the front I-beam 2, rear I-beam 6, left I-beam 8, and right I-beam 4 are subjected to shear force and bending moment. The shear strain signs on the cross plates of the front I-beam 2 and rear I-beam 6 are the same, and the shear strain signs on the cross plates of the left I-beam 8 and right I-beam 4 are the same. The shear strain sign on the cross plate of the front I-beam 2 is opposite to that on the cross plate of the left I-beam 8. This can be determined by setting strain gauges R1, R2, and R3. Strain gauges R5, R6, R7, and R8, when combined to form a Wheatstone bridge, can measure the shear strain on the surface of the cross plates of the front I-beam 2 and the rear I-beam 6 caused solely by the force in the X direction, eliminating the influence of other loads. Similarly, strain gauges R9, R10, R11, and R12, when combined to form a Wheatstone bridge, can measure the shear strain on the surface of the cross plates of the front I-beam 2 and the rear I-beam 6 caused solely by the moment in the Z direction, eliminating the influence of other loads.

[0065] like Figure 9 As shown, this is a strain gauge bridge circuit, which converts the resistance change of the strain gauge on a small-size, large-range six-dimensional force sensor into a voltage change and outputs it. After calibration, the exact relationship between the output and the load can be obtained.

[0066] like Figure 10 As shown, during use, the threaded holes 1, 3, 5 and 7 on the fixed platform 11 are fixed with bolts respectively. On this basis, the loading boss 9 is connected to the load-bearing plate. The measured voltage Ui is amplified by the amplifier circuit and then the data is collected and imported into the PC terminal.

[0067] The overall dimensions of the sensor's elastic body are preferably 30mm×30mm×12mm, the thickness of the thin-walled beam is 1mm, the height of the side beam is 10mm, and the width of the horizontal beam is 4mm; the preferred material for the sensor's elastic body is stainless steel 17-4ph; the preferred form of the resistance strain gauge is a series-connected feather-shaped strain gauge; the preferred resistance of the resistance strain gauge is 350 ohms; the preferred size of the resistance strain gauge is no more than 5×4mm; the preferred force measurement ranges of the sensor are Fz, Fx, and Fy of 2000N, and the preferred torque ranges are Mx, My, and Mz of 40N·m.

[0068] This invention is not limited to the preferred embodiments described above. Anyone can derive other forms of products under this invention. However, regardless of any changes made to their shape or structure, any technical solution that is the same as or similar to this application falls within the protection scope of this invention.

Claims

1. A resistance strain gauge six-dimensional force sensor based on shear strain detection, characterized in that: It includes a sensor platform and twelve resistance strain gauges. Each resistance strain gauge is mounted on the sensor platform, which is installed in a fixed position. A load-bearing plate is also mounted on the sensor platform. Every two resistance strain gauges are connected in series to form a Wheatstone bridge. Each Wheatstone bridge is electrically connected to its own voltage measurement terminal and DC power supply. Each voltage measurement terminal is sequentially electrically connected to an amplifier circuit, a data acquisition unit, and a PC terminal. The sensor platform is integrally formed by I-beams (2, 4, 6, 8), a loading boss (9), and a fixed platform (11). The fixed platform (11) is a square plate-shaped axisymmetric structure. A square through slot perpendicular to itself is opened at the center of the square side of the fixed platform (11). The four slot surfaces of the square through slot are parallel to the four outer sides of the fixed platform (11). The loading boss (9) is located at the center of the square through slot. The loading boss (9) is a regular square prism. The four outer sides of the loading boss (9) are connected to the four slot surfaces of the square through slot through the I-beams (2, 4, 6, 8). Twelve resistance strain gauges are mounted on I-beams (2, 4, 6, 8) with their respective groove surfaces parallel to the square through slots. A through central threaded hole (10) parallel to the groove surface of the square through slot is opened in the center of the loading boss (9). Through threaded holes (1, 3, 5, 7) parallel to the central threaded hole (10) are opened at the symmetrical positions of the four corners of the fixed platform (11). The square surface of one side of the sensor platform is installed at the fixed position through the threaded hole (1, 3, 5, 7) and four bolts. The load-bearing plate is installed on the side of the loading boss (9) away from the fixed position through the central threaded hole (10) and a bolt.

2. A six-dimensional force sensor based on shear strain detection according to claim 1, characterized in that: The I-beams (2, 4, 6, 8) are located between the four outer sides of the loading boss (9) and the groove surfaces of the square through slots of the fixed platform (11) that they face. The two parallel side plates of the I-beams (2, 4, 6, 8) are perpendicular to the groove surfaces of the square through slots they are connected to and parallel to the length direction of the central threaded hole (10). The middle plate of the I-beams (2, 4, 6, 8) is perpendicular to the groove surfaces of the square through slots they are connected to and perpendicular to the length direction of the central threaded hole (10). The first I-beam (2) is located between the first threaded hole (1) and the second threaded hole (3). The second I-beam (4) is located between the second threaded hole (3) and the third threaded hole (5). The third I-beam (6) is located between the third threaded hole (5) and the fourth threaded hole (7). The fourth I-beam (8) is located between the first threaded hole (1) and the fourth threaded hole (7). Three resistance strain gauges are installed on the I-beams (2, 4, 6, 8).

3. A six-dimensional force sensor based on shear strain detection according to claim 1, characterized in that: One side square face of the loading boss (9) is located outside the square through slot of the fixed platform (11). There is a gap between the one side square face of the loading boss (9) and the one side square face of the loading boss (9) that is close to it. The end face of the slot of the I-beam (2, 4, 6, 8) that is close to the square through slot is flush with the one side square face of the loading boss (9). The other side square face of the loading boss (9) is located outside the square through slot of the loading boss (9). There is a gap between the other side square face of the loading boss (9) and the one side square face of the loading boss (9) that is close to it. The end face of the I-beam (2, 4, 6, 8) that is close to the other side square face of the loading boss (9) is flush with the other side square face of the loading boss (9). One side square face of the loading boss (9) is fitted with a load-bearing plate through a central threaded hole (10) and a bolt. The other side square face of the fixed platform (11) is fitted at a fixed position through threaded holes (1, 3, 5, 7) and four bolts.

4. A six-dimensional force sensor based on shear strain detection according to claim 3, characterized in that: The first, fifth, and tenth resistance strain gauges are installed on the first I-beam (2). The first and fifth resistance strain gauges are installed on the side of the middle plate of the first I-beam (2) near the load-bearing plate, and the tenth resistance strain gauge is installed on the side of one of the two side plates of the first I-beam (2) near the first threaded hole (1). The third, eighth, and twelfth resistance strain gauges are installed on the second I-beam (4). The third resistance strain gauge is installed on the side of the middle plate of the second I-beam (4) near the load-bearing plate, and the eighth and twelfth resistance strain gauges are installed on the side of one of the two side plates of the second I-beam (4) near the second threaded hole (3). The second, sixth, and ninth resistance strain gauges are installed on the side of the first I-beam (2) near the load-bearing plate, and the tenth resistance strain gauge is installed on the side of one of the two side plates of the second I-beam (4) near the second threaded hole (3). The strain gauge is installed on the third I-beam (6). The second and sixth resistance strain gauges are respectively installed on the side of the middle plate of the third I-beam (6) away from and near the load-bearing plate. The ninth resistance strain gauge is installed on the side of one of the two side plates of the third I-beam (6) near the third threaded hole (5). The fourth, seventh and eleventh resistance strain gauges are installed on the fourth I-beam (8). The fourth resistance strain gauge is installed on the side of the middle plate of the fourth I-beam (8) near the load-bearing plate. The seventh resistance strain gauge is installed on the side of one of the two side plates of the fourth I-beam (8) near the fourth threaded hole (7). The eleventh resistance strain gauge is installed on the side of the other side plate of the two side plates of the fourth I-beam (8) near the first threaded hole (1). The first and second resistance strain gauges, the third and fourth resistance strain gauges, the fifth and sixth resistance strain gauges, the seventh and eighth resistance strain gauges, the ninth and tenth resistance strain gauges, and the eleventh and twelfth resistance strain gauges are connected in series to form a Wheatstone bridge.

5. A six-dimensional force sensor based on shear strain detection according to claim 4, characterized in that: The sensor platform is defined with the line connecting the center of the first threaded hole (1) and the center of the second threaded hole (3) as the positive X-axis, the line connecting the center of the second threaded hole (3) and the center of the third threaded hole (5) as the positive Y-axis, and the straight line from the other side square surface of the loading boss (9) to the other side square surface as the positive Z-axis; each resistance strain gauge includes two strain gauges connected in series, with one end of each strain gauge close to each other at 90°. The first resistance strain gauge includes a first strain gauge R1 and a second strain gauge R2. The fifth resistance strain gauge includes a ninth strain gauge R9 and a tenth strain gauge R10. The tenth resistance strain gauge includes a nineteenth strain gauge R19 and a twentieth strain gauge R20. The first strain gauge R1, the second strain gauge R2, the ninth strain gauge R9 and the tenth strain gauge R10 are attached to the center of the side of the intermediate plate of the first I-beam (2) facing the positive Z-axis and are distributed in a cross shape symmetrical to the X-axis and Y-axis. The nineteenth strain gauge R19 and the twentieth strain gauge R20 are symmetrical to the plane of the intermediate plate of the first I-beam (2) and the intersection of the two is located at the center of one of the two side plates of the first I-beam (2). The 90° openings of the nineteenth strain gauge R19 and the twentieth strain gauge R20 face the loading boss (9). The third resistance strain gauge includes the fifth strain gauge R5 and the sixth strain gauge R6, the eighth resistance strain gauge includes the fifteenth strain gauge R15 and the sixteenth strain gauge R16, and the twelfth resistance strain gauge includes the twenty-third strain gauge R23 and the twenty-fourth strain gauge R24. The fifth strain gauge R5 and the sixth strain gauge R6 are attached to the side of the middle plate of the second I-beam (4) facing the positive Z-axis, and the intersection of the two is located at the center of the middle plate of the second I-beam (4). The fifth strain gauge R5 and the sixth strain gauge R6 are symmetrical about the X-axis and have a 90° opening facing the loading boss (9). The fifteenth strain gauge R15, the sixteenth strain gauge R16, the twenty-third strain gauge R23 and the twenty-fourth strain gauge R24 are attached to the center of one side plate of the two side plates of the second I-beam (4) and are distributed in a cross shape symmetrical about the X-axis and the Z-axis. The second resistance strain gauge includes the third strain gauge R3 and the fourth strain gauge R4; the sixth resistance strain gauge includes the eleventh strain gauge R11 and the twelfth strain gauge R12; the ninth resistance strain gauge includes the seventeenth strain gauge R17 and the eighteenth strain gauge R18; the eleventh strain gauge R11 and the twelfth strain gauge R12 are attached to the side of the intermediate plate of the third I-beam (6) facing the positive Z-axis, and the intersection of the two is located at the center of the intermediate plate of the third I-beam (6); the eleventh strain gauge R11 and the twelfth strain gauge R12 are symmetrical about the Y-axis and have a 90° opening facing the loading boss (9); the third strain gauge... Strain gauges R3 and R4 are attached to the side of the middle plate of the third I-beam (6) facing the negative Z-axis, and the intersection of the two is located at the center of the middle plate of the third I-beam (6). The second resistance strain gauge and the sixth resistance strain gauge are symmetrical to the middle plate of the third I-beam (6). The seventeenth strain gauge R17 and the eighteenth strain gauge R18 are symmetrical to the plane of the middle plate of the third I-beam (6), and the intersection of the two is located at the center of one of the two side plates of the third I-beam (6). The 90° openings of the seventeenth strain gauge R17 and the eighteenth strain gauge R18 face the loading boss (9). The fourth resistance strain gauge includes the seventh strain gauge R7 and the eighth strain gauge R8. The seventh resistance strain gauge includes the thirteenth strain gauge R13 and the fourteenth strain gauge R14. The eleventh resistance strain gauge includes the twenty-first strain gauge R21 and the twenty-second strain gauge R22. The seventh strain gauge R7 and the eighth strain gauge R8 are attached to the side of the intermediate plate of the fourth I-beam (8) facing the negative Z-axis, and the intersection of the two is located at the center of the intermediate plate of the fourth I-beam (8). The seventh strain gauge R7 and the eighth strain gauge R8 are symmetrical about the X-axis and have a 90° opening facing the opposite direction of the loading boss (9); the thirteenth strain gauge R13 and The fourteenth strain gauge R14 is symmetrical to the plane of the middle plate of the fourth I-beam (8), and the intersection of the two is located at the center of one side plate of the two side plates of the fourth I-beam (8). The 90° openings of the seventeenth strain gauge R17 and the eighteenth strain gauge R18 face the loading boss (9). The twenty-first strain gauge R21 and the twenty-second strain gauge R22 are symmetrical to the plane of the middle plate of the fourth I-beam (8), and the intersection of the two is located at the center of the other side plate of the two side plates of the fourth I-beam (8). The 90° openings of the twenty-first strain gauge R21 and the twenty-second strain gauge R22 face the loading boss (9).

6. A resistance strain gauge six-dimensional force sensor based on shear strain detection according to claim 5, characterized in that: The first strain gauge R1, the second strain gauge R2, the third strain gauge R3, and the fourth strain gauge R4 are connected in series to form a first Wheatstone bridge for measuring the X-direction force Fx of a resistive strain type six-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the first strain gauge R1 and the second strain gauge R2, and the other end of the voltage measurement terminal Ui is connected between the third strain gauge R3 and the fourth strain gauge R4. One end of the DC power supply U is connected between the first strain gauge R1 and the fourth strain gauge R4, and the other end is connected between the second strain gauge R2 and the third strain gauge R3. The fifth strain gauge R5, the sixth strain gauge R6, the seventh strain gauge R7, and the eighth strain gauge R8 are connected in series to form a second Wheatstone bridge for measuring the Y-direction force Fy of a resistive strain gauge six-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the fifth strain gauge R5 and the sixth strain gauge R6, and the other end of the voltage measurement terminal Ui is connected between the seventh strain gauge R7 and the eighth strain gauge R8. One end of the DC power supply U is connected between the fifth strain gauge R5 and the eighth strain gauge R8, and the other end is connected between the sixth strain gauge R6 and the seventh strain gauge R7. The ninth strain gauge R9, the tenth strain gauge R10, the eleventh strain gauge R11, and the twelfth strain gauge R12 are connected in series to form the third Wheatstone bridge for measuring the Z-direction torque Mz of the resistive strain type ten-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the ninth strain gauge R9 and the tenth strain gauge R10, and the other end of the voltage measurement terminal Ui is connected between the eleventh strain gauge R11 and the twelfth strain gauge R12. One end of the DC power supply U is connected between the ninth strain gauge R9 and the twelfth strain gauge R12, and the other end is connected between the tenth strain gauge R10 and the eleventh strain gauge R11. The thirteenth strain gauge R13, the fourteenth strain gauge R14, the fifteenth strain gauge R15, and the sixteenth strain gauge R16 are connected in series to form the fourth Wheatstone bridge for measuring the X-direction torque Mx of the resistive strain gauge ten-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the thirteenth strain gauge R13 and the fourteenth strain gauge R14, and the other end of the voltage measurement terminal Ui is connected between the fifteenth strain gauge R15 and the sixteenth strain gauge R16. One end of the DC power supply U is connected between the thirteenth strain gauge R13 and the sixteenth strain gauge R16, and the other end is connected between the fourteenth strain gauge R14 and the fifteenth strain gauge R15. The seventeenth strain gauge R17, the eighteenth strain gauge R18, the nineteenth strain gauge R19, and the twentieth strain gauge R20 are connected in series to form the fifth Wheatstone bridge for measuring the Y-direction torque My of the resistive strain gauge type ten-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the seventeenth strain gauge R17 and the eighteenth strain gauge R18, and the other end of the voltage measurement terminal Ui is connected between the nineteenth strain gauge R19 and the twentieth strain gauge R20. One end of the DC power supply U is connected between the seventeenth strain gauge R17 and the twentieth strain gauge R20, and the other end is connected between the eighteenth strain gauge R18 and the nineteenth strain gauge R19. The 21st strain gauge R21, the 22nd strain gauge R22, the 23rd strain gauge R23, and the 24th strain gauge R24 are connected in series to form the sixth Wheatstone bridge for measuring the Z-direction force Fz of the resistive strain gauge 10-dimensional force sensor. One end of the voltage measurement terminal Ui is connected between the 21st strain gauge R21 and the 22nd strain gauge R22, and the other end of the voltage measurement terminal Ui is connected between the 23rd strain gauge R23 and the 24th strain gauge R24. One end of the DC power supply U is connected between the 21st strain gauge R21 and the 24th strain gauge R24, and the other end is connected between the 22nd strain gauge R22 and the 23rd strain gauge R23.

7. The detection method of the resistance strain gauge six-dimensional force sensor according to any one of claims 1-6, characterized in that: The method includes the following steps: Step 1: Apply different loads to the load-bearing plate, and obtain the resistance changes of each Wheatstone bridge through each voltage measurement terminal Ui, convert them into voltage changes, and output them sequentially to the amplifier circuit, data acquisition unit and PC terminal. The PC terminal obtains the voltage-load relationship curve based on the relationship between the load of each force and the output voltage changes. Step 2: When the load-bearing plate is subjected to the force to be measured, the voltage change is acquired through the PC terminal, and then the load of the force to be measured is obtained according to the voltage-load relationship curve, thus realizing the shear strain detection of the force.

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