A turnover storage box for storing thin wafers

Abstract

This invention belongs to the field of packaging technology, specifically a turnover storage box for storing thin wafers. It includes a protective shell, with extended outer shells fixedly connected to both sides of the protective shell's surface. Strip springs are evenly arranged on the inner wall of the extended outer shell, and a reinforcing component is fixedly connected to the end of each strip spring away from the extended outer shell. A closed sliding plate is slidably connected to both sides of the top of the protective shell's surface, and guide rails are slidably connected to both sides of the closed sliding plate's surface. A traction rod is fixedly connected to one side of the closed sliding plate, and control components are provided on both sides of the inner cavity of the protective shell. This device can store wafers and adjust the clamping force of the rubber straps on the wafers according to their size, thus avoiding the problem of wafers easily loosening due to insufficient pressure inside the box, and also preventing wafers from breaking due to excessive pressure.

Description

Technical Field

[0001] This invention belongs to the field of packaging technology, specifically a turnover storage box for storing thin wafers. Background Technology

[0002] In semiconductor manufacturing processes, although most devices or circuit chips are manufactured on the shallow surface layer of the semiconductor substrate material, wafers of a certain thickness are typically used for transfer and fabrication during the dozens or hundreds of process steps to ensure the precision and structural requirements of the wafer surface processing and to avoid wafer breakage during the process. Due to the presence of parasitic resistance, the chip circuit generates heat during operation, causing the temperature to rise. The different coefficients of thermal expansion between the interconnect metal and the semiconductor material, and between the semiconductor material and the packaging material, can generate internal stress, leading to chip cracking or damage.

[0003] If wafers are stored in cassettes, they are primarily designed to prevent scratches on the surface of single wafers and are only suitable for storing relatively thick wafers. After thinning, the wafers become significantly thinner, making them more prone to warping, especially for larger diameter wafers. Once subjected to pressure, they are likely to break. Moreover, the cassettes are usually quite rigid, and when the inner wall of the cassette comes into contact with the wafer, the wafer may rub against the inner wall of the cassette during transport due to shaking, leading to wear and tear. Therefore, improvements are needed. Summary of the Invention

[0004] To address the shortcomings of existing technologies, the technical solution adopted by this invention is as follows: a turnover storage box for storing thin wafers, comprising a protective shell, with extended outer shells fixedly connected to both sides of the protective shell surface; strip springs uniformly arranged on the inner wall of the extended outer shell; a reinforcing component fixedly connected to the end of each strip spring away from the extended outer shell; closed sliding plates slidably connected to both sides of the top surface of the protective shell; guide rails slidably connected to both sides of the surface of the closed sliding plates; and a traction rod fixedly connected to one side of the closed sliding plate. Control components are provided on both sides of the inner cavity, and adjustment components are fixedly connected to both ends of the inner cavity of the protective shell. A wafer arrangement component is fixedly connected to the bottom of the surface of the protective shell. Before using the device to store wafers, the operator first pulls open the closed slide plates on both sides using the traction rod to open the opening at the axis of the protective shell. Then, the wafer is placed flat into the inside of the protective shell. The wafer inside the guide cylinder is then reinforced by the internal reinforcing components to fix the wafer in the guide cylinder. Finally, the closed slide plates on both sides are closed to complete the wafer storage work.

[0005] Furthermore, a guide cylinder shell is fixedly connected to the axial center of the inner cavity of the protective shell, and side brackets are fixedly connected to both sides of the inner wall of the guide cylinder shell. Rubber straps are rotatably connected to both sides of the surface of the side brackets, and an elastic clamping arm is slidably connected to the side of the inner cavity of the protective shell near the expansion shell. This device can store wafers and can adjust the clamping force of the rubber straps on the wafers according to the size of the wafers, thereby avoiding the problem of the wafers being easily loosened due to insufficient extrusion pressure inside the box, and also avoiding the problem of the wafers breaking due to excessive extrusion pressure.

[0006] Furthermore, the reinforcement component includes a plug-in split shell. Traction straps are fixedly connected to both sides of the plug-in split shell's surface near the guide cylinder shell. A buffer soft strip is fixedly connected to the inner cavity of the plug-in split shell near the guide cylinder shell. Compression tubes are evenly arranged on the surface of the buffer soft strip away from the guide cylinder shell. A sealing box is fixedly connected to the end of the compression tube away from the guide cylinder shell. Force gauges are fixedly connected to both sides of the sealing box's inner cavity via soft membranes. During the reinforcement of the wafer, the control components on both sides retract the corresponding traction straps, thereby pulling the protective shells on both sides towards the guide cylinder shell. At this time, the plug-in split shell slides from the inside of the extended outer shell into the inside of the protective shell, the strip spring is stretched, and the elastic locking arms on both sides automatically extend, adjusting the sealing effect of the protective shell.

[0007] Furthermore, the side of the inner wall of the insert-type shell away from the guide cylinder shell is fixedly connected to the surface of the sealing box via a clamping arm. The end of the traction strap away from the insert-type shell is slidably connected to the inner cavity of the control component, and the end of the elastic clamping arm near the traction strap is slidably connected to the surface of the insert-type shell. When the plane of the insert-type shell contacts the guide cylinder shell, the upper and lower sides of the insert-type shell are inserted into the interior of the guide cylinder shell through the grooves on both sides of the guide cylinder shell, squeezing the outer surface of the rubber strip. This causes the rubber strip to rotate and tighten along the outer surface of the side clamping bracket towards the axis. The wafer located on the inner wall of the rubber strip is gradually wrapped and clamped during the tightening process. Subsequently, the control component stops traction on the reinforcement component, and the wafer is fixed inside the device. When the rubber strip clamps the wafer, both sides of the rubber strip are constricted due to the clamping effect of the reinforcement component, thereby wrapping the wafer to increase its shock resistance. This prevents the wafer from shaking when the protective shell is impacted.

[0008] Furthermore, both ends of the inner cavity of the guide cylinder shell are symmetrically provided with circumferential grooves. Both sides of the insertion shell are slidably connected to the inner cavity of the guide cylinder shell through the circumferential grooves. The surface of the insertion shell is slidably connected to the inner wall of the expansion shell. The surface of the buffer soft strip and the surface of the rubber soft strip are pressed against each other. As the insertion shell slides closer to the guide cylinder shell, the buffer soft strip will press against the outer surface of the guide cylinder shell. Then, the buffer soft strip will deform inward towards the clamping arm, thereby compressing the compression tube. After compression, the compression tube will compress the internal gas into the interior of the sealed box. At this time, the soft diaphragms on both sides will be pulled at both ends of the tension gauge due to the increased pressure. The insertion shell of this device reflects the depth of insertion into the inner cavity of the guide cylinder shell through the internal tension gauge. The strip springs on both sides can quickly pull the insertion shell back to its original position, thereby avoiding the problem of the insertion shell being inserted too deeply into the guide cylinder shell and getting stuck and unable to be pulled out.

[0009] Furthermore, the control component includes a built-in square shell, with a winding drum rotatably connected to both sides of the inner cavity of the built-in square shell via a motor, and spring clamps slidably connected to both sides of the inner wall of the built-in square shell. A compression push plate is slidably connected to the middle of the inner cavity of the spring clamps, and bending plates are rotatably connected to both sides of the middle of the inner cavity of the compression push plate. A rough-surface clamp is rotatably connected to the end of the bending plate away from the compression push plate.

[0010] Furthermore, the end of the traction belt away from the insert shell is fixedly connected to the surface of the winding drum, and the surface of the traction belt is slidably connected to one side of the inner cavity of the inner square shell. Both ends of the compression push plate are fixedly connected to the inner cavity of the inner square shell, and the surface of the inner square shell is slidably connected to the inner cavity of the protective shell. There are two inner square shells. The control component of this device pulls the reinforcement component to clamp the wafer by winding the traction belt. When the insert shell is fixed, the strip spring will pull the traction belt in the opposite direction, which will cause the winding drum to rewind, making the clamping effect of the insert shell worse. Therefore, a reinforced rough-surface clamping plate is provided to clamp the winding drum after winding, thereby avoiding the above-mentioned problem.

[0011] Furthermore, the adjustment components include a buffer inner shell, an engine fixedly connected to the center of the inner cavity of the buffer inner shell, a threaded rotating rod fixedly connected to the surface of the engine output shaft, and air cushion hoses symmetrically arranged on the side of the surface of the buffer inner shell near the guide cylinder shell. A side clamp is slidably connected to one end of the inner cavity of the air cushion hose, and the surface of the side clamp is fixedly connected to the surface of the inner square shell. Both sides of the surface of the inner square shell are engaged with both sides of the inner cavity of the protective shell via limiting connecting rods. Air inlet grooves are evenly distributed on the side of the inner cavity of the buffer inner shell away from the side clamps, and the surface of the buffer inner shell is fixedly connected to the side of the inner cavity of the protective shell away from the control components. The adjustment components on both sides can control the rotation of the threaded rotating rod through the engine inside the buffer inner shell, thereby pushing the side clamps to move the inner square shell. At this time, the traction angle of the inner square shell on the traction strap changes, and the strip springs on both sides are tightened due to the traction of the insert shell, thus bringing the initial position of the insert shell closer to the guide cylinder shell, thereby strengthening the clamping effect on the wafer.

[0012] Furthermore, the wafer arrangement component includes a wall-mounted bottom shell. A perforated disc is fixedly connected to the axial center of the top of the inner wall of the wall-mounted bottom shell. An annular flexible tube is fixedly connected to the center of the inner cavity of the perforated disc through an annular groove. Spring connecting rods are fixedly connected to both sides of the inner wall of the annular flexible tube. Air supply pipes are symmetrically arranged on both sides of the inner cavity of the wall-mounted bottom shell. Since the wafer removal process is relatively difficult, a wafer arrangement component is set at the bottom of the protective shell. When removing the wafers from inside, it is necessary not only to release the clamping effect of the rubber band on the wafers, but also to supply air to the axial center of the wall-mounted bottom shell through the air supply pipes on both sides, so that the wall-mounted bottom shell can blow air upwards. The air force at the bottom gently blows the released wafers out of the protective shell, and the annular flexible tube, which is inflated by the air force, can cushion the falling wafers.

[0013] Furthermore, one end of the gas supply pipe extends to the outside of the wall-mounted bottom shell, and the other end extends to the axis of the inner cavity of the wall-mounted bottom shell. The end of the spring connecting rod away from the annular hose is fixedly connected to the bottom of the inner cavity of the wall-mounted bottom shell. The inner cavity of the perforated disk is uniformly provided with through openings. Since the wafers located inside are difficult to remove directly, and the removal process can easily damage them, a top-down blowing wafer arrangement component is used to slowly blow the wafers out from inside the protective shell, thereby reducing damage to the wafers and simultaneously cleaning the wafers and storage components.

[0014] The beneficial effects of this invention are as follows:

[0015] 1. This device can store wafers and adjust the clamping force of the rubber band on the wafers according to the size of the wafers. This avoids the problem of the wafers being loose due to insufficient pressure inside the container, and also avoids the problem of the wafers breaking due to excessive pressure.

[0016] 2. When the rubber band of the device clamps the wafer, both sides of the rubber band will be tightened due to the clamping effect of the reinforcing components, thereby wrapping the wafer and increasing its shock resistance. As a result, the wafer will not shake when the protective shell is bumped.

[0017] 3. The insertion shell of this device reflects the depth of insertion into the inner cavity of the guide cylinder shell through an internal tension gauge. The strip springs on both sides can quickly pull the insertion shell back to its original position, thereby avoiding the problem of the insertion shell being inserted too deeply into the guide cylinder shell and getting stuck and unable to be pulled out.

[0018] 4. The control unit of the device uses a winding traction belt to pull the reinforcement component to clamp the wafer. When the insert shell is fixed, the strip spring will pull the traction belt in the opposite direction, which will cause the winding drum to rewind, making the clamping effect of the insert shell worse. Therefore, a textured clamping plate is provided to reinforce the winding drum after winding, so as to avoid the above-mentioned problem.

[0019] 5. The wafers located inside are difficult to remove directly, and the removal process can easily damage the wafers. Therefore, a top-down blowing wafer arrangement component is used to slowly blow the wafers out from inside the protective shell, thereby reducing damage to the wafers and cleaning the wafers and storage components at the same time. Attached Figure Description

[0020] Figure 1 This is the front view of the present invention;

[0021] Figure 2 This is a front view of the invention after the enclosed sliding plate is opened;

[0022] Figure 3 This is a cross-sectional view of the present invention;

[0023] Figure 4 This is a cross-sectional view of the protective shell of the present invention;

[0024] Figure 5 This is a cross-sectional view of the reinforcing component of the present invention;

[0025] Figure 6 This is a cross-sectional view of the control component of the present invention;

[0026] Figure 7 This is a cross-sectional view of the adjusting component of the present invention;

[0027] Figure 8 This is a cross-sectional view of the tray arrangement component of the present invention.

[0028] In the diagram: 1. Protective shell; 11. Extended shell; 12. Strip spring; 13. Guide cylinder shell; 14. Rubber soft belt; 15. Side clamp; 16. Elastic clamping arm; 2. Guide slide rail; 21. Enclosed sliding plate; 22. Traction rod; 4. Reinforcing components; 41. Inserted split shell; 42. Traction belt; 43. Buffer soft belt; 44. Compression pipe; 45. Sealed box; 46. Force gauge; 47. Clamping arm; 5. Control Components; 51. Internal square shell; 52. Winding drum; 53. Spring clamp; 54. Compression push plate; 55. Bending turn plate; 56. Textured clamp; 6. Adjustment component; 61. Buffer inner shell; 62. Engine; 63. Air cushion hose; 64. Threaded rotating rod; 65. Side clamp; 3. Plate arrangement component; 31. Wall-mounted bottom shell; 32. Air supply pipe; 33. Perforated disc; 34. Annular hose; 35. Spring connecting rod. Detailed Implementation

[0029] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the invention to the forms disclosed. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described to better illustrate the principles and practical application of the invention, and to enable those skilled in the art to understand the invention and design various embodiments with various modifications suitable for a particular purpose.

[0030] Example 1, please refer to Figures 1-5 The present invention provides a technical solution: a turnover storage box for storing thin wafers, including a protective shell 1, an extended shell 11 fixedly connected to both sides of the surface of the protective shell 1, strip springs 12 uniformly arranged on the inner wall of the extended shell 11, a reinforcing component 4 fixedly connected to one end of the strip springs 12 away from the extended shell 11, a closed slide plate 21 slidably connected to both sides of the top of the surface of the protective shell 1, a guide slide rail 2 slidably connected to both sides of the surface of the closed slide plate 21, a traction rod 22 fixedly connected to one side of the closed slide plate 21, a control component 5 arranged on both sides of the inner cavity of the protective shell 1, an adjustment component 6 fixedly connected to both ends of the inner cavity of the protective shell 1, and a wafer arrangement component 3 fixedly connected to the bottom of the surface of the protective shell 1.

[0031] A guide cylinder shell 13 is fixedly connected to the axis of the inner cavity of the protective shell 1. Side brackets 15 are fixedly connected to both sides of the inner wall of the guide cylinder shell 13. Rubber soft strips 14 are rotatably connected to both sides of the surface of the side brackets 15. An elastic arm 16 is slidably connected to the side of the inner cavity of the protective shell 1 near the expansion shell 11.

[0032] The reinforcing component 4 includes a plug-in shell 41. Traction straps 42 are fixedly connected to both sides of the surface of the plug-in shell 41 near the guide cylinder shell 13. A buffer soft strip 43 is fixedly connected to the inner cavity of the plug-in shell 41 near the guide cylinder shell 13. A compression tube 44 is evenly arranged on the surface of the buffer soft strip 43 away from the guide cylinder shell 13. A sealing box 45 is fixedly connected to the end of the compression tube 44 away from the guide cylinder shell 13. A tension gauge 46 is fixedly connected to both sides of the inner cavity of the sealing box 45 through a soft membrane.

[0033] The side of the inner wall of the insert shell 41 away from the guide cylinder shell 13 is fixedly connected to the surface of the sealing box 45 through the clamping arm 47. The end of the traction belt 42 away from the insert shell 41 is slidably connected to the inner cavity of the control component 5. The end of the elastic clamping arm 16 near the traction belt 42 is slidably connected to the surface of the insert shell 41.

[0034] Both ends of the inner cavity of the guide cylinder shell 13 are symmetrically provided with circumferential grooves. Both sides of the insert shell 41 are slidably connected to the inner cavity of the guide cylinder shell 13 through the circumferential grooves. The surface of the insert shell 41 is slidably connected to the inner wall of the expansion shell 11. The surface of the buffer soft band 43 and the surface of the rubber soft band 14 are pressed against each other.

[0035] Before using the device to store wafers, the operator first pulls open the closed sliding plates 21 on both sides using the traction rod 22 to open the opening at the axis of the protective shell 1. Then, the wafer is placed flat into the protective shell 1. The wafer inside the guide cylinder shell 13 is then reinforced by the internal reinforcing component 4 to fix the wafer in the guide cylinder shell 13. Finally, the closed sliding plates 21 on both sides are closed to complete the wafer storage work.

[0036] During the reinforcement of the wafer, the control components 5 on both sides will rewind the corresponding traction belts 42, thereby pulling the protective shells 1 on both sides closer to the guide cylinder shell 13 through the traction belts 42. At this time, the insert shell 41 slides from the inside of the expansion shell 11 into the inside of the protective shell 1, the strip spring 12 is stretched, and the elastic locking arms 16 on both sides automatically extend to adjust the sealing effect of the protective shell 1.

[0037] When the plane of the insertion shell 41 contacts the guide shell 13, the upper and lower sides of the insertion shell 41 are inserted into the interior of the guide shell 13 through the grooves on both sides of the guide shell 13, which squeezes the outer surface of the rubber soft band 14 and rotates and tightens the rubber soft band 14 along the outer surface of the side bracket 15 towards the axis. The wafer located on the inner wall of the rubber soft band 14 will be gradually wrapped and clamped during the tightening process of the rubber soft band 14. Then the control component 5 stops the traction reinforcement component 4, and the wafer is fixed inside the device.

[0038] As the insert shell 41 slides towards the side closer to the guide cylinder shell 13, the buffer soft band 43 will press against the outer surface of the guide cylinder shell 13. Then, the buffer soft band 43 will deform inward towards the clamping arm 47, thereby squeezing the compression tube 44. After compression, the compression tube 44 will compress the gas inside into the sealed box 45. At this time, the soft membranes on both sides will be pulled at both ends of the tension gauge 46 due to the increase in pressure.

[0039] Example 2, please refer to Figures 1-8 The present invention provides a technical solution: Based on embodiment one, the control component 5 includes an inner square shell 51, and a winding drum 52 is rotatably connected to both sides of the inner cavity of the inner square shell 51 via a motor. Spring clamps 53 are slidably connected to both sides of the inner wall of the inner square shell 51. A compression push plate 54 is slidably connected to the middle of the inner cavity of the spring clamps 53. Bending plates 55 are rotatably connected to both sides of the middle of the inner cavity of the compression push plate 54. A rough-surfaced clamp 56 is rotatably connected to the end of the bending plate 55 away from the compression push plate 54.

[0040] The end of the traction belt 42 away from the insertion shell 41 is fixedly connected to the surface of the winding drum 52. The surface of the traction belt 42 is slidably connected to one side of the inner cavity of the built-in square shell 51. Both ends of the compression push plate 54 are fixedly connected to the inner cavity of the built-in square shell 51. The surface of the built-in square shell 51 is slidably connected to the inner cavity of the protective shell 1. There are two built-in square shells 51.

[0041] Adjustment component 6 includes a buffer inner shell 61, an engine 62 is fixedly connected to the middle of the inner cavity of the buffer inner shell 61, a threaded rotating rod 64 is fixedly connected to the surface of the output shaft of the engine 62, and air cushion hoses 63 are symmetrically arranged on the side of the surface of the buffer inner shell 61 near the guide cylinder shell 13. A side clamp 65 is slidably connected to one end of the inner cavity of the air cushion hose 63, and the surface of the side clamp 65 is fixedly connected to the surface of the inner square shell 51.

[0042] Both sides of the surface of the built-in square shell 51 are engaged with both sides of the inner cavity of the protective shell 1 by limiting connecting rods. The inner cavity of the buffer inner shell 61 is provided with air inlet grooves evenly on the side away from the side clamp 65. The surface of the buffer inner shell 61 is fixedly connected to the side of the inner cavity of the protective shell 1 away from the control component 5.

[0043] The tray assembly 3 includes a wall-mounted bottom shell 31. A perforated disc 33 is fixedly connected to the axial center of the top of the inner wall of the wall-mounted bottom shell 31. An annular hose 34 is fixedly connected to the middle of the inner cavity of the perforated disc 33 through an annular groove. Spring connecting rods 35 are fixedly connected to both sides of the inner wall of the annular hose 34. Gas delivery pipes 32 are symmetrically arranged on both sides of the inner cavity of the wall-mounted bottom shell 31.

[0044] One end of the gas pipe 32 extends to the outside of the wall-mounted bottom shell 31, and the other end of the gas pipe 32 extends to the axis of the inner cavity of the wall-mounted bottom shell 31. The end of the spring connecting rod 35 away from the annular hose 34 is fixedly connected to the bottom of the inner cavity of the wall-mounted bottom shell 31. The inner cavity of the perforated disc 33 is evenly provided with through openings.

[0045] The control unit 5 controls the rotation of the winding drum 52 via the bottom motor, so that the traction belt 42 is wound onto the outer surface of the winding drum 52. At this time, the outer surface of the winding drum 52 becomes thicker, thereby strengthening the winding effect of the traction belt 42 and preventing the winding drum 52 from rotating back.

[0046] The adjustment components 6 on both sides can control the rotation of the threaded rod 64 through the engine 62 inside the buffer inner shell 61, and then push the side clamp 65 to pull the inner square shell 51 to move through pressure. At this time, the traction angle of the inner square shell 51 on the traction belt 42 changes, and the strip springs 12 on both sides will be tightened because the insertion shell 41 is pulled, so that the initial position of the insertion shell 41 is closer to the guide cylinder shell 13, thereby strengthening the clamping effect on the wafer.

[0047] Because the wafer removal process is quite difficult, a wafer arrangement component 3 is installed at the bottom of the protective shell 1. When removing the wafers from the inside, it is necessary not only to release the clamping effect of the rubber soft band 14 on the wafers, but also to supply air to the axis of the wall-mounted bottom shell 31 through the air supply pipes 32 on both sides, so that the wall-mounted bottom shell 31 can be blown upwards. The air force at the bottom blows the unrestricted wafers out of the protective shell 1 smoothly, and the ring-shaped flexible tube 34, which is blown up by the air force, can buffer the falling wafers.

[0048] Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. All other embodiments obtained by those skilled in the art and related fields based on the embodiments of the present invention without inventive effort should fall within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described and explained in the present invention, unless otherwise specified or limited, shall be implemented according to conventional means in the art.

Claims

1. A turnover storage box for storing thin wafer, comprising a protective shell (1), both sides of the surface of the protective shell (1) are fixedly connected with an expansion shell (11), the inner wall of the expansion shell (11) is uniformly provided with a strip spring (12), one end of the strip spring (12) away from the expansion shell (11) is fixedly connected with a reinforcing component (4), both sides of the top surface of the protective shell (1) are slidably connected with a closing slide plate (21), both sides of the surface of the closing slide plate (21) are slidably connected with a guide slide rail (2), one side of the closing slide plate (21) is fixedly connected with a traction pull rod (22), characterized in that: both sides of the inner cavity of the protective shell (1) are provided with a control component (5), both ends of the inner cavity of the protective shell (1) are fixedly connected with an adjusting component (6), the bottom surface of the protective shell (1) is fixedly connected with a chip arranging component (3); the axis of the inner cavity of the protective shell (1) is fixedly connected with a guide cylinder shell (13), both sides of the inner wall of the guide cylinder shell (13) are fixedly connected with a side clamping frame (15), both sides of the surface of the side clamping frame (15) are rotatably connected with a rubber soft belt (14), one side of the inner cavity of the protective shell (1) close to the expansion shell (11) is slidably connected with an elastic clamping arm (16); the reinforcing component (4) comprises a plug-in section shell (41), both sides of the surface of the plug-in section shell (41) close to the guide cylinder shell (13) are fixedly connected with a traction pull belt (42), one side of the inner cavity of the plug-in section shell (41) close to the guide cylinder shell (13) is fixedly connected with a buffer soft belt (43), the surface of the buffer soft belt (43) away from the guide cylinder shell (13) is uniformly provided with a compression through pipe (44), one end of the compression through pipe (44) away from the guide cylinder shell (13) is fixedly connected with a sealed box (45), both sides of the inner cavity of the sealed box (45) are fixedly connected with a tension meter (46) through a soft film.

2. The carousel storage box for storing thin wafers according to claim 1, wherein: one side of the inner wall of the plug-in section shell (41) away from the guide cylinder shell (13) is fixedly connected with the surface of the sealed box (45) through a clamping force arm (47), one end of the traction pull belt (42) away from the plug-in section shell (41) is slidably connected with the inner cavity of the control component (5), one end of the elastic clamping arm (16) close to the traction pull belt (42) is slidably connected with the surface of the plug-in section shell (41).

3. The tote for storing thin wafers of claim 2, wherein: both ends of the inner cavity of the guide cylinder shell (13) are symmetrically provided with a ring cutting groove, both sides of the plug-in section shell (41) are slidably connected with the inner cavity of the guide cylinder shell (13) through the ring cutting groove, the surface of the plug-in section shell (41) is slidably connected with the inner wall of the expansion shell (11), the surface of the buffer soft belt (43) is pressed against the surface of the rubber soft belt (14).

4. The tote of claim 1, wherein: the control component (5) comprises an inner built-in square shell (51), both sides of the inner cavity of the inner built-in square shell (51) are rotatably connected with a winding drum (52) through a motor.

5. The tote for storing thin wafers of claim 4, wherein: The adjusting part (6) includes a buffer inner shell (61), the middle part of the inner cavity of the buffer inner shell (61) is fixedly connected with an engine (62), the surface of the output shaft of the engine (62) is fixedly connected with a threaded rotating rod (64), the surface of the buffer inner shell (61) is symmetrically provided with an air cushion hose (63) near the side of the guide cylinder shell (13), one end of the inner cavity of the air cushion hose (63) is slidably connected with a side position clamp (65), and the surface of the side position clamp (65) is fixedly connected with the surface of an inner built square shell (51).

6. The tote for storing thin wafers of claim 5, wherein: Both sides of the surface of the inner built square shell (51) are clamped to both sides of the inner cavity of the protection shell (1) through limiting connecting rods, and the inner cavity of the buffer inner shell (61) is uniformly provided with air inlet grooves on the side away from the side position clamp (65), and the surface of the buffer inner shell (61) is fixedly connected with the side of the inner cavity of the protection shell (1) away from the control part (5).

7. The tote of claim 1, wherein: The row piece part (3) includes a wall-adhesion bottom shell (31), the shaft center of the top of the inner wall of the wall-adhesion bottom shell (31) is fixedly connected with a perforated disc (33), the middle part of the inner cavity of the perforated disc (33) is fixedly connected with a ring-shaped hose (34) through a ring-cut groove, both sides of the inner wall of the ring-shaped hose (34) are fixedly connected with spring connecting rods (35), and both sides of the inner cavity of the wall-adhesion bottom shell (31) are symmetrically provided with air conveying pipes (32).

8. The tote for storing thin wafers of claim 7, wherein: One end of the air conveying pipe (32) extends to the outside of the wall-adhesion bottom shell (31), the other end of the air conveying pipe (32) extends to the shaft center of the inner cavity of the wall-adhesion bottom shell (31), one end of the spring connecting rod (35) away from the ring-shaped hose (34) is fixedly connected with the bottom of the inner cavity of the wall-adhesion bottom shell (31), and the inner cavity of the perforated disc (33) is uniformly provided with penetrating through ports.

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