A diffusion plate shaping device and shaping method for chemical vapor deposition process

Abstract

The present invention provides a diffusion plate shaping device and shaping method for a chemical vapor deposition process, comprising a loading platform and a top plate, a plurality of longitudinally arranged long pads placed on the loading platform, the long pads being used to place the diffusion plate, a rotatable lifting mechanism being installed in the middle of the loading platform, a transverse walking mechanism being installed on the top plate, a pair of support plates being installed on the moving parts of the transverse walking mechanism that can move toward each other, the pair of support plates being used to support the diffusion plate. The shaping device combines the characteristics of the product and uses a cold press to hydraulically shape the components based on meeting the customer's requirements, thereby achieving precise correction, improving efficiency, and releasing on-site production capacity. It can effectively reduce the burden on the hot shaping furnace, effectively relieve the backlog of the CVD correction link, and enrich the work content of the subsequent work sections, thereby releasing the recent production capacity of CVD and improving the output value.

Description

Technical Field

[0001] The present invention relates to the technical field of liquid crystal panel CVD equipment, and in particular to a diffusion plate shaping device and shaping method for a chemical vapor deposition process. Background Art

[0002] The manufacturing process of LCD panels requires the use of chemical vapor deposition (CVD) to deposit functional thin films. The CVD process chamber primarily consists of a backplane, diffuser, shadow box, and heater. The process gas first passes through the backplane and is then evenly dispersed through the diffuser. This necessitates that the diffuser surface meet certain flatness requirements (mostly <2mm) and corresponding graphic requirements. Exceeding these limits can disrupt the uniformity of the dispersion during operation, resulting in uneven coating of the coated products, batch scrapping, and significant cost losses.

[0003] With the increasing number of large-generation LCD panel factories, the cumulative market for reconditioning equipment is also expanding, and the number of CVD equipment reconditioning operations is also increasing. During the installation process, diffusers and suceptors in the repair equipment are affected by the high-temperature process of the machine, gradually deforming during use until they are removed from the machine. Therefore, they must be reshaped before reconditioning. Traditional reshaping methods use heat treatment, but this results in low reshaping efficiency (generally divided into heating, holding, and cooling processes, taking four days) and low reshaping success rates. However, heat treatment cannot 100% meet these two requirements. Summary of the Invention

[0004] In response to the above problems, the present invention provides a diffusion plate shaping device for chemical vapor deposition process. The shaping device combines the characteristics of the product and uses a cold press to hydraulically shape the components based on meeting customer requirements, so as to achieve precise correction, improve efficiency, and release on-site production capacity. It can effectively reduce the burden of the hot shaping furnace, and well release the backlog of the CVD correction link, and also enrich the work content of the subsequent work sections, thereby releasing the recent CVD production capacity and improving the output value.

[0005] In order to solve the above problems, the technical solution adopted by the present invention is:

[0006] A diffusion plate shaping device for chemical vapor deposition process includes a loading platform and a top beam, a plurality of longitudinally arranged long pads are placed on the loading platform, the long pads are used to place the diffusion plate, and a rotatable lifting mechanism is also installed in the middle of the loading platform, a transverse walking mechanism is installed on the top beam, and a pair of support plates that can move toward each other are installed on the moving parts of the transverse walking mechanism, and the pair of support plates are used to support the diffusion plate, and a cross-shaped mobile robotic arm is also installed at the bottom of the top beam, and a vertically arranged shaping hydraulic press is fixedly installed on the moving block of the cross-shaped mobile robotic arm, and magnetic suction mechanisms are also installed on both sides of the moving block, and the magnetic suction mechanisms magnetically attract the upper frame of the shaping model.

[0007] Preferably, the plastic surgery model upper frame includes a frame body and a plurality of beadings, wherein the plurality of beadings are fixedly connected to the bottom of the frame body and are arranged in parallel.

[0008] Preferably, the lifting mechanism includes a first hydraulic cylinder rotatably connected to the loading platform, the telescopic end of the first hydraulic cylinder is fixedly connected to the top plate, the bottom of the loading platform is fixedly installed with a first motor, and the output end of the first motor is connected to the cylinder seat of the first hydraulic cylinder through a pair of gear transmissions.

[0009] Preferably, the horizontal walking mechanism includes a strip groove arranged on the top of the top beam, a threaded rod is rotatably connected in the strip groove, a second motor that can drive the threaded rod to rotate is installed at one end of the top beam, a moving seat is threadedly connected to the threaded rod, and a relative moving component is fixedly installed on the top of the moving seat.

[0010] Preferably, the opposite moving component includes a moving plate fixedly connected to the top of the moving seat, the moving plate is arranged longitudinally, a strip-shaped cavity is provided in the moving plate, a double-headed threaded rod is rotatably connected in the strip-shaped cavity, nuts are threadedly connected on both sides of the double-headed threaded rod, connecting arms are fixedly connected on both sides of the nut, strip openings for corresponding connecting arms to pass through are provided on both sides of the moving plate, the side walls of the connecting arms are fixedly connected to the connecting rods, the ends of the connecting rods are fixedly connected to the inverted U-shaped rods, the support plate is fixedly connected to the two ends of the inverted U-shaped rods on the corresponding sides, and a third motor that can drive the double-headed threaded rods to rotate is installed at one end of the moving plate.

[0011] Preferably, the magnetic attraction mechanism includes two fixed arms, which are respectively fixedly connected to the two sides of the moving block of the cross-shaped mobile robotic arm. The ends of the two fixed arms are fixedly connected to a vertically arranged second hydraulic cylinder, and the telescopic ends of the second hydraulic cylinder are installed with electromagnets. Iron blocks that cooperate with the electromagnets are embedded in the tops of both sides of the frame.

[0012] The present invention also discloses a method for shaping a diffuser plate, comprising the following specific steps:

[0013] S1. Place the diffuser plate on a pair of support plates, start the second motor to drive the threaded rod to rotate, and then use the opposite moving components to drive the support plates and the diffuser plate to move horizontally above the loading platform;

[0014] S2. Start the first hydraulic cylinder to drive the top plate upward, lifting the diffuser plate. Then start the third motor to rotate the double-ended threaded rod. Through the nut, connecting arm, connecting rod, and U-shaped rod, the pair of supporting plates move back and forth to open, releasing the diffuser plate. Then, the first hydraulic cylinder retracts, laying the diffuser plate on multiple long pads. Use a laser to test its flatness, and upload the data.

[0015] S3. Start the cross-shaped mobile robot arm to move the upper frame of the plastic model to the corresponding position on the diffusion plate in sequence. Start the second hydraulic cylinder to move the upper frame of the plastic model downward. Multiple pressure strips contact the surface of the diffusion plate. The magnetic attraction mechanism closes and releases the upper frame of the plastic model.

[0016] S4. The shaping hydraulic press is driven by the cross-shaped mobile mechanical arm to move and start the shaping hydraulic press. The telescopic end of the hydraulic press presses against the longitudinally arranged pressure strips to complete the shaping process of the diffuser plate in the longitudinal direction. During the shaping process, a feeler gauge can be inserted to measure the shaping result.

[0017] S5. After the shaping is completed in the longitudinal direction, the upper frame of the shaping model is lifted, the first hydraulic cylinder is started to lift the diffuser plate, and the first motor is started. The first hydraulic cylinder is driven to rotate through a pair of gears, which can drive the diffuser plate to rotate 90 degrees as a whole, and the diffuser plate is shaped from the other direction. As in S4, a feeler gauge is used to ensure the accuracy of the shaping;

[0018] S6. The shaped diffuser plate is lifted by a pair of supporting plates and driven to the next process by a horizontal walking mechanism.

[0019] Preferably, the flatness of the diffuser plate 27 after shaping is 1.78 mm, and the fine pattern presents an M-shape, that is, a low-high-low-high-low pattern trend.

[0020] The beneficial effects of the present invention are:

[0021] 1. This shaping device combines the characteristics of the product and, based on meeting customer requirements, uses a cold press to hydraulically shape the components, achieving precise correction, improving efficiency, and releasing on-site production capacity. It can effectively reduce the burden on the hot shaping furnace, effectively releasing the backlog of the CVD correction link, and enriching the work content of subsequent work sections, thereby releasing the recent CVD production capacity and improving output value.

[0022] 2. Place the diffuser plate on a pair of pallets through the lateral walking mechanism and the opposite moving components. Start the second motor to drive the threaded rod to rotate. Then, the opposite moving components drive the pallet and the diffuser plate to move horizontally to the top of the loading platform. It can also be moved to the next process, which is convenient for lifting.

[0023] 3. By installing the lifting mechanism and the magnetic attraction mechanism, the upper frame of the plastic model can be magnetically attracted or released by turning the electromagnet on and off. The lifting mechanism can lift the entire diffuser plate, start the motor, and drive the diffuser plate to rotate 90° through a pair of gears to achieve the plastic shaping process in the length and width directions of the diffuser plate.

[0024] 4. By installing a shaping hydraulic press and a cross-shaped mobile robotic arm, the shaping hydraulic press and the upper frame of the shaping model can be moved to any position in the longitudinal or transverse direction to complete the shaping process of the entire surface of the diffuser plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural schematic diagram of the present invention;

[0026] Figure 2 A top view of the top plate proposed by the present invention;

[0027] Figure 3 This is a top view of the upper frame of the plastic surgery model proposed by the present invention;

[0028] Figure 4 It is a schematic diagram of the shaping state of the present invention.

[0029] In the figure: 1 loading platform, 2 gear, 3 first motor, 4 first hydraulic cylinder, 5 top plate, 6 long spacer, 7 frame, 8 pressure strip, 9 second hydraulic cylinder, 10 electromagnet, 11 inverted U-shaped rod, 12 support plate, 13 shaping hydraulic press, 14 cross-shaped mobile mechanical arm, 15 fixed arm, 16 threaded rod, 17 second motor, 18 strip groove, 19 mobile plate, 20 mobile seat, 21 top plate, 22 nut, 23 connecting rod, 24 third motor, 25 iron block, 26 connecting arm, 27 diffusion plate, 28 double-headed threaded rod. DETAILED DESCRIPTION

[0030] To make the above-mentioned objects, features, and advantages of the present invention more readily apparent, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth numerous specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described herein, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0031] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly attached to the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only implementation methods.

[0032] Reference Figure 1-4 A diffusion plate shaping device for chemical vapor deposition process includes a loading platform 1 and a top beam 21. A plurality of longitudinally arranged long pads 6 are placed on the loading platform 1. The long pads 6 are used to place the diffusion plate 27. A 90° rotatable lifting mechanism is also installed in the middle of the loading platform 1. The lifting mechanism includes a first hydraulic cylinder 4 rotatably connected to the loading platform 1. The telescopic end of the first hydraulic cylinder 4 is fixedly connected to the top plate 5. A first motor 3 is fixedly installed at the bottom of the loading platform 1. The output end of the first motor 3 is connected to the cylinder seat of the first hydraulic cylinder 4 through a pair of gears 2, which can lift the upper frame of the shaping model as a whole and drive it to rotate 90°.

[0033] A transverse walking mechanism is installed on the top beam 21, and a pair of support plates 12 that can move toward each other are installed on the moving parts of the transverse walking mechanism. The pair of support plates 12 are used to support the diffusion plate 27. The transverse walking mechanism includes a strip groove 18 arranged on the top of the top beam 21, and a threaded rod 16 is rotatably connected in the strip groove 18. A second motor 17 that can drive the threaded rod 16 to rotate is installed at one end of the top beam 21. A moving seat 20 is threadedly connected to the threaded rod 16, and a facing moving component is fixedly installed on the top of the moving seat 20. Starting the second motor 17 drives the threaded rod 16 to rotate, which can drive the diffusion plate 27 to move horizontally to the corresponding process.

[0034] Furthermore, the moving assembly includes a moving plate 19 fixedly connected to the top of the moving seat 20. The moving plate 19 is arranged longitudinally, and a strip cavity is provided in the moving plate 19. A double-headed threaded rod 28 is rotatably connected in the strip cavity. Both sides of the double-headed threaded rod 28 are threadedly connected to nuts 22, and both sides of the nut 22 are fixedly connected to connecting arms 26. Strip openings for corresponding connecting arms 26 to pass through are provided on both sides of the moving plate 19. The side walls of the connecting arms 26 are fixedly connected to connecting rods 23. The ends of the connecting rods 23 are fixedly connected to the inverted U-shaped rods 11. The supporting plates 12 are fixedly connected to the two ends of the inverted U-shaped rods 11 on the corresponding sides. A third motor 24 is installed at one end of the moving plate 19, which can drive the double-headed threaded rods 28 to rotate. Starting the third motor 24 drives the double-headed threaded rods 28 to rotate, and drives a pair of supporting plates 12 to move back to back and open through the nuts 22, connecting arms 26, connecting rods 23 and U-shaped rods 11, releasing the diffuser plate 27, moving toward each other, and supporting the diffuser plate 27.

[0035] A cross-shaped mobile robotic arm 14 is also installed at the bottom of the top beam 21. A vertically arranged shaping hydraulic press 13 is fixedly installed on the moving block of the cross-shaped mobile robotic arm 14. The shaping hydraulic press 13 is driven to move by the cross-shaped mobile robotic arm 14. When the shaping hydraulic press 13 is started, its telescopic end presses against the longitudinally arranged pressure strip 8 to complete the shaping process of the diffuser plate 27.

[0036] A magnetic attraction mechanism is also installed on both sides of the moving block, and the magnetic attraction mechanism includes two fixed arms 15, which are respectively fixedly connected to the two sides of the moving block of the cross-shaped mobile mechanical arm 14. The ends of the two fixed arms 15 are fixedly connected to a vertically arranged second hydraulic cylinder 9, and the telescopic ends of the second hydraulic cylinder 9 are installed with electromagnets 10. Iron blocks 25 that cooperate with the electromagnets 10 are embedded in the tops of both sides of the frame 7. The magnetic attraction mechanism magnetically attracts the upper frame of the plastic model. The upper frame of the plastic model includes a frame 7 and multiple layering strips 8. The multiple layering strips 8 are fixedly connected to the bottom of the frame 7, and the multiple layering strips 8 are arranged in parallel.

[0037] The present invention also discloses a method for shaping a diffuser plate, comprising the following specific steps:

[0038] S1. Place the diffusion plate 27 on a pair of support plates 12, start the second motor 17 to drive the threaded rod 16 to rotate, and then drive the support plates 12 and the diffusion plate 27 to move horizontally above the loading platform 1 through the opposite moving components;

[0039] S2. Start the first hydraulic cylinder 4 to drive the top plate 5 upward, lifting the diffuser plate 27. Then start the third motor 24 to drive the double-headed threaded rod 28 to rotate. Through the nut 22, connecting arm 26, connecting rod 23 and U-shaped rod 11, the pair of supporting plates 12 move away from each other and open, releasing the diffuser plate 27. Then the first hydraulic cylinder 4 retracts, laying the diffuser plate 27 on the multiple long spacers 6. Use a laser to test its flatness, and upload the data.

[0040] S3. Start the cross-shaped mobile robot 14 to move the upper frame of the plastic model to the corresponding position on the diffusion plate 27 in sequence. Start the second hydraulic cylinder 9 to move the upper frame of the plastic model downward. The multiple pressure strips 8 contact the surface of the diffusion plate 27. The magnetic attraction mechanism closes and releases the upper frame of the plastic model.

[0041] S4. The shaping hydraulic press 13 is driven by the cross-shaped mobile mechanical arm 14 to move and start. The retractable end of the shaping hydraulic press 13 presses against the longitudinally arranged pressure strip 8 to complete the shaping process of the diffuser plate 27 in the longitudinal direction. A feeler gauge can be inserted during the shaping process to measure the shaping result.

[0042] S5. After the shaping is completed in the longitudinal direction, the upper frame of the shaping model is lifted, the first hydraulic cylinder 4 is started to lift the diffuser plate 27, and the first motor 3 is started. The first hydraulic cylinder 4 is driven to rotate through a pair of gears 2, which can drive the diffuser plate 27 to rotate 90 degrees as a whole, and the diffuser plate 27 is shaped in the other direction. As in S4, a feeler gauge is used to ensure the accuracy of the shaping;

[0043] S6. The shaped diffuser plate 27 is lifted up by a pair of supporting plates 12 and driven by a lateral walking mechanism to enter the next process.

[0044] Specifically, the flatness of the diffuser plate 27 after shaping is 1.78 mm, and the fine pattern presents an M-shape, that is, a low-high-low-high-low pattern trend.

[0045] Working principle: first place the diffuser plate 27 on a pair of support plates 12, start the second motor 17 to drive the threaded rod 16 to rotate, drive the movable plate 19 to move horizontally through the movable seat 20, and then drive the support plate 12 and the diffuser plate 27 to move horizontally above the loading platform 1 through the connecting arm 26, the connecting rod 23 and the U-shaped rod 11, start the first hydraulic cylinder 4 to drive the top plate 5 to move upward, lift the diffuser plate 27, and then start the third motor 24 to drive the double-headed threaded rod 28 to rotate, and drive the pair of support plates 12 to move back to back and open through the nut 22, the connecting arm 26, the connecting rod 23 and the U-shaped rod 11 to release the diffuser plate 27, and then the first hydraulic cylinder 4 contracts to lay the diffuser plate 27 on multiple long pads 6, use a laser to test its flatness, and upload the data.

[0046] Start the cross-shaped mobile robotic arm 14 to drive the upper frame of the shaping model to move to the corresponding position on the diffuser plate 27 in sequence, start the second hydraulic cylinder 9 to drive the upper frame of the shaping model to move downward, and multiple pressure strips 8 resist the surface of the diffuser plate 27. The electromagnet 10 is powered off, releasing the upper frame of the shaping model, and the shaping hydraulic press 13 is driven to move by the cross-shaped mobile robotic arm 14. Start the shaping hydraulic press 13, and its telescopic end presses against the longitudinally arranged pressure strips 8 to complete the shaping process of the longitudinal angle of the diffuser plate 27. A feeler gauge can be inserted during the shaping process to measure the shaping result. After the shaping is completed in the longitudinal direction, lift the upper frame of the shaping model, start the first hydraulic cylinder 4 to lift the diffuser plate 27, start the first motor 3, and drive the first hydraulic cylinder 4 to rotate through a pair of gears 2, so as to drive the diffuser plate 27 to rotate 90° as a whole, and shape the diffuser plate 27 from the other direction.

[0047] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A diffusion plate shaping device for a chemical vapor deposition process, comprising a loading platform (1) and a top beam (21), characterized in that: A plurality of longitudinally arranged long pads (6) are placed on the loading platform (1), and the long pads (6) are used to place the diffusion plate (27). A 90-degree rotatable lifting mechanism is also installed in the middle of the loading platform (1). A transverse walking mechanism is installed on the top beam (21), and a pair of supporting plates (12) that can move toward each other are installed on the moving parts of the transverse walking mechanism. The pair of supporting plates (12) are used to lift the diffusion plate (27). A cross-shaped mobile mechanical arm (14) is also installed at the bottom of the top beam (21), and a vertically arranged plastic hydraulic press (13) is fixedly installed on the moving block of the cross-shaped mobile mechanical arm (14). Magnetic suction mechanisms are also installed on both sides of the moving block, and the magnetic suction mechanisms magnetically attract the plastic model upper frame.

2. The diffusion plate shaping device for chemical vapor deposition process according to claim 1, characterized in that: The plastic model upper frame comprises a frame body (7) and a plurality of layering strips (8), wherein the plurality of layering strips (8) are all fixedly connected to the bottom of the frame body (7), and the plurality of layering strips (8) are arranged in parallel.

3. The diffusion plate shaping device for chemical vapor deposition process according to claim 1, characterized in that: The lifting mechanism comprises a first hydraulic cylinder (4) rotatably connected to the loading platform (1), a telescopic end of the first hydraulic cylinder (4) is fixedly connected to a top plate (5), a first motor (3) is fixedly installed at the bottom of the loading platform (1), and an output end of the first motor (3) is connected to a cylinder seat of the first hydraulic cylinder (4) through a pair of gears (2).

4. The diffusion plate shaping device for chemical vapor deposition process according to claim 1, characterized in that: The transverse walking mechanism comprises a strip groove (18) arranged on the top of the top beam (21), a threaded rod (16) is rotatably connected in the strip groove (18), a second motor (17) is installed at one end of the top beam (21) for driving the threaded rod (16) to rotate, a moving seat (20) is threadedly connected to the threaded rod (16), and a moving assembly is fixedly installed on the top of the moving seat (20).

5. The diffusion plate shaping device for chemical vapor deposition process according to claim 4, characterized in that: The opposite moving assembly comprises a moving plate (19) fixedly connected to the top of the moving seat (20), the moving plate (19) being arranged longitudinally, a strip cavity being provided in the moving plate (19), a double-threaded rod (28) being rotatably connected in the strip cavity, nuts (22) being threadedly connected on both sides of the double-threaded rod (28), connecting arms (26) being fixedly connected on both sides of the nut (22), strip openings for corresponding connecting arms (26) to pass through being provided on both sides of the moving plate (19), connecting rods (23) being fixedly connected to side walls of the connecting arms (26), the ends of the connecting rods (23) being fixedly connected to inverted U-shaped rods (11), the supporting plate (12) being fixedly connected to both ends of the inverted U-shaped rods (11) on the corresponding side, and a third motor (24) being installed at one end of the moving plate (19) for driving the double-threaded rods (28) to rotate.

6. The diffusion plate shaping device for chemical vapor deposition process according to claim 2, characterized in that: The magnetic attraction mechanism comprises two fixed arms (15), the two fixed arms (15) being fixedly connected to the two sides of the moving block of the cross-shaped mobile mechanical arm (14), the ends of the two fixed arms (15) being fixedly connected to a vertically arranged second hydraulic cylinder (9), the telescopic ends of the second hydraulic cylinder (9) being installed with an electromagnet (10), and the tops of both sides of the frame (7) being embedded with iron blocks (25) cooperating with the electromagnet (10).

7. A method for shaping a diffuser plate, characterized in that: A diffusion plate shaping device for a chemical vapor deposition process according to claim 5 is used, wherein the lifting mechanism includes a first hydraulic cylinder (4) rotatably connected to a carrier platform (1), a telescopic end of the first hydraulic cylinder (4) is fixedly connected to a top plate (5), a first motor (3) is fixedly installed at the bottom of the carrier platform (1), an output end of the first motor (3) and a cylinder seat of the first hydraulic cylinder (4) are connected by a pair of gears (2), the shaping model upper frame includes a plurality of pressure strips (8), and the magnetic attraction mechanism includes a second hydraulic cylinder (9). The specific steps include: S1, placing the diffusion plate (27) on a pair of support plates (12), starting the second motor (17) to drive the threaded rod (16) to rotate, and then driving the support plates (12) and the diffusion plate (27) to move horizontally above the loading platform (1) through the opposite moving components; S2, start the first hydraulic cylinder (4) to drive the top plate (5) to move upward, lift the diffuser plate (27), then start the third motor (24) to drive the double-headed threaded rod (28) to rotate, and drive a pair of supporting plates (12) to move back and forth and open through the nut (22), the connecting arm (26), the connecting rod (23) and the inverted U-shaped rod (11), thereby releasing the diffuser plate (27), and then the first hydraulic cylinder (4) contracts, laying the diffuser plate (27) on a plurality of long pads (6), using a laser to test its flatness, and uploading the data; S3, starting the cross-shaped mobile mechanical arm (14), driving the upper frame of the plastic model to move to the corresponding position on the diffusion plate (27) in sequence, starting the second hydraulic cylinder (9) to drive the upper frame of the plastic model to move downward, the multiple pressure strips (8) contact the surface of the diffusion plate (27), and the magnetic attraction mechanism closes and releases the upper frame of the plastic model; S4, the shaping hydraulic press (13) is driven to move by the cross-shaped mobile mechanical arm (14), the shaping hydraulic press (13) is started, and its telescopic end presses against the longitudinally arranged pressure strip (8), completing the shaping process of the longitudinal angle of the diffuser plate (27). During the shaping process, a feeler gauge can be inserted to measure the shaping result; S5. After the shaping is completed in the longitudinal direction, the upper frame of the shaping model is lifted, the first hydraulic cylinder (4) is started to lift the diffusion plate (27), and the first motor (3) is started to drive the first hydraulic cylinder (4) to rotate through a pair of gears (2), thereby driving the diffusion plate (27) to rotate 90 degrees as a whole, and shaping the diffusion plate (27) from the other direction. The feeler gauge is used as in S4 to ensure the accuracy of the shaping; S6. The shaped diffusion plate (27) is lifted by a pair of supporting plates (12), and the diffusion plate (27) is driven by a lateral walking mechanism to enter the next process.

8. The method for shaping a diffuser plate according to claim 7, wherein: The flatness of the diffuser plate (27) after shaping is 1.78 mm, and the fine pattern presents an M-shape, that is, a low-high-low-high-low pattern trend.

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