A mounting fixture for a cylindrical sample and methods of use thereof

Abstract

The application discloses a mounting clamp for a cylindrical sample and a use method thereof, and the clamp comprises an inner hole clamp and an outer circle clamp. The inner hole clamp comprises a base and a supporting clamping component, and the supporting clamping component is arranged on the base and used for clamping an inner periphery of the sample. The outer circle clamp comprises a mounting seat, and the mounting seat is provided with a moving limiting component and a plurality of supports. The supports are used for assisting the moving limiting component to clamp an outer periphery of the sample. The application has the advantages of compact structure, stable and reliable clamping, facilitation of reducing a target table inclination angle range and mutual non-interference between an injection area and the clamp, solves problems of confusion and redundancy caused by a plurality of traditional sleeve type clamps due to a large diameter range of the cylindrical sample, solves problems of an excessively large target table bias angle caused by unreasonable clamp design and cooperation, mutual interference between the injection area and the clamp, and easy damage of the outer periphery of the sample, improves the quality or yield of a process product, and reduces the operation cost of a semiconductor injection equipment.

Description

Technical Field

[0001] This invention belongs to the field of fixture equipment technology, specifically relating to a mounting fixture for cylindrical samples and its usage method. Background Technology

[0002] With the diversification of semiconductor products, germanium has found new applications in fields such as infrared devices and R-radiation detectors. During the ion implantation stage, a fixture is needed to mount the cylindrical sample to implant ions (such as dopant elements B and P) onto the outer surface and inner pores of the sample, while simultaneously grounding the sample without damaging it.

[0003] In the industry, existing fixtures use only a single columnar clamping component to inject samples onto the outer surface of cylindrical samples. This requires the target stage to have a large offset angle range, and the injection area interferes with the fixture. Additionally, a grounding structure needs to be designed to ground the sample, and eccentricity is also likely to occur when clamping the sample. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to overcome the shortcomings of the prior art and provide a compact, stable and reliable clamping fixture for cylindrical samples, which is conducive to reducing the target stage tilt angle range and ensuring that the injection area and the fixture do not interfere with each other, and a method for using the fixture.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] A mounting fixture for a cylindrical sample includes an inner hole fixture and an outer circle fixture, both of which are detachably mounted to an interface with a target stage. The inner hole fixture includes a base and a support clamping assembly, which is disposed on the base and used to clamp the inner circumference of the cylindrical sample. The outer circle fixture includes a mounting base, which is provided with a movement limiting assembly and multiple supports, which assist the movement limiting assembly in clamping the outer circumference of the cylindrical sample.

[0007] As a further improvement of the present invention, the support and clamping assembly includes a lead screw, a pressure ring, and a conductive ring. The bottom of the lead screw is fixedly mounted on the base. The pressure ring and the conductive ring are alternately arranged on the outer periphery of the lead screw. The pressure ring is used to compress the conductive ring. The inner periphery of the cylindrical sample is in contact with the conductive ring. The conductive ring is used to ground the cylindrical sample and expand under force to tension the inner periphery of the cylindrical sample.

[0008] As a further improvement of the present invention, the movable limiting component includes a drive ring and a movable pair. The outer periphery of the drive ring contacts the mounting base. The fixed end of the movable pair is mounted on the mounting base, and the movable end of the movable pair is sleeved on the drive ring. Multiple mounting bases and multiple movable pairs are arranged alternately in sequence to limit the drive ring.

[0009] As a further improvement of the present invention, the movable limiting component further includes a swing arm and a rotating joint. One end of the swing arm is connected to the movable end of the moving joint, and the other end of the swing arm is connected to the rotating joint. The rotating joint is used to clamp the outer periphery of the cylindrical sample.

[0010] As a further improvement of the present invention, the rotating pair is provided with a contact plate, which is used to clamp the outer periphery of the cylindrical sample.

[0011] As a further improvement of the present invention, the contact plate is made of a conductive flexible material.

[0012] As a further improvement of the present invention, the outer cylindrical clamp also includes a sleeve, which is connected to the mounting base.

[0013] As a further improvement of the present invention, the inner hole clamp also includes a hollow shaft seat, which is detachably mounted on the base. The hollow shaft seat is provided with a slot for mounting a lead screw.

[0014] As a further improvement of the present invention, a nut is provided inside the base, which is used to fasten the lead screw.

[0015] As a general technical concept, the present invention also provides a method for using the mounting fixture based on the above-mentioned cylindrical sample, including the following steps:

[0016] S1. The cylindrical sample is mounted onto the inner hole fixture;

[0017] S11. Insert the conductive ring and the pressure ring onto the hollow shaft seat in sequence;

[0018] S12. Insert the lead screw into the hollow shaft seat, and fix the hollow shaft seat and lead screw on the base. Connect the nut at the bottom of the lead screw.

[0019] S13. Place the inner hole fixture into the inner hole of the cylindrical sample, and make clearance fit between the inner hole fixture and the inner hole of the cylindrical sample.

[0020] S14. Tighten the nut at the bottom of the screw so that the pressure ring presses against the conductive ring, and use the expansion of the conductive ring to tension the inner wall of the cylindrical sample.

[0021] S15. Fix the base to the interface of the target stage to complete the outer circle injection of the cylindrical sample;

[0022] S2. The cylindrical sample is mounted onto the outer cylindrical fixture;

[0023] S21. When the outer cylindrical clamp is fixed, manually apply force F2 to make the drive ring rotate in the opposite direction, causing the moving pair to contract and the swing arm to open, so that the cylindrical sample can be placed in.

[0024] When S22 and force F2 are removed, the cylindrical sample is clamped by the pre-contraction force of the moving pair;

[0025] S23. Fix the outer cylindrical clamp to the interface of the target stage through the connecting flange to complete the injection of the inner hole and end face of the cylindrical sample.

[0026] Compared with the prior art, the advantages of the present invention are as follows:

[0027] 1. The mounting fixture for cylindrical samples of the present invention detachably installs the inner hole fixture and the outer circle fixture to the interface of the target stage, and uses the inner hole fixture and the outer circle fixture to clamp the inner hole and the outer circle of the cylindrical sample respectively, thereby avoiding the eccentricity of the sample during clamping and improving the stability and reliability of sample clamping.

[0028] 2. The mounting fixture for cylindrical samples of the present invention achieves detachable mounting of the lead screw on the base by setting a hollow shaft seat with a groove at the center of the base of the inner hole fixture. The conductive ring and the pressure ring are alternately sleeved on the outer circumference of the lead screw, and the cylindrical sample is sleeved on the lead screw. This not only achieves clamping and fixing of the inner circumference of the sample, but also grounds the sample. There is no need to set up an additional grounding structure, which simplifies the structural setting of the mounting fixture.

[0029] 3. The mounting fixture for cylindrical samples of the present invention achieves clamping and fixing of the outer circle of the sample by setting a support, a drive ring, a sliding joint, a swing arm, a rotating joint, and a contact plate on the mounting base of the outer circular fixture. Specifically, the drive ring is limited by the alternately arranged support and sliding joint to prevent the drive ring from shifting. At the same time, the drive ring acts as the frame of the sliding joint, driving the swing arm on the movable end of the sliding joint to swing regularly, and also driving the rotating joint connected to the swing arm to swing regularly. The end of the rotating joint is provided with a contact plate clamped on the outer circle of the sample. The contact plate is made of conductive flexible material, which not only achieves clamping and fixing of the outer circumference of the sample, but also grounds the sample, eliminating the need for an additional grounding structure and simplifying the structural design of the mounting fixture. At the same time, since the sliding joint and rotating joint have a certain degree of mobility, they can well adapt to the clamping requirements of samples with different circumferential sizes, improving the flexibility of the mounting fixture.

[0030] 4. The method of using the mounting fixture for cylindrical samples of the present invention uses the inner hole fixture and the outer circle fixture separately to fix the inner circumference and outer circle of the sample respectively. The two types of fixtures can be interchanged on the same interface of the target stage, which realizes the stable clamping of the cylindrical sample, greatly improves the efficiency of sample installation and fixation, improves the yield of finished products, and ultimately helps to improve the overall production capacity of the equipment. Attached Figure Description

[0031] Figure 1This is a schematic diagram illustrating the structural principle of the mounting fixture for cylindrical samples according to the present invention.

[0032] Figure 2 This is a schematic diagram of the cross-sectional structure of the internal hole clamp in this invention.

[0033] Figure 3 This is a schematic diagram illustrating the structural principle of the internal hole clamp in this invention.

[0034] Figure 4 This is a schematic diagram of the internal structure and principle of the outer circular clamp in this invention.

[0035] Legend: 1. Inner hole clamp; 11. Base; 12. Hollow shaft seat; 13. Lead screw; 14. Pressure ring; 15. Conductive ring; 16. Nut; 2. Outer circle clamp; 21. Mounting seat; 22. Sleeve; 23. Support; 24. Drive ring; 25. Sliding pair; 26. Swing arm; 27. Rotating pair; 28. Contact plate; 29. ​​Injection port; 3. Connecting flange. Detailed Implementation

[0036] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0037] Example 1

[0038] like Figures 1 to 4 As shown, the mounting fixture for cylindrical samples of the present invention includes an inner hole fixture 1 and an outer circle fixture 2, both of which are detachably mounted to the interface of the target stage. The inner hole fixture 1 includes a base 11 and a support and clamping assembly, which is disposed on the base 11 and is used to clamp the inner circumference of the cylindrical sample. The outer circle fixture 2 includes a mounting base 21, on which a movement limiting assembly and multiple supports 23 are provided. The supports 23 are used to assist the movement limiting assembly in clamping the outer circumference of the cylindrical sample.

[0039] like Figure 1 and Figure 2 As shown, in this embodiment, the support clamping assembly includes a lead screw 13, a pressure ring 14, and a conductive ring 15. The bottom of the lead screw 13 is fixedly mounted on the base 11. The pressure ring 14 and the conductive ring 15 are alternately arranged on the outer periphery of the lead screw 13. The pressure ring 14 is used to compress the conductive ring 15. The inner periphery of the cylindrical sample is in contact with the conductive ring 15. The conductive ring 15 is used to ground the cylindrical sample and expand under force to tension the inner periphery of the cylindrical sample. The inner hole clamp 1 is detachably connected to the target stage through the interface of the base 11 to realize the injection of the outer circumference of the cylindrical sample.

[0040] Furthermore, the pressure ring 14 is made of stainless steel, and the conductive ring 15 is a rubber ring filled with metal or conductive powder to achieve safe grounding of the cylindrical sample.

[0041] like Figure 4 As shown, in this embodiment, the moving limiting component includes a drive ring 24 and a moving pair 25. The outer periphery of the drive ring 24 contacts the mounting base 21. The fixed end of the moving pair 25 is mounted on the mounting base 21, and the movable end of the moving pair 25 is sleeved on the drive ring 24. Multiple mounting bases 21 and multiple moving pairs 25 are arranged alternately in sequence to limit the drive ring 24.

[0042] Furthermore, the movable limiting assembly also includes a swing arm 26 and a rotating joint 27. One end of the swing arm 26 is connected to the movable end of the moving joint 25, and the other end of the swing arm 26 is connected to the rotating joint 27, which is used to clamp the outer periphery of the cylindrical sample. A contact plate 28 is provided on the rotating joint 27, which is also used to clamp the outer periphery of the cylindrical sample. The contact plate 28 is made of a conductive flexible material, which avoids damaging the outer surface of the sample workpiece and also grounds the sample. In this embodiment, the contact plate 28 is a conductive adhesive block, which can be a silicone or rubber block filled with conductive powder, achieving conductivity without damaging the outer surface of the sample.

[0043] It can be understood that the pre-clamping force of the drive ring 24 comes from the tangential force F1 generated by the contraction of the sliding pair 25 (such as a spring, cylinder, etc.) driving the drive ring 24. The drive ring 24 can simultaneously perform circular motion under the same force of multiple sets of sliding pairs 25, so that the swing arm 26 can automatically center and clamp the sample. When unloading the sample, the arm can be opened by manually applying force F2.

[0044] like Figure 3 As shown, in this embodiment, the outer cylindrical clamp 2 also includes a sleeve 22, which is connected to the mounting base 21. It can be understood that the sleeve 22 is equivalent to a "frame," with the moving limiting component and support mounted on the mounting base 21, and then the entire assembly is placed into the sleeve 22 and fixed in place. Finally, it is mounted onto the target stage interface via the connecting flange 3 connected to the sleeve 22. The sleeve 22 can accommodate samples of a certain size range. Meanwhile, the mounting base 21 also has an injection port 29 at its center, through which cylindrical samples are injected into the inner hole and end face.

[0045] In this embodiment, the sample is encapsulated inside the outer cylindrical clamp 2. The outer cylindrical clamp 2 consists of a sleeve 22 and a base 21. The support 23 on the base 21, in conjunction with the sliding pair 25, limits the drive ring 24. At the same time, the sliding pair 27 on the swing arm 26 swings with the drive ring 24 as its frame, maintaining a force F1 on the frame. Force F1 is the source of the clamping force. Under the action of force F2 (when force F1 is removed, or when F2>F1), the swing arm 26 can be opened, allowing the sample to be placed in and clamping the outer circle of the sample. A rotating pair 27 is provided between the contact plate 28 and the swing arm 26, which can better contact and tension samples of different sizes.

[0046] like Figure 2 As shown, in this embodiment, the inner hole clamp 1 also includes a hollow shaft seat 12, which is detachably mounted on the base 11 by screws. The hollow shaft seat 12 has an embedded slot for mounting the lead screw 13. The pressure ring 14 and conductive ring 15 arranged on the outer periphery of the lead screw 13 are arranged in a cyclic pattern of one pressure ring 14 pressing one conductive ring 15, which can significantly improve the coaxiality of the sample with the hollow shaft seat after installation and improve the reliability of sample clamping.

[0047] like Figure 2 As shown, a nut 16 is provided inside the base 11. The nut 16 is used to fasten the screw 13 to compress the conductive ring 15 and use the expansion of the outer diameter of the conductive ring 15 to tension the inner hole of the sample.

[0048] In this embodiment, the inner hole clamp 1 uses a conductive ring 15 to ground the sample, avoiding the need to design additional wiring contacts for grounding and simplifying the structure. Depending on the size difference of the sample's inner hole, the clamp can also be made to match the size to meet the clamping requirements of samples with different size ranges.

[0049] Example 2

[0050] This embodiment provides a method for using the mounting fixture in Embodiment 1. Fixing the cylindrical sample to the mounting fixture includes the following steps:

[0051] S1. The cylindrical sample is mounted onto the inner hole fixture 1;

[0052] S11. Insert the conductive ring 15 and the pressure ring 14 onto the hollow shaft seat 12 in sequence;

[0053] S12. Insert the lead screw 13 into the hollow shaft seat 12, and fix the hollow shaft seat 12 and the lead screw 13 on the base 11. Connect the nut 16 to the bottom of the lead screw 13. At this time, the nut 16 is only connected to the bottom of the lead screw 13 and does not lock the lead screw 13.

[0054] S13. Place the inner hole clamp 1 into the inner hole of the cylindrical sample, and make clearance fit between the inner hole clamp 1 and the inner hole of the cylindrical sample.

[0055] S14. Tighten the nut 16 at the bottom of the lead screw 13. The lead screw 13 is circumferentially fixed, but will move axially under the action of the nut 16, so that the pressure ring 14 presses the conductive ring 15, and uses the expansion of the conductive ring 15 to tension the inner wall of the cylindrical sample.

[0056] S15. Fix the base 11 to the interface of the target stage to complete the outer circle injection of the cylindrical sample.

[0057] S2. The cylindrical sample is mounted onto the outer circular clamp 2;

[0058] S21. When the outer circular clamp 2 is fixed, manually apply force F2 to make the drive ring 24 rotate in the opposite direction, causing the moving pair 25 to contract and the swing arm 26 to open, so that the cylindrical sample can be placed in.

[0059] When S22 and force F2 are removed, the cylindrical sample is clamped by the pre-contraction force of the moving pair;

[0060] S23. Fix the outer cylindrical clamp to the interface of the target stage through the connecting flange to complete the injection of the inner hole and end face of the cylindrical sample.

[0061] In this embodiment, the tilt angle range of the target stage can be reduced by the cooperation of the inner hole clamp 1 and the outer circle clamp 2. Traditional clamps, after being mounted using the hole clamp, require one outer circle surface and two end faces for injection at an tilt angle of 0° to 180° after a single clamping. However, in this embodiment, the outer circle clamp 2, which holds the outer circle of the sample, can be used to inject the sample at the end faces. Thus, when using the inner hole clamp 1, the injection at one end face is reduced, and injection can be achieved at an angle of 0° to 90°.

[0062] While the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the invention. Any person skilled in the art can make many possible variations and modifications to the technical solutions of the present invention, or modify them into equivalent embodiments, without departing from the spirit and technical essence of the invention. Therefore, any simple modifications, equivalent substitutions, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention, without departing from the content of the present invention, shall still fall within the scope of protection of the present invention.

Claims

1. A mounting fixture for a cylindrical sample, characterized by, The device includes an inner hole clamp (1) and an outer circle clamp (2), both of which are detachably installed at the interface of the target stage. The inner hole clamp (1) includes a base (11) and a support clamping assembly. The support clamping assembly is mounted on the base (11) and is used to clamp the inner circumference of the cylindrical sample. The outer circle clamp (2) includes a mounting base (21). The mounting base (21) is provided with a moving limit assembly and multiple supports (23). The supports (23) are used to assist the moving limit assembly in clamping the outer circumference of the cylindrical sample. The support and clamping assembly includes a lead screw (13), a pressure ring (14), and a conductive ring (15). The bottom of the lead screw (13) is fixedly installed on the base (11). The outer periphery of the lead screw (13) is alternately provided with a pressure ring (14) and a conductive ring (15). The pressure ring (14) is used to compress the conductive ring (15). The inner periphery of the cylindrical sample is in contact with the conductive ring (15). The conductive ring (15) is used to ground the cylindrical sample and expand under force to tighten the inner periphery of the cylindrical sample.

2. The mounting fixture for a cylindrical sample according to claim 1, characterized by, The moving limiting component includes a drive ring (24) and a moving pair (25). The outer periphery of the drive ring (24) contacts the mounting base (21). The fixed end of the moving pair (25) is mounted on the mounting base (21), and the movable end of the moving pair (25) is sleeved on the drive ring (24). Multiple mounting bases (21) and multiple moving pairs (25) are arranged alternately in sequence to limit the drive ring (24).

3. The mounting fixture for a cylindrical sample according to claim 2, characterized by, The movable limiting assembly also includes a swing arm (26) and a rotating joint (27). One end of the swing arm (26) is connected to the movable end of the moving joint (25), and the other end of the swing arm (26) is connected to the rotating joint (27). The rotating joint (27) is used to clamp the outer periphery of the cylindrical sample.

4. The mounting fixture for a cylindrical sample according to claim 3, characterized by, The rotating pair (27) is provided with a contact plate (28), which is used to clamp the outer periphery of the cylindrical sample.

5. The mounting fixture for a cylindrical sample according to claim 4, characterized by, The contact plate (28) is made of a conductive flexible material.

6. The mounting fixture for a cylindrical sample according to any one of claims 1 to 5, characterized by, The outer cylindrical clamp (2) also includes a sleeve (22), which is connected to the mounting base (21).

7. The mounting fixture for a cylindrical sample according to any one of claims 1 to 5, characterized by, The inner hole clamp (1) also includes a hollow shaft seat (12), which is detachably mounted on the base (11). The hollow shaft seat (12) has a slot for mounting a lead screw (13).

8. The mounting fixture for a cylindrical sample according to claim 7, characterized by, The base (11) is provided with a nut (16) inside, which is used to fasten the lead screw (13).

9. A method of using a mounting jig for a cylindrical sample according to any one of claims 1 to 8, characterized by, Includes the following steps: S1. The cylindrical sample is installed on the inner hole fixture (1); S11. Insert the conductive ring (15) and the pressure ring (14) onto the hollow shaft seat (12) in sequence; S12. Insert the lead screw (13) into the hollow shaft seat (12), and fix the hollow shaft seat (12) and lead screw (13) on the base (11). Connect the nut (16) at the bottom of the lead screw (13). S13. Place the inner hole clamp (1) into the inner hole of the cylindrical sample, and make clearance fit between the inner hole clamp (1) and the inner hole of the cylindrical sample. S14, tighten the nut (16) at the bottom of the screw rod (13) to make the compression ring (14) compress the conductive coil (15), and use the expansion of the conductive coil (15) to tension the inner hole wall of the cylindrical sample; S15, fix the base (11) to the interface of the target table to complete the outer circle injection of the cylindrical sample; S2, install the cylindrical sample to the outer circle clamp (2); S21, when the outer circle clamp (2) is fixed, manually apply force F2 to make the driving ring (24) rotate reversely, make the moving pair (25) contract, and make the swing arm (26) open to put in the cylindrical sample; S22, when the force F2 is removed, rely on the pre-contracting force of the moving pair (25) to clamp the cylindrical sample; S23, fix the outer circle clamp (2) to the interface of the target table through the connecting flange (3) to complete the inner hole and end face injection of the cylindrical sample.

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