Pressure drying apparatus

Abstract

The application belongs to the technical field of semiconductor production and manufacturing, and discloses a pressure drying equipment. The equipment is used for drying materials and specifically comprises a conveying assembly, a pressure container, a first driving assembly and a second driving assembly. The conveying assembly comprises a feeding conveying mechanism, a heating conveying mechanism and a discharging conveying mechanism. The feeding conveying mechanism is arranged at the upstream of the pressure container. The heating conveying mechanism is arranged in the pressure container. The discharging conveying mechanism is arranged at the downstream of the pressure container. The pressure container is used for heating the materials. The pressure container is respectively provided with a translation door at both ends. The translation door is connected with the first driving assembly. The first driving assembly can drive the translation door to open or close. The second driving assembly can drive the feeding conveying mechanism to transfer the materials to the heating conveying mechanism and continuously convey the materials from the heating conveying mechanism to the discharging conveying mechanism. The application can improve the degree of automation, reduce the labor cost and adapt to the demand of automatic production.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor production and manufacturing, and particularly relates to a pressure drying device. BACKGROUND

[0002] An oven is a box-type drying device for drying materials under negative pressure or positive pressure. Specifically, the oven is used to accelerate the drying speed by vacuumizing the box and mainly using a pressure pump to perform air extraction and moisture removal; and the oven is used to provide a positive pressure environment for the space in the box by air charging and pressurizing.

[0003] The pressure oven is widely used in the semiconductor industry and other industries.

[0004] At present, the pressure oven adopts a manual door opening and closing and manual feeding and discharging mode, has low automation degree, and is time-consuming and laborious to operate, and cannot meet the needs of automatic production. SUMMARY

[0005] The present application aims to provide a pressure drying device, improve the automation degree, reduce the labor cost, and meet the needs of automatic production.

[0006] To achieve the above purpose, the present application adopts the following technical solutions:

[0007] The pressure drying device is used to dry materials, and comprises:

[0008] A conveying assembly, the conveying assembly comprises a feeding conveying mechanism, a heating conveying mechanism and a discharging conveying mechanism;

[0009] A pressure container, the feeding conveying mechanism is arranged upstream of the pressure container; the heating conveying mechanism is arranged in the pressure container; the discharging conveying mechanism is arranged downstream of the pressure container; and the pressure container is used to heat the materials;

[0010] A first driving assembly, two ends of the pressure container are respectively provided with translation doors, the translation doors are connected with the first driving assembly, and the first driving assembly can drive the translation doors to open or close;

[0011] A second driving assembly, the second driving assembly can drive the feeding conveying mechanism to transfer the materials to the heating conveying mechanism, and can continue to convey the materials from the heating conveying mechanism to the discharging conveying mechanism.

[0012] As an optional solution of the pressure drying equipment, the feeding conveying mechanism comprises a plurality of first conveying rollers and a first conveying roller frame arranged side by side on the first rack, two ends of the first conveying roller are connected with the first conveying roller frame, the second driving assembly comprises a first driving member arranged on the first rack and a second driving member arranged inside one of the first conveying rollers, the second driving member can drive the first conveying roller provided with the second driving member to rotate, and a plurality of the first conveying rollers are transmissionally connected; the first driving member can drive the first conveying roller frame to move in a first direction.

[0013] As an optional solution of the pressure drying equipment, the first rack is provided with a first position sensor, and the first position sensor is used to detect the position of the material relative to the feeding conveying mechanism.

[0014] As an optional solution of the pressure drying equipment, the first rack is provided with a connecting roller near one end of the pressure container, the length of the connecting roller is less than the length of the first conveying roller, and the height of the connecting roller relative to the first rack can be adjusted.

[0015] As an optional solution of the pressure drying equipment, the first driving assembly is arranged in a second direction, the translation door is arranged on a translation seat, and the first driving assembly can drive the translation seat to move in the second direction.

[0016] As an optional solution of the pressure drying equipment, the translation seat is provided with a guide groove at the bottom, the heating conveying mechanism is arranged on a second rack, the second rack is provided with a guide rail extending in the second direction, and the translation seat is slidably connected with the guide rail through the guide groove.

[0017] As an optional solution of the pressure drying equipment, the outer periphery of the translation door is provided with a sealing plate, the pressure container is provided with a sealing groove matched with the sealing plate, and when the translation door is closed, the sealing plate is embedded in the sealing groove.

[0018] As an optional solution of the pressure drying equipment, the second rack is provided with a second position sensor, and the second position sensor can detect the position of the translation door relative to the pressure container.

[0019] As an optional solution of the pressure drying equipment, the heating conveying mechanism comprises a plurality of second conveying rollers arranged side by side on the second rack, both ends of the second conveying roller are provided with a driven gear, a plurality of the driven gears are meshingly connected with a chain, and the second driving assembly further comprises a third driving member arranged outside the pressure container, and the third driving member is transmissionally connected with the chain.

[0020] As an optional solution of the pressure drying equipment, the second driving assembly further comprises an output shaft connected with the output end of the third driving member, the output shaft passes through the pressure container, one end of the output shaft is provided with a transmission gear, the transmission gear is in meshing connection with the chain, and a dynamic sealing piece is arranged on the output shaft to seal the gap between the pressure container and the rotation of the output shaft.

[0021] Beneficial effects:

[0022] In the application, the material is placed on the feeding conveying mechanism, the feeding conveying mechanism is driven to convey by the second driving assembly, when reaching the side close to the outside of the pressure container, the translation door is opened by the first driving assembly, and then the material is conveyed from the feeding conveying mechanism to the heating conveying mechanism under the driving of the second driving assembly, at this time, the translation door is closed by the first driving assembly, the material is heated and dried in the pressure container, when reaching the preset heating time or the material is dried, the translation door on the other side is opened by the first driving assembly, the material is conveyed from the heating conveying mechanism to the discharging conveying mechanism under the driving of the second driving assembly, and finally the translation door on the other side is closed by the first driving assembly, and the material is collected by the operator subsequently. The device can realize automation in the whole feeding and discharging process and the opening and closing process of the door, the automation level of the device is improved, the labor cost is reduced, and the automatic production demand can be better met. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is the isometric view of the pressure drying equipment provided by the embodiment of the application;

[0024] Figure 2 is the isometric view of the feeding conveying mechanism provided by the embodiment of the application;

[0025] Figure 3 is the structural schematic view of the pressure container and the structure inside the pressure container provided by the embodiment of the application;

[0026] Figure 4 is Figure 3 is the local enlarged view at A;

[0027] Figure 5 is the structural schematic view of the heating conveying mechanism provided by the embodiment of the application;

[0028] Figure 6 is Figure 5 is the local enlarged view at B.

[0029] In the drawings:

[0030] X, first direction; Y, second direction;

[0031] 1. Conveying assembly; 11. Feeding conveying mechanism; 111. First conveying roller; 112. First conveying roller frame; 12. Heated conveying mechanism; 121. Second conveying roller; 122. Driven gear; 123. Chain; 13. Discharging conveying mechanism; 14. First frame; 15. First position sensor; 16. Connecting roller; 17. Second frame; 171. Guide rail; 18. Second position sensor;

[0032] 2. Pressure vessel; 21. Sliding door; 211. Sealing plate; 22. Sliding seat; 221. Guide groove; 23. Sealing groove;

[0033] 3. First driving component;

[0034] 4. Second drive assembly; 41. First drive component; 42. Second drive component; 43. Output shaft; 44. Transmission gear; 45. Dynamic seal. Detailed Implementation

[0035] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0036] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0037] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0038] In the description of the present embodiment, the terms "upper", "lower", "right", "left", and the like, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only used to distinguish in the description, and have no special meaning.

[0039] Please refer to the accompanying Figure 1 -attached Figure 3 and attached Figure 5 , the present embodiment relates to a kind of pressure drying equipment (hereinafter referred to as "equipment"), which is used for drying material, in the field of semiconductor production and manufacturing, there is a need to dry colloid in assembly process, can utilize the present equipment to carry out automatic feeding and discharge and dry material.The equipment specifically includes conveying assembly 1, pressure vessel 2, first drive assembly 3 and second drive assembly 4, wherein the conveying assembly 1 includes feeding conveying mechanism 11, heating conveying mechanism 12 and discharging conveying mechanism 13;Feeding conveying mechanism 11 is arranged at the upstream of pressure vessel 2;Heating conveying mechanism 12 is arranged in pressure vessel 2;Discharging conveying mechanism 13 is arranged at the downstream of pressure vessel 2;Pressure vessel 2 is used to heat material;Two ends of pressure vessel 2 are respectively provided with translation door 21, translation door 21 is connected with first drive assembly 3, and first drive assembly 3 can drive translation door 21 to open or close;Second drive assembly 4 can drive feeding conveying mechanism 11 to transfer material to heating conveying mechanism 12, and can continue to be conveyed from heating conveying mechanism 12 to discharging conveying mechanism 13.

[0040] In the present embodiment, by placing material on feeding conveying mechanism 11, feeding conveying mechanism 11 is driven by second drive assembly 4 to convey, when reaching the outside of pressure vessel 2, translation door 21 is opened by first drive assembly 3, and the material is conveyed from feeding conveying mechanism 11 to heating conveying mechanism 12 under the driving action of second drive assembly 4, at this time, translation door 21 is closed by first drive assembly 3, and the material is heated and dried inside pressure vessel 2, when reaching the preset time of heating or the material has been dried, the other side of translation door 21 is opened by first drive assembly 3, and the material is conveyed from heating conveying mechanism 12 to discharging conveying mechanism 13 under the driving action of second drive assembly 4, and finally the other side of translation door 21 is closed by first drive assembly 3, and the material is collected by the operator subsequently, the whole feeding and discharging process and the opening and closing process can be realized automatically, the automation level of the equipment is improved, the labor cost is reduced, and the automatic production demand can be better met.

[0041] In the present embodiment, pressure vessel 2 can provide a negative pressure environment by vacuumizing the internal space, and can provide a positive pressure environment by inflating the internal space.

[0042] Optionally, the feeding conveying mechanism 11 comprises a plurality of parallelly arranged first conveying rollers 111 and a first conveying roller frame 112 arranged on the first rack 14, two ends of the first conveying roller 111 are connected with the first conveying roller frame 112, the second driving assembly 4 comprises a first driving member 41 arranged on the first rack 14 and a second driving member 42 arranged inside one of the first conveying rollers 111, the second driving member 42 can drive the corresponding first conveying roller 111 to rotate, and the plurality of first conveying rollers 111 are transmissionally connected; the first driving member 41 can drive the first conveying roller frame 112 to move along the first direction X.

[0043] Please further refer to the accompanying drawings Figure 1 and the accompanying drawings Figure 2 , the feeding conveying mechanism 11 is gradually moved along the first direction X on the feeding conveying mechanism 11 by the rotation of the parallel first conveying rollers 111, and continuously approaches the pressure container 2. Specifically, the second driving member 42 is arranged inside one of the first conveying rollers 111, the second driving member 42 can be a motor and drives the first conveying roller 111 to rotate, the first conveying rollers 111 are transmissionally connected, all the first conveying rollers 111 are driven to rotate synchronously by the second driving member 42, and a chain wheel transmission form can be adopted, gears are arranged at the ends of the first conveying rollers 111, and the gears are all engaged with the transmission chain.

[0044] When the material reaches the pressure container 2 and is about to enter the pressure container 2, the material needs to pass through the translation door 21, but the material cannot be sent to the heating conveying mechanism 12 only by the rotation of the first conveying rollers 111, in the embodiment, the first driving member 41 is further arranged on the first rack 14, specifically, arranged below the first conveying rollers 111, drives the first conveying roller frame 112 to move along the first direction X, so that the material is sent into the pressure container 2 with the feeding conveying mechanism 11, and the abutment of the feeding conveying mechanism 11 and the heating conveying mechanism 12 is realized, when the material falls into the heating conveying mechanism 12 by driving the first conveying rollers 111 by the second driving member 42, when the material is separated from the feeding conveying mechanism 11, the first driving member 41 drives the first conveying roller frame 112 to move reversely, so that the feeding conveying mechanism 11 exits the pressure container 2, and the stable conveying of the material is completed.

[0045] In the embodiment, the first driving member 41 can be a pneumatic cylinder or a linear motor, a slide rail is arranged on the first rack 14 along the first direction X, the bottom of the first conveying roller frame 112 is slidably arranged on the slide rail, the first conveying roller frame 112 is directly driven to move along the slide rail by the linear motor or the pneumatic cylinder, and the movement of the first conveying roller frame 112 along the first direction X is realized.

[0046] Optionally, the first rack 14 is provided with a first position sensor 15, which is used to detect the position of the material relative to the feeding conveying mechanism 11. In the embodiment, the first rack 14 is also provided with a first position sensor 15, which is used to detect the position of the material relative to the feeding conveying mechanism 11. When the first position sensor 15 detects that the position of the material on the feeding conveying mechanism 11 in the second direction Y exceeds the preset value, at this time, the material cannot accurately enter the pressure container 2, and the operator needs to correct in time. In the embodiment, the first position sensor 15 is in signal connection with the controller, and the controller is connected with the prompting device. After the controller receives the information of the first position sensor 15, once the position of the material is detected to be deviated, the controller will transmit the information to the prompting device to remind the operator to correct in time.

[0047] In the embodiment, the controller and the prompting device can be directly selected from the existing upper computer to realize, and the specific working principle thereof will not be described in detail here.

[0048] Further, in order to ensure the accuracy of the position detection, a plurality of first position sensors 15 can be arranged on the first rack 14.

[0049] Optionally, the end of the first rack 14 close to the pressure container 2 is provided with a connecting roller 16, the length of the connecting roller 16 is less than the length of the first conveying roller 111, and the height of the connecting roller 16 relative to the first rack 14 can be adjusted. In order to facilitate the smooth conveying of the material from the feeding conveying mechanism 11 to the heating conveying mechanism 12, the end of the first rack 14 close to the pressure container 2 is also provided with a connecting roller 16, the length of the connecting roller 16 is less than the length of the first conveying roller 111, which can ensure the smooth entry of the pressure container 2, and the height of the connecting roller 16 relative to the first rack 14 can be adjusted, which can also facilitate the adjustment to the appropriate height, so that the material is smoothly conveyed from the feeding conveying mechanism 11 to the heating conveying mechanism 12.

[0050] Please refer to the accompanying drawings Figure 3 and the accompanying drawings Figure 4 Optionally, the first driving assembly 3 is arranged in the second direction Y, the translation door 21 is arranged on the translation seat 22, and the first driving assembly 3 can drive the translation seat 22 to move along the second direction Y. Please refer to the accompanying drawings Figure 3 and the accompanying drawings Figure 4 In the embodiment, the translation door 21 is a circular body, and the conveying inlet and the conveying outlet of the pressure container 2 are also circular. The translation seat 22 is connected to the bottom of the translation door 21, and the driving end of the first driving assembly 3 is connected with the translation seat 22. The first driving assembly 3 can be selected from a linear motor or a cylinder, so that the driving end moves along the second direction Y. The arrangement of the translation seat 22 facilitates the connection with the first driving assembly 3 and facilitates the arrangement of the first driving assembly 3.

[0051] Further, the bottom of the translation seat 22 is provided with a guide groove 221, and the heating conveying mechanism 12 is arranged on the second rack 17, and the second rack 17 is provided with a guide rail 171 extending along the second direction Y, and the translation seat 22 is slidably connected with the guide rail 171 through the guide groove 221. The guide rail 171 extending along the second direction Y on the second rack 17 is used to slidably connect the translation seat 22 with the guide rail 171 through the guide groove 221 provided on the bottom of the translation seat 22, so as to realize the sliding of the translation seat 22 along the second direction Y, and realize the opening and closing of the translation door 21.

[0052] Optionally, the outer periphery of the translation door 21 is provided with a sealing plate 211, and the pressure container 2 is provided with a sealing groove 23 matched with the sealing plate 211, and the sealing plate 211 is embedded in the sealing groove 23 when the translation door 21 is closed. By embedding the sealing plate 211 in the sealing groove 23, the sealing effect of the translation door 21 on the pressure container 2 can be improved.

[0053] Optionally, the second rack 17 is provided with a second position sensor 18, and the second position sensor 18 can detect the position of the translation door 21 relative to the pressure container 2.

[0054] In this embodiment, the second position sensor 18 is used to detect whether the translation door 21 is moved to the position relative to the pressure container 2, and similarly, the second position sensor 18 is signal-connected with the controller, and the controller is connected with a prompting device, and once it is detected that the translation door 21 is moved to the position, the controller will transmit information to the prompting device to remind the operator to correct in time.

[0055] Optionally, the heating conveying mechanism 12 comprises a plurality of second conveying rollers 121 arranged side by side on the second rack 17, and both ends of the second conveying roller 121 are provided with a driven gear 122, and a plurality of driven gears 122 are meshingly connected with a chain 123, and the second driving assembly 4 further comprises a third driving member arranged outside the pressure container 2, and the third driving member is drivingly connected with the chain 123.

[0056] In this embodiment, the heating conveying mechanism 12 comprises a plurality of second conveying rollers 121 arranged side by side on the second rack 17, and the material is transported along the first direction X by the rotation of the plurality of second conveying rollers 121 arranged side by side, and the third driving member (not shown in the figure) is arranged outside the pressure container 2, so as to avoid the influence of the working heat of the third driving member on the inside of the pressure container 2, and also avoid the influence of the high pressure and high temperature environment in the inside of the pressure container 2 on the heat dissipation of the third driving member; the third driving member drives the chain 123, and the chain 123 simultaneously drives a plurality of driven gears 122 to rotate, so as to realize the simultaneous rotation of the second conveying rollers 121.

[0057] Further, please refer to the accompanying Figure 3, attached Figure 5 and attached Figure 6 The second driving assembly 4 further comprises an output shaft 43 connected with the output end of the third driving member, the output shaft 43 penetrates the pressure container 2, one end of the output shaft 43 is provided with a transmission gear 44, the transmission gear 44 is engagedly connected with the chain 123, and a dynamic sealing member 45 is sleeved on the output shaft 43, so as to seal the rotation gap between the pressure container 2 and the output shaft 43.

[0058] In the embodiment, the output shaft 43 is used to transmit the rotation force and the torque, the third driving member drives the output shaft 43 to rotate, the output shaft 43 drives the transmission gear 44 to rotate, the transmission gear 44 is engaged with the chain 123, the chain 123 is driven to rotate and the driven gear 122 is driven to rotate, since the third driving member is arranged outside the pressure container 2, the output shaft 43 penetrates the pressure container 2, in order to ensure the high pressure and high temperature environment of the pressure container 2, the dynamic sealing member 45 is sleeved on the output shaft 43, so as to seal the rotation gap between the pressure container 2 and the output shaft 43.

[0059] It can be understood that the dynamic sealing member 45 can be selected from the common axial sealing structure in the prior art, and the specific structure and sealing principle of the sealing are not further described herein.

[0060] In the embodiment, the blank conveying mechanism 13 is arranged downstream of the pressure container 2 and has the same structure as the blank conveying mechanism 11.

[0061] Obviously, the above embodiment of the application is only an example for clearly illustrating the application, and is not intended to limit the implementation manner of the application. For those skilled in the art, various obvious changes, re-adjustments and replacements can be made without departing from the protection scope of the application. Here, it is unnecessary and impossible to enumerate all the implementation manners. Any modification, equivalent replacement and improvement made within the spirit and principle of the application shall be included in the protection scope of the claims of the application.

Claims

1. A pressure drying device for drying materials, characterized in that, include: The conveying assembly (1) includes a feeding conveying mechanism (11), a heating conveying mechanism (12), and a discharging conveying mechanism (13). The pressure vessel (2) has the feeding conveying mechanism (11) located upstream of the pressure vessel (2); the heating conveying mechanism (12) located inside the pressure vessel (2); and the unloading conveying mechanism (13) located downstream of the pressure vessel (2). The pressure vessel (2) is used to heat materials. The first drive assembly (3) has sliding doors (21) at both ends of the pressure vessel (2), and the sliding doors (21) are connected to the first drive assembly (3). The first drive assembly (3) can drive the sliding doors (21) to open or close. The second drive component (4) can drive the feeding conveyor (11) to transfer the material to the heating conveyor (12), and can continue to transfer it from the heating conveyor (12) to the unloading conveyor (13). The feeding and conveying mechanism (11) includes a plurality of first conveying rollers (111) and a first conveying roller frame (112) arranged in parallel on the first frame (14). The two ends of the first conveying rollers (111) are connected to the first conveying roller frame (112). The second driving component (4) includes a first driving member (41) arranged on the first frame (14) and a second driving member (42) arranged inside one of the first conveying rollers (111). The second driving member (42) can drive the first conveying roller (111) with the second driving member (42) to rotate. The plurality of first conveying rollers (111) are connected by transmission. The first driving member (41) can drive the first conveying roller frame (112) to move along the first direction (X).

2. The pressure drying equipment according to claim 1, characterized in that, The first frame (14) is provided with a first position sensor (15), which is used to detect the position of the material relative to the feeding conveyor (11).

3. The pressure drying equipment according to claim 1, characterized in that, The first frame (14) is provided with a connecting roller (16) at one end near the pressure vessel (2). The length of the connecting roller (16) is less than the length of the first conveying roller (111). The connecting roller (16) can be adjusted in height relative to the first frame (14).

4. The pressure drying equipment according to claim 1, characterized in that, The first drive assembly (3) is arranged along the second direction (Y), and the sliding door (21) is arranged on the sliding seat (22). The first drive assembly (3) can drive the sliding seat (22) to move along the second direction (Y).

5. The pressure drying equipment according to claim 4, characterized in that, The translation seat (22) has a guide groove (221) at its bottom. The heating conveying mechanism (12) is mounted on the second frame (17). The second frame (17) has a guide rail (171) extending along the second direction (Y). The translation seat (22) is slidably connected to the guide rail (171) through the guide groove (221).

6. The pressure drying apparatus according to any one of claims 1-4, characterized in that, The sliding door (21) is provided with a sealing plate (211) on its outer periphery. The pressure vessel (2) is provided with a sealing groove (23) that cooperates with the sealing plate (211). When the sliding door (21) is closed, the sealing plate (211) is embedded in the sealing groove (23).

7. The pressure drying equipment according to claim 5, characterized in that, The second frame (17) is provided with a second position sensor (18), which can detect the position of the sliding door (21) relative to the pressure vessel (2).

8. The pressure drying equipment according to claim 5, characterized in that, The heating conveying mechanism (12) includes a plurality of second conveying rollers (121) arranged in parallel on the second frame (17). The two ends of the second conveying rollers (121) are provided with driven gears (122). The plurality of driven gears (122) are meshed with the chain (123). The second drive assembly (4) also includes a third drive member located outside the pressure vessel (2). The third drive member is connected to the chain (123) in a transmission manner.

9. The pressure drying equipment according to claim 8, characterized in that, The second drive assembly (4) further includes an output shaft (43) connected to the output end of the third drive member. The output shaft (43) passes through the pressure vessel (2). One end of the output shaft (43) is provided with a transmission gear (44). The transmission gear (44) meshes with the chain (123). A dynamic seal (45) is fitted on the output shaft (43) to seal the rotational gap between the pressure vessel (2) and the output shaft (43).

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