Sealing components and diaphragm compressors

Abstract

This invention relates to a sealing assembly and a diaphragm compressor. The sealing assembly includes a first sealing ring, a second sealing ring, and a retaining ring. The second sealing ring is located outside the first sealing ring. The inner surface of the retaining ring abuts against the first sealing ring, and the outer surface of the retaining ring abuts against the second sealing ring. One axial end of the first sealing ring, one axial end of the second sealing ring, and one axial end of the retaining ring are flush with each other. The other axial ends of the first sealing ring, the second sealing ring, and the retaining ring are also flush with each other. The retaining ring of the sealing assembly of this invention blocks the communication between the high-pressure side and the low-pressure side located on either side. Furthermore, when the working chamber pressure is lower than the external ambient pressure or higher than the external ambient pressure, the sealing ring adjacent to the low-pressure side can be further deformed to compress the diaphragm, thereby further improving the sealing effect of the sealing assembly between the low-pressure side and the high-pressure side.

Description

Technical Field

[0001] This invention relates to the field of diaphragm compressor technology, and in particular to a sealing assembly and a diaphragm compressor. Background Technology

[0002] A diaphragm compressor is a special type of positive displacement compressor that ensures that compressed gas is free from secondary pollution. It is suitable for the compression, transportation, and bottling of rare gases, as well as flammable, explosive, toxic, and harmful gases.

[0003] In diaphragm compressor design, the pressure within the cavity is periodic. Within one reciprocating cycle, the pressure in the working chamber (i.e., the air chamber) fluctuates between negative and positive pressure. These two pressure states constantly change, causing the sealing ring within the groove to deform under both negative and positive pressure conditions. When the diaphragm compressor receives negative pressure air, the external atmospheric pressure will be greater than the working chamber pressure. Under these conditions, the single sealing ring in related technologies cannot adhere tightly to the diaphragm, failing to provide a seal. This leads to seal failure, causing false alarms or no alarms at all, potentially resulting in equipment malfunctions. Summary of the Invention

[0004] This invention aims to at least partially solve one of the technical problems in related technologies. To this end, embodiments of this invention propose a sealing assembly suitable for diaphragm compressors operating under negative pressure intake conditions. This assembly achieves a sealing effect when the working chamber pressure is lower than the external ambient pressure and when the working chamber pressure is higher than the external ambient pressure, resulting in a good sealing effect and preventing accidents in the diaphragm compressor.

[0005] Embodiments of the present invention also propose a diaphragm compressor.

[0006] The sealing assembly of this invention includes:

[0007] First sealing ring;

[0008] A second sealing ring, located outside the first sealing ring; and

[0009] A retaining ring is disposed between the first sealing ring and the second sealing ring. The inner surface of the retaining ring abuts against the first sealing ring, and the outer surface of the retaining ring abuts against the second sealing ring. One axial end of the first sealing ring, one axial end of the second sealing ring, and one axial end of the retaining ring are flush with each other. The other axial ends of the first sealing ring, the second sealing ring, and the retaining ring are also flush with each other.

[0010] The retaining ring of the sealing assembly in this embodiment of the invention blocks the connection between the high-pressure side and the low-pressure side located on both sides, thus achieving a sealing effect. Furthermore, when the working chamber pressure is less than the external ambient pressure or greater than the external ambient pressure, the sealing ring adjacent to the high-pressure side deforms and pushes the retaining ring, causing the sealing ring adjacent to the low-pressure side to further deform and squeeze the diaphragm, thereby further improving the sealing effect of the sealing assembly between the low-pressure side and the high-pressure side.

[0011] In some embodiments, the inner side of the retaining ring extends along the axial direction of the retaining ring, and / or the outer side of the retaining ring extends along the axial direction of the retaining ring.

[0012] In some embodiments, the retaining ring has a rectangular cross-section in its radial direction.

[0013] In some embodiments, the retaining ring is a metal retaining ring or a polytetrafluoroethylene retaining ring.

[0014] In some embodiments, each of the first sealing ring and the second sealing ring is an "O" ring.

[0015] The diaphragm compressor of this invention includes:

[0016] Cylinder body, wherein the cylinder body is provided with an oil-side diaphragm cavity;

[0017] A cylinder head is provided on the cylinder body, and the cylinder head has a gas-side diaphragm cavity opposite to the oil-side diaphragm cavity. The cylinder body and / or the cylinder head are provided with a sealing groove.

[0018] A diaphragm, disposed between the cylinder block and the cylinder head, separates the oil-side diaphragm cavity and the gas-side diaphragm cavity; and

[0019] A sealing assembly, wherein the sealing assembly is the sealing assembly described in any of the above embodiments, the sealing groove is provided with the sealing assembly, one end of the first sealing ring, one end of the retaining ring and one end of the second sealing ring abut against the bottom wall surface of the sealing groove, and the other end of the first sealing ring, the other end of the retaining ring and the other end of the second sealing ring abut against the diaphragm, and the axial extension direction of the retaining ring is parallel to the axial extension direction of the cylinder body.

[0020] The diaphragm compressor of this invention seals the working chamber through a sealing assembly. The sealing assembly has a simple structure and good sealing effect, which can prevent gas flow between the working chamber and the external environment and ensure the sealing effect between the cylinder head, cylinder body and diaphragm. It can be used in negative pressure intake conditions, low pressure intake conditions and high pressure intake conditions, and is especially suitable for negative pressure intake conditions.

[0021] In some embodiments, the sealing groove has an inclined surface on one side wall of the cylinder adjacent to the oil-side membrane cavity and / or on the other side wall away from the oil-side membrane cavity in the radial direction of the cylinder body.

[0022] In some embodiments, the end of the inclined surface opposite to the bottom wall surface is inclined in a direction opposite to the sealing assembly.

[0023] In some embodiments, the cylinder body is provided with two sealing grooves, the cylinder head is provided with one sealing groove, and the sealing groove on the cylinder head is located radially between the two sealing grooves of the cylinder body.

[0024] In some embodiments, the other sidewall of the sealing groove on the cylinder head is an inclined surface, and the sidewall of the sealing groove located on the inner side of the cylinder body is an inclined surface. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of a diaphragm compressor according to an embodiment of the present invention;

[0026] Figure 2 yes Figure 1 Enlarged view of point A in the image (F1 is the force exerted by the working chamber pressure, and F2 is the force exerted by the external ambient air pressure).

[0027] Figure label:

[0028] Diaphragm compressor 100,

[0029] Sealing assembly 1, first sealing ring 11, second sealing ring 12, retaining ring 13;

[0030] Cylinder block 2, oil-side diaphragm chamber 21, cylinder head 3, gas-side diaphragm chamber 31, diaphragm 4, sealing groove 5, inclined surface 51. Detailed Implementation

[0031] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0032] like Figure 1 and Figure 2 As shown, the diaphragm compressor 100 of this embodiment includes a cylinder body 2, a cylinder head 3, a diaphragm 4, and a sealing assembly. The cylinder body 2 has an oil-side diaphragm cavity, the cylinder head 3 is disposed on the cylinder body 2, and the cylinder head 3 has a gas-side diaphragm cavity, which is opposite to the oil-side diaphragm cavity. A sealing groove 5 is provided on the cylinder body 2 and / or the cylinder head 3. The diaphragm 4 is disposed between the cylinder body 2 and the cylinder head 3, and the diaphragm 4 separates the oil-side diaphragm cavity and the gas-side diaphragm cavity. A sealing assembly 1 is provided in the sealing groove 5.

[0033] The sealing assembly 1 includes a first sealing ring 11, a second sealing ring 12, and a retaining ring 13. The second sealing ring 12 is located outside the first sealing ring 11, and the retaining ring 13 is disposed between the first sealing ring 11 and the second sealing ring 12. The inner side of the retaining ring 13 abuts against the first sealing ring 11, and the outer side of the retaining ring 13 abuts against the second sealing ring 12. One axial end of the first sealing ring 11, one axial end of the second sealing ring 12, and one axial end of the retaining ring 13 are flush with each other. The other axial ends of the first sealing ring 11, the second sealing ring 12, and the retaining ring 13 are flush with each other.

[0034] One end of the first sealing ring 11, one end of the retaining ring 13, and one end of the second sealing ring 12 abut against the bottom wall of the sealing groove 5, and the other end of the first sealing ring 11, the other end of the retaining ring 13, and the other end of the second sealing ring 12 abut against the diaphragm 4. The axial extension direction of the retaining ring 13 is parallel to the axial extension direction of the cylinder body 2.

[0035] In this embodiment of the invention, the diaphragm compressor 100 has a diaphragm 4 forming a gas chamber with the gas-side diaphragm cavity on the cylinder head 3 on one side of its thickness direction adjacent to the cylinder body 2, and an oil chamber with the oil-side diaphragm cavity on the cylinder head 2 on the other side of its thickness direction adjacent to the cylinder body 2. The gas chamber is the working chamber for compressing gas. In the non-operating state, the diaphragm compressor 100 has the diaphragm 4 in a flat, undeformed state. When the diaphragm compressor 100 is operating, within one cycle, the diaphragm 4 deforms towards the gas-side diaphragm cavity until it fits against the wall of the gas-side diaphragm cavity, thereby compressing and discharging gas from the gas chamber. The diaphragm 4 gradually returns to its flat state. When the oil pressure in the oil-side diaphragm cavity decreases until it is lower than the intake pressure, the intake pressure in the gas chamber causes the diaphragm 4 to deform towards the oil-side diaphragm cavity. The working chamber pressure of the diaphragm compressor 100 changes periodically between negative and positive pressure.

[0036] Taking a sealing component 1 in a sealing groove 5 as an example, the changes of the sealing component 1 under different pressures compared to the external environment in the working chamber are explained.

[0037] When the working chamber pressure is the same as the external environment pressure, the other end of the first sealing ring 11, the other end of the second sealing ring 12, and the other end of the retaining ring 13 abut against the diaphragm 4, blocking the external environment and the working chamber, thus sealing the working chamber.

[0038] When the pressure in the working chamber is less than the external ambient pressure, the external ambient pressure acts on the second sealing ring 12 located on the outer side, causing the second sealing ring 12 to deform inward (that is, towards the working chamber). A gap is formed between the second sealing ring 12 and the diaphragm 4. The retaining ring 13 blocks the gas from the external environment from entering the inner side and acts on the first sealing ring 11. The deformation of the second sealing ring 12 squeezes the retaining ring 13 inward and pushes the retaining ring 13 to move inward, so that the retaining ring 13 squeezes the first sealing ring 11. The first sealing ring 11 deforms, increasing the degree of compression between the other end of the first sealing ring 11 and the diaphragm 4, thereby improving the sealing effect of the first sealing ring 11 on the working chamber, that is, improving the sealing effect of the sealing assembly 1 on the working chamber. When the working chamber pressure is greater than the external ambient pressure, the working chamber pressure acts on the first sealing ring 11 located on the inner side, causing the first sealing ring 11 to deform outward. The retaining ring 13 prevents the gas in the working chamber from entering the outer side and acts on the second sealing ring 12. The deformation of the first sealing ring 11 squeezes the retaining ring 13 outward and pushes the retaining ring 13 to move outward, causing the retaining ring 13 to squeeze the second sealing ring 12. The second sealing ring 12 deforms, increasing the degree of compression between the other end of the second sealing ring 12 and the diaphragm 4, thereby improving the sealing effect of the second sealing ring 12 on the working chamber, which in turn improves the sealing effect of the sealing assembly 1 on the working chamber.

[0039] The sealing assembly 1 of this invention includes a retaining ring 13 and two sealing rings (i.e., a first sealing ring 11 and a second sealing ring 12). The retaining ring 13 blocks the connection between the high-pressure side and the low-pressure side located on both sides of it, thus playing a sealing role. Furthermore, when the working chamber pressure is less than the external environment pressure and when the working chamber pressure is greater than the external environment pressure, the sealing ring adjacent to the high-pressure side deforms and pushes the retaining ring 13, causing the sealing ring adjacent to the low-pressure side to further deform and squeeze the diaphragm 4, thereby further improving the sealing effect of the sealing assembly 1 between the low-pressure side and the high-pressure side.

[0040] The diaphragm compressor 100 of this embodiment of the invention seals the working chamber through the sealing component 1. The sealing component 1 has a simple structure and good sealing effect, which can prevent gas flow between the working chamber and the external environment and ensure the sealing effect between the cylinder head 3, the cylinder body 2 and the diaphragm 4. It can be used for negative pressure intake conditions, low pressure intake conditions and high pressure intake conditions, and is especially suitable for negative pressure intake conditions.

[0041] To make the scheme of this application easier to understand, Figures 1 to 2 Let's take an example to illustrate.

[0042] The diaphragm compressor 100 of this invention includes a cylinder body 2, a cylinder head 3, a diaphragm 4, and a sealing assembly 1. The cylinder body 2 has an oil-side diaphragm cavity, the cylinder head 3 is disposed on the cylinder body 2, and the cylinder head 3 has a gas-side diaphragm cavity, which is opposite to the oil-side diaphragm cavity. The cylinder body 2 and / or the cylinder head 3 have a sealing groove 5, and the diaphragm 4 is disposed between the cylinder body 2 and the cylinder head 3, separating the oil-side diaphragm cavity and the gas-side diaphragm cavity. The sealing assembly 1 is disposed within the sealing groove 5.

[0043] The sealing assembly 1 includes a first sealing ring 11, a second sealing ring 12, and a retaining ring 13. The second sealing ring 12 is located outside the first sealing ring 11, and the retaining ring 13 is disposed between the first sealing ring 11 and the second sealing ring 12. The inner side of the retaining ring 13 abuts against the first sealing ring 11, and the outer side of the retaining ring 13 abuts against the second sealing ring 12. One axial end of the first sealing ring 11, one axial end of the second sealing ring 12, and one axial end of the retaining ring 13 are flush with each other. The other axial ends of the first sealing ring 11, the second sealing ring 12, and the retaining ring 13 are flush with each other.

[0044] One end of the first sealing ring 11, one end of the retaining ring 13, and one end of the second sealing ring 12 abut against the bottom wall of the sealing groove 5, and the other end of the first sealing ring 11, the other end of the retaining ring 13, and the other end of the second sealing ring 12 abut against the diaphragm 4. The axial extension direction of the retaining ring 13 is parallel to the axial extension direction of the cylinder body 2.

[0045] Each of the first sealing ring 11 and the second sealing ring 12 is an "O" ring. The "O" ring has a simple structure and low cost, which helps to reduce the manufacturing difficulty and cost of the sealing assembly 1 and the diaphragm compressor 100.

[0046] In some embodiments, the inner side of the retaining ring 13 extends along the axial direction of the retaining ring 13, and the outer side of the retaining ring 13 extends along the axial direction of the retaining ring 13. The inner and outer sides of the retaining ring 13 are parallel. The retaining ring 13 has an annular sheet structure, which ensures the balance of force transmission between the retaining ring 13 and the first sealing ring 11, and ensures the balance of force transmission between the retaining ring 13 and the second sealing ring 12. At the same time, it reduces the space occupied by the retaining ring 13 in the sealing groove 5, and can reduce its impact on the volume ratio of the sealing groove 5.

[0047] In some embodiments, the retaining ring 13 has a rectangular cross-section in its radial direction, that is, each of the one end and the other end of the retaining ring 13 is a plane, ensuring that the one end of the retaining ring 13 has a certain contact area with the bottom wall surface of the sealing groove 5, and ensuring that the other end of the retaining ring 13 has a certain contact area with the diaphragm 4, thereby improving the barrier effect of the retaining ring 13 on its inner and outer spaces, that is, improving the barrier effect of the retaining ring 13 on the working cavity and the external environment, and further improving the sealing effect of the sealing assembly 1 on the working cavity.

[0048] In some embodiments, the retaining ring 13 is a metal retaining ring. The metal retaining ring has high hardness and strength, and can resist a certain pressure without deformation, thereby ensuring that the retaining ring 13 does not deform when the first sealing ring 11 or the second sealing ring 12 squeezes the retaining ring 13, thus ensuring the sealing effect of the retaining ring 13.

[0049] In some other embodiments, the retaining ring 13 is a polytetrafluoroethylene (PTFE) retaining ring. PTFE retaining rings also have a certain degree of hardness and strength, and can withstand certain pressure without deformation. Furthermore, PTFE retaining rings have a lower cost, which can reduce the cost of the sealing assembly 1 and the diaphragm compressor 100.

[0050] In some embodiments, the sealing groove 5 has an inclined surface 51 on one side wall (inner side wall) adjacent to the oil-side membrane cavity in the radial direction of the cylinder body 2 and / or on the other side wall (outer side wall) away from the oil-side membrane cavity, thereby increasing the volume of the sealing groove 5 and improving the volume ratio of the sealing groove 5. When the side wall of the sealing groove 5 is an inclined surface 51, it is easier for the first sealing ring 11 to better fill the sealing groove 5 when it deforms, thereby further improving the sealing effect of the first sealing ring 11. When the other side wall of the sealing groove 5 is an inclined surface 51, it is easier for the second sealing ring 12 to better fill the sealing groove 5 when it deforms, thereby further improving the sealing effect of the second sealing ring 12, and thus further improving the sealing effect of the sealing assembly 1 on the working cavity.

[0051] In some embodiments, the end of the inclined surface 51 facing away from the bottom wall surface is inclined in a direction away from the sealing assembly 1. That is, the open end of the inclined surface 51 is inclined in a direction away from the sealing assembly 1, and the opening of the sealing groove 51 is larger than the size of the bottom wall surface of the sealing groove 51. Figure 2 As shown, this facilitates the processing of the inclined surface 51, reduces the manufacturing difficulty of the sealing groove 5, facilitates the installation of the "O" ring, and reduces the manufacturing difficulty and cost of the diaphragm compressor 100.

[0052] In some other embodiments, the end of the inclined surface 51 that is away from the bottom wall surface is inclined toward the adjacent sealing component 1. That is, the open end of the inclined surface 51 is inclined toward the adjacent sealing component 1. The opening of the sealing groove 5 is smaller than the size of the bottom wall surface of the sealing groove 5, which can prevent the "O" ring from falling out of the sealing groove 5.

[0053] In some embodiments, the cylinder body 2 is provided with two sealing grooves 5, and the cylinder cover 3 is provided with one sealing groove 5. The sealing groove 5 on the cylinder cover 3 is located radially between the two sealing grooves 5 on the cylinder body 2. Therefore, the cylinder body 2 is provided with two sealing components 1, and the cylinder cover 3 is provided with one sealing component 1. The sealing component 1 on the cylinder cover 3 is located between the two sealing components 1 on the cylinder body 2. The arrangement of the three sealing components 1 further ensures the barrier between the working chamber and the external environment, further ensuring the sealing effect on the working chamber.

[0054] In some embodiments, the other side wall of the sealing groove 5 on the cylinder head 3 is an inclined surface, and the side wall of the sealing groove 5 located on the inner side of the cylinder body 2 is an inclined surface, which further reduces the processing difficulty of the sealing groove 5, further reduces the manufacturing difficulty and cost of the diaphragm compressor 100, and the side wall of the sealing groove 5 on the cylinder head 3 and the other side wall of the sealing groove 5 located on the inner side of the cylinder body 2 are adjacent, which also facilitates the alignment and assembly of the cylinder body 2 and the cylinder head 3.

[0055] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0056] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0057] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0058] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0059] In this invention, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0060] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A diaphragm compressor, characterized in that, include: Cylinder body (2), wherein the cylinder body (2) is provided with an oil-side diaphragm cavity; Cylinder head (3), the cylinder head (3) is provided on the cylinder body (2), the cylinder head (3) is provided with a gas side diaphragm cavity, the gas side diaphragm cavity is opposite to the oil side diaphragm cavity, and the cylinder body (2) and / or the cylinder head (3) are provided with a sealing groove (5). A diaphragm (4) is disposed between the cylinder block (2) and the cylinder head (3), the diaphragm (4) separating the oil-side diaphragm cavity and the gas-side diaphragm cavity; and A sealing assembly comprising a first sealing ring (11), a second sealing ring (12), and a retaining ring (13), wherein the second sealing ring (12) is located outside the first sealing ring (11); the retaining ring (13) is disposed between the first sealing ring (11) and the second sealing ring (12), wherein the inner side of the retaining ring (13) abuts against the first sealing ring (11), and the outer side of the retaining ring (13) abuts against the second sealing ring (12), wherein one axial end of the first sealing ring (11), one axial end of the second sealing ring (12) and one axial end of the retaining ring (13) are flush, and the other axial end of the first sealing ring (11), one axial end of the second sealing ring (12) and the other axial end of the retaining ring (13) are flush; The sealing groove (5) is provided with the sealing assembly. One end of the first sealing ring (11), one end of the retaining ring (13) and one end of the second sealing ring (12) abut against the bottom wall of the sealing groove (5). The other end of the first sealing ring (11), the other end of the retaining ring (13) and the other end of the second sealing ring (12) abut against the diaphragm (4). The axial extension direction of the retaining ring (13) is parallel to the axial extension direction of the cylinder (2). The retaining ring (13) blocks the connection between the high-pressure side and the low-pressure side located on both sides of it, and when the working chamber pressure is less than the external environment pressure and the working chamber pressure is greater than the external environment pressure, the sealing ring adjacent to the high-pressure side deforms and squeezes the retaining ring (13), so that the sealing ring adjacent to the low-pressure side further deforms and squeezes the diaphragm. The inner side of the retaining ring (13) extends along the axial direction of the retaining ring (13), the outer side of the retaining ring (13) extends along the axial direction of the retaining ring (13), and the cross-section of the retaining ring (13) in its radial direction is rectangular.

2. The diaphragm compressor according to claim 1, characterized in that, The retaining ring (13) is a metal retaining ring or a polytetrafluoroethylene retaining ring.

3. The diaphragm compressor according to claim 1, characterized in that, Each of the first sealing ring (11) and the second sealing ring (12) is an "O" ring.

4. The diaphragm compressor according to claim 1, characterized in that, The sealing groove (5) is inclined on one side wall of the cylinder body (2) adjacent to the oil side membrane cavity and / or the other side wall away from the oil side membrane cavity in the radial direction.

5. The diaphragm compressor according to claim 4, characterized in that, The end of the inclined surface that is away from the bottom wall surface is inclined in a direction away from the sealing assembly.

6. The diaphragm compressor according to claim 5, characterized in that, The cylinder body (2) is provided with two sealing grooves (5), and the cylinder cover (3) is provided with one sealing groove (5). The sealing groove (5) on the cylinder cover (3) is located in the radial direction of the cylinder body (2) between the two sealing grooves (5) of the cylinder body (2).

7. The diaphragm compressor according to claim 6, characterized in that, The other side wall of the sealing groove (5) on the cylinder head (3) is an inclined surface, and the side wall of the sealing groove (5) located on the inner side of the cylinder body (2) is an inclined surface.

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