Vacuum scanning probe microscope

Abstract

The application relates to a vacuum scanning probe microscope, comprising a mirror body, wherein the mirror body comprises a probe, a sample table, a mirror body top plate, a base, a plurality of cylindrical concave tables and a plurality of horizontal driving devices; the sample table is used for placing a sample; the probe is arranged on one side of the mirror body top plate close to the sample table; the plurality of cylindrical concave tables are arranged between the mirror body top plate and the base, so as to separate the probe and the sample table, and a light beam emitted by an optical imaging system is vertically focused on the probe and the sample table through the mirror body top plate; the plurality of horizontal driving devices are arranged on the base and are distributed in a circumferential array and used for driving the sample table to move. The application can accurately find a specific area of a sample and improves detection efficiency.

Description

Technical Field

[0001] This application relates to the field of microscopy, and in particular to a vacuum scanning probe microscope. Background Technology

[0002] With the development of microscopy technology, scanning probe microscopy, as a new type of micro- and nano-scale measurement, characterization, and manipulation tool, has been increasingly applied in multiple disciplines such as materials, physics, chemistry, and biology, playing an irreplaceable role in the development of modern interdisciplinary fields.

[0003] For scanning probe microscopes, locating and measuring micro / nano-scale samples is a prerequisite for conducting measurement experiments. In a vacuum environment, commonly used scanning probe microscopes, equipped with cryogenic Dewars or suspended scanning heads, cannot utilize the vertical reflection of light from the sample path to locate it. This is especially true for scanning probe microscopes employing head-scanning, where the coarse horizontal drive motor uses a center-preload method, requiring a clamping mechanism in the center of the scanning stage. This obstructs the vertical reflection of the sample stage's light path.

[0004] It is evident that current scanning probe microscopes in a vacuum cannot accurately locate specific areas of a sample, resulting in unclear detection targets and extremely low detection efficiency. Summary of the Invention

[0005] Therefore, it is necessary to provide a vacuum scanning probe microscope to address the above-mentioned technical problems, so as to accurately locate the sample in a vacuum and improve detection efficiency.

[0006] This application provides a vacuum scanning probe microscope method. The vacuum scanning probe microscope includes a microscope body, which comprises: a probe, a sample stage, a top plate, a base, multiple cylindrical stages, and multiple horizontal driving devices.

[0007] The sample stage is used to place the sample;

[0008] The probe is disposed on the side of the top plate of the mirror body near the sample stage;

[0009] The plurality of cylindrical recesses are placed between the top plate of the mirror body and the base to separate the probe and the sample stage. The light beam emitted by the optical imaging system is vertically focused on the probe and the sample stage through the top plate of the mirror body.

[0010] The plurality of horizontal driving devices are disposed on the base and are arranged in a circular array to drive the sample stage to move.

[0011] In one embodiment, the top plate of the mirror body is provided with a through hole, which is used to vertically focus the light beam emitted by the optical imaging system onto the probe and the sample stage.

[0012] In one embodiment, the vacuum scanning probe microscope further includes:

[0013] A scanning tube is positioned on the side of the sample stage away from the probe and is used to control the movement of the sample stage. A double-layer triangular pyramid frame is connected around the scanning tube.

[0014] The scanning head base plate is fixedly connected to the double-layer triangular pyramid frame and the horizontal drive device, and is used to drive the double-layer triangular pyramid frame and the scanning tube to move under the drive of the horizontal drive device.

[0015] In one embodiment, the horizontal drive device includes:

[0016] A horizontal piezoelectric ceramic stack is disposed on the base and fixedly connected to the scanning head base plate. The horizontal piezoelectric ceramic stack is used to drive the scanning head base plate to move.

[0017] A horizontal sapphire sphere is mounted on the bottom plate of the scanning head.

[0018] A horizontal beryllium copper strip is fixedly connected to the base and pressed onto the horizontal sapphire sphere.

[0019] In one embodiment, when a sawtooth wave voltage is applied to the piezoelectric ceramic sheet polarized along a first direction in the horizontal piezoelectric ceramic stack, the horizontal piezoelectric ceramic stack is used to drive the scanning head base plate and the scanning tube to move along the first direction.

[0020] In one embodiment, when a sawtooth wave voltage is applied to the piezoelectric ceramic sheet polarized in the second direction in the horizontal piezoelectric ceramic stack, the horizontal piezoelectric ceramic stack is used to drive the scanning head base plate and the scanning tube to move in the second direction.

[0021] In one embodiment, the double-layer triangular pyramid frame includes:

[0022] A first triangular pyramid frame is disposed around the scanning tube and is fixedly connected to the scanning tube;

[0023] The second triangular pyramid is fixedly connected to the base plate of the scanning head; at least one vertical piezoelectric ceramic stack is disposed between the first and second triangular pyramids, and when a sawtooth wave voltage is applied to the vertical piezoelectric ceramic stack, the vertical piezoelectric ceramic stack is used to drive the first triangular pyramid to move in a third direction;

[0024] At least one vertical beryllium copper bar is fixedly connected to the second triangular pyramid frame by screws;

[0025] At least one vertical sapphire sphere is disposed between the vertical beryllium copper strip and the first triangular pyramid.

[0026] In one embodiment, the vacuum scanning probe microscope further includes:

[0027] A stack of piezoelectric ceramic probes is disposed between the probe and the top plate of the mirror body to excite the probe to vibrate.

[0028] In one embodiment, the vacuum scanning probe microscope further includes a suspension frame for suspending the microscope body. The suspension frame includes an outer frame structure and a tension spring.

[0029] One side of the tension spring is connected to the outer frame structure, and the other side is provided with a lower threaded post, which is used to connect with the top plate of the mirror body by thread.

[0030] In one embodiment, the mirror body further includes a magnet assembly disposed on the side of the base away from the top plate of the mirror body, and the suspension frame further includes a plurality of oxygen-free copper inner grooves disposed on the outer frame structure, the plurality of oxygen-free copper inner grooves being used to form a suspended concave-convex fit with the magnet assembly.

[0031] The aforementioned vacuum scanning probe microscope includes a microscope body, which comprises: a probe, a sample stage, a top plate, a base, multiple cylindrical stages, and multiple horizontal drive devices. The sample stage is used to hold a sample. The probe is disposed on the top plate near the sample stage. The multiple cylindrical stages are placed between the top plate and the base to separate the probe and the sample stage. A light beam emitted by the optical imaging system is vertically focused onto the probe and the sample stage through the top plate. The multiple horizontal drive devices are disposed on the base and are arranged in a circular array to drive the sample stage. The vacuum scanning probe microscope provided in this application expands the effective detection area of ​​the sample stage surface by scanning the sample stage. It features an open optical path and is suitable for use with optical imaging systems. Multiple horizontal drive devices that drive the sample stage are arranged in a circumferential array on the base plate of the microscope body. This improves upon the previous horizontal motor pre-tightening method of scanning probe microscopes by changing the center pre-tightening method to an outer pre-tightening method, which solves the interference problem of vertically incident light. At the same time, the probe and sample stage are separated by a cylindrical concave stage, which reduces the obstruction of lateral light and increases the light flux, so that specific areas of the sample can be accurately located in a vacuum, thereby improving detection efficiency. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the structure of a vacuum scanning probe microscope in one embodiment;

[0033] Figure 2a This is a schematic diagram of a cross-section of a beam incident perpendicularly in one embodiment;

[0034] Figure 2b This is a schematic cross-sectional view of a beam incident from the side in one embodiment;

[0035] Figure 3 This is a schematic diagram of the structure of a vacuum scanning probe microscope in one embodiment;

[0036] Figure 4 This is a waveform diagram of a triangular wave voltage applied to the scanning tube in one embodiment;

[0037] Figure 5 This is a schematic diagram of the deformation of the scanning tube in one embodiment;

[0038] Figure 6 This is a waveform diagram of a sawtooth wave voltage applied to a piezoelectric ceramic stack in one embodiment;

[0039] Figure 7 This is a schematic diagram of the deformation of a piezoelectric ceramic stack in one embodiment;

[0040] Figure 8 This is a schematic diagram of the structure of a vacuum scanning probe microscope in one embodiment. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0042] It should be understood that the terms "first," "second," "third," and "fourth," etc., in the claims, specification, and drawings of this disclosure are used to distinguish different objects, not to describe a specific order. The terms "comprising" and "including" as used in the specification and claims of this disclosure indicate the presence of the described features, integrals, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or collections thereof.

[0043] It should also be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of this disclosure. As used in this disclosure and claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used in this disclosure and claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes such combinations.

[0044] Scanning probe microscopy (SMT) is a novel tool for micro- and nano-scale measurement, characterization, and manipulation, increasingly applied in materials science, physics, chemistry, biology, and other disciplines, playing an irreplaceable role in the development of modern interdisciplinary research. For SMT, locating and measuring micro- and nano-scale samples is a prerequisite for measurement experiments. With the continuous advancement of scientific research, researchers need to conduct micro- and nano-scale sample measurement experiments in a vacuum to avoid interference from atmospheric dust particles and water films on sample surfaces. However, in a vacuum environment, traditional vacuum SMT equipment (such as RHK Technology, Senta Omicron, and CreaTec), equipped with cryogenic Dewars or suspended scanning heads, cannot utilize optical paths for vertical reflection to detect sample positions. Most vacuum SMT microscopes use oblique incident light paths, or even lack an optical path system altogether. On the one hand, the cost of optical components in the moving optical path system in a vacuum is high, requiring the installation of multiple piezoelectric displacement devices. On the other hand, for scanning probe microscopes using a head-scanning method, the coarse horizontal drive motor uses a center-preload method, requiring a clamping mechanism to be installed in the middle of the scanning stage, which obstructs the vertical reflection of the sample stage's optical path. Therefore, traditional scanning probe microscopes in a vacuum environment, due to their center-preloaded horizontal drive motors, cannot be used with vertically incident optical imaging systems, thus failing to accurately locate specific areas of the sample with the assistance of the optical system, resulting in serious problems such as unclear detection targets and extremely low detection efficiency. Furthermore, traditional scanning probe microscopes are large, have complex circuitry, poor portability, and are difficult to place in or remove from a vacuum chamber.

[0045] Based on this, this application provides a vacuum scanning probe microscope to solve the above problems, which can accurately locate the sample in a vacuum and improve detection efficiency.

[0046] In one embodiment, such as Figure 1As shown, a vacuum scanning probe microscope 100 is provided. The vacuum scanning probe microscope 100 includes a microscope body. The microscope body includes a probe 16, a sample stage 15, a top plate 1, a base, multiple cylindrical stages 3, and multiple horizontal drive devices. The sample stage 15 is used to hold a sample. The probe 16 is disposed on the side of the top plate 1 near the sample stage 15. The multiple cylindrical stages 3 are placed between the top plate 1 and the base to separate the probe 16 and the sample stage 15. A light beam emitted by an optical imaging system is vertically focused onto the probe 16 and the sample stage 15 through the top plate 1. The multiple horizontal drive devices are disposed on the base and are arranged in a circumferential array to drive the sample stage 15 to move.

[0047] Specifically, probe 16 is positioned above sample stage 15, and both probe 16 and sample stage 15 are located on the central axis of the microscope body. Probe 16 can be used to probe the sample placed on sample stage 15, and to test the three-dimensional morphology and physicochemical properties of the sample surface micro-area with high resolution, such as testing the temperature, surface potential, magnetic field force, electrostatic force, friction force, current, capacitance, etc. of the sample surface. The base may include a horizontal stacking base plate 8 and a microscope body base plate 9, with the horizontal stacking base plate 8 positioned above the microscope body base plate 9. Multiple cylindrical recesses 3 can be fixedly connected to the horizontal stacking base plate 8 with screws. Multiple cylindrical recesses 3 are placed between the microscope body top plate 1 and the horizontal stacking base plate 8 to separate probe 16 and sample stage 15. Multiple horizontal drive devices are disposed on the horizontal stacking base plate 8 to drive the sample stage 15 to move horizontally.

[0048] It should be noted that the embodiments of this application do not specifically limit the shape and size of the top plate 1 and the bottom plate 9 of the mirror body. The embodiments of this application do not specifically limit the number of cylindrical recesses 3 and horizontal driving devices.

[0049] by Figure 1 Taking the vacuum scanning probe microscope 100 shown as an example, both the top plate 1 and the bottom plate 9 of the microscope body can be circular plates. The vacuum scanning probe microscope 100 can include three cylindrical recesses 3 and three horizontal drive devices. The three cylindrical recesses 3 can be arranged in a circular array on the horizontally stacked bottom plate 8, and the three horizontal drive devices can also be arranged in a circular array on the horizontally stacked bottom plate 8 to maximize structural stability and smooth movement. A horizontal drive device can be set between every two cylindrical recesses 3.

[0050] Traditional scanning probe microscopes, due to the conventional central pre-tensioning method of their horizontal piezoelectric motors, suffer from severe interference with the optical path, preventing the beam from converging perpendicularly onto the probe and sample. The vacuum scanning probe microscope 100 provided in this embodiment of the application distributes three horizontal drive devices in a circular array on a horizontal stacking base plate 8, changing the traditional central pre-tensioning method to a peripheral three-legged pre-tensioning method, thus avoiding the aforementioned interference phenomenon. Traditional scanning probe microscopes, limited by the interference of the pre-tensioning mechanism on incident light perpendicular to the sample, employ two methods: one is to allow the beam to enter parallel to the sample, passing through a complex optical path system to irradiate the sample. However, this method is only suitable for atmospheric environments; for vacuum scanning probe microscopes, the complex optical component drive module is costly. Another method, using oblique incidence in a vacuum, significantly reduces sample resolution and detection range. The vacuum scanning probe microscope 100 provided in this embodiment of the application can be used in conjunction with an optical imaging system. The beam of the optical imaging system can enter from above the top plate 1 of the microscope body and be vertically focused onto the probe 16 and the sample stage 15, such as... Figure 2a As shown, this allows for perpendicular incidence of the light beam. The vacuum scanning probe microscope 100 can also incident the light beam from any angle on the side, such as... Figure 2b As shown, since the probe 16 and the sample stage 15 are separated by the cylindrical boss 3, there is little obstruction to the probe 16 and the sample, resulting in an extremely wide lateral field of view and thus high light throughput.

[0051] The vacuum scanning probe microscope provided in this application expands the effective detection area of ​​the sample stage surface by scanning the sample stage. It features an open optical path and is suitable for use with optical imaging systems. Multiple horizontal drive devices that drive the sample stage are arranged in a circumferential array on the base plate of the microscope body. This improves upon the previous horizontal motor pre-tightening method of scanning probe microscopes by changing the center pre-tightening method to an outer pre-tightening method, which solves the interference problem of vertically incident light. At the same time, the probe and sample stage are separated by a cylindrical concave stage, which reduces the obstruction of lateral light and increases the light flux, so that specific areas of the sample can be accurately located in a vacuum, thereby improving detection efficiency.

[0052] In one embodiment, such as Figure 1 As shown, the top plate 1 of the mirror body is provided with a through hole 2. The through hole 2 is used to vertically focus the light beam emitted by the optical imaging system onto the probe 16 and the sample stage 15.

[0053] For example, the through-hole 2 can be located in the middle of the top plate 1 of the microscope body. The through-hole 2, probe 16, and sample stage 15 can be located on the central axis of the microscope body, so that the light beam emitted by the optical imaging system can be vertically focused onto probe 16 and sample stage 15 through the through-hole 2. It should be noted that only when the light beam of the optical imaging system is vertically incident on the sample on the sample stage 15 can the sample surface reflect the most light, which is then received by the CCD optical microscope (charge-coupled device, which can be called CCD image sensor) in the optical imaging system, thus enabling high-resolution and wide-range observation and positioning of the sample.

[0054] In this embodiment, by providing a through hole 2 on the top plate 1 of the microscope body, the beam of the vacuum scanning probe microscope 100 is vertically incident, thereby achieving high-resolution and wide-range observation and positioning of the sample.

[0055] In one embodiment, such as Figure 3 As shown, the vacuum scanning probe microscope 100 also includes a scanning tube 14 and a scanning head base plate 6. The scanning tube 14 is located on the side of the sample stage 15 away from the probe 16 and is used to control the movement of the sample stage 15. A double-layer triangular pyramid frame 30 is connected around the scanning tube 14. The scanning head base plate 6 is fixedly connected to the double-layer triangular pyramid frame 30 and the horizontal drive device, and is used to drive the double-layer triangular pyramid frame 30 and the scanning tube 14 to move under the drive of the horizontal drive device.

[0056] Specifically, the microscope body adopts a sample stage scanning method. Under the drive of a control signal, the sample stage 15 achieves a wide range of movement and high-precision point-to-point scanning below the probe 16. The scanning tube 14 is located below the sample stage 15 and is fixedly connected to it. The scanning tube 14 is located inside the double-layer triangular pyramid 30 and is surrounded by the double-layer triangular pyramid 30. The scanning tube 14 is tightly fixedly connected to a part of the structure in the double-layer triangular pyramid 30. The horizontal drive device can drive the scanning head base plate 6 to move horizontally, thereby driving the double-layer triangular pyramid 30 to move horizontally. The scanning tube 14 inside the double-layer triangular pyramid 30 is also driven to move horizontally, thus realizing the wide range of movement of the sample stage 15.

[0057] With the assistance of an optical imaging system, the sample undergoes a large-scale initial movement to reach the vicinity of the designated position, after which the scanning tube 14 can be controlled to perform further high-precision scanning movements. The scanning tube 14 may also include a stack of piezoelectric ceramics, such as... Figure 4 As shown, by applying a triangular wave voltage to the scanning tube 14, the scanning tube 14 can bend and deform back and forth under the action of the triangular wave voltage, thereby driving the sample stage 15 to move with high precision. The deformation of the scanning tube 14 can be as follows: Figure 5 As shown.

[0058] In this embodiment of the disclosure, the integrated structural design of the scanning head base plate 6, the double-layer triangular pyramid frame 30, the scanning tube 14, and the sample stage 15 enables the horizontal driving device to drive the horizontal movement of the scanning tube 14, thereby achieving high-resolution and wide-range observation and positioning of the sample.

[0059] In one embodiment, such as Figure 3 As shown, the horizontal drive device includes a horizontal piezoelectric ceramic stack 7, a horizontal sapphire ball 4, and a horizontal beryllium copper strip 5. The horizontal piezoelectric ceramic stack 7 is mounted on the base and fixedly connected to the scanning head base plate 6. The horizontal piezoelectric ceramic stack 7 is used to drive the scanning head base plate 6 to move. The horizontal sapphire ball 4 is mounted on the scanning head base plate 6. The horizontal beryllium copper strip 4 is fixedly connected to the base and presses against the horizontal sapphire ball 4.

[0060] Specifically, the scanning head base plate 6 may include three support plates, each with its distal end positioned above and fixedly connected to a horizontal piezoelectric ceramic stack 7. The horizontal piezoelectric ceramic stack 7 is connected above the horizontal stack base plate 8. The horizontal piezoelectric ceramic stack 7 can drive the scanning head base plate 6 to perform a wide range of horizontal movements, thereby moving the scanning tube 14 and sample stage 15 to a designated position. The horizontal stack base plate 8 may include three sets of support columns 40, each set of support columns 40 including two support groups 32. Each horizontal beryllium copper strip 4 can be fixedly connected to its corresponding set of support columns 40 by screws. The reliability of the movement of the horizontal piezoelectric ceramic stack 7 depends on a suitable preload. The preload can be controlled by adjusting the curvature of the horizontal beryllium copper strip 5. During horizontal movement, the horizontal beryllium copper strip 5 presses against the horizontal sapphire ball 4, and the horizontal piezoelectric ceramic stack 7, together with the scanning head base plate 6, slides horizontally with the base.

[0061] In this embodiment, the design of the horizontal piezoelectric ceramic stack 7, the horizontal sapphire ball 4, and the horizontal beryllium copper strip 5 achieves periphery pre-tightening during horizontal movement, replacing the traditional center pre-tightening method. This solves the interference problem of vertically incident light, accurately locates specific areas of the sample, and improves detection efficiency.

[0062] In one embodiment, when a sawtooth wave voltage is applied to the piezoelectric ceramic sheet polarized in the first direction in the horizontal piezoelectric ceramic stack 7, the horizontal piezoelectric ceramic stack 7 is used to drive the scanning head base plate 6 and the scanning tube 14 to move in the first direction.

[0063] For example, such as Figure 3 As shown, a three-axis coordinate system with X, Y, and Z axes can be established. The first direction is the X-axis direction, the second direction is the Y-axis direction, and the third direction is the Z-axis direction. The sawtooth wave voltage applied to the horizontal piezoelectric ceramic stack 7 can be as follows: Figure 6As shown, when a sawtooth wave voltage is applied to the piezoelectric ceramic sheet polarized along the X-axis (left-right direction) in the horizontal piezoelectric ceramic stack 7, the horizontal piezoelectric ceramic stack 7 deforms in the left-right direction, which can drive the scanning head base plate 6 and scanning tube 14 fixed thereto to move in the left-right direction.

[0064] In this embodiment of the disclosure, a sawtooth wave voltage is applied to the piezoelectric ceramic sheet polarized along the first direction of the horizontal piezoelectric ceramic stack 7 to achieve a wide range of movement of the sample stage 15 in the left and right directions.

[0065] In one embodiment, when a sawtooth wave voltage is applied to the piezoelectric ceramic sheet polarized in the second direction in the horizontal piezoelectric ceramic stack 7, the horizontal piezoelectric ceramic stack 7 is used to drive the scanning head base plate 6 and the scanning tube 14 to move in the second direction.

[0066] Specifically, taking the first direction as the X-axis, the second direction as the Y-axis, and the third direction as the Z-axis as an example, when a sawtooth wave voltage is applied to the piezoelectric ceramic sheet polarized in the Y-axis direction (front-back direction), the horizontal piezoelectric ceramic stack 7 deforms in the front-back direction, which can drive the scanning head base plate 6 and the scanning tube 14 fixed thereto to move in the front-back direction.

[0067] In this embodiment of the disclosure, a sawtooth wave voltage is applied to the piezoelectric ceramic sheet polarized along the second direction of the horizontal piezoelectric ceramic stack 7 to achieve a large range of movement of the sample stage 15 in the front-back direction.

[0068] The two disclosed embodiments described above separate the piezoelectric stacks in two directions, stack the displacement stages in two directions, and add a clamping device composed of beryllium copper strips and sapphire balls, so that the sample stage 15 maintains high precision and straightness during movement in two directions, and avoids phenomena such as torsion that affect precision during movement.

[0069] In one embodiment, such as Figure 3 As shown, the double-layer triangular pyramid frame 30 includes a first triangular pyramid frame 31, a second triangular pyramid frame 32, at least one vertical piezoelectric ceramic stack 13, at least one vertical beryllium copper strip 11, and at least one vertical sapphire sphere. The first triangular pyramid frame 31 is disposed around the scanning tube 14 and is fixedly connected to the scanning tube 14. The second triangular pyramid frame 32 is fixedly connected to the scanning head base plate 6. At least one vertical piezoelectric ceramic stack is disposed between the first triangular pyramid frame 31 and the second triangular pyramid frame 32. When a sawtooth wave voltage is applied to the vertical piezoelectric ceramic stack 13, the vertical piezoelectric ceramic stack 13 drives the first triangular pyramid frame 31 to move in a third direction. At least one vertical beryllium copper strip 11 is fixedly connected to the second triangular pyramid frame 32 by screws. At least one vertical sapphire sphere is disposed between the vertical beryllium copper strip 11 and the first triangular pyramid frame 31.

[0070] Specifically, the first triangular pyramid 31 can form a first receiving cavity, and the scanning tube 14 is disposed within the first receiving cavity. The first triangular pyramid 31, the second triangular pyramid 32, and the vertical beryllium copper strip 11 can form a second receiving cavity, and the vertical piezoelectric ceramic stack 13 and the vertical sapphire sphere are disposed within the second receiving cavity. The second triangular pyramid 32 may include two sides with outer walls, and the other side is an open structure for fixing and connecting the vertical beryllium copper strip 11. Taking the first direction as the X-axis direction, the second direction as the Y-axis direction, and the third direction as the Z-axis direction as an example, applying a sawtooth wave voltage to the vertical piezoelectric ceramic stack 13 can drive the scanning tube 14 to move along the Z-axis direction (up and down direction). The sawtooth wave voltage applied to the vertical piezoelectric ceramic stack 13 can be as follows: Figure 6 As shown. The deformation of both the vertical piezoelectric ceramic stack 13 and the horizontal piezoelectric ceramic stack 7 can be as follows. Figure 7 As shown.

[0071] The reliability of the vertical piezoelectric ceramic stack 11 movement depends on a suitable preload. The preload can be controlled by adjusting the curvature of the vertical beryllium copper strip 11. During vertical movement, the vertical beryllium copper strip 11 presses against the vertical sapphire sphere. The preload of the vertical movement can be controlled by adjusting the vertical beryllium copper strip 11, thereby causing the vertical piezoelectric ceramic stack 11, together with the first triangular pyramid 31, to slide vertically against the second triangular pyramid 32.

[0072] by Figure 1 Taking the vacuum scanning probe microscope 100 shown as an example, it may include three cylindrical recesses 3, two vertical beryllium copper strips 11, and three vertical piezoelectric ceramic stacks 13. The three vertical piezoelectric ceramic stacks 13 are arranged in a circumferential array within the second receiving cavity to maximize structural stability and smooth movement. Each side of the double-layer triangular pyramid frame 30 may be provided with one vertical piezoelectric ceramic stack 13.

[0073] In this embodiment, the vertical piezoelectric ceramic stack 13 in the double-layer triangular pyramid frame 30 enables the vertical movement of the sample stage 15. Combined with the horizontal piezoelectric ceramic stack 7, the sample stage 15 can move in both horizontal and vertical directions, accurately locate specific areas of the sample, and improve detection efficiency.

[0074] In one embodiment, such as Figure 1 As shown. The vacuum scanning probe microscope 100 also includes a probe piezoelectric ceramic stack 17. The probe piezoelectric ceramic stack 17 is disposed between the probe 16 and the top plate 1 of the microscope body, and is used to excite the probe 16 to vibrate.

[0075] Specifically, the piezoelectric ceramic stack 17 can excite the probe 16 to vibrate under the action of a control signal, so as to detect the sample placed on the sample stage 15 and test the three-dimensional morphology and physicochemical properties of the micro-area on the sample surface with high resolution, such as the temperature, surface potential, magnetic force, electrostatic force, friction force, current, capacitance, etc. of the sample surface.

[0076] In this embodiment of the present disclosure, the vacuum scanning probe microscope 100 achieves the function of testing and analyzing samples by setting a probe piezoelectric ceramic stack 17 above the probe 16.

[0077] In one embodiment, such as Figure 8 As shown, the vacuum scanning probe microscope 100 also includes a suspension frame for suspending the microscope body. The suspension frame includes an outer frame structure 21 and a tension spring 22. One side of the tension spring 22 is connected to the outer frame structure 21. The other side of the tension spring 22 is provided with a lower threaded post 23. The lower threaded post 23 is used for threaded connection with the top plate 1 of the microscope body.

[0078] Specifically, the outer frame structural component 21 can be made of titanium alloy TC4. The suspension frame can include three tension springs 22. The tension springs 22 are located on the lower surface of the top of the outer frame structural component 21. During the process of suspending the mirror body within the suspension frame, the lower threaded post 23 of the tension spring 22 can be threadedly connected to the top plate 1 of the mirror body. The upper surface of the top of the outer frame structural component 21 can be provided with three wing nuts 20, each wing nut 20 corresponding to one tension spring 22. The tension spring 22 can be connected to the top of the outer frame structural component 21 via the upper threaded post 19 and the wing nut 20. The length of the upper threaded post 19 can be adjusted appropriately by rotating the wing nut 20, causing the mirror body to be lowered to a suitable height, thus suspending the mirror body within the suspension frame.

[0079] In this embodiment of the present disclosure, the mirror body is suspended in the suspension frame by a tension spring 22, which can attenuate a large amount of external interference vibration transmitted into the mirror body.

[0080] In one embodiment, such as Figure 1 As shown, the mirror body also includes a magnet assembly 10. The magnet assembly 10 is disposed on the side of the base away from the top plate 1 of the mirror body. Figure 8 As shown, the suspension frame also includes multiple oxygen-free copper grooves 24, which are disposed on the outer frame structural member 21. The multiple oxygen-free copper grooves 24 are used to form a suspended concave-convex fit with the magnet assembly 10.

[0081] Specifically, the number of magnets in the magnet assembly 10 is the same as the number of oxygen-free copper inner grooves 24. By adjusting the length of the upper threaded post 19, the mirror body is lowered to a suitable height, so that each magnet in the magnet assembly 10 can be accommodated in the corresponding oxygen-free copper inner groove 24 without direct contact with the oxygen-free copper inner groove 24.

[0082] In this embodiment, the oxygen-free copper groove 24 works in conjunction with the magnet assembly 10 to attenuate a large amount of external interference vibrations transmitted into the mirror body.

[0083] In one embodiment, such as Figure 8 As shown, the outer frame structure 21 may also be provided with a frame through hole 27, an upper BNC (Bayonet Nut Connector) interface 25, and a lower BNC interface 26. For example... Figure 1 As shown, a pluggable connector 18 can also be provided on the top plate 1 of the microscope body. The input signal of the probe 16 and the voltage signal applied to the horizontal piezoelectric ceramic stack 7, the vertical piezoelectric ceramic stack 13, and the probe piezoelectric ceramic stack 17 can all be transmitted to the pluggable connector 18 for relay through the frame through hole 27. It should be noted that the embodiment of this application does not specifically limit the signal transmission method between the pluggable connector 18 and the various components in the vacuum scanning probe microscope 100. The output signals of the vacuum scanning probe microscope 100, such as tunneling current signals and piezoelectric voltage signals, can be output through the upper BNC interface 25 and the lower BNC interface 26 of the outer frame 21.

[0084] The vacuum scanning probe microscope 100 uses pluggable interfaces for both input and output signals. Therefore, the vacuum scanning probe microscope 100 provided in this application has excellent portability and can be easily placed into or removed from the vacuum chamber for maintenance or other measurement tasks.

[0085] The vacuum scanning probe microscope provided in this application features an optimized optical path structure. Utilizing a sample stage scanning method expands the effective detection area of ​​the sample stage surface, providing an open optical path suitable for use with optical imaging systems. The vacuum scanning probe microscope mainly comprises a microscope body and a suspension frame, effectively increasing light throughput for precise sample surface detection. The sample stage scanning method employed in the microscope body enhances the stability of piezoelectric displacement motion and improves displacement resolution. The suspension frame uses a pluggable interface, eliminating the need for cumbersome signal wire soldering and offering excellent portability for easy entry and exit from the vacuum chamber. By improving the horizontal motor pre-tightening method, changing the center pre-tightening to a peripheral three-legged pre-tightening method, the interference problem of perpendicularly incident light is solved. The probe and sample stage are connected via a simple cylindrical boss, reducing obstruction of lateral light and enabling the vacuum scanning probe microscope to possess high light throughput characteristics.

[0086] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0087] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this application should be determined by the appended claims.

Claims

1. A vacuum scanning probe microscope, characterized in that, The system includes a microscope body, which comprises: a probe, a sample stage, a top plate, a base, multiple cylindrical recesses, and multiple horizontal drive devices. The sample stage is used to place the sample; The probe is disposed on the side of the top plate of the mirror body near the sample stage; The plurality of cylindrical recesses are placed between the top plate of the mirror body and the base to separate the probe and the sample stage. The light beam emitted by the optical imaging system is vertically focused on the probe and the sample stage through the top plate of the mirror body. The plurality of horizontal driving devices are disposed on the base and are arranged in a circular array to drive the sample stage to move.

2. The vacuum scanning probe microscope according to claim 1, characterized in that, The top plate of the mirror body is provided with a through hole, which is used to vertically focus the light beam emitted by the optical imaging system onto the probe and the sample stage.

3. The vacuum scanning probe microscope according to claim 1, characterized in that, Also includes: A scanning tube is positioned on the side of the sample stage away from the probe and is used to control the movement of the sample stage. A double-layer triangular pyramid frame is connected around the scanning tube. The scanning head base plate is fixedly connected to the double-layer triangular pyramid frame and the horizontal drive device, and is used to drive the double-layer triangular pyramid frame and the scanning tube to move under the drive of the horizontal drive device.

4. The vacuum scanning probe microscope according to claim 3, characterized in that, The horizontal drive device includes: A horizontal piezoelectric ceramic stack is disposed on the base and fixedly connected to the scanning head base plate. The horizontal piezoelectric ceramic stack is used to drive the scanning head base plate to move. A horizontal sapphire sphere is mounted on the bottom plate of the scanning head. A horizontal beryllium copper strip is fixedly connected to the base and pressed onto the horizontal sapphire sphere.

5. The vacuum scanning probe microscope according to claim 4, characterized in that, When a sawtooth wave voltage is applied to the piezoelectric ceramic sheet polarized in the first direction in the horizontal piezoelectric ceramic stack, the horizontal piezoelectric ceramic stack is used to drive the scanning head base plate and the scanning tube to move in the first direction.

6. The vacuum scanning probe microscope according to claim 4, characterized in that, When a sawtooth wave voltage is applied to the piezoelectric ceramic sheet polarized in the second direction in the horizontal piezoelectric ceramic stack, the horizontal piezoelectric ceramic stack is used to drive the scanning head base plate and the scanning tube to move in the second direction, which is perpendicular to the first direction.

7. The vacuum scanning probe microscope according to claim 3, characterized in that, The double-layer triangular pyramid frame includes: A first triangular pyramid frame is disposed around the scanning tube and is fixedly connected to the scanning tube; The second triangular pyramid is fixedly connected to the base plate of the scanning head; at least one vertical piezoelectric ceramic stack is disposed between the first and second triangular pyramids, and when a sawtooth wave voltage is applied to the vertical piezoelectric ceramic stack, the vertical piezoelectric ceramic stack is used to drive the first triangular pyramid to move in a third direction; At least one vertical beryllium copper bar is fixedly connected to the second triangular pyramid frame by screws; At least one vertical sapphire sphere is disposed between the vertical beryllium copper strip and the first triangular pyramid.

8. The vacuum scanning probe microscope according to claim 1, characterized in that, Also includes: A stack of piezoelectric ceramic probes is disposed between the probe and the top plate of the mirror body to excite the probe to vibrate.

9. The vacuum scanning probe microscope according to claim 1, characterized in that, It also includes a suspension frame for suspending the mirror body, the suspension frame comprising an outer frame structure and a tension spring, wherein... One side of the tension spring is connected to the outer frame structure, and the other side is provided with a lower threaded post, which is used to connect with the top plate of the mirror body by thread.

10. The vacuum scanning probe microscope according to claim 9, characterized in that, The mirror body also includes a magnet assembly disposed on the side of the base away from the top plate of the mirror body. The suspension frame also includes multiple oxygen-free copper grooves disposed on the outer frame structure. The multiple oxygen-free copper grooves are used to form a suspended concave-convex fit with the magnet assembly.

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