Protective cover and plasma generating device

Abstract

The present invention provides a protective cover for protecting a plasma shower head that seals the discharge port of the plasma shower head. The protective cover comprises: a main body detachably supported by the plasma shower head; and a contact body that deforms and contacts the discharge port to seal the discharge port. The present invention also provides a plasma generating device comprising: a plasma shower head to which the protective cover is mounted; a detection sensor that detects the pressure of gas supplied to the plasma shower head; and a notification device that, when the plasma shower head is operating with the contact body of the protective cover sealing the discharge port, notifies the user of an error based on a detection value from the detection sensor.

Description

Technical Field

[0001] The present invention relates to a protective cover for protecting a plasma shower head and a plasma generating device having the plasma shower head on which the protective cover is mounted. Background Art

[0002] The following patent documents describe a plasma shower head that ejects plasma from an ejection port.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 11-260597 Summary of the Invention

[0006] Problems to be solved by the invention

[0007] An object of the present invention is to improve the practicality of a protective cover that protects a plasma shower head that ejects plasma from an ejection port.

[0008] Technical solutions to problems

[0009] In order to solve the above-mentioned problems, the present invention provides a protective cover for protecting a plasma shower head that ejects plasma by sealing the ejection port of the plasma shower head. The protective cover comprises: a main body that is detachably supported on the plasma shower head; and a close-fitting body that is in close contact with the ejection port in a deformed state to seal the ejection port.

[0010] Effects of the Invention

[0011] According to the present invention, the close contact body is in close contact with the ejection port in a deformed state to close the ejection port, thereby protecting the plasma shower head while completely closing the ejection port, thereby improving the practicality of the protective cover. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a diagram showing a plasma device.

[0013] Figure 2 This is a block diagram showing a control box included in the plasma apparatus.

[0014] Figure 3 It is a perspective view showing a plasma shower head.

[0015] Figure 4 It is a cross-sectional view showing the plasma shower head cut along the X direction and the Z direction at the positions of the electrode and the main body side plasma passage.

[0016] Figure 5 It means along Figure 4Cross-sectional view along line AA.

[0017] Figure 6 This is a perspective view showing the plasma shower head before the protective cover is attached.

[0018] Figure 7 This is a perspective view showing the plasma shower head with the protective cover attached.

[0019] Figure 8 It is a side view showing the plasma shower head after the protective cover is installed.

[0020] Figure 9 It is a perspective view showing a dummy nozzle.

[0021] Figure 10 This is a perspective view showing the plasma shower head after the protective cover is assembled with the dummy nozzle attached. DETAILED DESCRIPTION

[0022] Hereinafter, as a specific embodiment, Figure 1 The embodiments of the present invention will be described in detail.

[0023] The plasma device 10 is a device that generates plasma under atmospheric pressure, such as Figure 1 As shown, the apparatus includes a plasma shower head 11, a robot 13, and a control box 15. The plasma shower head 11 is mounted on the robot 13. The robot 13 is, for example, a serial link type robot (also known as a multi-jointed robot). The plasma shower head 11 can irradiate plasma gas while being held at the front end of the robot 13. The plasma shower head 11 can move three-dimensionally in response to the driving of the robot 13.

[0024] The control box 15 is mainly composed of a computer and comprehensively controls the plasma device 10. The control box 15 includes a power supply unit 15A that supplies power to the plasma shower head 11 and a gas supply unit 15B that supplies gas to the plasma shower head 11. The power supply unit 15A is connected to the plasma shower head 11 via a power cable (not shown). The power supply unit 15A changes the electrode 33 (see FIG. 1 ) of the plasma shower head 11 based on the control of the control box 15. Figure 4 as well as Figure 5 ) applied voltage.

[0025] Furthermore, the gas supply unit 15B is connected to the plasma shower head 11 via a plurality (three in this embodiment) of gas conduits 19. The gas supply unit 15B supplies the plasma shower head 11 with the reaction gases and carrier gases described below, under the control of the control box 15. The control box 15 controls the gas supply unit 15B, controlling, for example, the amount of gas supplied from the gas supply unit 15B to the plasma shower head 11. Consequently, the robot 13 operates under the control of the control box 15, irradiating the workpiece W placed on the workbench 17 with plasma gas from the plasma shower head 11.

[0026] The control box 15 also includes an operating unit 15C, which includes a touch panel 15C1 and various switches 15C2. The control box 15 displays various setting screens and operating status (e.g., gas supply status) on the touch panel 15C1 of the operating unit 15C. Furthermore, the control box 15 receives various information through operational inputs to the touch panel 15C1 and the various switches 15C2.

[0027] Furthermore, if Figure 2 As shown, the control box 15 includes, in addition to the power supply unit 15A, gas supply unit 15B, and operating unit 15C, a controller 20, a control circuit 22, a pressure sensor 26, a storage device 28, and the like. The controller 20 is primarily composed of a computer including a CPU, ROM, RAM, and the like (not shown). The controller 20 reads a control program stored in the storage device 28 and executes it on the CPU to control the power supply unit 15A, gas supply unit 15B, and the like, thereby controlling the operation of the plasma shower head 11.

[0028] In addition, the controller 20 is connected to the operating unit 15C via the control circuit 22. The controller 20 changes the display of the touch panel 15C1 of the operating unit 15C through the control circuit 22. As a result, an arbitrary image is displayed on the touch panel 15C1. In addition, the controller 20 receives operation input to the operating unit 15C through the control circuit 22. The controller 20 inputs signals generated by operating the touch panel 15C1 and various switches 15C2 of the operating unit 15C from the operating unit 15C to determine the content of the operation input. In addition, the pressure sensor 26 detects the pressure of the gas supplied from the gas supply unit 15B to the plasma nozzle 11. The pressure sensor 26 is connected to the controller 20 and outputs the detected value, that is, the pressure of the gas supplied to the plasma nozzle 11, to the controller 20. As a result, the controller 20 monitors the pressure of the gas supplied to the plasma nozzle 11.

[0029] In addition, the plasma shower head 11 is as Figure 3 As shown, the plasma generating unit 30 and the like are provided. The plasma generating unit 30 supplies gas from the gas supply unit 15B (see FIG. 15 ) of the control box 15. Figure 1) is plasmatized to generate plasma gas. Then, the plasma nozzle 11 is directed to Figure 1 The plasma gas generated in the plasma generating unit 30 is ejected from the workpiece W shown. Figure 3 The processing gas is supplied to the plasma shower head 11 from the upstream side to the downstream side in the direction of the arrow shown.

[0030] like Figure 4 as well as Figure 5 As shown, the plasma generating unit 30 includes a housing 31, a pair of electrodes 33, a plasma irradiation unit 35, and the like. Figure 4 This is a cross-sectional view taken along the positions of a pair of electrodes 33 and a plurality of main body side plasma passages 71 to be described later. Figure 5 It is along Figure 4 The housing 31 is constructed by a first base 36 made of a resin having high heat resistance, a second base 37 made of a resin having high heat resistance, and a ceramic member 38 made of a ceramic having high heat resistance. Figure 3 As shown, the first base 36, the second base 37 and the ceramic member 38 are fastened together by four bolts (only two are shown in the figure) 40. In addition, a metal plate 46 is fastened to the back of the first base 36 constituting the housing 31 by bolts (omitted from the figure), and the plasma shower head 11 is mounted on the robot (see Figure 1 )13.

[0031] In addition, the housing 31 formed by integrating the first base 36, the second base 37 and the ceramic member 38 is formed. Figure 4 As shown, a reaction chamber 51 for generating plasma gas is formed inside the ceramic member 38. Furthermore, the pair of electrodes 33 are each, for example, cylindrical in shape, and are fixed so that their front ends protrude from the reaction chamber 51. In the following description, the pair of electrodes 33 may sometimes be simply referred to as electrodes 33. Furthermore, the direction in which the pair of electrodes 33 are arranged is referred to as the X direction, the direction perpendicular to and horizontal to the X direction is referred to as the Y direction, and the axial direction of the cylindrical electrode 33 is referred to as the Z direction. Furthermore, in this embodiment, the X direction, the Y direction, and the Z direction are directions perpendicular to each other.

[0032] A portion of the outer periphery of the electrode 33 is covered by an electrode cover 57 made of an insulator such as ceramic. The electrode cover 57 is generally hollow and cylindrical, with openings formed at both ends in the longitudinal direction. The gap between the inner circumferential surface of the electrode cover 57 and the outer circumferential surface of the electrode 33 functions as a gas passage 58. The downstream opening of the electrode cover 57 is connected to the reaction chamber 51. The lower end of the electrode 33 protrudes from the downstream opening of the electrode cover 57.

[0033] Furthermore, a reaction gas flow path 61 and a pair of carrier gas flow paths 63 are formed inside the first base 36 of the housing 31. The reaction gas flow path 61 is connected to the gas conduit 19 (see FIG. Figure 1 ) is connected to the gas supply unit 15B so that the reaction gas supplied from the gas supply unit 15B flows into the reaction chamber 51. In addition, a pair of carrier gas flow paths 63 are arranged in the X direction at positions sandwiching the reaction gas flow path 61. The pair of carrier gas flow paths 63 are respectively connected to the gas guide pipe 19 (see Figure 1 ) is connected to the gas supply unit 15B and supplies a carrier gas from the gas supply unit 15B. The carrier gas flow path 63 allows the carrier gas to flow into the reaction chamber 51 through the gas passage 58.

[0034] Oxygen (O2) can be used as the reaction gas (source gas). Gas supply unit 15B flows a mixed gas of oxygen and nitrogen (N2) (e.g., dry air) through reaction gas flow path 61 into the space between electrodes 33 of reaction chamber 51. Hereinafter, for convenience, this mixed gas will sometimes be referred to as the reaction gas, and oxygen will be referred to as the source gas. Nitrogen can be used as the carrier gas. Gas supply unit 15B flows the carrier gas from each of gas passages 58 so as to surround the pair of electrodes 33.

[0035] An AC voltage is applied from the power supply unit 15A of the control box 15 to the pair of electrodes 33. By applying the voltage, for example, Figure 4 As shown, a pseudo arc A is generated between the lower ends of a pair of electrodes 33 within reaction chamber 51. The reactive gas is plasmatized as it passes through the pseudo arc A. Therefore, the pair of electrodes 33 generate discharge in the pseudo arc A to plasmatize the reactive gas, thereby generating plasma gas.

[0036] Furthermore, a plurality (six in this embodiment) of main body side plasma passages 71 are formed in the housing 31 downstream of the reaction chamber 51, spaced apart in the X direction and extending in the Z direction. The upstream ends of the plurality of main body side plasma passages 71 are connected to the reaction chamber 51.

[0037] The plasma irradiation unit 35 includes a nozzle 73 and other components. The nozzle 73 is roughly T-shaped when viewed from the side in the X direction, and comprises a nozzle body 77 and a nozzle tip 79. The nozzle 73 is an integral component formed of the nozzle body 77 and the nozzle tip 79, and is formed from highly heat-resistant ceramic. The nozzle body 77 is generally flange-shaped and secured to the lower surface of the housing 31 by bolts 80. This allows the nozzle 73 to be attached to and detached from the housing 31, allowing nozzles of any shape to be mounted on the housing 31. Furthermore, the nozzle tip 79 is shaped to extend downward from the lower surface of the nozzle body 77. Furthermore, the nozzle 73 is formed with multiple (six in this embodiment) nozzle-side plasma passages 81 extending vertically, i.e., in the Z direction, through the nozzle body 77 and the nozzle tip 79. These multiple nozzle-side plasma passages 81 are spaced apart in the X direction. Furthermore, the multiple nozzle-side plasma passages 81 are formed at the same positions in the Z direction as the multiple main-side plasma passages 71. Therefore, the main-side plasma passage 71 and the nozzle-side plasma passage 81 are connected.

[0038] Based on this structure, the plasma gas generated in the reaction chamber 51, along with the carrier gas, is ejected from the opening 81A at the lower end of the nozzle-side plasma passage 81 via the main body-side plasma passage 71 and the nozzle-side plasma passage 81. In this manner, in the plasma shower head 11, discharge occurs in the reaction chamber 51, generating plasma, and the plasma gas is ejected from the front end of the nozzle 73, thereby performing plasma treatment on the workpiece W. At this time, the discharge in the reaction chamber 51 may carbonize the inner wall surface of the housing 31 that partitions the reaction chamber 51, the electrode 33, and the like, thereby generating foreign matter. When foreign matter is generated in the reaction chamber 51, it may clog the main body-side plasma passage 71, the nozzle-side plasma passage 81, and the like, resulting in a risk of reduced plasma irradiation and a risk of plasma failure from the nozzle 73.

[0039] Therefore, the plasma apparatus 10 is equipped with a pressure sensor 26. Specifically, if foreign matter clogs the main plasma passage 71, the nozzle plasma passage 81, or the like, the internal pressure of the reaction chamber 51 increases. This also causes the internal pressure of the gas supply unit 15B, which supplies gas to the plasma shower head 11, to increase. As described above, the gas supply unit 15B is equipped with a pressure sensor 26. The pressure sensor 26 detects the pressure of the gas supplied from the gas supply unit 15B to the plasma shower head 11. Therefore, if the pressure detected by the pressure sensor 26 exceeds a predetermined pressure, the controller 20 displays a warning screen on the touch panel 15C1. This allows the operator to recognize any abnormality and perform an inspection of the plasma apparatus 10, thereby ensuring that the plasma apparatus 10 performs proper plasma processing.

[0040] Furthermore, due to the discharge in the reaction chamber 51, the reaction chamber 51 is exposed to high temperatures. Therefore, the ceramic member 38 of the housing 31 forming the reaction chamber 51 is made of a highly heat-resistant ceramic. However, while ceramic is a highly heat-resistant material, it is also brittle and easily broken. Therefore, there is a risk of the ceramic member 38 of the plasma shower head 11 coming into contact with something and being damaged during shipment or when the plasma shower head 11 is installed in the robot 13. For this reason, manufacturers of the plasma shower head 11 ship the plasma shower head 11 with the protective cover attached.

[0041] Specifically, when the plasma shower head 11 leaves the factory, Figure 6 As shown in FIG. 1 , the nozzle 73 is removed from the plasma shower head 11. Figure 3 The plasma shower head 11 shown in FIG. 1 is assembled with the bolts 80 removed and the nozzle 73 of the plasma irradiation portion 35 removed from the housing 31 of the plasma shower head 11. The nozzle 73 is packaged separately from the plasma shower head 11. Figure 6 As shown, the lower end of the main body side plasma passage 71 and the threaded hole 90 for fastening the bolt 80 are exposed on the lower surface of the housing 31. Then, the protective cover 100 is installed on the plasma shower head 11 to cover the lower end of the main body side plasma passage 71 and the lower surface of the housing 31 where the threaded hole 90 is exposed.

[0042] Specifically, the protective cover 100 comprises a cover body 102 detachably supported by the plasma shower head 11, and a sponge material 104 that seals the main body plasma passage 71 by being in close contact with the lower end of the main body plasma passage 71. The cover body 102 is formed by bending a steel plate into a generally U-shaped shape and comprises a pair of opposing surfaces 106 and 108, and a connecting surface 110 connecting the lower edges of the pair of opposing surfaces 106 and 108. The connecting surface 110 of the protective cover 100 is slightly larger than the lower surface of the housing 31, i.e., the lower surface of the ceramic member 38. The opposing surface 106 is approximately the same size as the second base 37 of the housing 31 and the front sidewall of the ceramic member 38. Furthermore, while the width of the opposing surface 108 is approximately the same as the width of the opposing surface 106, the height of the opposing surface 108 is greater than the height of the opposing surface 106. Two through holes 112 are formed in the left-right direction on the upper end of the facing surface 108. A substantially plate-shaped sponge material 104 is fixedly connected to the upper surface of the connecting surface 110. The sponge material 104 is formed of closed-cell polyurethane.

[0043] The protective cover 100 thus constructed is as follows Figure 7 as well as Figure 8 As shown, a ceramic component 38 is installed on the plasma nozzle 11 to cover the plasma nozzle 11. Specifically, the protective cover 100 is arranged in a state where the connecting surface 110 is opposite to the lower surface of the ceramic component 38, the opposing surface 106 is opposite to the side wall surface on the front side of the shell 31, and the opposing surface 108 is opposite to the side wall surface on the rear side of the shell 31. By arranging the protective cover 100 in this state, the sponge material 104 fixedly connected to the connecting surface 110 is in a state of elastic deformation and is tightly attached to all of the multiple main-side plasma passages 71 opened on the lower surface of the ceramic component 38. In addition, the upper end of the opposing surface 108 of the protective cover 100 arranged in this state is opposite to the lower end of the metal plate 46 fixed to the rear side surface of the first base 36 of the shell 31, and two threaded holes are formed at the lower end of the metal plate 46 at a position opposite to the two through holes 112 (at Figure 8 In addition, two bolts 118 are inserted into the two through holes 112 of the opposing surface 108 and fastened to the two threaded holes 116. Thus, the protective cover 100 is mounted on the plasma shower head 11 in a state where the lower surface of the ceramic component 38 is entirely covered by the connecting surface 110 and the side walls of the front and rear sides of the ceramic component 38 are entirely covered by the opposing surfaces 106 and 108. Thus, the protective cover 100 is used to cover the lower surface, the side walls of the front side, and the side walls of the rear side of the ceramic component 38, thereby preventing damage to the ceramic component 38.

[0044] In addition, the protective cover 100 can be assembled Figure 9 The dummy nozzle 120 is shown. The dummy nozzle 120 is substantially the same shape and size as the nozzle 73. However, as mentioned above, the nozzle 73 is made of ceramic, while the dummy nozzle 120 is made of resin. In addition, two threaded holes are formed on the lower surface of the connecting surface 110 of the protective cover 100 (see FIG. Figure 7 )122, such as Figure 10 As shown, the dummy nozzle 1206 is fastened to the lower surface of the cover body 102 of the protective cover 100 and fixed by fastening two bolts 126 to the two threaded holes 122 .

[0045] In this way, by installing the dummy nozzle 120 on the lower surface of the cover body 102 of the protective cover 100, the plasma shower head 11 can be taught while preventing the nozzle 73 from being damaged. Specifically, in the plasma shower head 11, plasma is ejected from the nozzle 73 when the plasma is actually irradiated on the workpiece W. Therefore, it is preferable to teach the plasma shower head 11 with the nozzle 73 mounted on the plasma shower head 11. However, when teaching the plasma shower head 11, the nozzle 73 mounted on the front end of the plasma shower head 11 may come into contact with the workpiece W, the workbench 17, etc. Moreover, the nozzle 73 is made of ceramics as mentioned above and is easily damaged. Therefore, if the plasma shower head 11 is taught with the nozzle 73 mounted on the plasma shower head 11, there is a risk of damage to the nozzle 73.

[0046] To address this issue, a dummy nozzle 120 made of resin can be mounted on the protective cover 100. Specifically, the dummy nozzle 120 can be mounted on the connecting surface 110 of the protective cover 100 while the protective cover 100 is mounted on the plasma shower head 11. By mounting a dummy nozzle 120 having substantially the same shape and size as the nozzle 73 on the lower surface of the protective cover 100, which covers the lower surface of the plasma shower head 11, during teaching, the same teaching performance as when the nozzle 73 is mounted on the plasma shower head 11 can be achieved. Furthermore, since the dummy nozzle 120 is made of resin, it is unlikely to be damaged even if it comes into contact with a workpiece W or the like during teaching. Thus, by mounting the dummy nozzle 120 on the lower surface of the cover body 102 of the protective cover 100, high-quality teaching of the plasma shower head 11 can be performed while preventing damage to the nozzle 73.

[0047] In addition, when the plasma shower head 11 actually performs plasma processing, the operator must, of course, remove the protective cover 100 from the plasma shower head 11 and install the nozzle 73 on the plasma shower head 11. Figure 3 As shown in FIG. 1 , the nozzle 73 must be installed on the lower surface of the ceramic member 38 after the protective cover 100 is removed. However, if the protective cover 100 and the dummy nozzle 120 are assembled on the plasma shower head 11, the nozzle 73 is relatively Figure 3 and Figure 10 As can be seen, the plasma shower head 11 with the nozzle 73 attached is similar in appearance to the plasma shower head 11 with the protective cover 100 and the dummy nozzle 120 attached. Due to this situation, an operator may forget to remove the protective cover 100 from the plasma shower head 11 before performing plasma processing. In such cases, plasma processing is performed by the plasma shower head 11 with the protective cover 100 attached. However, the plasma will not be irradiated onto the workpiece W, and therefore, proper plasma processing cannot be ensured.

[0048] In view of this, the protective cover 100 is provided with a sponge material 104. Specifically, if the protective cover 100 is mounted on the plasma shower head 11, as described above, the sponge material 104 is in a state of elastic deformation and is in close contact with all of the plurality of main body side plasma passages 71 opening on the lower surface of the ceramic member 38. As a result, all of the openings of the plurality of main body side plasma passages 71 are sealed by the sponge material 104. In addition, the sponge material 104 is formed of polyurethane with independent bubbles, so it has a high sealing effect and does not allow gas to pass through. Therefore, if the plasma shower head 11 performs plasma processing in a state where the protective cover 100 is removed, the plasma generated in the reaction chamber 51 will not be discharged from the main body side plasma passage 71, so the internal pressure of the reaction chamber 51 increases. At this time, the internal pressure of the gas supply unit 15B that supplies gas to the plasma shower head 11 also increases, and based on the fact that the pressure detected by the pressure sensor 26 exceeds a given pressure, a warning screen is displayed on the touch panel 15C1. Thus, the operator recognizes the abnormality and inspects the plasma apparatus 10, thereby notifying the operator that the protective cover 100 has been forgotten to be removed from the plasma shower head 11. Attaching the sponge material 104 to the protective cover 100 in this manner allows the operator to be notified that the protective cover 100 has been forgotten to be removed.

[0049] As described above, the pressure sensor 26 is used to monitor the pressure increase in the reaction chamber 51 caused by clogging with foreign matter, etc., and the structure for displaying a warning screen on the touch panel 15C1 when the pressure detected by the pressure sensor 26 exceeds a predetermined pressure has been conventionally installed in the plasma apparatus 10. Therefore, by simply attaching the sponge material 104 to the protective cover 100, the conventional structure for displaying the warning screen can be used to alert the operator to the situation where the protective cover 100 has been forgotten to be removed.

[0050] Here, the plasma device 10 is an example of a plasma generating device. The plasma nozzle 11 is an example of a plasma nozzle. The touch panel 15C1 is an example of a notification device. The pressure sensor 26 is an example of a detection sensor. The opening of the main body side plasma passage 71 toward the lower surface of the ceramic member 38 is an example of a nozzle. The nozzle 73 is an example of a spray nozzle. The protective cover 100 is an example of a protective cover. The cover body 102 is an example of a main body. The sponge material 104 is an example of a close-fitting body. The opposing surfaces 106 and 108 are examples of opposing surfaces. The connecting surface 110 is an example of a connecting surface. The dummy nozzle 120 is an example of a dummy nozzle. The threaded hole 122 is an example of an assembly portion.

[0051] The above configuration provides the following effects in the present embodiment.

[0052] The protective cover 100, which protects the ceramic member 38 while sealing the opening of the main body-side plasma passage 71 of the plasma shower head 11, is constructed to include a cover body 102 detachably supported on the plasma shower head 11, and a sponge material 104 that deforms at the opening of the main body-side plasma passage 71 to seal the opening. This allows the protective cover 100 to be easily assembled to the plasma shower head 11 and to seal the opening of the main body-side plasma passage 71 without a gap.

[0053] Furthermore, the cover body 102 of the protective cover 100 is formed in a U-shape. Thus, the ceramic member 38 can be appropriately protected by the cover body 102 having a simple and inexpensive structure.

[0054] The U-shaped cover body 102 includes a pair of opposing surfaces 106 and 108 and a connecting surface 110 connecting the edges of the pair of opposing surfaces 106 and 108. The sponge material 104 is provided on the connecting surface 110. This clarifies the structure of the protective cover 100.

[0055] Furthermore, the protective cover 100 is attached to the plasma shower head 11 in a state where the pair of opposing surfaces 106 and 108 face the front and rear sidewall surfaces of the plasma shower head 11, and the connecting surface 110 faces the lower surface of the ceramic member 38 of the plasma shower head 11. Thus, the protective cover 100 can appropriately protect the ceramic member 38, and the sponge material 104 can appropriately seal the opening of the main body-side plasma passage 71.

[0056] Furthermore, the dummy nozzle 120 is detachably mounted on the screw hole 122 of the protective cover 100. This prevents the nozzle 73 from being damaged when the plasma shower head 11 is taught.

[0057] Furthermore, in the plasma apparatus 10, when the protective cover 100 is attached to the plasma shower head 11, that is, when the plasma shower head 11 is operating with the opening of the main body-side plasma passage 71 sealed by the sponge material 104, the pressure detected by the pressure sensor 26 exceeds a predetermined pressure, and a warning screen is displayed on the touch panel 15C1. This allows the operator to be alerted to the fact that the protective cover 100 has been forgotten to be removed.

[0058] Furthermore, the present invention is not limited to the above-described embodiments and can be implemented in various forms after various modifications and improvements based on the knowledge of those skilled in the art. Specifically, for example, while the sponge material 104 of the protective cover 100 is formed from closed-cell polyurethane foam, it can also be formed from various resins such as closed-cell polyethylene. Furthermore, the sponge material is not limited to closed-cell resins; it can also be formed from open-cell resins. However, if the sponge material is formed from an open-cell resin, even if the sponge material is used to seal the opening of the main body-side plasma passage 71, there is a possibility that plasma will leak through the open cells. Therefore, when the sponge material is formed from an open-cell resin, for example, it is preferable to melt the surface of the sponge material so that the open cells are not exposed on the surface of the sponge material. Furthermore, the sponge material is not limited to resin; an elastomer such as rubber or gel can also be used to seal the opening of the main body-side plasma passage 71. Furthermore, the sponge material is not limited to elastically deformable components; components that seal the opening of the main body-side plasma passage 71 in a plastically deformed state can also be used.

[0059] Furthermore, while the above embodiment employs a U-shaped cover body 102, any shape, such as a box shape, can be employed as long as it can protect the ceramic member 38. Furthermore, while the above embodiment employs a protective cover 100 that covers the ceramic member 38 when the nozzle 73 is removed, a protective cover that covers the ceramic member 38 when the nozzle 73 is attached can also be employed. Furthermore, while the above embodiment employs a protective cover 100 that protects the ceramic member 38, a protective cover that includes other components can also be employed.

[0060] In addition, although in the above embodiment, when the pressure detected by the pressure sensor 26 exceeds a predetermined pressure, a warning screen is displayed on the touch panel 15C1 to notify the operator of the occurrence of an abnormality, the occurrence of an abnormality may be notified to the operator by various means such as sound and light.

[0061] Label Description

[0062] 10: Plasma device (plasma generating device)

[0063] 11: Plasma nozzle

[0064] 15C1: Touch panel (notification device)

[0065] 26: Pressure sensor (detection sensor)

[0066] 71: plasma passage on the main body side (ejection port)

[0067] 73: Nozzle (spray nozzle)

[0068] 100: Protective cover

[0069] 102: Cover body (main body)

[0070] 104: Sponge material (close fitting)

[0071] 106: Opposite surface

[0072] 108: Opposite surface

[0073] 110: Connecting surface

[0074] 120: Virtual nozzle

[0075] 122: Threaded hole (assembly part).

Claims

1. A protective cover for protecting a plasma head that ejects plasma in a state where an ejection opening of the plasma head is closed, the protective cover comprising: A main body that is detachably supported on the plasma head; and A contact body that contacts and closes the ejection opening in a deformed state.

2. The protective cover according to claim 1, wherein The protective cover has a U-shaped main body.

3. The protective cover according to claim 2, wherein The U-shaped main body is configured to have a pair of opposing surfaces and a connecting surface that connects the edges of the pair of opposing surfaces, The contact body is disposed on the connecting surface.

4. The protective cover according to claim 3, wherein The protective cover is installed on the plasma head in a state where the pair of opposing surfaces face a pair of side walls of the plasma head and the connecting surface faces a lower surface of the plasma head where the ejection opening is formed.

5. The protective cover according to any one of claims 1 to 4, wherein The protective cover has an assembly portion for detachably assembling a dummy nozzle of an ejection nozzle.

6. A plasma generating device, comprising: The plasma head for installing the protective cover according to any one of claims 1 to 5; A detection sensor that detects the pressure of the gas supplied to the plasma head; and A notification device that notifies an error based on the detection value of the detection sensor when the plasma head operates in a state where the contact body of the protective cover closes the ejection opening.

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