A method for manufacturing a quartz tube

Abstract

The application discloses a preparation method of a quartz tube, and the quartz tube comprises transparent quartz glass and opaque quartz glass, and the transparent quartz glass and the opaque quartz glass are connected through sintering, and the steps are as follows: S1, cutting and chamfering the connecting end of the transparent quartz glass and grinding it to be flat; S2, soaking the transparent quartz glass in a 15% hydrofluoric acid solution for cleaning and drying; S3, grinding the connecting end of the opaque quartz glass, scrubbing it with an alcohol solution and drying; S4, pre-burning the connecting end of the opaque quartz glass by using a flame spray gun, naturally shrinking the connecting end, grinding the connecting end to be 8mm-10mm in depth, and grinding it to be flat; S5, sintering and connecting the connecting end of the transparent quartz glass and the connecting end of the opaque quartz glass by using a flame spray gun, and using transparent quartz filaments to complete the chamfering of the connecting end of the transparent quartz glass; and S6, grinding the sintering joint between the transparent quartz glass and the opaque quartz glass to be flat. The application provides a method for reducing the explosion probability when sintering and connecting the transparent quartz glass and the opaque quartz glass, reducing the production rejection rate and improving the economic benefits.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of quartz instrument manufacturing, in particular to a preparation method of a quartz tube. BACKGROUND

[0002] Quartz instruments have high purity, no pollution, high temperature resistance and other excellent characteristics, and are widely used in the fields of semiconductors, photovoltaics and the like as production equipment for processing and manufacturing products in the above-mentioned fields. Quartz glass generally includes transparent quartz glass and opaque quartz glass, and the transparent quartz glass has high temperature resistance, low expansion coefficient and good chemical stability, and the opaque quartz glass has good heat insulation property. According to process requirements, a device assembly often contains both transparent quartz and opaque quartz, such as a quartz long tube. During the sintering process, when the transparent quartz and the opaque quartz are connected, the opaque quartz is prone to cracking due to the difference in physical properties between the two, the large internal pores and the low density of the opaque quartz, resulting in loss.

[0003] In the existing processing production process, the sintering process between the transparent quartz and the opaque quartz still relies on the experience of processing masters, and the rejection rate is reduced by patiently and slowly sintering. Such production efficiency is low and unstable. SUMMARY

[0004] To solve the problem of cracking and rejection of the opaque quartz during sintering between the transparent quartz and the opaque quartz in the quartz instrument processing process, the present application provides a preparation method of a quartz tube.

[0005] The present application provides the following technical solutions:

[0006] A preparation method of a quartz tube, the quartz tube comprising transparent quartz glass and opaque quartz glass, the transparent quartz glass and the opaque quartz glass being connected by sintering, and the steps comprising:

[0007] S1: cutting and chamfering the end part of the transparent quartz glass, and grinding it flat;

[0008] S2: cleaning the transparent quartz glass by immersing it in a 15% hydrofluoric acid solution, and drying it;

[0009] S3: grinding the end part of the opaque quartz glass flat, wiping it with an alcohol solution, and drying it;

[0010] S4: pre-sintering the end part of the opaque quartz glass using a flame spray gun to make it naturally shrink, and grinding the end part to a depth of 8mm-10mm;

[0011] S5: sintering and connecting the end part of the transparent quartz glass and the end part of the opaque quartz glass by using a flame spray gun, and using transparent quartz filaments to complete the chamfering of the end part of the transparent quartz glass;

[0012] S6: grinding the sintering joint between transparent quartz glass and opaque quartz glass.

[0013] Opaque quartz is produced by twice high-temperature melting treatment of quartz sand, and has large internal voids. When transparent quartz glass and opaque quartz glass are heated simultaneously by a flame spray gun, the heat resistance of the transparent quartz glass and the opaque quartz glass is different, and the opaque quartz glass has small density and large voids, and the air in the internal pores is more likely to expand, resulting in explosion.

[0014] Secondly, the opaque quartz glass cannot be soaked in an acid solution during cleaning, and the acid solution with corrosion effect is more likely to enter the voids of the transparent quartz glass, and vaporization under high temperature heating will also cause explosion.

[0015] In terms of material cost, the unit price of opaque quartz glass is higher than that of transparent quartz glass, and reducing the cracking and explosion probability helps to save cost.

[0016] Therefore, in the preparation method of the present application, the opaque quartz glass is cleaned by using an alcohol solution for scrubbing. Before sintering, the connecting end of the opaque quartz glass is pre-sintered by using a flame spray gun to make it naturally shrink by 8-10 mm. 8-10 mm is the empirical data from multiple experiments. After shrinkage, the void ratio of the connecting end of the opaque quartz glass is greatly reduced, and the explosion probability is reduced.

[0017] As a preferred, the sintering connection between transparent quartz glasses is as follows:

[0018] T1: optionally cutting and chamfering the connecting end of a transparent quartz glass, and grinding it;

[0019] T2: soaking the transparent quartz glass in a 15% hydrofluoric acid solution for cleaning, and drying;

[0020] T3: sintering the connecting end of the transparent quartz glass by using a flame spray gun, and using transparent quartz filaments to complete the chamfering of the connecting end of the transparent quartz glass;

[0021] T4: grinding the sintering joint between transparent quartz glasses.

[0022] As a preferred, when sintering between transparent quartz glass and opaque quartz glass, or when sintering between transparent quartz glasses, bubbles are eliminated; the method for eliminating bubbles is as follows: for bubbles found before annealing, the bubbles are broken by pulling transparent quartz filaments; for bubbles found after annealing, the bubbles are broken by grinding, and then transparent quartz filaments are added for sintering.

[0023] During sintering, the existence of bubbles in the sintering seam is a relatively serious problem. The quartz will not deform for a long time at a high temperature of 1150 DEG C. If there is a cold bubble in the quartz material at such a high temperature, explosion is prone to occur. When two quartz materials are sintered, a cavity bubble is inevitably generated and needs to be treated. The hot bubble before annealing is softened at the sintering position and can be squeezed to break the bubble by pulling the transparent quartz wire. The cold bubble after cooling cannot be squeezed by heating and will explode, so the bubble needs to be ground and then filled.

[0024] A quartz tube is prepared by using the preparation method.

[0025] A quartz tube comprises a main long tube, a ball mill tube and a ring-shaped edge, the ball mill tube comprises transparent small tubes, milky white small tubes, transparent small tubes, milky white ball mills which are sintered in sequence, the milky white ball mill and the milky white small tube are made of opaque quartz glass, the main long tube is sintered with the ball mill tube after the end of the main long tube is reduced in diameter, and the ring-shaped edge is sintered outside the reduced beginning end of the main long tube, and the sintering adopts the preparation method.

[0026] Preferably, when the ring-shaped edge and the reduced beginning end of the main long tube are sintered, the end of the ring-shaped edge is cut and chamfered, the difference between the diameter of the main long tube after the diameter is reduced is compensated by the thickness of the ring-shaped edge, and the outer side wall of the main long tube and the outer side wall of the ring-shaped edge are kept at the same level.

[0027] Preferably, the main long tube is obtained by machining a quartz long tube to a specified size on a lathe, and the milky white ball mill and the milky white small tube are milled integrally on a machining center.

[0028] Preferably, the blow pipe process is that the main long tube is clamped horizontally on a rotating worktable, a flame spray gun is used to heat and soften in the rotating process, and a working tool is used to press the rotating main long tube from the outside to reduce the diameter, and the working tool is used to press the rotating main long tube from the inside to increase the diameter, and the rotating process is simultaneously polished.

[0029] Preferably, the ball mill tube is sintered at the center of the main long tube, and a second ball mill tube is further arranged at the end of the main long tube, and the second ball mill tube comprises second transparent small tubes, second milky white small tubes, second transparent small tubes and transparent ball mills which are sintered in sequence.

[0030] Preferably, the transparent ball mill is obtained by adding materials to one end of a transparent quartz glass tube, piling up a ball type by a blow pipe, machining corresponding sizes on a lathe, and finally processing by a ball mill with a cast iron tool and fine sand and fine powder.

[0031] The beneficial effects of the present application are:

[0032] (1) A method for reducing the explosion probability when sintering and connecting transparent quartz glass and opaque quartz glass is provided, the production scrap rate is reduced, and the economic benefit is improved.

[0033] (2) Provide a method for eliminating bubbles during sintering connection between quartz glasses, improving product quality and reducing defect production.

[0034] (3) Provide a preparation method of quartz tube products, including cutting, reducing, sintering and other process methods, which is convenient for processing and manufacturing quartz equipment in the fields of semiconductors and photovoltaics. BRIEF DESCRIPTION OF DRAWINGS

[0035] Figure 1 is a structural schematic diagram of the quartz tube of the present application;

[0036] In the figure: main long tube 1, annular edge (2), ball mill tube (3), transparent small tube (31), milky white small tube (32), milky white ball mill (33), second ball mill tube (4), second transparent small tube (41), second milky white small tube (42), transparent ball mill (43). DETAILED DESCRIPTION

[0037] The preferred embodiments of the present application are described below in conjunction with the accompanying drawings, and it should be understood that the preferred embodiments described herein are only used to illustrate and explain the present application, and are not used to limit the present application.

[0038] Embodiment:

[0039] Preparation of materials: transparent quartz long tubes of different diameters.

[0040] S300 (outer diameter 30mm, same below) transparent quartz long tube cutting, one end is reduced to S75 by blowing tube process, which is the main long tube 1, and an S300 annular edge 2 is cut out.

[0041] Ball mill tube preparation, two sections of transparent small tubes 31 are cut from S75 transparent quartz long tube, S75 milky white small tubes 32 are processed by center milling, and S102 / 75 milky white ball mills 33 are processed. Sintering in turn of transparent small tubes 31, milky white small tubes 32, transparent small tubes 31, and milky white ball mills 33 constitutes a ball mill tube. Sintering of the main long tube 1 after diameter reduction and the ball mill tube.

[0042] Second ball mill tube preparation, S28 transparent quartz long tube cutting two sections of second transparent small tubes 41, S28 second milky white small tubes 42 are processed by center milling, and transparent ball mills 43 are processed by adding material at one end of S28 transparent quartz glass tube, then processing on lathe to the corresponding size, and finally processing on ball mill with cast iron grinding tool and fine sand and fine powder. Sintering in turn of second transparent small tubes 41, second milky white small tubes 42, second transparent small tubes 41, and transparent ball mills 43 constitutes a second ball mill tube. Sintering of the main long tube 1 after hole opening on the end side and the second ball mill tube.

[0043] S300 ring-shaped edge 2 is sintered on the outside of main body long tube 1, and the ring-shaped edge is sintered on the outside of the reduced beginning end of the main body long tube. When the ring-shaped edge and the outside of the reduced beginning end of the main body long tube are sintered, the end of the ring-shaped edge is cut and chamfered, the difference between the thickness of the ring-shaped edge and the diameter of the main body long tube after the diameter is reduced is compensated, and the outside wall of the main body long tube and the outside wall of the ring-shaped edge are kept at the same level. After sintering, the surface is polished.

[0044] In the above sintering, the sintering steps between the transparent quartz glass and the opaque quartz glass are as follows:

[0045] S1: the end of the transparent quartz glass is cut and chamfered, and polished;

[0046] S2: the transparent quartz glass is soaked in a 15% hydrofluoric acid solution for cleaning, and dried;

[0047] S3: the end of the opaque quartz glass is polished, cleaned with an alcohol solution, and dried;

[0048] S4: the end of the opaque quartz glass is pre-sintered using a flame spray gun to make it naturally shrink, and the end is retracted by 8-10 mm, and polished;

[0049] S5: the ends of the transparent quartz glass and the opaque quartz glass are sintered by a flame spray gun, and transparent quartz filaments are used to complete the chamfering of the ends of the transparent quartz glass;

[0050] S6: the sintering seam between the transparent quartz glass and the opaque quartz glass is polished.

[0051] The sintering is applied between the transparent small tube 31 and the milky white small tube 32, between the transparent small tube 31 and the milky white ball mill 33, and between the second transparent small tube 41 and the second milky white small tube 42.

[0052] In the above sintering, the sintering steps between the transparent quartz glass and the transparent quartz glass are as follows:

[0053] T1: the end of one transparent quartz glass is cut and chamfered, and polished;

[0054] T2: the transparent quartz glass is soaked in a 15% hydrofluoric acid solution for cleaning, and dried;

[0055] T3: the end of the transparent quartz glass is sintered by a flame spray gun, and transparent quartz filaments are used to complete the chamfering of the end of the transparent quartz glass;

[0056] T4: the sintering seam between the transparent quartz glasses is polished.

[0057] The sintering is applied between the main body long tube 1 and the ball mill tube 3, between the main body long tube 1 and the ring-shaped edge 2, and between the second transparent rubber tube 41 and the transparent ball mill 43.

[0058] During all sintering processes, when sintering transparent quartz glass with opaque quartz glass, or when sintering transparent quartz glass with transparent quartz glass, it is preferred to eliminate bubbles. The method for eliminating bubbles is as follows: if bubbles are found before annealing, they are squeezed out by pulling transparent quartz wire; if bubbles are found after annealing, they are broken by grinding, and then transparent quartz wire is added to complete the sintering.

[0059] The blowing process is as follows: the main long tube is clamped horizontally on a rotating workbench; during the rotation process, a flame spray gun is used to heat and soften it; a working knife is used to press the rotating main long tube from the outside to reduce the diameter; a working knife is used to press the rotating main long tube from the inside to increase the diameter; and grinding is performed simultaneously during the rotation process.

[0060] The above method produces a quartz tube comprising a main long tube 1, a ball mill tube 3, and an annular rim 2. The ball mill tube comprises a transparent tubule 31, an opalescent tubule 32, a transparent tubule, and an opalescent ball mill 33, which are sintered in sequence. The opalescent ball mill and the opalescent tubules are made of opaque quartz glass. The end of the main long tube is reduced in diameter and then sintered with the ball mill tube. The annular rim is sintered outside the beginning of the diameter reduction of the main long tube. The ball mill tube is sintered in the center of the main long tube. A second ball mill tube 4 is also provided on the side of the end of the main long tube. The second ball mill tube comprises a second transparent tubule 41, a second opalescent tubule 42, a second transparent tubule, and a transparent ball mill 43, which are sintered in sequence.

Claims

1. A method for preparing a quartz tube, characterized in that: The quartz tube contains transparent quartz glass and opaque quartz glass, which are connected by sintering. The steps are: S1: The transparent quartz glass connection end is cut, chamfered, and polished; S2: The transparent quartz glass is soaked in 15% hydrofluoric acid solution for cleaning and then dried; S3: Grind the opaque quartz glass connecting end, scrub with alcohol solution, and dry; S4: Use a flame spray gun to pre-burn the opaque quartz glass connection end to allow it to shrink naturally, indent the end by 8mm to 10mm, and then grind it flat; S5: connecting the transparent quartz glass connecting end and the opaque quartz glass connecting end by sintering with a flame spray gun, and completing the chamfer of the transparent quartz glass connecting end with a transparent quartz wire material; S6: Grind the sintering seam between the transparent quartz glass and the opaque quartz glass.

2. The method for preparing a quartz tube according to claim 1, wherein: The sintering connection between transparent quartz glass is as follows: T1: Cut and chamfer any one of the transparent quartz glass connection ends and grind it flat; T2: Immerse the transparent quartz glass in 15% hydrofluoric acid solution for cleaning and then dry; T3: The transparent quartz glass connection ends are sintered and connected by a flame spray gun, and the chamfers of the transparent quartz glass connection ends are completed with transparent quartz wire; T4: Grind the sintering seams between the transparent quartz glass.

3. The method for preparing a quartz tube according to claim 2, wherein: When transparent quartz glass and opaque quartz glass are sintered, or when transparent quartz glass and transparent quartz glass are sintered, bubbles are eliminated. The method for eliminating bubbles is as follows: if bubbles are found before annealing, transparent quartz silk is pulled to squeeze and break the bubbles; if bubbles are found after annealing, they are broken by grinding and then transparent quartz silk is added to sinter and fill the gaps.

4. A quartz tube, characterized in that: The invention comprises a main body long tube (1), a ball mill tube (3) and an annular edge (2), wherein the ball mill tube comprises a transparent small tube (31), an opalescent small tube (32), a transparent small tube and an opalescent ball mill (33), which are sintered in sequence according to the sintering method between transparent quartz glass and opaque quartz glass in the preparation method of the quartz tube according to claim 1, and the opalescent ball mill and the opalescent small tube are made of opaque quartz glass; the end of the main body long tube is sintered with the ball mill tube after the diameter is reduced, according to the sintering method between transparent quartz glasses in the preparation method of the quartz tube according to claim 2; the annular edge is sintered outside the starting end of the main body long tube at the diameter reduction, according to the sintering method between transparent quartz glasses in the preparation method of the quartz tube according to claim 2.

5. The quartz tube according to claim 4, characterized in that: When the annular edge and the main long tube diameter reduction start end are sintered externally, the annular edge end is cut and chamfered; the thickness of the annular edge is used to compensate for the difference after the main long tube diameter is reduced, keeping the outer wall of the main long tube and the outer wall of the annular edge at the same level.

6. The quartz tube according to claim 4, characterized in that: The quartz long tube is lathe-machined to the specified size to obtain the main long tube. One end of the main long tube is reduced in diameter through the blowing process. The milky white ball mill and milky white small tube are milled out as a whole in the machining center.

7. The quartz tube according to claim 6, characterized in that: The blowing process is that the main long tube is clamped horizontally on a rotating workbench. During the rotation process, a flame spray gun is used to heat and soften it, and a working knife is used to press the rotating main long tube from the outside to reduce the diameter; a working knife is used to press the rotating main long tube from the inside to increase the diameter; and the rotation process is simultaneously polished.

8. The quartz tube according to claim 7, characterized in that: The ball mill tube is sintered at the center of the main long tube, and a second ball mill tube (4) is also provided on the side of the end of the main long tube. The second ball mill tube includes a second transparent small tube (41), a second milky white small tube (42), a second transparent small tube, and a transparent ball mill (43), which are sintered in sequence according to the sintering method between transparent quartz glass and opaque quartz glass in the preparation method of the quartz tube according to claim 1.

9. The quartz tube according to claim 8, characterized in that: The transparent ball mill is made by adding material to one end of a transparent quartz glass tube and blowing it into a spherical shape. The spherical shape is then machined on a lathe to the corresponding size. The ball mill is then put into the ball mill and processed using a cast iron grinding tool and fine sand and powder.

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