Optical imaging system and imaging method

Abstract

This invention belongs to the field of optical technology and imaging methods, and discloses an optical imaging system including a light source generating component, a beam splitting component, a sample stage, and an imaging unit. The beam splitting component receives the main light emitted by the light source generating component and splits it into a first optical path and a second optical path. A polarizing beam splitter is disposed at the intersection of the first and second optical paths. The beam splitting component splits the main light to form a first ray and a second ray, wherein the second ray is a reference light. The first ray passes through the polarizing beam splitter and illuminates the sample stage. The object to be tested on the sample stage reflects the ray to form a reflected ray. This optical imaging system can generate an interference pattern between the reflected ray from the object to be tested and the reference light formed by the second ray by setting a polarizing beam splitter on the beam splitting path. The overall structure is simple, does not require complex components, helps to reduce costs, and is suitable for industrial needs.

Description

Technical Field

[0001] This invention relates to the field of optical technology, and in particular to an optical imaging system and imaging method. Background Technology

[0002] Quantitative phase microscopy (QPM) has become an important tool for materials metrology and biomedical imaging due to its non-contact, in-situ, and label-free properties. Examples include quantifying morphology and dynamics within cells and materials, cancer diagnosis, and analyzing and examining material structures. However, existing QPM technologies require complex digital micromirror devices to achieve quantitative phase imaging, resulting in complex optical paths and high costs, making them unsuitable as standard imaging instruments in research laboratories and industry.

[0003] Therefore, it is necessary to improve the existing imaging microscopes to solve the technical problems of complex optical path structures and high costs in quantitative phase imaging. Summary of the Invention

[0004] The purpose of this invention is to provide an optical imaging system and imaging method to solve the above-mentioned technical problems.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] An optical imaging system includes a light source generating component, a beam splitting component, a sample stage, and an imaging unit;

[0007] The beam splitting component is used to receive the main light emitted by the light source generating component and split it into a first optical path and a second optical path. A polarizing beam splitter is provided at the intersection of the first optical path and the second optical path.

[0008] The light from the first optical path illuminates the sample stage to form reflected light, which then illuminates the polarizing beam splitter in a direction opposite to the first optical path.

[0009] The polarizing beam splitter is used to combine the light rays from the second optical path and the reflected light rays into the imaging area of ​​the imaging unit to form an interference image.

[0010] Optionally, the optical imaging system further includes a first convex lens, which is disposed between the light source generating component and the beam splitting component, for focusing the main light emitted by the light source generating component.

[0011] Optionally, the light source generating component is a laser generator, and the main ray is a laser beam.

[0012] Optionally, the optical imaging system further includes two sets of lens assemblies. The beam splitting assembly has two light-emitting ports corresponding to the first optical path and the second optical path, respectively. The lens assembly is disposed between the light-emitting ports and the polarizing beam splitter.

[0013] The lens assembly includes a second convex lens, a first polarizer, and a half-wave plate arranged in sequence. The light from the first or second optical path passes through the second convex lens to form collimated light. The collimated light is linearly polarized by the first polarizer to form polarized light. The polarized light passes through the half-wave plate to rotate the polarized light to a preset angle.

[0014] Optionally, at least one set of reflectors is provided at a preset position of the first optical path, and the reflectors are used to change the illumination direction of the first optical path.

[0015] Optionally, a beam splitter is provided in the first optical path relative to the reflector, and a third optical path is provided corresponding to one light-receiving surface of the beam splitter, and a white light source component is provided in the third optical path;

[0016] The beam splitter is used to direct the white light emitted by the white light source assembly into the first optical path and illuminate the sample stage.

[0017] Optionally, an objective lens is also provided above the sample stage, and the first optical path passes through the objective lens; a tube lens is provided between the reflector and the beam splitter for the first optical path.

[0018] Optionally, a quarter-wave plate is provided between the polarizing beam splitter and the imaging unit.

[0019] This invention provides an imaging method, and the optical imaging system described above specifically includes:

[0020] The light source generating component operates to emit a main ray to the beam splitting component, which splits the main ray into a first ray and a second ray.

[0021] The first light beam passes through the polarizing beam splitter and illuminates the sample stage along the first light beam; the workpiece on the sample stage reflects the light beam to form a reflected light beam.

[0022] The polarizing beam splitter is used to combine the light from the second optical path and the reflected light into the imaging area of ​​the imaging unit, whereby the imaging unit performs imaging.

[0023] Optionally, the first optical path is further provided with a beam splitter, and also includes:

[0024] A white light source component is disposed on one light-receiving surface of the beam splitter, and the white light emitted by the white light source component is connected to the first optical path through the beam splitter; the white light is used to provide bright field illumination for the workpiece on the sample stage.

[0025] Compared with the prior art, the present invention has the following advantages: During operation, the light source generating component operates to emit a main ray to the beam splitting component, which splits the main ray into a first ray and a second ray, wherein the second ray is a reference ray; the first ray passes through a polarizing beam splitter and illuminates the sample stage along the first ray, and the object to be tested on the sample stage reflects the ray to form a reflected ray; the polarizing beam splitter is used to combine the ray from the second ray and the reflected ray to the imaging area of ​​the imaging unit, and the imaging unit performs imaging to form an interference image; the optical imaging system can generate an interference pattern by setting a polarizing beam splitter on the beam splitter path, so that the reflected ray from the object to be tested and the reference ray formed by the second ray can produce an interference pattern. The overall structure is simple, and there is no need to use complex components, which helps to reduce costs and adapt to industrial needs. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] The structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which the present invention can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that the present invention can produce, should still fall within the scope of the technical content disclosed in the present invention.

[0028] Figure 1 This is a schematic diagram of the optical imaging system in Embodiment 1.

[0029] Illustration: Light source generating assembly 101, beam splitting assembly 102, sample stage 103, imaging unit 104, first optical path 105, second optical path 106, polarizing beam splitter prism 107, first convex lens 108, second convex lens 109, first polarizer 110, half-wave plate 111, reflector 112, beam splitter 113, third optical path 114, white light source assembly 115, aperture 116, objective lens 117, tube lens 118, quarter-wave plate 119. Detailed Implementation

[0030] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0031] In the description of this invention, it should be understood that the terms "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a component positioned centrally in the connection.

[0032] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0033] Example 1:

[0034] This invention provides an optical imaging system, which can be divided into a laser light source system 1; a microscope system 2; and an off-axis interferometry system 3, based on the system's functions.

[0035] The optical imaging system includes a light source generating component 101, a beam splitting component 102, a sample stage 103, and an imaging unit 104. The beam splitting component 102 receives the main light emitted from the light source generating component 101 and splits it into a first optical path 105 and a second optical path 106. A polarizing beam splitter 107 is disposed at the intersection of the first optical path 105 and the second optical path 106. The polarizing beam splitter 107 is a PBS beam splitter prism. The light from the first optical path 105 illuminates the sample stage 103 to form reflected light, which then illuminates the polarizing beam splitter prism 107 in a direction opposite to the first optical path 105. The polarizing beam splitter prism 107 combines the light from the second optical path 106 and the reflected light into the imaging area of ​​the imaging unit 104 to form an interference image. The polarizing beam splitter prism 107 allows the light from the second optical path 106 and the reflected light to share a common path, thereby facilitating light interference.

[0036] The working principle of this invention is as follows: During operation, the light source generating component 101 operates to emit a main ray to the beam splitting component 102. The beam splitting component 102 splits the main ray into a first ray and a second ray, wherein the second ray is a reference ray. The first ray passes through the polarizing beam splitter 107 and illuminates the sample stage 103 along the first ray. The object to be tested on the sample stage 103 reflects the ray to form a reflected ray. The polarizing beam splitter 107 is used to combine the ray from the second optical path 106 and the reflected ray to form an interference ray, which is then illuminated in the imaging area of ​​the imaging unit 104. The imaging unit 104 performs imaging. Compared with the imaging microscope in the prior art, this optical imaging system can generate an interference pattern by setting the polarizing beam splitter 107 on the beam splitting path, so that the reflected ray from the object to be tested and the reference ray formed by the second ray can produce an interference pattern. The overall structure is simple, and there is no need to use complex components, which helps to reduce costs and adapt to industrial needs.

[0037] In this embodiment, the optical imaging system further includes a first convex lens 108, which is disposed between the light source generating component 101 and the beam splitting component 102, and is used to focus the main light emitted by the light source generating component 101.

[0038] The light source generating component 101 is correspondingly provided with an optical fiber coupler. The optical fiber coupler has an input end coupled to the light source generating component 101 to receive the main light beam, and is configured to provide a first light beam to be output from a first output end to propagate along a reflection mode path and a second light beam to be output from a second output end to propagate along a transmission mode path.

[0039] To further explain, the light source generating component 101 is a laser generator, and the main light beam is a laser beam; thus, the laser beam is divided into two sub-laser beams by the beam splitting component 102. The advantage of using laser as a light source is that laser has high energy, better imaging clarity, and good anti-interference ability, and can effectively reduce the interference of external light in a long propagation optical path.

[0040] As a preferred embodiment, the optical imaging system further includes two sets of lens assemblies. The beam splitting assembly 102 has two light-emitting ports corresponding to the first optical path 105 and the second optical path 106, respectively. The lens assembly is disposed between the light-emitting ports and the polarizing beam splitter 107.

[0041] The lens assembly includes a second convex lens 109, a first polarizer 110, and a half-wave plate 111 arranged in sequence. The light from the first optical path 105 or the second optical path 106 passes through the second convex lens 109 to form collimated light. The collimated light is linearly polarized by the first polarizer 110 to form polarized light. The polarized light passes through the half-wave plate 111 to rotate the polarized light to a preset angle.

[0042] In this embodiment, at least one set of reflectors 112 are provided at a preset position of the first optical path 105, and the reflectors 112 are used to change the illumination direction of the first optical path 105.

[0043] Furthermore, a beam splitter 113 is disposed on the first optical path 105 relative to the reflector 112. A third optical path 114 is disposed corresponding to one light-receiving surface of the beam splitter 113, and a white light source assembly 115 is disposed on the third optical path 114. The beam splitter 113 is used to input the white light emitted by the white light source assembly 115 into the first optical path 105 and illuminate the sample stage 103. The light outlet of the white light source assembly 115 is provided with an aperture 116, which limits the diameter of the emitted white light beam.

[0044] It should be noted that this solution provides an additional white light source component 115 on one side of the first optical path 105. The white light emitted by the white light source component 115 can directly illuminate the object to be tested on the sample stage 103, thereby facilitating real-time visual observation of the object to be tested by humans.

[0045] Combination Figure 1 As shown, in this scheme, a set of reflectors 112 are provided on the first optical path 105 near the sample stage 103. The reflectors 112 cooperate with the beam splitter 113 to change the direction of the optical path, thereby facilitating the imaging of the object to be tested in the planar position. The position of the beam splitter 113 can also be set as another reflector 112.

[0046] In this embodiment, an objective lens 117 is also disposed above the sample stage 103, and the first optical path 105 passes through the objective lens 117; a tube lens 118 is disposed between the reflector 112 and the beam splitter 113 in the first optical path 105. The objective lens 117 and the tube lens 118 cooperate to form an optical system that magnifies the object to be tested on the sample stage, while ensuring that a uniform and collimated beam of light illuminates the sample in the first optical path 105.

[0047] In this embodiment, a quarter-wave plate 119 is provided between the polarizing beam splitter 107 and the imaging unit 104. The quarter-wave plate 119 plays the role of optical rotation and light adjustment. In addition, another quarter-wave plate 119 is provided between the polarizing beam splitter 107 and the beam splitter 113. Since the light from the first optical path 105 needs to pass through the quarter-wave plate 119 twice, it forms a half wavelength with a polarization rotation angle of 90°.

[0048] Example 2:

[0049] The present invention also provides an imaging method applied to the optical imaging system as described in Embodiment 1, specifically including:

[0050] The light source generating component 101 operates to emit a main light beam to the beam splitting component 102, and the beam splitting component 102 splits the main light beam to form a first light beam and a second light beam; wherein the first light beam and the second light beam illuminate along the first optical path 105 and the second optical path 106, respectively.

[0051] The first light beam passes through the polarizing beam splitter 107 and illuminates the sample stage 103 along the first light beam. The object to be tested on the sample stage 103 reflects the light beam to form a reflected light beam.

[0052] The polarizing beam splitter 107 is used to combine the light rays from the second optical path 106 and the reflected light rays into the imaging area of ​​the imaging unit 104, whereby the imaging unit 104 performs imaging to form a quantitative phase imaging effect.

[0053] In this embodiment, the imaging method further includes:

[0054] A white light source component 115 is disposed on one light-receiving surface of the beam splitter 113, and the white light emitted by the white light source component 115 is connected to the first optical path through the beam splitter 113; the white light is used to provide bright field illumination for the sample to be tested on the sample stage 103, so as to facilitate real-time observation of the sample to be tested.

[0055] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An optical imaging system, characterized in that, Includes a light source generating assembly, a beam splitting assembly, a sample stage, and an imaging unit; The beam splitting component is used to receive the main light emitted by the light source generating component and split it into a first optical path and a second optical path. A polarizing beam splitter is provided at the intersection of the first optical path and the second optical path. The light from the first optical path illuminates the sample stage to form reflected light, which then illuminates the polarizing beam splitter in a direction opposite to the first optical path. The polarizing beam splitter is used to combine the light rays from the second optical path and the reflected light rays into the imaging area of ​​the imaging unit to form an interference image; It also includes two sets of lens assemblies. The beam splitting assembly has two light outlets corresponding to the first optical path and the second optical path, respectively. The lens assembly is disposed between the light outlet and the polarizing beam splitter. The lens assembly includes a second convex lens, a first polarizer, and a half-wave plate arranged in sequence. The light from the first or second optical path passes through the second convex lens to form collimated light. The collimated light is linearly polarized by the first polarizer to form polarized light. The polarized light passes through the half-wave plate to rotate the polarized light to a preset angle.

2. The optical imaging system according to claim 1, characterized in that, It also includes a first convex lens, which is disposed between the light source generating component and the beam splitting component, for focusing the main light emitted by the light source generating component.

3. The optical imaging system according to claim 2, characterized in that, The light source generating component is a laser generator, and the main light beam is a laser beam.

4. The optical imaging system according to claim 1, characterized in that, At least one set of reflectors is provided at a preset position in the first optical path, and the reflectors are used to change the illumination direction of the first optical path.

5. The optical imaging system according to claim 4, characterized in that, A beam splitter is provided in the first optical path relative to the reflector, and a third optical path is provided corresponding to one light-receiving surface of the beam splitter. A white light source component is provided in the third optical path. The beam splitter is used to direct the white light emitted by the white light source assembly into the first optical path and illuminate the sample stage.

6. The optical imaging system according to claim 5, characterized in that, An objective lens is also provided above the sample stage, and the first optical path passes through the objective lens; a tube lens is provided between the reflector and the beam splitter for the first optical path.

7. The optical imaging system according to claim 1, characterized in that, A quarter-wave plate is provided between the polarizing beam splitter and the imaging unit.

8. An imaging method, characterized in that, Applied to the optical imaging system as described in any one of claims 1 to 7, specifically comprising: The light source generating component operates to emit a main ray to the beam splitting component, which splits the main ray into a first ray and a second ray. The first light beam passes through the polarizing beam splitter and illuminates the sample stage along the first light beam; the workpiece on the sample stage reflects the light beam to form a reflected light beam. The polarizing beam splitter is used to combine the light from the second optical path and the reflected light into the imaging area of ​​the imaging unit, whereby the imaging unit performs imaging.

9. The imaging method according to claim 8, characterized in that, The first optical path also includes a beam splitter and further comprises: A white light source component is disposed on one light-receiving surface of the beam splitter, and the white light emitted by the white light source component is connected to the first optical path through the beam splitter; the white light is used to provide bright field illumination for the workpiece on the sample stage.

Images