A method for manufacturing a large-scale aluminum alloy vacuum chamber by using a universal semiconductor

Abstract

The application discloses a kind of general semiconductor large-scale aluminum alloy vacuum chamber high-efficiency high-energy beam manufacturing method, which comprises the following steps: S1, the opening of each component of vacuum chamber is handled, and each component of vacuum chamber is fixed by argon arc welding by splicing welding;S2, the welding area of vacuum chamber is preheated by oxyacetylene flame spray gun, and the preheating area is cleaned by laser by pulse laser cleaning machine;S3, the inside and outside of vacuum chamber are deep fusion welded by laser-MIG composite welding;S4, the weld of the completed vacuum chamber is inspected.The application is preheated to 100-120 DEG C by flame spray gun to workpiece, the preheating area is cleaned by laser by pulse laser cleaning machine simultaneously, and the moisture and oil dirt and other impurities in the welding area are removed, so that the manufacturing of large-scale aluminum alloy vacuum chamber can be met, the manufacturing efficiency is greatly improved, and the welding deformation is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment manufacturing, in particular to a high-efficiency high-energy beam manufacturing method for a large-scale aluminum alloy vacuum chamber of a semiconductor. BACKGROUND

[0002] The vacuum chamber is a core component of the vacuum system, widely used in the manufacturing process of integrated circuits, photovoltaic and display panels, etc. Its role is to provide a vacuum environment for the entire manufacturing process, to remove moisture and impurities in the air, and to ensure the quality and stability of semiconductor devices. The vacuum chamber is the main operating space in the process of manufacturing semiconductor materials and devices, and needs to have good sealing performance and high vacuum degree.

[0003] The traditional manufacturing method for a large-scale aluminum alloy vacuum chamber of a semiconductor is mainly argon arc welding, which is manually welded. The inner side of the vacuum chamber is not beveled, and the argon arc welding is stacked layer by layer to a weld leg size of 15mm. The outer side of the vacuum chamber is a 15mm deep 120° V-shaped bevel, and then the argon arc welding is manually filled layer by layer. This method has a large amount of weld filling, slow welding speed, low welding efficiency, high requirements for argon arc welding operators, high welding heat input, large welding stress and deformation, and is prone to welding cracks and other defects. It often takes two welders working simultaneously for 2-3 days to complete the welding of a vacuum chamber.

[0004] Therefore, it has great research significance to improve the manufacturing efficiency of a large-scale aluminum alloy vacuum chamber of a semiconductor, maintain its good sealing performance, and reduce production costs.

[0005] At present, there is no effective solution to the problems in the related art. SUMMARY

[0006] In view of the problems in the related art, the present application proposes a high-efficiency high-energy beam manufacturing method for a large-scale aluminum alloy vacuum chamber of a semiconductor to overcome the above technical problems existing in the prior art.

[0007] To this end, the specific technical solutions adopted by the present application are as follows:

[0008] A high-efficiency high-energy beam manufacturing method for a large-scale aluminum alloy vacuum chamber of a semiconductor, the manufacturing method comprising the following steps:

[0009] S1, beveling treatment is performed on each component of the vacuum chamber, and argon arc welding is used to splice and fix each component of the vacuum chamber;

[0010] S2, an oxygen-acetylene flame spray gun is used to preheat the welding area of the vacuum chamber, and a pulse laser cleaning machine is used to laser clean the preheating area;

[0011] S3, laser-MIG composite welding is used to carry out deep penetration welding on the inner side and the outer side of the vacuum chamber;

[0012] S4, the weld of the completed vacuum chamber is inspected.

[0013] Further, the components of the vacuum chamber are beveled, and argon arc welding is used to splice and fix the components of the vacuum chamber. The inner side of the vacuum chamber is a V-shaped bevel with an angle of 45 degrees and a depth of 5mm;

[0014] The outer side of the vacuum chamber is a V-shaped bevel with an angle of 90 degrees and a depth of 5mm;

[0015] The splicing and fixing length is 2mm, and the interval is 200mm.

[0016] The components of the vacuum chamber are spliced and fixed by argon arc welding. The splicing position is inside the intermittent butt weld bevel on the outer side of the vacuum chamber. The splicing weld length is 2mm, and the interval is 200mm, thereby ensuring that the inner side weld will not cause the outer side to open due to welding deformation.

[0017] Further, the preheating temperature is 100-120 degrees;

[0018] The laser power of the laser cleaning is 500W, and the frequency is 60Hz.

[0019] Further, the laser-MIG composite welding for the inner side and the outer side of the vacuum chamber includes the following steps:

[0020] S31, the laser-MIG composite welding is controlled by a robot, and the vacuum chamber welding area is hoisted to a positioner;

[0021] S32, the position of the vacuum chamber is adjusted by the positioner, and after the adjustment is completed, the inner side and the outer side welds of the vacuum chamber are welded.

[0022] Further, the position of the vacuum chamber is adjusted by the positioner, and after the adjustment is completed, the inner side and the outer side welds of the vacuum chamber are welded, which includes the following steps:

[0023] S321, the vacuum chamber is inclined to 45 degrees by the positioner, and the inner side weld of the vacuum chamber is adjusted to a boat-shaped welding position;

[0024] S322, the first weld of the inner side of the vacuum chamber is welded by laser-MIG composite welding using a symmetric welding method;

[0025] Specifically, the vacuum chamber is hoisted to the positioner, and the welding of the internal fillet weld of the vacuum chamber is performed first. The positioner is used to turn the welding position of the internal fillet weld to the fillet welding position of the ship shape, and continuous welding is performed by using a laser power of 6000-8000 W, a welding machine current of 220 A, a welding speed of 0.8 m / min, and a welding wire diameter of 1.6 mm, and one pass of welding is performed.

[0026] The welding of the opposite sides is performed by using the positioner to turn the welding position of the opposite sides to the fillet welding position of the ship shape, and the welding of the remaining two sides is performed in the same way.

[0027] S323, after the welding of one pass of the weld is completed, the vacuum chamber is turned over by using the positioner, and the welding of the external fillet weld of the vacuum chamber is performed;

[0028] Specifically, the vacuum chamber is turned over to the outside by using the positioner, and the welding of the external butt joint is performed. The welding position is flat welding. The laser-MIG composite welding is performed by using a laser power of 8000-10000 W, a welding current of 240 A, a welding speed of 0.8 m / min, and a welding wire diameter of 1.6 mm. One pass of filling is completed, and the penetration depth is 15 mm.

[0029] S324, finally, the second and third fillet welds on the inside of the vacuum chamber are welded.

[0030] Specifically, the vacuum chamber is turned over to the inside fillet welding position of the ship shape, and the second and third of the four inside welds are welded by using the symmetrical welding.

[0031] The laser-MIG composite welding is used to weld the inside of the vacuum chamber, and the weld is a continuous weld. The laser-MIG composite welding laser power is 6000-8000 W, the welding machine current is 220 A, the welding speed is 0.8 m / min, the welding wire diameter is 1.6 mm, the weld penetration depth is 15 mm, and the weld leg size is 10 mm.

[0032] The laser-MIG composite welding is used to weld the outside of the vacuum chamber, and the weld is a 100x100 intermittent weld. The laser-MIG composite welding laser power is 8000-10000 W, the welding speed is 0.8 m / min, and the weld penetration depth is 15 mm.

[0033] The laser-MIG composite welding is used during welding, which is controlled by a robot, and the welding wire diameter is 1.6 mm. The inside fillet weld of the vacuum chamber is a continuous weld, the laser power is 6000-8000 W, the welding speed is 0.8 m / min, three passes of two layers are welded, the weld penetration depth is 15 mm, and the weld leg size is 10 mm. The outside butt joint is a 100x100 intermittent weld, one pass of filling is completed, the laser power is 8000-10000 W, the welding speed is 0.8 m / min, and the weld penetration depth is 15 mm.

[0034] Vacuum chamber welding sequence: First, weld the first inner fillet weld, using symmetrical welding, that is, weld one side first and then weld the opposite side, and then weld the remaining two sides; then turn the workpiece over and weld the intermittent butt weld on the outer side of the vacuum chamber, using symmetrical welding; then turn the workpiece over and weld the second and third fillet welds on the inner side of the vacuum chamber, using symmetrical welding.

[0035] Furthermore, when the laser-MIG hybrid welding is performed on the inner side of the vacuum chamber, the weld is a continuous weld. The laser power of the laser-MIG hybrid welding is 6000-8000W, the welding current is 220A, the welding speed is 0.8m / min, the welding wire diameter is 1.6mm, the weld penetration is 15mm, and the weld leg size is 10mm.

[0036] Furthermore, when the laser-MIG composite welding is performed on the outer side of the vacuum chamber, the weld is a 100×100 intermittent weld, the laser power of the laser-MIG composite welding is 8000~10000W, the welding speed is 0.8m / min, and the weld penetration is 15mm.

[0037] Furthermore, the inspection of the completed vacuum chamber weld includes the following steps:

[0038] S41, 100% visual inspection: Check whether there are cracks or undercut defects in the weld after welding.

[0039] S42. Macroscopic corrosion of the sample: Grind, polish and etch the cross section of the weld in the vacuum chamber, and observe and measure the weld penetration and weld leg size;

[0040] S43. Vacuum method helium leak test: Place the vacuum chamber on the helium detection platform to conduct a helium leak test. Evacuate the vacuum chamber to 1×10-3 Pa. The helium leakage rate of the vacuum chamber is less than 1×10-9 mbar·L / s.

[0041] The beneficial effects of this invention are as follows:

[0042] 1. This invention uses laser-MIG hybrid welding process, preheating and laser cleaning before welding, which can meet the welding requirements of high efficiency and high sealing performance of large aluminum alloy vacuum chambers.

[0043] 2. This invention first uses a flame torch to preheat the workpiece to 100-120°C. Simultaneously, a pulsed laser cleaning machine is used to perform laser cleaning on the preheated area to remove moisture, oil, and other impurities from the welding area. The pulsed laser cleaning machine is set to a power of 500W and a frequency of 60Hz. Then, laser-MIG composite welding is used to perform deep penetration welding on the inner and outer sides of the vacuum chamber. The welding speed can reach 0.6-0.8m / min, which can meet the manufacturing requirements of large aluminum alloy vacuum chambers, greatly improve manufacturing efficiency, and reduce welding deformation. Attached Figure Description

[0044] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0045] Figure 1 This is a flowchart of a method for manufacturing a high-efficiency, high-energy beam in a large-scale aluminum alloy vacuum chamber for semiconductor applications, according to an embodiment of the present invention. Detailed Implementation

[0046] To further illustrate the various embodiments, the present invention provides accompanying drawings, which are part of the disclosure of the present invention. These drawings are mainly used to illustrate the embodiments and can be used in conjunction with the relevant descriptions in the specification to explain the operating principles of the embodiments. With reference to these drawings, those skilled in the art should be able to understand other possible implementation methods and the advantages of the present invention.

[0047] According to an embodiment of the present invention, a method for manufacturing a high-efficiency, high-energy beam for a large-scale aluminum alloy vacuum chamber for semiconductor applications is provided.

[0048] The present invention will now be further described in conjunction with the accompanying drawings and specific embodiments, such as... Figure 1 As shown, the method for manufacturing a high-efficiency, high-energy beam large aluminum alloy vacuum chamber for semiconductor applications according to an embodiment of the present invention includes the following steps:

[0049] S1. Beveling is performed on each component of the vacuum chamber, and argon arc welding is used to weld and fix each component of the vacuum chamber.

[0050] In one embodiment, the inner bevel of the vacuum chamber components is a V-shaped bevel with a bevel angle of 45 degrees and a depth of 5 mm.

[0051] Vacuum chambers are core components in general semiconductor vacuum systems, therefore requiring extremely high welding strength and sealing performance.

[0052] The specific vacuum chamber consists of a base plate and four wall plates, which meet the requirements for sealing and strength within the vacuum chamber cavity. The vacuum chamber welds are mainly continuous fillet welds on the inner side and discontinuous butt welds on the outer side.

[0053] Specifically, the outer bevel of the vacuum chamber is a V-shaped bevel with a bevel angle of 90 degrees and a depth of 5mm;

[0054] The fixed length of the weld is 2mm, and the interval is 200mm.

[0055] The various components of the vacuum chamber are fixed by argon arc welding, the jointing points are located in the intermittent butt joint groove on the outside of the vacuum chamber, the length of the jointing point weld is 2mm, and the interval is 200mm, thereby ensuring that the welding of the inside weld does not cause the opening of the outside due to welding deformation.

[0056] S2, the welding area of the vacuum chamber is preheated by an oxyacetylene flame spray gun, and the preheated area is cleaned by a pulse laser cleaning machine, thereby removing moisture, oil stains and other impurities in the welding area.

[0057] In one embodiment, the preheating temperature is 100-120 degrees;

[0058] In one embodiment, the laser power of the laser cleaning is 500W, and the frequency is 60Hz.

[0059] S3, laser-MIG composite welding is used to weld the inside and outside of the vacuum chamber.

[0060] Specifically, laser-MIG composite welding is a new type of welding technology, which is a composite welding technology combining laser welding technology and MIG welding technology.

[0061] In one embodiment, the laser-MIG composite welding of the inside and outside of the vacuum chamber includes the following steps:

[0062] S31, the laser-MIG composite welding is controlled by a robot, and the vacuum chamber welding area is hoisted to the positioner;

[0063] S32, the position of the vacuum chamber is adjusted by the positioner, and after the adjustment is completed, the inside and outside welds of the vacuum chamber are welded.

[0064] Specifically, the position of the vacuum chamber is adjusted by the positioner, and after the adjustment is completed, the inside and outside welds of the vacuum chamber are welded, which includes the following steps:

[0065] S321, the vacuum chamber is inclined to 45 degrees by the positioner, and the inside weld of the vacuum chamber is adjusted to the boat-shaped welding position;

[0066] S322, the first weld of the inside of the vacuum chamber is welded by laser-MIG composite welding using symmetric welding method;

[0067] Specifically, the vacuum chamber is hoisted to the positioner, the inside corner weld of the vacuum chamber is welded first, the position of the vacuum chamber is turned to the boat-shaped welding position by the positioner, laser power is 6000-8000W, welding machine current is 220A, welding speed is 0.8m / min, and welding wire diameter is 1.6mm, continuous welding is carried out, and one pass is welded.

[0068] Adopting the principle of symmetrical welding, the welding position of the opposite side is turned to the ship-shaped welding position by the positioner, and then welding is performed. Similarly, the remaining two sides are welded.

[0069] S323, after the welding of one weld is completed, the vacuum chamber is turned over by the positioner, and the welding of the outside weld of the vacuum chamber is performed;

[0070] Specifically, the vacuum chamber is turned to the outside by the positioner, and the welding of the outside butt weld is performed. The welding position is flat welding. The laser power of the laser-MIG hybrid welding is 8000-10000W, the welding current is 240A, the welding speed is 0.8m / min, and the wire diameter is 1.6mm. Once filling is completed, the penetration depth is 15mm.

[0071] S324, finally, the second and third fillet welds inside the vacuum chamber are welded.

[0072] Specifically, the vacuum chamber is turned to the inside fillet weld ship-shaped welding position, and the second and third of the four inside welds are welded by adopting symmetrical welding.

[0073] The laser-MIG hybrid welding is continuous weld when welding the inside of the vacuum chamber, the laser power of the laser-MIG hybrid welding is 6000-8000W, the welding current is 220A, the welding speed is 0.8m / min, the wire diameter is 1.6mm, the weld penetration depth is 15mm, and the weld leg size is 10mm.

[0074] The laser-MIG hybrid welding is 100x100 intermittent weld when welding the outside of the vacuum chamber, the laser power of the laser-MIG hybrid welding is 8000-10000W, the welding speed is 0.8m / min, and the weld penetration depth is 15mm.

[0075] Laser-MIG hybrid welding is used during welding, which is controlled by a robot, and the wire diameter is 1.6mm. The inside fillet weld of the vacuum chamber is continuous weld, the laser power is 6000-8000W, the welding speed is 0.8m / min, three layers of welding are performed, the weld penetration depth is 15mm, and the weld leg size is 10mm. The outside butt weld is 100x100 intermittent weld, one layer of filling is completed, the laser power is 8000-10000W, the welding speed is 0.8m / min, and the weld penetration depth is 15mm.

[0076] The welding sequence of the vacuum chamber is as follows: first, the first inside fillet weld is welded by adopting symmetrical welding, that is, one side is welded first, then the opposite side is welded, and then the remaining two sides are welded; second, the outside butt intermittent weld of the vacuum chamber is welded by turning over the workpiece and adopting symmetrical welding; third, the second and third inside fillet welds of the vacuum chamber are welded by turning over the workpiece and adopting symmetrical welding.

[0077] S4, inspecting the welded vacuum chamber weld after welding is completed.

[0078] In one embodiment, the step of inspecting the welded vacuum chamber weld after welding is completed comprises the following steps:

[0079] S41, 100% visual inspection: checking whether there are cracks and undercut defects in the weld after welding is completed.

[0080] S42, sample macro etching: polishing, polishing and etching the cross section of the vacuum chamber weld, observing and measuring the weld penetration and weld leg size;

[0081] S43, vacuum helium leak detection test: placing the vacuum chamber on the helium detection platform for helium leak detection test, vacuumizing the vacuum chamber to 1x10-3Pa, and the helium leakage rate of the vacuum chamber is less than 1x10-9mbar.L / s.

[0082] In summary, by means of the above technical solutions of the present application, the present application adopts laser-MIG composite welding process, preheating before welding and laser cleaning. It can meet the welding requirements of large aluminum alloy vacuum chamber with high efficiency and high sealing performance. The present application first uses a flame spray gun to preheat the workpiece to 100-120℃, and at the same time, a pulse laser cleaning machine is used to clean the preheating area with laser, to remove moisture, oil stains and other impurities in the welding area. The pulse laser cleaning machine is set to a light power of 500W and a frequency of 60Hz. Then, laser-MIG composite welding is used to deep penetration welding on the inside and outside of the vacuum chamber, and the welding speed can reach 0.6-0.8m / min, thereby being able to meet the manufacturing requirements of large aluminum alloy vacuum chamber, greatly improving the manufacturing efficiency and reducing the welding deformation.

[0083] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A method for manufacturing a high-efficiency, high-energy beam for a large-scale aluminum alloy vacuum chamber suitable for semiconductor applications, characterized in that, The manufacturing method comprises the following steps: S1, the inside of each part of the vacuum chamber is beveled, and each part of the vacuum chamber is fixed by argon arc welding; S2, the welding area of the vacuum chamber is preheated by an oxygen-acetylene flame spray gun, and the preheating area is cleaned by a pulse laser cleaning machine; S3, the inside and outside of the vacuum chamber are deep penetration welded by laser-MIG hybrid welding; S4, the weld of the completed vacuum chamber is inspected; The laser-MIG hybrid welding of the inside and outside of the vacuum chamber comprises the following steps: S31, the laser-MIG hybrid welding is controlled by a robot, and the vacuum chamber welding area is hoisted to a positioner; S32, the position of the vacuum chamber is adjusted by the positioner, and the inside and outside welds of the vacuum chamber are welded after the adjustment is completed; The position of the vacuum chamber is adjusted by the positioner, and the inside and outside welds of the vacuum chamber are welded after the adjustment is completed, which comprises the following steps: S321, the vacuum chamber is inclined to 45 degrees by the positioner, and the inside weld of the vacuum chamber is adjusted to a boat-shaped welding position; S322, the first weld of the inside of the vacuum chamber is welded by laser-MIG hybrid welding in a symmetrical welding mode; S323, after the welding of the first weld is completed, the vacuum chamber is turned over by the positioner, and the outside weld of the vacuum chamber is welded; S324, the second and third corner welds of the inside of the vacuum chamber are finally welded; The inside of the vacuum chamber is beveled, and each part of the vacuum chamber is fixed by argon arc welding, wherein the inside of the vacuum chamber is V-shaped beveled, the bevel angle is 45 degrees, and the depth is 5mm; The outside of the vacuum chamber is V-shaped beveled, the bevel angle is 90 degrees, and the depth is 5mm; The fixed length of the splicing is 2mm, and the interval is 200mm; When the laser-MIG hybrid welding is used to weld the inside of the vacuum chamber, the weld is a continuous weld, the laser-MIG hybrid welding laser power is 6000-8000W, the welding machine current is 220A, the welding speed is 0.8m / min, the welding wire diameter is 1.6mm, the weld penetration is 15mm, and the weld leg size is 10mm; When the laser-MIG hybrid welding is used to weld the outside of the vacuum chamber, the weld is a 100x100 intermittent weld, the laser-MIG hybrid welding laser power is 8000-10000W, the welding speed is 0.8m / min, and the weld penetration is 15mm.

2. A method for manufacturing a large-scale aluminum alloy vacuum chamber using a high-energy beam, according to claim 1, wherein The preheating temperature is 100-120 degrees; The laser power of the laser cleaning is 500W, and the frequency is 60Hz.

3. A method for manufacturing a large-scale aluminum alloy vacuum chamber using a high-energy beam, according to claim 1, wherein The inspection of the weld of the completed vacuum chamber comprises the following steps: S41, whether there are cracks and undercut defects in the weld after welding is checked; S42, the cross section of the vacuum chamber weld is polished, polished, and etched, and the weld penetration and weld leg size are observed and measured; S43, the vacuum chamber is placed on a helium detection platform for helium leak detection test.

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