Quartz crucible production equipment

Abstract

The present invention relates to a quartz crucible production device, comprising a mold and a water jacket arranged outside the mold, wherein a closed vacuum chamber is formed between the mold and the water jacket, and the vacuum chamber comprises a mutually independent side wall chamber, a transition chamber and a bottom chamber, wherein the side wall chamber, the transition chamber and the bottom chamber are all connected to a vacuum pump and can independently adjust the vacuum degree. The beneficial effect is that the negative pressure values ​​of the side wall chamber, the transition chamber and the bottom chamber can highly match the actual requirements of the quartz sand, and therefore, there will be no problem that the vacuum is too high and the number of bubbles in the molten quartz increases, or the vacuum is insufficient and the bubbles generated by the molten quartz sand cannot be discharged. A balance is achieved between the vacuum degree of the vacuum chamber and the bubble extraction effect, so that the bubbles generated in the quartz melting process are fully output, thereby improving the quality of the quartz crucible. The present invention does not require changing the original mold and water jacket structure, and is therefore conducive to improving the existing production device and reducing the cost of the entire production device.

Description

Technical Field

[0001] The present invention relates to the technical field of quartz crucible production, and in particular to a quartz crucible production device. Background Art

[0002] During the production process of quartz crucible, the gap between the molten quartz and the mold needs to be vacuumed. When the quartz sand is melted, a layer of tiny bubbles will be generated on the surface. The bubbles on the bottom surface move around under the action of centrifugal force and accumulate at the curved connecting wall at the bottom.

[0003] As time accumulates, the number of bubbles will increase, but due to insufficient vacuuming speed, the bubbles cannot be removed in time, and a circle of bubbles will form. This phenomenon is most obvious on large-sized crucibles.

[0004] Since there is a separate vacuum chamber between the mold and the water jacket, if a vacuum pump with a high pumping speed is selected to improve the overall vacuum degree, the number of bubbles will increase due to excessive vacuum in other parts except the connecting wall, making it difficult to balance the vacuum degree of the vacuum chamber and the bubble extraction effect.

[0005] When using a quartz crucible containing many bubbles for crystal pulling, if there are many bubbles on the surface of the quartz crucible, the bubbles on the inner surface will continue to burst during use, directly contaminating the silicon melt and affecting single crystal pulling. The bubble bursting phenomenon becomes more serious with time, and it cannot meet the needs of long-term crystal pulling. Summary of the Invention

[0006] (1) Technical issues to be resolved

[0007] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a quartz crucible production device, which solves the technical problem in the prior art that there is a separate vacuum chamber between the mold and the water jacket. If a vacuum pump with a high pumping speed is selected to improve the overall vacuum degree, the number of bubbles will increase in other parts except the connecting wall due to excessive vacuum, resulting in an increase in the number of bubbles, making it difficult to balance the vacuum degree of the vacuum chamber and the bubble extraction effect.

[0008] (2) Technical solution

[0009] In order to achieve the above objectives, the main technical solutions adopted by the present invention include:

[0010] In a first aspect, the present invention provides a quartz crucible production device, comprising a mold and a water jacket provided on the outside of the mold, a closed vacuum chamber being formed between the mold and the water jacket, and a breathable plug being distributed on the mold; the mold comprising an annular side wall, a bottom wall and a connecting wall, the annular side wall and the bottom wall being connected by the connecting wall, so that the mold forms a molding cavity with an opening on one side; the vacuum chamber comprising a mutually independent side wall cavity, a transition cavity and a bottom cavity, the side wall cavity corresponding to the annular side wall, the transition cavity corresponding to the connecting portion, and the bottom cavity corresponding to the bottom wall; the quartz crucible production device further comprises a vacuum pump, the side wall cavity, the transition cavity and the bottom cavity are all connected to the vacuum pump, and the vacuum degree can be independently adjusted.

[0011] In one technical solution of the present invention, a rotating shaft extends from the water jacket; the quartz crucible production device also includes a vacuum distributor, which is integrated with the rotating shaft; the vacuum distributor includes a shell, which is arranged on the frame, and the rotating shaft passes through the shell, and three independent air chambers are formed between the shell and the rotating shaft, and the air chambers are connected to the vacuum pump; the quartz crucible production device also includes three gas output channels, one end of the three gas channels is connected to the side wall cavity, the transition cavity and the bottom cavity in a one-to-one correspondence, and the other end of the three gas channels is maintained in a one-to-one correspondence with the three air chambers.

[0012] In one technical solution of the present invention, the gas channel first extends to the interior of the rotating shaft and then extends out of the rotating shaft so that there are three gas ports on the side wall of the rotating shaft; the three air chambers are arranged along the axial direction of the shell, and the gas ports and the air chambers correspond to each other and remain connected.

[0013] In one technical solution of the present invention, the vacuum distributor also includes a sealing assembly, which is used to seal the shell and the rotating shaft to form three independent air chambers; the sealing assembly includes an inner sealing ring and an outer sealing ring, the inner sealing ring is directly or indirectly connected to the rotating shaft, and the outer sealing ring is directly or indirectly connected to the shell, and the contact surfaces of the inner sealing ring and the outer sealing ring abut against each other.

[0014] In one technical solution of the present invention, the contact surface of the inner sealing ring and the outer sealing ring is set to a conical surface; the sealing assembly also includes a connecting seat and a spring, the connecting seat is provided with a mounting groove, the spring is arranged in the mounting groove, and the connecting seat is connected to the inner wall of the shell; a sliding portion extends from the outer sealing ring, and the sliding portion is slidably installed in the mounting groove and squeezes the spring so that the spring applies elastic force to the sliding portion, and then applies a force to the outer sealing ring so that the contact surfaces of the outer sealing ring and the inner sealing ring abut against each other.

[0015] In one technical solution of the present invention, the sealing assembly further includes a sliding sealing ring, which is arranged between the sliding portion and the mounting groove to establish a sliding seal between the sliding portion and the mounting groove.

[0016] In one technical solution of the present invention, the vacuum distributor further includes a regulating valve, and each air chamber is connected to an output port of the vacuum pump with a regulating valve.

[0017] In one technical solution of the present invention, the quartz crucible production device also includes two sets of sealing pressure rings; when the mold is assembled in the water jacket, the two sets of sealing pressure rings are pressed tightly at corresponding positions between the water jacket and the mold to establish a sealing relationship between the side wall cavity and the transition cavity, and between the transition cavity and the bottom cavity.

[0018] In one technical solution of the present invention, the quartz crucible production device also includes an annular plate and a bottom support rod, both of which are connected to the water jacket. The annular plate extends horizontally, and the bottom support rod extends vertically. The bottom support rod supports one end of the annular plate. The annular plate is abutted against the connection between the bottom wall and the connecting wall through a group of sealing pressure rings, and the annular plate extends from the bottom wall toward the water jacket.

[0019] In one technical solution of the present invention, the quartz crucible production device also includes a first connecting ring and a second connecting ring, which are respectively connected to the mold and the water jacket, and another set of sealing pressure rings are arranged between the first connecting ring and the second connecting ring to establish a sealing relationship between the side wall cavity and the transition cavity.

[0020] (3) Beneficial effects

[0021] The beneficial effects of the present invention are as follows: the quartz crucible production device of the present invention divides the vacuum chamber into three parts, namely the side wall chamber, the transition chamber and the bottom chamber. During the centrifugal process of the quartz sand, due to the different sizes of the radius relative to the mold cross section, the centrifugal force exerted on the quartz sand itself is also different. Therefore, different centrifugal forces need to be applied to different quartz sand positions with different centrifugal force sizes, so that the side wall chamber, the transition chamber and the bottom chamber can all reach an ideal negative pressure value.

[0022] Since the negative pressure values ​​of the side wall cavity, transition cavity and bottom cavity can highly match the actual requirements of quartz sand, there will be no problem of excessive vacuum increasing the number of bubbles in the molten quartz, or insufficient vacuum failing to expel the bubbles generated by the molten quartz sand. A balance is achieved between the vacuum degree of the vacuum cavity and the bubble extraction effect, so that the bubbles generated in the quartz melting process are fully discharged, thereby improving the quality of the quartz crucible.

[0023] At the same time, the present invention divides the original vacuum chamber without changing the original mold and water jacket structure, which is conducive to improving the existing production equipment and reducing the cost of the entire production equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 Schematic diagram of the structure of the quartz crucible production device of the present invention;

[0025] Figure 2 Schematic diagram of the structure of the sealing assembly of the present invention;

[0026] Figure 3 For the present invention Figure 1 Schematic diagram of the local enlarged structure at X in the middle;

[0027] Figure 4 For the present invention Figure 1 Schematic diagram of the local enlarged structure at Y in the middle;

[0028] Figure 5 For the present invention Figure 1 Schematic diagram of the locally enlarged structure at Z in the middle.

[0029] [Description of Reference Numerals]

[0030] 1: mold; 101: annular side wall; 102: bottom wall; 103: connecting wall;

[0031] 2: Water jacket;

[0032] A: vacuum chamber; A1: sidewall chamber; A2: transition chamber; A3: bottom chamber;

[0033] 3: Vacuum pump;

[0034] 4: shaft;

[0035] 5: Vacuum distributor; 51: Housing; B: Air chamber; 52: Sealing assembly; 521: Inner sealing ring; 522: Outer sealing ring; 523: Connecting seat; 524: Spring; C: Mounting groove; D: Sliding part; 525: Sliding sealing ring; 53: Regulating valve;

[0036] 6: Gas channel;

[0037] 7: Sealing ring;

[0038] 8: annular plate;

[0039] 9: bottom support rod;

[0040] 10: first connecting ring;

[0041] 11: Second connecting ring. DETAILED DESCRIPTION

[0042] In order to better explain the present invention, so as to facilitate understanding, the following Figure 1-5 The present invention is described in detail through specific embodiments. Figure 1 The orientation is referenced.

[0043] Example 1:

[0044] Reference Figure 1An embodiment of the present invention provides a quartz crucible production device, comprising a mold 1 and a water jacket 2 provided on the outside of the mold 1, wherein a closed vacuum chamber A is formed between the mold 1 and the water jacket 2, and a vent plug is distributed on the mold 1; the mold 1 comprises an annular side wall 101, a bottom wall 102 and a connecting wall 103, wherein the annular side wall 101 and the bottom wall 102 are connected by the connecting wall 103, so that the mold 1 forms a molding cavity with an open side; the vacuum chamber A comprises a mutually independent side wall chamber A1, a transition chamber A2 and a bottom chamber A3, wherein the side wall chamber A1 corresponds to the annular side wall 101, the transition chamber A2 corresponds to the connecting portion, and the bottom chamber A3 corresponds to the bottom wall 102; the quartz crucible production device further comprises a vacuum pump 3, wherein the side wall chamber A1, the transition chamber A2 and the bottom chamber A3 are all connected to the vacuum pump 3 and can independently adjust the vacuum degree.

[0045] During the quartz crucible forming process, the mold 1 and the water jacket 2 need to operate synchronously to generate centrifugal force on the quartz sand so that it can evenly adhere to the inner wall of the mold 1 and melt the quartz sand by heating.

[0046] The mold 1 is provided with air-permeable plugs, which are used to connect the molding cavity with the vacuum cavity A so as to discharge the air between the molten quartz sand and the mold 1 .

[0047] In this embodiment, the vacuum chamber A is divided into three parts, namely the side wall chamber A1, the transition chamber A2, and the bottom chamber A3. During the centrifugation of the quartz sand, the centrifugal force exerted on the quartz sand itself is different due to the different radii relative to the cross section of the mold 1. Therefore, different centrifugal forces need to be applied to different positions of the quartz sand that are sensitive to different centrifugal forces, so that the side wall chamber A1, the transition chamber A2, and the bottom chamber A3 can all reach the ideal negative pressure value.

[0048] Because the negative pressure values ​​of the side wall cavity A1, the transition cavity A2, and the bottom cavity A3 can highly match the actual requirements of the quartz sand, there will be no problem of excessive vacuum increasing the number of bubbles in the molten quartz, or insufficient vacuum failing to expel the bubbles generated by the molten quartz sand. The bubbles generated during the quartz melting process are fully discharged, thereby improving the quality of the quartz crucible.

[0049] At the same time, the present invention divides the original vacuum chamber A without changing the basic structure of the original mold 1 and the water jacket 2, which is conducive to improving the existing production equipment and reducing the cost of the entire production equipment.

[0050] Example 2:

[0051] Reference Figure 1 、 Figure 2 and Figure 3 In addition to all the technical solutions of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0052] A rotating shaft 4 extends from the water jacket 2; the quartz crucible production device also includes a vacuum distributor 5, which is integrated with the rotating shaft 4; the vacuum distributor 5 includes a shell 51, which is arranged on the frame, and the rotating shaft 4 passes through the shell 51. Three independent air chambers B are formed between the shell 51 and the rotating shaft 4, and the air chambers B are connected to the vacuum pump 3; the quartz crucible production device also includes three gas output channels 6, one end of the three gas channels 6 is connected to the side wall cavity A1, the transition cavity A2 and the bottom cavity A3 in a one-to-one correspondence, and the other end of the three gas channels 6 is connected to the three air chambers B in a one-to-one correspondence.

[0053] In this embodiment, the mold 1 and the water jacket 2 are driven by the rotating shaft 4, and the vacuum distributor 5 is also integrated on the rotating shaft 4, which can significantly improve the space utilization of the quartz crucible production device and make its overall structure more compact.

[0054] During the production process of the quartz crucible, the rotating shaft 4 has an operating condition, and the vacuum distributor 5 needs to be highly matched with this condition. One end of the three gas channels 6 is connected to the side wall cavity A1, the transition cavity A2 and the bottom cavity A3, and the other end of the three gas channels 6 is connected to the three gas chambers B.

[0055] The shell 51 is fixed relative to the frame, and the rotating shaft 4 can rotate relative to the shell 51. Moreover, during the rotation of the rotating shaft 4, the position of the air chamber B of the shell 51 relative to the shell 51 remains unchanged. Therefore, by connecting the air chamber B to the vacuum pump 3, independent control of the vacuum degree of the side wall cavity A1, the transition cavity A2 and the bottom cavity A3 can be achieved.

[0056] In this embodiment, by providing the vacuum distributor 5, the negative pressure control working condition of the vacuum pump 3 can be matched with the operating conditions of the mold 1 and the water jacket 2, thereby improving the reliability of the quartz crucible production device. Because the reliability of the quartz crucible can be guaranteed, the overall quality of the produced quartz crucible can be further improved.

[0057] Example 3:

[0058] Reference Figure 1 、 Figure 2 and Figure 3 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0059] The gas channel 6 first extends to the interior of the rotating shaft 4 and then extends out of the rotating shaft 4, so that there are three gas ports on the side wall of the rotating shaft 4; the three air chambers B are arranged along the axial direction of the shell 51, and the gas ports and the air chambers B correspond to each other and remain connected.

[0060] In this embodiment, the gas channel 6 extends into the rotating shaft 4, and the rotating shaft 4 is used as a part of the gas channel 6, thereby improving the structural compactness of the vacuum distributor 5, and the gas channel 6 finally forms three gas ports on the rotating shaft 4, and the three gas ports correspond to the three air chambers B one by one. The gas ports are arranged along the axis of the rotating shaft 4, and the corresponding air chambers B are also arranged along the axis of the rotating shaft 4, which can more fully utilize the space around the rotating shaft 4, thereby further improving the structural compactness of the vacuum distributor 5.

[0061] Example 4:

[0062] Reference Figure 1 、 Figure 2 and Figure 3 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0063] The vacuum distributor 5 also includes a sealing assembly 52, which seals the shell 51 and the rotating shaft 4 to form three independent air chambers B; the sealing assembly 52 includes an inner sealing ring 521 and an outer sealing ring 522, the inner sealing ring 521 is directly or indirectly connected to the rotating shaft 4, and the outer sealing ring 522 is directly or indirectly connected to the shell 51, and the contact surfaces of the inner sealing ring 521 and the outer sealing ring 522 abut against each other.

[0064] In this embodiment, the sealing assembly 52 is used to establish a seal between the shell 51 and the rotating shaft 4, so that three independent air chambers B can be formed between the two, while ensuring the sealing between adjacent air chambers B and between the air chambers B and the external environment, thereby improving the stability and accuracy of the vacuum degree control of the side wall cavity A1, the transition cavity A2 and the bottom cavity A3.

[0065] The sealing assembly 52 includes an inner sealing ring 521 and an outer sealing ring 522. The inner sealing ring 521 can be directly connected to the outer periphery of the rotating shaft 4, and the outer sealing ring 522 can be directly connected to the housing 51, and the contact surfaces of the two abut against each other to achieve contact sealing.

[0066] Specifically, the inner sealing ring 521 and the outer sealing ring 522 may both be graphite rings.

[0067] Example 5:

[0068] Reference Figure 1 、 Figure 2 and Figure 3 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0069] The contact surface between the inner sealing ring 521 and the outer sealing ring 522 is set to a conical surface; the sealing assembly 52 also includes a connecting seat 523 and a spring 524, the connecting seat 523 is provided with a mounting groove C, the spring 524 is arranged in the mounting groove C, and the connecting seat 523 is connected to the inner wall of the shell 51; a sliding portion D extends from the outer sealing ring 522, and the sliding portion D is slidably installed in the mounting groove C and then squeezes the spring 524, so that the spring 524 applies elastic force to the sliding portion D, and then applies a force to the outer sealing ring 522 so that the contact surfaces of the outer sealing ring 522 and the inner sealing ring 521 abut against each other.

[0070] In this embodiment, the contact surface of the inner sealing ring 521 and the outer sealing ring 522 is set to a conical surface, and the sealing surface is made to be in elastic contact, which can ensure that after the inner sealing ring 521 and the outer sealing ring 522 are worn, a reliable seal is still maintained between the two, greatly reducing the maintenance frequency of the sealing assembly 52, and further improving the stability and accuracy of the vacuum degree control of the side wall cavity A1, the transition cavity A2 and the bottom cavity A3.

[0071] Moreover, since the inner sealing ring 521 and the outer sealing ring 522 maintain elastic contact, the magnitude of the contact stress on the contact surface of the two can be highly controllable by changing the elastic force applied by the spring 524 to the outer sealing ring 522, thereby finding a balance between sealing performance and service life, so that a suitable magnitude of contact stress is formed between the inner sealing ring 521 and the outer sealing ring 522, and an appropriate degree of sealing performance is obtained.

[0072] Specifically, the connecting seat 523 is annular, and a plurality of springs 524 can be evenly distributed in the installation groove C.

[0073] Example 6:

[0074] Reference Figure 3 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0075] The sealing assembly 52 further includes a sliding sealing ring 525 , which is disposed between the sliding portion D and the mounting groove C to establish a sliding seal between the sliding portion D and the mounting groove C.

[0076] By additionally providing a sliding sealing ring 525 between the sliding portion D and the mounting groove C, the sealing performance between the two can be further improved, thereby further improving the independence and airtightness of the air chamber B.

[0077] Specifically, the sliding sealing ring 525 can be configured as an O-type rubber ring.

[0078] Example 7:

[0079] Figure 1In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0080] The vacuum distributor 5 further includes a regulating valve 53 , and the output port of each air chamber B to the vacuum pump 3 is connected to a regulating valve 53 .

[0081] In this embodiment, the regulating valve 53 is used to adjust the vacuum flow rate, and is connected to the vacuum pump 3. The vacuum flow rate adjustment can be combined with the vacuuming process to achieve precise vacuum control.

[0082] Specifically, the regulating valve 53 can be configured as an adjustable vacuum switch.

[0083] Example 8:

[0084] Reference Figure 1 、 Figure 4 and Figure 5 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0085] The quartz crucible production device also includes two sets of sealing pressure rings 7; when the mold 1 is assembled in the water jacket 2, the two sets of sealing pressure rings 7 are pressed tightly at corresponding positions between the water jacket 2 and the mold 1 to establish a sealing relationship between the side wall cavity A1 and the transition cavity A2, and between the transition cavity A2 and the bottom cavity A3.

[0086] In this embodiment, two sets of sealing rings 7 are used to divide the vacuum chamber A into three chambers, forming a side wall chamber A1, a transition chamber A2 and a bottom chamber A3, while also ensuring the sealing performance between adjacent chambers.

[0087] After the water jacket 2 and the mold 1 are assembled, the two sets of sealing pressure rings 7 are directly or indirectly pressed by the water jacket 2 and the mold 1, so that the sealing pressure rings 7 fit tightly with their corresponding contact surfaces, thereby establishing a seal between adjacent chambers.

[0088] Specifically, the sealing pressure ring 7 can be a graphite disk.

[0089] Example 9:

[0090] Reference Figure 1 、 Figure 4 and Figure 5 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0091] The quartz crucible production device also includes an annular plate 8 and a bottom support rod 9, both of which are connected to the water jacket 2. The annular plate 8 extends horizontally, and the bottom support rod 9 extends vertically. The bottom support rod 9 supports one end of the annular plate 8. The annular plate 8 is abutted against the connection between the bottom wall 102 and the connecting wall 103 through a set of sealing pressure rings 7. The annular plate 8 extends from the bottom wall 102 toward the water jacket 2.

[0092] In this embodiment, the quartz crucible production device also includes an annular plate 8 and a bottom support rod 9. The bottom wall 102 extends from the annular plate 8. A set of sealing pressure rings 7 are compressed between the connection between the bottom wall 102 and the connecting wall 103 and the annular plate 8, thereby establishing a seal between the bottom chamber A3 and the transition chamber A2.

[0093] The annular plate 8 not only supports the mold 1 and improves the stability of the mold 1 in the water jacket 2, but also cooperates with the sealing pressure plate to achieve sealing between the bottom cavity A3 and the transition cavity A2. Therefore, the sealing between the bottom cavity A3 and the transition cavity A2 can be ensured without the need for additional related components, which is conducive to further improving the structural compactness of the quartz crucible production device and reducing production costs.

[0094] Example 10:

[0095] Reference Figure 1 、 Figure 4 and Figure 5 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0096] The quartz crucible production device also includes a first connecting ring 10 and a second connecting ring 11, which are respectively connected to the mold 1 and the water jacket 2, and another set of sealing pressure rings 7 are arranged between the first connecting ring 10 and the second connecting ring 11 to establish a sealing relationship between the side wall cavity A1 and the transition cavity A2.

[0097] In this embodiment, a first connecting ring 10 and a second connecting ring 11 are respectively provided on the mold 1 and the water jacket 2, and another set of sealing pressure rings 7 are provided between the two. When the sealing pressure rings 7 are tightened, the sealing between the side wall cavity A1 and the transition cavity A2 can be achieved.

[0098] Specifically, a ring groove can be set on the component for installing the sealing pressure ring 7. For example, the cross-sectional area of ​​the sealing pressure ring 7 is set to 15*20mm, and grooves with a depth of 10mm and a width of 17mm are opened on the first connecting ring 10 and the second connecting ring 11. During installation, the sealing pressure ring 7 is embedded in the groove, with 10mm exposed outside to ensure the sealing degree of the graphite packing.

[0099] It can be understood that, except for any conflicting parts, the above-mentioned embodiments 1-10 can be freely combined to form other implementation methods of the present invention.

[0100] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0101] In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "connect," "fixed," etc. should be understood broadly. For example, they may refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0102] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0103] The term "comprise" or any other similar term is intended to cover non-exclusive inclusion, such that a process, article, or apparatus / device that comprises a list of elements includes not only those elements but also other elements not expressly listed or inherent to such process, article, or apparatus / device.

[0104] Thus far, the technical solutions of the present invention have been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the scope of protection of the present invention is obviously not limited to these specific embodiments. Without departing from the principles of the present invention, those skilled in the art may make equivalent changes or substitutions to the relevant technical features, and the technical solutions after such changes or substitutions will fall within the scope of protection of the present invention.

Claims

1. A quartz crucible production device, comprising a mold (1) and a water jacket (2) arranged outside the mold (1), wherein a closed vacuum chamber (A) is formed between the mold (1) and the water jacket (2), the mold (1) comprising an annular side wall (101), a bottom wall (102) and a connecting wall (103), the annular side wall (101) and the bottom wall (102) being connected via the connecting wall (103), so that the mold (1) forms a molding cavity with one side being open; characterized in that: The vacuum chamber (A) comprises a side wall chamber (A1), a transition chamber (A2) and a bottom chamber (A3) that are independent of each other, the side wall chamber (A1) corresponds to the annular side wall (101), the transition chamber (A2) corresponds to the connecting wall (103), and the bottom chamber (A3) corresponds to the bottom wall (102); The quartz crucible production device further comprises a vacuum pump (3), wherein the vacuum pump (3) is connected to the side wall cavity (A1), the transition cavity (A2), and the bottom cavity (A3), respectively, so as to independently adjust the vacuum degree of the three; A rotating shaft (4) extends from the water jacket (2); The quartz crucible production device further comprises a vacuum distributor (5), wherein the vacuum distributor (5) is integrated with the rotating shaft (4); The vacuum distributor (5) comprises a shell (51), the shell (51) is arranged on a frame, the rotating shaft (4) rotatably passes through the shell (51), and three independent air chambers (B) are formed between the shell (51) and the rotating shaft (4), and the air chambers (B) are communicated with the vacuum pump (3); The vacuum distributor (5) further comprises a sealing assembly (52), wherein the housing (51) and the rotating shaft (4) are sealed by the sealing assembly (52) to form three independent air chambers (B); The sealing assembly (52) includes an inner sealing ring (521) and an outer sealing ring (522), wherein the inner sealing ring (521) is directly or indirectly connected to the rotating shaft (4), and the outer sealing ring (522) is directly or indirectly connected to the housing (51), and the contact surfaces of the inner sealing ring (521) and the outer sealing ring (522) abut against each other to form a sliding seal; The sealing assembly (52) further includes a connecting seat (523) and a spring (524); a mounting groove (C) is provided on the connecting seat (523); the spring (524) is disposed in the mounting groove (C); and the connecting seat (523) is connected to the inner wall of the housing (51); A sliding portion (D) extends from the outer sealing ring (522), and the sliding portion (D) is slidably installed in the installation groove (C) and then squeezes the spring (524), so that the spring (524) applies an elastic force to the sliding portion (D), thereby applying a force to the outer sealing ring (522) so that the contact surfaces of the outer sealing ring (522) and the inner sealing ring (521) abut against each other.

2. The quartz crucible production device according to claim 1, wherein: The quartz crucible production device further includes three gas output channels (6), one end of the three gas channels (6) is connected to the side wall cavity (A1), the transition cavity (A2) and the bottom cavity (A3) in a one-to-one correspondence, and the other end of the three gas channels (6) is connected to the three gas chambers (B) in a one-to-one correspondence.

3. The quartz crucible production device according to claim 2, characterized in that: The gas channel (6) first extends to the interior of the rotating shaft (4) and then extends out of the rotating shaft (4), so that the side wall of the rotating shaft (4) has three gas ports; The three air chambers (B) are arranged along the axial direction of the shell (51), and the air ports are in one-to-one correspondence with the air chambers (B) and are kept in communication.

4. The quartz crucible production device according to claim 3, wherein: The sealing assembly (52) further includes a sliding sealing ring (525), which is arranged between the sliding portion (D) and the mounting groove (C) to establish a sliding seal between the sliding portion (D) and the mounting groove (C).

5. The quartz crucible production device according to claim 2, wherein: The vacuum distributor (5) further comprises a regulating valve (53), and the output port of each air chamber (B) to the vacuum pump (3) is connected to the regulating valve (53).

6. The quartz crucible production device according to claim 1, wherein: The quartz crucible production device also includes two sets of sealing pressure rings (7); When the mold (1) is assembled on the water jacket (2), the two sets of sealing pressure rings (7) are pressed tightly at corresponding positions between the water jacket (2) and the mold (1) to establish a sealing relationship between the side wall cavity (A1) and the transition cavity (A2), and between the transition cavity (A2) and the bottom cavity (A3).

7. The quartz crucible production device according to claim 6, characterized in that: The quartz crucible production device also includes an annular plate (8) and a bottom support rod (9) both connected to the water jacket (2), wherein the annular plate (8) extends laterally, and the bottom support rod (9) extends vertically, and the bottom support rod (9) supports one end of the annular plate (8), and the annular plate (8) abuts against the connection between the bottom wall (102) and the connecting wall (103) through a group of the sealing pressure rings (7), and the bottom wall (102) extends the annular plate (8) toward the water jacket (2).

8. The quartz crucible production device according to claim 7, wherein: The quartz crucible production device further comprises a first connecting ring (10) and a second connecting ring (11), wherein the first connecting ring (10) is connected to the mold (1), and the second connecting ring (11) is connected to the water jacket (2), and another set of sealing pressure rings (7) is arranged between the first connecting ring (10) and the second connecting ring (11) to establish a sealing relationship between the side wall cavity (A1) and the transition cavity (A2).

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