Phase shifter and method of manufacturing the same

Abstract

The application provides a phase shifter and a preparation method thereof, and relates to the technical field of micro electro mechanical systems. The phase shifter can reduce the adhesion caused by water droplets, thereby improving the product performance and improving the reliability of working in a humid environment. The phase shifter comprises a substrate, a first wire and a second wire arranged on one side of the substrate, the two opposite sides of the first wire are respectively provided with the second wire, the first wire and the second wire are arranged in parallel and are insulated from each other, a hydrophobic conductive part, the hydrophobic conductive part is arranged in cross with the first wire and is insulated from each other, at least one end of the hydrophobic conductive part is overlapped with the second wire on one side of the first wire and is insulated from each other, and a hydrophilic part, the minimum distance between the orthographic projection of the hydrophilic part on the substrate and the orthographic projection of the part of the hydrophobic conductive part which does not overlap with the second wire on the substrate along the first direction is less than or equal to a preset value, and the first direction is parallel to the arrangement direction of the first wire.

Description

Technical Field

[0001] This application relates to the field of microelectromechanical systems (MEMS) technology, and in particular to a phase shifter and its fabrication method. Background Technology

[0002] With the rapid development of the information age, wireless terminals featuring high integration, miniaturization, multifunctionality, and low cost are gradually becoming the trend in communication technology. In communication and radar applications, phase shifters are essential key components. MEMS (Micro-Electro-Mechanical System) phase shifters have significant advantages in insertion loss, power consumption, size, and cost, and have received widespread attention in fields such as radio communication and microwave technology. However, MEMS phase shifters are prone to adhesion when operating in humid environments, thus reducing product reliability and quality. Summary of the Invention

[0003] The embodiments of this application adopt the following technical solutions:

[0004] On the one hand, a phase shifter is provided, comprising:

[0005] Base;

[0006] A first trace and a second trace are provided on one side of the substrate; the second trace is provided on opposite sides of the first trace, the first trace and the second trace are arranged in parallel and are insulated from each other;

[0007] A hydrophobic conductive part; the hydrophobic conductive part is intersected with the first trace and is insulated from it; at least one end of the hydrophobic conductive part overlaps with the second trace located on one side of the first trace and is insulated from it;

[0008] The hydrophilic portion has a minimum distance along a first direction between its orthographic projection on the substrate and the orthographic projection of the portion of the hydrophobic conductive portion that does not overlap with the second trace on the substrate. This first direction is parallel to the setting direction of the first trace.

[0009] Optionally, the orthographic projection of the hydrophilic portion on the substrate is disposed on at least one side of the orthographic projection of the hydrophobic conductive portion on the substrate.

[0010] Optionally, the hydrophilic portion is disposed on one side of the substrate and in the region between the first trace and the second trace.

[0011] Optionally, the first trace includes a first side and a second side, the area between the first side of the first trace and the second trace disposed on the first side of the first trace is a first area, and the area between the second side of the first trace and the second trace disposed on the second side of the first trace is a second area.

[0012] The hydrophilic part includes multiple hydrophilic units; the multiple hydrophilic units are divided into two groups, with the first group of hydrophilic units located in the first region and the second group of hydrophilic units located in the second region.

[0013] Optionally, each group of hydrophilic units is divided into a first part and a second part. The orthographic projection of the hydrophilic unit in the first part onto the substrate is located on the first side of the orthographic projection of the hydrophobic conductive part onto the substrate. The orthographic projection of the hydrophilic unit in the second part onto the substrate is located on the second side of the orthographic projection of the hydrophobic conductive part onto the substrate, opposite to the first side.

[0014] Optionally, the hydrophilicity of each part of the hydrophilic unit in each group is consistent.

[0015] Optionally, in each part of the hydrophilic units in each group, the plurality of hydrophilic units arranged along the second direction do not contact each other, and the second direction intersects with the first direction.

[0016] Optionally, each part of the hydrophilic unit group includes two hydrophilic units arranged along the second direction and spaced apart by a first distance, wherein the first distance is less than or equal to the height of the hydrophobic conductive part, and the height of the hydrophobic conductive part is the distance between the hydrophobic conductive part and the first trace when the hydrophobic conductive part is not energized.

[0017] Optionally, in each portion of the hydrophilic unit in each group, the hydrophilic unit includes a hydrophilic layer whose hydrophilicity decreases along the direction away from the hydrophobic conductive portion and towards the hydrophobic conductive portion.

[0018] Optionally, the hydrophilic layer includes a first hydrophilic sublayer and a second hydrophilic sublayer, wherein the first hydrophilic sublayer is farther away from the hydrophobic conductive portion than the second hydrophilic sublayer, and the contact angle of the first hydrophilic sublayer is smaller than the contact angle of the second hydrophilic sublayer.

[0019] Optionally, the contact angle of the first hydrophilic sublayer is A, where A ≤ 10°; and the contact angle of the second hydrophilic sublayer is B, where 20° ≤ B ≤ 65°.

[0020] Optionally, the phase shifter further includes a first hydrophobic portion, which is disposed on one side of the substrate and located in the region between the first trace and the second trace;

[0021] The orthographic projection of the first hydrophobic portion on the substrate is located within the orthographic projection of the hydrophobic conductive portion on the substrate.

[0022] Optionally, the contact angle of the first hydrophobic portion is C, where 170°≤C≤180°.

[0023] Optionally, the first hydrophobic portion includes a plurality of hydrophobic units arranged in an array.

[0024] Optionally, the hydrophilic portion is arranged to cross the first trace and is insulated from it; at least one end of the hydrophilic portion overlaps with the second trace located on one side of the first trace and is insulated from it.

[0025] Optionally, the two ends of the hydrophilic portion overlap with the second wiring located on both sides of the first wiring and are mutually insulated;

[0026] One end of the hydrophobic conductive part overlaps with the second trace located on one side of the first trace and is insulated from each other, while the other end is suspended.

[0027] Optionally, the height of the hydrophilic portion is 0.1-10 micrometers lower than the height of the hydrophobic conductive portion; wherein, the height of the hydrophilic portion is the distance between the hydrophilic portion and the first trace; and the height of the hydrophobic conductive portion is the distance between the hydrophobic conductive portion and the first trace when the hydrophobic conductive portion is not energized.

[0028] Optionally, the hydrophilic portion is provided on both sides of the orthographic projection of the hydrophobic conductive portion onto the substrate.

[0029] Optionally, the phase shifter further includes a second hydrophobic portion disposed on one side of the substrate and located in the region between the first trace and the second trace.

[0030] Optionally, the hydrophobic conductive portion includes a conductive layer and a hydrophobic layer covering the exposed portion of the conductive layer.

[0031] On the other hand, a method for fabricating the above-mentioned phase shifter is provided, comprising:

[0032] Provide a base;

[0033] A first trace and a second trace are formed on the substrate; wherein, the second trace is respectively arranged on opposite sides of the first trace, and the first trace and the second trace are arranged in parallel and insulated from each other;

[0034] A hydrophobic conductive portion is formed; wherein the hydrophobic conductive portion is intersected with the first trace and is insulated from it; at least one end of the hydrophobic conductive portion overlaps with the second trace located on one side of the first trace and is insulated from it;

[0035] A hydrophilic portion is formed; wherein, the minimum distance between the orthographic projection of the hydrophilic portion on the substrate and the orthographic projection of the portion of the hydrophobic conductive portion that does not overlap with the second trace on the substrate along a first direction is less than or equal to a preset value, and the first direction is parallel to the setting direction of the first trace.

[0036] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description

[0037] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 A schematic 45° top view of the first phase shifter is shown;

[0039] Figure 2 For along Figure 1 A cross-sectional view in the CC direction;

[0040] Figure 3 for Figure 1 A 90° top view of the phase shifter shown;

[0041] Figure 4 A schematic 45° top view of the second type of phase shifter is shown;

[0042] Figure 5 for Figure 4 A 90° top view of the phase shifter shown;

[0043] Figure 6 A schematic 45° top view of the third type of phase shifter is shown;

[0044] Figure 7 for Figure 6 A 90° top view of the phase shifter shown;

[0045] Figure 8 A schematic 45° top view of the fourth type of phase shifter is shown;

[0046] Figure 9 for Figure 8 A 90° top view of the phase shifter shown;

[0047] Figure 10 for Figure 8 The diagram shows the structure of the phase shifter as viewed along the OA direction.

[0048] Figure 11 A schematic 45° top view of the fifth type of phase shifter is shown;

[0049] Figure 12 for Figure 11 A 90° top view of the phase shifter shown;

[0050] Figure 13 This illustrates the principle by which water droplets move towards the hydrophilic unit. Detailed Implementation

[0051] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0052] In the embodiments of this application, the terms "first," "second," etc., are used to distinguish identical or similar items with substantially the same function and effect, solely for the purpose of clearly describing the technical solutions of the embodiments of this application, and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Furthermore, "multiple" means two or more, and "at least one" means one or more, unless otherwise explicitly defined.

[0053] Embodiments of this application provide a phase shifter, with reference to... Figure 1 and Figure 10 As shown, it includes:

[0054] Substrate 10; the material of the substrate may include semiconductor materials such as silicon nitride, silicon oxide, silicon or gallium nitride, and may be prepared by methods such as magnetron sputtering or chemical vapor deposition.

[0055] A first trace 1 and a second trace 2 are provided on one side of the base 10; the second trace 2 are provided on opposite sides of the first trace 1, and the first trace 1 and the second trace 2 are arranged in parallel and insulated from each other.

[0056] The hydrophobic conductive part 3 is arranged to cross the first trace 1 and is insulated from each other; at least one end of the hydrophobic conductive part 3 is connected to the second trace 2 located on one side of the first trace 1 and is insulated from each other.

[0057] Hydrophilic parts (including) Figure 1 The minimum distance between the orthographic projection of the hydrophilic part on the substrate and the orthographic projection of the part of the hydrophobic conductive part that does not overlap with the second trace on the substrate along the first direction is less than or equal to a preset value. The first direction OA is parallel to the setting direction of the first trace 1.

[0058] It should be noted that the aforementioned hydrophobic conductive part is configured such that, when no power is applied, there is a gap between the hydrophobic conductive part and the first trace, and they do not contact each other; when power is applied, the hydrophobic conductive part deforms towards the side closer to the first trace.

[0059] The structure of the hydrophobic conductive part described above is not limited. For example, the hydrophobic conductive part may include a hydrophobic conductive bridge, which is a simply supported beam structure, i.e., refer to Figure 1 As shown, the two ends of the hydrophobic conductive part 3 overlap with the second traces 2 located on both sides of the first trace 1 and are mutually insulated. Alternatively, the hydrophobic conductive part may include a hydrophobic cantilever beam, see reference. Figure 8 As shown, one end of the hydrophobic conductive part 3 overlaps with the second trace 2 located on one side of the first trace 1 and they are insulated from each other, while the other end is suspended.

[0060] The aforementioned hydrophobic and conductive parts possess both hydrophobic and conductive properties. Their structure is not limited; examples are provided for reference. Figure 2 As shown, the hydrophobic conductive part 3 includes a conductive layer 31 and a hydrophobic layer 32 covering the exposed portion of the conductive layer 31. The conductive layer can be made of metals such as copper, aluminum, or gold, and can be prepared by methods such as magnetron sputtering, thermal evaporation, or electroplating. The hydrophobic layer can be made of fluorine-containing materials such as fluorocarbons, for example, perfluorooctanoic acid (PFOA), and can be prepared by methods such as liquid phase deposition (e.g., liquid phase self-assembly), electrodeposition, or solid phase deposition (e.g., chemical vapor deposition). The contact angle of the hydrophobic layer can be greater than 90°, for example, 95°, 100°, 130°, 150°, or 170°, etc. The contact angle refers to the angle formed at the solid-liquid-gas three-phase interface point on the solid surface when a droplet is placed on a solid horizontal plane, where the liquid phase is sandwiched between the two tangents of the gas-liquid interface and the solid-liquid interface. The contact angle can be measured by relevant instruments.

[0061] The aforementioned hydrophilic portion is hydrophilic, and its structure is not limited. For example, the hydrophilic portion may include, for instance, the following: Figure 1 and Figure 4 The hydrophilic unit 40 shown is disposed on one side of the substrate; or, as shown... Figure 11As shown, the hydrophilic part 4 may also include a hydrophilic simply supported beam structure. The specific material of the hydrophilic part is not limited; for example, it may include hydrophilic materials such as silicon dioxide or silicon nitride. The contact angle of the hydrophilic part is less than or equal to 65°, for example: 10°, 30°, 50°, 60°, or 65°, etc.

[0062] The minimum distance along the first direction between the orthographic projection of the hydrophilic portion on the substrate and the orthographic projection of the portion of the hydrophobic conductive portion that does not overlap with the second trace on the substrate (e.g.: Figure 3 , Figure 5 , Figure 9 and Figure 12 The distance L shown is less than or equal to a preset value, which can be selected according to the actual situation. For example, the preset value can be 60 micrometers, and the minimum distance can be 0 micrometers, 10 micrometers, 20 micrometers, 30 micrometers, 40 micrometers, or 50 micrometers, etc. If the minimum distance is too large, it will be difficult for the hydrophilic part to draw water vapor and water droplets out from the area where the hydrophobic conductive part is located; if it is too small, the influence of water vapor and water droplets on the phase shifter cannot be completely avoided.

[0063] The materials for the first and second traces mentioned above may include metals such as copper, aluminum, or gold, or conductive metal oxides such as indium tin oxide or zinc oxide. Specifically, they may be prepared by methods such as magnetron sputtering, thermal evaporation, or electroplating.

[0064] To ensure that the hydrophobic conductive part is insulated from the first trace, the phase shifter may further include, for example, Figure 2 The first insulating part 5 shown is disposed on the side of the first trace 1 near the hydrophobic conductive part 3. To ensure that the hydrophobic conductive part and the second trace are mutually insulated, the phase shifter may further include, for example... Figure 2 The second insulating portion 6 is shown, and it is disposed on the side of the second trace 2 near the hydrophobic conductive portion 3. The materials of the first insulating portion and the second insulating portion can be insulating materials such as silicon nitride or silicon oxide, and can be prepared by methods such as magnetron sputtering or chemical vapor deposition.

[0065] The first trace described above can be used as a coplanar waveguide (CPW) signal line, and the second trace described above can be used as a coplanar waveguide ground line. The first and second traces work together to form a coplanar waveguide transmission line. The phase shifting principle of this phase shifter is as follows: When the hydrophobic conductive part is not energized (i.e., no driving voltage is applied), there is a gap between the hydrophobic conductive part and the first insulating part, and they do not contact each other. High-frequency signals do not change phase when passing through the phase shifter. When the hydrophobic conductive part is energized (i.e., a driving voltage is applied), the hydrophobic conductive part deforms towards the side closer to the first insulating part under the action of electrostatic force. When the driving voltage is large enough, the electrostatic force pulls the hydrophobic conductive part down to contact the first insulating part. After the hydrophobic conductive part deforms, the distance between the hydrophobic conductive part and the first trace changes, thereby changing the distributed capacitance of the coplanar waveguide transmission line, thus making the coplanar waveguide transmission line a slow-wave system, achieving the purpose of phase delay.

[0066] In this application, if water droplets are generated in the area where the hydrophobic conductive part is located, the water droplets will be attracted to the area where the hydrophilic part is located because the hydrophobic conductive part is hydrophobic and the hydrophilic part is hydrophilic. This reduces the adhesion caused by the water droplets, thereby improving product performance and enhancing reliability in humid environments.

[0067] In one or more embodiments, the orthographic projection of the hydrophilic portion onto the substrate is disposed on at least one side of the orthographic projection of the hydrophobic conductive portion onto the substrate; however, to maximize the protection of the hydrophobic conductive portion and prevent adhesion problems caused by water droplets, the orthographic projection of the hydrophilic portion onto the substrate is disposed on both sides of the orthographic projection of the hydrophobic conductive portion onto the substrate. In this case, the two side regions of the hydrophobic conductive portion (i.e., Figure 1 Hydrophilic parts are provided on both the upper and lower sides (as shown in the second direction OB).

[0068] The following provides a structure for the hydrophilic part.

[0069] Optional, see reference Figure 1 , Figure 4 , Figure 6 and Figure 8 As shown, the hydrophilic part is disposed on one side of the substrate and in the area between the first trace 1 and the second trace 2.

[0070] Optionally, the first trace includes a first side and a second side, and the area between the first side of the first trace and the second trace disposed on the first side of the first trace is a first area (e.g.: Figure 1 , Figure 4 , Figure 6 and Figure 8 As shown in D1), the area between the second side of the first trace and the second trace located on the second side of the first trace is the second area (e.g.: Figure 1 , Figure 4 , Figure 6 and Figure 8 As shown in D2).

[0071] The hydrophilic part includes multiple hydrophilic units (e.g.: Figure 1 , Figure 4 and Figure 8 As shown in 40); multiple hydrophilic units are divided into two groups, with the first group of hydrophilic units located in the first region (e.g.: Figure 1 , Figure 4 and Figure 8 As shown in D1), the second set of hydrophilic units is located in the second region (e.g.: Figure 1 , Figure 4 and Figure 8 As shown in D2).

[0072] The number of hydrophilic units in the first and second groups mentioned above can be the same or different, and this is not limited here. For example, the hydrophilic units in the first and second groups can be symmetrically distributed about the first line.

[0073] In this way, hydrophilic units are set on both sides of the first trace, which can guide water droplets on both sides of the first trace to the hydrophilic units, thereby avoiding the influence of water droplets on both sides of the first trace on the hydrophobic conductive bridge.

[0074] Further optionally, each group of hydrophilic units is divided into a first part (e.g.: Figure 1 , Figure 4 and Figure 8 As shown in 41) and the second part (e.g.: Figure 1 , Figure 4 and Figure 8 As shown in 42), the orthographic projection of the hydrophilic unit of the first part onto the substrate is located on the first side of the orthographic projection of the hydrophobic conductive part onto the substrate, and the orthographic projection of the hydrophilic unit of the second part onto the substrate is located on the second side of the orthographic projection of the hydrophobic conductive part onto the substrate opposite to the first side; thus, the two sides of the hydrophobic conductive part (i.e., Figure 1 Hydrophilic units are provided on both the upper and lower sides (as shown in the second direction OB) to further enhance the guiding effect on water droplets and direct them towards the hydrophilic units.

[0075] The number of hydrophilic units included in the first and second parts mentioned above may be the same or different, and this is not limited here. For example, the hydrophilic units included in the first and second parts may be distributed in a mirror-symmetric manner.

[0076] In some implementations, the hydrophilicity of the hydrophilic units is consistent across all portions of each group of hydrophilic units. These hydrophilic units, also known as hydrophilic synapses, can be made from the same hydrophilic material. For example, silicon nitride or silicon dioxide can be used.

[0077] Optionally, in each part of each group of hydrophilic units, refer to Figure 1 , Figure 4 and Figure 8 As shown, multiple hydrophilic units 40 arranged along the second direction OB do not contact each other, and the second direction OB intersects with the first direction OA; this facilitates water droplet flow, thus moving the water further away from the area where the hydrophobic conductive part is located. Here, the second direction and the first direction can intersect perpendicularly or not perpendicularly; no limitation is made here. The embodiments and accompanying drawings of this application are illustrated using the example of the second direction intersecting the first direction perpendicularly.

[0078] Alternatively, the opposing sides of the two hydrophilic units in each group of hydrophilic units may be flat or uneven.

[0079] When the opposing sides of the two hydrophilic units in each part of each group of hydrophilic units are flat, the side can be as follows: Figure 1 The straight or inclined plane shown is not limited here. To simplify the patterning process, the opposite sides of the two hydrophilic units in each group of hydrophilic units can be chosen to be flat.

[0080] When the opposing sides of the two hydrophilic units in each group of hydrophilic units are uneven, the side can be... Figure 4 and Figure 5 The serrated shape shown, or as... Figure 8 and Figure 9 The shape shown has multiple grooves, but it can also be other shapes; no limitation is made here.

[0081] The specific shape of the hydrophilic unit is not limited here. For example, the shape of the hydrophilic unit may include a cuboid, cylinder, frustum, or trapezoid, etc.

[0082] Optional, see reference Figure 3 , Figure 5 and Figure 9 As shown, each part of each group of hydrophilic units includes two hydrophilic units 40 arranged along the second direction OB and separated by a first distance L1. The first distance is less than or equal to the height of the hydrophobic conductive part. The height of the hydrophobic conductive part is the distance between the hydrophobic conductive part and the first trace when the hydrophobic conductive part is not energized.

[0083] According to relevant technologies, water droplets condense more easily in micrometer-scale hydrophilic narrow slits compared to hydrophobic surfaces. Therefore, it can be deduced that within the micrometer range, a first distance less than or equal to the height of the hydrophobic conductive part can better prevent water droplets from affecting the hydrophobic conductive part.

[0084] In some embodiments, in each part of each group of hydrophilic units, reference Figure 6 and Figure 7 As shown, the hydrophilic unit includes a hydrophilic layer 43 whose hydrophilicity decreases from the direction away from the hydrophobic conductive part to the direction closer to the hydrophobic conductive part, which can better guide water droplets away from the hydrophobic conductive part. Here, the hydrophilic layer can include materials with different hydrophilicities, and no specific limitation is made here.

[0085] Optional, see reference Figure 6 and Figure 7 As shown, the hydrophilic layer 43 includes a first hydrophilic sublayer 431 and a second hydrophilic sublayer 432. The first hydrophilic sublayer 431 is farther away from the hydrophobic conductive part 3 than the second hydrophilic sublayer 432, and the contact angle of the first hydrophilic sublayer is smaller than the contact angle of the second hydrophilic sublayer.

[0086] In order to better guide water droplets from the region near the hydrophobic conductive part to the region away from the hydrophobic conductive part, the contact angle of the first hydrophilic sublayer is A, where A ≤ 10°; and the contact angle of the second hydrophilic sublayer is B, where 20° ≤ B ≤ 65°.

[0087] The contact angle of the first hydrophilic sublayer can be 2°, 4°, 6°, 8° or 10°, etc., and the contact angle of the second hydrophilic sublayer can be 20°, 30°, 40°, 50°, 60° or 65°, etc.

[0088] If the contact angle of the first hydrophilic sublayer is smaller than that of the second hydrophilic sublayer, then the hydrophilicity of the first hydrophilic sublayer is stronger than that of the second hydrophilic sublayer. The region containing the first hydrophilic sublayer can be called the superhydrophilic region, and the region containing the second hydrophilic sublayer can be called the hydrophilic region. (Reference) Figure 13 As shown, the hydrophobic conductive part 3 has strong hydrophobicity, the hydrophilic unit 40 has strong hydrophilicity, region 101 is a region with strong hydrophobicity, and the hydrophilicity gradient of regions 102 and 103 increases. Under this structure, water droplets 100 move along... Figure 13 The arrow direction flows towards the hydrophilic unit 40, thus moving away from the hydrophobic conductive part 3. Figure 13 In the diagram, the substrate is marked as 10; here, we only use 10. Figure 13 The structure shown illustrates the principle.

[0089] The materials for the first and second hydrophilic sublayers are not limited here. For example, the material of the first hydrophilic sublayer may include fluorocarbon compounds, and the material of the second hydrophilic sublayer may also include fluorocarbon compounds. By changing the thickness of the compounds at the nanoscale, different hydrophilic and hydrophobic effects can be achieved.

[0090] In one or more embodiments, reference is made to Figure 6As shown, the phase shifter also includes a first hydrophobic portion 11, which is disposed on one side of the substrate and located in the region between the first trace 1 and the second trace 2; the orthographic projection of the first hydrophobic portion on the substrate is within the orthographic projection of the hydrophobic conductive portion on the substrate. In this way, the first hydrophobic portion is disposed directly below the hydrophobic conductive portion, which is more conducive to pushing water droplets directly below the hydrophobic conductive portion toward the hydrophilic portions on both sides.

[0091] Optionally, to ensure the hydrophobic effect of the first hydrophobic part, the contact angle of the first hydrophobic part is C, where 170°≤C≤180°. The contact angle of the first hydrophobic part can be 170°, 175°, or 180°, etc. The material of the first hydrophobic part is not limited here; for example, the material of the first hydrophobic part may include fluorocarbon compounds.

[0092] Further optionally, to further improve the hydrophobic effect of the first hydrophobic part, refer to Figure 6 As shown, the first hydrophobic section 11 includes a plurality of hydrophobic units 110 arranged in an array.

[0093] There are no restrictions on the shape and number of hydrophobic units here. For example, the shape of the hydrophobic unit can include cylinder, cube, frustum, or trapezoid, etc. To reduce the difficulty of manufacturing, cylindrical hydrophobic units can be used.

[0094] Another hydrophilic part structure is provided below.

[0095] refer to Figure 11 and Figure 12 As shown, the hydrophilic part 4 is intersected with the first wiring 1 and is insulated from each other; at least one end of the hydrophilic part 4 overlaps with the second wiring 2 located on one side of the first wiring 1 and is insulated from each other.

[0096] The hydrophilic part may include, for example: Figure 11 and Figure 12 The hydrophilic simply supported beam structure shown has its two ends of the hydrophilic part 4 overlapping and insulated from the second wiring 2 located on both sides of the first wiring 1. Alternatively, the hydrophilic part may include a hydrophilic cantilever beam, with one end overlapping and insulated from the second wiring located on one side of the first wiring, and the other end suspended. It should be noted that this hydrophilic part only serves a hydrophilic function and does not require electrical conduction.

[0097] The material of the hydrophilic part can include silicon nitride or silicon dioxide to ensure hydrophilic properties.

[0098] In some implementations, reference Figure 11 and Figure 12As shown, the two ends of the hydrophilic part 4 overlap with the second lines 2 located on both sides of the first line 1 and are insulated from each other; one end of the hydrophobic conductive part 3 overlaps with the second line 2 located on one side of the first line 1 and is insulated from each other, while the other end is suspended. At this time, the hydrophilic part is a hydrophilic simply supported beam structure, and the hydrophobic conductive part is a hydrophobic cantilever beam structure.

[0099] Optionally, the height of the hydrophilic portion is 0.1-10 micrometers lower than the height of the hydrophobic conductive portion; wherein, the height of the hydrophilic portion is the distance between the hydrophilic portion and the first trace; and the height of the hydrophobic conductive portion is the distance between the hydrophobic conductive portion and the first trace when the hydrophobic conductive portion is not energized.

[0100] The specific values ​​for the height of the hydrophilic part and the height of the hydrophobic conductive part are not limited here. For example, the height of the hydrophilic part can be 0.1-50 micrometers and the height of the hydrophobic conductive part can be 0.1-50 micrometers.

[0101] If the height of the hydrophilic part is higher than the height of the hydrophobic conductive part, adhesion will occur when the surface energy of the hydrophobic structure is higher than that of the hydrophilic structure. If the height of the hydrophilic part is much lower than the height of the hydrophobic conductive part, the protective effect is not obvious; if it is too little lower, there is a risk of adhesion. A protective effect can be achieved when the height of the hydrophilic part is 0.1-10 micrometers lower than the height of the hydrophobic conductive part.

[0102] Alternatively, to maximize the protection of the hydrophobic conductive parts and prevent adhesion problems caused by water droplets, refer to... Figure 11 and Figure 12 As shown, the hydrophobic conductive part 3 is projected onto the substrate on both sides by the orthogonal projection of the hydrophilic part 4 onto the substrate. At this time, the areas on both sides of the hydrophobic conductive part (i.e.,...) Figure 11 Hydrophilic parts 4 are provided on both the upper and lower sides (as shown in the second direction OB).

[0103] Optionally, to further improve the hydrophobic effect, refer to Figure 12 As shown, the phase shifter also includes a second hydrophobic section 12, which is disposed on one side of the substrate and located in the region between the first trace 1 and the second trace 2.

[0104] The material of the second hydrophobic portion is not limited here. For example, the material of the second hydrophobic portion may include fluorinated materials such as fluorocarbons, for example, perfluorooctanoic acid (PFOA). Specifically, it can be prepared by methods such as liquid phase deposition (e.g., liquid phase self-assembly), electrodeposition, or solid phase deposition (e.g., chemical vapor deposition). The contact angle of the hydrophobic portion can be greater than 90°, for example, 95°, 100°, 130°, 150°, or 170°, etc.

[0105] The aforementioned second hydrophobic section can cover the area between the first and second routing lines; or, the second hydrophobic section can be disposed in a portion of the area between the first and second routing lines, which is not limited here.

[0106] The structure of the second hydrophobic part is not limited. For example, the second hydrophobic part may include a hydrophobic layer, or the second hydrophobic part may include multiple hydrophobic units arranged in an array. Of course, it may also include other structures, which will not be listed here.

[0107] In one or more embodiments, to simplify the manufacturing process, refer to Figure 2 As shown, the hydrophobic conductive part includes a conductive layer 31 and a hydrophobic layer 32 covering the exposed portion of the conductive layer.

[0108] This hydrophobic conductive layer possesses both hydrophobic and conductive properties. The conductive layer can be made of metallic materials such as copper, aluminum, or gold, and can be prepared using methods such as magnetron sputtering, thermal evaporation, or electroplating. The hydrophobic layer can be made of fluorine-containing materials such as fluorocarbons, for example, perfluorooctanoic acid (PFOA), and can be prepared using methods such as liquid phase deposition (e.g., liquid phase self-assembly), electrodeposition, or solid phase deposition (e.g., chemical vapor deposition). The contact angle of this hydrophobic layer can be greater than 90°, for example, 95°, 100°, 130°, 150°, or 170°, etc.

[0109] Embodiments of this application also provide a method for fabricating the phase shifter as described above, comprising:

[0110] S01. Provide a substrate; the substrate material may include semiconductor materials such as silicon nitride, silicon oxide, silicon or gallium nitride, and may be prepared by methods such as magnetron sputtering or chemical vapor deposition.

[0111] S02. A first trace and a second trace are formed on the substrate; wherein, a second trace is respectively provided on both sides opposite to the first trace, and the first trace and the second trace are arranged in parallel and insulated from each other.

[0112] For example, the first and second traces can be formed by methods such as magnetron sputtering, thermal evaporation, or electroplating.

[0113] S03, forming a hydrophobic conductive part; wherein the hydrophobic conductive part is intersected with the first trace and is insulated from each other; at least one end of the hydrophobic conductive part overlaps with a second trace located on one side of the first trace and is insulated from each other.

[0114] The method of forming the hydrophobic conductive part is related to its structure. For example, if the hydrophobic conductive part includes a conductive layer and a hydrophobic layer covering the exposed part of the conductive layer, the conductive layer can be formed first by methods such as magnetron sputtering, thermal evaporation, or electroplating, and then the hydrophobic layer can be formed by methods such as liquid phase deposition (e.g., liquid phase self-assembly), electrodeposition, or solid phase deposition (e.g., chemical vapor deposition).

[0115] S04. Forming a hydrophilic portion; wherein the minimum distance between the orthographic projection of the hydrophilic portion on the substrate and the orthographic projection of the portion of the hydrophobic conductive portion that does not overlap with the second trace on the substrate along the first direction is less than or equal to a preset value, and the first direction is parallel to the setting direction of the first trace.

[0116] It should be noted that the execution order of steps S03 and S04 is not limited here, and needs to be determined in combination with the structure of the hydrophobic conductive part and the hydrophilic part.

[0117] By executing steps S01-S04 to form the phase shifter, if water droplets are generated in the area where the hydrophobic conductive part is located, the water droplets will be attracted to the area where the hydrophilic part is located because the hydrophobic conductive part is hydrophobic and the hydrophilic part is hydrophilic. This reduces the adhesion caused by the water droplets, thereby improving the performance of the phase shifter and enhancing its reliability in humid environments. This preparation method is simple and easy to implement.

[0118] The following is based on Figure 1 Taking the phase shifter structure shown as an example, a specific fabrication method is provided. This method includes:

[0119] S10. A silicon nitride layer is deposited on a silicon dioxide substrate using PECVD (plasma-enhanced chemical vapor deposition).

[0120] S11. Magnetron sputtering of metallic copper is used to deposit signal lines (i.e., the first trace) and ground lines (i.e., the second trace) in a patterned manner.

[0121] S12. Deposit silicon nitride insulating layers on the signal line and the ground line respectively to form a first insulating part and a second insulating part, wherein the first insulating part is disposed on the side of the first trace away from the silicon dioxide substrate, and the second insulating part is disposed on the side of the second trace away from the silicon dioxide substrate.

[0122] S13, forming a sacrificial layer.

[0123] S14. Deposit copper simply supported beams to form a conductive layer of hydrophobic conductive parts.

[0124] S15, depositing silica hydrophilic units to form the hydrophilic part.

[0125] S16. Use photoresist to protect the silicon dioxide hydrophilic unit and release the sacrificial layer.

[0126] S17. Low-pressure chemical vapor deposition (LPVCD) is used to deposit fluorocarbon polymers to hydrophobize the entire structure, thereby forming a hydrophobic conductive part.

[0127] S18. Peel off the photoresist to form a shape like... Figure 1 The phase shifter shown.

[0128] The terms "an embodiment," "embodiment," or "one or more embodiments" as used herein mean that a particular feature, structure, or characteristic described in connection with an embodiment is included in at least one embodiment of this application. Furthermore, please note that the examples of the phrase "in one embodiment" do not necessarily all refer to the same embodiment.

[0129] Numerous specific details are set forth in the specification provided herein. However, it will be understood that embodiments of this application may be practiced without these specific details. In some instances, well-known methods, structures, and techniques have not been shown in detail so as not to obscure the understanding of this specification.

[0130] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A phase shifter, wherein, include: Base; A first trace and a second trace are provided on one side of the substrate; the second trace is provided on opposite sides of the first trace, the first trace and the second trace are arranged in parallel and are insulated from each other; A hydrophobic conductive part; the hydrophobic conductive part is intersected with the first trace and is insulated from it; at least one end of the hydrophobic conductive part overlaps with the second trace located on one side of the first trace and is insulated from it; The hydrophilic portion has a minimum distance along a first direction between its orthographic projection on the substrate and the orthographic projection of the portion of the hydrophobic conductive portion that does not overlap with the second trace on the substrate. This first direction is parallel to the setting direction of the first trace. The hydrophilic portion is intersected with the first trace and is mutually insulated. At least one end of the hydrophilic portion overlaps with the second trace located on one side of the first trace and is mutually insulated.

2. The phase shifter according to claim 1, wherein, The orthographic projection of the hydrophilic portion onto the substrate is disposed on at least one side of the orthographic projection of the hydrophobic conductive portion onto the substrate.

3. The phase shifter according to claim 1, wherein, The hydrophilic portion is disposed on one side of the substrate and in the area between the first trace and the second trace.

4. The phase shifter according to claim 3, wherein, The first trace includes a first side and a second side, the area between the first side of the first trace and the second trace disposed on the first side of the first trace is a first area, and the area between the second side of the first trace and the second trace disposed on the second side of the first trace is a second area. The hydrophilic part includes multiple hydrophilic units; the multiple hydrophilic units are divided into two groups, with the first group of hydrophilic units located in the first region and the second group of hydrophilic units located in the second region.

5. The phase shifter according to claim 4, wherein, Each group of hydrophilic units is divided into a first part and a second part. The orthographic projection of the hydrophilic unit in the first part onto the substrate is located on the first side of the orthographic projection of the hydrophobic conductive part onto the substrate. The orthographic projection of the hydrophilic unit in the second part onto the substrate is located on the second side of the orthographic projection of the hydrophobic conductive part onto the substrate, opposite to the first side.

6. The phase shifter according to claim 5, wherein, In each group of hydrophilic units, the hydrophilicity of each hydrophilic unit is consistent.

7. The phase shifter according to claim 6, wherein, In each group of hydrophilic units, the multiple hydrophilic units arranged along the second direction do not contact each other, and the second direction intersects with the first direction.

8. The phase shifter according to claim 7, wherein, Each part of the hydrophilic unit in each group includes two hydrophilic units arranged along the second direction and spaced apart by a first distance. The first distance is less than or equal to the height of the hydrophobic conductive part. The height of the hydrophobic conductive part is the distance between the hydrophobic conductive part and the first trace when the hydrophobic conductive part is not energized.

9. The phase shifter according to claim 5, wherein, In each part of the hydrophilic unit in each group, the hydrophilic unit includes a hydrophilic layer whose hydrophilicity decreases in the direction away from the hydrophobic conductive portion and towards the hydrophobic conductive portion.

10. The phase shifter according to claim 9, wherein, The hydrophilic layer includes a first hydrophilic sublayer and a second hydrophilic sublayer. The first hydrophilic sublayer is farther away from the hydrophobic conductive part than the second hydrophilic sublayer, and the contact angle of the first hydrophilic sublayer is smaller than the contact angle of the second hydrophilic sublayer.

11. The phase shifter according to claim 10, wherein, The contact angle of the first hydrophilic sublayer is A, where A ≤ 10°; the contact angle of the second hydrophilic sublayer is B, where 20° ≤ B ≤ 65°.

12. The phase shifter according to any one of claims 3-11, wherein, The phase shifter further includes a first hydrophobic portion, which is disposed on one side of the substrate and located in the region between the first trace and the second trace; The orthographic projection of the first hydrophobic portion on the substrate is located within the orthographic projection of the hydrophobic conductive portion on the substrate.

13. The phase shifter according to claim 12, wherein, The contact angle of the first hydrophobic part is C, where 170°≤C≤180°.

14. The phase shifter according to claim 12, wherein, The first hydrophobic section includes multiple hydrophobic units arranged in an array.

15. The phase shifter according to claim 1, wherein, The two ends of the hydrophilic part overlap with the second wiring located on both sides of the first wiring and are mutually insulated; One end of the hydrophobic conductive part overlaps with the second trace located on one side of the first trace and is insulated from each other, while the other end is suspended.

16. The phase shifter according to claim 1, wherein, The height of the hydrophilic portion is 0.1-10 micrometers lower than the height of the hydrophobic conductive portion; wherein, the height of the hydrophilic portion is the distance between the hydrophilic portion and the first trace; the height of the hydrophobic conductive portion is the distance between the hydrophobic conductive portion and the first trace when the hydrophobic conductive portion is not energized.

17. The phase shifter according to claim 1, wherein, The hydrophilic part is provided on both sides of the orthogonal projection of the hydrophobic conductive part onto the substrate.

18. The phase shifter according to claim 1, wherein, The phase shifter further includes a second hydrophobic portion disposed on one side of the substrate and located in the region between the first trace and the second trace.

19. The phase shifter according to claim 1, wherein, The hydrophobic conductive part includes a conductive layer and a hydrophobic layer covering the exposed portion of the conductive layer.

20. A method for manufacturing a phase shifter as described in any one of claims 1-19, wherein, include: Provide a base; A first trace and a second trace are formed on the substrate; wherein, the second trace is respectively arranged on opposite sides of the first trace, and the first trace and the second trace are arranged in parallel and insulated from each other; A hydrophobic conductive portion is formed; wherein the hydrophobic conductive portion is intersected with the first trace and is insulated from it; at least one end of the hydrophobic conductive portion overlaps with the second trace located on one side of the first trace and is insulated from it; A hydrophilic portion is formed; wherein, the minimum distance between the orthographic projection of the hydrophilic portion on the substrate and the orthographic projection of the portion of the hydrophobic conductive portion that does not overlap with the second trace on the substrate along a first direction is less than or equal to a preset value, and the first direction is parallel to the setting direction of the first trace.

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