Clamp for auxiliary reduction of bearing housing vibrations and method of mounting thereof

Abstract

The utility model provides a kind of clamp and its installation method for assisting to reduce bearing box vibration, which includes: arc block, elastic component and N fixing parts;First fixed hole is provided on the positive side of arc block, to be fixed on the bearing box to be damped, to reduce the vibration of arc block;The inner side and the outer side of arc block are the same direction curved arc surface, and elastic component is fixedly connected on the inner side of arc block, and gap exists between elastic component and the inner side;N second fixed holes are provided on the outer side, each second fixed hole is through the outer side and the inner side of arc block, and one end of each fixing part is contacted on elastic component through one second fixed hole.The utility model can reduce the vibration generated by bearing box, so that wire cutting machine has higher precision, and then improve the quality of silicon wafer processing.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of single crystal silicon production and equipment maintenance, and particularly relates to a clamp for assisting in reducing bearing box vibration and a mounting method thereof. BACKGROUND

[0002] Silicon wafer is a main production material in the field of semiconductors, and multi-wire cutting technology of the silicon wafer is a relatively advanced silicon wafer processing technology at present. The principle of the multi-wire cutting technology is that a steel wire is moved at a high speed to drive a cutting blade attached to the steel wire to rub against a silicon rod, so as to achieve the purpose of cutting. In the whole process, the steel wire forms a wire net on a guide wheel after being guided by a pulley assembly, and a workpiece to be processed is lowered by a workbench to realize the feeding of the workpiece, so as to achieve the cutting of the silicon wafer. The wire cutting is different from traditional cutting technologies such as abrasive wheel cutting and knife sawing, and has the advantages of high efficiency, high productivity and high precision, and is the most widely used silicon wafer cutting technology at present.

[0003] However, as the service life of the wire cutting machine increases, the equipment will be worn, and the bearing box of the wire cutting machine will also affect the hole diameter of the equipment body during the maintenance operation such as frequent disassembly and installation. Thus, the bearing box will generate a large vibration when the wire cutting machine is working, and the large vibration of the bearing box will affect the precision of the wire cutting process, and thus seriously affect the quality of the silicon wafer processing. SUMMARY

[0004] Therefore, in view of the above problems, it is necessary to provide a clamp for assisting in reducing bearing box vibration and a mounting method thereof, so as to reduce the vibration generated by the bearing box, so that the wire cutting machine has high precision, and thus the quality of the silicon wafer processing is improved.

[0005] In a first aspect, the present application provides a clamp for assisting in reducing bearing box vibration, comprising: an arc-shaped block, an elastic assembly and N fixing members; a first fixing hole penetrating through a front side of the arc-shaped block is arranged on the front side, so as to fix the arc-shaped block on a bearing box to be damped; the inner side and the outer side of the arc-shaped block are curved in the same direction, the elastic assembly is fixedly connected to the inner side of the arc-shaped block, and a gap exists between the elastic assembly and the inner side; N second fixing holes are arranged on the outer side, each second fixing hole penetrates through the outer side and the inner side of the arc-shaped block, and one end of each fixing member contacts the elastic assembly through one second fixing hole.

[0006] Preferably, the second fixing holes are threaded holes, and the fixing members are bolts.

[0007] Preferably, the second fixing holes are two, and the two second fixing holes are symmetrical about the first fixing hole.

[0008] Preferably, the elastic assembly comprises a first connecting piece, a first elastic piece and a second elastic piece; the first connecting piece is fixed right below the first fixed hole, the first elastic piece and the second elastic piece are fixed symmetrically on the two sides of the first connecting piece, and the two elastic pieces respectively face the two second fixed holes, and the two elastic pieces are both in a gap with the inner side surface of the arc-shaped block.

[0009] Preferably, the elastic assembly and the arc-shaped block are integrally formed.

[0010] Preferably, the arc-shaped surface formed by the first elastic piece, the second elastic piece and the first connecting piece has the same curvature as the inner side surface of the arc-shaped block.

[0011] Preferably, the elastic assembly comprises a second connecting piece, a first spring, a second spring and a third connecting piece; the two ends of the first spring and the second spring are respectively fixed on the second connecting piece and the third connecting piece, and the first spring and the second spring are symmetric about the central positions of the first connecting piece and the second connecting piece; one side of the second connecting piece facing the arc-shaped block is provided with two non-through third fixed holes, the third fixed holes are threaded holes with the same hole diameter as the second fixed holes, and each bolt can be screwed into a third fixed hole after passing through a second fixed hole.

[0012] Preferably, the third connecting piece has the same curvature as the inner side surface of the arc-shaped block.

[0013] In the second aspect, the application provides a mounting method of a clamp for assisting in reducing the vibration of a bearing box, comprising the following steps:

[0014] Step 1: determining the machine table in which the bearing box vibrates;

[0015] Step 2: removing two bolts in the symmetric positions on the edge of the machine table in which the vibration occurs;

[0016] Step 3: fixing the removed bolts in the first fixed holes of the clamp for assisting in reducing the vibration of the bearing box at the positions of the threaded holes of the removed bolts, so that the clamp is fixed on the machine table in a manner that the elastic assembly faces the center of the machine table in which the vibration occurs;

[0017] Step 4: tightening the fixing piece on the clamp to drive the elastic assembly to be compactly pressed on the machine table of the bearing box.

[0018] From the above technical solutions can be known, the clamp for assisting in reducing the bearing box vibration provided by the present application mainly can include the arc-shaped block, the elastic assembly and the fixing piece, the elastic assembly is fixedly arranged on the inner side surface, the first fixing hole and the second fixing hole are arranged on the front side surface and the outer side surface of the arc-shaped block respectively, the first fixing hole is used for fixing the arc-shaped block on the bearing box, and the fixing piece is used for penetrating through the second fixing hole to contact the elastic assembly. In this way, after the clamp is installed, the elastic assembly is close to the bearing box to be damped, the elastic assembly can be driven to move by fastening the fixing piece, and then is tightly pressed on the bearing box, so that the purpose of reducing the vibration of the bearing box is achieved. Further, the vibration of the bearing box is reduced, the working precision of the wire cutting machine is higher, and then the quality of the silicon wafer processed by the wire cutting machine is higher. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 The structure schematic view of the clamp for assisting in reducing the bearing box vibration provided by the present application is shown.

[0020] Figure 2 The structure schematic view of the clamp for assisting in reducing the bearing box vibration provided by the present application is shown.

[0021] Figure 3 The structure schematic view of the clamp for assisting in reducing the bearing box vibration provided by the present application is shown.

[0022] Figure 4 The structure schematic view of the clamp for assisting in reducing the bearing box vibration provided by the present application is shown.

[0023] In the figure: the arc-shaped block 1, the elastic assembly 2, the first connecting piece 21, the first elastic sheet 22, the second elastic sheet 23, the second connecting piece 24, the third fixing hole 241 / 242, the first spring 25, the second spring 26, the third connecting piece 27, the fixing piece 3, the first fixing hole 4, the inner side surface 5, the outer side surface 6, the gap 7, the second fixing hole 8, the machine table 9, the clamp 10 for assisting in reducing the bearing box vibration. DETAILED DESCRIPTION

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application, and other drawings can also be obtained according to these drawings without creative labor for those skilled in the art.

[0025] Referring to Figures 1-3The embodiment of the present application provides a clamp for assisting in reducing the vibration of a bearing box, which comprises an arc-shaped block 1, an elastic assembly 2 and N fixing members 3; a first fixing hole 4 is arranged through the front side of the arc-shaped block 1, so as to fix the arc-shaped block 1 on the bearing box to be damped; the inner side 5 and the outer side 6 of the arc-shaped block 1 are curved arc surfaces in the same direction, the elastic assembly 2 is fixedly connected to the inner side 5 of the arc-shaped block 1, and a gap 7 exists between the elastic assembly 2 and the inner side 5; N second fixing holes 8 are arranged on the outer side 6, each second fixing hole 8 penetrates through the outer side 6 and the inner side 5 of the arc-shaped block 1, and one end of each fixing member 3 contacts the elastic assembly 2 through one second fixing hole 8.

[0026] In the embodiment, after the clamp is installed on the bearing box, the elastic assembly 2 is in close contact with the bearing box to be damped, the elastic assembly 2 is driven to move by fastening the fixing member 3, and then is tightly pressed on the bearing box, so that the vibration of the bearing box is reduced. Further, the working precision of the wire cutting machine is higher, and then the quality of the silicon wafer processed by the wire cutting machine is higher.

[0027] It should be noted that the curvature of the arc-shaped block 1 is determined according to the specific bearing box, and in general, the curvature of the arc-shaped block 1 is about 25°, so that the arc-shaped block 1 can be attached to the bearing box.

[0028] In one embodiment, the second fixing hole 8 is a threaded hole, and the fixing member 3 is a bolt, so that the pressing degree of the elastic assembly 2 and the bearing box can be controlled by controlling the screwing amount of the bolt, and thus the contact degree between the elastic assembly 2 and the bearing box can be controlled according to the actual vibration condition.

[0029] Further, the second fixing hole 8 can be provided as two, and the two second fixing holes 8 are symmetrical about the first fixing hole 4. In this way, the stress balance of the elastic assembly 2 can be ensured, and then the stress balance of the bearing box is ensured. When the bearing box vibrates, the two fixing members 3 symmetrically apply force to the elastic assembly 2, so that the transverse vibration force of the bearing box can be offset, and then the vibration of the bearing box is reduced.

[0030] In one embodiment, the elastic assembly 2 comprises a first connecting member 21, a first elastic sheet 22 and a second elastic sheet 23; the first connecting member 21 is fixed below the first fixing hole 4, the first elastic sheet 22 and the second elastic sheet 23 are fixedly arranged on the two sides of the first connecting member 21, and the two elastic sheets are respectively opposite to the two second fixing holes 8, and the two elastic sheets are respectively opposite to the two second fixing holes 8.

[0031] In the embodiment, the elastic assembly 2 and the arc-shaped block 1 can be integrally formed. For example, a metal block is machined into the shape of the arc-shaped block 1, and then two thin grooves are cut on the inner side 5 of the arc-shaped block 1. The middle position of the two thin grooves is not through, and is integrated with the upper part of the arc-shaped block 1. In this way, the scheme provided in the embodiment is convenient to process, and can be completed only by cutting, grinding, drilling and other processes, the processing flow is simple, and the cost is low.

[0032] It should be noted that the arc-shaped surface formed by the first elastic sheet 22, the second elastic sheet 23 and the first connecting piece 21 has the same curvature as the inner side 5 of the arc-shaped block 1. In this way, when the elastic assembly 2 is stressed, the elastic sheet with curvature contacts the bearing housing with a smaller stroke, so that the elastic sheet does not need to be bent at a too large angle, and thus the elastic sheet can have a longer service life.

[0033] It should be noted that the thickness of the first elastic sheet 22 and the second elastic sheet 23 is 1 mm, and the gap 7 between the two elastic sheets and the inner side 5 of the arc-shaped block 1 is 1 mm.

[0034] In another embodiment, the elastic assembly 2 includes a second connecting piece 24, a first spring 25, a second spring 26 and a third connecting piece 27. The two ends of the first spring 25 and the second spring 26 are respectively fixed to the second connecting piece 24 and the third connecting piece 27, and are symmetric about the central position of the first connecting piece 21 and the second connecting piece 24. One side of the second connecting piece 24 facing the arc-shaped block 1 is provided with two non-through third fixing holes 241 / 242. The third fixing holes are threaded holes with the same hole diameter as the second fixing holes 8, and each bolt can be threadedly engaged into a third fixing hole after passing through a second fixing hole 8.

[0035] In the embodiment, the elastic assembly 2 is composed of the second connecting piece 24, the first spring 25, the second spring 26 and the third connecting piece 27. By means of the fastening fixing piece 3, such as the bolt screwed into the second fixing hole 8, the second connecting piece 24 can be pushed to move forward, and the spring is compressed so that the third connecting piece 27 is tightly pressed on the bearing housing. In the scheme provided in the embodiment, the elastic assembly 2 and the arc-shaped block 1 are not hard connected, and the second connecting piece 24 and the arc-shaped block 1 are not integrally or fixedly connected. In this way, the second connecting piece of the elastic assembly 2 will not be damaged due to the screwing of the bolt, such as bending and breaking, and thus the service life of the elastic assembly 2 can be greatly improved.

[0036] In addition, in the embodiment, the second connecting piece can be connected with the arc-shaped block through the connecting rod. When the fixing piece is fastened, the second connecting piece is pushed to move forward, and the connecting rod is extended or retracted. Of course, the second connecting piece and the arc-shaped block can also be connected only through the fixing piece. The non-through third fixing hole is arranged in the second connecting piece, and the fixing piece is screwed into the third fixing hole to realize the connection of the arc-shaped block and the second connecting piece. In this way, the elastic assembly and the arc-shaped block can be arranged as separate components, and when one part of the components is damaged, the whole clamp will not be damaged, and only the corresponding damaged part needs to be replaced, so that the cost of clamp maintenance can be greatly saved.

[0037] It is easy to understand that the third connecting piece 27 has the same curvature as the inner side surface 5 of the arc-shaped block 1. Since the inner side surface 5 of the arc-shaped block 1 is designed according to the curvature of the bearing box, it can better match the curvature of the bearing box. In the embodiment, the third connecting piece 27 needs to be in contact with the surface of the bearing box, and the curvature thereof is designed to be the same as that of the inner side surface 5 of the arc-shaped block 1. When the force of screwing the bolt is pressed on the bearing box, the third connecting piece 27 can be in contact with the bearing box, thereby having a larger contact area, and further reducing the vibration of the bearing box.

[0038] It should be pointed out that the clamp for assisting in reducing the vibration of the bearing box in the embodiments of the present scheme is made of 40# steel.

[0039] Referring to Figure 4 The present application also provides a mounting method of the clamp for assisting in reducing the vibration of the bearing box, comprising the following steps:

[0040] Step 1: determining the machine table 9 in which the bearing box vibrates;

[0041] Step 2: removing two bolts on the edges of the machine table 9 in which the vibration occurs and which are in symmetrical positions;

[0042] Step 3: at the position of the thread hole of each removed bolt, the first fixing hole 4 of the clamp for assisting in reducing the vibration of the bearing box is fixed through the removed bolt, so that the clamp is fixed on the machine table in a manner that the elastic assembly faces the center of the machine table in which the vibration occurs;

[0043] Step 4: fastening the fixing piece 3 on the clamp to drive the elastic assembly to be compactly pressed on the machine table of the bearing box.

[0044] In the embodiment of the present application, when the clamp for assisting in reducing the vibration of the bearing box is installed, first, two bolts on the edge of the machine table in the symmetrical position are removed, then the bolts are used to pass through the first fixing hole of the clamp for fixing, and the fixing part on the clamp is fastened, so that the elastic assembly is tightly pressed on the machine table of the bearing box. As can be seen, the present scheme only uses the original bolts, threaded holes and the like on the bearing box, without the need for additional fixing components, and has the advantages of simple structure, low cost, and simple and easy-to-operate installation method.

[0045] In addition, in the embodiment, when the clamp for assisting in reducing the vibration of the bearing box is installed, a pair of clamps are installed in a position-symmetrical manner, so that the vibration force in the same dimension can be offset to a certain extent, thereby greatly reducing the vibration of the bearing box.

[0046] The modules or units in the device of the embodiment of the present application can be combined, divided, and deleted according to actual needs. The above only discloses the preferred embodiments of the present application, and of course cannot limit the scope of the rights of the present application. Those skilled in the art can understand that all or part of the processes of the above embodiments are implemented, and equivalent changes made according to the claims of the present application still belong to the scope covered by the present application.

Claims

1. A clamp for assisting in reducing bearing housing vibration, characterized in that, This fixture is used in the bearing housing of a wire EDM machine and includes: an arc-shaped block, an elastic component, and N fixing members. A first fixing hole is provided on the front side of the arc-shaped block to fix it to the bearing housing to be damped. The inner and outer sides of the arc-shaped block are curved surfaces curving in the same direction. The elastic component is fixedly connected to the inner side of the arc-shaped block, and there is a gap between the elastic component and the inner side. N second fixing holes are provided on the outer side, each second fixing hole penetrating both the outer and inner sides of the arc-shaped block. One end of each fixing member passes through one of the second fixing holes and contacts the elastic component. All second fixing holes are threaded. The structure includes a perforated core and a bolt as the fixing element. There are two second fixing holes, symmetrical about the first fixing hole. The elastic component comprises a second connector, a first spring, a second spring, and a third connector. The two ends of the first and second springs are respectively fixed to the second connector and the third connector, symmetrical about their center positions. The second connector has two non-penetrating third fixing holes on its side facing the arc-shaped block. These third fixing holes are threaded holes with the same diameter as the second fixing holes, and each bolt can thread into a third fixing hole after passing through one of the second fixing holes. The installation method of this fixture for reducing bearing housing vibration includes the following steps: Step 1: Identify the machine where the bearing housing is vibrating; Step 2: Remove the two bolts that are symmetrically positioned on the edge of the vibrating machine. Step 3: At each threaded hole where the bolts have been removed, the removed bolts are passed through the first fixing hole of the fixture that helps reduce bearing housing vibration and are then fixed on the machine base with the elastic component facing the center of the vibrating machine base. Step 4: Tighten the fasteners on the clamps to drive the elastic component to press firmly against the bearing housing on the machine base.

2. The fixture for assisting in reducing bearing housing vibration according to claim 1, characterized in that, The elastic component includes a first connector, a first spring sheet, and a second spring sheet; the first connector is fixed directly below the first fixing hole, and the first and second spring sheets are symmetrically fixed on both sides of the first connector, with the two spring sheets facing the two second fixing holes respectively, and both spring sheets having a gap with the inner surface of the arc-shaped block.

3. The fixture for assisting in reducing bearing housing vibration according to claim 2, characterized in that, The elastic component and the arc-shaped block can be integrally molded.

4. The fixture for assisting in reducing bearing housing vibration according to claim 2, characterized in that, The arc-shaped surface formed by the first spring, the second spring, and the first connector has the same curvature as the inner surface of the arc-shaped block.

5. The fixture for assisting in reducing bearing housing vibration according to claim 1, characterized in that, The third connector has the same curvature as the inner surface of the arc-shaped block.

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