An auxiliary cathode device for glow discharge plating and a plating apparatus

Abstract

The application discloses an auxiliary cathode device for glow discharge plating and a plating equipment, and belongs to the technical field of plating. The device comprises a plurality of auxiliary cathodes; the auxiliary cathodes are arranged on a plating trolley serving as a cathode in a circumferential direction; a plurality of hanging rods are arranged on the plating trolley in a circumferential direction; the auxiliary cathodes are located on the inner side of the hanging rods; and the arrangement height of the auxiliary cathodes and the hanging rods on the plating trolley corresponds, so that the electric field distribution in the height direction during the glow discharge plating can be adjusted by adjusting the distance between the auxiliary cathodes and the hanging rods. The application can control the uniformity of the film thickness of the plating parts loaded on the hanging rods at different height positions, realize the obvious improvement of the film layer uniformity, the film layer quality and the production capacity, and thus can effectively reduce the cost.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of coating equipment, in particular to an auxiliary cathode device for glow discharge coating and a coating equipment. BACKGROUND

[0002] DLC film (diamond-like carbon film) is a kind of functional coating with high hardness and wear resistance, which is often used in high friction and wear occasions such as cutting tools, molds, automobile parts, etc.

[0003] The conventional DLC film generally adopts CVD (such as PECVD, etc.) process and high-bias glow discharge mode, and the film layer is deposited by high-bias gas ionization mode.

[0004] However, due to the rotary table for loading products and other process facilities in the coating equipment cavity, the electric field of the glow discharge cannot form a uniform distribution in the cavity under the existing technology or equipment conditions, so that the film thickness of the DLC film deposited by the glow discharge process on different products has certain differences, causing the film layer thickness of the coating products at different positions on the hanging rod of the rotary table to be uneven, thereby leading to poor color uniformity. In order to avoid obvious color difference between the coating products, the product batch of one furnace is often reduced, which greatly affects the yield. SUMMARY

[0005] The purpose of the present application is to overcome the above-mentioned defects in the prior art, and to provide an auxiliary cathode device for glow discharge coating and a coating equipment.

[0006] In order to achieve the above-mentioned purpose, the technical scheme of the present application is as follows:

[0007] The present application provides an auxiliary cathode device for glow discharge coating, comprising:

[0008] A plurality of auxiliary cathodes are arranged on a coating rotary table as a cathode in a circumferential direction, a plurality of hanging rods are arranged on the coating rotary table in a circumferential direction, the auxiliary cathodes are located on the inner side of the hanging rods, and the arrangement height of the auxiliary cathodes and the hanging rods on the coating rotary table corresponds, so as to adjust the distance between the auxiliary cathodes and the corresponding hanging rods to adjust the electric field distribution in the height direction during glow discharge coating.

[0009] Further, each of the auxiliary cathodes is arranged separately, each of the auxiliary cathodes is located on the inner side of the corresponding hanging rod as a whole, and is parallel to the hanging rod.

[0010] Further, one of the auxiliary cathodes is arranged opposite to one of the hanging rods, or one of the auxiliary cathodes is arranged facing the midpoint of the center line of two of the hanging rods.

[0011] Further, the surface of the auxiliary cathode facing the side of the hanging rod is a convex arc surface.

[0012] Further, the auxiliary cathode is movably and rotatably arranged on the film coating trolley.

[0013] Further, the auxiliary cathode comprises a frame vertically arranged on the film coating trolley, a plurality of layers of drawers are arranged in the frame along the height direction, a drawer is arranged in each layer of the drawers, a drawer door is arranged on the drawer, the drawer door is arranged to face the outside of the film coating trolley, the drawer is used to adjust the distance between the auxiliary cathode and the corresponding part of the hanging rod, and the frame, the drawer and the drawer door are electrically connected.

[0014] Further, the drawer and the drawer compartment are in sliding connection.

[0015] Further, the drawer compartment is provided with a scale indicating the relative position of the drawer.

[0016] Further, the drawer compartment and the drawer are positioned by a locking mechanism.

[0017] The application also provides an auxiliary cathode device for glow discharge film coating, comprising:

[0018] at least one auxiliary cathode; the auxiliary cathode is circumferentially suspended on a film coating trolley serving as a cathode, a plurality of hanging rods are arranged on the film coating trolley along the circumference, the auxiliary cathode is located on the inner side of the hanging rod, and the setting height of the auxiliary cathode and the hanging rod on the film coating trolley corresponds, so as to adjust the electric field distribution along the height direction during glow discharge film coating by adjusting the distance between the auxiliary cathode and the rotating hanging rod.

[0019] Further, the auxiliary cathode comprises a frame suspended on the film coating trolley from top to bottom along the axial direction of the film coating trolley, a plurality of layers of drawers are arranged in the frame along the height direction, a drawer is arranged in each layer of the drawers, a drawer door is arranged on the drawer, the drawer door is arranged to face the outside of the film coating trolley, the drawer is used to adjust the distance between the auxiliary cathode and the corresponding part of the rotating hanging rod, and the frame, the drawer and the drawer door are electrically connected.

[0020] Further, the drawer door has a convex arc surface.

[0021] The application also provides a coating equipment, which comprises a process cavity for glow discharge coating, a coating trolley serving as a cathode arranged in the process cavity, and the above-mentioned auxiliary cathode device for glow discharge coating arranged on the coating trolley, so as to adjust the electric field distribution along the height direction of the coating trolley during glow discharge coating by adjusting the distance between the auxiliary cathode arranged on the auxiliary cathode device and the hanging rod arranged on the coating trolley, and to control the uniformity of the film thickness of the coating parts loaded on the hanging rod at different height positions.

[0022] As can be seen from the above technical solutions, the auxiliary cathode device is arranged on the coating trolley serving as a cathode, and the auxiliary cathode arranged on the auxiliary cathode device is arranged on the inner side of the hanging rod arranged on the coating trolley, so as to adjust the electric field distribution along the height direction of the coating trolley during glow discharge coating by adjusting the distance between the auxiliary cathode and the hanging rod, to control the uniformity of the film thickness of the coating parts loaded on the hanging rod at different height positions during glow discharge coating in the coating equipment, to realize the obvious improvement of the film layer uniformity, film layer quality and production capacity, and to effectively reduce the cost. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 FIG. 1 is a structural schematic view of an auxiliary cathode device for glow discharge coating according to a preferred embodiment of the application;

[0024] Figure 2 FIG. 2 is an enlarged schematic view of the A part in FIG. 1; Figure 1

[0025] Figure 3 FIG. 3 is a schematic view of the setting structure of an auxiliary cathode on a coating trolley according to a preferred embodiment of the application;

[0026] Figures 4-5 FIG. 4 is a structural schematic view of an auxiliary cathode according to a preferred embodiment of the application;

[0027] Figure 6 FIG. 5 is an enlarged schematic view of the B part in FIG. 4; Figure 5

[0028] Figure 7 FIG. 6 is a structural schematic view of a fixed bolt according to a preferred embodiment of the application;

[0029] Figures 8-10 FIG. 7 is a structural schematic view of a suspended auxiliary cathode device according to a preferred embodiment of the application. DETAILED DESCRIPTION

[0030] ​​In order to make the purposes, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of the present application. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the common meanings thereof by those skilled in the art. The terms such as "comprise" used herein mean that the elements or objects before the term encompass the elements or objects listed after the term and their equivalents, without excluding other elements or objects.

[0031] The specific embodiments of the present application will be further described in detail below with reference to the accompanying drawings.

[0032] Reference Figures 1-3 The auxiliary cathode device 20 for glow discharge plating of the present application comprises a plurality of auxiliary cathodes 21. The auxiliary cathodes 21 are arranged on the plating turntable 10 as cathodes along the circumference of the plating turntable 10. A plurality of hanging rods 11 are arranged on the plating turntable 10 along the circumference of the plating turntable 10, and the auxiliary cathodes 21 are located inside the hanging rods 11, and the arrangement height of the auxiliary cathodes 21 on the plating turntable 10 corresponds to that of the hanging rods 11. In this way, the circles (dashed circles) surrounded by the auxiliary cathodes 21 and the circles (dashed circles) surrounded by the hanging rods 11 and the circle formed by the circumference of the plating turntable 10 constitute a concentric arrangement structure.

[0033] At present, when a plurality of plating pieces (products) are simultaneously subjected to surface plating process by using a vacuum plating device, a plating turntable 10 such as Figure 1 is generally arranged in the process cavity of the device, and the plating pieces are fixed on the plating turntable 10 by means of the hanging rods 11 (the hanging rods 11 are provided with clamps 12 for mounting the plating pieces), so that the plating pieces are plated in the process of following the revolution of the plating turntable 10. Taking a vertical plating device as an example, the plating turntable 10 generally adopts a cylindrical frame structure and rotates horizontally around the axis of the cylinder. Through the rotation of the plating turntable 10, each plating piece on the plating turntable 10 can obtain equal plating opportunities. In order to make each surface of the plating piece that needs to be plated obtain uniform film deposition, the plating piece can be rotated by itself through the self-rotation of the hanging rod 11 while following the revolution of the plating turntable 10.

[0034] The hanging rod 11 can be in the form of a rod shaft, and the clamp 12 is arranged around the outside of the rod shaft of the hanging rod 11, such as Figure 2The driving rod shaft is rotated to drive the clamp 12 and the coated member mounted thereon to rotate, forming the overall rotation of the hanging rod 11. More information about the coated rotating frame 10 can be understood with reference to the prior art.

[0035] The glow discharge coating adopts a high-bias glow discharge mode, and the film layer is deposited on the surface of the coated member through the high-bias gas ionization mode. Since the coated rotating frame 10 is in a rotating state during the coating process, it will interfere with the electric field in the process chamber, so that the electric field of the glow discharge cannot form a uniform distribution in the process chamber, causing the film thickness of the film layer deposited by the glow discharge process to have certain differences on different coated members, resulting in uneven film thickness of the coated members at different positions on the hanging rod 11 of the coated rotating frame 10, thereby causing poor color uniformity. In order to avoid obvious color difference between the coated members, the batch size of the coated members in one furnace is often reduced, which greatly affects the yield.

[0036] The auxiliary cathode device 20 is arranged on the coated rotating frame 10 at a position inside the hanging rod 11 (i.e. the inner ring side of the circle surrounded by the hanging rods 11). The distance between the auxiliary cathode 21 and the corresponding hanging rod 11 (i.e. the coated member loaded on the hanging rod 11) can be adjusted to adjust the electric field distribution along the height direction of the coated rotating frame 10 (hanging rod 11) during the glow discharge coating. In this way, when the glow discharge coating is performed in the coating equipment, the uniformity of the film thickness of the coated members loaded at different height positions on the hanging rod 11 can be controlled, and the hanging rod 11 can be fully loaded with coated members, thereby also improving the production capacity.

[0037] In some embodiments, each auxiliary cathode 21 is arranged on the coated rotating frame 10 in a mutually separated manner. The gap between each two adjacent auxiliary cathodes 21 forms an air flow channel 22.

[0038] In some embodiments, the gap distance (i.e. the size of the air flow channel 22) between each auxiliary cathode 21 can be adjusted in size according to the coating requirements of different coated members.

[0039] In some embodiments, each auxiliary cathode 21 is located entirely at the inner side of the corresponding hanging rod 11, and the auxiliary cathode 21 is parallel to the hanging rod 11 in the height direction, forming a side shielding of the hanging rod 11 from the inner side of the hanging rod 11. The distance between the auxiliary cathode 21 and the corresponding hanging rod 11 should satisfy that when the hanging rod 11 is loaded with coated members (not shown) and rotates, the auxiliary cathode 21 and the hanging rod 11 do not interfere with each other.

[0040] In some embodiments, each auxiliary cathode 21 is arranged opposite to a corresponding hanging rod 11. That is, the auxiliary cathode 21 and the hanging rod 11 are arranged in a one-to-one correspondence.

[0041] In some embodiments, each auxiliary cathode 21 is arranged to face multiple hanging rods 11 simultaneously. For example, each auxiliary cathode 21 can be arranged to face two adjacent hanging rods 11 simultaneously, and the auxiliary cathode 21 is arranged to face the midpoint of the center line of the two adjacent hanging rods 11, as shown in Figures 1-2 .

[0042] In some embodiments, the bottom of the auxiliary cathode 21 can be rotatably arranged on the bottom surface of the coating turntable 10, and at least the portion of the auxiliary cathode 21 facing the hanging rod 11 (or the entire auxiliary cathode 21) can be moved relative to the hanging rod 11.

[0043] In some embodiments, the surface 23 of the auxiliary cathode 21 facing the hanging rod 11 includes a convex arc surface, as shown in Figure 2 , Figures 4-6 .

[0044] In some embodiments, the arc surface 23 of each auxiliary cathode 21 facing the hanging rod 11 is located on the circumference of the same circle, and the centers of the circles formed by the arc surfaces 23 are concentric with the center of the coating turntable 10, as shown in Figure 1 . In this way, the uniformity of the electric field distribution can be further improved.

[0045] Referring to Figure 4 , in some embodiments, the auxiliary cathode 21 includes a frame vertically arranged on the bottom surface of the coating turntable 10. The frame can have a frame structure. A plurality of layers of drawers 24 are arranged in the frame in the height direction, and one drawer 26 is arranged in each layer of drawers 24. The drawer 26 can also have a frame structure, and a drawer door 25 is arranged on the drawer 26. The drawer door 25 is arranged to face the outside of the coating turntable 10, serving as the surface 23 of the auxiliary cathode 21 facing the hanging rod 11. By adjusting the in-and-out position of each drawer 26 in the corresponding drawer 24, the distance between the auxiliary cathode 21 and the corresponding height position of the hanging rod 11 can be adjusted, so that the auxiliary cathode 21 and the coating parts loaded on the hanging rod 11 at different height positions can maintain an equal distance. Each drawer door 25 has an arc surface facing the outside of the coating turntable 10, and the arc surfaces of the drawer doors 25 have the same radius of curvature and collectively form the arc surface 23 of the auxiliary cathode 21 facing the hanging rod 11.

[0046] The number of layers of drawers 26 (corresponding to the area of the drawer door 25) can be adjusted according to the size of the coating parts.

[0047] The bottom of the frame body can be rotatably arranged on the bottom surface of the coating rotary frame 10 through a rotating shaft. The frame bodies of the auxiliary cathodes 21 can be centered on the rotating shafts at the bottoms thereof, and the centers of the frame bodies can be located on the circumference of a circle concentric with the center of the coating rotary frame 10.

[0048] Reference Figures 5-6 In some embodiments, the drawer 26 and the drawer compartment 24 form a sliding connection in the horizontal direction. For example, a slide rail 31 can be arranged on the frame structure at the side of each layer of the drawer compartment 24, and a sliding block 32 can be arranged at a corresponding position on the frame structure at the bottom of the drawer 26. For example, the frame structure at the bottom of the drawer 26 can be directly used as the sliding block 32. When the drawer 26 is inserted into the drawer compartment 24, the sliding block 32 can slide on the slide rail 31 to form a sliding fit between the drawer 26 and the drawer compartment 24.

[0049] Therefore, the relative distance between the auxiliary cathode device 20 and the coated object at each position from top to bottom can be adjusted through the forward and backward movement of the drawer 26 in a structure similar to the drawer 26, and the electric field can be changed by controlling the distance, so as to effectively change the deposition amount and speed of particles on the coated object.

[0050] In some embodiments, the drawer compartment 24 and the drawer 26 can be positioned and fixed relative to each other through a locking mechanism. For example, a plurality of first positioning holes 27 can be arranged on the slide rail 31 of the drawer compartment 24, and a plurality of second positioning holes 28 can be arranged on the sliding block 32 (the frame structure at the bottom of the drawer 26) of the drawer 26 in a corresponding manner. A fixing member 30 can be inserted into the second positioning hole 28 and the first positioning hole 27 in a relative alignment to form a locking mechanism, so as to position and fix the drawer 26 at a certain position of the drawer compartment 24, and to achieve the adjustment and positioning of different distances between the drawer 26 and the hanging rod 11.

[0051] In some embodiments, the hole distance between each second positioning hole 28 is consistent, and the hole distance between each first positioning hole 27 can be consistent with the hole distance between each second positioning hole 28.

[0052] In some embodiments, the fixing member 30 can be a fixed pin 29, which can be provided with a pin rod portion 291, and the top of the pin rod portion 291 can be provided with a protruding cap portion 292. The pin rod portion 291 is used for inserting into the second positioning hole 28 and the first positioning hole 27 to position and fix the same, and the cap portion 292 can be used as a handle during insertion and extraction, as shown in Figure 7 .

[0053] In some embodiments, the fixing member 30 can also be a screw, and the second positioning hole 28 and the first positioning hole 27 can adopt a screw hole structure matched with the screw.

[0054] The frame (drawer 24), the drawer 26 and the drawer door 25 (including the slide rail 31, the slide block 32 and the fixing member 30 for connection) as the component structure of the auxiliary cathode 21 can be made of metal processing to form the electrical connection therebetween. For example, the auxiliary cathode 21 (especially the drawer door 25) can be made of conductive material such as stainless steel.

[0055] Reference Figures 5-6 In some embodiments, the drawer 24 is provided with a scale indicating the relative position with the drawer 26. For example, a scale (not shown) can be provided on the side of the drawer 24 to reflect the in-out position of the drawer door 25 of the drawer 26 on the frame of the auxiliary cathode 21 by indicating the relative position between the drawer 26 and the drawer 24, so that the adjustment distance of the auxiliary cathode 21 (drawer door 25) relative to the hanging rod 11 can be obtained.

[0056] The coating equipment of the present application comprises a process cavity (not shown) for glow discharge coating, wherein the above-mentioned coating turret 10 as the cathode and the above-mentioned auxiliary cathode device 20 for glow discharge coating are arranged in the process cavity, so that the distance between the auxiliary cathode 21 provided on the auxiliary cathode device 20 and the hanging rod 11 provided on the coating turret 10 is adjusted to adjust the electric field (cathode electric field) distribution along the height direction of the coating turret 10 during the glow discharge coating, thereby realizing the control of the film thickness uniformity of the coating pieces loaded at different height positions on the hanging rod 11.

[0057] The above-mentioned coating equipment can be used to perform, for example, high-bias DLC coating process. By arranging the auxiliary cathode device 20 of the present application in the coating equipment, the control of the upper-middle-lower electric field distribution in the process cavity during the glow DLC coating can be realized, and further the controllability of the DLC film thickness can be realized. In this way, the loading capacity can be effectively increased by at least 30% on the basis of improving the yield.

[0058] During the coating process, the coating turret 10 set will be connected to the negative bias. When the auxiliary cathode device 20 is installed, it needs to be installed in the inner circle of the hanging rod 11 and conductive with the turntable on the bottom surface of the coating turret 10, and the auxiliary cathode 21 and the hanging rod 11 are installed on different concentric circles to ensure that the distance from the auxiliary cathode device 20 to the coating piece is the same. After the frame of the auxiliary cathode 21 is installed, the drawer 26 with an arc surface is installed into the slide rail 31 of the drawer 24 and fixed by the fixing pin 29 for positioning; at the same time, the in-out position of the drawer 26 is adjusted according to the requirement to change the distance between the coating piece and the auxiliary cathode 21. During the installation, the different installation heights of the auxiliary cathode device 20 can be adjusted according to the height of the coating piece, and the consistency of the distance from the auxiliary cathode device 20 to the coating piece needs to be ensured, and the purpose is to adjust the distribution of the upper-middle-lower electric field in the process cavity to ensure the uniformity of the overall electric field distribution.

[0059] The installation of the auxiliary cathode device 20 will not affect the next batch of coating. Because each batch of coating will be washed after the target to ensure the conductivity. Of course, the same as other facilities in the process chamber, the auxiliary cathode device 20 also needs to be maintained regularly.

[0060] Reference Figures 8-10 In some embodiments, the auxiliary cathode device 20 for glow discharge coating of the present application comprises at least one auxiliary cathode 21. The auxiliary cathode 21 is suspended on the coating turret 10 as a cathode along the circumferential direction of the coating turret 10, that is, one or more auxiliary cathodes 21 are arranged in the same direction as the circumferential direction of the coating turret 10. A plurality of hanging rods 11 are arranged on the coating turret 10 along the circumferential direction, the auxiliary cathode 21 is located on the inner side of the hanging rod 11, and the installation height of the auxiliary cathode 21 and the hanging rod 11 on the coating turret 10 corresponds. Figures 8-9 The structure state of the auxiliary cathode 21 suspended on the coating turret 10 along the axial direction from top to bottom is shown, and Figure 9 Relative to Figure 8 The clamp 12 is installed on the hanging rod 11, Figure 10 The local enlarged structure of the auxiliary cathode device 20 on the coating turret 10 is shown. In this way, the circle (dashed circle) surrounded by the auxiliary cathode 21 (one or more) and the circle (dashed circle) surrounded by each hanging rod 11 and the circle formed by the circumference of the coating turret 10 constitute a concentric structure.

[0061] In this embodiment, the auxiliary cathode device 20 (auxiliary cathode 21) is in a fixed state when the coating turret 10 rotates during the process. The relative distance between the auxiliary cathode 21 and each hanging rod 11 rotating through can be adjusted to adjust the electric field distribution in the height direction during glow discharge coating. The number of auxiliary cathodes 21 can be configured according to process requirements.

[0062] In this embodiment, the auxiliary cathode 21 comprises a frame suspended on the coating turret 10 along the axial direction from top to bottom. As in the previous embodiment, a plurality of layers of drawers 24 are arranged in the frame along the height direction, each layer of drawers 24 is provided with a drawer 26, the drawer 26 is provided with a drawer door 25, the drawer door 25 is arranged to face the outside of the coating turret 10, the drawer 26 is used to adjust the distance between the auxiliary cathode 21 and the corresponding part of the hanging rod 11 rotating through, the frame, the drawer 26 and the drawer door 25 are electrically connected, each drawer door 25 has a convex arc surface, and the arc surfaces 23 of the auxiliary cathode 21 facing the hanging rod 11 side are formed together (see Figure 2 When the number of auxiliary cathodes 21 is multiple, each auxiliary cathode 21 is suspended on the coating turret 10 in a mutually separated manner, and an air flow channel 22 is formed through the gap between each two adjacent auxiliary cathodes 21.

[0063] In this embodiment, the auxiliary cathode device 20 is fixed at the top and insulated from the cavity wall of the process cavity of the coating device as an anode, and the auxiliary cathode device 20 is connected to a negative voltage. The auxiliary cathode device 20 can be externally connected to the same negative voltage as the coating carousel 10 and the coated parts, or can be externally connected to a dedicated power supply.

[0064] The auxiliary cathode device 20 in this embodiment can reduce abnormalities caused by external factors such as installation reasons and component differences. The auxiliary cathode 21 in this embodiment is fixed relative to the coating carousel 10, and the coated parts rotate, which can control the coating differences between the coated parts on different hangers 11 and at different height positions within a certain range. The overall distance between the auxiliary cathode 21 and the coated parts can be adjusted during installation according to requirements, and then further fine adjustment can be made through the drawer 26 on the drawer structure.

[0065] Other aspects of this embodiment are understood with reference to the foregoing embodiments and will not be repeated.

[0066] The coating device equipped with the auxiliary cathode device 20 of this embodiment can also adjust the electric field distribution in the height direction of the coating carousel 10 during glow discharge coating, and achieve good control of the film thickness uniformity of the coated parts at different height positions on different hangers 11.

[0067] In summary, by providing the auxiliary cathode device 20 of the present application, the electric field distribution during glow discharge can be controlled, the uniformity of the electric field can be changed, the number of charged particles of the ionized gas can be effectively controlled, the film thickness can be effectively controlled, the film layer uniformity can be improved, and the yield can be improved, thereby improving the quality of the film layer. At the same time, the present application has the advantages of improving productivity and reducing cost. The present application has wide applicability and is suitable for similar CVD coating of DLC and other scenarios that require uniformity control. The coating device equipped with the auxiliary cathode device 20 of the present application can be used in these scenarios.

[0068] Although the embodiments of the present application have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the present application as described in the claims. Moreover, the present application described herein can have other embodiments and can be implemented or realized in various ways.

Claims

1. An auxiliary cathode device for glow discharge plating, characterized in that, The application relates to a cathode device for glow discharge coating, which comprises: a plurality of auxiliary cathodes; the auxiliary cathodes are arranged on a coating rotary frame serving as a cathode in a circumferential direction, a plurality of hanging rods are arranged on the coating rotary frame in a circumferential direction, the auxiliary cathodes are located on the inner side of the hanging rods, and the arrangement height of the auxiliary cathodes and the hanging rods on the coating rotary frame corresponds, so that the distance between the auxiliary cathodes and the corresponding hanging rods is adjusted to adjust the electric field distribution in the height direction during glow discharge coating; the surface of the side of the auxiliary cathode facing the hanging rods is a convex arc surface; the auxiliary cathode comprises a frame body arranged vertically on the coating rotary frame, a plurality of layers of drawers are arranged in the frame body in the height direction, a drawer is arranged in each layer of the drawers, a drawer door is arranged on the drawer, the drawer door is arranged to face the outer side of the coating rotary frame, and the drawer is used for adjusting the distance between the auxiliary cathode and the corresponding part of the hanging rod. The auxiliary cathodes are arranged separately from each other, and each auxiliary cathode is located on the inner side of the corresponding hanging rod and is parallel to the hanging rod.

2. The auxiliary cathode device for glow discharge plating according to claim 1, wherein One auxiliary cathode is arranged opposite to one hanging rod, or one auxiliary cathode is arranged to face the midpoint of the center line of two hanging rods.

3. The auxiliary cathode device for glow discharge plating according to claim 1, wherein The auxiliary cathode is movably and rotatably arranged on the coating rotary frame.

4. The auxiliary cathode device for glow discharge plating according to claim 1, wherein The frame body, the drawer and the drawer door are electrically connected.

5. The auxiliary cathode device for glow discharge plating according to claim 1, wherein The drawer and the drawer compartment are in sliding connection.

6. The auxiliary cathode device for glow discharge plating according to claim 5, wherein The drawer compartment is provided with a scale indicating the relative position of the drawer.

7. The auxiliary cathode device for glow discharge plating according to claim 5, wherein The drawer compartment and the drawer are positioned by a locking mechanism.

8. The auxiliary cathode device for glow discharge plating according to claim 5, wherein The application relates to a cathode device for glow discharge coating, which comprises: at least one auxiliary cathode; the auxiliary cathode is arranged on a coating rotary frame serving as a cathode in a circumferential direction, a plurality of hanging rods are arranged on the coating rotary frame in a circumferential direction, the auxiliary cathode is located on the inner side of the hanging rod, and the arrangement height of the auxiliary cathode and the hanging rod on the coating rotary frame corresponds, so that the distance between the auxiliary cathode and the rotating hanging rod is adjusted to adjust the electric field distribution in the height direction during glow discharge coating; the auxiliary cathode comprises a frame body arranged on the coating rotary frame in an axial direction from top to bottom, a plurality of layers of drawers are arranged in the frame body in the height direction, a drawer is arranged in each layer of the drawers, a drawer door is arranged on the drawer, the drawer door is arranged to face the outer side of the coating rotary frame, the drawer is used for adjusting the distance between the auxiliary cathode and the corresponding part of the rotating hanging rod, and the drawer door has a convex arc surface; when the coating rotary frame rotates in a process, the auxiliary cathode device is in a fixed state, the top of the auxiliary cathode device is fixed, and the auxiliary cathode device is insulated from the cavity wall of a coating device process cavity serving as an anode, and the auxiliary cathode device is connected to a negative voltage.

9. An auxiliary cathode device for glow discharge plating, characterized in that ​ ​ 10. A coating apparatus, characterized by, The application relates to a process chamber for glow discharge coating, wherein a coating trolley is arranged as a cathode, and an auxiliary cathode device for glow discharge coating according to any one of claims 1-8 or claim 9 is arranged on the coating trolley, so as to adjust the distance between the auxiliary cathode arranged on the auxiliary cathode device and a hanging rod arranged on the coating trolley, adjust the electric field distribution in the height direction of the coating trolley during glow discharge coating, and realize the control of the film thickness uniformity of coating pieces loaded on different height positions of the hanging rod.

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