An adjustable stiffness ultra-low frequency active and passive anti-microvibration base based on a lever

Abstract

The present invention provides an adjustable-stiffness ultra-low-frequency main passive anti-microvibration pedestal based on a lever, which includes a base, a top plate and support columns. On both sides of the bottom of the base, a left cavity wall and a right cavity wall are vertically connected respectively. A left air cavity and a right air cavity are respectively arranged inside the left cavity wall and the right cavity wall. On the right side of the top of the left cavity wall, a left diaphragm is connected. On the left side of the top of the right cavity wall, a right diaphragm is connected. On the outer sides of the left diaphragm and the right diaphragm, a left friction block and a right friction block are connected respectively. In the middle of the bottom of the top plate, a support column is vertically connected. A friction block is installed on the outer side of the support column. The support column is inserted into the space surrounded by the left cavity wall and the right cavity wall, and the friction block is slidably connected with the left friction block and the right friction block. The system of the present invention can achieve vibration control in the range of 0.2 Hz to 200 Hz, has a wide vibration isolation bandwidth and precise positioning, can be adapted to different models of precision instruments, has a maximum load-bearing capacity of up to 3000 kg, has a wide application range and strong versatility.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor special devices, and specifically to an adjustable stiffness ultra-low frequency main and passive anti-microvibration base based on a lever. Background Technique

[0002] At present, the semiconductor industry is developing rapidly. The precision requirements of semiconductor production equipment are getting higher and higher, and the equipment is also more and more sensitive to the environment such as micro-vibration. A little micro-vibration will reduce the yield of the equipment, and even make the equipment unable to work properly. Therefore, the isolation of micro-vibration has become more and more important.

[0003] Traditional vibration isolation devices are mostly single springs or dampers, which are directly connected to the support rod of the vibration isolator body and the vibration isolator housing. And the instantaneous direction of elastic vibration is the same as the vibration direction. After absorbing the vibration energy, it needs to release the energy through the restoration of deformation. The vibration isolation effect is not ideal when subjected to high-frequency continuous vibration. Due to its own inherent properties, the traditional vibration isolator has an unsatisfactory vibration isolation effect for low-frequency, especially ultra-low frequency vibration. In addition, on the basis of the traditional vibration isolator, a negative stiffness mechanism is introduced to form a quasi-zero stiffness vibration isolator, which has the characteristics of high static load-bearing capacity and low dynamic stiffness. It can not only bear the self-weight of the equipment without large deformation, but also the dynamic stiffness near the static equilibrium position approaches zero, which is a relatively ideal passive vibration isolator. However, most passive quasi-zero stiffness vibration isolators are only designed for a single vibration isolation object. Once the vibration isolator is manufactured, the structural parameters cannot be changed. Therefore, when the vibration isolation quality changes, such as overloading or underloading, the vibration isolator no longer has the quasi-zero stiffness characteristic, and the vibration isolation performance deteriorates or even the effect is worse than that of the linear vibration isolation system, which greatly limits its application range. A small number of vibration isolators can still have the quasi-zero stiffness characteristic under variable loads, but there is a problem that the vibration isolation mass cannot be continuously changed, and the vibration isolator can only maintain the quasi-zero stiffness at several specific masses, with a small application range. Summary of the Invention

[0004] The purpose of the present invention is to provide an adjustable stiffness ultra-low frequency main and passive anti-microvibration base based on a lever to solve the problems existing in the above background technique.

[0005] The technical solution of the present invention is implemented as follows: An adjustable stiffness ultra-low frequency main and passive anti-microvibration base based on a lever, including a base, a top plate and support columns. On both sides of the bottom of the base, a left cavity wall and a right cavity wall are respectively vertically connected. Inside the left cavity wall and the right cavity wall, a left air cavity and a right air cavity are respectively provided. On the right side of the top of the left cavity wall, a left diaphragm is connected. On the left side of the top of the right cavity wall, a right diaphragm is connected. On the outer sides of the left diaphragm and the right diaphragm, a left friction block and a right friction block are respectively connected. In the middle of the bottom of the top plate, a support column is vertically connected. A friction block is installed on the outer side of the support column. The support column is inserted into the space enclosed by the left cavity wall and the right cavity wall, and the friction block is slidably connected with the left friction block and the right friction block. On the left and right parts of the bottom of the top plate, a first left support rod and a first right support rod are respectively installed. The bottom of the first left support rod is connected to a first left connecting rod by a pin. The other end of the first left connecting rod is connected to a left push rod by a pin. The left push rod is inserted into the left air cavity. A left piston is installed at the bottom of the left push rod. A left spring is installed between the bottom of the left piston and the base. A first left support platform is installed between the middle part of the first left connecting rod and the top of the left cavity wall. The bottom of the first right support rod is connected to a first right connecting rod by a pin. The other end of the first right connecting rod is connected to a right push rod by a pin. The right push rod is inserted into the right air cavity. A right piston is installed at the bottom of the right push rod. A right spring is installed between the bottom of the right piston and the base. A first right support platform is installed between the middle part of the first right connecting rod and the top of the right cavity wall. The bottom of the support column is vertically connected to a first support plate. A left connecting block and a right connecting block are respectively connected to the left and right sides of the first support plate. The left connecting block is connected to a second left connecting rod by a pin. At the top of the other end of the second left connecting rod, a left bracket a is installed. A left spring a is installed between the top of the left bracket a and the bottom of the left cavity wall. A second left support platform is also installed between the second left connecting rod and the bottom of the left cavity wall. A left slideway a is provided in the middle of the second left connecting rod. At the position vertically corresponding to the left slideway a at the bottom of the left cavity wall, a left slideway b is provided. The bottom of the second left support platform is slidably connected with the left slideway a. The top of the second left support platform is slidably connected with the left slideway b and fixed by a first left locking device. The right connecting block is connected to a second right connecting rod by a pin. At the top of the other end of the second right connecting rod, a right bracket a is installed. A right spring a is installed between the top of the right bracket a and the bottom of the right cavity wall. A second right support platform is also installed between the second right connecting rod and the bottom of the right cavity wall. A right slideway a is provided in the middle of the second right connecting rod. At the position vertically corresponding to the right slideway a at the bottom of the right cavity wall, a right slideway b is provided. The bottom of the second right support platform is slidably connected with the right slideway a. The top of the second right support platform is slidably connected with the right slideway b and fixed by a first right locking device. A permanent magnet is installed at the bottom of the first support plate. A second support plate is installed below the first support plate. An electromagnet is installed at the top of the second support plate. On the left and right parts of the bottom of the second support plate, a second left support rod and a second right support rod are respectively installed. The second left support rod is connected to a third left connecting rod by a pin.At the bottom of the other end of the third left connecting rod, a left bracket b is installed. Between the bottom of the left bracket b and the top of the base, a left spring b is installed. Between the third left connecting rod and the top of the base, a third left support platform is also installed. A left slideway c is provided in the middle of the third left connecting rod. At the position on the top of the base that is vertically corresponding to the left slideway c, a left slideway d is provided. The top of the third left support platform is slidably connected to the left slideway c, and the bottom of the third left support platform is slidably connected to the left slideway d and fixed by a second left locking device. The second right rod is connected to a third right connecting rod by a pin. At the bottom of the other end of the third right connecting rod, a right bracket b is installed. Between the bottom of the right bracket b and the top of the base, a right spring b is installed. Between the third right connecting rod and the top of the base, a third right support platform is also installed. A right slideway c is provided in the middle of the third right connecting rod. At the position on the top of the base that is vertically corresponding to the right slideway c, a right slideway d is provided. The top of the third right support platform is slidably connected to the right slideway c, and the bottom of the third right support platform is slidably connected to the right slideway d and fixed by a second right locking device. Voice coil motors are respectively installed between the top of the left cavity wall and the top plate, and between the top of the right cavity wall and the top plate. A speed sensor and a position sensor are also installed at the bottom of the top plate. A controller is also installed at the top of the left cavity wall.,

[0006] Further, both the base and the top plate are made of stainless steel plates and are in a rectangular structure.

[0007] Further, the left air cavity is made of a stainless steel plate into a "Γ" shape structure, and the right air cavity is arranged in a mirror image structure with the left air cavity.

[0008] Further, a left air inlet pipe is installed at the lower part of the left air cavity, and a left pneumatic valve is installed on the left air inlet pipe.

[0009] Further, a right air inlet pipe is installed at the lower part of the right air cavity, and a right pneumatic valve is installed on the right air inlet pipe.

[0010] Further, a left sealing block is also installed between the left push rod and the left cavity wall, and a right sealing block is also installed between the right push rod and the right cavity wall.

[0011] Further, the controller is connected to the electromagnet, the voice coil motor, the speed sensor, and the position sensor through cables.

[0012] The beneficial effects of the present invention are as follows:

[0013] The present invention realizes load-bearing through the lever action combined with the air-floating device, and the air pressure is adjustable, which can meet the load-bearing requirements of different precision instruments. At the same time, a magnetic-floating device with a parallel negative stiffness is connected. By adjusting the air pressure and magnetic force, the system can achieve static quasi-zero stiffness.

[0014] When the system encounters vibration, the present invention will break the original static quasi-zero stiffness state. During high-frequency vibration, through the lever action, the left push rod and the right push rod are pushed, thereby increasing the friction force on the support column, slowing down the movement of the support column, and achieving the effect of high-frequency vibration reduction. In addition, through the lever action, the left spring a and the right spring a are compressed to achieve high-frequency vibration reduction; low-frequency vibration reduction is achieved by driving the voice coil motor.

[0015] According to the different vibration attributes and different changes in the vibration source size of different precision instruments, the present invention can adjust the positions of the second left support table, the second right support table, the third left support table, and the third right support table by adjusting the positions of the first left locking device, the first right locking device, the second left locking device, and the second right locking device 1307, thereby adjusting the support points of the lever and changing the system stiffness to meet the vibration requirements of different precision instruments.

[0016] The system of the present invention can achieve vibration control in the range of 0.2 Hz to 200 Hz, has a wide vibration isolation bandwidth and accurate positioning, can adapt to different models of precision instruments, and has a maximum load capacity of up to 3000 kg, with a wide application range and strong versatility. Description of the Drawings

[0017] Figure 1 It is a schematic structural diagram of the present invention.

[0018] In the figure: 1 - base, 101 - left cavity wall, 1011 - left diaphragm, 1012 - left friction block, 1013 - left air cavity, 1014 - left intake pipe, 1015 - left pneumatic valve, 102 - right cavity wall, 1011 - right diaphragm, 1022 - right friction block, 1023 - right air cavity, 1024 - right intake pipe, 1025 - right pneumatic valve, 2 - top plate, 3 - support column, 301 - friction block, 4 - first left support rod, 401 - first left connecting rod, 402 - first left support platform, 403 - left push rod, 404 - left piston, 405 - left spring, 5 - first right support rod, 501 - first right connecting rod, 502 - first right support platform, 503 - right push rod, 504 - right piston, 505 - right spring, 6 - first support plate, 7 - left connecting block, 701 - second left connecting rod, 702 - second left support platform, 703 - left bracket a, 704 - left spring a, 705 - left slideway a, 706 - left slideway b, 707 - first left locking device, 8 - right connecting block, 801 - second right connecting rod, 802 - second right support platform, 803 - right bracket a, 804 - right spring a, 805 - right slideway a, 806 - right slideway b, 807 - first right locking device, 9 - permanent magnet, 10 - electromagnet, 11 - second support plate, 12 - second left support rod, 1201 - third left connecting rod, 1202 - third left support platform, 1203 - left bracket b, 1204 - left spring b, 1205 - left slideway c, 1206 - left slideway d, 1207 - second left locking device, 13 - second right support rod, 1301 - third right connecting rod, 1302 - third right support platform, 1303 - right bracket b, 1204 - right spring b, 1305 - right slideway c, 1306 - right slideway d, 1307 - second right locking device, 14 - voice coil motor, 15 - speed sensor, 16 - position sensor, 17 - controller, 18 - left sealing block, 19 - right sealing block. Embodiment

[0019] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative work shall fall within the protection scope of the present invention.

[0020] As Figure 1As shown in the figure, a lever-based adjustable stiffness ultra-low frequency main passive anti-microvibration pedestal includes a base 1, a top plate 2 and a support column 3. On both sides of the bottom of the base 1, a left cavity wall 101 and a right cavity wall 102 are vertically connected respectively. The left cavity wall 101 and the right cavity wall 102 are respectively provided with a left air cavity 1013 and a right air cavity 1023. On the right side of the top of the left cavity wall 101, a left diaphragm 1011 is connected. On the left side of the top of the right cavity wall 1023, a right diaphragm 1021 is connected. On the outer sides of the left diaphragm 1011 and the right diaphragm 1021, a left friction block 1012 and a right friction block 1022 are connected respectively. In the middle of the bottom of the top plate 2, a support column 3 is vertically connected. A friction block 301 is installed on the outside of the support column 3. The support column 3 is inserted into the space enclosed by the left cavity wall 101 and the right cavity wall 102, and the friction block 301 is slidably connected with the left friction block 1012 and the right friction block 1022. On the left and right parts of the bottom of the top plate 2, a first left support rod 4 and a first right support rod 5 are installed respectively. The bottom of the first left support rod 4 is connected to a first left connecting rod 401 by a pin. The other end of the first left connecting rod 401 is connected to a left push rod 403 by a pin. The left push rod 403 is inserted into the left air cavity 1013. A left piston 404 is installed at the bottom of the left push rod 403. A left spring 405 is installed between the bottom of the left piston 404 and the base 1. A first left support platform 402 is installed between the middle part of the first left connecting rod 401 and the top of the left cavity wall 101. The bottom of the first right support rod 5 is connected to a first right connecting rod 501 by a pin. The other end of the first right connecting rod 501 is connected to a right push rod 503 by a pin. The right push rod 503 is inserted into the right air cavity 102. A right piston 504 is installed at the bottom of the right push rod 503. A right spring 505 is installed between the bottom of the right piston 504 and the base 1. A first right support platform 502 is installed between the middle part of the first right connecting rod 501 and the top of the right cavity wall 102. The bottom of the support column 3 is vertically connected to a first support plate 6. On the left and right sides of the first support plate 6, a left connecting block 7 and a right connecting block 8 are connected respectively. The left connecting block 7 is connected to a second left connecting rod 701 by a pin. At the top of the other end of the second left connecting rod 701, a left bracket a703 is installed. A left spring a704 is installed between the top of the left bracket a703 and the bottom of the left cavity wall 101. A second left support platform 702 is also installed between the second left connecting rod 701 and the bottom of the left cavity wall 101. A left slideway a705 is opened in the middle of the second left connecting rod 701. At the position vertically corresponding to the left slideway a705 at the bottom of the left cavity wall 101, a left slideway b706 is opened. The bottom of the second left support platform 702 is slidably connected with the left slideway a705. The top of the second left support platform 702 is slidably connected with the left slideway b706 and fixed by a first left locking device 707. The right connecting block 8 is connected to a second right connecting rod 801 by a pin. At the top of the other end of the second right connecting rod 801, a right bracket a803 is installed. A right spring a804 is installed between the top of the right bracket 803a and the bottom of the right cavity wall 102.A second right support platform 802 is further installed between the second right connecting rod 801 and the bottom of the right cavity wall 102. A right slideway a805 is formed in the middle of the second right connecting rod 801. A right slideway b806 is formed at a position on the bottom of the right cavity wall 102 that is vertically corresponding to the right slideway a805. The bottom of the second right support platform 802 is slidably connected to the right slideway a805. The top of the second right support platform 802 is slidably connected to the right slideway b806 and is fixed by a first right locking device 807. A permanent magnet 9 is installed at the bottom of the first support plate 6. A second support plate 11 is installed below the first support plate 9. An electromagnet 10 is installed at the top of the second support plate 11. Second left and right support rods 12 and 13 are respectively installed at the left and right positions at the bottom of the second support plate 11. The second left support rod 12 is connected to a third left connecting rod 1201 by a pin. The bottom of the other end of the third left connecting rod 1201 is installed with a left support bracket b1203. A left spring b1204 is installed between the bottom of the left support bracket b1203 and the top of the base 1. A third left support platform 1202 is further installed between the third left connecting rod 1201 and the top of the base 1. A left slideway c1205 is formed in the middle of the third left connecting rod 1201. A left slideway d1206 is formed at a position on the top of the base 1 that is vertically corresponding to the left slideway c1205. The top of the third left support platform 1202 is slidably connected to the left slideway c1202. The bottom of the third left support platform 1202 is slidably connected to the left slideway d1206 and is fixed by a second left locking device 1207. The second right support rod 13 is connected to a third right connecting rod 1301 by a pin. The bottom of the other end of the third right connecting rod 1301 is installed with a right support bracket b1303. A right spring b1304 is installed between the bottom of the right support bracket b1303 and the top of the base 1. A third right support platform 1302 is further installed between the third right connecting rod 1301 and the top of the base 1. A right slideway c1305 is formed in the middle of the third right connecting rod 1301. A right slideway d1306 is formed at a position on the top of the base 1 that is vertically corresponding to the right slideway c1305. The top of the third right support platform 1302 is slidably connected to the right slideway c1305. The bottom of the third right support platform 1302 is slidably connected to the right slideway d1306 and is fixed by a second right locking device 1307. Voice coil motors 14 are respectively installed between the top of the left cavity wall 101 and the top plate 2 and between the top of the right cavity wall 102 and the top plate 2. A speed sensor 15 and a position sensor 16 are further installed at the bottom of the top plate 2. A controller 17 is further installed at the top of the left cavity wall 101.,

[0021] The base 1 and the top plate 2 are both made of stainless steel plates and are in a rectangular structure.

[0022] The left air cavity 1013 is made of a stainless steel plate in a "Γ" shape structure, and the right air cavity 1023 is arranged in a mirror image structure with the left air cavity 1013.

[0023] A left air inlet pipe 1014 is installed at the lower part of the left air cavity 1013, and a left pneumatic valve 1015 is installed on the left air inlet pipe 1014.

[0024] A right air inlet pipe 1024 is installed at the lower part of the right air cavity 1023, and a right pneumatic valve 1025 is installed on the right air inlet pipe 1024.

[0025] A left sealing block 18 is further installed between the left push rod 403 and the left cavity wall 101, and a right sealing block 19 is further installed between the right push rod 503 and the right cavity wall 102.

[0026] The controller 17 is connected to the electromagnet 10, the voice coil motor 14, the speed sensor 15, and the position sensor 16 through cables.

[0027] During installation, the precision instrument is installed on the top plate 2. According to the weight requirement of the precision instrument, the air pressures in the left air cavity 1013 and the right air cavity 1023 are adjusted by controlling the left pneumatic valve 1015 and the right pneumatic valve 1025 to achieve load bearing. Then, the controller 17 controls the magnitude of the magnetic field of the electromagnet 10 to adjust the gravitational force between the permanent magnet 9 and the electromagnet 10, so as to keep the top plate 2 in a horizontal static state position. At this time, the system reaches a quasi-zero stiffness state in the vertical direction.

[0028] During operation, when the precision instrument generates vibrations, the vibration signals are collected by the speed sensor 15 and the position sensor 16, and then the vibration signals are transmitted to the controller 17. When there is a high-frequency vibration source, first, the top plate 2 pushes the first left support rod 401 and the first right support rod 501 to move. Through the lever action of the first left support rod 401 and the first left support platform 402, and the first right support rod 501 and the first right support platform 502, the left push rod 403 and the right push rod 503 are pushed to move, driving the left piston 404 and the right piston 504 to move, thereby changing the air pressures in the left air cavity 1013 and the right air cavity 1023, increasing the friction force between the left friction block 1012, the right friction block 1022 and the friction block 301 to slow down the movement of the support column 3, thus achieving a certain high-frequency vibration damping effect. In addition, through the lever action of the second left connecting rod 701 and the second left support platform 702, and the second right connecting rod 801 and the second right support platform 802, the left spring a704 and the right spring a804 are compressed, achieving a high-frequency vibration damping effect on the support column 3. At the same time, through the lever action of the second left support rod 12, the third left connecting rod 1201, the third left support platform 1202 and the left spring b1204, and the second right support rod 13, the third right connecting rod 1301, the third right support platform 1302 and the right spring b1304 below the electromagnet 10, the precise positioning of the electromagnet 10 is maintained. When there is a low-frequency vibration source, the controller 17 controls the voice coil motor 14 to drive to achieve low-frequency vibration damping.

[0029] In addition, according to the different vibration attributes and different changes in the size of the vibration source of different precision instruments, by adjusting the positions of the first left locking device 707, the first right locking device 807, the second left locking device 1207, and the second right locking device 1307, the positions of the second left support platform 702, the second right support platform 802, the third left support platform 1202, and the third right support platform 1302 are adjusted, thereby adjusting the support points of the lever and changing the system stiffness to meet the vibration requirements of different precision instruments.

[0030] The foregoing are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. An adjustable stiffness ultra-low frequency main passive anti-microvibration pedestal based on a lever, comprising a base, a top plate and support columns, characterized in that, On both sides of the bottom of the base, a left cavity wall and a right cavity wall are vertically connected respectively. Inside the left cavity wall and the right cavity wall, a left air cavity and a right air cavity are respectively provided. The left air cavity is made of a stainless steel plate into a "Γ" - shaped structure, and the right air cavity is arranged in a mirror - image structure with the left air cavity. On the right side of the top of the left cavity wall, a left diaphragm is connected. On the left side of the top of the right cavity wall, a right diaphragm is connected. On the outer sides of the left diaphragm and the right diaphragm, a left friction block and a right friction block are respectively connected. In the middle of the bottom of the top plate, a support column is vertically connected. A friction block is installed on the outside of the support column. The support column is inserted into the space enclosed by the left cavity wall and the right cavity wall, and the friction block is slidably connected with the left friction block and the right friction block. On the left and right parts of the bottom of the top plate, a first left support rod and a first right support rod are respectively installed. The bottom of the first left support rod is connected to a first left connecting rod by a pin. The other end of the first left connecting rod is connected to a left push rod by a pin. The left push rod is inserted into the inside of the left air cavity. A left piston is installed at the bottom of the left push rod. A left spring is installed between the bottom of the left piston and the base. A first left support platform is installed between the middle part of the first left connecting rod and the top of the left cavity wall. The bottom of the first right support rod is connected to a first right connecting rod by a pin. The other end of the first right connecting rod is connected to a right push rod by a pin. The right push rod is inserted into the inside of the right air cavity. A right piston is installed at the bottom of the right push rod. A right spring is installed between the bottom of the right piston and the base. A first right support platform is installed between the middle part of the first right connecting rod and the top of the right cavity wall. The bottom of the support column is vertically connected to a first support plate. On the left and right sides of the first support plate, a left connecting block and a right connecting block are respectively connected. The left connecting block is connected to a second left connecting rod by a pin. At the top of the other end of the second left connecting rod, a left bracket a is installed. A left spring a is installed between the top of the left bracket a and the horizontal bottom of the left cavity wall. A second left support platform is also installed between the second left connecting rod and the horizontal bottom of the left cavity wall. A left slideway a is provided in the middle of the second left connecting rod. At the vertically corresponding part of the horizontal bottom of the left cavity wall and the left slideway a, a left slideway b is provided. The bottom of the second left support platform is slidably connected with the left slideway a. The top of the second left support platform is slidably connected with the left slideway b and is fixed by a first left locking device. The right connecting block is connected to a second right connecting rod by a pin. At the top of the other end of the second right connecting rod, a right bracket a is installed. A right spring a is installed between the top of the right bracket a and the horizontal bottom of the right cavity wall. A second right support platform is also installed between the second right connecting rod and the horizontal bottom of the right cavity wall. A right slideway a is provided in the middle of the second right connecting rod. At the vertically corresponding part of the horizontal bottom of the right cavity wall and the right slideway a, a right slideway b is provided. The bottom of the second right support platform is slidably connected with the right slideway a. The top of the second right support platform is slidably connected with the right slideway b and is fixed by a first right locking device. A permanent magnet is installed at the bottom of the first support plate. A second support plate is installed below the first support plate. An electromagnet is installed on the top of the second support plate. On the left and right parts of the bottom of the second support plate, a second left support rod and a second right support rod are respectively installed. The second left support rod is connected to a third left connecting rod by a pin. At the bottom of the other end of the third left connecting rod, a left bracket b is installed. A left spring b is installed between the bottom of the left bracket b and the top of the base. A third left support platform is also installed between the third left connecting rod and the top of the base. A left slideway c is provided in the middle of the third left connecting rod,At the vertical corresponding part between the top of the base and the left slideway c, a left slideway d is provided. The top of the third left support platform is slidably connected to the left slideway c, the bottom of the third left support platform is slidably connected to the left slideway d and fixed by the second left locking device. The second right rod is connected to the third right connecting rod by a pin. At the bottom of the other end of the third right connecting rod, a right support bracket b is installed. Between the bottom of the right support bracket b and the top of the base, a right spring b is installed. Between the third right connecting rod and the top of the base, a third right support platform is also installed. A right slideway c is provided in the middle of the third right connecting rod. At the vertical corresponding part between the top of the base and the right slideway c, a right slideway d is provided. The top of the third right support platform is slidably connected to the right slideway c, the bottom of the third right support platform is slidably connected to the right slideway d and fixed by the second right locking device. Voice coil motors are respectively installed between the top of the left cavity wall and the top plate, and between the top of the right cavity wall and the top plate. A speed sensor and a position sensor are also installed at the bottom of the top plate. A controller is also installed at the top of the left cavity wall., 2. The adjustable stiffness ultra-low frequency main passive anti-microvibration pedestal based on a lever according to claim 1, characterized in that, Both the base and the top plate are made of stainless steel plates and are in rectangular structures.

3. The adjustable stiffness ultra-low frequency main passive anti-microvibration pedestal based on a lever according to claim 1, characterized in that, A left intake pipe is installed at the lower part of the left air chamber, and a left pneumatic valve is installed on the left intake pipe.

4. An adjustable stiffness ultra-low frequency main passive anti-microvibration pedestal based on a lever according to claim 1, characterized in that, A right intake pipe is installed at the lower part of the right air chamber, and a right pneumatic valve is installed on the right intake pipe.

5. An adjustable stiffness ultra-low frequency main passive anti-microvibration pedestal based on a lever according to claim 1, characterized in that, A left sealing block is also installed between the left push rod and the left chamber wall, and a right sealing block is also installed between the right push rod and the right chamber wall.

6. The adjustable stiffness ultra-low frequency main passive anti-microvibration pedestal based on a lever according to claim 1, characterized in that, The controller is connected to the electromagnet, voice coil motor, speed sensor, and position sensor through cables.

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