Quartz crucible repairing apparatus and repairing method thereof

Abstract

The application relates to a quartz crucible repairing device and a repairing method thereof, and the quartz crucible repairing device comprises a first plate body, a first rotating body and a second rotating body which are arranged in parallel on the first plate body and are rotationally connected, and the first rotating body and the second rotating body can support the outer peripheral wall of the quartz crucible; a second plate body is vertically arranged on the first plate body, a supporting disc is arranged on the first side of the second plate body, the supporting disc comprises a disc body and a plurality of supporting claws which are rotationally connected on the disc body and are arranged in a circumferential array, and the plurality of supporting claws are used for supporting the outer bottom wall of the quartz crucible. The first plate body and the second plate body support and position the quartz crucible, workers can conveniently repair the inner wall of the quartz crucible through polishing tools and polishing tools, especially the inner bottom wall of the outer protruding arc-shaped quartz crucible can be accurately polished, the polishing efficiency and the polishing precision are improved, and damage to the non-polishing part of the quartz crucible can be avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of quartz crucible, in particular to a quartz crucible repairing device and a repairing method thereof. BACKGROUND

[0002] In the production process of melting, the quartz crucible is easily polluted by impurities from raw materials, environment, equipment and personnel operation, etc., which causes product defects such as bubbles, black spots, white spots and other impurities on the inner wall of the quartz crucible.

[0003] When the quartz crucible is used to prepare silicon rods, the inner wall of the quartz crucible directly contacts the silicon solution. If the impurities on the inner wall of the quartz crucible contact the silicon solution, the prepared silicon rods will be of poor quality and cannot be used. The impurities or bubbles in the transparent layer of the quartz crucible are close to the inner wall, and in the process of silicon rod single crystal growth, they are easily dissolved into the silicon solution from the transparent layer due to the erosion of molten silicon to the quartz crucible, which also has a great impact on the quality of silicon single crystal. Therefore, the quartz crucible with product defects cannot be used to prepare silicon rods, and the inner wall of the quartz crucible needs to be further polished and processed.

[0004] However, due to the increasing size of the quartz crucible, the shortage of raw materials for manufacturing and the rising price of raw materials, the manufacturing cost of the quartz crucible is increasing. In order to reduce the cost and improve the success rate of products, there is an urgent need for a device that can repair the defects in the inner wall and the transparent layer of the quartz crucible with a larger diameter. SUMMARY

[0005] (I) Technical problems to be solved

[0006] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present application provides a quartz crucible repairing device, which solves the technical problem that the quartz crucible prepared is prone to defects, and the quartz crucible with product defects cannot be used to prepare silicon rods, resulting in high manufacturing cost.

[0007] (II) Technical solutions

[0008] In order to achieve the above-mentioned purposes, the main technical solutions adopted by the present application include:

[0009] In a first aspect, the present application provides a quartz crucible repairing device, comprising:

[0010] A first plate body, a first rotating body and a second rotating body are arranged in parallel on the first plate body and are rotationally connected, and the first rotating body and the second rotating body can support the outer peripheral wall of the quartz crucible;

[0011] A second plate body is vertically arranged on the first plate body, a supporting disc is arranged on the first side of the second plate body, the supporting disc comprises a disc body and a plurality of supporting claws arranged in a circumferential array and rotatably connected to the disc body, and the plurality of supporting claws are used for supporting the outer bottom wall of the quartz crucible.

[0012] According to the application, the top of the first plate body is parallel to two rod bodies;

[0013] The first rotating body and the second rotating body are both wheel bodies, and the first rotating body and the second rotating body are correspondingly sleeved and rotatably connected to the two rod bodies.

[0014] According to the application, a vertical guide rail is arranged on the first side of the second plate body, and the supporting disc is slidably arranged on the vertical guide rail through a sliding block.

[0015] According to the application, a vertical rod is further rotatably connected to the first side of the second plate body, the vertical rod is fixedly connected to a first lifting handle, and the vertical rod is threadedly connected to the supporting disc;

[0016] The first lifting handle is used for driving the vertical rod to rotate around the axis of the vertical rod, and the vertical rod drives the supporting disc to move up and down.

[0017] According to the application, a base is further included;

[0018] The first plate body and the second plate body are rotatably connected to the base along the connecting line of the two plate bodies;

[0019] An angle driving assembly is further included, the angle driving assembly is arranged on the base, and the angle driving assembly is used for driving the first plate body and the second plate body to rotate.

[0020] According to the application, the angle driving assembly comprises a driving motor arranged on the base, a driving gear fixedly connected to the output shaft of the driving motor, and a driven gear meshed and driven with the driving gear and fixed to the first plate body and / or the second plate body.

[0021] According to the application, a telescopic rod is further included, a first end of the telescopic rod is rotatably connected to the base, and a second end of the telescopic rod is rotatably connected to the second side of the second plate body.

[0022] According to the application, a wheel body is arranged at the bottom of the base;

[0023] A lifting platform is arranged at the bottom of the base, and a support plate at the bottom of the lifting platform can be supported on the ground.

[0024] According to the application, the lifting platform comprises a four-bar linkage mechanism, a threaded rod arranged horizontally and threadedly connected to two opposite hinge points in the four-bar linkage mechanism, and a second lifting handle fixedly connected to the threaded rod and used for driving the threaded rod to rotate about its own axis.

[0025] In a second aspect, the application further provides a repairing method of a quartz crucible repairing device, characterized by comprising the following steps:

[0026] S1: supporting the outer peripheral wall of the quartz crucible on the first rotating body and the second rotating body of the first plate body, and supporting the outer bottom wall of the quartz crucible on the plurality of support claws of the support disc;

[0027] S2: polishing the inner wall of the quartz crucible (6) after removing the defects on the inner wall of the quartz crucible by grinding.

[0028] (III) Advantages

[0029] The quartz crucible repairing device of the application is used for repairing defects of the inner wall (including the inner wall surface and the transparent layer) of the quartz crucible, so that the repaired quartz crucible can be applied to the preparation of silicon rods, thereby reducing the manufacturing cost of the quartz crucible. The first rotating body and the second rotating body on the first plate body in the quartz crucible repairing device can support the outer peripheral wall of the quartz crucible, and the support disc on the second plate body can support the outer bottom wall of the quartz crucible, so that the first plate body and the second plate body support and position the quartz crucible, facilitating the staff to repair the inner wall of the quartz crucible by using the grinding tool and the polishing tool, especially facilitating the accurate grinding of the outer protruding arc-shaped inner bottom wall of the quartz crucible, improving the grinding efficiency and grinding accuracy, and avoiding the influence of the shaking of the quartz crucible on the grinding accuracy and the damage to the non-grinding parts of the quartz crucible. At the same time, the first rotating body and the second rotating body support the outer peripheral wall of the quartz crucible, which can rotate the quartz crucible around the axis of the quartz crucible during the repair, so as to facilitate the staff to repair the defects at different positions of the quartz crucible. At the same time, the support claws can rotate to support the outer bottom wall with different radii of the quartz crucible. BRIEF DESCRIPTION OF DRAWINGS

[0030] Figure 1 It is a three-dimensional schematic view of the quartz crucible repairing device of the application;

[0031] Figure 2 It is an assembly schematic view of the quartz crucible repairing device and the quartz crucible.

[0032]

Explanation of reference numerals

[0033] 1: first plate body; 11: first rotating body; 12: second rotating body; 13: rod body;

[0034] 2: second plate body; 21: support disc; 211: disc body; 212: support claw; 22: vertical guide rail; 23: sliding block; 24: vertical rod; 25: first lifting handle;

[0035] 3: base; 31: wheel body; 32: lifting platform; 321: four-bar linkage mechanism; 322: threaded rod; 324: support plate;

[0036] 4: angle driving assembly; 41: driving motor; 42: driving gear; 43: driven gear;

[0037] 5: telescopic rod;

[0038] 6: quartz crucible. DETAILED DESCRIPTION

[0039] In order to better explain the present application, so as to be understood, the present application is described in detail below by specific embodiments, combined with the accompanying drawings.

[0040] Referring to Figure 1 and Figure 2 The quartz crucible repairing device provided by the embodiment of the present application is used for repairing the inner wall (including the inner wall surface and the transparent layer) of the quartz crucible 6 which is open at one end, cylindrical and has an outward protruding arc-shaped bottom, is especially suitable for repairing the quartz crucible 6 with a large diameter of 26 inches or more, and can repair the defects of the inner wall (including the inner wall surface and the transparent layer) of the quartz crucible 6, so that the repaired quartz crucible 6 can be applied to prepare silicon rods, thereby reducing the manufacturing cost of the quartz crucible 6.

[0041] The quartz crucible repairing device comprises a first plate body 1 and a second plate body 2. The top of the first plate body 1 is provided in parallel with and rotatably connected to a first rotating body 11 and a second rotating body 12, which can support the outer peripheral wall of the quartz crucible 6. The second plate body 2 is vertically arranged on the first plate body 1, and a support disc 21 is arranged on the first side of the second plate body 2. The support disc 21 comprises a disc body 211 and a plurality of support claws 212 arranged in a circumferential array and rotatably connected to the disc body 211, which can support the outer bottom wall of the quartz crucible 6. The first plate body 1 and the second plate body 2 can support and position the quartz crucible 6, so that the staff can repair the inner wall of the quartz crucible 6 by using polishing tools and polishing tools, especially accurately polish the outer protruding arc-shaped inner bottom wall of the quartz crucible 6, thereby improving the polishing efficiency and polishing accuracy, and avoiding the influence of the shaking of the quartz crucible 6 on the polishing accuracy and the damage to the non-polishing part of the quartz crucible 6. At the same time, the first rotating body 11 and the second rotating body 12 support the outer peripheral wall of the quartz crucible 6, which can rotate the quartz crucible 6 around the axis of the quartz crucible 6 during the repairing process, so that the staff can repair the defects at different positions of the quartz crucible 6. At the same time, the support claws 212 can be rotated to adapt to the support of the outer bottom wall with different radii of the quartz crucible 6.

[0042] Specifically, the abutting surfaces of the plurality of support claws 212 can form a concave surface supporting the outer bottom wall of the quartz crucible 6, so as to adapt to the support of the outer protruding arc-shaped outer bottom wall of the quartz crucible 6.

[0043] Further, the top of the first plate body 1 is provided in parallel with two rod bodies 13 through a support seat, the first rotating body 11 and the second rotating body 12 are both wheel bodies, and the first rotating body 11 and the second rotating body 12 are correspondingly sleeved and rotatably connected to the two rod bodies 13. Preferably, the number of the first rotating body 11 and the second rotating body 12 is multiple, and the plurality of first rotating bodies 11 and the plurality of second rotating bodies 12 are arranged in the axial direction of the corresponding rod body 13, so as to improve the support stability of the outer peripheral wall of the quartz crucible 6.

[0044] Further, the support claws 212 are rotatably connected to the disc body 211 through a pin shaft.

[0045] Preferably, the number of the support claws 212 is six, so as to stably support the outer bottom wall of the quartz crucible 6. It should be noted that the above number is only an example, and the specific number is determined according to actual needs.

[0046] Further, the first side of the second plate body 2 is provided with a vertical guide rail 22, and the support disc 21 is slidably arranged on the vertical guide rail 22 through a sliding block 23, so as to adjust the position of the support disc 21, thereby being suitable for supporting the outer bottom wall of the quartz crucible 6 with different diameters.

[0047] Specifically, the first side of the second plate body 2 is rotationally connected with the vertical rod 24 through a bearing, the vertical rod 24 is fixedly connected with the first lifting handle 25, and the vertical rod 24 is threadedly connected with the supporting disc 21.

[0048] In use, the first lifting handle 25 is used to drive the vertical rod 24 to rotate about its own axis, and the vertical rod 24 drives the supporting disc 21 to move up and down.

[0049] Further, the quartz crucible repairing device further comprises a base 3. The first plate body 1 and the second plate body 2 are arranged on the base 3, and the base 3 is used to support the first plate body 1 and the second plate body 2.

[0050] Specifically, the bottom of the base 3 is provided with a wheel body 31, so as to facilitate pushing the quartz crucible repairing device as a whole to a working position through the base 3.

[0051] Specifically, the bottom of the base 3 is further provided with a lifting platform 32. The supporting plate 324 at the bottom of the lifting platform 32 can be supported on the ground. When the quartz crucible repairing device is moved to the working position, the lifting platform 32 is supported on the ground by the supporting plate 324, so as to avoid displacement of the quartz crucible repairing device.

[0052] More specifically, the lifting platform 32 is an electric jack;

[0053] Alternatively, the lifting platform 32 is a manual jack. The lifting platform 32 comprises a four-bar linkage mechanism 321, a threaded rod 322 arranged horizontally and threadedly connected with two hinge points arranged oppositely in the four-bar linkage mechanism 321, and a second lifting handle fixedly connected and used to drive the threaded rod 322 to rotate about its own axis. In use, the second lifting handle is rotated to drive the threaded rod 322 to rotate about its own axis, and the threaded rod 322 can drive the two hinge points arranged oppositely in the four-bar linkage mechanism 321 to move horizontally towards or away from each other, so as to lengthen or shorten the four-bar linkage mechanism 321 in the vertical direction, so that the supporting plate 324 at the bottom of the lifting platform 32 is supported or separated from the ground. The structure of this arrangement is simple, easy to operate, and has a relatively low cost.

[0054] Preferably, the lifting platform 32 is arranged on both sides of the base 3, so as to improve the stability of the lifting platform 32 in supporting the base 3.

[0055] Further, the first plate body 1 and the second plate body 2 are rotationally connected with the base 3 about the connecting line of the two plate bodies, so as to adjust the included angle between the axis of the quartz crucible 6 supported on the first plate body 1 and the second plate body 2 and the horizontal plane.

[0056] In the repairing process, due to the limitation of the shape and size of the quartz crucible 6 and the limitation of the staff holding the polishing tool, it is difficult to repair the defects on the outer protruding arc-shaped inner bottom wall of the quartz crucible 6, and the non-repairing part of the quartz crucible 6 is easily damaged. In the quartz crucible repairing device, the first plate body 1 and the second plate body 2 are rotatably connected to the base 3, so that the angle between the axis of the quartz crucible 6 supported on the first plate body 1 and the second plate body 2 and the horizontal plane can be adjusted, the posture of the quartz crucible 6 to be repaired can be changed, the staff can accurately repair the defects at different positions on the inner wall of the quartz crucible 6, and damage to the non-polishing part of the quartz crucible 6 can be avoided.

[0057] Further, the quartz crucible repairing device further comprises an angle driving assembly 4. The angle driving assembly 4 is arranged on the base 3, and the angle driving assembly 4 is used to drive the first plate body 1 and the second plate body 2 to rotate.

[0058] Specifically, the angle driving assembly 4 comprises a driving motor 41 arranged on the base 3, a driving gear 42 fixedly connected to the output shaft of the driving motor 41, and a driven gear 43 meshed with the driving gear 42 and fixed on the first plate body 1 and / or the second plate body 2.

[0059] In use, the driving motor 41 drives the driving gear 42 to rotate, and the driving gear 42 drives the first plate body 1 and the second plate body 2 to rotate through the driven gear 43.

[0060] Specifically, the quartz crucible repairing device further comprises a telescopic rod 5. The first end of the telescopic rod 5 is hinged to the base 3, and the second end of the telescopic rod 5 is hinged to the second side of the second plate body 2. When the first plate body 1 and the second plate body 2 rotate, the telescopic rod 5 can correspondingly extend and support the second plate body 2, so as to improve the support stability of the first plate body 1 and the second plate body 2 to the quartz crucible 6.

[0061] More specifically, the telescopic rod 5 is a pneumatic telescopic rod or an electric telescopic rod.

[0062] Preferably, after adjusting the angle between the axis of the quartz crucible 6 and the horizontal plane and / or rotating the quartz crucible 6 around the axis of the quartz crucible 6, the quartz crucible 6 is fixed on the first plate body 1 by a bandage to avoid the quartz crucible 6 from being turned over during the repairing process. The two ends of the bandage are preferably provided with ratchet locking buckles, so as to facilitate the connection and separation of the two ends of the bandage.

[0063] Preferably, the number of telescopic rods 5 is two, and the two telescopic rods 5 are arranged in the width direction of the second plate body 2, so as to improve the support stability of the second plate body 2.

[0064] Further, the repairing method of the quartz crucible repairing device comprises the following steps:

[0065] S1: The outer peripheral wall of the quartz crucible 6 is supported on the first rotating body 11 and the second rotating body 12 of the first plate body 1, and the outer bottom wall of the quartz crucible 6 is supported on the plurality of support claws 212 of the support disc 21.

[0066] S2: After the defects on the inner wall of the quartz crucible 6 are polished, the inner wall of the quartz crucible 6 is polished.

[0067] Specifically, step S1 further comprises:

[0068] After the first lifting handle 25 is rotated to adjust the lifting of the support disc 21, the outer peripheral wall of the quartz crucible 6 is supported on the first rotating body 11 and the second rotating body 12, and the outer bottom wall of the quartz crucible 6 is supported on the plurality of support claws 212 of the support disc 21.

[0069] Step S2 further comprises:

[0070] The first plate body 1 and the second plate body 2 are driven to rotate by the driving motor 41 to adjust the included angle between the axis of the quartz crucible 6 supported on the first plate body 1 and the second plate body 2 and the horizontal plane, and to rotate the quartz crucible 6 around the axis of the quartz crucible 6 to adjust the state of the quartz crucible 6 in real time. After the defects on the inner wall of the quartz crucible 6 are polished by the worker, the inner wall of the quartz crucible 6 is polished.

[0071] More specifically, step S2 further comprises:

[0072] When the white spots and white packages on the inner wall of the quartz crucible 6 need to be repaired, the worker uses fine grinding to remove the defects on the inner wall of the quartz crucible 6, and then polishes, fine polishes and mirror polishes the inner wall of the polished quartz crucible 6 in turn.

[0073] When the black spots and electrode blocks on the inner wall of the quartz crucible 6 need to be repaired: the worker removes the defects on the inner wall of the quartz crucible 6 by coarse grinding, ordinary grinding and fine grinding in turn, and then polishes, fine polishes and mirror polishes the inner wall of the polished quartz crucible 6 in turn.

[0074] Meanwhile, after each process, the inner wall of the quartz crucible 6 and the surrounding environment are cleaned and dusted with pure water to ensure the cleanliness of the quartz crucible repair equipment, the worker's safety equipment and the operating environment, and to avoid secondary pollution to the quartz crucible 6 during the repair process.

[0075] Specifically, the grinding material used for coarse grinding and ordinary grinding is a diamond sheet, the grinding material used for fine grinding, polishing and fine polishing is a water abrasive sheet, and the grinding material used for mirror polishing is abrasive powder.

[0076] Specifically, the polishing and polishing tools are electric polishing tools such as an angle grinder, a handheld polisher and a hand drill, and polishing sheets or polishing sheets are installed.

[0077] In the present application, unless otherwise explicitly specified and limited, a first feature is "on" or "under" a second feature can mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature is "over", "above" and "on top of" a second feature can mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is horizontally higher than the second feature. A first feature is "under", "below" and "underneath" a second feature can mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is horizontally lower than the second feature.

[0078] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "an embodiment", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are contained in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, the skilled person in the art can combine and combine the features of different embodiments or examples and different embodiments or examples described in the present application without contradiction.

[0079] Although the embodiments of the present application have been shown and described above, it is understood that the above-described embodiments are exemplary and are not to be construed as limiting the present application, and those ordinarily skilled in the art can make changes, modifications, replacements and variations to the above-described embodiments within the scope of the present application.

Claims

1. A quartz crucible repair apparatus characterized by comprising: The utility model relates to a quartz crucible support device, including: First plate body (1), first rotating body (11) and second rotating body (12) are arranged in parallel and rotate and connect on the first plate body (1), first rotating body (11) and second rotating body (12) can support quartz crucible (6) and present the cylindrical outer wall of one end opening; Second plate body (2) is vertically arranged on the first plate body (1), the first side of second plate body (2) is provided with support disc (21), support disc (21) includes disc body (211) and a plurality of circumferential array support claws (212) that rotate and connect on disc body (211), a plurality of the abutting surface of support claw (212) can form the inner concave surface of support quartz crucible (6) and present the outer bottom wall of protruding arc shape, to be suitable for support quartz crucible (6) and present the outer bottom wall of protruding arc shape; Still including base (3); The first plate body (1) and the second plate body (2) are connected on the base (3) and rotate synchronously around the connecting line of both; Still including angle drive assembly (4), angle drive assembly (4) is arranged on the base (3), and angle drive assembly (4) is used to drive the rotation of first plate body (1) and second plate body (2); The angle drive assembly (4) includes a drive motor (41) arranged on the base (3), a driving gear (42) fixedly connected to an output shaft of the drive motor (41), and a driven gear (43) engaged with the driving gear (42) and fixed to the first plate body (1) and / or the second plate body (2). Still including telescopic rod (5), the first end of telescopic rod (5) is rotatably connected to the base (3), and the second end of telescopic rod (5) is rotatably connected to the second side of the second plate body (2).

2. The quartz crucible repair apparatus of claim 1, wherein The top of the first plate body (1) is parallel to two rod bodies (13); The first rotating body (11) and the second rotating body (12) are both wheel bodies, and the first rotating body (11) and the second rotating body (12) are correspondingly sleeved and rotatably connected to the two rod bodies (13).

3. The quartz crucible repair apparatus of claim 1, wherein The first side of the second plate body (2) is provided with a vertical guide rail (22), and the support disc (21) is slidably arranged on the vertical guide rail (22) through a sliding block (23).

4. The quartz crucible repair apparatus of claim 3, wherein The first side of the second plate body (2) is also rotatably connected to a vertical rod (24), the vertical rod (24) is fixedly connected to a first lifting handle (25), and the vertical rod (24) is threadedly connected to the support disc (21); The first lifting handle (25) is used to drive the vertical rod (24) to rotate around its own axis, and the vertical rod (24) drives the support disc (21) to move up and down.

5. The quartz crucible repair apparatus of claim 1, wherein The bottom of the base (3) is provided with a wheel body (31); The bottom of the base (3) is provided with a lifting platform (32), and a support plate (324) at the bottom of the lifting platform (32) can be supported on the ground.

6. The quartz crucible repair apparatus of claim 5, wherein, The lifting platform (32) comprises a four-bar linkage (321), a threaded rod (322) arranged horizontally and threadedly connected to two oppositely arranged hinge points in the four-bar linkage (321), and a second lifting handle fixedly connected to the threaded rod (322) and used for driving the threaded rod (322) to rotate about its own axis.

7. The method of repairing a quartz crucible according to any one of claims 1 to 6, wherein The method comprises the following steps: S1: supporting the outer peripheral wall of the quartz crucible (6) on the first rotating body (11) and the second rotating body (12) of the first plate body (1), and supporting the outer bottom wall of the quartz crucible (6) on the plurality of support claws (212) of the support disc (21); S2: polishing the inner wall of the quartz crucible (6) after removing defects on the inner wall of the quartz crucible (6) by grinding.

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