Double-sided reciprocating plating device

Abstract

This invention discloses a double-sided reciprocating coating apparatus, comprising a vacuum chamber, an emission source system, at least one winding device, and a drive mechanism. The winding device includes a first winding roller, a first tension elastic roller, first and second constant-speed transmission rollers, a second tension elastic roller, and a second winding roller, sequentially arranged on the conveying path of the flexible strip. The first and second winding rollers are mutually winding (unwinding) rollers and mutually controlling (slave) power rollers. The first and second constant-speed transmission rollers are mutually controlling constant-speed transmission rollers. The first surface of the flexible strip between the first and second constant-speed transmission rollers and the second surface of the flexible strip between the first winding roller and the first tension elastic roller both face the emission source system. This invention can solve the problems of low effective space utilization, high cost, low efficiency, and low production capacity in existing coating devices that require at least two evaporation sources (sets) to achieve double-sided coating.

Description

[0001] This application is a divisional application of Chinese Patent Application No. 202110866446.2, filed on July 29, 2021, entitled "Double-sided reciprocating coating device". Technical Field

[0002] This invention relates to the field of coating equipment, and more particularly to a double-sided reciprocating coating device. Background Technology

[0003] Vacuum coating technology is generally divided into two main categories: physical vapor deposition (PVD) and chemical vapor deposition (CVD). For both PVD and CVD, single-sided coating systems using a single evaporator (group) for flexible roll-to-roll coating are mature technologies and widely used in the flexible substrate coating industry. However, when double-sided coating is required, only one side can be coated first. Then, the machine is stopped, the roll is unloaded, and the coated side is flipped on a roll-to-roll machine before reloading for a second coating. This process is time-consuming, labor-intensive, and inefficient. Furthermore, repeated loading and unloading of film and flipping can cause scratches and material loss on the coated surface. Therefore, roll-to-roll coating plants generally face low yield and high manufacturing costs when producing double-sided products. Additionally, some systems claiming to be double-sided coating roll-to-roll are essentially single-sided coating roll-to-roll systems with a single evaporator (group), but with an additional evaporator (group) added to the back of the flexible substrate, thus achieving simultaneous double-sided reciprocating coating. This structure cannot efficiently utilize the effective space inside the vacuum chamber, resulting in low efficiency, high cost, and small production capacity, leading to excessively high finished product costs.

[0004] In addition, in recent years, many countries around the world, especially developed countries, have invested a lot of human and material resources in the research and development of efficient nano-heterogeneous thin film catalysts based on the d-band center theory. However, due to various technical reasons, no country has yet achieved large-scale industrial production of heterogeneous nano-thin film catalysts. One of the technical challenges is how to achieve double-sided coating using a single emission source system. Summary of the Invention

[0005] Therefore, one of the objectives of this invention is to provide a double-sided reciprocating coating apparatus to solve the problems of low effective space utilization, high cost, low efficiency, and low production capacity in existing coating apparatuses, which require multiple evaporation sources or film-turning operations to achieve double-sided coating.

[0006] To achieve the above objectives, the present invention provides a double-sided reciprocating coating apparatus for coating on opposing first and second surfaces of a flexible strip. The apparatus includes a vacuum chamber, an emission source system, at least one winding device, and a drive mechanism. The emission source system is disposed within the vacuum chamber. At least one winding device is disposed within the vacuum chamber and located around the emission source system. Each winding device includes: a first winding roller and a second winding roller, one of which is a take-up roller and the other is an unwinding roller, and the first winding roller and the second winding roller are mutually the primary and secondary power rollers; a first tension elastic roller and a second tension elastic roller, used to change the movement direction of the flexible strip and adjust the tension of the flexible strip through elastic force to prevent deviation; at least one guide roller, used to change the movement direction of the flexible strip; a first constant speed transmission roller and a second constant speed transmission roller, mutually the primary and secondary constant speed transmission rollers, used to keep the linear velocity of the flexible strip constant during movement. The output shaft of the drive mechanism is connected to the power shaft of the winding device. The first winding roller, the first tension elastic roller, the first constant-speed transmission roller, the second constant-speed transmission roller, the second tension elastic roller, and the second winding roller are sequentially arranged on the conveying path of the flexible strip and connected by the flexible strip. The guide roller is arranged on the conveying path. The first surface of the flexible strip between the first constant-speed transmission roller and the second constant-speed transmission roller faces the emission source system, and the second surface of the flexible strip between the first winding roller and the first tension elastic roller faces the emission source system. The flexible strip between the first constant-speed transmission roller and the second constant-speed transmission roller, as well as the flexible strip between the first winding roller and the first tension elastic roller, are all located within the emission range of the emission source system.

[0007] Preferably, the flexible strip between the first constant speed transmission roller and the second constant speed transmission roller has a first length, and the flexible strip between the first winding roller and the first tension elastic roller has a second length, the second length being greater than the first length.

[0008] Preferably, the ratio of the first length to the second length is 1:1.1 to 1:1.30.

[0009] Preferably, the axis of the second winding roller is at a first height from the bottom of the vacuum chamber, and the axis of the second constant speed transmission roller is at a second height from the bottom of the vacuum chamber, wherein the first height is less than the second height.

[0010] Preferably, the first height is greater than 270mm, and the height difference between the axis of the second winding roller and the axis of the second constant speed transmission roller is greater than 130mm.

[0011] Preferably, there is a third distance between the first tension elastic roller and the central axis of the transmitter system, and a fourth distance between the axis of the second constant speed transmission roller and the central axis of the transmitter system, wherein the third distance is greater than 150 mm and the fourth distance is greater than 350 mm.

[0012] Preferably, the edge of the emission range of the emission source system forms a first angle with the plane containing the bottom of the vacuum chamber, the first angle being 30°-60°.

[0013] Preferably, both the first constant speed transmission roller and the second constant speed transmission roller are pressure-type constant speed transmission rollers.

[0014] Preferably, the middle area and the areas near both ends of the pressure-type constant speed transmission roller have an anti-slip pattern structure.

[0015] Preferably, both the first winding roller and the second winding roller are bidirectional elastic damping inter-sliding rollers.

[0016] Preferably, the bidirectional elastic damping sliding roller includes a first shaft with two opposing first end faces. Each first end face is provided with at least one pair of I-shaped spring clips, and each pair of I-shaped spring clips is symmetrically arranged with the center of the first end face as the center. The bidirectional elastic damping sliding roller further includes, corresponding to each first end face, a shaft head. The diameter of the middle portion of the shaft head is larger than the dimensions of both ends of the shaft head. One end of the shaft head is connected to the output shaft of the drive mechanism, and the other end of the shaft head is rotatably engaged with the first shaft. The diameter of the middle portion... An inverted spring fixing part is provided corresponding to the inverted spring spring retainer; and an inverted spring, one end of which is fixed to the inverted spring fixing part, and the other end of which engages with the corresponding inverted spring spring retainer; wherein, when the first tension between the first constant speed transmission roller and the first winding roller is greater than the maximum fixed damping of the first winding roller, the other end of the inverted spring disengages from the corresponding inverted spring spring retainer, and the first shaft rotates until the other end of the inverted spring engages with the next inverted spring spring retainer in the rotation direction of the first shaft.

[0017] Preferably, the C-shaped spring fixing part includes a C-shaped spring pressing hole and a pressing groove, and the bidirectional elastic damping sliding roller also includes a pressing plate. One end of the C-shaped spring is fixed to the C-shaped spring pressing hole, and the two ends of the C-shaped spring are accommodated in the pressing groove and positioned between the pressing plate and the middle part of the shaft head via the pressing plate.

[0018] Preferably, four pairs of the C-shaped springs are evenly arranged on the first end face of the first shaft of the bidirectional elastic damping sliding roller.

[0019] Preferably, the U-shaped spring is made of tungsten wire.

[0020] Preferably, the winding device further includes a first tensioning shaft and a second tensioning shaft. The first tensioning shaft is disposed between the first winding roller and the first constant speed transmission roller to adjust and absorb the looseness generated by the first winding roller. The second tensioning shaft is disposed between the second winding roller and the second constant speed transmission roller to adjust and absorb the looseness generated by the second winding roller.

[0021] Preferably, both the first tensioning shaft and the second tensioning shaft are self-operated tensioning shafts.

[0022] Preferably, the self-tensioning shaft includes a second shaft and two opposing fixed frames. Each fixed frame is provided with a guide groove, which is arranged along the height direction of the vacuum chamber. The two ends of the second shaft are respectively arranged in the two guide grooves, and the second shaft is movable along the height direction in the guide grooves.

[0023] Preferably, a movable structure is fixedly provided at the end of the second shaft. The movable structure includes a ball bearing and a first spring fixedly connected to the ball bearing. The ball bearing is slidably disposed in the guide groove, and the first spring is embedded in the end of the second shaft.

[0024] Preferably, the first winding roller, the second winding roller, the first constant speed transmission roller, and the second constant speed transmission roller have the same outer diameter; the plurality of guide rollers have the same outer diameter; the first tension elastic roller and the second tension elastic roller have the same outer diameter; and the first tensioning shaft and the second tensioning shaft have the same outer diameter.

[0025] Preferably, the middle region and the region near both ends of the first tension elastic roller and the second tension elastic roller have an anti-slip pattern structure.

[0026] Preferably, the first tension elastic roller includes a third shaft, a second spring, a first spring housing, and a second spring housing. The first spring housing and the second spring housing are arranged opposite to each other. The second spring is disposed in the first spring housing, and the first end of the second spring is connected to the first end of the first spring housing. The first end of the third shaft is disposed in the first spring housing and is connected to the second end of the second spring. The third spring is disposed in the second spring housing, and the first end of the third spring is connected to the first end of the second spring housing. The second end of the third shaft is disposed in the second spring housing and is connected to the second end of the third spring.

[0027] Preferably, the double-sided reciprocating coating apparatus includes two sets of winding equipment, which are arranged opposite to each other on opposite sides of the emission source system; or, the double-sided coating apparatus includes three sets of winding equipment, which are arranged in a triangular pattern around the emission source system; or, the double-sided coating apparatus includes four sets of winding equipment, which are arranged in a quadrilateral pattern around the emission source system.

[0028] Preferably, the power shaft of the winding device includes a first power shaft and a second power shaft, the first winding roller and the first constant speed transmission roller are both connected to the first power shaft, and the second winding roller and the second constant speed transmission roller are both connected to the second power shaft.

[0029] Preferably, the driving mechanism is a first servo motor, and the first servo motor is connected to the power shaft of the winding device by a magnetic fluid seal.

[0030] Preferably, the drive mechanism includes a revolution system and a second servo motor. The second servo motor is connected to the power shaft of the revolution system by a magnetohydrodynamic seal. The power shaft of the revolution system includes a first output shaft and a second output shaft. The first output shaft is connected to the first power shaft, and the second output shaft is connected to the second power shaft.

[0031] Preferably, the revolution system includes a clutch that connects the first output shaft and the second output shaft. When the clutch is engaged clockwise, the first power shaft is the main power shaft and the second power shaft is the driven power shaft; when the clutch is engaged counterclockwise, the second power shaft is the main power shaft and the first power shaft is the driven power shaft.

[0032] Preferably, the cross-section of the vacuum chamber is circular, square, or rectangular.

[0033] Preferably, the emission source system is an electron beam evaporation system, a laser evaporation system, a magnetron sputtering system, a resistance evaporation system, a microwave evaporation system, or an arc evaporation system; and the double-sided reciprocating coating device further includes an ion source and a reactive gas ionization system composed of multiple gas pipes.

[0034] Compared with existing technologies, the double-sided reciprocating coating apparatus of this invention is a true single-source double-sided reciprocating coating apparatus. This not only reduces costs and energy consumption but also significantly improves the effective utilization of the vacuum chamber space, avoiding excessively long vacuuming times due to increased chamber volume. Furthermore, it enables reciprocating winding. In addition, this invention incorporates a constant-speed drive roller, preventing variations in the linear velocity of the flexible strip caused by changes in its winding thickness on the winding rollers, which leads to different coating times and significant differences in film thickness across different sections of the flexible strip. Utilizing a revolution system for power, the winding device of this invention can achieve both revolution and rotation, reducing the thickness difference of the coated layer laterally and effectively controlling the error ratio. Therefore, this invention requires only a single-source device to achieve large-scale batch double-sided coating and can also realize large-scale mass production of functional nano-two-dimensional thin film materials with flexible substrates as the framework.

[0035] The advantages and spirit of the present invention can be further understood from the following detailed description of the invention and the accompanying drawings. Attached Figure Description

[0036] Figure 1 The diagram shown is a schematic diagram of a double-sided reciprocating coating apparatus according to an embodiment of the present invention;

[0037] Figure 2 The diagram shown is a schematic of the pressure-type constant speed transmission roller of the present invention.

[0038] Figure 3 The diagram shown is a schematic diagram of a double-sided reciprocating coating apparatus according to another embodiment of the present invention;

[0039] Figure 4A The diagram shown is a schematic of the bidirectional elastic damping inter-sliding roller of the present invention.

[0040] Figure 4B The image shown is a side view of a portion of the structure of the bidirectional elastic damping sliding roller of the present invention.

[0041] Figure 4C As shown Figure 4B A schematic diagram of the shaft head in the middle;

[0042] Figure 4D As shown Figure 4B A schematic diagram of the end face of the first axis in the diagram;

[0043] Figure 5AThe diagram shown is a schematic of the self-operated tensioning shaft of the present invention;

[0044] Figure 5B As shown Figure 5A A partial cross-sectional schematic diagram of the self-tensioning shaft in the middle;

[0045] Figure 6 The diagram shown is a schematic diagram of the first tension elastic roller of the present invention;

[0046] Figure 7 The diagram shows the arrangement of some components of the double-sided reciprocating coating apparatus of the present invention.

[0047] Figure 8 The diagram shown is a block diagram of the power system of the double-sided reciprocating coating device of the present invention.

[0048] Figures 9A-9C The diagram shows a double-sided reciprocating coating apparatus of the present invention having two, three, and four sets of winding equipment, respectively. Detailed Implementation

[0049] Please see Figure 1 , Figure 1 The diagram shows a double-sided reciprocating coating apparatus according to an embodiment of the present invention. The present invention provides a double-sided reciprocating coating apparatus for coating opposing first surfaces 21 and second surfaces 22 of a flexible strip 20, such as fabric, stainless steel wire mesh, or a flexible resin substrate. The double-sided reciprocating coating apparatus can be used, for example, to produce functional nano-two-dimensional thin film materials.

[0050] The aforementioned double-sided reciprocating coating apparatus includes an emission source system 100, a vacuum chamber 200, at least one winding device 300, and a drive mechanism. The output shaft of the drive mechanism is connected to the power shaft of the winding device 300. The vacuum chamber 200 is, for example, cylindrical, square, or rectangular. The emission source system 100 is disposed within the vacuum chamber 200 and is used to vaporize the film material and deposit the resulting substance formed by the reaction of the vaporized film material with a specific gas onto the first surface 21 and the second surface 22 of the flexible strip 20. The emission source system can be, for example, an electron beam evaporation system, a laser evaporation system, a magnetron sputtering system, a resistance evaporation system, a microwave evaporation system, or an arc evaporation system. The double-sided reciprocating coating apparatus may further include an ion source and a reactive gas ionization system composed of multiple gas pipes. Moreover, this invention is a single emission source system, which not only reduces costs and energy consumption but also significantly improves the effective utilization space of the vacuum chamber, avoiding excessively long vacuuming times due to increased vacuum chamber volume.

[0051] The aforementioned winding equipment 300 is disposed within the vacuum chamber 200 and located around the emission source system 100. Each winding equipment 300 includes a first winding roller 12, a second winding roller 2, a first tension elastic roller 11, a second tension elastic roller 3, at least one guide roller, a first constant-speed transmission roller 8, and a second constant-speed transmission roller 7. The first winding roller 12, the first tension elastic roller 11, the first constant-speed transmission roller 8, the second constant-speed transmission roller 7, the second tension elastic roller 3, and the second winding roller 2 are sequentially arranged on the conveying path of the flexible strip 20 and connected by the flexible strip 20. The guide roller is disposed on the conveying path.

[0052] In this design, one of the first winding roller 12 and the second winding roller 2 is a take-up roller, and the other is a unwinding roller. The first winding roller 12 and the second winding roller 2 are, respectively, the primary power roller and the secondary power roller. Specifically, for example, when the first winding roller 12 is the take-up roller, the second winding roller 2 is the unwinding roller; and when the first winding roller 12 is the unwinding roller, the second winding roller 2 is the take-up roller. When the first winding roller 12 is the primary power roller, it provides power, and the second winding roller 2 is the secondary power roller, providing no power. When the second winding roller 2 is the primary power roller, it provides power, and the first winding roller 12 is the secondary power roller, providing no power.

[0053] The first tension elastic roller 11 and the second tension elastic roller 3 are used to change the movement direction of the flexible strip 20 and to adjust the tension of the flexible strip 20 through elasticity to prevent deviation. That is, while changing the movement direction of the flexible strip 20, the first tension elastic roller 11 and the second tension elastic roller 3 absorb the small amount of tensile deformation caused by the tension of the flexible strip 20 under tension through elastic adjustment, while ensuring the uniformity of the tension force distributed along the axial direction of the flexible strip 20 and preventing the flexible strip 20 from rolling off-center. Guide rollers are also used to change the movement direction of the flexible strip 20, so their specific number and position can be determined according to the actual position of the coated strip relative to the emission source system. For example, in this embodiment, guide rollers 10, 9, 6, 5, and 4 are provided on the conveying path of the flexible strip 20.

[0054] The first constant-speed drive roller 8 and the second constant-speed drive roller 7 are the primary and secondary constant-speed drive rollers, respectively, used to maintain a constant linear speed during the movement of the flexible strip 20. The first constant-speed drive roller 8 and the second constant-speed drive roller 7 also have a centering and positioning correction function during strip winding. As the flexible strip wound by the take-up roller becomes increasingly thick, the linear speed of the strip near the take-up roller increases, resulting in different coating (splashing) times for different sections of the strip, leading to significant differences in film thickness. Even using a variable-speed servo motor cannot completely avoid this problem. However, the use of the first constant-speed drive roller 8 and the second constant-speed drive roller 7 in this invention completely avoids this problem.

[0055] Furthermore, the first surface 21 of the flexible strip between the first constant speed transmission roller 8 and the second constant speed transmission roller 7 faces the emission source system 100, and the second surface 22 of the flexible strip between the first winding roller 12 and the first tension elastic roller 11 faces the emission source system 100; and the flexible strip between the first constant speed transmission roller 8 and the second constant speed transmission roller 7 and the flexible strip between the first winding roller 12 and the first tension elastic roller 11 are both located within the emission range of the emission source system 100.

[0056] In addition, the outer diameters of the first winding roller 12, the second winding roller 2, the first constant speed transmission roller 8, and the second constant speed transmission roller 7 are the same; the outer diameters of the multiple guide rollers 10, guide roller 9, guide roller 6, guide roller 5, and guide roller 4 are the same; and the outer diameters of the first tension elastic roller 11 and the second tension elastic roller 3 are the same.

[0057] Please continue reading Figure 1 With the first winding roller 12 and the first constant-speed drive roller 8 as the main power shafts, and assuming that the second winding roller 2 is the unwinding shaft for a fully wound flexible strip 20, then the first winding roller 12 is an empty take-up shaft. When the winding equipment 300 is started, the first constant-speed drive roller 8 rotates counterclockwise, while the first winding roller 12 rotates clockwise. The second constant-speed drive roller 7 rolls without power along with the first constant-speed drive roller 8 and the first winding roller 12, while the second winding roller 2 rolls clockwise without power.

[0058] As the first winding roller 12 continuously winds up the flexible strip 20, the amount of material wound increases, and the diameter becomes larger. Since its rotational angular velocity ω is the same as that of the first constant-speed drive roller 8, the linear velocity of the first winding roller 12 is greater than that of the first constant-speed drive roller 8. At this time, the first tension elastic roller 11 absorbs the small amount of tensile deformation caused by the flexible strip under tension through elastic adjustment, while ensuring the uniformity of the tension force distributed along the axial direction of the flexible strip and preventing the flexible strip from being rolled off-center. Moreover, during this process, the first constant-speed drive roller 8 stably controls the linear velocity of the entire system, thereby stabilizing the evaporation (splashing) time of the flexible strip 20 on the coating surface and ensuring that each part of the flexible strip 20 can be uniformly coated during the movement of the winding roller 20.

[0059] A section of flexible strip between the first constant-speed drive roller 8 and the second constant-speed drive roller 7, and a section of flexible strip between the first tension elastic roller 11 and the first winding roller 12 are coated. Assuming the section of flexible strip between the first constant-speed drive roller 8 and the second constant-speed drive roller 7 is the front side, then through the reversing action of the guide roller 9, guide roller 10, and the first tension elastic roller 11, the section of flexible strip between the first tension elastic roller 11 and the first winding roller 12 becomes the reverse side. This achieves simultaneous double-sided coating of the flexible strip under the conditions of a single emission source system.

[0060] Furthermore, assuming that a section of flexible strip between the first constant-speed drive roller 8 and the second constant-speed drive roller 7 has a first length L1, and a section of flexible strip between the first tension elastic roller 11 and the first winding roller 12 has a second length L2, since the flexible strip between the first tension elastic roller 11 and the first winding roller 12 is farther from the source system 100 than the flexible strip between the first constant-speed drive roller 8 and the second constant-speed drive roller 7, then L2 being greater than L1 ensures that the difference in film thickness between the two sides of the flexible strip is very small. Based on the multi-point thickness measurement data from a 1.6-meter diameter prototype, the optimal ratio of L1:L2 is 1:1.1 to 1:1.3, which ensures that the difference in film thickness between the two sides of the flexible strip is less than 5%.

[0061] Furthermore, in order to ensure that the first constant-speed transmission roller 8 and the second constant-speed transmission roller 7 can better grip or position the flexible strip 20 when conveying it, and to prevent slippage, preferably, both the first constant-speed transmission roller 8 and the second constant-speed transmission roller 7 are pressure-type constant-speed transmission rollers. Figure 2 As shown, Figure 2 The diagram shown is a schematic of the pressure-type constant speed transmission roller of the present invention. Furthermore, the middle region 81 and the region near the two ends 82 and 83 of the pressure-type constant speed transmission roller have anti-slip pattern structures 84, such as dense dotted anti-slip rings.

[0062] Please see Figure 3 , Figure 3 The diagram shows a double-sided reciprocating coating apparatus according to another embodiment of the present invention. In this embodiment, both the first winding roller 12 and the second winding roller 2 are bidirectional elastic damping sliding rollers. Because the first winding roller 12 and the second winding roller 2 have bidirectional damping functions, the flexible strip 20 can have a certain tension during winding, preventing overlapping, clamping, or misalignment. To better realize the winding of the flexible strip 20 and the reciprocating winding motion of the winding device, preferably, the winding device 300' further includes a first tensioning shaft 19 and a second tensioning shaft 15. The first tensioning shaft 19 is disposed between the first winding roller 12 and the first constant-speed transmission roller 8 to adjust and absorb the looseness generated by the first winding roller 12; the second tensioning shaft 15 is disposed between the second winding roller 2 and the second constant-speed transmission roller 7 to adjust and absorb the looseness generated by the second winding roller 2. Furthermore, the outer diameters of the first tensioning shaft 19 and the second tensioning shaft 15 are the same.

[0063] like Figures 4A-4D As shown, Figure 4A The diagram shown is a schematic of the bidirectional elastic damping inter-sliding roller of the present invention. Figure 4B The image shown is a side view of a portion of the structure of the bidirectional elastic damping sliding roller of the present invention. Figure 4C As shown Figure 4B A schematic diagram of the shaft head in the middle; Figure 4D As shown Figure 4B A schematic diagram of the end face of the first shaft in the diagram; the bidirectional elastic damping sliding roller includes a first shaft 121, the first shaft 121 having two opposing first end faces 1211, each first end face 1211 being provided with at least a pair of C-shaped spring clips 1212, 1213, and each pair of C-shaped spring clips 1212, 1213 being symmetrically arranged with the center of the first end face 1211 as the center; wherein, the bidirectional elastic damping sliding roller also includes a shaft head 1214 and a C-shaped spring 1220 corresponding to each first end face 1211. The diameter of the middle portion 1215 of the shaft head 1214 is larger than the dimensions of both ends of the shaft head 1214. One end 1216 of the shaft head 1214 is connected to the output shaft of the drive mechanism, and the other end 1217 of the shaft head 1214 is rotatably engaged with the first shaft 121. C-shaped spring fixing portions 1218 and 1219 are provided on the middle portion 1215 corresponding to the C-shaped spring retainers 1212 and 1213. One end 1221 of the C-shaped spring 1220 is fixed to the C-shaped spring fixing portion, and the other end 1222 of the C-shaped spring 1220 engages with the corresponding C-shaped spring retainer. Figure 4DAs shown, when the first tension between the first constant-speed transmission roller 8 and the first winding roller 12 is greater than the maximum fixed damping of the first winding roller 12, the other end 1222 of the chamfered spring 1220 disengages from the corresponding chamfered spring spring latch 1212, and the first shaft 121 rotates until the other end 1222 of the chamfered spring 1220 engages with the next chamfered spring spring latch in the rotation direction. For example Figure 4B As shown, the next C-shaped spring latch in the rotational direction of C-shaped spring latch 1212 is C-shaped spring latch 1232; correspondingly, the next C-shaped spring latch in the rotational direction of C-shaped spring latch 1213 is C-shaped spring latch 1233. In this embodiment, four pairs of C-shaped springs are evenly arranged on the first end face 1211 of the first shaft 121 of the bidirectional elastic damping sliding roller as an example. In this case, one slip of the C-shaped spring in the bidirectional elastic damping sliding roller is 1 / 8 turn. However, this invention is not limited to this; the number of C-shaped springs can be set according to actual needs.

[0064] In addition, the bidirectional elastic damping inter-sliding roller also includes a shaft head cover 1240 for fixing the end components of the bidirectional elastic damping inter-sliding roller. The C-shaped spring fixing part 1218 includes a C-shaped spring pressure hole 12181 and a pressure groove 12182. The bidirectional elastic damping inter-sliding roller also includes a pressure plate 1230. One end 1221 of the C-shaped spring 1220 is fixed to the C-shaped spring pressure hole 12181. The two ends of the C-shaped spring 1220 are accommodated in the pressure groove 12182 and positioned between the pressure plate 1230 and the middle part 1215 of the shaft head 1214 via the pressure plate 1230.

[0065] In addition, the aforementioned U-shaped springs are made of tungsten wire, for example. Tungsten wire has a high melting point and can withstand high temperatures of around 350°C. At this temperature, its elastic modulus will not change significantly, which can effectively prevent the winding equipment from jamming due to changes in the elastic modulus of the material caused by temperature changes.

[0066] Please see Figure 5A and Figure 5B , Figure 5A The diagram shown is a schematic of the self-operated tensioning shaft of the present invention; Figure 5B As shown Figure 5AA partial cross-sectional view of the self-tensioning shaft is shown. Both the first tensioning shaft 19 and the second tensioning shaft 15 are self-tensioning shafts. Each self-tensioning shaft includes a second shaft 191 and two opposing fixed frames 192. Each fixed frame 192 has a guide groove 193, which is positioned along the height direction of the vacuum chamber. The two ends of the second shaft 191 are respectively positioned within the two guide grooves 193, allowing the second shaft 191 to move along the height direction within the guide grooves 193. A movable structure is fixedly provided at the end of the second shaft 191. The movable structure includes a ball bearing 194 and a first spring 195 fixedly connected to the ball bearing 194. The ball bearing 194 is slidably disposed in the guide groove 193, and the first spring 195 is embedded in the end of the second shaft 191. The ball bearing 194 can slide smoothly in the guide groove 193. The first spring 195 connected to the ball bearing 194 can ensure the range of motion of the ball bearing and prevent jamming due to excessive tension. The self-tensioning shaft includes a shaft cover 196, which is used to protect and position the end of the second shaft 191. In addition, the middle area and the area near the two ends of the first tension elastic roller 11 and the second tension elastic roller 3 have anti-slip pattern structures, such as dense dotted anti-slip rings.

[0067] like Figure 6 As shown, Figure 6 The diagram shows a schematic of the first tension elastic roller of the present invention. The first tension elastic roller 11 has a similar or identical structure to the second tension elastic roller. The first tension elastic roller 11 includes a third shaft 40, a second spring 41, a third spring 42, a first spring box 43 and a second spring box 44 disposed opposite to each other. The second spring 41 is disposed in the first spring box 43, and the first end of the second spring 41 is connected to the first end of the first spring box 43. The first end 401 of the third shaft 40 is disposed in the first spring box 43 and connected to the second end of the second spring 41. The third spring 42 is disposed in the second spring box 44, and the first end of the third spring 42 is connected to the first end of the second spring box 44. The second end 402 of the third shaft 40 is disposed in the second spring box 44 and connected to the second end of the third spring 42. When the third shaft 40 is subjected to a force in a first direction toward the compression of the second spring 41 or the third spring 42, the third shaft 40 will move in the first direction, and the second spring 41 and the third spring 42 will be compressed.

[0068] Please see Figure 7 , Figure 7The diagram shows the arrangement of some components of the double-sided reciprocating coating apparatus of the present invention. To ensure the coating effect, the axis of the second winding roller 2 is at a first height h1 from the bottom 201 of the vacuum chamber 200, and the axis of the second constant-speed transmission roller 7 is at a second height h2 from the bottom of the vacuum chamber. The first height h1 is less than the second height h2. The first height h1 is greater than 270 mm, and the height difference h3 between the axis of the second winding roller 2 and the axis of the second constant-speed transmission roller 7 is greater than 130 mm. The first tension elastic roller 11 has a third distance L3 between it and the central axis 101 of the emission source system 100, and the axis of the second constant-speed transmission roller 7 has a fourth distance L4 between it and the central axis 101 of the emission source system 100. The third distance is greater than 150 mm, and the fourth distance is greater than 350 mm. The edge AA of the emission range of the emission source system 100 forms a first angle α with the plane containing the bottom of the vacuum chamber 200, where the first angle α is 30°-60°. The aforementioned positional arrangement of each roller ensures that the coated surfaces of the flexible strip between the first constant speed transmission roller 8 and the second constant speed transmission roller 7, and between the first tension elastic roller 11 and the first winding roller 12, are within the emission range of the emission source system, thus guaranteeing the coating effect.

[0069] Please see Figure 8 , Figure 8 The diagram shows a block diagram of the power system of the double-sided reciprocating coating device of the present invention. The power shaft of the winding device includes a first power shaft 50 and a second power shaft 60. The first winding roller 12 and the first constant speed transmission roller 8 are both connected to the first power shaft 50, and the second winding roller 2 and the second constant speed transmission roller 7 are both connected to the second power shaft 60.

[0070] In one embodiment, the drive mechanism is a first servo motor, which is connected to the power shaft of the winding equipment via a magnetohydrodynamic seal. For example, when a servo motor is used to provide power, each winding equipment is equipped with a separate servo motor outside the vacuum chamber. This method results in a relatively simple transmission system structure, and is convenient to manufacture and assemble.

[0071] In another embodiment, the drive mechanism 80 includes a revolution system and a second servo motor. The second servo motor is connected to the power shaft of the revolution system via a magnetohydrodynamic seal. The power shaft of the revolution system includes a first output shaft 71 and a second output shaft 72. The first output shaft 71 is connected to the first power shaft 50, and the second output shaft 72 is connected to the second power shaft 60. The revolution system also includes a clutch 70, which is connected to the first output shaft 71 and the second output shaft 72. The engagement or disengagement of the clutch 70 controls whether the first output shaft 71 or the second output shaft 72 is the main power output shaft. When the clutch 70 is engaged clockwise, the first power shaft 50 is the main power shaft, and the second power shaft 60 is the driven power shaft; when the clutch 70 is engaged counterclockwise, the second power shaft 60 is the main power shaft, and the first power shaft 50 is the driven power shaft.

[0072] In actual production, when a revolution system is used to provide power, each winding device independently meshes with the revolution system gears. The revolution system is driven by a second servo motor. The second servo motor and the power shaft of the winding revolution system are connected by a magnetohydrodynamic seal. Each winding device both revolutionizes and rotates, and the distance between the flexible strip and the emission source varies uniformly across all transverse parts. Calculated over one rotation cycle (one revolution), the evaporation (splashing) rate and time of the plasma on the flexible strip within the vacuum chamber are consistent. Simultaneously, because the revolution of each winding device generates uniform disturbance to the plasma in the vacuum chamber, the generated transverse film thickness is relatively uniform. Taking the prototype machine with a 1.6-meter diameter vacuum chamber as an example, the thickness error between the middle and edge positions of the transverse film is no more than 2.4%. The product yield is high.

[0073] Furthermore, the double-sided reciprocating coating apparatus of the present invention can realize reciprocating winding, as described below. Figure 3 The working principle of the reciprocating winding of the double-sided reciprocating coating device of the present invention is described in detail.

[0074] (1) Winding upwards: Assuming that the second winding roller 2 is the unwinding roller of the fully wound flexible strip, then the first winding roller 12 is the empty winding roller.

[0075] When the winding equipment is started, the first constant-speed drive roller 8 acts as the power shaft and rotates counterclockwise, while the first winding roller 12 also acts as the power shaft and rotates clockwise. The second constant-speed drive roller 7 is unpowered and rolls with the first constant-speed drive roller 8 and the first winding roller 12. The second winding roller 2 is unpowered and rotates clockwise with damping (e.g., a reverse damping force of about 0.5N).

[0076] As the first winding roller 12 continues to wind, the flexible strip winds more and more, and its diameter becomes larger and larger. Since its rotational angular velocity ω is the same as that of the first constant speed drive roller 8 (pressure type constant speed drive roller), the linear velocity of the first winding roller 12 is greater than that of the first constant speed drive roller 8. At this time, the first tensioning roller 19 is lifted, and the first tension elastic roller 11 is compressed in the direction of spring compression. The tension of the flexible strip 20 increases in the roller section from the first constant speed drive roller 8 to the first tensioning roller 19 to the guide roller 10 to the first tension elastic roller 11 to the first winding roller 12. When the tension in this section is greater than the fixed maximum damping force of the first winding roller 12 (e.g., 1.2N), the damping spring of the first winding roller 12 slips once (we set it to 1 / 8 turn). When slippage occurs, the tension of this flexible strip is released to an equilibrium state (e.g., set to 1N). The first tensioning roller 19 moves downward with gravity, and the first tension elastic roller 11 moves to the right with the elastic force, so that the tension of this flexible strip remains at its original equilibrium tension (1N). The thicker the first winding roller 12 is wound, the more frequently slippage occurs, until winding is completed.

[0077] During this process, the first constant speed transmission roller 8 stably controls the linear speed of the flexible strip in the entire system, thereby stabilizing the evaporation (splashing) time of the flexible strip on the coating surface and ensuring that each part of the flexible strip can be uniformly coated during the movement process.

[0078] like Figure 3 As shown, a section of flexible strip between the second constant-speed drive roller 7 and the first constant-speed drive roller 8, and a section of flexible strip between the first tension elastic roller 11 and the first winding roller 12 are vaporized (splashed). Assuming the section of flexible strip between the second constant-speed drive roller 7 and the first constant-speed drive roller 8 that is vaporized (splashed) is the front side, then through the action of the reversing wheel of the first tension elastic roller 19, the guide roller 10, and the first tension elastic roller 11, the section of flexible strip between the first tension elastic roller 11 and the first winding roller 12 that is vaporized (splashed) is the reverse side. Thus, simultaneous double-sided vaporization (splashing) of the flexible strip is achieved under the conditions of a single emission source device.

[0079] (2) Downward winding: Assuming that the first winding roller 12 is a fully wound unwinding roller for flexible strip, then the second winding roller 2 is an empty take-up roller.

[0080] When the winding equipment is started, the second constant-speed transmission roller 7 acts as the power shaft and rotates counterclockwise, while the second winding roller 2 also acts as the power shaft and rotates clockwise. The first constant-speed transmission roller 8 is unpowered and rolls with the second constant-speed transmission roller 7 and the second winding roller 2. The first winding roller 12 is unpowered and rotates clockwise with damping (reverse damping force of about 0.5N).

[0081] As the second winding roller 2 continues to wind, the flexible strip 20 winds more and more, and its diameter becomes larger and larger. Since its rotational angular velocity ω is the same as that of the second constant speed transmission roller ω, the linear velocity of the second winding roller 2 is greater than that of the second constant speed transmission roller 7. At this time, the second tensioning roller 15 is lifted, and the second tension elastic roller 3 is compressed in the direction of spring compression. The tension of the flexible strip 20 increases in the roller section from the second constant speed transmission roller 7 to the guide roller 6 to the second tensioning roller 15 to the guide roller 4 to the second tension elastic roller 3 to the second winding roller 2. When the tension in this section is greater than the fixed maximum damping force of the second winding roller 2 (e.g., 1.2N), the damping spring of the second winding roller 2 slips once (we set it to 1 / 8 turn). When slippage occurs, the tension of this flexible strip is released to a balanced state (e.g., set to 1N). The second tensioning roller 15 moves downwards due to gravity, and the second tension elastic roller 3 moves to the right due to the elastic force, so that the tension of this flexible strip remains at its original balanced tension (1N). The thicker the second winding roller 2 is wound, the more frequently slippage occurs, until winding is complete.

[0082] During this process, the second constant speed transmission roller 7 stably controls the linear speed of the flexible strip in the entire system, thereby stabilizing the evaporation (splashing) time of the flexible strip on the coating surface and ensuring that each part of the flexible strip can be uniformly coated during the movement process.

[0083] from Figure 3 See, a section of flexible strip between the second constant-speed drive roller 7 and the first constant-speed drive roller 8, and a section of flexible strip between the first tension elastic roller 11 and the first winding roller 12 are vaporized (splashed). Assuming the section of flexible strip between the second constant-speed drive roller 7 and the first constant-speed drive roller 8 that is vaporized (splashed) is the front side, then through the action of the first tension shaft 19, the guide roller 10, and the reversing wheel of the first tension elastic roller 1, the section of flexible strip between the first tension elastic roller 11 and the first winding roller 12 that is vaporized (splashed) is the back side. Thus, simultaneous double-sided vaporization (splashing) of the roll material is achieved under the conditions of a single emission source device.

[0084] In other words, the double-sided reciprocating coating apparatus of the present invention can achieve double-sided coating of flexible strips under a single emission source system, and can also achieve reciprocating winding, which can effectively improve coating efficiency.

[0085] Please see Figures 9A-9C , Figures 9A-9C The diagram shows a double-sided reciprocating coating apparatus of the present invention having two, three, and four sets of winding equipment, respectively. Figure 9A In the process, the double-sided reciprocating coating device includes two sets of winding equipment 301, which are arranged opposite to each other on opposite sides of the emission source system 100. Figure 9BIn the process, the double-sided coating equipment includes three sets of winding equipment 302, which are arranged in a triangle around the emission source system. Figure 9C In the process, the double-sided coating equipment includes four sets of winding equipment 303, which are arranged in a quadrilateral around the emission source system. The quadrilateral can be a parallelogram or a square.

[0086] The present invention will be further described below with reference to specific embodiments.

[0087] Example 1

[0088] Two sets of the winding equipment of this invention are configured in a cylindrical vacuum chamber. The winding width (lateral width) of the flexible strip is the same as that of the current single-sided winding equipment. Therefore, in a cylindrical vacuum chamber of the same size, the production efficiency of the winding equipment in this embodiment is 4 times that of the current single-sided winding equipment. Among them, double-sided evaporation (splashing) is 2 times, and the two sets of winding equipment are another 2 times.

[0089] Example 2

[0090] Three sets of the winding equipment of this invention are configured in a cylindrical vacuum chamber. The winding width (lateral width) of the flexible strip is smaller than that of the current single-sided winding equipment (based on a vacuum chamber with a diameter of 1.6 meters, the width of the single-sided winding equipment in this embodiment is 1.0 meters). Therefore, in a cylindrical vacuum chamber of the same size, the production efficiency of the winding equipment in this embodiment is 5 times that of the current single-sided winding equipment. Among them, double-sided evaporation (splashing) is 2 times, and the three sets of winding equipment are 3 times. With a width of 1.0 meters, the efficiency ratio is 2*3*1.0 / 1.2=5.

[0091] Example 3

[0092] Four sets of the winding equipment of this invention are configured in a cylindrical vacuum chamber. The winding width (lateral width) of the flexible strip is smaller than that of the current single-sided winding equipment (based on a vacuum chamber with a diameter of 1.6 meters, the width of this embodiment is 0.75 times that of the single-sided winding equipment). Therefore, in a cylindrical vacuum chamber of the same size, the production efficiency of the winding equipment in this embodiment is 6 times that of the current single-sided winding equipment. Among them, double-sided evaporation (splashing) is 2 times, and the 4 sets of winding equipment are another 4 times. The width is 0.83, and the efficiency ratio is 2*4*0.83 / 1.2=5.53.

[0093] Table 1 Comparison of the number of winding equipment configurations and the productivity of single-sided winding equipment in this invention.

[0094] Configuration number of sets Width and length (m) Width and total length (meters) Efficiency factor Remark 1 set (single-sided roll) 1.2 1.2 1 1.2 / 1.2＝1 1 set (double-sided rolls) 1.2 1.2*2＝2.4 2 2.4 / 1.2＝2 2 sets (double-sided rolls) 1.2 1.2*2*2＝4.8 4 4.8 / 1.2＝4 3 sets (double-sided rolls) 1.0 1.0*2*3＝6 5 6 / 1.2＝5 4 sets (double-sided rolls) 0.83 0.83*2*4＝6.64 5.53 6.64 / 1.2＝5.53

[0095] The above embodiments are based on a system with a vacuum chamber diameter of 1.6 meters and a height of 1.6 meters. As can be seen from Table 1, if two sets of the winding equipment of the present invention are configured in the vacuum chamber, the efficiency is 4 times that of the current single-sided evaporation (splashing) system. If three or four sets of the winding equipment of the present invention are configured, the efficiency is no less than 5 times that of the single-sided evaporation (splashing) system.

[0096] In summary, the double-sided reciprocating coating apparatus of this invention is a true single-source double-sided reciprocating coating apparatus. It not only reduces costs and energy consumption but also significantly improves the effective utilization of the vacuum chamber space, avoiding excessively long vacuuming times due to increased chamber volume. Furthermore, it enables reciprocating winding. Additionally, the invention incorporates a constant-speed drive roller, preventing variations in the linear velocity of the flexible strip caused by changes in its winding thickness on the winding rollers, which leads to different coating times and significant differences in film thickness across different sections of the flexible strip. Utilizing a revolution system for power, the winding device of this invention can achieve both revolution and rotation, reducing lateral thickness variations and effectively controlling the error ratio. Therefore, this invention requires only a single source device to achieve large-scale batch double-sided coating and can also enable large-scale mass production of functional nano-two-dimensional thin film materials with flexible substrates as the framework.

[0097] The detailed description of the preferred embodiments above is intended to more clearly illustrate the features and spirit of the present invention, and is not intended to limit the scope of protection of the present invention by means of the preferred embodiments disclosed above. Rather, the aim is to cover various modifications and equivalent arrangements within the scope of protection of the claims of the present invention. Therefore, the scope of protection of the claims of the present invention should be interpreted in the broadest possible sense based on the foregoing description, so as to cover all possible modifications and equivalent arrangements.

Claims

1. A double-sided reciprocating coating apparatus for coating opposing first and second surfaces of a flexible strip, characterized in that, The double-sided reciprocating coating device comprises: a vacuum chamber; an emission source system arranged in the vacuum chamber; at least one set of winding equipment arranged in the vacuum chamber and around the emission source system, and each set of winding equipment comprising: a first winding roller and a second winding roller, one of which is a winding roller and the other of which is an unwinding roller, and the first winding roller and the second winding roller being a driving roller and a driven roller; a first tension elastic roller and a second tension elastic roller for changing the movement direction of the flexible strip and adjusting the tension of the flexible strip by elastic force to avoid deviation; at least one guide roller for changing the movement direction of the flexible strip; a first constant-speed transmission roller and a second constant-speed transmission roller, which are a master constant-speed transmission roller and a slave constant-speed transmission roller, for adjusting the constant linear speed of the flexible strip during movement; and a driving mechanism, an output shaft of the driving mechanism being connected to a power shaft of the winding equipment; wherein the first winding roller, the first tension elastic roller, the first constant-speed transmission roller, the second constant-speed transmission roller, the second tension elastic roller, and the second winding roller are arranged in sequence on a conveying path of the flexible strip and connected by the flexible strip, the guide roller is arranged on the conveying path, a first surface of the flexible strip between the first constant-speed transmission roller and the second constant-speed transmission roller faces the emission source system, a second surface of the flexible strip between the first winding roller and the first tension elastic roller faces the emission source system, and the flexible strip between the first constant-speed transmission roller and the second constant-speed transmission roller and the flexible strip between the first winding roller and the first tension elastic roller are both within the emission range of the emission source system; the first winding roller and the second winding roller are both bidirectional elastic damping inter-sliding rollers, the bidirectional elastic damping inter-sliding roller comprising a first shaft having two opposite first end faces, at least one pair of U-shaped spring clamping ports being arranged on each first end face and each pair of U-shaped spring clamping ports being symmetrically arranged with the center of the first end face as the center; wherein the bidirectional elastic damping inter-sliding roller further comprises, for each first end face: a shaft head, a middle part of the shaft head having a larger diameter than the size of both ends of the shaft head, one end of the shaft head being connected to an output shaft of the driving mechanism, the other end of the shaft head being rotatably matched with the first shaft, and a U-shaped spring fixing part being arranged on the middle part corresponding to the U-shaped spring clamping port; and a U-shaped spring, one end of the U-shaped spring being fixed to the U-shaped spring fixing part, the other end of the U-shaped spring being clamped with the corresponding U-shaped spring clamping port. When the first tension between the first constant-speed transmission roller and the first winding roller is greater than the maximum fixed damping of the first winding roller, the other end of the U-shaped spring is disengaged from the corresponding U-shaped spring elastic snap, and the first shaft rotates to the other end of the U-shaped spring engaging with the next U-shaped spring elastic snap in the rotation direction of the first shaft.

2. The dual-sided reciprocating plating apparatus of claim 1, wherein The distance between the flexible belt between the first constant-speed transmission roller and the second constant-speed transmission roller to the emission source system is less than the distance between the flexible belt between the first winding roller and the first tension elastic roller to the emission source system, the flexible belt between the first constant-speed transmission roller and the second constant-speed transmission roller has a first length, and the flexible belt between the first winding roller and the first tension elastic roller has a second length, the second length being greater than the first length.

3. The dual-sided reciprocating plating apparatus of claim 2, wherein The ratio of the first length to the second length is 1:1.1-1:1.

3.

4. The dual-sided reciprocating plating apparatus of claim 1, wherein The center of the shaft of the second winding roller is at a first height from the bottom of the vacuum chamber, and the center of the shaft of the second constant-speed transmission roller is at a second height from the bottom of the vacuum chamber, the first height being less than the second height.

5. The dual-sided reciprocating plating apparatus of claim 4, wherein The first height is greater than 270 mm, and the height difference between the center of the shaft of the second winding roller and the center of the shaft of the second constant-speed transmission roller is greater than 130 mm.

6. The dual-sided reciprocating plating apparatus of claim 4, wherein The third distance between the first tension elastic roller and the central axis of the emission source system is greater than 150 mm, and the fourth distance between the center of the shaft of the second constant-speed transmission roller and the central axis of the emission source system is greater than 350 mm.

7. The dual-sided reciprocating plating apparatus of claim 6, wherein The edge of the emission range of the emission source system and the plane on which the bottom of the vacuum chamber is located form a first angle, and the first angle is 30°-60°.

8. The dual-sided reciprocating plating apparatus of claim 1, wherein The first constant-speed transmission roller and the second constant-speed transmission roller are both pressure constant-speed transmission rollers.

9. The dual-sided reciprocating plating apparatus of claim 8, wherein, The middle region and the regions adjacent to the two ends of the pressure constant-speed transmission roller have anti-slip pattern structures.

10. The dual-sided reciprocating plating apparatus of claim 1, wherein, The U-shaped spring fixing part includes a U-shaped spring pressing hole and a pressing groove, the bidirectional elastic damping inter-sliding roller further includes a pressing disc, one end of the U-shaped spring is fixed to the U-shaped spring pressing hole, and the two end connecting parts of the U-shaped spring are accommodated in the pressing groove and positioned between the pressing disc and the middle part of the shaft head via the pressing disc.

11. The dual-sided reciprocating plating apparatus of claim 1, wherein Four pairs of U-shaped springs are uniformly arranged on the first end surface of the first shaft of the bidirectional elastic damping inter-sliding roller.

12. The dual-sided reciprocating plating apparatus of claim 1, wherein The U-shaped spring is made of tungsten wire.

13. The dual-sided reciprocating plating apparatus of claim 1, wherein The winding device further includes a first tensioning shaft and a second tensioning shaft, the first tensioning shaft is arranged between the first winding roller and the first constant-speed transmission roller to adjust the slack generated by the first winding roller, and the second tensioning shaft is arranged between the second winding roller and the second constant-speed transmission roller to adjust the slack generated by the second winding roller.

14. The dual-sided reciprocating plating apparatus of claim 13, wherein, The first tensioning shaft and the second tensioning shaft are both self-tightening shafts.

15. The dual-sided reciprocating plating apparatus of claim 14, wherein, The self-tightening shaft comprises a second shaft and two fixed frames arranged oppositely, each fixed frame is provided with a guide slot arranged along the height direction of the vacuum chamber, and the two ends of the second shaft are arranged in the two guide slots respectively, and the second shaft is movable in the guide slot along the height direction.

16. The dual-sided reciprocating plating apparatus of claim 15, wherein, The end of the second shaft is fixedly provided with a movable structure, the movable structure comprises a ball and a first spring fixedly connected with the ball, the ball is slidably arranged in the guide slot, and the first spring is embedded in the end of the second shaft.

17. The dual-sided reciprocating plating apparatus of claim 13, wherein The outer diameters of the first winding roller, the second winding roller, the first constant-speed transmission roller and the second constant-speed transmission roller are the same; the outer diameters of the plurality of guide rollers are the same; the outer diameters of the first tension elastic roller and the second tension elastic roller are the same; and the outer diameters of the first tension shaft and the second tension shaft are the same.

18. The dual-sided reciprocating plating apparatus of claim 1, wherein, The middle region and the regions close to the two ends of the first tension elastic roller and the second tension elastic roller are provided with anti-sliding pattern structures.

19. The dual-sided reciprocating plating apparatus of claim 18, wherein, The first tension elastic roller comprises a third shaft, a second spring, a third spring, a first spring box and a second spring box, the first spring box and the second spring box are arranged oppositely, the second spring is arranged in the first spring box, the first end of the second spring is connected with the first end of the first spring box, the first end of the third shaft is arranged in the first spring box and connected with the second end of the second spring, the third spring is arranged in the second spring box, the first end of the third spring is connected with the first end of the second spring box, the second end of the third shaft is arranged in the second spring box and connected with the second end of the third spring.

20. The dual-sided reciprocating plating apparatus of claim 1, wherein, The double-sided reciprocating coating device comprises two sets of the winding equipment, and the two sets of the winding equipment are arranged oppositely on opposite sides of the emission source system; or the double-sided reciprocating coating device comprises three sets of the winding equipment, and the three sets of the winding equipment are distributed in a triangular shape around the emission source system; or the double-sided reciprocating coating device comprises four sets of the winding equipment, and the four sets of the winding equipment are distributed in a quadrilateral shape around the emission source system.

21. The dual-sided reciprocating plating apparatus of claim 1, wherein The power shaft of the winding equipment comprises a first power shaft and a second power shaft, the first winding roller and the first constant-speed transmission roller are connected with the first power shaft, and the second winding roller and the second constant-speed transmission roller are connected with the second power shaft.

22. The dual-sided reciprocating plating apparatus of claim 21, wherein, The driving mechanism is a first servo motor, and the first servo motor is connected with the power shaft of the winding equipment by magnetic fluid sealing.

23. The dual-sided reciprocating plating apparatus of claim 21, wherein, The driving mechanism comprises a revolution system and a second servo motor, the second servo motor is connected with the power shaft of the revolution system by magnetic fluid sealing, the power shaft of the revolution system comprises a first output shaft and a second output shaft, the first output shaft is connected with the first power shaft, and the second output shaft is connected with the second power shaft.

24. The dual-sided reciprocating plating apparatus of claim 23, wherein, The revolution system comprises a clutch connected with the first output shaft and the second output shaft, the clutch is clockwise combined, the first power shaft is the driving power shaft, and the second power shaft is the driven power shaft; the clutch is counterclockwise combined, the second power shaft is the driving power shaft, and the first power shaft is the driven power shaft.

25. The dual-sided reciprocating plating apparatus of claim 1, wherein The cross section of the vacuum chamber is circular, square or rectangular.

26. The dual-sided reciprocating plating apparatus of claim 1, wherein The emission source system is an electron beam evaporation system, a laser evaporation system, a magnetron sputtering system, a resistance evaporation system, a microwave evaporation system or an arc evaporation system; and the double-sided reciprocating coating device further comprises a reaction gas ionization system composed of an ion source and a plurality of air tubes.

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