A furnace body out of boat method and apparatus

Abstract

The furnace body boat-out method and device disclosed by the application relate to the technical field of vacuum diffusion furnaces, and the method comprises the following steps: obtaining furnace body boat-out information, determining a furnace tube that needs to transfer a base body out of the furnace, determining a transfer route of a transfer device according to the determined furnace tube, starting a furnace door device of the furnace tube, driving the transfer device to transfer a boat to a process boat-unloading position according to the transfer route, performing scanning analysis on the base body after the process boat-out is completed, determining structural damage of the base body, and correcting a driving strategy of the transfer device according to the scanning analysis result, so that the power driving strategy is gradually optimized, and structural damage of the base body caused in the transfer process of the base body in the later period is effectively avoided.

Description

Technical Field

[0001] This invention relates to the field of vacuum diffusion furnace technology, and in particular to a method and apparatus for unloading a furnace body from a boat. Background Technology

[0002] Semiconductor or photovoltaic materials are widely used in industries such as electronics and new energy. Semiconductor and photovoltaic materials usually need to be processed before they can be applied to products. CVD technology, diffusion process or oxidation process are some of the existing processing methods.

[0003] Diffusion furnaces, as crucial equipment in semiconductor device manufacturing processes, are widely used in industries such as integrated circuits, power electronics, and solar cell production. In the photovoltaic industry, high-temperature diffusion furnaces are primarily used to dope monocrystalline and polycrystalline silicon wafers to form PN junctions. With the development of the photovoltaic industry, there is a continuous pursuit of increased production capacity. The manufacturing process involves numerous heat treatment steps, such as thermal oxidation, chemical vapor deposition (CVD), thermal diffusion, metal alloying, impurity activation, and dielectric film densification. These heat treatment processes are highly temperature-sensitive, especially in semiconductor device fabrication, where temperature is a key parameter affecting the uniformity and growth rate of silicon films.

[0004] To increase silicon wafer production, the application of conventional single-furnace vertical vacuum diffusion furnaces has shifted to multi-furnace horizontal vacuum diffusion furnaces. In order to remove the substrate that has completed the positive vacuum diffusion process from the furnace, a transfer device is often used. Conventional transfer devices rely on a preset program to directly remove the boat carrying the substrate at a preset power. Since the weight of the substrate varies with different multiples, driving the transfer device with a single power may result in excessively rapid speed changes, which could damage the substrate. To avoid this situation, there is an urgent need for a transfer device that can automatically control the speed changes. Summary of the Invention

[0005] The purpose of this invention is to provide a transfer device that can automatically and gradually optimize the speed to avoid damage to the substrate structure during the transfer process.

[0006] Therefore, this invention discloses a method for unloading a furnace body from a boat, comprising:

[0007] Acquire the furnace body unloading signal, and determine the furnace tubes that need to be unloaded from the furnace body based on the furnace body unloading signal;

[0008] The furnace tubes are removed from the boat as needed, and the transfer route of the transfer device is determined.

[0009] Start the furnace door device of the furnace tube;

[0010] According to the transport route, the transfer device is driven to transfer the placement boat of the loaded substrate to the process unloading boat position;

[0011] After the process is completed and the vessel is unloaded, the substrate is scanned and analyzed to determine structural damage to the substrate. Based on the scan analysis results, the driving strategy for driving the transfer device is modified.

[0012] In some embodiments of this application, in order to obtain a modified driving strategy, a method for modifying the driving strategy of the transfer device is disclosed, the modification method including:

[0013] The power drive strategy is obtained and analyzed. The drive power value of the transfer device at different nodes on the transfer route is determined, and a drive power curve is constructed with different nodes as the x-axis and the drive power value as the y-axis.

[0014] The substrate after the transfer is completed is analyzed to obtain the location and intensity of the structural damage to the substrate, and structural damage values ​​are generated based on the intensity of the structural damage to the substrate during this transfer process.

[0015] Obtain transshipment registration information and determine the transshipment characteristics of the transshipment substrate based on the transshipment registration information;

[0016] Based on the location of structural damage at the base frame, determine the location node on the driving power curve where the driving power value needs to be adjusted, and based on the structural damage value, correct the driving power of the segment near the location node, and scan the corrected driving power curve to generate a new power driving strategy.

[0017] The transport characteristics of the associated matrix and the new power drive strategy are recorded in the corresponding power drive strategy library.

[0018] In some embodiments of this application, in order to determine a power drive strategy based on transport characteristics, the drive strategy corresponding library includes:

[0019] The transport characteristics of several transport matrixes are associated with a power drive strategy for each transport characteristic.

[0020] In some embodiments of this application, the specific content of the motion features is disclosed, which facilitates more accurate determination of the power drive strategy in the power drive strategy correspondence library. The forms of the motion features of the transfer substrate include: the total mass of the transferred substrate, the individual mass of the substrate, the shape of the substrate, and the thickness of the substrate's border.

[0021] In some embodiments of this application, a method for correcting the drive power is further disclosed, which includes:

[0022] It has a preset unit power for drive power correction and establishes damage correction rules;

[0023] Based on the damage correction rules and structural damage values, the reduction factor of the unit power is determined, and the driving power of this transfer operation is corrected based on the structural damage value of the substrate after the next transfer operation. The correction is then evaluated to generate a correction evaluation value.

[0024] If the corrected evaluation value is lower than the preset value, the driving power will be corrected a second time.

[0025] In some embodiments of this application, in order to evaluate the correction of the drive power, an evaluation method is disclosed, which includes:

[0026] For structural damage values, a damage degree corresponding group A [A1, A2, A3, ..., An] is established, where A is the first preset damage value, A2 is the second preset damage value, A3 is the third preset damage value, An is the nth preset damage value, and A1 < A2 < A3 < ... < An;

[0027] Establish a modified evaluation corresponding group B [B1, B2, B3, ..., Bn], where B1 is the first preset evaluation value, B2 is the second preset evaluation value, B3 is the third preset evaluation value, and Bn is the nth preset evaluation value;

[0028] Obtain the structural damage value A0;

[0029] When A0≤A1, the first preset evaluation value B1 is set as the corrected evaluation value;

[0030] When A1 < A0 ≤ A2, the second preset evaluation value B2 is set as the corrected evaluation value;

[0031] When A2 < A0 ≤ A3, the third preset evaluation value B3 is set as the corrected evaluation value.

[0032] …;

[0033] When An-1 < A0 ≤ An, the nth preset evaluation value Bn is set as the corrected evaluation value.

[0034] In some embodiments of this application, in order to make the correction of the drive power more accurate, a method for secondary correction of the drive power is disclosed. The method for secondary correction of the drive power includes:

[0035] Based on the correction evaluation value of the drive power correction, determine the multiple of the unit power to be adjusted when performing the second correction.

[0036] In some embodiments of this application, a method for determining a secondary correction amount is disclosed. The method for determining the multiple of the unit power by which the drive power is adjusted during the secondary correction includes:

[0037] Establish a set of unit power multiples V[V1, V2, V3, ..., Vn], where V1 is the first preset unit power multiple, V2 is the second preset unit power multiple, V3 is the third preset unit power multiple, and Vn is the nth preset unit power multiple, where V1 > V2 > V3 > ... > Vn;

[0038] Obtain the corrected evaluation value;

[0039] If the corrected evaluation value is B1, then the first preset unit power multiple V1 is used as the unit power multiple for adjusting the drive power during the second correction.

[0040] If the corrected evaluation value is B2, then the first preset unit power multiple V2 is used as the unit power multiple for adjusting the drive power during the second correction.

[0041] If the corrected evaluation value is B3, then the first preset unit power multiple V3 will be used as the unit power multiple for adjusting the drive power during the second correction.

[0042] …;

[0043] If the corrected evaluation value is Bn, then the first preset unit power multiple Vn is used as the unit power multiple for adjusting the drive power during the second correction.

[0044] In some embodiments of this application, the method for correcting drive power has been improved to more accurately correct drive power. The method for correcting drive power in the vicinity of the location node includes:

[0045] Based on the structural damage value, the driving power corresponding to the location node is corrected, and the curvature of the curve segment near the location node is reduced.

[0046] In some embodiments of this application, a furnace body unloading device is also disclosed, comprising:

[0047] The power drive strategy storage module has a built-in drive strategy corresponding library. The drive strategy corresponding library includes the transport characteristics of several transport bases. For each transport characteristic, there is a power drive strategy associated with it.

[0048] The matrix damage analysis module is used to analyze the structural damage of the matrix frame and generate structural damage values;

[0049] The matrix transport registration information input module is used to register and input the transport registration information of the matrix, and to analyze the transport registration information to determine the transport characteristics of the transported matrix;

[0050] The strategy determination module is used to determine the corresponding power drive strategy in the power drive strategy storage module based on the transport characteristics of the substrate.

[0051] The correction module is used to analyze and scan the power drive strategy, determine the drive power values ​​of different nodes on the transfer route, and construct a drive power curve with different node positions as the abscissa and the drive power value as the ordinate. Based on the location of structural damage at the base frame, the module determines the node on the drive power curve where the drive power value needs to be adjusted, and corrects the drive power of the section near the node based on the structural damage value. The module then scans the corrected drive power curve to generate a new power drive strategy.

[0052] In some embodiments of this application, in order to facilitate the strategy determination module in determining the power drive strategy, a drive strategy correspondence library is disclosed. The drive strategy correspondence library includes: transport features of several transport substrates, and for each transport feature, a power drive strategy is associated.

[0053] The motion characteristics of the transported matrix include: the total mass of the transferred matrix, the mass of each individual component of the matrix, the shape of the matrix, and the thickness of the matrix's border.

[0054] This application discloses a method and apparatus for unloading boats from a furnace body, which has the following advantages compared to setting a fixed drive power for the transfer device:

[0055] The power drive strategy is analyzed, generating a drive power curve with different position nodes as the abscissa and the drive power value as the ordinate. When correcting the drive power curve, the position node on the drive power curve that needs to adjust the drive power value is determined according to the location of structural damage at the substrate frame. Based on the structural damage value, the drive power of the segment near the position node is corrected. The corrected drive power curve is then scanned to generate a new power drive strategy. This achieves gradual optimization of the power drive strategy and effectively avoids substrate structural damage caused during substrate transfer.

[0056] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0057] Figure 1 This is a flowchart illustrating the steps of unloading a furnace body from a boat in an embodiment of this application.

[0058] Figure 2This is a flowchart illustrating the steps of modifying the driving strategy in an embodiment of this application. Detailed Implementation

[0059] The technical solution of the present invention will be further described below with reference to the accompanying drawings and embodiments.

[0060] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings and specific embodiments. It should be understood that the preferred embodiments described herein are only for illustration and explanation of the present invention and should not be construed as limiting the scope of protection of the present invention. Those skilled in the art can make some non-essential improvements and adjustments based on the following content of the present invention. In the present invention, unless otherwise expressly specified and limited, the technical terms used in this application should have the ordinary meaning understood by those skilled in the art. The terms "connected," "linked," "fixed," "set," etc., should be interpreted broadly, and can refer to fixed connection, detachable connection, or integral connection; can refer to direct connection or indirect connection through an intermediate medium; can refer to mechanical connection or electrical connection, unless otherwise expressly limited. For those skilled in the art, the specific meaning of the above terms in the present invention can be understood according to the specific circumstances. Unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, "above," "on top of," or "on the second feature" can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. The phrase "below," "under," or "beneath" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature. Relational terms such as "first," "second," etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. It should be noted that similar labels and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0061] Example:

[0062] The purpose of this invention is to provide a transfer device that can automatically and gradually optimize the speed to avoid damage to the substrate structure during the transfer process.

[0063] Therefore, this invention discloses a method for unloading a furnace body from a boat. (See reference...) Figure 1 ,include:

[0064] The first step is to obtain the furnace body unloading signal and, based on the furnace body unloading signal, determine the furnace tubes that need to be unloaded from the furnace.

[0065] The second step is to determine the transfer route of the transfer device by removing the furnace tubes from the boat as needed.

[0066] The third step is to activate the furnace door device of the furnace tube.

[0067] The fourth step involves driving the transfer device according to the transfer route to move the placement boat carrying the substrate to the process unloading boat position.

[0068] The fifth step is to perform a scanning analysis on the substrate after the process is completed and the substrate is unloaded, to determine the structural damage of the substrate, and to modify the driving strategy of the transfer device based on the scanning analysis results.

[0069] In the second step, there are two types of transfer routes. One type involves the transfer device entering the furnace with the paddle but not returning to the process unloading position. In this case, a dummy furnace door is installed on the transfer device. After the in-furnace process on the substrate (silicon wafer, silicon crystal, and other silicon material components) is completed, the transfer route of the transfer device refers to the preset route from the transfer device to the process unloading position. The other type involves the transfer device entering the furnace with the paddle but needing to return to the process unloading position. Therefore, after receiving the substrate request for unloading signal, it is necessary to first determine the furnace body that needs unloading and, based on the furnace body that needs unloading, determine the transfer route of the transfer device to the furnace body. After arriving at the furnace body, the furnace door opening device is activated, and then the transfer device drives the paddle out of the furnace and returns to the process unloading position along the transfer route.

[0070] In some embodiments of this application, a method for modifying the driving strategy of the transfer device is disclosed in order to obtain a modified driving strategy. (See reference...) Figure 2 The correction methods include:

[0071] Step S100: Obtain the power drive strategy, analyze and scan the power drive strategy, determine the drive power value of the transfer device at different position nodes on the transfer route, and construct a drive power curve with different position nodes as the horizontal axis and the drive power value as the vertical axis.

[0072] Step S200: Analyze the substrate after the transfer is completed, obtain the location and intensity of the structural damage at the substrate frame, and generate structural damage values ​​based on the intensity of the structural damage of the substrate during this transfer process.

[0073] Step S300: Obtain transfer registration information and determine the transfer characteristics of the transfer substrate based on the transfer registration information.

[0074] It should be understood that the transfer registration information can be entered by the input device, and the transfer registration information may include, but is not limited to, the multiple, shape and mass of the transfer matrix.

[0075] Step S400: Based on the location of structural damage at the base frame, determine the location node on the driving power curve where the driving power value needs to be adjusted, and based on the structural damage value, correct the driving power of the segment near the location node, and scan the corrected driving power curve to generate a new power driving strategy.

[0076] It is important to understand that during the transfer of the substrate, the transfer device may suddenly change direction, causing a collision between the substrate and the boat (the carrier carrying the substrate), which may result in damage to the edge of the substrate. Therefore, the damage to the edge of the substrate, corresponding to the transfer route of the transfer device, can determine the location node that caused the structural damage to the substrate.

[0077] Step S500: Associate the transport characteristics of the matrix and the new power drive strategy, and record them in the corresponding power drive strategy library.

[0078] In some embodiments of this application, in order to determine a power drive strategy for a transport feature, the drive strategy correspondence library includes: transport features of a plurality of transport substrates, and for each transport feature, a power drive strategy is associated.

[0079] In some embodiments of this application, the specific content of the motion features is disclosed, which facilitates more accurate determination of the power drive strategy in the power drive strategy correspondence library. The forms of the motion features of the transfer substrate include: the total mass of the transferred substrate, the individual mass of the substrate, the shape of the substrate, and the thickness of the substrate's border.

[0080] It is important to understand that when the transfer device is performing the transfer operation, the required driving power will vary depending on the total mass of the substrate. The individual mass of the substrate, the shape of the substrate, and the thickness of the substrate frame will all affect the structural damage of the substrate frame. Therefore, using the total mass of the substrate, the individual mass of the substrate, the shape of the substrate, and the thickness of the substrate frame as motion characteristics can effectively differentiate the power drive strategies.

[0081] In some embodiments of this application, a method for correcting the drive power is further disclosed, which includes:

[0082] The first step is to preset the unit power for drive power correction and establish damage correction rules.

[0083] The second step is to determine the reduction factor of the unit power based on the damage correction rules and structural damage value, and to correct the driving power of this transfer operation based on the structural damage value of the substrate after the next transfer operation, and to evaluate this correction to generate a correction evaluation value.

[0084] Third, if the corrected evaluation value is lower than the preset value, the driving power is then corrected a second time.

[0085] In some embodiments of this application, in order to evaluate the correction of the drive power, an evaluation method is disclosed, which includes:

[0086] The first step is to establish a damage degree corresponding group A [A1, A2, A3, ..., An] for the structural damage value, where A is the first preset damage value, A2 is the second preset damage value, A3 is the third preset damage value, and An is the nth preset damage value, and A1 < A2 < A3 < ... < An.

[0087] The second step is to establish a modified evaluation corresponding group B [B1, B2, B3, ..., Bn], where B1 is the first preset evaluation value, B2 is the second preset evaluation value, B3 is the third preset evaluation value, and Bn is the nth preset evaluation value.

[0088] The third step is to obtain the structural damage value A0, and based on the interval in which A0 falls, determine the corrected evaluation value:

[0089] When A0≤A1, the first preset evaluation value B1 is set as the corrected evaluation value.

[0090] When A1 < A0 ≤ A2, the second preset evaluation value B2 is set as the corrected evaluation value.

[0091] When A2 < A0 ≤ A3, the third preset evaluation value B3 is set as the corrected evaluation value.

[0092] …

[0093] When An-1 < A0 ≤ An, the nth preset evaluation value Bn is set as the corrected evaluation value.

[0094] In some embodiments of this application, in order to make the correction of drive power more accurate, a method for secondary correction of drive power is disclosed. The method for secondary correction of drive power includes: determining the multiple of unit power to be adjusted when performing secondary correction based on the correction evaluation value of drive power correction.

[0095] In some embodiments of this application, a method for determining a secondary correction amount is disclosed. The method for determining the multiple of the unit power by which the drive power is adjusted during the secondary correction includes:

[0096] The first step is to establish a set of unit power multiples V[V1, V2, V3, ..., Vn], where V1 is the first preset unit power multiple, V2 is the second preset unit power multiple, V3 is the third preset unit power multiple, and Vn is the nth preset unit power multiple, where V1 > V2 > V3 > ... > Vn.

[0097] The second step is to obtain the corrected evaluation value and, based on the corrected evaluation value, determine the multiple of the unit power to be adjusted for the drive power.

[0098] If the corrected evaluation value is B1, then the first preset unit power multiple V1 is used as the unit power multiple for adjusting the drive power during the second correction.

[0099] If the corrected evaluation value is B2, then the first preset unit power multiple V2 will be used as the unit power multiple for adjusting the drive power during the second correction.

[0100] If the corrected evaluation value is B3, then the first preset unit power multiple V3 will be used as the unit power multiple for adjusting the drive power during the second correction.

[0101] …

[0102] If the corrected evaluation value is Bn, then the first preset unit power multiple Vn is used as the unit power multiple for adjusting the drive power during the second correction.

[0103] In some embodiments of this application, the method for correcting the drive power has been improved to make the correction of the drive power more accurate. The method for correcting the drive power of the segment near the location node includes: correcting the drive power corresponding to the location node according to the structural damage value, and lowering the curvature of the curve segment near the location node.

[0104] It is important to understand that the smaller the curvature of the curve segment, the slower the change in driving power, which further avoids structural damage to the substrate caused by excessively rapid changes in the speed of the transfer device.

[0105] In some embodiments of this application, a furnace body unloading device is also disclosed, including: a power drive strategy storage module, a matrix damage analysis module, a matrix transfer registration information input module, a strategy determination module, and a correction module.

[0106] The power drive strategy storage module has a built-in drive strategy corresponding library. The drive strategy corresponding library includes several transport characteristics of transport substrates. For each transport characteristic, there is a power drive strategy associated with it.

[0107] The matrix damage analysis module is used to analyze the structural damage of the matrix frame and generate structural damage values.

[0108] The matrix transfer registration information input module is used to register and input the matrix transfer registration information, and analyze the transfer registration information to determine the transfer characteristics of the transferred matrix.

[0109] The strategy determination module is used to determine the corresponding power drive strategy in the power drive strategy storage module based on the transport characteristics of the substrate.

[0110] The correction module is used to analyze and scan the power drive strategy, determine the drive power values ​​of different nodes on the transfer route, and construct a drive power curve with different node positions as the abscissa and the drive power value as the ordinate. Based on the location of structural damage at the base frame, the module determines the node on the drive power curve where the drive power value needs to be adjusted, and corrects the drive power of the section near the node based on the structural damage value. The module then scans the corrected drive power curve to generate a new power drive strategy.

[0111] In some embodiments of this application, in order to facilitate the determination of the power drive strategy by the strategy determination module, a drive strategy correspondence library is disclosed. The drive strategy correspondence library includes: a plurality of transport features of transport substrates, and for each transport feature, a power drive strategy is associated; the form of the motion features of the transport substrates includes: the total mass of the transferred substrate, the individual mass of the substrate, the shape of the substrate, and the thickness of the substrate's border.

[0112] This application discloses a method and apparatus for unloading boats from a furnace body, which has the following advantages compared to setting a fixed drive power for the transfer device:

[0113] The power drive strategy is analyzed, generating a drive power curve with different position nodes as the abscissa and the drive power value as the ordinate. When correcting the drive power curve, the position node on the drive power curve that needs to adjust the drive power value is determined according to the location of structural damage at the substrate frame. Based on the structural damage value, the drive power of the segment near the position node is corrected. The corrected drive power curve is then scanned to generate a new power drive strategy. This achieves gradual optimization of the power drive strategy and effectively avoids substrate structural damage caused during substrate transfer.

[0114] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the technical solutions of the present invention, and these modifications or equivalent substitutions cannot cause the modified technical solutions to deviate from the spirit and scope of the technical solutions of the present invention.

Claims

1. A method for unloading a furnace body from a boat, characterized in that, include: Acquire the furnace body unloading signal, and determine the furnace tubes that need to be unloaded from the furnace body based on the furnace body unloading signal; The furnace tubes are removed from the boat as needed, and the transfer route of the transfer device is determined. Start the furnace door device of the furnace tube; According to the transport route, the transfer device is driven to transfer the placement boat of the loaded substrate to the process unloading boat position; After the process is completed and the vessel is unloaded, the substrate is scanned and analyzed to determine the structural damage of the substrate, and the driving strategy for driving the transfer device is modified based on the scan analysis results. The method for modifying the driving strategy of the transfer device includes: acquiring the power driving strategy, analyzing and scanning the power driving strategy, determining the driving power value of the transfer device at different position nodes on the transfer route, and constructing a driving power curve with different position nodes as the horizontal axis and the driving power value as the vertical axis. The substrate after the transfer is completed is analyzed to obtain the location and intensity of the structural damage to the substrate, and structural damage values ​​are generated based on the intensity of the structural damage to the substrate during this transfer process. Obtain transshipment registration information and determine the transshipment characteristics of the transshipment substrate based on the transshipment registration information; Based on the location of structural damage at the base frame, determine the location node on the driving power curve where the driving power value needs to be adjusted, and based on the structural damage value, correct the driving power of the segment near the location node, and scan the corrected driving power curve to generate a new power driving strategy. The transport characteristics of the associated matrix and the new power drive strategy are recorded in the corresponding power drive strategy library.

2. The method for unloading a furnace body from a boat according to claim 1, characterized in that, The corresponding library for the driving strategy includes: The transport characteristics of several transport matrixes are associated with a power drive strategy for each transport characteristic.

3. The method for unloading a furnace body from a boat according to claim 2, characterized in that, The motion characteristics of the transported matrix include: the total mass of the transferred matrix, the mass of each individual component of the matrix, the shape of the matrix, and the thickness of the matrix's border.

4. The method for unloading a furnace body from a boat according to claim 3, characterized in that, The method for correcting the drive power includes: It has a preset unit power for drive power correction and establishes damage correction rules; Based on the damage correction rules and structural damage values, the factor by which the unit power is reduced is determined, and the driving power of this transfer operation is corrected based on the structural damage value of the substrate after the next transfer operation. The correction is then evaluated to generate a correction evaluation value. If the corrected evaluation value is lower than the preset value, the driving power will be corrected a second time.

5. The method for unloading a furnace body from a boat according to claim 4, characterized in that, The method for evaluating the correction of the drive power includes: For structural damage values, a damage degree corresponding group A [A1, A2, A3, ..., An] is established, where A is the first preset damage value, A2 is the second preset damage value, A3 is the third preset damage value, An is the nth preset damage value, and A1 < A2 < A3 < ... < An; Establish a modified evaluation corresponding group B [B1, B2, B3, ..., Bn], where B1 is the first preset evaluation value, B2 is the second preset evaluation value, B3 is the third preset evaluation value, and Bn is the nth preset evaluation value; Obtain the structural damage value A0; When A0≤A1, the first preset evaluation value B1 is set as the corrected evaluation value; When A1 < A0 ≤ A2, the second preset evaluation value B2 is set as the corrected evaluation value; When A2 < A0 ≤ A3, the third preset evaluation value B3 is set as the corrected evaluation value; …； When An-1<A0≤An, the nth preset evaluation value Bn is set as the corrected evaluation value.

6. The method for unloading a furnace body from a boat according to claim 5, characterized in that, Methods for secondary correction of drive power include: Based on the correction evaluation value of the drive power correction, determine the multiple of the unit power to be adjusted when performing the second correction.

7. A method for unloading a furnace body from a boat according to claim 6, characterized in that, Methods for determining the multiple of the unit power used to adjust the drive power during secondary correction include: Establish a set of unit power multiples V[V1, V2, V3, ..., Vn], where V1 is the first preset unit power multiple, V2 is the second preset unit power multiple, V3 is the third preset unit power multiple, and Vn is the nth preset unit power multiple, where V1 > V2 > V3 > ... > Vn; Obtain the corrected evaluation value; If the corrected evaluation value is B1, then the first preset unit power multiple V1 is used as the unit power multiple for adjusting the drive power during the second correction. If the corrected evaluation value is B2, then the first preset unit power multiple V2 is used as the unit power multiple for adjusting the drive power during the second correction. If the corrected evaluation value is B3, then the first preset unit power multiple V3 will be used as the unit power multiple for adjusting the drive power during the second correction. …； If the corrected evaluation value is Bn, then the first preset unit power multiple Vn is used as the unit power multiple for adjusting the drive power during the second correction.

8. The method for unloading a furnace body from a boat according to claim 7, characterized in that, The method for correcting the drive power of the segment near the location node includes: Based on the structural damage value, the driving power corresponding to the location node is corrected, and the curvature of the curve segment near the location node is reduced.

9. A furnace body unloading device for performing a furnace body unloading method as described in any one of claims 1-8, characterized in that, include: The power drive strategy storage module has a built-in drive strategy corresponding library. The drive strategy corresponding library includes the transport characteristics of several transport bases. For each transport characteristic, there is a power drive strategy associated with it. The matrix damage analysis module is used to analyze the structural damage of the matrix frame and generate structural damage values. The matrix transport registration information input module is used to register and input the transport registration information of the matrix, and to analyze the transport registration information to determine the transport characteristics of the transported matrix; The strategy determination module is used to determine the corresponding power drive strategy in the power drive strategy storage module based on the transport characteristics of the substrate. The correction module is used to analyze and scan the power drive strategy, determine the drive power values ​​of the transfer device at different nodes on the transfer route, and construct a drive power curve with different node positions as the abscissa and the drive power value as the ordinate. Based on the location of structural damage at the base frame, the module determines the node on the drive power curve where the drive power value needs to be adjusted, and corrects the drive power of the segment near the node based on the structural damage value. The module then scans the corrected drive power curve to generate a new power drive strategy.

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