Wafer prober station start-stop control system, method, and related apparatus

Abstract

The application provides a wafer probe station start-stop control system, method and related device, which comprises a power-on button, a power-off button, a programmable controller, a relay, a first contactor and an industrial computer; the industrial computer comprises an industrial computer power supply; the programmable controller is connected with the power-on button, the power-off button, the relay, the first contactor and the industrial computer respectively; and the industrial computer power supply is connected with the relay. When a power-on instruction is detected, a start signal is output to the industrial computer through the programmable controller; after the industrial computer is started, the first contactor is controlled to supply power to the equipment; when a power-off instruction is detected, a power-off signal is output to the industrial computer through the programmable controller; after the industrial computer is powered off, the first contactor is controlled to be powered off; and the control system is started and stopped in one key according to a safe start-stop sequence, so that the start-stop sequence of the system can be effectively controlled, and the industrial computer and even production data are prevented from being damaged due to improper start-stop sequence.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor, and in particular to a wafer probe station start-stop control system and method and related device. BACKGROUND

[0002] The wafer probe station is an intermediate test equipment on the semiconductor process line, which can automatically complete the test of the integrated circuit and the electrical parameters and functions of various transistor cores after being connected with a tester. At present, the industry generally applies manual start of the computer, and then the wafer probe test station is powered on by pressing the start button. When the computer is shut down, the wafer probe test station is powered off by pressing the shutdown button to realize the start and shutdown. However, such operation is troublesome, and if the sequence is not correct when the computer is shut down, the industrial computer and even the production data will be damaged, resulting in heavy losses. SUMMARY

[0003] The embodiments of the present application provide a wafer probe station start-stop control system, method and related device, which can at least solve the problem of damage to the industrial computer and even the production data caused by improper sequence of the wafer probe station start-stop.

[0004] The first aspect of the embodiments of the present application provides a start-stop control system, comprising: a start button, a shutdown button, a programmable controller, a relay, a first contactor, an industrial computer and an external power supply; wherein the relay comprises a normally open contact and a normally closed contact, the industrial computer comprises an industrial computer power supply, the programmable controller is connected with the start button, the shutdown button, the relay, the first contactor and the industrial computer respectively, the industrial computer power supply is connected with the relay, the normally open contact is connected with the external power supply, and the normally closed contact is connected with the programmable controller.

[0005] The programmable controller is configured to receive a start instruction of the start button, control the industrial computer to start by outputting a start signal, and receive a shutdown instruction of the shutdown button, control the industrial computer to shut down by outputting a shutdown signal.

[0006] The relay is configured to control the external power supply to supply power to a common end S / S of an input point of the programmable controller by closing the normally open contact and opening the normally closed contact, and the start button is disabled; or control the internal power supply of the programmable controller to supply power to the common end S / S of the input point by opening the normally open contact and closing the normally closed contact, and the shutdown button is disabled.

[0007] The first contactor is configured to supply power or cut off power to the system equipment according to the control instruction output by the programmable controller.

[0008] Optionally, the programmable controller comprises an X0 signal port, an X1 signal port, an X2 signal port, a Y0 signal port, and a Y2 signal port; wherein the internal power supply comprises a 0V internal power supply and a 24V internal power supply; the normally open contact is connected with the input point common end S / S and the X0 signal port, and the normally closed contact is connected with the input point common end S / S and the X2 signal port;

[0009] The X0 signal port is used for receiving a start-up instruction, the X1 signal port is used for receiving a shutdown instruction, the X2 signal port is used for receiving an industrial computer start-up signal, the Y0 signal port is used for outputting an industrial computer start-up signal to control the industrial computer to start up or outputting an industrial computer shutdown signal to control the industrial computer to shut down, and the Y2 signal port is used for controlling power supply of the first contactor.

[0010] Optionally, the start-stop control system comprises a start-up circuit; the start-up circuit comprises the start-up button, the industrial computer, the first contactor, the normally closed contact, the normally closed contact, the input point common end S / S, the X0 signal port, the Y0 signal port, and the Y2 signal port.

[0011] The input point common end S / S is connected with the 24V internal power supply through a first normally closed contact to form a first link, and the X0 signal port is connected with the 0V internal power supply through a second normally closed contact to form a second link; the second circuit is provided with a start-up button contact, and when the start-up button contact is closed, the first link and the second link form a closed loop.

[0012] The Y0 signal port is connected with the industrial computer, and when receiving a start-up instruction, the Y0 signal port is used for outputting an industrial computer start-up signal to control the industrial computer to start up, the normally closed contact is opened, and the normally open contact is closed.

[0013] The Y2 signal port is connected with the first contactor, and the Y2 signal port is used for outputting a Y2 device power supply signal to control the first contactor to supply power to a device.

[0014] Optionally, the start-stop control system further comprises a shutdown circuit; the shutdown circuit comprises the shutdown button, the industrial computer, the first contactor, the first normally open contact, the second normally open contact, the input point common end S / S, the X1 signal port, the Y0 signal port, the Y2 signal port, and an external power supply; wherein the external power supply comprises a 24V external power supply and a 0V external power supply.

[0015] The input point common terminal S / S is connected with the 24V external power supply through the first normally open contact, forming a third link; the X1 signal port is connected with the 0V external power supply, forming a fourth link; the fourth link is provided with a shutdown button contact, when the shutdown button contact is closed, the third link and the fourth link form a closed loop;

[0016] When receiving a shutdown instruction, the Y0 signal port outputs an industrial computer shutdown signal, the industrial computer shutdown signal is used for controlling the industrial computer to shut down, the normally closed contact is closed, and the normally open contact is opened.

[0017] Optionally, the start-stop control system further comprises a second contactor, and the second contactor is connected with the external power supply.

[0018] The second contactor is used for monitoring the power load condition of the start-stop control system.

[0019] Embodiments of the second aspect of the application provide a start-stop control method, applied to a start-stop control system, comprising:

[0020] Detecting an external input instruction;

[0021] When detecting a start-up instruction, outputting an industrial computer start-up signal to the industrial computer;

[0022] Starting the industrial computer according to the industrial computer start-up signal;

[0023] Obtaining an X2 industrial computer start-up signal that the industrial computer starts up completely;

[0024] When detecting the X2 industrial computer start-up signal, outputting a Y2 device power supply signal, and controlling a first contactor to supply power to a device according to the Y2 device power supply signal;

[0025] When detecting a shutdown instruction, outputting an industrial computer shutdown signal to the industrial computer;

[0026] Turning off the industrial computer according to the industrial computer shutdown signal;

[0027] After failing to detect the X2 industrial computer start-up signal, stopping outputting the Y2 device power supply signal, and controlling the first contactor to stop supplying power to the device.

[0028] Optionally, the start-stop control method further comprises:

[0029] When the industrial computer starts up completely, closing a normally open contact and opening a normally closed contact through an industrial computer power supply, and generating the X2 industrial computer start-up signal;

[0030] When the work station is powered off, the normally open contact is disconnected, the normally closed contact is closed, and the X2 work station power-on signal is stopped from being output.

[0031] The third aspect of the embodiment of the present application provides a one-key start-stop control device, which is applied to a start-stop control system and comprises:

[0032] The detection module is configured to detect an external input instruction.

[0033] The first output module is configured to output a work station start signal to the work station when a start instruction is detected.

[0034] The first control module is configured to start the work station according to the work station start signal.

[0035] The acquisition module is configured to acquire an X2 work station power-on signal of the work station start completion.

[0036] The second control module is configured to output a Y2 device power supply signal and control the first contactor to supply power to the device according to the Y2 device power supply signal when the X2 work station power-on signal is detected.

[0037] The second output module is configured to output a work station power-off signal to the work station when a power-off instruction is detected.

[0038] The third control module is configured to close the work station according to the work station power-off signal.

[0039] The fourth control module is configured to stop outputting the Y2 device power supply signal and control the first contactor to stop supplying power to the device after the X2 work station power-on signal cannot be detected.

[0040] The fourth aspect of the embodiment of the present application provides an electronic device, which comprises a memory and a processor, wherein the processor is configured to execute a PLC program stored in the memory, and the processor executes each step in the start-stop control method provided in the first aspect of the embodiment of the present application when executing the PLC program.

[0041] The fifth aspect of the embodiment of the present application provides a readable storage medium, which stores a PLC program, and each step in the start-stop control method provided in the first aspect of the embodiment of the present application is implemented when the PLC program is executed by a processor.

[0042] As can be seen from the above, the wafer probe station start-stop control system, method and related device provided by the scheme of the application, including a power-on button, a power-off button, a programmable controller, a relay, a first contactor, an industrial computer; wherein the industrial computer includes an industrial computer power supply, the programmable controller is connected with the power-on button, the power-off button, the relay, the first contactor and the industrial computer respectively, and the industrial computer power supply is connected with the relay. When the power-on instruction is detected, the programmable controller outputs a start signal to the industrial computer, and after the industrial computer is started, the first contactor signal is controlled to supply power to the equipment according to the Y2 equipment power supply signal; when the power-off instruction is detected, the programmable controller outputs a power-off signal to the industrial computer, and after the industrial computer is powered off, the first contactor is controlled to be powered off according to the Y2 equipment power supply signal. The control system can effectively control the start-stop sequence of the system, prevent the industrial computer and even the production data from being damaged due to improper start-stop sequence. BRIEF DESCRIPTION OF DRAWINGS

[0043] Figure 1 The structure block diagram of the start-stop control system provided by the embodiment of the application is shown in the figure.

[0044] Figure 2 The circuit schematic diagram of the start-stop control system provided by the embodiment of the application is shown in the figure.

[0045] Figure 3 The flowchart of the start-stop control method provided by the embodiment of the application is shown in the figure.

[0046] Figure 4 The program module schematic diagram of the one-key start-stop control device provided by the embodiment of the application is shown in the figure.

[0047] Figure 5 The structure schematic diagram of the electronic device provided by the embodiment of the application is shown in the figure. DETAILED DESCRIPTION

[0048] In order to make the purposes, features and advantages of the application more obvious and easy to understand, the technical solutions in the embodiments of the application will be described clearly and completely below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, not all. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the application.

[0049] In order to solve the problem of improper wafer probe station start-stop sequence leading to damage of the industrial computer and even production data in the related art, the embodiment of the application provides a start-stop control system, as shown in the figure. Figure 1A structure block diagram of the start-stop control system provided by the embodiment is provided, and the start-stop control system comprises a start button, a shutdown button, a programmable controller, a relay, a first contactor, an industrial computer and an external power supply; the relay comprises a normally open contact and a normally closed contact; the industrial computer comprises an industrial computer power supply; the programmable controller is connected with the start button, the shutdown button, the relay, the first contactor and the industrial computer respectively; the industrial computer power supply is connected with the relay; the normally open contact is connected with the external power supply; and the normally closed contact is connected with the programmable controller.

[0050] The programmable controller is configured to receive a start instruction of the start button and control the industrial computer to start by outputting a start signal; and receive a shutdown instruction of the shutdown button and control the industrial computer to shut down by outputting a shutdown signal.

[0051] The relay is configured to control the external power supply to supply power to a common end S / S of an input point of the programmable controller by closing the normally open contact and opening the normally closed contact, so that the start button is disabled; or control the internal power supply of the programmable controller to supply power to the common end S / S of the input point by opening the normally open contact and closing the normally closed contact, so that the shutdown button is disabled.

[0052] The first contactor is configured to supply power or cut off power to a system device according to a control instruction output by the programmable controller.

[0053] Specifically, the programmable controller (PLC) is a programmable logic controller, which uses a programmable memory to store instructions for performing logic operations, sequential control, timing, counting and arithmetic operations, etc. inside, and controls various types of mechanical equipment or production processes through digital or analog input and output. The basic working principle of the start-stop control system of the present application is as follows: when the start button (green ON button) is pressed, the contact corresponding to the start button is closed, forming a loop between the port of the PLC and the normally closed contact of the relay, generating a start instruction. After the PLC obtains the start instruction, it outputs a work station start signal to the work station, and after the work station starts, the work station power supplies the relay (KA0), so that the normally closed contact is opened and the normally open contact is closed. At this time, the PLC receives the work station start completion signal and outputs a device power supply signal to the first contactor (KM1) to control the first contactor to supply power to the wafer probe station. At this time, the one-key start is completed. Similarly, when the shutdown button (red OFF button) is pressed, the contact corresponding to the shutdown button is closed, generating a shutdown instruction. The PLC outputs a work station shutdown signal to the work station according to the shutdown instruction to control the work station to shut down. If the work station shuts down, the work station power will be cut off, so that the relay loses power, the normally closed contact is closed and the normally open contact is opened. The PLC cannot receive the work station start completion signal, stops outputting the device power supply signal to the first contactor, and cuts off the power supply of the whole machine. At this time, the one-key shutdown is completed.

[0054] Optionally, the relay includes a normally open contact and a normally closed contact; the PLC includes an X0 signal port, an X1 signal port, an X2 signal port, an X3 signal port, a Y0 signal port, a Y2 signal port and a PLC internal power supply; wherein the PLC internal power supply includes a 0V internal power supply and a 24V internal power supply, the normally open contact is connected with an input common end S / S and the X0 signal port, and the normally closed port is connected with the input common end S / S and the X2 signal port.

[0055] Specifically, the X0 signal port is used to receive a start instruction, the X1 signal port is used to receive a shutdown instruction, the X2 signal port is used to receive a work station start signal, the Y0 signal port is used to output a work station start signal to control the work station to start, or output a work station shutdown signal to control the work station to shut down, and the Y2 signal port is used to control the power supply of the first contactor.

[0056] Optionally, in the present embodiment, the work station further includes a work station XS4-1 port and a work station XS4-2 port in addition to the work station power supply, the work station XS4-1 port is connected with the common end COM of the PLC, and the work station XS4-2 port is connected with the signal output port of the PLC. The work station power supply includes a PC12V+ positive electrode and a PC12V- negative electrode.

[0057] In one optional embodiment of this invention, the start-stop control system includes a start circuit; the start circuit includes a power button, an industrial computer, a first contactor, and a first normally closed contact (e.g., ...). Figure 2 As shown in KA0-2), the second normally closed contact (such as...) Figure 2 The circuit includes KA0-3, the input point common terminal S / S, the X0 signal port, the Y0 signal port, and the Y2 signal port. The power button corresponds to the power button contact. The input point common terminal S / S is connected to the 24V internal power supply through the KA0-2 contact, forming the first link. The X0 signal port is connected to the 0V internal power supply through the KA0-3 contact, forming the second link. The second circuit has a power button contact. When the power button contact is closed, the first link and the second link form a closed loop. The Y0 signal port is connected to the industrial control computer. When a power-on command is received, the Y0 signal port is used to output the industrial control computer start signal. The industrial control computer start signal is used to control the industrial control computer to start. The normally closed contact opens, and the normally open contact closes. The Y2 signal port is connected to the first contactor. The Y2 signal port is used to output the Y2 device power supply signal. The Y2 device power supply signal is used to control the first contactor to supply power to the wafer probe station.

[0058] Specifically, such as Figure 2 The diagram shown is a circuit diagram of the start / stop control system provided in this embodiment. The working principle of the start circuit is as follows: a one-button automatic start link is composed of a green ON button (power-on button), industrial PC XS4-1, industrial PC XS4-2, PLC-S / S, PLC-X0, industrial PC 12V+, industrial PC 12V-, KA0-2 contact, and KA0-3 contact. When connected to mains power, only the PLC and the external 24V1 power supply are energized; KA0 is not yet engaged. Figure 2KA0-2 and KA0-3 are still in their initial normally closed state. At this time, the common input terminal S / S of the PLC is provided by the PLC's 24V internal power supply through the normally closed state of KA0-2. At this time, the common terminal of the green button is also provided by the PLC's 0V internal power supply through KA0-3, which can form a loop. Among them, the common input terminal S / S and the 24V internal power supply form the first link, and the X0 signal port and the 0V internal power supply form the second link. When the green ON button is pressed, the X0 signal port is activated. The PLC's internal program receives the X0 signal and interprets it as a power-on command. The PLC outputs an industrial computer start signal to start the industrial computer. After the industrial computer starts, it outputs 12V+ and 12V- to energize the relay coil KA0. The normally closed contacts KA0-2 and KA0-3 of KA0 open, while the normally open contacts KA0-1 and KA0-4 of KA0 close. The PLC receives the X2 industrial computer power-on signal through KA0-4 and outputs the Y2 device power supply signal to activate the first contactor, powering the wafer probe. At this time, the PLC's input common terminal S / S is powered by an external 24V1 power supply through KA0-1. The green ON button cannot form a loop, so repeatedly pressing the green ON button will not affect the link. At this point, the one-button start is complete.

[0059] In one optional embodiment of this invention, the start / stop control system includes a shutdown circuit; the shutdown circuit includes a shutdown button, an industrial computer, a first contactor, and a first normally open contact (e.g., ...). Figure 2 As shown in KA0-1), the second normally open contact (such as...) Figure 2 The system includes KA0-4), the common input terminal S / S, the X1 signal port, the Y0 signal port, the Y2 signal port, and an external power supply. The external power supply includes both 24V and 0V power supplies. The power-off button corresponds to the power-off button contact. The common input terminal S / S is connected to the 24V external power supply via the KA0-1 contact, forming a third link. The X1 signal port is connected to the 0V external power supply, forming a fourth link. A power-off button contact is located on the fourth link. When the power-off button contact is closed, the third and fourth links form a closed loop. When a power-off command is received, the Y0 signal port outputs an industrial control power-off signal. This signal controls the industrial control power-off process; normally closed contacts close, and normally open contacts open.

[0060] Specifically, in the embodiment, the one-key automatic shutdown link is composed of a red OFF button (shutdown button), an industrial computer XS4-1, an industrial computer XS4-2, an input point common end S / S, a PLC-X1, an industrial computer 12V+, an industrial computer 12V-, a KA0-1 contact, and a KA0-4 contact. After the automatic start is completed, the input point common end S / S is powered by the external power supply 24V1, and at this time, the red OFF button common end is powered by the external power supply 0V1, and a loop can be formed. The input point common end S / S is connected with the 24V external power supply through the KA0-1 contact, and the third link is formed. The X1 signal port is connected with the 0V external power supply through the KA0-4 contact, and the fourth link is formed. When the red OFF button is pressed, the PLC receives the X1 shutdown signal and judges it as a shutdown instruction. At this time, the PLC internal program controls the Y0 output to output an industrial computer shutdown signal to turn off the industrial computer. After the industrial computer is turned off, the industrial computer 12V+ and the industrial computer 12V- signal (power supply signal) are disconnected, the relay coil loses power, the KA0 normally closed contact KA0-2 and the KA0-3 are closed, the KA0 normally open contact KA0-1 and the KA0-4 are disconnected, the PLC input point common end S / S becomes the PLC internal power supply again, and the red OFF button cannot form a loop and is disabled. At this time, the KA0-4 contact is disconnected, the PLC detects that the X2 industrial computer startup signal disappears, judges that the industrial computer is turned off, the internal program control closes the Y2 device power supply signal output, the first contactor coil loses power, and the whole machine power supply is cut off. At this time, the one-key shutdown is completed.

[0061] Optionally, as shown in the circuit schematic diagram, Figure 2 the start-stop control system further includes a second contactor (KM11), and the second contactor is connected with the 0V external power supply and the X3 signal port of the PLC respectively. The second contactor is used for monitoring the power load of the start-stop control system.

[0062] Optionally, the start-stop control system further includes an external high-voltage power supply, and the PLC further includes an L port and an N port. The L port and the N port are respectively used for connecting the external high-voltage power supply.

[0063] According to the start-stop control system provided in the application, the start-stop control system comprises a start button, a stop button, a PLC, a relay, a first contactor and an industrial computer, wherein the PLC is a PLC, the industrial computer comprises an industrial computer power supply, the PLC is connected with the start button, the stop button, the relay, the first contactor and the industrial computer, and the industrial computer power supply is connected with the relay. When a start instruction is detected, a start signal is output to the industrial computer through the PLC, and after the industrial computer is started, the first contactor is controlled to supply power to a wafer probe station according to a Y2 device power supply signal. When a stop instruction is detected, a stop signal is output to the industrial computer through the PLC, and after the industrial computer is stopped, the first contactor is controlled to be powered off according to the Y2 device power supply signal. The control system can one-key start and stop according to a safe start-stop sequence, can effectively control the start-stop sequence of the system, and can prevent the industrial computer and even production data from being damaged due to improper start-stop sequence.

[0064] The embodiment of the application provides a start-stop control method, which is applied to the start-stop control system in the foregoing embodiment. Figure 3 The flowchart of the start-stop control method provided in the embodiment comprises the following steps.

[0065] In step 110, an external input instruction is detected.

[0066] In step 120, when a start instruction is detected, an industrial computer start signal is output to the industrial computer.

[0067] In step 130, the industrial computer is started according to the industrial computer start signal.

[0068] In step 140, an X2 industrial computer start signal that the industrial computer is started is acquired.

[0069] In step 150, when the X2 industrial computer start signal is detected, a Y2 device power supply signal is output, and the first contactor is controlled to supply power to the device according to the Y2 device power supply signal.

[0070] In step 160, when a stop instruction is detected, an industrial computer stop signal is output to the industrial computer.

[0071] In step 170, the industrial computer is turned off according to the industrial computer stop signal.

[0072] In step 180, after the X2 industrial computer start signal cannot be detected, the Y2 device power supply signal is stopped from being output, and the first contactor is controlled to stop supplying power to the device.

[0073] Specifically, in the embodiment, the external input instruction can be an X0 signal generated after the user presses the green ON button, and the PLC judges it as a start-up instruction; or can be an X1 signal generated after the user presses the red OFF button, and the PLC judges it as a shutdown instruction. When the start-up instruction is detected, the PLC outputs a Y0 pulse signal to start the industrial computer, and waits for the industrial computer to start up. After the industrial computer starts up, the industrial computer outputs 12V+ and 12V- to energize the relay coil KA0, and the normally closed contacts KA0-2 and KA0-3 of KA0 are disconnected; the normally open contacts KA0-1 and KA0-4 of KA0 are attracted, and the PLC obtains the X2 industrial computer start-up signal (industrial computer start-up completion signal) through KA0-4. After that, the internal program of the PLC outputs a Y2 device power supply signal to attract the first contactor to power on the wafer probe station. At this time, the one-key start-up is completed. When the shutdown instruction is detected, the internal program of the PLC controls Y0 to output a pulse signal to shut down the industrial computer, and waits for the industrial computer to shut down. After the industrial computer shuts down, the industrial computer power supply stops supplying power, so that the relay coil is de-energized, the normally closed contacts KA0-2 and KA0-3 are closed, and the normally open contacts KA0-1 and KA0-4 are disconnected, that is, the X2 industrial computer start-up signal disappears. After the X2 industrial computer start-up signal cannot be detected, the Y2 device power supply signal is stopped, the first contactor coil is de-energized, and the whole machine power supply is cut off. At this time, the one-key shutdown is completed.

[0074] Based on the above embodiment, the external input instruction is detected; when the start-up instruction is detected, an industrial computer start-up signal is output to the industrial computer; the industrial computer is started up according to the industrial computer start-up signal; an X2 industrial computer start-up signal is obtained when the industrial computer starts up; when the X2 industrial computer start-up signal is detected, a Y2 device power supply signal is output, and the first contactor is controlled to supply power to the wafer probe station according to the Y2 device power supply signal; when the shutdown instruction is detected, an industrial computer shutdown signal is output to the industrial computer; the industrial computer is shut down according to the industrial computer shutdown signal; and after the X2 industrial computer start-up signal cannot be detected, the Y2 device power supply signal is stopped, and the first contactor is controlled to stop supplying power to the wafer probe station. Through the implementation of the scheme of the present application, the control system is one-key started and stopped in a safe start-up and shutdown sequence, which can effectively control the start-up and shutdown sequence of the system and prevent the industrial computer and even the production data from being damaged due to improper start-up and shutdown sequence.

[0075] Figure 4 A one-key start-stop control device is provided for the embodiment of the present application, and the one-key start-stop control device can be used to implement the start-stop control method in the foregoing embodiment. As shown in FIG. 10, the one-key start-stop control device mainly includes: Figure 4

[0076] The detection module 10 is configured to detect an external input instruction.

[0077] The first output module 20 is configured to output an industrial computer start-up signal to the industrial computer when the start-up instruction is detected. ​

[0078] The first control module 30 is configured to start the industrial computer according to the industrial computer starting signal.

[0079] The acquisition module 40 is configured to acquire an X2 industrial computer starting signal indicating that the industrial computer is started.

[0080] The second control module 50 is configured to output a Y2 device power supply signal when the X2 industrial computer starting signal is detected, and control the first contactor to supply power to the device according to the Y2 device power supply signal.

[0081] The second output module 60 is configured to output an industrial computer shutdown signal to the industrial computer when the shutdown instruction is detected.

[0082] The third control module 70 is configured to shut down the industrial computer according to the industrial computer shutdown signal.

[0083] The fourth control module 80 is configured to stop outputting the Y2 device power supply signal and control the first contactor to stop supplying power to the device after the X2 industrial computer starting signal cannot be detected.

[0084] Figure 5 An electronic device is provided in the embodiments of the present application. The electronic device can be used to implement the start-stop control method in the foregoing embodiments, and mainly includes:

[0085] The memory 501, the processor 502, and the PLC program 503 stored in the memory 501 and executable on the processor 502 are communicatively connected. When the processor 502 executes the PLC program 503, the start-stop control method in the foregoing embodiments is implemented. The number of processors can be one or more.

[0086] The memory 501 can be a high-speed random access memory (RAM) or a non-volatile memory such as a disk memory. The memory 501 is used to store executable program codes, and the processor 502 is coupled to the memory 501.

[0087] Further, the embodiments of the present application also provide a readable storage medium, which can be arranged in the electronic device in the foregoing embodiments. The readable storage medium can be the memory in the foregoing embodiments. Figure 5

[0088] ​The readable storage medium stores a PLC program, which is executed by the processor to implement the start-stop control method in the foregoing embodiments. Further, the readable storage medium can also be a U disk, a mobile hard disk, a read-only memory (ROM), a RAM, a magnetic disk or an optical disk, and various storage medium capable of storing program codes.

[0089] In several embodiments provided in the present application, it should be understood that the disclosed apparatus and method can be implemented in other manners. For example, the described apparatus embodiments are merely schematic. For example, the division of the modules is merely a logical function division. There can be another division manner for the actual implementation, for example, multiple modules or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the displayed or discussed mutual couplings or direct couplings or communication connections can be indirect couplings or communication connections through some interfaces, devices or modules, and can be electrical, mechanical or in other forms.

[0090] The modules illustrated as separated components can or can not be physically separated, and the components illustrated as modules can or can not be physical modules, i.e., can be located in one place, or can be distributed on multiple network modules. Some or all of the modules can be selected according to actual needs to achieve the purpose of the embodiments.

[0091] In addition, the functional modules in each embodiment of the present application can be integrated in one processing module, or each module can be physically present alone, or two or more modules can be integrated in one module. The integrated module can be realized in the form of hardware or in the form of a software functional module.

[0092] If the integrated module is realized in the form of a software functional module and sold or used as an independent product, it can be stored in a computer readable storage medium. Based on this understanding, the technical solutions of the present application essentially or the part that contributes to the prior art or the whole or part of the technical solutions can be embodied in the form of a software product. The computer software product is stored in a readable storage medium, including a plurality of instructions to make a computer device (which can be a personal computer, a server, or a network device, etc.) execute all or part of the steps of the embodiments of the present application. The foregoing readable storage medium includes a U disk, a mobile hard disk, a ROM, a RAM, a magnetic disk or an optical disk, and various storage medium capable of storing program codes.

[0093] It should be noted that, for the foregoing method embodiments, the purposes of brief description, they are all expressed as a series of action combinations, but those skilled in the art should know that the present application is not limited to the order of the actions described, because according to the present application, certain steps can be performed in other orders or simultaneously. Secondly, those skilled in the art should know that the embodiments described in the specification are all preferred embodiments, and the actions and modules involved are not necessarily essential to the present application.

[0094] In the above embodiments, the description of each embodiment has its own focus, and the parts not described in detail in a certain embodiment can be referred to the related description of other embodiments.

[0095] The above is the description of the wafer probe station start-stop control system, method and related device provided by the present application. For those skilled in the art, according to the idea of the embodiments of the present application, there will be changes in specific implementation and application range. In summary, the content of the specification should not be understood as a limitation of the present application.

Claims

1. A start-stop control system characterized by comprising: include: The system includes a power button, a power off button, a programmable controller (PLC), a relay, a first contactor, an industrial computer, and an external power supply. The relay includes normally open and normally closed contacts. The industrial computer includes an industrial computer power supply. The PLC is connected to the power button, the power off button, the first contactor, and the industrial computer. The industrial computer power supply is connected to the relay. The normally open contacts are connected to the external power supply, and the normally closed contacts are connected to the PLC. The programmable controller is used to receive the power-on command from the power-on button and control the industrial computer to start by outputting a start signal; and to receive the power-off command from the power-off button and control the industrial computer to shut down by outputting a power-off signal. The relay is used to control the external power supply to power the input point common terminal S / S of the programmable controller by closing the normally open contact and opening the normally closed contact, thereby disabling the power-on button; or to control the internal power supply of the programmable controller to power the input point common terminal S / S by opening the normally open contact and closing the normally closed contact, thereby disabling the power-off button. The first contactor is used to supply power to or de-energize the system equipment according to the control commands output by the programmable controller; The programmable controller includes X0 signal port, X1 signal port, X2 signal port, Y0 signal port, and Y2 signal port; wherein, the internal power supply includes 0V internal power supply and 24V internal power supply; the normally open contacts are respectively connected to the input point common terminal S / S and the X0 signal port, and the normally closed contacts are respectively connected to the input point common terminal S / S and the X2 signal port. The X0 signal port is used to receive a power-on command, the X1 signal port is used to receive a power-off command, the X2 signal port is used to receive an industrial computer start signal, the Y0 signal port is used to output an industrial computer start signal to control the industrial computer to start, or output an industrial computer power-off signal to control the industrial computer to power off, and the Y2 signal port is used to control the power supply of the first contactor. The start-stop control system includes a start circuit; The start-up circuit includes the power button, the industrial computer, the first contactor, the normally open contact, the normally closed contact, the input point common terminal S / S, the X0 signal port, the Y0 signal port, and the Y2 signal port; The input point common terminal S / S is connected to the 24V internal power supply through a first normally closed contact, forming a first link; the X0 signal port is connected to the 0V internal power supply through a second normally closed contact, forming a second link; a power button contact is provided on the second link, and when the power button contact is closed, the first link and the second link form a closed loop; The Y0 signal port is connected to the industrial control computer. When a power-on command is received, the Y0 signal port is used to output an industrial control computer start signal. The industrial control computer start signal is used to control the industrial control computer to start. The normally closed contact opens and the normally open contact closes. The Y2 signal port is connected with the first contactor, the Y2 signal port is used for outputting a Y2 signal, and the Y2 signal is used for controlling the first contactor to supply power to equipment.

2. The start-stop control system of claim 1, wherein The start-stop control system further comprises a shutdown circuit; The shutdown circuit comprises the shutdown button, the industrial computer, the first contactor, a first normally open contact, a second normally open contact, the input point common end S / S, the X1 signal port, the Y0 signal port, the Y2 signal port and an external power supply; wherein the external power supply comprises a 24V external power supply and a 0V external power supply; The input point common end S / S is connected with the 24V external power supply through the first normally open contact, forming a third link; the X1 signal port is connected with the 0V external power supply, forming a fourth link; The fourth link is provided with a shutdown button contact, when the shutdown button contact is closed, the third link and the fourth link form a closed loop; When receiving a shutdown instruction, the Y0 signal port outputs an industrial computer shutdown signal, the industrial computer shutdown signal is used for controlling the industrial computer to shut down, the normally closed contact is closed, and the normally open contact is opened.

3. The start-stop control system of claim 1, wherein, The start-stop control system further comprises a second contactor, and the second contactor is connected with the external power supply; The second contactor is used for monitoring the power load condition of the start-stop control system.

4. A start-stop control method applied to the start-stop control system according to any one of claims 1 to 3, characterized by, It comprises: detecting an external input instruction; when detecting a start instruction, outputting an industrial computer start signal to the industrial computer; starting the industrial computer according to the industrial computer start signal; obtaining an X2 industrial computer start signal that the industrial computer starts to complete; when detecting the X2 industrial computer start signal, outputting a Y2 equipment power supply signal, and controlling the first contactor to supply power to equipment according to the Y2 equipment power supply signal; when detecting a shutdown instruction, outputting an industrial computer shutdown signal to the industrial computer; according to the industrial computer shutdown signal, shutting down the industrial computer; after failing to detect the X2 industrial computer start signal, stopping outputting the Y2 equipment power supply signal, and controlling the first contactor to stop supplying power to equipment.

5. The start-stop control method according to claim 4, characterized in that, It further comprises: when the industrial computer starts to complete, controlling the normally open contact to be closed and the normally closed contact to be opened through industrial computer power supply, and generating the X2 industrial computer start signal; when the industrial computer shuts down to complete, controlling the normally open contact to be opened and the normally closed contact to be closed through the industrial computer power supply, and stopping outputting the X2 industrial computer start signal.

6. A one-key start-stop control device applied to the start-stop control system of any one of claims 1-3, characterized in that, It comprises: a detection module, configured to detect an external input instruction; a first output module, configured to output an industrial computer start signal to the industrial computer when detecting a start instruction; a first control module, configured to start the industrial computer according to the industrial computer start signal; an acquisition module, configured to acquire an X2 industrial computer start signal that the industrial computer starts to complete; a second control module, configured to output a Y2 equipment power supply signal when detecting the X2 industrial computer start signal, and control the first contactor to supply power to equipment according to the Y2 equipment power supply signal; a second output module, configured to output an industrial computer shutdown signal to the industrial computer when detecting a shutdown instruction; A third control module is configured to turn off the industrial computer according to the industrial computer shutdown signal; A fourth control module is configured to stop outputting the Y2 device power supply signal and control the first contactor to stop supplying power to the device after the X2 industrial computer startup signal cannot be detected.

7. An electronic device, comprising: comprising a memory and a processor, wherein: the processor is configured to execute a PLC program stored in the memory; the processor, when executing the PLC program, implements the steps in the start-stop control method of claims 4-5.

8. A readable storage medium having a PLC program stored thereon, characterized by, the PLC program, when executed by the processor, implements the steps in the start-stop control method of claims 4-5.

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