A MEMS pneumatic control microsystem based on peristaltic electrodes

Abstract

This invention discloses a MEMS aerodynamic control microsystem based on a peristaltic electrode, relating to the field of micro-aircraft control. The system includes an actuator, a transmitter, a control surface, and a feedback mechanism. The actuator mainly comprises a peristaltic electrode, a drive arm, and a displacement shuttle structure; the transmitter includes a transmission beam, a rotating groove, and a lever structure; the control surface includes a fixed slot and a vertical wing, controlling the aircraft trajectory by adjusting the deflection angle of the vertical wing; the feedback mechanism includes a deflection beam, a diffusion resistor, and a fixed anchor point, utilizing its sensitivity to minute stress changes to measure complex aerodynamic lift. This invention uses a peristaltic electrode structure as the power generation part of the actuator, leveraging its ability to accumulate force and displacement to achieve high aerodynamic lift generation while reducing the overall system area. Feedback adjustment using a piezoresistive sensor reduces the complex aerodynamic lift measurement process and also aids in the system's self-adjustment.

Description

Technical Field

[0001] This invention relates to the field of micro-aircraft control, specifically to a MEMS aerodynamic control microsystem based on peristaltic electrodes. Background Technology

[0002] Since the concept of micro-aircraft was first proposed in the 1990s, it has attracted widespread attention from research institutions at home and abroad due to its small size and high maneuverability. Various studies have also begun to emerge. However, as the research has deepened, people have begun to consider whether the size of micro-aircraft can be further reduced to the level of microgram aircraft. One of the difficulties is that the flight control system of the aircraft also needs to be further reduced to the millimeter level.

[0003] A control system generally consists of two parts: a micro-actuator and a micro-control surface. The main purpose of the actuator is to generate the driving force required for control, while the control surface uses the driving force generated by the actuator to achieve trajectory control of the entire aircraft. In recent years, with the development of microelectromechanical systems (MEMS), the miniaturization of these two parts has gradually become possible, which has made the miniaturization of the overall control system possible. For example, the paper "The First Takeoff of a Biologically Inspired At-Scale Robotic Insect" combines the design of the control system with bionics. By leveraging the research on insect flight and the development of MEMS, a micro-flying robot weighing about 60mg was designed. Its flight control system mainly includes three aeromechanical components: an actuator, a transmission device, and a wing. By controlling the rotation trajectory of the wing during flight, the attitude of an insect in flight is simulated to achieve trajectory control of the micro-flying robot. Finally, after more than ten experiments on more than 100 samples, the average aerodynamic lift of the wing was measured to be 1.14±0.23mN, achieving vertical acceleration of the micro-flying robot. However, the paper did not provide a design scheme for the control system, and the lift it generated was relatively small, making it difficult to achieve precise control of the micro-aircraft.

[0004] Existing control schemes often employ actuators to generate driving force to control the aerodynamic lift of micro-control surfaces, thereby achieving trajectory control of micro-aircraft. However, with the miniaturization of control systems, the aerodynamic lift generated by the control system inevitably decreases sharply, leading to a decline in the control system's ability to regulate the aircraft. Furthermore, a recurring problem in the design of various schemes is how to measure the complex aerodynamic lift generated by the control system. Therefore, it is necessary to invent an aerodynamic control microsystem capable of generating large aerodynamic lift and using a relatively simple structure to measure complex aerodynamic lift, thereby further contributing to the miniaturization of micro-aircraft. Summary of the Invention

[0005] To address the problems of insufficient aerodynamic lift and difficulty in detection in the control systems of existing micro-aircraft, this invention provides a MEMS aerodynamic control microsystem based on peristaltic electrodes.

[0006] This invention is achieved through the following technical solution: a MEMS pneumatic control microsystem based on a peristaltic electrode, comprising an actuator, a transmitter, a control surface, and a feedback device. The actuator includes a left actuator and a right actuator, the transmitter includes a left transmitter and a right transmitter, and the feedback device includes a left feedback device and a right feedback device. The left actuator and the right actuator are structurally highly symmetrical, the left transmitter and the right transmitter are structurally highly symmetrical, and the left feedback device and the right feedback device are structurally highly symmetrical. The left actuator includes four peristaltic electrodes, four drive arms, and a displacement shuttle. The peristaltic electrodes are connected to the displacement shuttle via the drive arms, and the four peristaltic electrodes correspond to the four drive arms respectively. The four peristaltic electrodes include left-side peristaltic electrode 1, left-side peristaltic electrode 2, left-side peristaltic electrode 3, and left-side peristaltic electrode 4. The displacement shuttle includes a displacement beam, meshing teeth, and a fixed spring frame. The displacement beam is square columnar with meshing teeth on its left and right sides, and the fixed spring frame is fixedly connected to the bottom of the displacement beam. The drive arms include a drive beam and a drive slider. The drive beam is connected to the meshing tooth surface of the displacement beam via the drive slider, and the surface of the drive slider that contacts the displacement beam has a toothed structure that matches the meshing teeth. Left-side peristaltic electrode 3 and left-side peristaltic electrode 4 have the same structure and are located on the left side of the displacement beam, while left-side peristaltic electrode 1 and left-side peristaltic electrode 2 have the same structure and are located on the right side of the displacement beam. The peristaltic electrodes on the left and right sides of the displacement beam are symmetrical in height. Each peristaltic electrode includes a movable comb, a fixed comb, two fixed spring beams, and two limiting blocks. There are two fixed combs, which are fixedly positioned facing each other vertically, i.e., the comb teeth and the gaps are directly opposite each other. The movable comb includes a comb tooth section and a limiting section. The comb tooth section is a horizontal bar with comb teeth fixed on its upper and lower sides. The comb teeth on the upper side of the comb tooth section match and insert with the comb teeth of the upper fixed comb, and the comb teeth on the lower side of the comb tooth section match and insert with the comb teeth of the lower fixed comb. The gaps in the fixed comb meet the movement requirements of the comb teeth of the movable comb. The two fixed spring beams are vertically connected to the horizontal bar of the movable comb and are located on the upper and lower sides of the comb tooth section, respectively. The drive beam is connected to one end of the horizontal bar of the movable comb, and the limiting section is connected to the other end of the horizontal bar of the movable comb. The two limiting blocks are located between the limiting section and the comb tooth section and are located on the upper and lower sides of the lever, respectively. The left-side transmitter includes a transmission beam, a rotating groove, a lever structure, a universal joint, and an anti-detachment connection line. One end of the transmission beam is connected to the top of the displacement beam, and the other end of the transmission beam is connected to the universal joint. The universal joint is engaged in and matched with the rotating groove, and the universal joint and the outer side of the rotating groove are connected as one unit by the anti-detachment connection line. The rotating groove is located at one end of the lever structure, and the other end of the lever structure is connected to the corresponding rotating groove of the right-side transmitter. The middle of the lever structure is a fulcrum, which includes a rotating groove and a universal joint. The universal joint at the fulcrum and the outer side of the rotating groove are also connected as one unit by the anti-detachment connection line.The control surface includes two fixed slots and a vertical wing. The two fixed slots have a locking tooth structure, and the vertical wing is mounted inside the two fixed slots via the locking tooth structure. The bottom of the fixed slots is fixedly mounted to the upper part of the fulcrum of the lever structure. The left-side feedback device includes a deflection beam, fixed anchor points, and diffusion resistors. The deflection beam includes a vertically fixed intermediate connecting rod and an anchor point connecting rod. The intermediate connecting rod is horizontally positioned with one end connected to the midpoint of the anchor point connecting rod, and the other end connected to the middle of the fixed slot. The anchor point connecting rod is vertically positioned with both ends connected to the fixed anchor points. Two diffusion resistors are provided and positioned on the anchor point connecting rod, distributed on the upper and lower sides of the intermediate connecting rod.

[0007] This invention presents a MEMS pneumatic control microsystem based on peristaltic electrodes. This microsystem utilizes a peristaltic electrode structure as the actuator and a piezoresistive sensor as the feedback mechanism. It leverages the peristaltic electrode's ability to accumulate displacement and force to generate high aerodynamic lift, and utilizes the piezoresistive sensor's sensitivity to minute stress changes to measure complex aerodynamic lift. The system mainly includes actuators, transmitters, control surfaces, and feedback mechanisms. The actuators provide the power source for the entire device, the transmitters transfer power to the control surface, and the feedback mechanisms detect complex aerodynamic lift. The actuators include left and right actuators, the transmitters include left and right transmitters, and the feedback mechanisms include left and right feedback mechanisms. The left and right actuators are highly symmetrical in structure, thus having identical structures and allowing for simultaneous power supply from both sides. Similarly, the left and right transmitters are highly symmetrical, allowing for the transmission of the same power to the control surface. The left and right feedback mechanisms are also highly symmetrical, enabling the detection of aerodynamic lift from both sides.

[0008] The left actuator includes four peristaltic electrodes, four drive arms, and a displacement shuttle. The right actuator has the same structure (for simplicity, only the left actuator is described in detail, but the actual principle is the same). The peristaltic electrodes are connected to the displacement shuttle via the drive arms, with each of the four peristaltic electrodes corresponding to one of the four drive arms. The four peristaltic electrodes are left-side peristaltic electrode 1, left-side peristaltic electrode 2, left-side peristaltic electrode 3, and left-side peristaltic electrode 4. The displacement shuttle includes a displacement beam, meshing teeth, and a fixed spring frame. The displacement beam is a square column with meshing teeth on its left and right sides. The meshing teeth engage with the drive slider, and the displacement beam transmits the force after engagement to the transmitter. The fixed spring frame is fixedly connected to the bottom of the displacement beam and is responsible for pulling the displacement beam back to its original position. The drive arms include a drive beam and a drive slider. The drive beam is connected to the meshing tooth surface of the displacement beam via the drive slider. The surface of the drive slider that contacts the displacement beam has a toothed structure that matches the meshing teeth. When they mesh, the drive beam transmits the power from the peristaltic electrodes to the displacement beam. The other end of the drive beam is connected to a movable comb. The third and fourth peristaltic electrodes on the left side have the same structure and are located on the left side of the displacement beam. The first and second peristaltic electrodes on the left side have the same structure and are located on the right side of the displacement beam. Therefore, the peristaltic electrodes on the left transmit power through the meshing teeth on the left, and the peristaltic electrodes on the right transmit power through the meshing teeth on the right. The peristaltic electrodes on the left and right sides of the displacement beam are highly symmetrical, so the peristaltic electrodes on both sides are mirror images. All four peristaltic electrodes provide power together, and the principle of providing power is also the same. Each peristaltic electrode includes a movable comb, a fixed comb, two fixed spring beams, and two limiting blocks. There are two fixed combs, positioned vertically opposite each other, meaning the comb teeth and the gap are directly aligned. The movable comb includes a comb tooth section and a limiting section. The comb tooth section is a horizontal bar with comb teeth fixed on its upper and lower sides. The comb teeth on the upper side of the comb tooth section match and insert with the comb teeth of the upper fixed comb, and the comb teeth on the lower side of the comb tooth section match and insert with the comb teeth of the lower fixed comb. The gap within the fixed comb allows for the movement of the comb teeth of the movable comb, and the movement is driven by an external voltage applied to the fixed comb. The movable comb moves; two fixed spring beams are vertically connected to the crossbar of the movable comb and are located on the upper and lower sides of the comb teeth, respectively. The fixed spring beams are responsible for bringing the movable comb back to its original position. A drive beam is connected to one end of the crossbar of the movable comb and is responsible for changing the direction of the force displaced by the movable comb. The drive slider is connected to the drive beam and is responsible for transmitting the force after the change of direction to the displacement shuttle structure, ensuring the structural strength and stability when the two structures are engaged, and ensuring that the force and displacement generated by the peristaltic electrode can be transmitted to the displacement shuttle more efficiently. A limiting part is connected to the other end of the crossbar of the movable comb, and two limiting blocks are located between the limiting part and the comb teeth, respectively on the upper and lower sides of the lever, to limit the displacement of the movable comb.

[0009] The left-side transmitter includes a transmission beam, a rotating groove, a lever structure, a universal joint, and an anti-detachment connection. The right-side transmitter is a mirror image of the left-side transmitter, so their structures are identical; only the left-side transmitter will be described. The transmission beam is connected to the displacement shuttle structure, meaning one end of the transmission beam connects to the top of the displacement beam, responsible for transmitting the force and displacement generated by the actuator. The other end of the transmission beam connects to the universal joint, which is locked within and matched to the rotating groove. The universal joint and the outer side of the rotating groove are connected as a single unit by the anti-detachment connection, a safety structure that prevents the universal joint from separating from the rotating groove during rotation. The rotating groove and universal joint are located at one end of the lever structure, between the transmission beam and the lever structure, responsible for converting the force from the transmission beam in direction and transmitting it to the lever structure. The lever structure then amplifies the transmitted force and transmits it to the control surface, i.e., to the fixed slot. The other end of the lever structure connects to the rotating slot corresponding to the right-side transmitter. The middle of the lever structure is the fulcrum, which includes a rotating slot and a universal joint. The universal joint at the fulcrum and the outer side of the rotating slot are also connected as one unit by an anti-detachment line. The control surface includes two fixed slots and a vertical wing. The two fixed slots are equipped with a locking tooth structure. The vertical wing is installed inside the two fixed slots through the locking tooth structure. The bottom of the fixed slots is fixedly installed on the upper part of the fulcrum of the lever structure. The fixed slots are used to fix the vertical wing and drive the vertical wing to produce corresponding movements according to the force transmitted by the transmitter. The vertical wing is responsible for changing the angle accordingly to control the overall torque of the aircraft and regulate the trajectory of the aircraft.

[0010] The left feedback unit includes a deflection beam, fixed anchor points, and diffusion resistors. The deflection beam comprises a vertically fixed intermediate connecting rod and an anchor point connecting rod. The intermediate connecting rod is horizontally positioned with one end connected to the midpoint of the anchor point connecting rod, and the other end connected to the center of the fixed slot, used to transmit changes in the vertical wing height to the diffusion resistors. The anchor point connecting rod is vertically positioned with both ends connected to fixed anchor points, which are used to fix the left feedback unit structure. Two diffusion resistors are provided and located on the anchor point connecting rod, distributed on the upper and lower sides of the intermediate connecting rod. The diffusion resistors generate corresponding resistance changes based on stress changes on the deflection beam, which are detected by a Wheatstone bridge. The right feedback unit has the same structure and operates on the same principle.

[0011] The specific control method of the MEMS pneumatic control microsystem based on peristaltic electrodes designed in this invention is as follows:

[0012] (1) When it is necessary to increase the pitch and yaw moments, the right actuator stops voltage drive, and the fixed tooth comb of the left actuator drives the movable tooth comb to move under the action of the drive voltage, thereby generating force and displacement, which is transmitted to the transmitter through the drive arm and displacement shuttle structure on the left. Through the transmitter, the magnitude and direction of the force are changed, and the deflection angle of the vertical wing is increased through the fixed slot, so that the aerodynamic lift of the vertical wing increases, thereby applying a gradually increasing moment to the entire aircraft, driving the pitch and yaw moments to gradually increase. At the same time, the feedback device detects the angle change of the vertical wing and feeds back the change to the drive voltage to realize the autonomous control of the system.

[0013] (2) When it is necessary to reduce the pitch and yaw moments, the left actuator stops voltage drive and the right actuator and transmitter start working. The working mode is as shown in Mode 1, which gradually reduces the deflection angle of the vertical wing, thereby applying a gradually decreasing torque to the whole, driving the pitch and yaw moments to gradually decrease. The change is detected by the feedback device and fed back to the drive voltage to realize the autonomous control of the system.

[0014] Preferably, the drive beam is in an inclined state, and the connection point between the drive slider and the displacement beam is higher than the connection point between the drive beam and the movable comb crossbar. The inclined state of the drive beam is used to decompose the force and displacement generated by the movable comb and drive the displacement shuttle to move.

[0015] The MEMS pneumatic control microsystem based on peristaltic electrodes provided by this invention has the following advantages compared with the prior art:

[0016] 1. By utilizing the characteristic of peristaltic electrodes to accumulate displacement and force, peristaltic electrodes are used as actuator structures, enabling the movable comb to accumulate large aerodynamic lift within a very small range of motion, reducing the overall area of ​​the structure while providing large aerodynamic lift.

[0017] 2. By using a small displacement of one step size of the peristaltic electrode to adjust the vertical wing, precise control of the vertical wing angle within a small range can be achieved. At the same time, a large displacement accumulated by multiple steps of the peristaltic electrode can be used to adjust the vertical wing, increasing the range of vertical wing angle control.

[0018] 3. Using a piezoresistive sensor as a feedback device solves the tedious measurement of complex aerodynamic lift, enabling faster and more efficient measurement of the aerodynamic lift of a vertical airfoil. Simultaneously, it can also serve as part of the feedback adjustment, achieving self-adjustment of the control system. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall invention.

[0020] Figure 2 This is a schematic diagram of the peristaltic electrode.

[0021] Figure 3 This is a schematic diagram of the overall drive arm.

[0022] Figure 4 This is a schematic diagram of the overall displacement shuttle.

[0023] Figure 5 This is a detailed structural diagram of the displacement shuttle.

[0024] Figure 6 This is a schematic diagram of the overall transmitter.

[0025] Figure 7 This is a schematic diagram of the overall control surface.

[0026] Figure 8 This is a schematic diagram of the overall feedback device.

[0027] Figure 9 This is a partial detailed structural diagram of the feedback device.

[0028] The diagram is labeled as follows: 1-Left actuator, 2-Left transmitter, 3-Control surface, 4-Left feedback device, 5-Right actuator, 6-Right transmitter, 7-Right feedback device, 8-Left peristaltic electrode 1, 9-Left peristaltic electrode 2, 10-Left peristaltic electrode 3, 11-Left peristaltic electrode 4, 12-Right peristaltic electrode 1, 13-Right peristaltic electrode 2, 14-Right peristaltic electrode 3, 15-Right peristaltic electrode 4, 101-Live Moving toothed comb, 102-Fixed toothed comb, 103-Fixed spring beam, 104-Limiting block, 105-Drive beam, 106-Drive slider, 107-Displacement beam, 108-Fixed spring frame, 109-Meshing teeth, 201-Transmission beam, 202-Rotating groove, 203-Lever structure, 204-Universal joint, 205-Anti-detachment connection, 301-Fixed slot, 302-Vertical wing, 401-Deflection beam, 402-Fixed anchor point, 403-Diffusion resistor. Detailed Implementation

[0029] The present invention will be further described below with reference to specific embodiments.

[0030] A MEMS pneumatic control microsystem based on peristaltic electrodes, such as Figure 1As shown: The system includes actuators, transmitters, control surface 3, and feedback devices. The actuators include a left actuator 1 and a right actuator 5. The transmitters include a left transmitter 2 and a right transmitter 6. The feedback devices include a left feedback device 4 and a right feedback device 7. The left actuator 1 and right actuator 5 are structurally symmetrical, as are the left transmitter 2 and right transmitter 6, and the left feedback device 4 and right feedback device 7. The left actuator 1 includes four peristaltic electrodes, four drive arms, and a displacement shuttle. The peristaltic electrodes are connected to the displacement shuttle via the drive arms, and the four peristaltic electrodes correspond to the four drive arms. The four peristaltic electrodes include a left peristaltic electrode 1 (8), a left peristaltic electrode 2 (9), a left peristaltic electrode 3 (10), and a left peristaltic electrode 4 (11). The displacement shuttle is as follows... Figure 4 As shown, the device includes a displacement beam 107, meshing teeth 109, and a fixed spring frame 108. The displacement beam 107 is a square column with meshing teeth 109 on its left and right sides. The fixed spring frame 108 is fixedly connected to the bottom of the displacement beam 107. The drive arm includes a drive beam 105 and a drive slider 106, as shown. Figure 3 As shown, the drive beam 105 is connected to the meshing tooth surface of the displacement beam 107 via the drive slider 106. The surface of the drive slider 106 that contacts the displacement beam 107 is provided with a tooth-like structure that matches the meshing teeth 109, such as... Figure 5 As shown; the left-side peristaltic electrode 3 10 and the left-side peristaltic electrode 4 11 have the same structure and are located on the left side of the displacement beam 107; the left-side peristaltic electrode 1 8 and the left-side peristaltic electrode 2 9 have the same structure and are located on the right side of the displacement beam 107; the peristaltic electrodes on the left side and the right side of the displacement beam 107 are highly symmetrical; each peristaltic electrode is as follows... Figure 2 As shown, each component includes a movable comb 101, a fixed comb 102, two fixed spring beams 103, and two limiting blocks 104. Two fixed combs 102 are provided, positioned vertically opposite each other, meaning the comb teeth and gaps are directly opposite each other. The movable comb 101 includes a comb tooth section and a limiting section. The comb tooth section consists of a horizontal bar with comb teeth fixed on its upper and lower sides. The comb teeth on the upper side of the comb tooth section match and insert into the comb teeth of the upper fixed comb 102, while the comb teeth on the lower side match the lower fixed comb. The teeth of the fixed comb 102 are matched and inserted, and the gap in the fixed comb 102 meets the movement requirements of the teeth of the movable comb 101; two fixed spring beams 103 are vertically connected to the crossbar of the movable comb 101 and are located on the upper and lower sides of the two ends of the comb teeth; the drive beam 105 is connected to one end of the crossbar of the movable comb 101, the limiting part is connected to the other end of the crossbar of the movable comb 101, and two limiting blocks 104 are located between the limiting part and the comb teeth and are located on the upper and lower sides of the lever respectively;

[0031] The left transmitter 2, as Figure 6As shown, the structure includes a transmission beam 201, a rotating groove 202, a lever structure 203, a universal joint 204, and an anti-detachment connecting line 205. One end of the transmission beam 201 is connected to the top of the displacement beam 107, and the other end of the transmission beam 201 is connected to the universal joint 204. The universal joint 204 is inserted into the rotating groove 202 and is used in conjunction with the rotating groove 202. Moreover, the universal joint 204 and the outer side of the rotating groove 202 are connected as one unit through the anti-detachment connecting line 205. The rotating groove 202 is located at one end of the lever structure 203, and the other end of the lever structure 203 is connected to the rotating groove 202 corresponding to the right-side transmitter 6. The middle of the lever structure 203 is a fulcrum, which includes a rotating groove 202 and a universal joint 204. The universal joint 204 at the fulcrum and the outer side of the rotating groove 202 are also connected as one unit through the anti-detachment connecting line 205.

[0032] The control surface 3 is as follows Figure 7 As shown, it includes two fixed slots 301 and a vertical wing 302. The two fixed slots 301 are equipped with a locking tooth structure. The vertical wing 302 is mounted inside the two fixed slots 301 via the locking tooth structure. The bottom of the fixed slots 301 is fixedly mounted to the upper part of the fulcrum of the lever structure 203. The left feedback device 4 is as follows... Figure 8 and Figure 9 As shown, the device includes a deflection beam 401, a fixed anchor point 402, and a diffusion resistor 403. The deflection beam 401 includes a vertically fixed intermediate connecting rod and an anchor point connecting rod. The intermediate connecting rod is horizontally arranged and one end is connected to the midpoint of the anchor point connecting rod. The other end of the intermediate connecting rod is connected to the middle of the fixed slot 301. The anchor point connecting rod is vertically arranged and both ends are connected to the fixed anchor point 402. Two diffusion resistors 403 are provided and arranged on the anchor point connecting rod. The diffusion resistors 403 are distributed on the upper and lower sides of the intermediate connecting rod.

[0033] This embodiment adopts the following preferred scheme: the drive beam 105 is in an inclined state, and the connection point between the drive slider 106 and the displacement beam 107 is higher than the connection point between the drive beam 105 and the crossbar of the movable comb 101; the diffusion resistor 403 is a piezoresistive sensor made of semiconductor material, which utilizes the piezoresistive effect; the feedback device detects the angular deflection of the vertical wing 302 through the piezoresistive sensor and uses a bridge to output the result, and the bridge used is an external Wheatstone bridge; the fixed comb 102 is provided with a voltage to drive the movable comb 101.

[0034] The specific operation of this embodiment is as follows:

[0035] The left and right actuators mainly work by accumulating step lengths. One step length is defined as the actuator structure completing one cycle under the drive voltage. The main working mode of one step length is as follows, taking the left actuator as an example: (1) Apply a drive voltage to the fixed tooth comb 102 of the left peristaltic electrode 8 and the left peristaltic electrode 11. Under the drive of the voltage, the two movable tooth combs 101 drive the drive slider 106 to start moving towards the meshing tooth 109 and mesh with the meshing tooth 109, pushing the displacement beam 107 to move. At the same time, due to the presence of the limit block 104, the displacement of the movable tooth comb 101 is restricted. This not only protects the drive slider 106, but also makes the displacement of the movable tooth comb 101 equal each time. This is beneficial to the control of the deflection angle of the vertical wing 302. (2) A driving voltage is applied to the fixed toothed combs of the left-side peristaltic electrode 9 (2) and the left-side peristaltic electrode 10 (3). Under the driving voltage, the two peristaltic electrodes begin to repeat the movement in step (1) and continue to push the displacement beam 107 to move. (3) The driving voltage on the fixed toothed combs of the left-side peristaltic electrode 8 (1) and the left-side peristaltic electrode 11 (4) begins to disappear. Under the action of the fixed spring beam 103, the two begin to gradually return to their original positions. However, since the left-side peristaltic electrode 9 (2) and the left-side peristaltic electrode 10 (3) are still engaged with the displacement shuttle, the displacement generated in the first two steps will accumulate. (4) A driving voltage is applied to the fixed toothed combs of the left-side peristaltic electrode 8 (1) and the left-side peristaltic electrode 11 (4). Under the driving voltage, the two peristaltic electrodes begin to repeat the movement in step (1) and continue to push the displacement beam 107 to move. (5) The driving voltage on the fixed comb of the left-side peristaltic electrode 9 (2) and the left-side peristaltic electrode 10 (3) begins to disappear, and under the action of the fixed spring beam 103, they gradually return to their original positions. However, since the left-side peristaltic electrode 8 (1) and the left-side peristaltic electrode 11 (4) are still engaged with the displacement shuttle, the displacement generated in the previous steps will accumulate. Each of the above four working steps is one step. The actuator accumulates the displacement and force generated each time through repeated cycles of multiple steps, providing power for the deflection of the vertical wing 302.

[0036] The working process of the left and right side transmitters is as follows: the transmission beam 201 receives the force and displacement transmitted from the displacement beam 107 and transmits them to the rotating groove 202 and the universal joint 204. The rotating groove 202 and the universal joint 204 convert the force in direction, converting the vertical force generated by the actuator into a rotational force along the rotating groove for the rotation of the vertical wing 302. Then, the lever structure 203 amplifies the force and transmits it to the fixed slot 301.

[0037] The operation of all control surfaces 3 is as follows: the fixed slot 301 receives the force and displacement transmitted from the transmitter and transmits them to the vertical wing 302. Simultaneously, the fixed slot 301 has a small locking tooth structure that secures the vertical wing 302 to the slot, preventing relative displacement of the wing and thus avoiding errors. Upon receiving the information from the slot, the vertical wing 302 deflects accordingly. This deflection applies a torque to the entire aircraft, affecting the pitch, yaw, and roll attitude angles. Therefore, changing the deflection angle of the vertical wing 302 allows for attitude adjustment of the aircraft.

[0038] The working process of the left and right feedback devices is as follows: the deflection of the vertical wing 302 is transmitted to the deflection beam 401 by the fixed slot 301. The diffusion resistor 403, which is made of semiconductor material with piezoresistive effect, can sensitively sense the deflection and thus change its resistance. At this time, the change in resistance of the diffusion resistor 403 can be accurately measured by the external Wheatstone bridge, so as to deduce the deflection of the vertical wing 302. The change in aerodynamic lift on the wing can be measured simply and quickly.

[0039] The control method of a MEMS pneumatic control microsystem based on a peristaltic electrode in this embodiment is as follows:

[0040] (1) When it is necessary to increase the pitch and yaw moments, the right actuator 5 stops working, and the four creeping electrodes on the left actuator 1 start to work alternately under the drive voltage. With each step, the force and displacement required to deflect the vertical wing 302 gradually accumulate. The transmitter 2 changes its direction and amplifies its value before transmitting it to the control surface 3, which increases the deflection angle of the vertical wing 302. This increases the moment exerted by the wing on the entire aircraft, thereby increasing the pitch and yaw moments. When the deflection angle of the vertical wing 302 increases, it will cause the deflection beam 401 to deflect. The diffusion resistor 403 will change its piezoresistive resistance according to the strain of the beam. When its resistance changes, it will be detected by the Wheatstone bridge. The deflection of the vertical wing 302 can be detected by observing the output of the Wheatstone bridge, and this information is fed back to the drive voltage, thereby realizing the autonomous adjustment of the system.

[0041] (2) When it is necessary to reduce the pitch and yaw moments, the left actuator 1 stops working, and the four creeping electrodes on the right actuator 5 begin to work alternately under the drive voltage. The generated force and displacement are transmitted to the control surface 3 by the right transmitter 6, which drives the vertical wing 302 to deflect, reducing its deflection angle. This reduces the moment exerted by the wing on the entire aircraft, thereby reducing the pitch and yaw moments. At the same time, the right feedback device 7 detects the change in wing deflection and feeds it back to the drive voltage, realizing the autonomous adjustment of the system.

[0042] The scope of protection claimed by this invention is not limited to the specific embodiments described above. Moreover, for those skilled in the art, this invention can have various modifications and alterations. Any modifications, improvements, and equivalent substitutions made within the concept and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A MEMS pneumatic control microsystem based on peristaltic electrodes, characterized in that: It includes actuators, transmitters, control surfaces (3) and feedback devices. The actuators include a left actuator (1) and a right actuator (5). The transmitters include a left transmitter (2) and a right transmitter (6). The feedback devices include a left feedback device (4) and a right feedback device (7). The left actuator (1) and the right actuator (5) are structurally highly symmetrical. The left transmitter (2) and the right transmitter (6) are structurally highly symmetrical. The left feedback device (4) and the right feedback device (7) are structurally highly symmetrical. The left actuator (1) includes four peristaltic electrodes, four drive arms, and a displacement shuttle. The peristaltic electrodes are connected to the displacement shuttle via the drive arms, and the four peristaltic electrodes correspond to the four drive arms respectively. The four peristaltic electrodes include left peristaltic electrode 1 (8), left peristaltic electrode 2 (9), left peristaltic electrode 3 (10), and left peristaltic electrode 4 (11). The displacement shuttle includes a displacement beam (107), meshing teeth (109), and a fixed spring frame (108). The displacement beam (107) is a square column with meshing teeth (109) on its left and right sides. The fixed spring frame (108) Fixedly connected to the bottom of the displacement beam (107); the drive arm includes a drive beam (105) and a drive slider (106), the drive beam (105) is connected to the meshing tooth surface of the displacement beam (107) through the drive slider (106), and the surface of the drive slider (106) in contact with the displacement beam (107) is provided with a tooth-like structure that matches the meshing teeth (109); the left-side No. 3 peristaltic electrode (10) and the left-side No. 4 peristaltic electrode (11) have the same structure and are located on the left side of the displacement beam (107), the left-side No. 1 peristaltic electrode (8) and the left-side No. 2 peristaltic electrode (9) have the same structure and are located on the left side of the displacement beam (107). Located on the right side of the displacement beam (107), the peristaltic electrode on the left side of the displacement beam (107) is symmetrical to the peristaltic electrode on the right side; each peristaltic electrode includes a movable comb (101), a fixed comb (102), two fixed spring beams (103) and two limiting blocks (104). There are two fixed combs (102), which are fixedly positioned facing each other, that is, the comb teeth and the gap are respectively aligned; the movable comb (101) includes a comb tooth part and a limiting part. The comb tooth part is a horizontal bar with comb teeth fixed on the upper and lower sides, and the comb teeth on the upper side of the comb tooth part match the comb teeth of the upper fixed comb (102). The teeth on the lower side of the comb section are matched and inserted with the teeth of the fixed comb (102) below. The gap in the fixed comb (102) meets the movement requirements of the comb teeth of the movable comb (101). Two fixed spring beams (103) are vertically connected to the crossbar of the movable comb (101) and are located on the upper and lower sides of the comb section at both ends respectively. The drive beam (105) is connected to one end of the crossbar of the movable comb (101), and the limiting part is connected to the other end of the crossbar of the movable comb (101). Two limiting blocks (104) are located between the limiting part and the comb section and are located on the upper and lower sides of the lever respectively. The left-side transmitter (2) includes a transmission beam (201), a rotating groove (202), a lever structure (203), a universal joint (204), and an anti-detachment connecting line (205). One end of the transmission beam (201) is connected to the top of the displacement beam (107), and the other end of the transmission beam (201) is connected to the universal joint (204). The universal joint (204) is engaged in the rotating groove (202) and is used in conjunction with the rotating groove (202). Moreover, the universal joint (204) and the rotating groove (205) are connected in a certain way. 2) The outer side is connected as one unit by the anti-detachment connecting line (205). The rotating groove (202) is located at one end of the lever structure (203). The other end of the lever structure (203) is connected to the rotating groove (202) corresponding to the right transmitter (6). The middle of the lever structure (203) is the fulcrum. The fulcrum includes a rotating groove (202) and a universal joint (204). The universal joint (204) at the fulcrum and the outer side of the rotating groove (202) are also connected as one unit by the anti-detachment connecting line (205). The control surface (3) includes two fixed slots (301) and a vertical wing (302). The two fixed slots (301) are provided with a tooth structure. The vertical wing (302) is installed inside the two fixed slots (301) through the tooth structure. The bottom of the fixed slots (301) is fixedly installed on the upper part of the fulcrum of the lever structure (203). The left feedback device (4) includes a deflection beam (401), a fixed anchor point (402), and a diffusion resistor (403). The deflection beam (401) includes a vertically fixed intermediate connecting rod and an anchor point connecting rod. The intermediate connecting rod is horizontally set and one end is connected to the midpoint of the anchor point connecting rod. The other end of the intermediate connecting rod is connected to the middle of the fixed slot (301). The anchor point connecting rod is vertically set and both ends are connected to the fixed anchor point (402). There are two diffusion resistors (403) and they are set on the anchor point connecting rod. The diffusion resistors (403) are distributed on the upper and lower sides of the intermediate connecting rod.

2. The MEMS pneumatic control microsystem based on a peristaltic electrode according to claim 1, characterized in that: The drive beam (105) is in an inclined state, and the connection point between the drive slider (106) and the displacement beam (107) is higher than the connection point between the drive beam (105) and the crossbar of the movable comb (101).

3. The MEMS pneumatic control microsystem based on a peristaltic electrode according to claim 1, characterized in that: The diffusion resistor (403) is a piezoresistive sensor made of semiconductor material, which utilizes the piezoresistive effect; the feedback unit detects the angular deflection of the vertical wing (302) through the piezoresistive sensor and outputs the result using a bridge circuit.

4. A MEMS pneumatic control microsystem based on a peristaltic electrode according to claim 3, characterized in that: The bridge is an external Wheatstone bridge.

5. A MEMS pneumatic control microsystem based on a peristaltic electrode according to claim 1, characterized in that: The fixed comb (102) is provided with a voltage to drive the movable comb (101) to move.

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