Titanium alloy surface ion plating high-entropy alloy wear-resistant coating and preparation method thereof

Abstract

The application discloses a preparation method of a titanium alloy surface ion-plated high-entropy alloy wear-resistant coating, and comprises the following steps: S1, calculating the component of a BCC type and a FCC type high-entropy alloy wear-resistant coating; S2, smelting and preparing a BCC type and a FCC type high-entropy alloy target material; S3, installing the target material; S4, installing and cleaning a titanium alloy base body; S5, depositing and preparing a CrN undercoat layer; S6, depositing and preparing a FCC type high-entropy alloy coating; and S7, depositing and preparing a BCC type high-entropy alloy coating. According to the high-entropy alloy theory, the coating structure is designed, the target material is prepared, the high-entropy alloy wear-resistant coating with FCC / BCC characteristics is prepared on the titanium alloy surface through deposition in batches, the hardness difference between the base body and the wear-resistant coating is reduced by using the small hardness characteristic of the FCC type high-entropy alloy coating, the adhesion between the base body and the wear-resistant coating is improved, the hardness and wear resistance of the titanium alloy surface are remarkably improved, and the process is simple, the cost is low, and the deposition rate is fast.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of ion plating preparation, and particularly relates to a titanium alloy surface ion-plated high-entropy alloy wear-resistant coating and a preparation method thereof. BACKGROUND

[0002] High-entropy alloy is a new type of alloy material obtained by introducing "chemical disorder" through multi-principal element mixing in recent years, which has triggered a research boom in the field of materials. High-entropy alloy is a new alloy system formed by five or more than five elements (usually metals) as main components. High-entropy alloy has excellent performance, such as high strength / hardness, high toughness, high wear resistance, high corrosion resistance and high temperature oxidation resistance.

[0003] At present, the preparation and research of high-entropy alloy mainly focuses on bulk structure materials. On the one hand, the industrial use cost of high-entropy alloy material is relatively high due to the large number of components. On the other hand, the processing and forming of high-entropy alloy material are difficult due to its high hardness and strength. Therefore, the application of high-entropy alloy is greatly limited, especially for some complex structural parts. Therefore, the preparation of high-entropy alloy into a coating will be another important application of high-entropy alloy material, which can not only save material cost, but also maintain the original high strength, high hardness and high wear resistance of high-entropy alloy material.

[0004] At present, there are three technologies commonly used to produce high-entropy alloy coating: magnetron sputtering, cold / hot spraying and laser cladding. Among them, magnetron sputtering is mainly used for small thickness coating structure (<30 μm). Although this method is suitable for producing uniform and dense high-entropy alloy coating, the low deposition rate and insufficient bonding force make this method unable to meet the industrial application of high-entropy alloy coating. SUMMARY

[0005] The technical problem to be solved by the present application is to provide a preparation method of titanium alloy surface ion-plated high-entropy alloy wear-resistant coating to solve the problems of the prior art. The method first designs the coating structure according to the high-entropy alloy theory and prepares BCC type and FCC type high-entropy alloy target materials respectively, and then sequentially deposits on the titanium alloy surface to prepare high-entropy alloy wear-resistant coating with FCC / BCC characteristics. The hardness of the FCC type high-entropy alloy coating is smaller, which reduces the hardness gradient difference between the titanium alloy substrate and the BCC type high-entropy alloy coating, improves the bonding force between the high-entropy alloy wear-resistant coating and the titanium alloy substrate, reduces the friction coefficient of the titanium alloy, and significantly improves the hardness and wear resistance of the titanium alloy surface.

[0006] To solve the above technical problems, the technical scheme adopted by the present application is as follows: a preparation method of titanium alloy surface ion-plated high-entropy alloy wear-resistant coating, characterized in that the method comprises the following steps:

[0007] Step one, selecting Al, Ti, Cr, Ni, Co, B, Fe elements as the composition of high-entropy alloy wear-resistant coating, calculating and predicting the phase formation mechanism of high-entropy alloy wear-resistant coating by using the thermodynamic parameters of mixing entropy, mixing enthalpy, atomic radius difference and valence electron concentration, the calculation formula is shown as (1)~(4), according to the calculation formula, the corresponding parameters under the equimolar ratio of elements are calculated, and by adjusting the mole content percentage of different elements, the valence electron concentration of high-entropy alloy wear-resistant coating falls into different intervals, and the composition scheme of high-entropy alloy wear-resistant coating with BCC type solid solution and FCC type solid solution is designed respectively;

[0008] (1)

[0009] (2)

[0010] , and (3)

[0011] (4)

[0012] In formula (1)~(4), R is the ideal gas constant, the value is 8.314 J·mol -1 K -1 , is the mixing enthalpy between any two elements in the composition of high-entropy alloy wear-resistant coating, such as element A and element B, is the mole content percentage of a certain element, such as element A, is the mole content percentage of another element, such as element B, is the atomic radius of a certain element, is the average atomic radius of n elements, is the valence electron concentration of a certain element, represents the change amount of enthalpy when elements combine or coexist, represents the change amount of entropy when elements combine or coexist, represents the atomic radius difference, represents the valence electron concentration of high-entropy alloy wear-resistant coating;

[0013] Step two, according to the composition scheme of high-entropy alloy wear-resistant coating with BCC type solid solution and FCC type solid solution designed in step one, selecting Al, Ti, Cr, Ni, Co, B, Fe elemental powders for smelting, respectively obtaining BCC type high-entropy alloy and FCC type high-entropy alloy, and then processing into BCC type high-entropy alloy target and FCC type high-entropy alloy target respectively;

[0014] Step three, after the BCC type high-entropy alloy target and the FCC type high-entropy alloy target obtained in step two are decontaminated and degreased, they are dried and then installed on the target holder in the ion plating equipment, and a Cr target is installed at the same time;

[0015] Step four, after the titanium alloy substrate is polished, decontaminated, degreased and dried in sequence, it is hung in the furnace cavity of the ion plating equipment, the furnace cavity is vacuumized, and then glow cleaning and sputter cleaning are performed in sequence;

[0016] Step five, the power supply of the Cr target is turned on, nitrogen and argon are introduced, and CrN underlayer is prepared by arc ion plating on the titanium alloy substrate subjected to sputter cleaning in step four, and the power supply of the Cr target is turned off after deposition is completed;

[0017] Step six, the power supply of the FCC type high-entropy alloy target is turned on, argon is continuously introduced, and FCC type high-entropy alloy coating is prepared by arc ion plating on the CrN underlayer prepared in step five, and the power supply of the FCC type high-entropy alloy target is turned off after deposition is completed;

[0018] Step seven, the power supply of the BCC type high-entropy alloy target is turned on, argon is continuously introduced, and BCC type high-entropy alloy coating is prepared by arc ion plating on the FCC type high-entropy alloy coating prepared in step six, and the power supply of the BCC type high-entropy alloy target is turned off after deposition is completed, thereby obtaining high-entropy alloy wear-resistant coating on the surface of the titanium alloy substrate.

[0019] The preparation method of the high-entropy alloy wear-resistant coating on the surface of the titanium alloy substrate by ion plating, wherein in step one, when <6.87, the high-entropy alloy wear-resistant coating is a BCC type solid solution, when 6.87≤x<8, the high-entropy alloy wear-resistant coating is a BCC+FCC type two-phase solid solution, and when x≥8, the high-entropy alloy wear-resistant coating is an FCC type solid solution.

[0020] The preparation method of the high-entropy alloy wear-resistant coating on the surface of the titanium alloy substrate by ion plating, wherein in step two, the mass purity of the Al, Ti, Cr, Ni, Co, B and Fe elemental powders is greater than 99.9%, and the particle size is less than 50 μm; the atomic percentage content of Al, Ti, Cr, Ni, Co, B and Fe in the BCC type high-entropy alloy target and the FCC type high-entropy alloy target is 5% to 35%.

[0021] The preparation method of the high-entropy alloy wear-resistant coating on the surface of the titanium alloy substrate by ion plating, wherein in step three, the mass purity of the Cr target is greater than 99.9%.

[0022] The preparation method of the titanium alloy surface ion-plated high-entropy alloy wear-resistant coating has the characteristics that, in the step four, the furnace cavity is vacuumized to 3*10 -3 Pa, the deposition temperature is adjusted to 300 DEG C, the duty cycle is 80%, the substrate bias is -1000V, the time of the glow cleaning is 20 min, the time of the sputter cleaning is 10 min, and the arc current of the sputter cleaning is 50 A.

[0023] The preparation method of the titanium alloy surface ion-plated high-entropy alloy wear-resistant coating has the characteristics that, in the step five, the substrate bias for depositing and preparing the CrN base layer is -200V, the duty cycle is 80%, the arc current of the Cr target material is 60 A, the deposition temperature is 300 DEG C, the deposition vacuum degree is 0.3 Pa, the nitrogen flow is 80 sccm, the argon flow is 10 sccm-50 sccm, and the deposition time is 10 min.

[0024] The preparation method of the titanium alloy surface ion-plated high-entropy alloy wear-resistant coating has the characteristics that, in the step six, the substrate bias for depositing and preparing the FCC type high-entropy alloy coating is -100V--200V, the duty cycle is 80%, the argon is introduced to the working gas pressure of 0.3 Pa-0.6 Pa, the arc current of the FCC type high-entropy alloy target material is 50 A-70 A, the deposition temperature is 300 DEG C, and the deposition time is 30 min-60 min.

[0025] The preparation method of the titanium alloy surface ion-plated high-entropy alloy wear-resistant coating has the characteristics that, in the step seven, the arc current of the BCC type high-entropy alloy target material for depositing and preparing the BCC type high-entropy alloy coating is 50 A-70 A, and the deposition time is 30 min-60 min.

[0026] In addition, the application further discloses a titanium alloy surface ion-plated high-entropy alloy wear-resistant coating prepared by the preparation method.

[0027] Compared with the prior art, the application has the following advantages:

[0028] 1. This invention first designs the coating structure based on the high-entropy alloy theory and prepares BCC-type and FCC-type high-entropy alloy targets respectively. Then, CrN is deposited on the titanium alloy substrate using arc ion plating as the underlayer, followed by the sequential deposition of FCC (face-centered cubic) and BCC (body-centered cubic) high-entropy alloy coatings. This achieves the preparation of a high-entropy alloy wear-resistant coating with FCC / BCC characteristics on the titanium alloy surface. Since the hardness of the FCC-type high-entropy alloy coating is lower than that of the BCC-type high-entropy alloy coating, the hardness gradient difference between the titanium alloy substrate and the BCC-type high-entropy alloy coating is effectively reduced. This results in a gradual increase in hardness from the titanium alloy substrate to the surface of the high-entropy alloy wear-resistant coating, improving the bonding force between the high-entropy alloy wear-resistant coating and the titanium alloy substrate, reducing the friction coefficient of the titanium alloy, significantly improving the surface hardness and wear resistance of the titanium alloy, and thus improving the friction life of the titanium alloy workpiece.

[0029] 2. This invention employs arc ion plating to first deposit an FCC-type high-entropy alloy coating, followed by a BCC-type high-entropy alloy coating. The coatings have the same constituent elements, avoiding the introduction of impurities that could damage the structure and performance of the high-entropy alloy wear-resistant coating. Furthermore, the dual deposition process effectively improves the deposition rate, thereby obtaining a uniform and dense high-entropy alloy wear-resistant coating.

[0030] 3. The preparation process of the present invention is simple, low in cost, and fast in deposition rate, and can prepare a high-entropy alloy wear-resistant coating with good adhesion, high hardness and excellent wear resistance.

[0031] 4. The microhardness of the high-entropy alloy wear-resistant coating ion-plated on the titanium alloy surface prepared by the present invention is more than 3 times higher than that of the titanium alloy substrate surface, and the friction coefficient is reduced to less than 50% of that of the titanium alloy substrate surface.

[0032] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0033] Figure 1 The image shows the microhardness of the high-entropy alloy wear-resistant coating prepared in Example 1 of this invention and the TC6 titanium alloy substrate.

[0034] Figure 2 The friction coefficient diagram is shown between the high-entropy alloy wear-resistant coating prepared in Example 1 of the present invention and the TC6 titanium alloy substrate.

[0035] Figure 3 The image shows the microhardness of the high-entropy alloy wear-resistant coating and the TC6 titanium alloy substrate prepared in Example 2 of this invention.

[0036] Figure 4 The friction coefficient diagram is shown between the high-entropy alloy wear-resistant coating prepared in Example 2 of the present invention and the TC6 titanium alloy substrate. Detailed Implementation

[0037] Embodiment 1

[0038] The embodiment comprises the following steps:

[0039] Step one, select Al, Ti, Cr, Ni, Co, B, Fe elements as the composition of high-entropy alloy wear-resistant coating, calculate and predict the phase formation mechanism of high-entropy alloy wear-resistant coating by using mixing entropy, mixing enthalpy, atomic radius difference, valence electron concentration thermodynamic parameters, the calculation formula is shown as (1)~(4), according to the calculation formula, the corresponding parameters under the equimolar ratio of elements are calculated, and by adjusting the mole content percentage of different elements, the valence electron concentration of high-entropy alloy wear-resistant coating falls into different intervals, and the composition scheme of high-entropy alloy wear-resistant coating with BCC type solid solution and FCC type solid solution is designed respectively;

[0040] (1)

[0041] (2)

[0042] , and (3)

[0043] (4)

[0044] In formulas (1)~(4), R is the ideal gas constant, the value is 8.314 J·mol -1 K -1 , is the mixing enthalpy between any two elements in the composition of high-entropy alloy wear-resistant coating, such as element A and element B, is the mole content percentage of a certain element, such as element A, is the mole content percentage of another element, such as element B, is the atomic radius of a certain element, is the average atomic radius of n elements, is the valence electron concentration of a certain element, represents the change amount of enthalpy when elements combine or coexist, represents the change amount of entropy when elements combine or coexist, represents the atomic radius difference, represents the valence electron concentration of high-entropy alloy wear-resistant coating;

[0045] Step two, according to the composition scheme of high-entropy alloy wear-resistant coating with BCC type solid solution and FCC type solid solution designed in step one, select Al, Ti, Cr, Ni, Co, B, Fe elemental powders to carry out smelting according to the element mole ratio Al:Ti:Cr:Ni:Co:B:Fe=2:2:1:1:1:1:1, =5.56), to obtain a BCC-type high-entropy alloy, and selecting Al, Ti, Cr, Ni, Co, B, and Fe elemental powders according to the molar ratio of Al:Ti:Cr:Ni:Co:B:Fe=1:1:1:5.5:5.5:1:4.5 to smelt =8.02), to obtain an FCC-type high-entropy alloy, and then processing the BCC-type high-entropy alloy target and the FCC-type high-entropy alloy target into a target seat of an ion plating device according to the requirements of the target seat, respectively; the mass purity of the Al, Ti, Cr, Ni, Co, B, and Fe elemental powders is greater than 99.9%, and the particle size is less than 50 μm;

[0046] Step three, drying the BCC-type high-entropy alloy target and the FCC-type high-entropy alloy target obtained in step two after decontamination and degreasing, and then installing the target on a target seat in an ion plating device, and simultaneously installing a Cr target with a mass purity greater than 99.9%;

[0047] Step four, suspending a TC6 titanium alloy sheet substrate with a size of φ30 mm×3.5 mm in a furnace cavity of the ion plating device after polishing, decontamination, degreasing, and drying in sequence, and vacuumizing the furnace cavity to 3×10 -3 Pa, and then adjusting the deposition temperature to 300°C, the duty cycle to 80%, and the substrate bias to -1000 V, and sequentially performing glow cleaning for 20 min and sputter cleaning for 10 min, and the arc current for sputter cleaning is 60 A;

[0048] Step five, turning on the power supply of the Cr target, adjusting the substrate bias to -100 V, the duty cycle to 80%, the arc current of the Cr target to 70 A, the deposition temperature to 300°C, and the deposition vacuum degree to 0.6 Pa, and introducing nitrogen gas and argon gas, the nitrogen gas flow being 125 sccm and the argon gas flow being 25 sccm, and using arc ion plating to deposit and prepare a CrN undercoat layer on the titanium alloy substrate subjected to sputter cleaning in step four, and the deposition time being 10 min, and turning off the power supply of the Cr target after the deposition is completed;

[0049] Step six, turning on the power supply of the FCC-type high-entropy alloy target, adjusting the substrate bias to -150 V, the duty cycle to 80%, the arc current of the FCC-type high-entropy alloy target to 70 A, the deposition temperature to 300°C, and continuing to introduce argon gas to a working gas pressure of 0.3 Pa, and using arc ion plating to deposit and prepare an FCC-type high-entropy alloy coating on the CrN undercoat layer prepared in step five, and the deposition time being 60 min, and turning off the power supply of the FCC-type high-entropy alloy target after the deposition is completed;

[0050] Step seven, turn on the power supply of the BCC type high-entropy alloy target, adjust the arc current of the BCC type high-entropy alloy target to 70 A, and use arc ion plating to deposit a BCC type high-entropy alloy coating on the FCC type high-entropy alloy coating prepared in step six, the deposition time is 60 min, and after the deposition is completed, the power supply of the BCC type high-entropy alloy target is turned off, and a high-entropy alloy wear-resistant coating is obtained on the surface of the titanium alloy substrate.

[0051] Figure 1 The microhardness diagram of the high-entropy alloy wear-resistant coating prepared in this embodiment and the TC6 titanium alloy substrate can be seen from Figure 1 The microhardness of the TC6 titanium alloy substrate is 326.5HV 0.2 , and the microhardness of the high-entropy alloy wear-resistant coating is 1209.2HV 0.2 , which is about 3.7 times that of the TC6 titanium alloy substrate.

[0052] Figure 2 The friction coefficient diagram of the high-entropy alloy wear-resistant coating prepared in this embodiment and the TC6 titanium alloy substrate can be seen from Figure 2 The average friction coefficient of the TC6 titanium alloy substrate is 0.5114, and the average friction coefficient of the high-entropy alloy wear-resistant coating is 0.1628, which is reduced to 31.8% of the TC6 titanium alloy substrate.

[0053] Example 2

[0054] This embodiment includes the following steps:

[0055] Step one, select Al, Ti, Cr, Ni, Co, B, and Fe elements as the composition of the high-entropy alloy wear-resistant coating, calculate and predict the phase formation mechanism of the high-entropy alloy wear-resistant coating by using the mixing entropy, mixing enthalpy, atomic radius difference, and valence electron concentration thermodynamic parameters, the calculation formula is shown as (1)~(4), calculate the corresponding parameters under the isomolar ratio of elements according to the calculation formula, and adjust the molar content percentage of different elements to make the valence electron concentration of the high-entropy alloy wear-resistant coating fall into different intervals, and respectively design the composition scheme of the high-entropy alloy wear-resistant coating with BCC type solid solution and FCC type solid solution.

[0056] (1)

[0057] (2)

[0058] , and (3)

[0059] (4)

[0060] In formulas (1) to (4), R is the ideal gas constant, with a value of 8.314 J·mol⁻¹. -1 K -1 , The enthalpy of mixture is the enthalpy of any two elements, such as element A and element B, in the composition of a high-entropy alloy wear-resistant coating. This represents the percentage of molar content of a particular element, such as element A. This represents the percentage of the molar content of another element, such as element B. Let the atomic radius of a certain element be _____. Let be the average atomic radius of n elements. The concentration of valence electrons of a certain element. This represents the change in enthalpy when elements combine or coexist. This represents the change in entropy when elements combine or coexist. Indicates the difference in atomic radii. This indicates the valence electron concentration of the high-entropy alloy wear-resistant coating;

[0061] Step 2: Based on the composition scheme of the high-entropy alloy wear-resistant coating with BCC-type solid solution and FCC-type solid solution designed in Step 1, select Al, Ti, Cr, Ni, Co, B, and Fe elemental powders and melt them according to the elemental molar ratio Al:Ti:Cr:Ni:Co:B:Fe=1:2:1:1:1:2:1. =5.56), to obtain a BCC-type high-entropy alloy, Al, Ti, Cr, Ni, Co, B, and Fe elemental powders were selected and smelted according to the elemental molar ratio Al:Ti:Cr:Ni:Co:B:Fe=1:1:1:6.5:6.5:1:2. =8.18), to obtain FCC type high entropy alloy, and then process it into BCC type high entropy alloy target material and FCC type high entropy alloy target material respectively according to the target seat requirements of ion plating equipment; the mass purity of Al, Ti, Cr, Ni, Co, B, Fe elemental powders is greater than 99.9%, and the particle size is less than 50μm;

[0062] Step 3: After cleaning and drying the BCC-type high-entropy alloy target and FCC-type high-entropy alloy target obtained in Step 2, install them on the target holder in the ion plating equipment, and at the same time add Cr target with a mass purity greater than 99.9%.

[0063] Step 4: After grinding, cleaning, degreasing, and drying the TC6 titanium alloy sheet substrate with dimensions of φ30mm×3.5mm, suspend it in the furnace chamber of the ion plating equipment, and evacuate the furnace chamber to a vacuum level of 3×10. -3Pa, then adjust the deposition temperature to 300℃, the duty cycle to 80%, the substrate bias voltage to -1000V, and perform glow discharge cleaning for 20min and sputter cleaning for 10min in sequence, with the arc current of sputter cleaning being 60A;

[0064] Step 5: Turn on the Cr target power supply, adjust the substrate bias voltage to -100V, the duty cycle to 80%, the Cr target arc current to 70A, the deposition temperature to 300℃, the deposition vacuum to 0.6Pa, and introduce nitrogen and argon gas with a nitrogen flow rate of 125sccm and an argon flow rate of 25sccm. Use arc ion plating to deposit CrN underlayer on the titanium alloy substrate that has been sputtered and cleaned in Step 4. The deposition time is 10min. After the deposition is completed, turn off the Cr target power supply.

[0065] Step 6: Turn on the FCC high-entropy alloy target power supply, adjust the substrate bias voltage to -200V, the duty cycle to 80%, the FCC high-entropy alloy target arc current to 75A, the deposition temperature to 300℃, and continue to introduce argon gas until the working pressure is 0.3Pa. Use arc ion plating to deposit the FCC high-entropy alloy coating on the CrN underlayer prepared in step 5. The deposition time is 40min. After the deposition is completed, turn off the FCC high-entropy alloy target power supply.

[0066] Step 7: Turn on the power supply of the BCC type high-entropy alloy target, adjust the arc current of the BCC type high-entropy alloy target to 70A, and use arc ion plating to deposit the BCC type high-entropy alloy coating on the FCC type high-entropy alloy coating prepared in step 6. The deposition time is 40min. After the deposition is completed, turn off the power supply of the BCC type high-entropy alloy target, and a high-entropy alloy wear-resistant coating is obtained on the surface of the titanium alloy substrate.

[0067] Figure 3 The images show the microhardness of the high-entropy alloy wear-resistant coating and the TC6 titanium alloy substrate prepared in this embodiment. Figure 3 It can be seen that the microhardness of the TC6 titanium alloy substrate is 326.5 HV. 0.2 The microhardness of the high-entropy alloy wear-resistant coating is 1297.3 HV. 0.2 It is approximately 3.97 times that of the TC6 titanium alloy substrate.

[0068] Figure 4 This is a friction coefficient diagram between the high-entropy alloy wear-resistant coating prepared in this embodiment and the TC6 titanium alloy substrate. Figure 4 It can be seen that the average friction coefficient of the TC6 titanium alloy substrate is 0.5114, while the average friction coefficient of the high-entropy alloy wear-resistant coating is 0.2527, which is reduced to 49.41% of that of the TC6 titanium alloy substrate.

[0069] The above merely describes preferred embodiments of the present application, and is not intended to limit the present application. Any simple modification, change and equivalent variation of the above embodiments according to the technical essence of the present application are still within the protection scope of the technical scheme of the present application.

Claims

1. A method for producing a high-entropy alloy wear-resistant coating on a titanium alloy surface by ion plating, characterized in that, The method comprises the following steps: Step one, selecting Al, Ti, Cr, Ni, Co, B, Fe elements as the composition of high-entropy alloy wear-resistant coating, calculating and predicting the phase formation mechanism of high-entropy alloy wear-resistant coating by using mixing entropy, mixing enthalpy, atomic radius difference, valence electron concentration thermodynamic parameters, the calculation formula is shown as (1)-(4), calculating the corresponding parameters of the elements under the equal mole ratio according to the calculation formula, and adjusting the mole content percentage of different elements to make the valence electron concentration of the high-entropy alloy wear-resistant coating fall into different intervals, and respectively designing the composition scheme of the high-entropy alloy wear-resistant coating with BCC type solid solution and FCC type solid solution; （1） （2） , and (3) （4） In the formulas (1)-(4), R is an ideal gas constant, and the value is 8.314 J·mol -1 K -1 , is the mixing enthalpy between any two elements in the high-entropy alloy wear-resistant coating composition, such as elements A and B, is the percentage of the molar content of a certain element, such as element A, is the percentage of the molar content of another element, such as element B, is the atomic radius of a certain element, is the average atomic radius of n elements, is the valence electron concentration of a certain element, represents the change in enthalpy when elements combine or coexist, represents the change in entropy when elements combine or coexist, represents the atomic radius difference, represents the valence electron concentration of the high-entropy alloy wear-resistant coating; Step two, according to the composition scheme of the high-entropy alloy wear-resistant coating with BCC type solid solution and FCC type solid solution designed in step one, selecting Al, Ti, Cr, Ni, Co, B, Fe elemental powders for smelting, respectively obtaining BCC type high-entropy alloy and FCC type high-entropy alloy, and then respectively processing into BCC type high-entropy alloy target material and FCC type high-entropy alloy target material; Step three, drying the BCC type high-entropy alloy target material and the FCC type high-entropy alloy target material obtained in step two after decontamination and degreasing, and then installing on the target holder in the ion plating equipment, and simultaneously installing a Cr target material; Step four, hanging the titanium alloy substrate in the furnace cavity of the ion plating equipment after polishing, decontamination, degreasing and drying, and then vacuumizing the furnace cavity, and then respectively performing glow cleaning and sputtering cleaning; Step five, turning on the power supply of the Cr target material, and inputting nitrogen and argon, and using arc ion plating to deposit and prepare a CrN underlayer on the titanium alloy substrate subjected to sputtering cleaning in step four, and turning off the power supply of the Cr target material after deposition; Step six, turning on the power supply of the FCC type high-entropy alloy target material, and continuing to input argon, and using arc ion plating to deposit and prepare an FCC type high-entropy alloy coating on the CrN underlayer prepared in step five, and turning off the power supply of the FCC type high-entropy alloy target material after deposition; Step seven, turning on the power supply of the BCC type high-entropy alloy target material, and continuing to input argon, and using arc ion plating to deposit and prepare a BCC type high-entropy alloy coating on the FCC type high-entropy alloy coating prepared in step six, and turning off the power supply of the BCC type high-entropy alloy target material after deposition, and obtaining a high-entropy alloy wear-resistant coating on the surface of the titanium alloy substrate.

2. The method of claim 1, wherein the method is characterized by: In step one, when When < 6.87, the composition of the high-entropy alloy wear-resistant coating is a BCC type solid solution, when 6.87≤ When < 8, the composition of the high-entropy alloy wear-resistant coating is a BCC+FCC type two-phase solid solution, when When ≥ 8, the composition of the high-entropy alloy wear-resistant coating is an FCC type solid solution.

3. The method of claim 1, wherein the method is characterized by: The mass purity of the Al, Ti, Cr, Ni, Co, B, Fe elemental powders in step two is greater than 99.9%, and the particle size is less than 50μm; the atomic percentage content of Al, Ti, Cr, Ni, Co, B, Fe in the BCC type high-entropy alloy target material and the FCC type high-entropy alloy target material is 5%-35%.

4. The method of claim 1, wherein the method is characterized by: The mass purity of the Cr target material in step three is greater than 99.9%.

5. The method of claim 1, wherein the method is characterized by: The furnace chamber was vacuumed to 3 x 10 -3 The deposition temperature was adjusted to 300 °C, the duty cycle was 80%, the substrate bias was -1000 V, the glow cleaning time was 20 min, the sputter cleaning time was 10 min, and the sputter cleaning arc current was 50 A.

6. The method of claim 1, wherein the method is characterized by: In step five, the substrate bias voltage used for depositing and preparing the CrN underlayer is-200V, the duty cycle is 80%, the arc current of the Cr target material is 60A, the deposition temperature is 300℃, the deposition vacuum degree is 0.3Pa, the nitrogen flow is 80sccm, the argon flow is 10sccm-50sccm, and the deposition time is 10min.

7. The method of claim 1, wherein the method further comprises: The base body bias voltage used in the deposition of the FCC-type high-entropy alloy coating in step six is -100 V to -200 V, the duty cycle is 80%, argon is introduced to a working pressure of 0.3 Pa to 0.6 Pa, the arc current of the FCC-type high-entropy alloy target material is 50 A to 70 A, the deposition temperature is 300 DEG C, and the deposition time is 30 min to 60 min.

8. The method of claim 1, wherein the method is characterized by: The arc current of the BCC-type high-entropy alloy target material used in the deposition of the BCC-type high-entropy alloy coating in step seven is 50 A to 70 A, and the deposition time is 30 min to 60 min.

9. A titanium alloy surface ion-plated high-entropy alloy wear-resistant coating prepared by the preparation method in any one of claims 1 to 8.

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