Spring external type ultrahigh purity gas pressure regulator

Abstract

The application discloses a spring external type ultrahigh-purity gas pressure regulator, which comprises a valve body, an inlet channel and an outlet channel are arranged at the bottom of the valve body, a valve core assembly is arranged in the valve body, a valve cavity is arranged on the valve core assembly, a valve core hole for connecting the inlet channel and the valve cavity and a connecting hole for connecting the valve cavity and the outlet channel are arranged in the cavity bottom of the valve cavity, a lifting type valve rod assembly is arranged on the valve core hole, a lower spring seat is arranged on the lifting type valve rod assembly, a lifting type adjusting knob is rotatably connected to the top of the valve body, an adjusting screw is fixed to the lifting type adjusting knob, the screw rod of the adjusting screw is threadedly connected to the top end of the valve body, the screw rod end of the adjusting screw is downwardly pressed and connected with an upper spring seat, a main spring is pressed and connected between the lower spring seat and the upper spring seat, and a secondary spring is pressed and connected between the lower spring seat and the valve core assembly. The secondary spring is external, the service life of the secondary spring is prolonged, and the secondary spring is prevented from frequently moving to form particles and pollute high-purity medium.

Description

Technical Field

[0001] This invention relates to the field of pressure regulator technology, and more specifically to a spring-loaded ultra-high purity gas pressure regulator. Background Technology

[0002] Pressure regulators are commonly used in applications where it is necessary to reduce the pressure of the gas source and provide a stable pressure or flow rate of gas. They are used to reduce the pressure of an unstable inlet pressure and stabilize it within a certain range.

[0003] In pressure regulators, the secondary spring is often located below the medium passage. For example, CN111911683A, titled "A Pressure Reducing Valve," is a pressure regulator. When used in semiconductor and solar thin-film processes, pressure reducing valves utilize special gases such as ultra-high purity silane (SiH4), phosphine (PH3), and arsine (AsH3). These gases are flammable, highly toxic, and corrosive, yet essential raw materials for manufacturing precision semiconductor electronic components. Therefore, when leakage occurs within the valve body, the secondary spring is corroded to varying degrees in the corrosive gas environment, causing premature damage and reducing the valve's lifespan. Furthermore, these springs are often made of expensive corrosion-resistant materials, increasing costs. In addition, corrosion of the secondary spring produces particulate matter, which contaminates the high-purity medium and affects the operation of downstream equipment. Moreover, the inlet and outlet of the pressure reducing valve are located on the left and right sides of the valve body, often occupying significant space when connecting the valve body to the pipeline, hindering the layout of compact pipeline systems.

[0004] Therefore, how to provide a spring-loaded ultra-high purity gas pressure regulator that has a long service life, avoids contamination of ultra-high purity special gas media, reduces manufacturing costs, and is suitable for application in compact pipeline systems is a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0005] In view of this, the present invention provides a spring-loaded ultra-high purity gas pressure regulator that has a long service life, avoids contamination of ultra-high purity special gas media, reduces manufacturing costs, and is suitable for application in compact pipeline systems.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] An externally mounted spring-loaded ultra-high purity gas pressure regulator includes:

[0008] The valve body has an air inlet channel and an air outlet channel at its bottom, with the air inlet of the air inlet channel and the air outlet of the air outlet channel both located on the bottom end face of the valve body.

[0009] A valve core assembly is disposed inside the valve body. The valve core assembly has a valve cavity. The bottom of the valve cavity has a valve core hole for connecting the air inlet channel and the valve cavity, and a connecting hole for connecting the valve cavity and the air outlet channel.

[0010] A lifting valve stem assembly is placed in the valve body, and the valve stem of the lifting valve stem assembly is sealed in the valve core hole for opening and closing the valve core hole. A lower spring seat is installed on the lifting valve stem assembly at a position above the valve core assembly.

[0011] A lifting adjustment knob is rotatably connected to the top of the valve body. An adjustment screw is fixed on the lifting adjustment knob. The screw is threaded to the top of the valve body, and the screw end is pressed downward to an upper spring seat.

[0012] A main spring, which is pressed between the lower spring seat and the upper spring seat;

[0013] A secondary spring is pressed between the lower spring seat and the valve core assembly.

[0014] As can be seen from the above technical solution, compared with the prior art, the present invention discloses an externally mounted ultra-high purity gas pressure regulator. Initially, before depressurization, the lifting valve stem assembly has an upward preload under the action of the secondary spring, ensuring that the valve stem is always sealed in the valve core hole, i.e., the valve core hole is in a closed state. During depressurization, rotating the lifting adjustment knob causes the adjustment screw to rotate, which in turn presses down on the upper spring seat. The upper spring seat presses down on the main spring, which in turn presses down on the lower spring seat, causing the lifting valve stem assembly to move downwards, thus moving the valve stem downwards. At this time, the head of the valve stem disengages from the valve core hole. When external gas passes through the inlet channel and the valve core hole, its pressure decreases due to the change in flow area. The depressurized gas then enters the valve core cavity and finally flows out through the connecting hole and the outlet channel, completing the depressurization process. When gas pressure fluctuates, the main and auxiliary springs deform to compensate for or reduce the pressure fluctuations as the gas acts on the lifting valve stem assembly. At this point, the forces of the main and auxiliary springs are in dynamic equilibrium with the gas pressure, thus stabilizing the pressure. Therefore, this pressure regulator moves the auxiliary spring to the top of the valve chamber, effectively preventing it from contacting corrosive gases and affecting its performance and lifespan. It also effectively prevents frequent spring movement from forming particles that could contaminate high-purity media and affect downstream equipment. Furthermore, by placing the auxiliary spring externally, the previously expensive corrosion-resistant materials used in its manufacture can be replaced with cheaper conventional materials, further saving costs. In addition, this pressure regulator places the inlet and outlet on the bottom surface of the valve body, resulting in a more compact structure. This avoids the bulky, left-hand connections of existing pressure regulators, which are unsuitable for compact piping systems.

[0015] Furthermore, the valve body includes:

[0016] The lower valve seat has an installation groove at its top and an air inlet channel and an air outlet channel at the bottom of the installation groove.

[0017] A pressure ring, the bottom of which is fixedly connected to the groove of the mounting slot;

[0018] An upper pressure ring, the bottom of which is fixedly connected to the top of a lower pressure ring;

[0019] The upper cover plate is fixedly connected to the top of the upper pressure ring. A sleeve groove is provided on the bottom surface of the lifting adjustment knob, and the sleeve groove is fitted onto the upper cover plate. The screw of the adjusting screw is threadedly connected to the threaded hole on the upper cover plate. The upper cover plate, the mounting groove, the lower pressure ring, and the upper pressure ring enclose and define an accommodating space. The upper spring seat, the main spring, the lower spring seat, the valve core assembly, the lifting valve stem assembly, and the auxiliary spring are all placed within the accommodating space. A guide groove is provided on the bottom surface of the upper cover plate, and the upper spring seat is placed within the guide groove.

[0020] The beneficial effects of adopting the above technical solution are: the guide groove can guide and limit the up and down movement trajectory of the upper spring seat, and prevent the upper spring seat from deviating.

[0021] Furthermore, it also includes a spacer ring pressed between the lower pressure ring and the upper pressure ring. The top surface of the spacer ring is provided with a plurality of insertion holes. The outer wall of the lifting adjustment knob is provided with a pin, which is inserted into the insertion hole.

[0022] The beneficial effects of adopting the above technical solution are: after the pressure is adjusted, the pin is inserted into the corresponding socket to lock the position of the lifting adjustment knob, thus preventing the pressure regulator from being accidentally turned during use and affecting the pressure reduction effect of the pressure regulator.

[0023] Furthermore, an anti-disengagement flange is integrally formed on the screw of the adjusting screw near its head end, and the anti-disengagement flange stops at the bottom surface of the guide groove.

[0024] The beneficial effect of adopting the above technical solution is to prevent the adjusting screw from coming off the top cover plate.

[0025] Furthermore, a positioning groove is provided on the top surface of the upper spring seat, and the head end of the adjusting screw is pressed into the positioning groove.

[0026] The beneficial effects of adopting the above technical solution are: it is easy for the adjusting screw to always be in contact with the center of the upper spring seat, ensuring the uniformity of the downward pressure of the adjusting screw on the upper spring seat, so that the upper spring seat is subjected to vertical downward pressure and moves vertically, thereby stably transmitting the downward pressure to the lower spring seat through the main spring, thus ensuring a stable fit between the valve stem and the valve core hole.

[0027] Furthermore, a first O-ring is fitted onto the top of the upper pressure ring.

[0028] The beneficial effects of adopting the above technical solution are: the first O-ring can increase the friction between the upper cover plate and the lifting adjustment knob, thereby preventing the lifting adjustment knob from turning back. In addition, it can reduce the abnormal noise of the lifting adjustment knob when it is turned (both the lifting adjustment knob and the upper cover plate are made of metal, which causes friction noise when the lifting adjustment knob is turned), and improve the operating feel of the lifting adjustment knob.

[0029] Furthermore, the valve core orifice includes a first valve core orifice and a second valve core orifice that are interconnected, and the valve core assembly includes:

[0030] A valve seat is disposed at the other end of the air intake channel, and the first valve core hole is provided on the valve seat;

[0031] An orifice plate is placed on the bottom surface of the mounting groove and pressed against the top surface of the valve seat. The orifice plate has a second valve core hole and a connecting hole. The head end of the valve stem is sealed in the second valve core hole.

[0032] A pressure plate is pressed against the orifice plate above it. The pressure plate has a guide hole and the valve cavity is defined between the pressure plate and the orifice plate.

[0033] The lifting valve stem assembly includes:

[0034] A valve stem seat is provided, which is arranged through the guide hole. The valve stem is fixed inside the valve stem seat. The lower spring seat is fixed on the valve stem seat at a position above the pressure plate. The auxiliary spring is pressed between the lower spring seat and the pressure plate.

[0035] A diaphragm, the outer edge of which is pressed between the orifice plate and the pressure plate, the bottom end face of the valve stem seat is fixedly connected to the diaphragm, and the diaphragm has a wavy curved surface segment near its outer edge.

[0036] The beneficial effects of adopting the above technical solution are: the diaphragm has a wave-shaped curved surface section, which can improve the elasticity of the diaphragm, enabling the diaphragm to withstand a medium pressure of 375 psig and ensure a seal, with a low possibility of external leakage, effectively avoiding the problem of corrosive media leaking into the containment space and corroding the main spring and auxiliary spring.

[0037] Furthermore, the lower end of the main spring is sleeved on the top of the valve stem seat and abuts against the bottom surface of the spring mounting groove at the top of the lower spring seat. A second O-ring is sleeved on the top of the valve stem seat. The second O-ring is pressed onto the lower spring seat by a clamping nut screwed to the top of the valve stem seat. The second O-ring is located inside the lower end of the main spring.

[0038] The beneficial effects of adopting the above technical solution are: the second O-ring can support the lower inner ring of the main spring, preventing the lower inner ring of the main spring from shrinking inward after repeated use, which would cause the upper and lower ends of the main spring to have inconsistent diameters and affect the accuracy of downward pressure transmission.

[0039] Furthermore, a third O-ring is embedded on the bottom end surface of the lower spring seat.

[0040] The beneficial effects of adopting the above technical solution are as follows: when the gas is depressurized, fluctuations will occur in the valve cavity, which will cause the diaphragm to vibrate and generate noise. The vibration of the diaphragm will be transmitted to the valve stem seat and the lower spring seat. Therefore, in order to suppress the vibration, a third O-ring is set on the lower spring seat. The vibration of the upper spring seat can be suppressed by the third O-ring, thereby indirectly suppressing the vibration of the diaphragm.

[0041] Furthermore, a washer is pressed between the top surface of the pressure plate and the bottom surface of the lower pressure ring.

[0042] The beneficial effect of adopting the above technical solution is that the pressure ring presses down on the pressure plate through the gasket, thereby ensuring that the pressure plate has sufficient downward pressure to press the diaphragm onto the orifice plate, and preventing the diaphragm from coming loose from between the pressure plate and the orifice plate. Attached Figure Description

[0043] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0044] Figure 1 This invention provides a schematic diagram of an externally mounted spring-type ultra-high purity gas pressure regulator.

[0045] Figure 2 for Figure 1 A magnified schematic diagram of the structure of part A in the middle. Detailed Implementation

[0046] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0047] See Figures 1-2 This invention discloses an externally mounted spring-loaded ultra-high purity gas pressure regulator, comprising:

[0048] The valve body 1 has an air inlet channel 101 and an air outlet channel 102 at its bottom. The air inlet 1011 of the air inlet channel 101 and the air outlet 1021 of the air outlet channel 102 are both located on the end face of the valve body 1.

[0049] Valve core assembly 2 is disposed inside valve body 1. Valve core assembly 2 is provided with valve cavity 201. Valve core hole 202 for connecting air intake channel 101 and valve cavity 201 and connecting hole 203 for connecting valve cavity 201 and air outlet channel 102 are respectively opened at the bottom of the cavity.

[0050] The lifting valve stem assembly 3 is placed inside the valve body 1. The valve stem 32 of the lifting valve stem assembly 3 is sealed in the valve core hole 202 for opening and closing the valve core hole 202. A lower spring seat 4 is installed on the lifting valve stem assembly 3 above the valve core assembly 2.

[0051] A lifting adjustment knob 5 is rotatably connected to the top of the valve body 1. An adjustment screw 51 is fixed on the lifting adjustment knob 5. The screw of the adjustment screw 51 is threadedly connected to the top of the valve body 1, and the screw end of the adjustment screw 51 is pressed downward to the upper spring seat 6.

[0052] The main spring 7 is pressed between the lower spring seat 4 and the upper spring seat 6;

[0053] The auxiliary spring 8 is pressed between the lower spring seat 4 and the valve core assembly 2.

[0054] Valve body 1 includes:

[0055] The lower valve seat 11 has a mounting groove 111 at its top, and an air inlet channel 101 and an air outlet channel 102 are respectively provided at the bottom of the mounting groove 111.

[0056] The bottom of the pressure ring 12 is fixedly connected to the groove of the mounting groove 111. The connection structure can be threaded connection, snap-fit, welding, etc., with threaded connection being preferred.

[0057] The upper pressure ring 13 is fixedly connected to the bottom of the lower pressure ring 12. The connection structure can be threaded connection, snap-fit, welding, etc., with threaded connection being preferred.

[0058] The upper cover plate 14 is fixedly connected to the top of the upper pressure ring 13. The connection structure can be threaded connection, snap-fit, welding, etc., preferably threaded connection. A sleeve groove 501 is opened on the bottom end surface of the lifting adjustment knob 5. The sleeve groove 501 is sleeved on the upper cover plate 14. The screw of the adjusting screw 51 is threadedly connected to the threaded hole 141 on the upper cover plate 14. The upper cover plate 14, the mounting groove 111, the lower pressure ring 12, and the upper pressure ring 13 enclose and define the receiving space 103. The upper spring seat 6, the main spring 7, the lower spring seat 4, the valve core assembly 2, the lifting valve stem assembly 3, and the auxiliary spring 8 are all placed in the receiving space 103. A guide groove 142 is opened on the bottom end surface of the upper cover plate 14. The upper spring seat 6 is placed in the guide groove 142.

[0059] In the above embodiments, the various components are preferably connected by threads, which makes the valve body easy to disassemble and install, and easy to maintain and replace certain parts.

[0060] The spring-loaded ultra-high purity gas pressure regulator of the present invention also includes a spacer ring 15 pressed between the lower pressure ring 12 and the upper pressure ring 13. Multiple insertion holes (not shown) are evenly distributed on the top surface of the spacer ring 15. A pin (not shown) is provided on the outer wall of the lifting adjustment knob 5, and the pin is inserted into the insertion hole.

[0061] In a preferred embodiment, an anti-detachment flange 511 is integrally formed on the screw of the adjusting screw 51 near its head end, and the anti-detachment flange 511 stops at the bottom surface of the guide groove 142.

[0062] In a preferred embodiment, a positioning groove 601 is provided on the top surface of the upper spring seat 6, and the head end of the screw of the adjusting screw 51 is pressed into the positioning groove 601.

[0063] In a preferred embodiment, a first O-ring 9 is fitted onto the top of the upper pressure ring 13.

[0064] In the above embodiment, the valve core hole 202 includes a first valve core hole 2021 and a second valve core hole 2022 that are interconnected, and the valve core assembly 2 includes:

[0065] Valve seat 21 is located at the other end of the air intake passage 101, and a first valve core hole 2021 is provided on the valve seat 21;

[0066] The orifice plate 22 is placed on the bottom surface of the mounting groove 111 and pressed against the top surface of the valve seat 21. The orifice plate 22 is provided with a second valve core hole 2022 and a connecting hole 203. The head end of the valve stem 32 is sealed on the second valve core hole 2022.

[0067] Pressure plate 23 is pressed onto the top of orifice plate 22. A guide hole 221 is provided on pressure plate 23. Valve cavity 201 is defined between pressure plate 23 and orifice plate 22.

[0068] The lifting valve stem assembly 3 includes:

[0069] Valve stem seat 31 is arranged through guide hole 221. Valve stem 32 is fixed inside valve stem seat 31. Lower spring seat 4 is fixed on valve stem seat 31 above pressure plate 23. Sub-spring 8 is pressed between lower spring seat 4 and pressure plate 23.

[0070] The outer edge of the diaphragm 33 is pressed between the orifice plate 22 and the pressure plate 23. The bottom end face of the valve stem seat 31 is fixedly connected to the diaphragm 33. The diaphragm 33 has a wave-shaped curved surface segment 331 near its outer edge.

[0071] In a preferred embodiment, the lower end of the main spring 7 is sleeved on the top of the valve stem seat 31 and abuts against the bottom surface of the spring mounting groove 411 at the top of the lower spring seat 4. A second O-ring 10 is sleeved on the top of the valve stem seat 31. The second O-ring 10 is pressed onto the lower spring seat 4 by a clamping nut 16 screwed and fixed on the top of the valve stem seat 31. The second O-ring 10 is located inside the lower end of the main spring 7.

[0072] In a preferred embodiment, a third O-ring 17 is embedded on the bottom end surface of the lower spring seat 4.

[0073] In a preferred embodiment, a washer 18 is pressed between the top surface of the pressure plate 23 and the bottom surface of the lower pressure ring 12.

[0074] In a preferred embodiment, to reduce wear and noise caused by the interaction between the adjusting screw and the upper spring seat during adjustment, the upper spring seat is made of galvanized material to provide lubrication.

[0075] In a preferred embodiment, the valve seat is made of PCTFE, which has a certain degree of plastic deformation capability. Therefore, under the action of the secondary spring, the valve stem has an upward preload, causing the valve stem and valve body to press against each other to form an internal sealing structure, so that the valve core orifice of the pressure regulator is initially in an unopened state. Furthermore, when gas is introduced while the valve body is not open, the gas pressure acts on the valve stem, causing the valve stem and valve seat to press against each other, thus the valve stem can also interact with the valve seat to form an internal sealing structure.

[0076] When the pressure regulator of this invention is initially not depressurized, the lifting valve stem assembly has an upward preload under the action of the auxiliary spring, ensuring that the valve stem is always sealed in the valve core hole, i.e., the valve core hole is in a closed state. During depressurization, rotating the lifting adjustment knob causes the adjustment screw to rotate, which in turn presses down on the upper spring seat. The upper spring seat presses down on the main spring, which in turn presses down on the lower spring seat, causing the lifting valve stem assembly to move downwards, thus moving the valve stem downwards. At this time, the head of the valve stem disengages from the valve core hole. External gas, passing through the inlet channel and valve core hole, experiences a decrease in pressure due to the change in flow area. The depressurized gas then enters the valve core cavity and finally flows out through the connecting hole and outlet channel, completing the depressurization process. When the gas pressure fluctuates, the main spring and auxiliary spring deform to compensate for or reduce the fluctuations when acting on the lifting valve stem assembly. At this time, the forces of the main spring and auxiliary spring are in a dynamic balance with the gas pressure, thus achieving a pressure stabilizing effect.

[0077] Therefore, this pressure regulator moves the secondary spring to the top of the valve chamber, effectively preventing the secondary spring from contacting corrosive gases and affecting its performance and lifespan. It also effectively prevents frequent spring movement from forming particles that could contaminate high-purity media and affect downstream equipment. Furthermore, by placing the secondary spring externally, the previously expensive corrosion-resistant materials used in its manufacture can be replaced with cheaper conventional materials, further saving costs. In addition, this pressure regulator places the inlet and outlet ports on the bottom surface of the valve body, resulting in a more compact structure. This avoids the bulky, left-right connections found in existing pressure regulators, which are unsuitable for compact piping systems.

[0078] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to the method section.

[0079] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A spring-outside type ultra-high purity gas pressure regulator characterized by comprising: include: The valve body (1) has an air inlet channel (101) and an air outlet channel (102) at its bottom. The air inlet (1011) of the air inlet channel (101) and the air outlet (1021) of the air outlet channel (102) are both located on the bottom surface of the valve body (1). Valve core assembly (2), the valve core assembly (2) is disposed inside the valve body (1), the valve core assembly (2) is provided with a valve cavity (201), the bottom of the valve cavity (201) is provided with a valve core hole (202) for connecting the air inlet channel (101) and the valve cavity (201) and a connecting hole (203) for connecting the valve cavity (201) and the air outlet channel (102). A lifting valve stem assembly (3) is placed inside the valve body (1). The valve stem (32) of the lifting valve stem assembly (3) is sealed in the valve core hole (202) for opening and closing the valve core hole (202). A lower spring seat (4) is installed on the lifting valve stem assembly (3) above the valve core assembly (2). A lifting adjustment knob (5) is rotatably connected to the top of the valve body (1). An adjustment screw (51) is fixed on the lifting adjustment knob (5). The screw of the adjustment screw (51) is threadedly connected to the top of the valve body (1), and the screw end of the adjustment screw (51) is pressed downward to the upper spring seat (6). The main spring (7) is pressed between the lower spring seat (4) and the upper spring seat (6); A secondary spring (8) is pressed between the lower spring seat (4) and the valve core assembly (2); The valve body (1) includes: The lower valve seat (11) has an installation groove (111) at its top and an air inlet channel (101) and an air outlet channel (102) at the bottom of the installation groove (111). The bottom of the pressure ring (12) is fixedly connected to the groove of the mounting groove (111); Upper pressure ring (13), the bottom of which is fixedly connected to the top of lower pressure ring (12); The upper cover plate (14) is fixedly connected to the top of the upper pressure ring (13). The bottom surface of the lifting adjustment knob (5) is provided with a sleeve groove (501). The sleeve groove (501) is sleeved on the upper cover plate (14). The screw of the adjusting screw (51) is threadedly connected to the threaded hole (141) on the upper cover plate (14). The upper cover plate (14), the mounting groove (111), the lower pressure ring (12), and the upper pressure ring (13) enclose and define the accommodating space (103). The upper spring seat (6), the main spring (7), the lower spring seat (4), the valve core assembly (2), the lifting valve stem assembly (3), and the auxiliary spring (8) are all placed in the accommodating space (103). The bottom surface of the upper cover plate (14) is provided with a guide groove (142). The upper spring seat (6) is placed in the guide groove (142). The valve core hole (202) includes a first valve core hole (2021) and a second valve core hole (2022) that are interconnected. The valve core assembly (2) includes: Valve seat (21), the valve seat (21) is disposed at the other end of the air intake channel (101), and the first valve core hole (2021) is provided on the valve seat (21). The orifice plate (22) is placed on the bottom surface of the mounting groove (111) and pressed against the top surface of the valve seat (21). The orifice plate (22) is provided with the second valve core hole (2022) and the connecting hole (203). The head end of the valve stem (32) is sealed on the second valve core hole (2022). A pressure plate (23) is pressed against the top of the orifice plate (22). A guide hole (221) is provided on the pressure plate (23). The valve cavity (201) is defined between the pressure plate (23) and the orifice plate (22). The lifting valve stem assembly (3) includes: A valve stem seat (31) is arranged through the guide hole (221). The valve stem (32) is fixed inside the valve stem seat (31). The lower spring seat (4) is fixed on the valve stem seat (31) above the pressure plate (23). The auxiliary spring (8) is pressed between the lower spring seat (4) and the pressure plate (23). A diaphragm (33) is formed by pressing the outer edge of the diaphragm (33) between the orifice plate (22) and the pressure plate (23). The bottom end face of the valve stem seat (31) is fixedly connected to the diaphragm (33). The diaphragm (33) has a wave-shaped curved surface segment (331) near its outer edge.

2. The spring-outside type ultra-high purity gas pressure regulator according to claim 1, wherein It also includes a spacer ring (15) pressed between the lower pressure ring (12) and the upper pressure ring (13). Multiple insertion holes are evenly distributed on the top surface of the spacer ring (15). A pin is provided on the outer wall of the lifting adjustment knob (5). The pin is inserted into the insertion hole.

3. The spring-outside type ultra-high purity gas pressure regulator according to claim 1, wherein The adjusting screw (51) has an anti-detachment flange (511) integrally formed on the screw near its head end, and the anti-detachment flange (511) stops at the bottom surface of the guide groove (142).

4. The spring-outside type ultra-high purity gas pressure regulator according to claim 1, wherein The upper spring seat (6) has a positioning groove (601) on its top surface, and the head end of the adjusting screw (51) is pressed into the positioning groove (601).

5. The spring-outside type ultra-high purity gas pressure regulator according to claim 1, wherein The top of the upper pressure ring (13) is fitted with a first O-ring (9).

6. The spring-outside type ultra-high purity gas pressure regulator according to claim 1, wherein The lower end of the main spring (7) is sleeved on the top of the valve stem seat (31) and abuts against the bottom surface of the spring mounting groove (411) at the top of the lower spring seat (4). The top of the valve stem seat (31) is sleeved with a second O-ring (10). The second O-ring (10) is pressed onto the lower spring seat (4) by a clamping nut (16) screwed and fixed on the top of the valve stem seat (31). The second O-ring (10) is located inside the lower end of the main spring (7).

7. The externally mounted spring-type ultra-high purity gas pressure regulator according to claim 1, characterized in that, A third O-ring (17) is embedded on the bottom end surface of the lower spring seat (4).

8. The spring-outside type ultra-high purity gas pressure regulator according to claim 1, wherein A washer (18) is pressed between the top surface of the pressure plate (23) and the bottom surface of the lower pressure ring (12).

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