Vacuum flange structure

By designing the PCB circuit board and sealing groove structure in the vacuum flange structure, high-density wiring and stable connection of the signal connector are achieved, solving the problem of unstable signal connection in the vacuum sealing structure and improving service life and sealing performance.

CN116799534BActive Publication Date: 2025-10-17HIWING TECH ACAD OF CASIC +3
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Patent Information

Application Number
CN202210246619.5
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-03-14
Publication Date
2025-10-17
Estimated Expiration
2042-03-14

AI Technical Summary

Technical Problem

Existing vacuum sealing structures suffer from poor sealing, unstable signal connection, easy damage to connectors, and difficulty in increasing signal density in high-density signal communication, thus failing to meet the needs of industrial automation communication and measurement.

Method used

Design a vacuum flange structure that uses a PCB circuit board and a sealing groove structure. The signal connector includes staggered signal output and input terminals. By utilizing the spatial staggered arrangement and uniform hole design, combined with the sealing groove, the sealing contact area is increased, thereby achieving high-density signal wiring and stable connection.

Benefits of technology

It improves the lifespan and sealing performance of signal connectors, ensuring stable signal connections and high-density wiring, and is suitable for signal communication and measurement in vacuum-sealed environments.

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Abstract

The present application provides a kind of vacuum flange structure, it includes flange pedestal, weak electric signal connector and cover plate, three are sequentially connected, wherein, weak electric signal connector includes PCB circuit board, and the isolation sealing of input and output end is realized by the space stagger of signal input and output end and groove sealing technology;At the same time, the voltage equalizing hole technology is used on the PCB structure of signal connector, the force problem of signal connection contact is solved, the tolerance accuracy of signal contact is guaranteed by combining mature PCB manufacturing process, and the wiring problem of high-density contact is solved.The device has the technical characteristics of simple structure, mature technology, stable and reliable signal connection, etc., and can be widely used in the internal and external structure signal communication measurement process of vacuum closed environment, has very high engineering practical value.
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Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of internal and external pressure differential closed vacuum structure, and relates to a vacuum flange structure, in particular to a vacuum flange structure capable of realizing high-density weak electric signal in a weak electric communication process of a vacuum structure. BACKGROUND

[0002] The vacuum sealing structure has special use in the fields of aerospace, military industry and industrial automation, and the low-pressure structure causes a pressure difference between the inside and outside of the closed structure, which brings great difficulty to the engineering measurement field. The conventional communication measurement adopts a vacuum sealing connector structure to connect the internal signal with the external communication through the sealing connector in the flange structure, and has wide application in the field of vacuum measurement.

[0003] However, with the development of the industrial automation technology, more and more measurement and communication parameters in the vacuum closed environment are required, which results in more and more signal communication lines, and therefore the number of wire-through flanges or the flange sectional area needs to be increased to solve the multi-signal parameter communication problem. However, the increase of the number of wire-through flanges of the vacuum structure will increase the vacuum leakage probability of the sealing structure. Meanwhile, the conventional vacuum sealing connector machine adopts the glass sintering technology to fix the connecting conductor (copper column) and the connector, and the structure shrinks and deforms in the cooling process, so that the precision between the contact points is difficult to guarantee, the tightness of the multi-core signal connection process is different, the signal contact tolerance cannot be guaranteed, the signal communication quality is poor, and the reliable communication of the signal cannot be guaranteed. Meanwhile, the sintered filling material in the vacuum environment is directly subjected to tensile stress, and often a certain channel is damaged, the whole connector is sealed, and great economic loss is caused. In addition, the signal connector communication signal line wire-through core density is difficult to improve due to the limitation of the sintering process technology, and the current industrial automation communication measurement technology demand cannot be met. Therefore, it is urgent to design a vacuum flange structure with a sealing structure and high-density signals. SUMMARY

[0004] The present application aims to at least solve one of the problems in the prior art.

[0005] To this end, the present application provides a vacuum flange structure.

[0006] The technical solution of the present application is as follows: the present application provides a vacuum flange structure, which comprises a weak electric signal connector, a flange base and a cover plate, wherein the weak electric signal connector is arranged in the flange base, and the cover plate, the weak electric signal connector and the flange base are sequentially fixedly connected.

[0007] The weak-signal connector comprises a PCB circuit board, the PCB circuit board is provided with signal terminals, the signal terminals comprise signal output terminals and at least one signal input terminal, the signal output terminals are arranged on one side of the PCB circuit board, the at least one signal input terminal is arranged on the other side of the PCB circuit board and is arranged in a staggered manner with the signal output terminals, the signal output terminals and the at least one signal input terminal are in communication connection, the PCB circuit board is provided with a signal output terminal pressure equalizing hole in the signal output terminal, and the PCB circuit board is provided with a signal input terminal pressure equalizing hole in the signal input terminal.

[0008] The flange base is provided with a first pressure equalizing cavity and a first signal hole, the first signal hole is a signal input hole or a signal output hole, the cover plate is provided with a second pressure equalizing cavity and a second signal hole, the second signal hole is a signal input hole or a signal output hole, the types of the first signal hole and the second signal hole are mutually exclusive, the types and quantities of the first signal hole and the second signal hole correspond to the types and quantities of the signal terminals, the first pressure equalizing cavity and the second signal hole are arranged in a one-to-one correspondence, and the first pressure equalizing cavity and the second signal hole are matched to place the signal output terminals or the signal input terminals between the first pressure equalizing cavity and the second signal hole; the second pressure equalizing cavity and the first signal hole are arranged in a one-to-one correspondence, and the second pressure equalizing cavity and the first signal hole are matched to place the signal output terminals or the signal input terminals between the second pressure equalizing cavity and the first signal hole.

[0009] The cover plate is further provided with a third annular sealing groove and a fourth annular sealing groove on the surface facing the PCB circuit board, the flange base is further provided with a fifth annular sealing groove and a sixth annular sealing groove on the surface facing the PCB circuit board, the third annular sealing groove and the fifth annular sealing groove are arranged opposite to each other and used for sealing the signal output terminals or the signal input terminals, and the fourth annular sealing groove and the sixth annular sealing groove are arranged opposite to each other and used for sealing the signal output terminals or the signal input terminals.

[0010] Further, the periphery of the surface of the PCB circuit board facing the cover plate is a static sealing surface, and the cover plate is provided with a first annular sealing groove on the static sealing surface.

[0011] Further, the periphery of the surface of the PCB circuit board facing the flange base is a static sealing surface, and the base is provided with a second annular sealing groove on the static sealing surface.

[0012] Further, the vacuum flange structure further comprises a plurality of sealing rings, wherein the first annular sealing groove, the second annular sealing groove, the third annular sealing groove, the fourth annular sealing groove, the fifth annular sealing groove and the sixth annular sealing groove are all provided with the sealing rings.

[0013] Further, the first equalizing cavity, the first signal hole, the second equalizing cavity and the second signal hole are all through holes.

[0014] Further, the signal connection terminal comprises a signal output terminal and a plurality of signal input terminals, and the signal output terminal and the plurality of signal input terminals are arranged in a star structure.

[0015] Further, the signal connection terminal comprises a signal output terminal and a plurality of signal input terminals, and the signal output terminal and the plurality of signal input terminals are arranged in a star structure.

[0016] Further, the signal input terminal is provided with a plurality of signal input terminal posts, and the signal input terminal posts can be connected with standard signal connectors or signal lines.

[0017] Further, the signal output terminal is provided with a plurality of signal output terminal posts, and the signal output terminal posts can be connected with standard signal connectors or signal lines.

[0018] Further, the signal input terminal posts are connected with the signal lines by welding, and the signal output terminal posts are connected with the signal lines by welding.

[0019] The technical scheme above discloses a signal connector in a vacuum flange structure, which comprises a PCB circuit board, so that the connector structure tolerance precision can be ensured by using the PCB circuit board manufacturing process technology, the input and output parts are separated in multiple closed areas, the output and at least one input part are designed to be staggered, the space staggered structure is arranged, high-density signal wiring is realized, the uniform holes are opened in the signal input and output parts of the PCB circuit board, the force form of the signal connector contact is changed, and the service life of the signal connection flange is improved. In addition, the sealing groove structure is adopted to increase the sealing contact area, the force form of the signal connector is changed, and the service life of the signal connector is greatly improved. BRIEF DESCRIPTION OF DRAWINGS

[0020] The accompanying drawings, which are included to provide a further understanding of the embodiments and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the principles of the application. It is readily apparent to one skilled in the art that the following figures are only some embodiments of the present application, and other figures can be obtained according to these figures without any creative labor.

[0021] Figure 1 A structure schematic view of a vacuum flange structure according to a specific embodiment 1 of the present application is shown;

[0022] Figure 2A structural schematic diagram of a flange base according to the specific embodiment 1 of the present application is shown;

[0023] Figure 3 A structural schematic diagram of a cover according to the specific embodiment 1 of the present application is shown;

[0024] Figure 4 A structural schematic diagram of a weak signal connector according to the specific embodiment 1 of the present application is shown;

[0025] Figure 5 A structural schematic diagram of a vacuum flange structure according to the specific embodiment 2 of the present application is shown;

[0026] Figure 6 A structural schematic diagram of a flange base according to the specific embodiment 2 of the present application is shown;

[0027] Figure 7 A structural schematic diagram of a cover according to the specific embodiment 2 of the present application is shown;

[0028] Figure 8 A structural schematic diagram of a weak signal connector according to the specific embodiment 2 of the present application is shown;

[0029] Among the above drawings, the following reference signs are included:

[0030] 10, weak signal connector; 11, signal output terminal; 11a, signal output terminal equalization hole; 12, signal input terminal; 12a, signal input terminal equalization hole; 13, PCB printed signal line; 20, flange base; 21, first equalization cavity; 22, first signal hole; 23, second annular sealing groove; 24, fifth annular sealing groove; 25, sixth annular sealing groove; 30, cover; 31, second equalization cavity; 32, second signal hole; 33, first annular sealing groove; 34, third annular sealing groove; 35, fourth annular sealing groove; 40, sealing ring. DETAILED DESCRIPTION

[0031] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings of the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. The description of the at least one exemplary embodiment is actually only illustrative, but not as any limitation on the present application and its application or use. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0032] It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting, in accordance with the example embodiments of the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising," when used in this specification, specify the presence of stated features, steps, operations, devices, components and / or combinations thereof, but do not preclude the presence or addition of one or more other features, steps, operations, devices, components and / or combinations thereof.

[0033] The relative arrangement of parts and steps, numerical expressions, and numerical values set forth in the examples are not intended to limit the scope of the application unless otherwise specifically stated. It is to be understood that the drawings are not necessarily to scale as the dimensions of the parts shown are for the purpose of illustration and description only. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art can not be discussed in detail, but should be considered part of the specification as appropriate. In all examples shown and discussed herein, any specific values are to be interpreted as merely illustrative and not limiting. Thus, other examples of example embodiments can have different values. It is noted that like numbers and letters on the figures identify like parts throughout the disclosure, and thus, once an item is defined in one figure, it is not necessary to discuss it further in connection with other figures.

[0034] As Figures 1-8As shown, in one embodiment of the present application, a vacuum flange structure is provided, which comprises a weak electric signal connector 10, a flange base 20 and a cover plate 30, wherein the weak electric signal connector 10 is arranged in the flange base 20, and the flange base 20, the weak electric signal connector 10 and the cover plate 30 are sequentially fixedly connected; the weak electric signal connector 10 comprises a PCB circuit board, the PCB circuit board is provided with signal wiring ends, the signal wiring ends comprise a signal output wiring end 11 and at least one signal input wiring end 12, the signal output wiring end 11 is arranged on one side of the PCB circuit board, the at least one signal input wiring end 12 is arranged on the other side of the PCB circuit board and is arranged in a staggered manner with the signal output wiring end 12, the signal output wiring end 11 and the at least one signal input wiring end 12 are in communication connection, a signal output end equalizing hole 11a is formed in the signal output wiring end 11 on the PCB circuit board, and a signal input end equalizing hole 12a is formed in the signal input wiring end 12 on the PCB circuit board; the flange base 20 is provided with a first equalizing cavity 21 and a first signal hole 22, the first signal hole 22 is a signal input hole or a signal output hole, the cover plate 30 is provided with a second equalizing cavity 31 and a second signal hole 32, the second signal hole 32 is a signal input hole or a signal output hole, the types of the first signal hole 22 and the second signal hole 32 are mutually exclusive, the types and the number of the first signal hole 22 and the second signal hole 32 correspond to the types and the number of the signal wiring ends, the first equalizing cavity 21 and the second signal hole 32 are arranged in one-to-one correspondence, and the first equalizing cavity 21 and the second signal hole 32 cooperate to place the signal output wiring end 11 or the signal input wiring end 12 between the first equalizing cavity 21 and the second signal hole 32; the second equalizing cavity 31 and the first signal hole 22 are arranged in one-to-one correspondence, and the second equalizing cavity 31 and the first signal hole 22 cooperate to place the signal output wiring end 11 or the signal input wiring end 12 between the second equalizing cavity 31 and the first signal hole 22; the cover plate 30 is further provided with a third annular sealing groove 34 and a fourth annular sealing groove 35 on the surface facing the PCB circuit board; the flange base 20 is further provided with a fifth annular sealing groove 24 and a sixth annular sealing groove 25 on the surface facing the PCB circuit board, the third annular sealing groove 34 and the fifth annular sealing groove 24 are arranged opposite to each other for sealing the signal output wiring end 11 or the signal input wiring end 12, and the fourth annular sealing groove 35 and the sixth annular sealing groove 25 are arranged opposite to each other for sealing the signal output wiring end 11 or the signal input wiring end 12.

[0035] For example, the weak electric signal connector 10, the flange base 20 and the cover plate 30 can be sequentially fixedly connected through a plurality of screws.

[0036] In the embodiment of the present application, the signal input terminal 12 has a plurality of signal output terminals, which can be connected with standard signal connectors or signal lines. The signal output terminal 11 has a plurality of signal output terminals, which can be connected with standard signal connectors or signal lines. The signal input terminal is connected with the signal line by welding, and the signal output terminal is connected with the signal line by welding.

[0037] The plurality of signal output terminals and the signal input terminal are connected by a plurality of PCB printed signal lines 13. The PCB printed signal line 13 is arranged in the PCB circuit board.

[0038] For example, if the first signal hole 22 is a signal input hole, the second signal hole 32 is a signal output hole, and vice versa. If the first signal hole 22 is a signal output hole, the second signal hole 32 is a signal input hole. If the first signal hole 22 is a signal input hole and the second signal hole 32 is a signal output hole, the number of the second equalizing cavity 31 and the first signal hole 22 corresponds to the number of the at least one signal input terminal 11, and the signal input terminal is arranged in the signal input hole, and the signal output terminal is arranged in the signal output hole.

[0039] In addition, if the third annular sealing groove 34 and the fifth annular sealing groove 24 are used to seal the signal output terminal 11, the fourth annular sealing groove 35 and the sixth annular sealing groove 25 are used to seal the signal input terminal 12, and the number of the sealing grooves corresponds to the number of the terminals.

[0040] As can be seen, in the embodiment of the present application, the signal connector in the vacuum flange structure includes a PCB circuit board, which can ensure the tolerance accuracy of the connector structure by using the PCB circuit board manufacturing process technology, separate the input and output parts in a plurality of closed areas, and stagger the output and at least one input part, utilize the space staggered structure arrangement, realize high-density signal wiring, and change the force form of the signal connector contact by opening uniform holes in the signal input and output parts of the PCB circuit board, thereby improving the service life of the signal connection flange. In addition, the sealing groove structure increases the sealing contact area, changes the force form of the signal connector, and greatly improves the service life of the signal connector.

[0041] In the above embodiment, in order to better realize the sealing of the weak signal connector, the periphery of the surface of the PCB circuit board facing the cover plate 30 is a static sealing surface, and the cover plate 30 is provided with a first annular sealing groove 33 on the static sealing surface. The periphery of the surface of the PCB circuit board facing the flange base 20 is a static sealing surface, and the base is provided with a second annular sealing groove 23 on the static sealing surface.

[0042] That is, the cover plate 30 and the flange base 20 are provided with annular sealing grooves at the positions where they are in contact with the circumferential edge of the PCB circuit board, so as to better seal the weak current signal connector.

[0043] In the above embodiment, in order to ensure the sealing effect, the vacuum flange structure further comprises a plurality of sealing rings 40, wherein the first annular sealing groove 33, the second annular sealing groove 23, the third annular sealing groove 34, the fourth annular sealing groove 35, the fifth annular sealing groove 24 and the sixth annular sealing groove 25 are all provided with the sealing rings 40.

[0044] For example, the sealing ring 40 can be an O-shaped sealing ring.

[0045] According to a specific embodiment of the present application, the first equalizing cavity 21, the first signal hole 22, the second equalizing cavity 31 and the second signal hole 32 are all through holes.

[0046] According to a specific embodiment of the present application, as shown in Figures 1-4 the signal connection terminals comprise a signal output connection terminal 11 and a signal input connection terminal 12, and the signal output connection terminal 11 and the signal input connection terminal 12 are arranged side by side and spaced apart on both sides of the PCB circuit board.

[0047] In the embodiment of the present application, the part between the signal output connection terminal 11 and the signal output connection terminal 11 of the PCB circuit board is connected to the cover plate 30 and the flange base 20 through a screw, and in order to better ensure the sealing effect of the connector, the surface of the cover plate 30 and the flange base 20 facing the PCB circuit board is provided with a sealing groove around the screw, and a sealing ring 40 is arranged in the sealing groove, so as to further ensure the sealing effect of the connector.

[0048] According to another specific embodiment of the present application, as shown in Figures 5-8 the signal connection terminals comprise a signal output connection terminal 11 and a plurality of signal input connection terminals 12, and the plurality of signal input connection terminals 12 and the signal output connection terminal 11 are arranged in a star structure.

[0049] In the embodiment of the present application, the plurality of signal input connection terminals 12 can be arranged around the signal output connection terminal 11.

[0050] It can be seen that the flange structure of the application adopts the space staggered matching structure to isolate the output and output signals in different closed areas, ensures the isolation of the internal and external pressures of the vacuum closed structure, realizes the high-density signal wiring, adopts the PCB circuit board structure to cooperate with the standard signal connector or the solenoid direct welding mode, realizes the flexible adjustment in the industrial communication measurement project, and simultaneously adopts the sealing groove structure to increase the sealing contact area, changes the stress form of the signal connector, and improves the service life of the signal connector. The structure has the technical characteristics of simple parts, convenient access, mature processing precision, stable and reliable signal connection, and can be widely applied to the internal and external structure signal communication measurement process in the vacuum closed environment, and has high engineering practical value.

[0051] In the description of the application, it should be understood that the orientation words such as "front, back, up, down, left, right", "transverse, vertical, perpendicular, horizontal" and "top, bottom" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the application and simplifying the description, and in the absence of the opposite description, these orientation words do not indicate and imply that the indicated device or element must have a specific orientation or be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the protection scope of the application; the orientation words "inner, outer" refer to the inner and outer of the contour of each component itself.

[0052] For the convenience of description, spatial relative terms such as "on", "above", "upper surface", "upper" and the like can be used herein to describe the spatial positional relationship of one device or feature with other devices or features as shown in the drawings. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation of the device described in the drawings. For example, if the device in the drawing is inverted, the device described as "above" or "above" other devices or structures will be positioned "below" or "below" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below" orientations. The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein are interpreted accordingly.

[0053] In addition, it should be noted that the use of "first", "second" and the like to define parts is only for the convenience of distinguishing the corresponding parts, and the above words have no special meaning unless otherwise stated, and therefore cannot be understood as a limitation on the protection scope of the application.

[0054] The above merely provides the preferred embodiments of the present application, and is not used to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the principles and technical scope of the present application shall fall into the scope of the present application.

Claims

1. A vacuum flange structure, characterized in that: The vacuum flange structure includes a weak-electric signal connector, a flange base and a cover plate, wherein the weak-electric signal connector is arranged in the flange base, and the cover plate, the weak-electric signal connector and the flange base are fixedly connected in sequence; The weak-current signal connector includes a PCB circuit board, the PCB circuit board has a signal terminal, the signal terminal includes a signal output terminal and at least one signal input terminal, the signal output terminal is arranged on one side of the PCB circuit board, the at least one signal input terminal is arranged on the other side of the PCB circuit board and is staggered with the signal output terminal, the signal output terminal and the at least one signal input terminal are communicatively connected, a signal output terminal equalizing hole is provided in the signal output terminal on the PCB circuit board, and a signal input terminal equalizing hole is provided in the signal input terminal on the PCB circuit board; wherein, when the signal terminal includes a signal output terminal and a signal input terminal, the signal output terminal and the signal input terminal are arranged in parallel and spaced apart on both sides of the PCB circuit board; when the signal terminal includes a signal output terminal and multiple signal input terminals, the signal output terminal and the multiple signal input terminals are arranged in a star structure; The flange base is provided with a first pressure-equalizing cavity and a first signal hole, the first signal hole is a signal input hole or a signal output hole, the cover plate is provided with a second pressure-equalizing cavity and a second signal hole, the second signal hole is a signal input hole or a signal output hole, the types of the first signal hole and the second signal hole are mutually exclusive, the types and quantities of the first signal hole and the second signal hole are respectively arranged corresponding to the types and quantities of the signal terminals, the first pressure-equalizing cavity and the second signal hole are arranged in a one-to-one correspondence, the first pressure-equalizing cavity and the second signal hole cooperate so that the signal output terminal or the signal input terminal is placed between the first pressure-equalizing cavity and the second signal hole; the second pressure-equalizing cavity and the first signal hole are arranged in a one-to-one correspondence, the second pressure-equalizing cavity and the first signal hole cooperate so that the signal output terminal or the signal input terminal is placed between the second pressure-equalizing cavity and the first signal hole; The cover plate is further provided with a third annular sealing groove and a fourth annular sealing groove on the surface facing the PCB circuit board; the flange base is further provided with a fifth annular sealing groove and a sixth annular sealing groove on the surface facing the PCB circuit board. The third annular sealing groove and the fifth annular sealing groove are arranged opposite to each other and are used to seal the signal output terminal or the signal input terminal. The fourth annular sealing groove and the sixth annular sealing groove are arranged opposite to each other and are used to seal the signal output terminal or the signal input terminal. The vacuum flange structure also includes multiple sealing rings, wherein the first annular sealing groove, the second annular sealing groove, the third annular sealing groove, the fourth annular sealing groove, the fifth annular sealing groove and the sixth annular sealing groove are all provided with the sealing rings, and the sealing rings are O-rings.

2. A vacuum flange structure according to claim 1, characterized in that: The peripheral edge of the surface of the PCB circuit board facing the cover plate and the contact surface of the cover plate are static sealing surfaces, and the cover plate is provided with a first annular sealing groove on the static sealing surface.

3. A vacuum flange structure according to claim 2, characterized in that: The peripheral edge of the surface of the PCB circuit board facing the flange base and the contact surface of the flange base are static sealing surfaces, and the base is provided with a second annular sealing groove on the static sealing surface.

4. A vacuum flange structure according to any one of claims 1 to 3, characterized in that: The first pressure equalizing cavity, the first signal hole, the second pressure equalizing cavity and the second signal hole are all through holes.

5. The vacuum flange structure according to claim 1, characterized in that: The signal input terminal has a plurality of signal input binding posts, which can be connected to standard signal connectors or signal lines.

6. A vacuum flange structure according to claim 5, characterized in that: The signal output terminal has a plurality of signal output binding posts, which can be connected to standard signal connectors or signal lines.

7. A vacuum flange structure according to claim 6, characterized in that: The signal input terminal is connected to the signal line by welding, and the signal output terminal is connected to the signal line by welding.

Citation Information

Patent Citations

  • Vacuum flange structure

    CN217607051U