A laser-induced plasma-jet electrolysis combined high-efficiency milling device and method

Abstract

The application provides a kind of laser-induced plasma jet electrolysis composite high-efficiency milling device and method, belongs to laser-electrolysis composite processing field. Through laser beam transmits electrolyte film and induces plasma, and laser ablation, electrolytic etching, jet impact and plasma impact erosion are carried out on processing area at the same time. Among them: there is potential difference between anode workpiece and cathode nozzle, and the vertical distance y is 0.2mm<y<1mm. The horizontal distance x between laser beam and cathode nozzle is 0.05mm<x<1mm. The spot diameter of laser is 10μm<φ<60μm. The output power of laser is greater than 50W. The application can realize efficient combination of laser-induced plasma and jet electrolytic processing, efficiently remove the passivation film on the surface of anode workpiece by the shock wave generated by high-conductivity plasma, reduce the impedance between cathode and anode, and realize laser-electrolysis composite high-efficiency milling processing.

Description

TECHNICAL FIELD

[0001] The application relates to a laser-induced plasma-jet electrolysis composite high-efficiency milling device and method, and belongs to the field of laser electrolytic milling processing. BACKGROUND

[0002] Traditional laser milling processing has problems such as micro-cracks, recast layers and low processing efficiency. Traditional electrolytic milling processing has problems such as low processing precision, an unfriendly processing environment, limitation to conductive materials and easy passivation in the processing process. Therefore, the above-mentioned single energy field milling processing is difficult to achieve high-efficiency milling. In order to improve the efficiency of milling processing, the invention patent CN1919514 proposes a jet beam electrolysis-laser composite processing method with laser as the main and electrolysis as the auxiliary. The method adopts a coaxial form of laser beam and electrolytic beam, and the laser beam removes materials under the guidance of the jet beam. Although the method can improve the recast layer problem caused by laser processing through electrolytic processing, the laser energy is seriously lost due to the long propagation distance of the laser beam in the electrolytic beam, so the milling efficiency is limited.

[0003] CN115007958A discloses a liquid guide laser-electrolysis composite processing tool electrode system and a milling method. The method realizes the composite of laser processing and electrolytic processing through the total reflection of the laser beam in the coaxial electrolytic column, and realizes the control of the electrolytic processing precision through the auxiliary anode, but the energy loss of the laser beam is serious after multiple reflections in the electrolytic column, and the auxiliary anode reduces the electric field strength in the electrolytic processing, which is not conducive to high-efficiency milling. In addition, in order to realize the total reflection transmission of the laser beam in the 0.5mm electrolytic column, the output power of the laser is only 2mW. The too low laser output power makes it difficult to realize laser-electrolysis composite high-efficiency milling processing.

[0004] CN116079167A discloses a laser and electrolysis composite processing method and device. The method reduces the energy loss of the laser beam by immersing the solid optical fiber in the electrolyte, but the immersion type electrolytic processing method has serious stray corrosion, and it is difficult to realize deep milling processing, so the milling efficiency is limited. In addition, the laser and electrolysis composite processing technology based on immersion can only pipe the laser output power density to 1x10 9 W / cm 2 However, the maximum value of the processing voltage of the immersion type electrolytic processing is only 20V. The low electrolytic processing voltage makes it difficult to realize laser-electrolysis composite high-efficiency milling processing.

[0005] In summary, the existing laser electrolytic milling method still has the problem of low processing efficiency. On the one hand, the propagation distance of laser in the electrolyte column in the coaxial laser-electrolytic composite machining is far, which leads to serious laser energy loss. Although the preferred laser wavelength can reduce the absorption rate of laser in the electrolyte, the electrolysis products and electrolytes in the electrolyte will also cause serious loss to the laser. In addition, the laser output power in the coaxial liquid guide laser-electrolytic composite machining is affected by the diameter of the electrolyte column, and the laser is difficult to adopt high-power output. On the other hand, in order to avoid large stray corrosion and inter-electrode discharge, the laser-electrolytic composite machining method based on immersion usually adopts lower machining voltage. Therefore, the existing laser-electrolytic composite machining method is difficult to realize composite efficient milling machining. On the basis of existing research and technology, the present application proposes a laser-induced plasma-jet electrolytic composite efficient milling device and method, which can realize efficient removal of materials under the combined action of laser ablation, plasma impact and electrochemical etching without limiting the maximum laser output power and machining voltage. SUMMARY

[0006] In view of the limitations of the prior art, the present application provides a laser-induced plasma-jet electrolytic composite efficient milling device and method, which aims to improve the material removal efficiency of laser-electrolytic milling. The laser-induced plasma-jet electrolytic machining method can construct an electrolytic channel between the cathode nozzle and the anode workpiece through plasma. The excellent conductivity of plasma reduces the impedance of the electrolyte between the nozzle and the workpiece to realize efficient milling machining. In addition, the laser-induced plasma will expand and produce a shock wave to generate high pressure on the milling surface to realize efficient material removal.

[0007] To achieve the above purpose, the technical scheme adopted by the present application is as follows:

[0008] A laser-induced plasma-jet electrolytic composite efficient milling device, the device comprises a three-dimensional moving platform 1, a laser beam 2, a focusing mirror 3, a laser 4, a laser power supply 5, a jet support bottom plate 6, a jet fixed plate 7, an electrolyte pipeline 8, a flow meter 9, a gear pump 10, a liquid storage tank 12, a cathode nozzle 14, an electrolyte film 15, an anode workpiece 16, a passivation film 17, a plasma 18, an anode clamp 19, and an electrolytic cell 20.

[0009] The electrolytic cell 20 is fixed on the X-axis moving platform 101 of the three-dimensional moving platform 1, and the bottom of the side wall of the electrolytic cell 20 is connected with the electrolyte pipeline I 801; the anode workpiece 16 is fixed on the anode clamp 19 and placed in the interior of the electrolytic cell 20, and the anode clamp 19 can move with the electrolytic cell 20. The laser 4 is connected with the laser power supply 5 and emits a laser beam to irradiate the surface of the anode workpiece 16 through the focusing mirror 3 below the laser 4, and the laser 4 is fixed on the Z-axis moving platform 103 of the three-dimensional moving platform 1, the Z-axis moving platform 103 is fixed on the Y-axis moving platform 102, and the Y-axis moving platform 102 is fixed on the column of the three-dimensional moving platform 1.

[0010] The jet fixing plate 7 is vertically arranged on the jet support bottom plate 6 which is horizontally placed on the X-axis moving platform 101, and two vertical jet fixing grooves I 701 and II 702 are arranged on the jet fixing plate 7; the front end of the electrolyte pipeline III 803 is located above the anode workpiece 16 and used for spraying a jet liquid column, the electrolyte pipeline III 803 is fixed on the jet fixing grooves I 701 and II 702 through the fixed pipe support I 1301 and II 1302, and the electrolyte pipeline III 803 can vertically move on the jet fixing grooves, thereby realizing the gap control between the jet liquid column and the laser beam 2. The front end of the electrolyte pipeline III 803 is connected with the cathode nozzle 14.

[0011] The electrolyte in the electrolytic cell 20 flows into the liquid storage groove 12 through the electrolyte pipeline I 801, flows through the electrolyte pipeline II 802 connected with the filter 11 and the gear pump 10, and is pumped to flow through the electrolyte pipeline III 803 and sprayed out through the cathode nozzle 14. The cathode nozzle 14 and the anode workpiece 16 are respectively connected with the cathode and the anode of the electrolysis power supply 21. The electrolyte pipeline II 802 is further provided with the flow meter 9 for measuring the electrolyte flow in the electrolyte pipeline 8. After the electrolyte is sprayed out through the cathode nozzle 14, the electrolyte film 15 is formed on the surface of the anode workpiece 16, and the electrochemical etching is carried out to generate the passivation film 17. The laser beam 2 penetrates the electrolyte film 15 and irradiates the surface of the anode workpiece 16. Under the continuous irradiation of the high-energy pulse laser, the surface of the anode workpiece 16 is vaporized and ionized to generate the plasma 18. The plasma 18 expands rapidly to form high temperature and high pressure to impact the surface and remove the passivation film 17 on the surface of the anode workpiece 16. Under the action of the high-conductivity plasma 18, the electrolyte impedance between the cathode nozzle 14 and the anode workpiece 16 is reduced. Under the action of the laser-induced plasma, the coupling and synergistic effect of the laser and the electrolysis is realized, and the milling efficiency is improved.

[0012] Further, the horizontal distance x between the laser beam 2 and the cathode nozzle 14 is 0.05mm < x < 1mm. The vertical distance y between the anode workpiece 16 and the cathode nozzle 14 is 0.2mm < y < 1mm.

[0013] Further, the spot diameter φ of the laser beam 2 is 10μm < φ < 60μm. The output power of the laser 4 is greater than 50W.

[0014] Further, the thickness of the electrolyte film 15 is controlled by the flow rate of the electrolyte jetted from the cathode nozzle 14. The thickness of the electrolyte film 15 is less than 0.2mm.

[0015] A laser-induced plasma jet electrolytic compound high-efficiency milling method, in which a laser beam ablates the surface of an anode metal through an electrolyte film generated by a jet electrolysis and generates a plasma. The plasma expands rapidly to form a shock wave to ablate the passivation film on the surface of the anode to increase the material removal rate of the machining. In addition, the plasma with good electrical conductivity reduces the impedance between the cathode nozzle and the anode workpiece, increases the machining current, and thus realizes laser electrolytic compound high-efficiency milling. The following steps are implemented:

[0016] 1) The anode workpiece 16 is fixed by the anode clamp 19 and kept perpendicular to the laser 4. The spot of the laser beam 2 is positioned on the surface of the anode workpiece 16 by adjusting the Z-axis moving platform 103. The electrolyte pipeline 803 with the cathode nozzle 14 at the front end is fixed by the jet fixing plate 7, and the horizontal distance x between the laser beam 2 and the cathode nozzle 14 is kept at 0.05mm < x < 1mm. The vertical distance y between the anode workpiece 16 and the cathode nozzle 14 is kept at 0.2mm < y < 1mm.

[0017] 2) The laser machining parameters, including the laser power, spot position, and electrolytic machining time, are set by a computer. The milling motion is realized by the X-axis moving platform 101. The electrolytic machining voltage between the anode and the cathode is provided by the electrolytic power supply 21, and the electrolytic machining parameters, including the electrolytic voltage, duty cycle, pulse frequency, and laser machining time, are set.

[0018] 3) Before machining, the gear pump 10 is started, and after a stable jet is formed at the cathode nozzle 14, the flow rate of the electrolyte is adjusted to control the thickness of the electrolyte film 15 to be less than 0.2mm. The electrolytic power supply 21 and the laser power supply 5 are turned on, and the milling machining program of the three-dimensional moving platform 1 is started to realize laser-induced plasma jet electrolytic machining. At this time, the anode workpiece 16 realizes material removal under the combined action of laser ablation, plasma impact, and electrochemical etching.

[0019] During the machining process, the anode workpiece 16 is subjected to material phase change under the action of laser ablation, and the anode workpiece 16 in the machining area is gasified and generates plasma 18. The plasma 18 will expand rapidly and generate a shock wave, realizing the rapid removal of the passivation film. Further accumulation of the passivation film 17 is prevented, so that the machining process continues, and high-efficiency milling is realized.

[0020] 5) After completing the milling motion track, turn off the electrolysis power supply 21, the laser power supply 6 and the gear pump 10, and unload the anode workpiece 16, completing the machining.

[0021] The beneficial effects of the present application are:

[0022] 1) The present application reduces the energy loss of laser in the electrolyte by processing the metal surface through the electrolyte film of the laser beam, which is beneficial to the generation of high-energy laser-induced plasma.

[0023] 2) The laser-induced plasma will expand rapidly and form a shock wave, which can realize the rapid removal of the passivation film on the surface of the anode workpiece, and avoid the passivation of the anode caused by the accumulation of the passivation film.

[0024] 3) The plasma with high electrical conductivity can reduce the impedance between the cathode nozzle and the anode workpiece, so as to increase the electrolysis current in the machining process and realize the rapid removal of the material. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 Figure is a laser-induced plasma jet electrolysis composite machining device;

[0026] Figure 2 Figure is a local enlarged view of laser-induced plasma jet electrolysis;

[0027] Figure 3 Figure is a photo of plasma in laser-induced plasma jet electrolysis composite milling;

[0028] Figure 4 Figure is a physical diagram of the groove after laser-induced plasma jet electrolysis composite milling;

[0029] Figure 5 Figure is a comparison diagram of the cross section of the groove after jet electrolysis machining and laser-induced plasma jet electrolysis machining;

[0030] In the figure: 1 three-dimensional moving platform, 2 laser beam, 3 focusing mirror, 4 laser, 5 laser power supply, 6 jet support bottom plate, 7 jet fixing plate, 9 flowmeter, 10 gear pump, 11 filter, 12 liquid storage tank, 14 cathode nozzle, 15 electrolyte film, 16 anode workpiece, 17 passivation film, 18 plasma, 19 anode clamp, 20 electrolysis tank; 21 electrolysis power supply;

[0031] 101 X-axis moving platform, 102 Y-axis moving platform, 103 Z-axis moving platform, 701 jet fixed groove I, 702 jet fixed groove II, 801 electrolyte pipeline I, 802 electrolyte pipeline II, 803 electrolyte pipeline III, 1301 fixed pipe support I, 1302 fixed pipe support II. DETAILED DESCRIPTION

[0032] The specific embodiments of the present application are described in detail below with reference to the technical solutions and the accompanying drawings.

[0033] Figure 1 It is a diagram of laser-induced plasma-jet electrolysis combined machining device. The electrolysis tank 20 is placed on the X-axis moving platform 101 and controlled to move. The side wall bottom of the electrolysis tank 20 is provided with an opening which is connected to the liquid storage tank 12 through the electrolyte pipeline I, and is connected to the filter 11 through the electrolyte pipeline II 802, so as to realize the filtration of electrolyte during the machining process. The electrolyte is transported to the cathode nozzle 14 through the gear pump 10 and the electrolyte pipeline III 803, and is sprayed to the surface of the anode workpiece 16 at a certain flow rate. The anode workpiece 16 is fixed in the electrolysis tank 20 by the anode clamp 19 and moves with the electrolysis tank 20. The focusing mirror 3 and the laser 4 are placed vertically above the anode workpiece 16 in sequence. The focusing mirror 3 and the laser 4 are both fixed on the Z-axis moving platform 103. The laser 4 is powered by the laser power supply 5. The electrolyte pipeline III 803 is fixed on the jet fixed groove I 701 and the jet fixed groove II 702 through the fixed pipe support I 1301 and the fixed pipe support II 1302 respectively, so as to realize the gap control between the jet liquid column and the laser beam 2.

[0034] Figure 2 It is a partial enlarged view of laser-induced plasma-jet electrolysis. The laser beam 2 after the focusing mirror 3 transmits through the electrolyte film 15 and irradiates to the surface of the anode workpiece 16, so that the material is vaporized and the plasma 18 is generated. The plasma 18 expands rapidly to generate a shock wave to remove the passivation film 17 on the surface of the anode workpiece, so as to promote the continuous electrolytic machining.

[0035] Figure 3 It is a photo of plasma in laser-induced plasma-jet electrolysis combined milling. During the machining process, the plasma 18 absorbs the pulse energy of the laser beam 2, the number of the plasma 18 increases continuously, and the shock wave generated by the expansion of the plasma 18 is beneficial to remove the passivation film 17 generated after the electrolytic machining. In addition, the plasma with good conductivity can reduce the impedance between the cathode nozzle and the anode workpiece, improve the efficiency of jet electrolytic machining, and realize high-efficiency milling machining. The groove after the laser-induced plasma-jet electrolysis combined milling is shown in Figure 4

[0036] ​In order to effectively characterize the promotion of laser-induced plasma to jet electrolytic milling, jet electrolytic milling and laser-induced plasma-jet electrolytic composite high-efficiency milling are carried out respectively, and the cross-sectional profile of the milled groove is shown in Figure 5 The average groove width of jet electrolytic milling is 947.16 μm, and the average groove depth is 181.03 μm. The average groove width of laser-induced plasma-jet electrolytic composite milling is 985.23 μm, and the average groove depth is 406.21 μm.

[0037] Taking 304 stainless steel as an example, Figure 4 is a micro-groove physical map after laser-induced plasma-jet electrolytic milling. Before the experiment, the 5cm×5cm×1.5mm stainless steel sheet is polished, and the polished stainless steel sheet is ultrasonically degreased with acetone and ethanol, and then cleaned with deionized water and dried on a hot plate at 130℃ for 30min. The cathode nozzle is made of 304 stainless steel with an inner diameter of 0.6mm. The electrolyte is a mixture of 10% NaCl and 1% NaNO3 solution, and the electrolyte flow rate is 10.3m / s. The jet electrolytic machining adopts constant voltage machining mode, and the electrolytic voltage is 120V, the pulse frequency is 1KHz, and the pulse duty cycle is 50%. The wavelength of the laser is 1064nm, the laser power is 100W, the pulse frequency is 20KHz, and the machining time is 70s. The average width of the micro-groove obtained by the laser-induced plasma-jet electrolytic high-efficiency milling method is 1.35mm, the milling depth is 0.42mm, and the material removal rate is 1.2mm 3 / min.

[0038] The laser-induced plasma-jet electrolytic composite high-efficiency milling method realized based on the above device includes the following specific steps:

[0039] 1) The 5cm×5cm×1.5mm stainless steel sheet is sequentially subjected to rough grinding, fine grinding and polishing, and ultrasonically degreased with acetone and ethanol for 15min each. The ultrasonically treated stainless steel sheet is cleaned with deionized water and dried on a hot plate at 130℃ for 30min. A mixture of 10% NaCl and 1% NaNO3 solution is prepared as electrolyte and poured into the electrolyte tank. The laser processing parameters are set, including: laser power is 100W, pulse frequency is 20KHz. The electrolytic machining parameters are set, including: electrolytic machining mode is constant voltage machining, electrolytic voltage is 120V, pulse frequency is 1KHz, pulse duty cycle is 50%. The milling processing program is set, including: milling speed is 1mm / s, milling length is 10mm.

[0040] 2) The anode workpiece is fixed by the anode clamp and placed right below the focusing mirror. The distance between the focusing mirror and the anode workpiece is adjusted to the focal length of the focusing mirror. The laser power is turned on and maintained for 5s to realize the machining of the pre-drilled hole on the surface of the anode workpiece. The horizontal distance x between the cathode nozzle and the pre-drilled hole is 0.05mm < x < 1mm. The vertical distance y between the cathode nozzle and the pre-drilled hole is 0.2mm < y < 1mm. The electrolyte pipeline connected with the cathode nozzle is fixed by the jet fixing plate to realize the fixation of the cathode nozzle. The jet fixing plate 7 and the anode workpiece 16 can simultaneously realize left and right milling movement with the X-axis moving platform to ensure the relative position of the laser and the jet electrolysis fixed.

[0041] 3) The gear pump 10 is turned on to make the electrolyte in the electrolyte tank 20 flow through the electrolyte pipeline I 801, the liquid storage tank 12, the electrolyte pipeline II 802, the filter 11, the gear pump 10, the electrolyte pipeline III 803, and the cathode nozzle 14 in turn, and sprayed out of the cathode nozzle 14. After a stable liquid film is formed, the thickness of the liquid film is measured, the jet speed is adjusted to ensure that the thickness of the electrolyte film is less than 0.2mm. The electrolysis power supply 21 and the laser power supply 5 are turned on, and the milling machining program of the three-position moving platform 1 is started. The anode clamp 19 and the anode workpiece 16 in the electrolyte tank 20 perform milling machining with the X-axis moving platform 101. The anode workpiece 16 realizes milling machining under the action of laser ablation, electrolytic etching, jet impact, and plasma erosion.

[0042] During the machining process, the anode workpiece 16 is oxidized to generate metal ions 18 and form a passivation film on the machined surface. The laser transmits through the electrolyte film and irradiates onto the surface of the anode workpiece 16 to generate plasma 18. The plasma rapidly expands and generates a shock wave to quickly remove the passivation film on the surface of the anode, preventing further accumulation of the passivation film, so that the electrolytic machining process continues. In addition, the plasma generated in the anode machining area has good electrical conductivity, which can reduce the impedance between the cathode nozzle and the anode workpiece, increase the electrolytic machining current, and realize high-efficiency milling.

[0043] 5) After the laser-induced plasma-jet electrolysis combined high-efficiency milling machining is completed, the electrolysis power supply and the laser power supply are turned off, the electrolyte circulation system is stopped, the anode workpiece is removed and cleaned and dried, and the machining is completed.

[0044] This method can significantly improve the efficiency of laser-electrolytic milling. Under the conditions of electrolytic machining voltage of 120V, milling speed of 1mm / s, electrolyte of 10% NaCl and 1% NaNO3 mixed solution, laser power of 100W, distance between cathode nozzle and anode workpiece of 0.2mm, and machining time of 70s, laser-induced plasma-jet electrolysis combined high-efficiency milling micro-groove experiment is carried out. The material removal efficiency of laser-induced plasma-jet electrolysis combined high-efficiency milling micro-groove is 2.32mm 3 / min. Compared with the coaxial laser-electrolytic composite machining method (material removal rate is 0.6mm 3 / min) in the International Journal of Machine Tools and Manufacture, 2020, 155, 103569, the material removal rate is increased by 3.87 times. Compared with the coaxial laser-electrolytic composite machining method (material removal rate is 0.2mm 3 / min) in the Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, 2006, 30, 288-298, the material removal rate is increased by 11.6 times. It can be seen that the laser-electrolytic high-efficiency milling can be realized by using the method.

[0045] The above embodiments only express the implementation of the present application, but cannot be understood as the limitation of the scope of the present application patent. It should be pointed out that, for those skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application.

Claims

1. A laser induced plasma-jet electrolytic complex high efficiency milling device, characterized in that, The device comprises a three-dimensional moving platform (1), a laser beam (2), a focusing mirror (3), a laser (4), a laser power supply (5), a jet support base plate (6), a jet fixing plate (7), an electrolyte pipeline, a liquid storage tank (12), a cathode nozzle (14), an anode workpiece (16), an anode clamp (19), an electrolytic cell (20), wherein the electrolyte pipeline comprises an electrolyte pipeline I (801), an electrolyte pipeline II (802), and an electrolyte pipeline III (803), the three-dimensional moving platform (1) comprises an X-axis moving platform (101), a Y-axis moving platform (102), and a Z-axis moving platform (103). The electrolytic cell (20) is fixed on the X-axis moving platform (101) of the three-dimensional moving platform (1), and the bottom of the side wall is communicated with the liquid storage tank (12) through the electrolyte pipeline I (801); the anode workpiece (16) is placed in the electrolytic cell (20) through the anode clamp (19), and the anode clamp (19) can move with the electrolytic cell (20); the laser (4) is connected with the laser power supply (5) and emits a laser beam which is irradiated to the surface of the anode workpiece (16) through the focusing mirror (3) below, and the laser (4) is fixed on the Z-axis moving platform (103) of the three-dimensional moving platform (1); the Z-axis moving platform (103) is fixed on the Y-axis moving platform (102), and the Y-axis moving platform (102) is fixed on the column of the three-dimensional moving platform (1); The jet fixing plate (7) is vertically arranged on the jet support base plate (6), and the jet support base plate (6) is horizontally placed on the X-axis moving platform (101); two vertical jet fixing grooves I (701) and jet fixing grooves II (702) are arranged on the jet fixing plate (7); the cathode nozzle (14) at the front end of the electrolyte pipeline III (803) is located above the anode workpiece (16) and is used for spraying a jet liquid column, and the electrolyte pipeline III (803) is fixed on the jet fixing grooves I (701) and jet fixing grooves II (702) respectively and can move vertically on the jet fixing grooves, so as to realize gap control between the jet liquid column and the laser beam (2); The electrolyte in the electrolytic cell (20) flows into the liquid storage tank (12) through the electrolyte pipeline I (801), and is pumped to flow through the electrolyte pipeline III (803) through the electrolyte pipeline II (802) and is sprayed by the cathode nozzle (14); the cathode nozzle (14) and the anode workpiece (16) are respectively used for connecting the cathode and the anode of the electrolysis power supply (21). The horizontal distance x between the laser beam (2) and the cathode nozzle (14) is 0.05mm<x<1mm; the vertical distance y between the anode workpiece (16) and the cathode nozzle (14) is 0.2mm<y<1mm.

2. A laser-induced plasma-jet electrolytic hybrid high-efficiency milling device according to claim 1, characterized in that, A filter (11) and a gear pump (10) are mounted on the electrolyte pipeline II (802); a flow meter (9) is further arranged and is used for measuring the electrolyte flow in the electrolyte pipeline (8).

3. A laser induced plasma jet electrolytic complex high efficiency milling method, characterized in that, The device is realized based on any one of claims 1-2, and specifically, when the cathode nozzle (14) sprays electrolyte, an electrolyte film (15) is formed on the surface of the anode workpiece (16), and an electrochemical etching is performed to generate a passivation film (17); the laser beam (2) penetrates the electrolyte film (15) and irradiates the surface of the anode workpiece (16); under the continuous irradiation of the high-energy pulsed laser, the surface of the anode workpiece (16) is vaporized and ionized to generate plasma (18); the plasma (18) rapidly expands to form high-temperature and high-pressure impact on the surface to remove the passivation film (17) on the surface of the anode workpiece (16); under the action of the high-conductivity plasma (18), the electrolyte impedance between the cathode nozzle (14) and the anode workpiece (16) is reduced; under the action of the laser-induced plasma, the coupling and synergistic effect of laser and electrolysis combined machining is realized, and the milling efficiency is improved.

4. The laser-induced plasma jet electrolysis combined high-efficiency milling method according to claim 3, characterized in that, comprising the following steps: 1) The anode workpiece (16) is fixed by using an anode clamp (19) and kept perpendicular to the laser (4); the laser beam (2) spot is located on the surface of the anode workpiece (16) by adjusting the Z-axis moving platform (103); the electrolyte pipeline (803) with the cathode nozzle (14) at the front end is fixed by using a jet fixing plate (7), and the horizontal distance between the laser beam (2) and the cathode nozzle (14) and the vertical distance between the anode workpiece (16) and the cathode nozzle (14) are adjusted; 2) The laser processing parameters are set, including laser power, spot position and electrolytic processing time; the milling movement is realized by the X-axis moving platform (101); the electrolytic power supply (21) provides the electrolytic processing voltage between the anode and the cathode, and the electrolytic processing parameters are set, including electrolytic voltage, duty cycle, pulse frequency and laser processing time; 3) Before processing, the gear pump (10) is started, and after a stable jet is formed at the cathode nozzle (14), the electrolyte film (15) is adjusted by adjusting the electrolyte flow rate; the electrolytic power supply (21) and the laser power supply (5) are turned on, and the milling processing program of the three-dimensional moving platform (1) is started to realize laser-induced plasma jet electrolytic processing; at this time, the anode workpiece (16) realizes material removal under the combined action of laser ablation, plasma impact and electrochemical etching; During the processing, the anode workpiece (16) undergoes material phase change under the action of laser ablation, and the anode workpiece (16) in the processing area is vaporized and generates plasma (18); the plasma (18) rapidly expands and generates a shock wave to rapidly remove the passivation film, thereby preventing the passivation film (17) from further accumulating, so that the processing process continues and high-efficiency milling is realized; 5) When the milling movement track is completed, the electrolytic power supply (21), the laser power supply and the gear pump (10) are turned off, the anode workpiece (16) is unloaded, and the processing is completed. The thickness of the electrolyte film (15) is less than 0.2 mm.

5. A laser-induced plasma jet electrolysis hybrid high efficiency milling method according to claim 4, characterized in that, a spot diameter of the laser beam (2) is 10 µm <60 µm; an output power of the laser (4) is greater than 50 W.​ 6. A laser induced plasma jet electrolytic hybrid high efficiency milling method according to claim 4, wherein, ​

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