A micro-displacement adjustment mechanism with adjustable reduction ratio

Abstract

The present invention discloses a micro-displacement adjustment mechanism with adjustable reduction ratio, comprising a main frame and a multiplication adjustment platform, an output platform, a zoom flexible beam and an input transmission mechanism linearly arranged in sequence within the main frame. The two sides of the multiplication adjustment platform are flexibly connected to the main frame through symmetrically arranged adjustment guide beams to guide linear single-axis output. The output platform and the multiplication adjustment platform are connected through output guide flexible beams. The two ends of the zoom flexible beam are flexibly connected to the output platform and the input transmission mechanism respectively. The length of the zoom flexible beam is s and the zoom coefficient R≈6Δx / 5s output in the longitudinal axis direction, Δx is the deviation displacement of one end of the zoom flexible beam; the adjustment mechanism has a micro-displacement adjustment output function, an adjustable reduction ratio, a wide adjustment range, strong practicality, a compact overall structure, a reasonable layout, and a high cost-effectiveness ratio, and is suitable for being widely used in the field of low-cost fine-tuning.

Description

Technical Field

[0001] The present invention relates to the technical field of micro-adjustment mechanisms for mechanical elements of small precision equipment or optical micro-motor systems, and in particular to a micro-displacement adjustment mechanism with adjustable reduction ratio. Background Art

[0002] With the rapid development of modern science and technology, the requirements for micromachining and manufacturing, microassembly, and micro-electromechanical (MEMS) technologies are becoming increasingly stringent, leading to increasingly in-depth research, now reaching the nanometer level. High-precision micro-positioning and micro-adjustment technologies are required in fields such as fiber optic docking, laser processing, and micro-motor system development.

[0003] Micro-adjustment and micro-positioning platforms are the actuators of micro-positioning systems, mainly consisting of a drive part and a mechanical transmission part. Existing micro-displacement adjustment mainly uses precision threads or flexible hinges to achieve motion transmission and guidance. Precision threads achieve motion transmission and guidance, and micro-displacement adjustment can be achieved manually or electrically at the micron level. However, since the micro-displacement adjustment system is composed of multiple components, there are gaps and friction between the moving parts, resulting in low resolution and low micro-displacement adjustment accuracy. If sensors are used to achieve closed-loop feedback, micron-level positioning accuracy and resolution can be achieved, but this will significantly increase the cost of the device, limiting its application and promotion. The existing new transmission mechanism based on flexible hinges can achieve micro-displacement adjustment with nanometer-level resolution by cooperating with piezoelectric ceramic drives. However, the adjustment range of the piezoelectric-driven micro-displacement adjustment platform is very limited, and an external control system and power supply system are required, making the device larger and more expensive, thus limiting its promotion and application in fields with high cost requirements. Summary of the Invention

[0004] The purpose of the present invention is to overcome the defects of the prior art and provide a micro-displacement adjustment mechanism with adjustable reduction factor to solve the problems raised in the above background technology.

[0005] In order to achieve the above object, the technical solution of the present invention is as follows:

[0006] A micro-displacement adjustment mechanism with adjustable reduction ratio includes a main frame of an integrated structure and a linear arrangement in the main frame.

[0007] The multiple adjustment platform is used for multiple preset input and is located at one end of the main frame. Its two sides are flexibly connected to the main frame through symmetrically arranged adjustment guide beams to guide the linear single-axis output;

[0008] The output platform is located between the multiple adjustment platform and the input transmission mechanism, and is used to output the longitudinal displacement after the multiple adjustment is reduced. The output platform is connected to the multiple adjustment platform through an output guide flexible beam. The output guide flexible beam is arranged horizontally and is used to longitudinally guide the output and transmit the multiple adjustment displacement;

[0009] A scaling flexible beam, one end of which is flexibly connected to the output platform and the other end of which is flexibly connected to the input transmission mechanism, is used to achieve input multiple reduction and reversal. Its length is s, and the scaling coefficient of the scaling flexible beam output in the longitudinal direction is R≈6Δx / 5s, where Δx is the deviation displacement of one end of the scaling flexible beam;

[0010] The input transmission mechanism includes an input transmission platform and a first transmission guide beam and a second transmission guide beam for guiding and transmitting lateral displacement. The first transmission guide beam and the second transmission guide beam are respectively located on both sides of the input transmission platform and are respectively connected to the main frame and the input transmission platform.

[0011] Preferably, longitudinal guide grooves are respectively provided on the two side surfaces of the input transmission platform, and the two guide grooves are staggered on the input transmission platform. The groove depths of the two are the same and are greater than the width of the input transmission platform / 2. One end portion of the first transmission guide beam and the second transmission guide beam are flexibly connected to the bottom of the two guide grooves respectively.

[0012] Further preferably, the adjustment guide beam is a double parallel flexible beam or a straight circular flexible beam.

[0013] Further preferably, the magnification adjustment platform is connected to a magnification adjustment micrometer located outside the main frame for manual input, and the magnification adjustment micrometer is a screw micrometer with micron-level feed displacement.

[0014] Further preferably, the input transmission platform is connected to an input micrometer or a precision motor located outside the main frame to input displacement, and the input displacement step is on the order of 10 μm.

[0015] Alternatively, the scaling flexible beam is tilted longitudinally and preset with an initial displacement x0, then Δx = x1 + x0, where x1 is the lateral input displacement of the multiple adjustment platform.

[0016] Alternatively, the scaling flexible beam is set parallel to the longitudinal direction, then Δx = x1, where x1 is the multiple adjustment of the lateral input displacement of the platform.

[0017] Compared with the prior art, the micro-displacement adjustment mechanism of the present invention has the following beneficial effects:

[0018] The micro-displacement adjustment mechanism realizes the transmission guidance and motion transformation of the initial displacement and input displacement through a flexible hinge. It has the characteristics of no gap, no friction, no need for lubrication, compact structure and high precision, and can realize low-cost and high-precision micro-nano displacement adjustment. The adjustment mechanism supports large-stroke input of precision motors and input micrometers, and the input displacement stroke can be greater than that of piezoelectric ceramics. The input displacement is transformed through the scaling flexible beam connected to the output platform, providing a micro-displacement output perpendicular to the input displacement direction of the output platform by more than 50 times. The output platform is also flexibly connected to the multiplication adjustment platform. The multiplication adjustment platform inputs a lateral input displacement in the opposite direction of the input displacement, so that the scaling flexible beam obtains an initial deformation. This initial deformation determines the reduction multiple of the output platform. By controlling the initial displacement of the input, the reduction multiple can be manually adjusted. Therefore, the adjustment mechanism has a micro-displacement reduction adjustment output function, and the reduction multiple is adjustable, the adjustment range is wide, and the practicality is strong. The overall structure of the mechanism is compact, the layout is reasonable, and the cost performance is high. It is suitable for wide application in the field of low-cost fine-tuning. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 Schematic diagram of the structure of the micro-displacement adjustment mechanism of the first embodiment of the present invention;

[0020] Figure 2 Schematic diagram of the structure of the micro-displacement adjustment mechanism of the second embodiment of the present invention;

[0021] Figure 3 This is a deformation simulation diagram of the micro-displacement adjustment mechanism of Example 1 of the present invention under a 0.5mm lateral input displacement (the scaled flexible beam is arranged parallel to the longitudinal direction);

[0022] Figure 4 Located in Figure 3 Deformation simulation diagram of the micro-displacement adjustment mechanism under the state of 1mm input displacement multiple reduction under multiple adjustment input;

[0023] Figure 5 This is a deformation simulation diagram of the micro-displacement adjustment mechanism in the first embodiment of the present invention under the initial displacement x0 design and the output state of the 1mm input displacement multiple reduction (scaling the flexible beam tilt setting);

[0024] Figure 6 Deformation simulation diagram of the micro-displacement adjustment mechanism of the first embodiment of the present invention under the state of outputting a 1mm input displacement with a lateral input displacement of -0.5mm;

[0025] Figure 7 This is a deformation simulation diagram of the micro-displacement adjustment mechanism of Example 2 of the present invention under the state of 1mm input multiple reduction output (the scaled flexible beam is arranged parallel to the longitudinal direction);

[0026] Figure 81 and 2 are input-output scaling relationship curves corresponding to three adjustment multiples of the input Δx of the micro-displacement adjustment mechanism of the first embodiment of the present invention with an initial displacement x0.

[0027] In the figure: 1. Main frame; 2. Magnification adjustment micrometer; 3. Magnification adjustment platform; 31. Adjustment guide beam; 4. 4a. Output platform; 5. Zooming flexible beam; 6. Transmission mechanism; 61. Transmission flexible beam; 62. Transmission platform; 63. Guide flexible beam; 6a. Input transmission mechanism; 62a. Input transmission platform; 61a. First transmission guide beam; 63a. Second transmission guide beam; 7. Input micrometer; 8. Input platform; 9. Output guide flexible beam. DETAILED DESCRIPTION

[0028] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only the best embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0029] Example 1, as Figure 1 The micro-displacement adjustment mechanism with adjustable zoom factor is formed by wire-cutting electric discharge of duralumin and comprises a main frame 1, a zoom adjustment platform 3, an output platform 4, a zoom flexible beam 5, and an input transmission mechanism 6a linearly arranged in sequence within the main frame 1.

[0030] Among them, the magnification adjustment micrometer head 2 is located at one end outside the main frame 1, which is connected to the magnification adjustment micrometer head 2 located outside the main frame 1 for manual input. The magnification adjustment micrometer head 2 is preferably a screw micrometer head with micron-level feed displacement to obtain adjustment and output with an adjustment range of 0-20μm and a resolution of nanometers. It is connected to the magnification adjustment platform 3 to input the lateral input displacement x1 along the X-axis direction, wherein the lateral input displacement along the positive direction of the X-axis is x1, and the lateral input displacement along the negative direction of the X-axis is - x1. In the design and processing of the mechanism, the scaling flexible beam 5 can be set parallel to the Z axis, then the scaling adjustment only provides a lateral input along the positive direction of the X axis, and the scaling flexible beam 5 outputs a scaling coefficient R≈6Δx / 5s in the Z axis direction, Δx=x1, that is, under the lateral input displacement x1, the upper end of the scaling flexible beam 5 has a deviation displacement of Δx; the scaling flexible beam 5 can also be preset with a certain inclination, that is, it is set at a certain angle along the Z axis, which is equivalent to the upper end of the scaling flexible beam 5 having an initial displacement x0, and the micro-displacement adjustment mechanism has an original scaling multiple output. When the lateral input displacement x1 is performed, the upper end of the scaling flexible beam 5 has a deviation displacement of x1+ x0, and the scaling coefficient R≈6Δx / 5s =6(x1+ x0) / 5s output in the Z axis direction, x1+ x0=Δx;

[0031] The lateral input displacement x1 is transmitted to the output platform 4 through the output guide flexible beam 9. Since the output guide flexible beam 9 is arranged parallel to the X-axis, the output platform 4 also has a lateral input displacement x1 under its drive, and forms a lateral input displacement x1 at one end of the scaling flexible beam 5 connected to it. In the multiple pre-adjustment state, the micro-displacement adjustment mechanism is in a no-input state. Therefore, the other end of the scaling flexible beam 5 is connected to the input transmission mechanism 6a and is in a fixed-point holding state; the linear output of the multiple adjustment platform 3 along the unidirectional X-axis is guided, and it is flexibly connected to the main frame 1 through the adjustment guide beams 31 symmetrically arranged on both sides, as shown in FIG. Figure 1 and Figure 2 As shown, the adjustment guide beam 31 can be a double parallel flexible beam or a straight circular flexible beam. The double parallel flexible beam has greater rigidity in the Z-axis direction and better single-axis transmission accuracy. In order to simplify the overall size of the main frame 1 and meet certain adjustment range requirements, adjustment slots are symmetrically provided on both sides of the multiple adjustment platform 3. One end of the adjustment guide beam 31 is located in the adjustment slot and flexibly connected to the bottom of the slot, so as to obtain a sufficient length of the adjustment guide beam 31.

[0032] The other end of the main frame 1 is provided with an input source to be adjusted, such as an input micrometer 7 or a precision motor. The input displacement step size is preferably in the order of 10 μm, the reduction factor is adjustable and is between 50-1000, the adjustment range is between 0-20 μm, and the resolution is at the nanometer level. The input source is connected to the input transmission mechanism 6a to input an input displacement -x along the -X-axis direction. The input displacement -x is guided and transmitted by the input transmission mechanism 6a and transmitted losslessly to the other end of the scaling flexible beam 5 connected thereto. The scaling flexible beam 5 is arranged along the Z-axis or at a certain angle to the Z-axis. The input transmission mechanism 6a drives the other end of the scaling flexible beam 5 to perform a micro-displacement -x. Since the combined stiffness of the output guide flexible beam 9 and the adjustment guide beam 31 along the X-axis is much greater than the stiffness of the scaling flexible beam 5 along the X-axis, the tendency of the output platform 4 to move along the X-axis is much smaller than that in the Z-axis. In the input-output state, the output platform 4 has only a very small parasitic displacement in the X-axis direction. After the scaling flexible beam 5 scales the input displacement -x, the output platform 4 outputs an adjustment displacement z along the Z-axis direction. , where the scaling factor R≈6 Δx / 5s, s is the length of the scaled flexible beam 5;

[0033] Specifically, refer again to Figure 1 The input transmission mechanism 6a in this embodiment includes an input platform 8 and a transmission mechanism 6. In order to make full use of the internal space of the main frame 1 to obtain the widest adjustment range, the transmission mechanism 6 includes an L-shaped transmission platform 62, a transmission flexible beam 61 flexibly connecting the input platform 8 and the transmission platform 62, and a guide flexible beam 63 guiding the transmission platform 62. The transmission flexible beam 61 and the guide flexible beam 63 are arranged orthogonally. The transmission flexible beam 61 is arranged along the X-axis and is used to guide the single-axis input along the -X-axis direction. It is respectively connected to the longitudinal sub-platform and the input source of the transmission platform 62. The transmission flexible beam 61 is a double parallel flexible beam, which is the same as the output guide flexible beam 9. In order to simplify the length of the main frame 1 and ensure a certain structural strength, one end of it can be connected by an embedded connection. For specific methods, refer to Figure 1 As shown, in order to meet the length design requirements and the corresponding output range requirements, similarly, in order to meet a wider input range, the transmission flexible beam 61 needs to have sufficient length, one end of which is connected to the inner side of the horizontal sub-platform, and the other end is connected to one side of the main frame 1, making full use of the width space of the main frame 1. The transmission flexible beam 61 is preferably a double parallel flexible beam to guide the displacement input in the X-axis direction;

[0034] More importantly, the length s of the scaling flexible beam 5 is the focus of the design, and its length s determines the adjustment range. In order to obtain a scaling flexible beam 5 of sufficient length within the limited width of the main frame 1, one end of the scaling flexible beam 5 is connected to the connecting foot of the output platform 4 located on one side of the main frame 1, and the other end is connected to the horizontal sub-platform located on the other side of the main frame 1. When there is no multiple adjustment and no input, the scaling flexible beam 5 maintains the initial parallel Z-axis state or has a preset inclination state.

[0035] like Figure 3-Figure 6 The micro-displacement adjustment mechanism of this embodiment is shown in the simulation diagram of the use process, wherein Figure 3-Figure 4 For the input and output simulation when the flexible beam 5 is set parallel to the Z axis, Figure 3 As shown, first preset the adjustment multiple and input the lateral input displacement x1 along the X-axis, that is, the DISPLACMENT X-axis displacement is 0.5mm. The flexible beam 5 is arranged parallel to the Z-axis, x1=Δx. Then input the input displacement to be reduced and adjusted -x, that is, set the DISPLACMENT2 -X-axis displacement to 1mm. The output result is as follows Figure 4 As shown in the result data, it can be seen that the displacement of the output platform 4 along the Z axis is 44μm, which reduces the input displacement of 1mm by about 22.7 times. The scaling factor R is equal to 44e-3. The deformation state of each flexible beam in the adjustment mechanism is as follows Figure 4 As shown, in the input and output state, the parasitic displacement of the output platform 4 in the X-axis direction can be ignored; Figure 5-Figure 6 This is the input and output simulation of the scaling flexible beam 5 when it is tilted. The scaling flexible beam 5 is tilted so that its upper end has an initial deviation displacement x0. The micro-displacement adjustment mechanism is in the initial non-adjustment input state. The input displacement to be reduced is 1mm. The output platform 4 outputs 30.68μm along the Z axis, and the reduction factor is 33. The simulation results are as follows: Figure 5 As shown, when the preset adjustment magnification is set, the magnification adjustment micrometer head 2 inputs -0.5mm, and the input displacement to be reduced is 1mm, the output platform 4 outputs 30.68μm along the Z-axis direction, and the reduction magnification is 55.

[0036] For example Figure 8 As shown in the input-output relationship curve, the horizontal axis is the input displacement |-x|, and the vertical axis is the output adjustment displacement. In the micro-displacement adjustment mechanism with the preset initial displacement x0 of the scaling flexible beam 5, in the state of no multiplication adjustment input, that is, when the multiplication adjustment micrometer head 2 is in the initial position, the input-output relationship is as follows: Figure 6 As shown by the blue line, the zoom factor is 33 at this time. When the zoom adjustment micrometer head 2 is pushed forward 500μm, the input and output relationship is as follows: Figure 6 As shown by the red line in the middle, the zoom factor is 23 at this time, and the zoom adjustment micrometer head 2 is pulled back 500μm. The input and output relationship is as follows Figure 6 As shown by the green line, the zoom factor is 55. The corresponding reduction factor (ie, the inverse of the zoom factor) can also be calculated.

[0037] Example 2, as Figure 2 The embodiment 2 shows a micro-displacement adjustment mechanism with an adjustable reduction factor. Compared with the embodiment 1, the difference between the embodiment 2 and the embodiment 1 lies only in the input transmission mechanism 6a. The input transmission mechanism 6a of the embodiment 2 has a higher degree of integration, making the overall size of the adjustment mechanism more compact. Therefore, only the input transmission mechanism 6a of this embodiment will be described below, and the remaining structures and implementation methods will not be repeated.

[0038] Refer again Figure 2 The input transmission mechanism 6a includes an input transmission platform 62a, a first transmission guide beam 61a and a second transmission guide beam 63a. The first transmission guide beam 61a and the second transmission guide beam 63a are located on both sides of the input transmission platform 62a and are respectively connected to the side surfaces of the main frame 1 and the input transmission platform 62a. The first transmission guide beam 61a and the second transmission guide beam 63a have both lateral displacement guiding and transmission functions. In order to obtain a wider adjustment range, the input transmission platform 62a is formed into a folded structure by cutting to form guide grooves that are staggered on the two side surfaces of the input transmission platform 62a, and the first transmission guide beam 61a and the second transmission guide beam 63a are arranged in a staggered symmetrical manner. One end of the first transmission guide beam 61a and the second transmission guide beam 63a is inserted into and connected to the bottom of the guide groove. The groove depth of the two guide grooves is the same and is greater than the width / 2 of the transmission platform 62. In this embodiment, the first transmission guide beam 61a and the second transmission guide beam 63a are preferably double parallel flexible beams.

[0039] like Figure 7 The input and output simulation diagram of the micro-displacement adjustment mechanism of this embodiment is the same as that of the first embodiment. First, the adjustment multiple is preset. The lateral input displacement x1 along the X direction is input. The flexible beam 5 is arranged parallel to the Z axis. x1 = Δx, that is, the DISPLACEMENT X-direction displacement is 0.5mm. Then the input displacement to be adjusted is input -x, that is, the DISPLACEMENT2-X-direction displacement is set to 1mm. The output result is as follows Figure 5 As shown in the result data, it can be seen that the displacement of the output platform 4a along the Z direction is 5.6μm, which reduces the input displacement of 1mm by about 179 times. The scaling factor R is equal to 5.6e-3. The length of the scaling flexible beam 5 in the second embodiment is shorter than that in the first embodiment. The scaling factor R is inversely proportional to the change in the length of the scaling flexible beam 5. The deformation state of each flexible beam in the adjustment mechanism is shown in FIG. Figure 5 As shown, in the input and output state, the output platform 4a can be ignored in the X-axis direction.

[0040] The directional words such as "front", "back", "up", "down", "end", "horizontal", and "vertical" mentioned in this article are based on the Figure 1-Figure 5 The coordinate or orientation relationship shown in the figure, where "horizontal" corresponds to the X-axis in the figure and "vertical" corresponds to the Z-axis in the figure. These terms are mainly used to better describe the present invention and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation; in addition, the terms "first" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance;

[0041] Furthermore, some of the above terms may be used to express other meanings besides indicating a direction or positional relationship. For example, the terms "on" and "in" may also be used to express a dependency or connection relationship in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in the present invention based on the specific circumstances.

[0042] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A micro-displacement adjustment mechanism with adjustable reduction ratio, characterized by: It includes a main frame of an integrated structure and linearly arranged in the main frame. A multiple adjustment platform, used for multiple preset input, is located at one end of the main frame, and its two sides are flexibly connected to the main frame through symmetrically arranged adjustment guide beams to guide linear single-axis output; An input transmission mechanism, comprising an input transmission platform and a first transmission guide beam and a second transmission guide beam for guiding and transmitting lateral displacement, wherein the first transmission guide beam and the second transmission guide beam are respectively located on either side of the input transmission platform and are respectively connected to the main frame and the input transmission platform; The output platform is located between the multiplication adjustment platform and the input transmission mechanism, and is used to output the longitudinal displacement after the reduction adjustment. The output platform is connected to the multiplication adjustment platform via an output guide flexible beam. The output guide flexible beam is arranged transversely and is used to longitudinally guide the output and transmit the multiplication adjustment displacement. A scaling flexible beam, one end of which is flexibly connected to the output platform and the other end of which is flexibly connected to the input transmission mechanism, is used to achieve input multiple reduction and reversal. Its length is s, and the scaling coefficient R≈6Δx / 5s output by the scaling flexible beam in the longitudinal axis direction, Δx is the deviation displacement of one end of the scaling flexible beam.

2. The micro-displacement adjustment mechanism with adjustable reduction ratio according to claim 1, characterized in that: A longitudinal guide groove is respectively provided on the two side surfaces of the input transmission platform. The two guide grooves are staggered on the input transmission platform. The groove depth of the two is the same and is greater than the width of the input transmission platform / 2. One end portion of the first transmission guide beam and the second transmission guide beam is flexibly connected to the groove bottom of the two guide grooves respectively.

3. The micro-displacement adjustment mechanism with adjustable reduction ratio according to claim 2, characterized in that: The adjusting guide beam is a double parallel flexible beam or a straight circular flexible beam.

4. The micro-displacement adjustment mechanism with adjustable reduction ratio according to any one of claims 1 to 3, characterized in that: The magnification adjustment platform is connected to a magnification adjustment micrometer located outside the main frame for manual input, and the magnification adjustment micrometer is a screw micrometer with micron-level feed displacement.

5. The micro-displacement adjustment mechanism with adjustable reduction ratio according to claim 4, characterized in that: The input transmission platform is connected to an input micrometer or a precision motor located outside the main frame to input displacement, and the input displacement step size is on the order of 10 μm.

6. The micro-displacement adjustment mechanism with adjustable reduction ratio according to claim 1, characterized in that: The scaling flexible beam is arranged to be tilted longitudinally, and has a preset initial displacement x0, then Δx= x1+x0, where x1 is the lateral input displacement of the multiple adjustment platform.

7. The micro-displacement adjustment mechanism with adjustable reduction ratio according to claim 1, characterized in that: The scaling flexible beam is arranged parallel to the longitudinal direction, then Δx= x1, where x1 is the lateral input displacement of the multiple adjustment platform.

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