A dual-mode high-precision micromechanical gyroscope structure with annular topological comb teeth.

Abstract

This invention relates to micromechanical vibratory gyroscopes, specifically a dual-mode high-precision micromechanical gyroscope structure with a ring-shaped topological comb. This invention solves the problem of poor accuracy in existing micromechanical vibratory gyroscopes. A dual-mode high-precision micromechanical gyroscope structure with a ring-shaped topological comb includes a glass substrate, a resonator portion, and an electrode portion. The resonator portion includes a cylindrical central anchor point, a ring-shaped resonant mass, eight spoke-shaped inner elastic support beams, and eight spoke-shaped outer elastic support beams. The electrode portion includes eight pairs of arc-shaped inner electrodes, eight pairs of arc-shaped outer electrodes, eight pairs of single-sided comb-shaped electrodes A, B, C, D, E, and F. This invention is applicable to fields such as weapon guidance, aerospace, biomedicine, and consumer electronics.

Description

Technical Field

[0001] This invention relates to micromechanical vibrating gyroscopes, specifically a dual-mode high-precision micromechanical gyroscope structure with annular topological comb teeth. Background Technology

[0002] Micromechanical vibrating gyroscopes are angular velocity sensing devices based on the Coriolis effect. They possess advantages such as small size, light weight, low power consumption, long lifespan, mass production capability, and low cost, and are widely used in weapon guidance, aerospace, biomedicine, and consumer electronics, showing extremely broad application prospects. The specific working principle of a micromechanical vibrating gyroscope is as follows: When there is no angular velocity input, the resonator of the micromechanical vibrating gyroscope operates in the driving mode, and the output of the micromechanical vibrating gyroscope is zero. When there is an angular velocity input, the resonator of the micromechanical vibrating gyroscope operates in the detection mode, and the micromechanical vibrating gyroscope measures the input angular velocity in real time. However, practice shows that existing micromechanical vibrating gyroscopes generally suffer from poor accuracy due to limitations in the geometry of their resonator and the structure of their electrodes. Therefore, it is necessary to invent a dual-mode high-precision micromechanical gyroscope structure with a ring-shaped topological comb to solve the problem of poor accuracy in existing micromechanical vibrating gyroscopes. Summary of the Invention

[0003] To address the problem of poor accuracy in existing micromechanical vibration gyroscopes, this invention provides a dual-mode high-precision micromechanical gyroscope structure with annular topological comb teeth.

[0004] This invention is achieved using the following technical solution:

[0005] A dual-mode high-precision micromechanical gyroscope structure with ring-shaped topological comb teeth includes a glass substrate, a resonator part, and an electrode part;

[0006] The resonator includes a cylindrical central anchor point, a circular resonant mass, eight spoke-shaped inner elastic support beams, and eight spoke-shaped outer elastic support beams.

[0007] The electrode portion includes eight pairs of arc-shaped inner layer electrodes, eight pairs of arc-shaped outer layer electrodes, eight pairs of single-sided comb-shaped electrodes A, eight pairs of single-sided comb-shaped electrodes B, eight pairs of single-sided comb-shaped electrodes C, eight pairs of single-sided comb-shaped electrodes D, eight pairs of single-sided comb-shaped electrodes E, and eight pairs of single-sided comb-shaped electrodes F.

[0008] The cylindrical central anchor point is bonded to the upper surface of the glass substrate;

[0009] A circular resonant mass is placed on the upper surface of a glass substrate, and the center line of the circular resonant mass coincides with the center line of the cylindrical central anchor point.

[0010] All eight spoke-shaped inner elastic support beams are located between the cylindrical central anchor point and the annular resonant mass, and the eight spoke-shaped inner elastic support beams are symmetrically distributed around the center line of the cylindrical central anchor point.

[0011] Each spoke-shaped inner elastic support cantilever beam consists of a straight beam segment A, a pair of U-shaped beam segments, and a straight beam segment B. The tail end of the straight beam segment A is fixed to the side of the cylindrical central anchor point. The pair of U-shaped beam segments together enclose a closed rounded rectangle, and the tail ends of the pair of U-shaped beam segments are fixed to the head end of the straight beam segment A. The tail end of the straight beam segment B is fixed to the head end of the pair of U-shaped beam segments respectively. The head end of the straight beam segment B is fixed to the inner side of the annular resonant mass.

[0012] All eight spoke-shaped outer elastic support beams are located outside the annular resonant mass, and the eight spoke-shaped outer elastic support beams are symmetrically distributed around the center line of the cylindrical central anchor point.

[0013] Each spoke-shaped outer elastic support cantilever beam consists of a straight beam segment C, a pair of double-sided comb-tooth beam segments A, a pair of double-sided comb-tooth beam segments B, and a pair of double-sided comb-tooth beam segments C. The tail end of the straight beam segment C is fixed to the outer side of the annular resonant mass. The pair of double-sided comb-tooth beam segments A are symmetrically fixed to the two sides of the straight beam segment C. The pair of double-sided comb-tooth beam segments B are symmetrically fixed to the two sides of the straight beam segment C, and the pair of double-sided comb-tooth beam segments B are located outside the pair of double-sided comb-tooth beam segments A. The pair of double-sided comb-tooth beam segments C are symmetrically fixed to the two sides of the straight beam segment C, and the pair of double-sided comb-tooth beam segments C are located outside the pair of double-sided comb-tooth beam segments B.

[0014] Eight pairs of arc-shaped inner electrodes are bonded to the upper surface of the glass substrate, and the eight pairs of arc-shaped inner electrodes are symmetrically distributed around the center line of the cylindrical central anchor point; the eight pairs of arc-shaped inner electrodes are symmetrically distributed on both sides of the eight straight beam segments B, and the outer surfaces of the eight pairs of arc-shaped inner electrodes together with the inner surfaces of the annular resonant mass constitute eight pairs of microcapacitors A.

[0015] Eight pairs of arc-shaped outer electrodes are bonded to the upper surface of the glass substrate, and the eight pairs of arc-shaped outer electrodes are symmetrically distributed around the center line of the cylindrical central anchor point; the eight pairs of arc-shaped outer electrodes are symmetrically distributed on both sides of the eight straight beam segments C, and the inner surfaces of the eight pairs of arc-shaped outer electrodes together with the outer surfaces of the annular resonant mass constitute eight pairs of microcapacitors B.

[0016] Eight pairs of single-sided comb-shaped electrodes A are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes A are symmetrically distributed around the center line of the cylindrical central anchor point; the eight pairs of single-sided comb-shaped electrodes A are embedded one-to-one with the inner side of eight pairs of double-sided comb-shaped beam segments A, and the eight pairs of single-sided comb-shaped electrodes A and the eight pairs of double-sided comb-shaped beam segments A constitute eight pairs of microcapacitors C.

[0017] Eight pairs of single-sided comb-shaped electrodes B are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes B are symmetrically distributed around the center line of the cylindrical central anchor point; the eight pairs of single-sided comb-shaped electrodes B are embedded one-to-one with the outer side of the eight pairs of double-sided comb-shaped beam segments A, and the eight pairs of single-sided comb-shaped electrodes B and the eight pairs of double-sided comb-shaped beam segments A form eight pairs of microcapacitors D.

[0018] Eight pairs of single-sided comb-shaped electrodes C are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes C are symmetrically distributed around the center line of the cylindrical central anchor point; the eight pairs of single-sided comb-shaped electrodes C are embedded one-to-one with the inner side of the eight pairs of double-sided comb-shaped beam segments B, and the eight pairs of single-sided comb-shaped electrodes C and the eight pairs of double-sided comb-shaped beam segments B constitute eight pairs of microcapacitors E.

[0019] Eight pairs of single-sided comb-shaped electrodes D are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes D are symmetrically distributed around the center line of the cylindrical central anchor point; the eight pairs of single-sided comb-shaped electrodes D are embedded one-to-one with the outer side of the eight pairs of double-sided comb-shaped beam segments B, and the eight pairs of single-sided comb-shaped electrodes D and the eight pairs of double-sided comb-shaped beam segments B constitute eight pairs of microcapacitors F.

[0020] Eight pairs of single-sided comb-shaped electrodes E are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes E are symmetrically distributed around the center line of the cylindrical central anchor point; the eight pairs of single-sided comb-shaped electrodes E are embedded one-to-one with the inner side of the eight pairs of double-sided comb-shaped beam segments C, and the eight pairs of single-sided comb-shaped electrodes E and the eight pairs of double-sided comb-shaped beam segments C constitute eight pairs of microcapacitors G.

[0021] Eight pairs of single-sided comb-shaped electrodes F are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes F are symmetrically distributed around the center line of the cylindrical central anchor point; the eight pairs of single-sided comb-shaped electrodes F are correspondingly embedded on the outer side of the eight pairs of double-sided comb-shaped beam segments C, and the eight pairs of single-sided comb-shaped electrodes F and the eight pairs of double-sided comb-shaped beam segments C correspond to form eight pairs of microcapacitors H.

[0022] During operation, the first pair of arc-shaped inner layer electrodes, the fifth pair of arc-shaped inner layer electrodes, the first pair of arc-shaped outer layer electrodes, the fifth pair of arc-shaped outer layer electrodes, the first pair of single-sided comb-shaped electrodes A, the fifth pair of single-sided comb-shaped electrodes A, the first pair of single-sided comb-shaped electrodes B, the fifth pair of single-sided comb-shaped electrodes B, the first pair of single-sided comb-shaped electrodes C, the fifth pair of single-sided comb-shaped electrodes C, the first pair of single-sided comb-shaped electrodes D, the fifth pair of single-sided comb-shaped electrodes D, the first pair of single-sided comb-shaped electrodes E, the fifth pair of single-sided comb-shaped electrodes E, the first pair of single-sided comb-shaped electrodes F, and the fifth pair of single-sided comb-shaped electrodes F all serve as driving mode control electrodes. The first pair of microcapacitors A, the fifth pair of microcapacitors A, the first pair of microcapacitors B, the fifth pair of microcapacitors B, the first pair of microcapacitors C, the fifth pair of microcapacitors C, the first pair of microcapacitors D, the fifth pair of microcapacitors D, the first pair of microcapacitors E, the fifth pair of microcapacitors E, the first pair of microcapacitors F, the fifth pair of microcapacitors F, the first pair of microcapacitors G, the fifth pair of microcapacitors G, the first pair of microcapacitors H, and the fifth pair of microcapacitors H are all used as driving mode excitation capacitors. The second pair of arc-shaped inner electrodes, the sixth pair of arc-shaped inner electrodes, the second pair of arc-shaped outer electrodes, the sixth pair of arc-shaped outer electrodes, the second pair of single-sided comb-shaped electrodes A, the sixth pair of single-sided comb-shaped electrodes A, the second pair of single-sided comb-shaped electrodes B, the sixth pair of single-sided comb-shaped electrodes B, the second pair of single-sided comb-shaped electrodes C, the sixth pair of single-sided comb-shaped electrodes C, the second pair of single-sided comb-shaped electrodes D, the sixth pair of single-sided comb-shaped electrodes D, the second pair of single-sided comb-shaped electrodes E, the sixth pair of single-sided comb-shaped electrodes E, the second pair of single-sided comb-shaped electrodes F, and the sixth pair of single-sided comb-shaped electrodes F all serve as detection mode control electrodes. The third pair of arc-shaped inner electrodes, the seventh pair of arc-shaped inner electrodes, the third pair of arc-shaped outer electrodes, the seventh pair of arc-shaped outer electrodes, the third pair of single-sided comb-shaped electrodes A, the seventh pair of single-sided comb-shaped electrodes A, the third pair of single-sided comb-shaped electrodes B, the seventh pair of single-sided comb-shaped electrodes B, the third pair of single-sided comb-shaped electrodes C, the seventh pair of single-sided comb-shaped electrodes C, the third pair of single-sided comb-shaped electrodes D, the seventh pair of single-sided comb-shaped electrodes D, the third pair of single-sided comb-shaped electrodes E, the seventh pair of single-sided comb-shaped electrodes E, the third pair of single-sided comb-shaped electrodes F, and the seventh pair of single-sided comb-shaped electrodes F are all used as driving modal displacement measurement electrodes. The fourth pair of arc-shaped inner electrodes, the eighth pair of arc-shaped inner electrodes, the fourth pair of arc-shaped outer electrodes, the eighth pair of arc-shaped outer electrodes, the fourth pair of single-sided comb-shaped electrodes A, the eighth pair of single-sided comb-shaped electrodes A, the fourth pair of single-sided comb-shaped electrodes B, the eighth pair of single-sided comb-shaped electrodes B, the fourth pair of single-sided comb-shaped electrodes C, the eighth pair of single-sided comb-shaped electrodes C, the fourth pair of single-sided comb-shaped electrodes D, the eighth pair of single-sided comb-shaped electrodes D, the fourth pair of single-sided comb-shaped electrodes E, the eighth pair of single-sided comb-shaped electrodes E, the fourth pair of single-sided comb-shaped electrodes F, and the eighth pair of single-sided comb-shaped electrodes F are all used as electrodes for detecting modal displacement measurement.The sixteen pairs of driving mode control electrodes, sixteen pairs of detection mode control electrodes, sixteen pairs of driving mode displacement measurement electrodes, and sixteen pairs of detection mode displacement measurement electrodes are all connected to the control system via metal wires.

[0023] The specific working process is as follows: The control system generates a driving voltage signal, which is transmitted through metal wires to sixteen pairs of driving mode excitation capacitors. On the one hand, this causes the annular resonant mass to maintain a four-antinode oscillation with a circumferential wave number of 2 under the action of electrostatic force. On the other hand, it causes the eight spoke-shaped outer elastic support beams to vibrate linearly (the frequency of the linear vibration is the same as the frequency of the four-antinode oscillation). During the vibration process, the control system measures the displacement of the annular resonant mass and the eight spoke-shaped outer elastic support beams in real time through the sixteen pairs of driving mode displacement measuring electrodes, and controls the driving voltage signal in real time based on the measurement results. This ensures that the displacement amplitude of the annular resonant mass and the eight spoke-shaped outer elastic support beams remains constant, and that the annular resonant mass and the eight spoke-shaped outer elastic support beams vibrate at their resonant frequency points. When there is no angular velocity input, under the excitation of the sixteen pairs of driving mode excitation capacitors, the annular resonant mass undergoes in-plane four-antinode bending vibration in the driving mode, and the eight spoke-shaped outer elastic support beams undergo linear vibration (the frequency of the linear vibration is the same as the frequency of the four-antinode bending vibration). At this time, the sixteen pairs of detection mode displacement measuring electrodes are located at the nodes of the four-antinode bending vibration, and none of the sixteen pairs of detection mode displacement measuring electrodes generate a detection voltage signal. At this time, the output of the present invention is zero. When there is an angular velocity input, under the action of Coriolis force coupling, the annular resonant mass undergoes in-plane four-antinode bending vibration in the detection mode, and the eight spoke-shaped outer elastic support beams undergo linear vibration (the frequency of the linear vibration is the same as the frequency of the four-antinode bending vibration). At this time, the sixteen pairs of detection mode displacement measuring electrodes are located at the antinodes of the four-antinode bending vibration, and all sixteen pairs of detection mode displacement measuring electrodes generate a detection voltage signal, and the detection voltage signal is related to the input angular velocity. At this time, the control system calculates the input angular velocity in real time based on the detection voltage signal. In the above process, sixteen pairs of detection mode control electrodes are used to perform orthogonal control and force feedback control on the annular resonant mass and the eight spoke-shaped outer elastic support cantilever beams.

[0024] Based on the above process, the dual-mode high-precision micromechanical gyroscope structure with annular topological comb teeth described in this invention, through the adoption of a novel structure, possesses the following advantages: First, the resonant mass of this invention is equal in both working modes (driving mode and detection mode). This makes it easier to match the resonant frequencies of the two working modes (driving mode and detection mode) and achieves natural damping matching between the two working modes (driving mode and detection mode), thereby effectively improving accuracy. Second, the resonator of this invention adopts an annular topological comb tooth structure, which allows it to operate simultaneously in both pressure-film and sliding-film states (the annular resonant mass operates in pressure-film state, while the eight spoke-shaped outer elastic support beams operate in sliding-film state, with the sliding-film state exhibiting better linearity than the pressure-film state), further improving accuracy.

[0025] This invention effectively solves the problem of poor accuracy in existing micromechanical vibration gyroscopes and is applicable to fields such as weapon guidance, aerospace, biomedicine, and consumer electronics. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of the present invention.

[0027] Figure 2 yes Figure 1 A partial structural diagram.

[0028] Figure 3 This is a schematic diagram of the resonator part in this invention.

[0029] Figure 4 yes Figure 3 A partial structural diagram.

[0030] In the diagram: 101-Cylindrical central anchor point, 102-Annular resonant mass, 103-Straight beam segment A, 104-U-shaped beam segment, 105-Straight beam segment B, 106-Straight beam segment C, 107-Double-sided comb-shaped beam segment A, 108-Double-sided comb-shaped beam segment B, 109-Double-sided comb-shaped beam segment C, 201-Arc-shaped inner electrode, 202-Arc-shaped outer electrode, 203-Single-sided comb-shaped electrode A, 204-Single-sided comb-shaped electrode B, 205-Single-sided comb-shaped electrode A Electrode C, 206-Single-sided comb-shaped electrode D, 207-Single-sided comb-shaped electrode E, 208-Single-sided comb-shaped electrode F, 209-Block anchor point A, 210-Block anchor point B, 211-Block anchor point C, 212-Block anchor point D, 213-Block anchor point E, 214-Block anchor point F, 215-Block anchor point G, 216-Block anchor point H, 217-Block anchor point I, 218-Block anchor point J, 219-Block anchor point K, 220-Block anchor point L. Detailed Implementation

[0031] A dual-mode high-precision micromechanical gyroscope structure with ring-shaped topological comb teeth includes a glass substrate, a resonator part, and an electrode part;

[0032] The resonator includes a cylindrical central anchor point 101, a circular resonant mass 102, eight spoke-shaped inner elastic support beams, and eight spoke-shaped outer elastic support beams.

[0033] The electrode portion includes eight pairs of arc-shaped inner layer electrodes 201, eight pairs of arc-shaped outer layer electrodes 202, eight pairs of single-sided comb-shaped electrodes A203, eight pairs of single-sided comb-shaped electrodes B204, eight pairs of single-sided comb-shaped electrodes C205, eight pairs of single-sided comb-shaped electrodes D206, eight pairs of single-sided comb-shaped electrodes E207, and eight pairs of single-sided comb-shaped electrodes F208.

[0034] Among them, the cylindrical central anchor point 101 is bonded to the upper surface of the glass substrate;

[0035] A circular resonant mass 102 is placed on the upper surface of a glass substrate, and the center line of the circular resonant mass 102 coincides with the center line of the cylindrical central anchor point 101.

[0036] The eight spoke-shaped inner elastic support beams are all located between the cylindrical central anchor point 101 and the annular resonant mass 102, and the eight spoke-shaped inner elastic support beams are symmetrically distributed around the center line of the cylindrical central anchor point 101.

[0037] Each spoke-shaped inner elastic support cantilever beam is composed of a straight beam segment A103, a pair of U-shaped beam segments 104, and a straight beam segment B105. The tail end of the straight beam segment A103 is fixed to the side of the cylindrical central anchor point 101. The pair of U-shaped beam segments 104 together form a closed rounded rectangle, and the tail ends of the pair of U-shaped beam segments 104 are fixed to the head ends of the straight beam segment A103. The tail ends of the straight beam segment B105 are respectively fixed to the head ends of the pair of U-shaped beam segments 104. The head end of the straight beam segment B105 is fixed to the inner side of the annular resonant mass 102.

[0038] All eight spoke-shaped outer elastic support beams are located outside the annular resonant mass 102, and the eight spoke-shaped outer elastic support beams are symmetrically distributed around the center line of the cylindrical central anchor point 101.

[0039] Each spoke-shaped outer elastic support cantilever beam is composed of a straight beam segment C106, a pair of double-sided comb-tooth beam segments A107, a pair of double-sided comb-tooth beam segments B108, and a pair of double-sided comb-tooth beam segments C109. The tail end of the straight beam segment C106 is fixed to the outer side of the annular resonant mass 102. The pair of double-sided comb-tooth beam segments A107 are symmetrically fixed to both sides of the straight beam segment C106. The pair of double-sided comb-tooth beam segments B108 are symmetrically fixed to both sides of the straight beam segment C106, and the pair of double-sided comb-tooth beam segments B108 are located outside the pair of double-sided comb-tooth beam segments A107. The pair of double-sided comb-tooth beam segments C109 are symmetrically fixed to both sides of the straight beam segment C106, and the pair of double-sided comb-tooth beam segments C109 are located outside the pair of double-sided comb-tooth beam segments B108.

[0040] Eight pairs of arc-shaped inner electrodes 201 are bonded to the upper surface of the glass substrate, and the eight pairs of arc-shaped inner electrodes 201 are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of arc-shaped inner electrodes 201 are symmetrically distributed on both sides of the eight straight beam segments B105, and the outer surfaces of the eight pairs of arc-shaped inner electrodes 201 and the inner surfaces of the annular resonant mass 102 together constitute eight pairs of microcapacitors A.

[0041] Eight pairs of arc-shaped outer electrodes 202 are bonded to the upper surface of the glass substrate, and the eight pairs of arc-shaped outer electrodes 202 are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of arc-shaped outer electrodes 202 are symmetrically distributed on both sides of the eight straight beam segments C106, and the inner surfaces of the eight pairs of arc-shaped outer electrodes 202 and the outer surfaces of the annular resonant mass 102 together constitute eight pairs of microcapacitors B;

[0042] Eight pairs of single-sided comb-shaped electrodes A203 are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes A203 are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of single-sided comb-shaped electrodes A203 are embedded one-to-one with the inner side of the eight pairs of double-sided comb-shaped beam segments A107, and the eight pairs of single-sided comb-shaped electrodes A203 and the eight pairs of double-sided comb-shaped beam segments A107 constitute eight pairs of microcapacitors C.

[0043] Eight pairs of single-sided comb-shaped electrodes B204 are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes B204 are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of single-sided comb-shaped electrodes B204 are correspondingly embedded on the outside of the eight pairs of double-sided comb-shaped beam segments A107, and the eight pairs of single-sided comb-shaped electrodes B204 and the eight pairs of double-sided comb-shaped beam segments A107 correspond to each other to form eight pairs of microcapacitors D.

[0044] Eight pairs of single-sided comb-shaped electrodes C205 are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes C205 are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of single-sided comb-shaped electrodes C205 are embedded one-to-one with the inner side of the eight pairs of double-sided comb-shaped beam segments B108, and the eight pairs of single-sided comb-shaped electrodes C205 and the eight pairs of double-sided comb-shaped beam segments B108 constitute eight pairs of microcapacitors E.

[0045] Eight pairs of single-sided comb-shaped electrodes D206 are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes D206 are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of single-sided comb-shaped electrodes D206 are correspondingly embedded on the outside of the eight pairs of double-sided comb-shaped beam segments B108, and the eight pairs of single-sided comb-shaped electrodes D206 and the eight pairs of double-sided comb-shaped beam segments B108 correspond to form eight pairs of microcapacitors F;

[0046] Eight pairs of single-sided comb-shaped electrodes E207 are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes E207 are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of single-sided comb-shaped electrodes E207 are correspondingly embedded in the inner side of eight pairs of double-sided comb-shaped beam segments C109, and the eight pairs of single-sided comb-shaped electrodes E207 and the eight pairs of double-sided comb-shaped beam segments C109 correspond to form eight pairs of microcapacitors G.

[0047] Eight pairs of single-sided comb-shaped electrodes F208 are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes F208 are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of single-sided comb-shaped electrodes F208 are correspondingly embedded on the outside of the eight pairs of double-sided comb-shaped beam segments C109, and the eight pairs of single-sided comb-shaped electrodes F208 and the eight pairs of double-sided comb-shaped beam segments C109 correspond to form eight pairs of microcapacitors H.

[0048] The electrode portion further includes eight pairs of block anchor points A209, B210, C211, D212, E213, F214, G215, H216, I217, J218, K219, and L220; all eight pairs of block anchor points A209 are bonded to the upper surface of the glass substrate, and are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of block anchor points A209 are fixed one-to-one to the tail ends of the eight pairs of single-sided comb-shaped electrodes A203; the eight pairs of block anchor points... B210 are all bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points B210 are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of block anchor points B210 are fixed one-to-one to the head end of the eight pairs of single-sided comb-shaped electrodes A203; the eight pairs of block anchor points C211 are all bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points C211 are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of block anchor points C211 are fixed one-to-one to the tail end of the eight pairs of single-sided comb-shaped electrodes B204; the eight pairs of block anchor points D212 are all bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points D212 are symmetrically distributed around the center line of the cylindrical central anchor point 101 ... 2. Each pair of single-sided comb-shaped electrodes B204 is fixed to one-to-one with the first end of each pair of single-sided comb-shaped electrodes C205; each pair of block anchor points E213 is bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points E213 are symmetrically distributed around the center line of the cylindrical central anchor point 101; each pair of block anchor points E213 is fixed to one-to-one with the first end of each pair of single-sided comb-shaped electrodes C205; each pair of block anchor points G215 is bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points G214 are symmetrically distributed around the center line of the cylindrical central anchor point 101; each pair of block anchor points F214 is fixed to one-to-one with the first end of each pair of single-sided comb-shaped electrodes C205; each pair of block anchor points G215 is bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points G215 are symmetrically distributed around the center line of the cylindrical central anchor point 101; each pair of block anchor points G215 ... 15 are symmetrically distributed around the center line of the cylindrical central anchor point 101; eight pairs of block anchor points G215 are fixed one-to-one with the tail ends of eight pairs of single-sided comb-shaped electrodes D206; eight pairs of block anchor points H216 are all bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points H216 are symmetrically distributed around the center line of the cylindrical central anchor point 101; eight pairs of block anchor points H216 are fixed one-to-one with the head ends of eight pairs of single-sided comb-shaped electrodes D206; eight pairs of block anchor points I217 are all bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points I217 are symmetrically distributed around the center line of the cylindrical central anchor point 101; eight pairs of block anchor points I217 are fixed one-to-one with the tail ends of eight pairs of single-sided comb-shaped electrodes E207.Eight pairs of block anchor points J218 are bonded to the upper surface of the glass substrate, and are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of block anchor points J218 are fixed one-to-one to the head end of the eight pairs of single-sided comb-shaped electrodes E207; eight pairs of block anchor points K219 are bonded to the upper surface of the glass substrate, and are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of block anchor points K219 are fixed one-to-one to the tail end of the eight pairs of single-sided comb-shaped electrodes F208; eight pairs of block anchor points L220 are bonded to the upper surface of the glass substrate, and are symmetrically distributed around the center line of the cylindrical central anchor point 101; the eight pairs of block anchor points L220 are fixed one-to-one to the head end of the eight pairs of single-sided comb-shaped electrodes F208.

[0049] The heights of the cylindrical central anchor point 101, the annular resonant mass 102, the eight spoke-shaped inner elastic support beams, and the eight spoke-shaped outer elastic support beams are all consistent; the dimensions of the eight spoke-shaped inner elastic support beams are consistent; the dimensions of the eight spoke-shaped outer elastic support beams are consistent, and the lengths of the eight pairs of double-sided comb-shaped beam segments B108 are correspondingly greater than the lengths of the eight pairs of double-sided comb-shaped beam segments A107, and the lengths of the eight pairs of double-sided comb-shaped beam segments C109 are correspondingly greater than the lengths of the eight pairs of double-sided comb-shaped beam segments B108; the dimensions of the eight pairs of arc-shaped inner electrodes 201 are consistent; the dimensions of the eight pairs of arc-shaped outer electrodes 202 are consistent, and the inner surface area of ​​the eight pairs of arc-shaped outer electrodes 202 is correspondingly equal to the outer surface area of ​​the eight pairs of arc-shaped inner electrodes 201; the dimensions of the eight pairs of single-sided comb-shaped electrodes A203 are consistent; the dimensions of the eight pairs of single-sided comb-shaped electrodes B203 are consistent. The dimensions of the eight pairs of single-sided comb-shaped electrodes B204 are consistent, and the lengths of the eight pairs of single-sided comb-shaped electrodes A203 are each equal to the lengths of the eight pairs of single-sided comb-shaped electrodes C205; the dimensions of the eight pairs of single-sided comb-shaped electrodes C205 are consistent, and the lengths of the eight pairs of single-sided comb-shaped electrodes C205 are each greater than the lengths of the eight pairs of single-sided comb-shaped electrodes B204; the dimensions of the eight pairs of single-sided comb-shaped electrodes D206 are consistent, and the lengths of the eight pairs of single-sided comb-shaped electrodes D206 are each equal to the lengths of the eight pairs of single-sided comb-shaped electrodes C205; the dimensions of the eight pairs of single-sided comb-shaped electrodes E207 are consistent, and the lengths of the eight pairs of single-sided comb-shaped electrodes E207 are each greater than the lengths of the eight pairs of single-sided comb-shaped electrodes D206; the dimensions of the eight pairs of single-sided comb-shaped electrodes F208 are consistent, and the lengths of the eight pairs of single-sided comb-shaped electrodes F208 are each equal to the lengths of the eight pairs of single-sided comb-shaped electrodes E207.

[0050] The cylindrical central anchor point 101, the annular resonant mass 102, the eight spoke-shaped inner elastic support beams, and the eight spoke-shaped outer elastic support beams are all made of single-crystal silicon wafers. Furthermore, the cylindrical central anchor point 101, the annular resonant mass 102, the eight spoke-shaped inner elastic support beams, and the eight spoke-shaped outer elastic support beams are all manufactured as a single unit using bulk silicon processing technology.

[0051] The dimensions of the eight pairs of block anchors A209, B210, C211, D212, E213, F214, G215, H216, I217, J218, K219, and L220 are all identical.

[0052] While specific embodiments of the present invention have been described above, those skilled in the art should understand that these are merely illustrative examples, and the scope of protection of the present invention is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but all such changes and modifications fall within the scope of protection of the present invention.

Claims

1. A dual-mode high-precision micromechanical gyroscope structure with annular topological comb teeth, characterized in that: Includes a glass substrate, a resonator, and electrodes; The resonator includes a cylindrical central anchor point (101), a circular resonant mass (102), eight spoke-shaped inner elastic support beams, and eight spoke-shaped outer elastic support beams. The electrode portion includes eight pairs of arc-shaped inner layer electrodes (201), eight pairs of arc-shaped outer layer electrodes (202), eight pairs of single-sided comb-shaped electrodes A (203), eight pairs of single-sided comb-shaped electrodes B (204), eight pairs of single-sided comb-shaped electrodes C (205), eight pairs of single-sided comb-shaped electrodes D (206), eight pairs of single-sided comb-shaped electrodes E (207), and eight pairs of single-sided comb-shaped electrodes F (208). Among them, the cylindrical central anchor point (101) is bonded to the upper surface of the glass substrate; A circular resonant mass (102) is placed on the upper surface of a glass substrate, and the center line of the circular resonant mass (102) coincides with the center line of the cylindrical central anchor point (101). The eight spoke-shaped inner elastic support beams are all located between the cylindrical central anchor point (101) and the annular resonant mass (102), and the eight spoke-shaped inner elastic support beams are symmetrically distributed around the center line of the cylindrical central anchor point (101). Each spoke-shaped inner elastic support cantilever beam is composed of a straight beam segment A (103), a pair of U-shaped beam segments (104), and a straight beam segment B (105); the tail end of the straight beam segment A (103) is fixed to the side of the cylindrical central anchor point (101); the pair of U-shaped beam segments (104) together form a closed rounded rectangle, and the tail ends of the pair of U-shaped beam segments (104) are fixed to the head end of the straight beam segment A (103); the tail end of the straight beam segment B (105) is fixed to the head end of the pair of U-shaped beam segments (104); the head end of the straight beam segment B (105) is fixed to the inner side of the annular resonant mass (102); All eight spoke-shaped outer elastic support beams are located outside the annular resonant mass (102), and the eight spoke-shaped outer elastic support beams are symmetrically distributed around the center line of the cylindrical central anchor point (101). Each spoke-shaped outer elastic support cantilever beam is composed of a straight beam segment C (106), a pair of double-sided comb-shaped beam segments A (107), a pair of double-sided comb-shaped beam segments B (108), and a pair of double-sided comb-shaped beam segments C (109); the tail end of the straight beam segment C (106) is fixed to the outer side of the annular resonant mass (102); the pair of double-sided comb-shaped beam segments A (107) are symmetrically fixed to the two sides of the straight beam segment C (106); A pair of double-sided comb-shaped beam segments B (108) are symmetrically fixed on both sides of the straight beam segment C (106), and the pair of double-sided comb-shaped beam segments B (108) are located outside the pair of double-sided comb-shaped beam segments A (107); a pair of double-sided comb-shaped beam segments C (109) are symmetrically fixed on both sides of the straight beam segment C (106), and the pair of double-sided comb-shaped beam segments C (109) are located outside the pair of double-sided comb-shaped beam segments B (108); Eight pairs of arc-shaped inner electrodes (201) are bonded to the upper surface of the glass substrate, and the eight pairs of arc-shaped inner electrodes (201) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of arc-shaped inner electrodes (201) are symmetrically distributed on both sides of the eight straight beam segments B (105), and the outer surfaces of the eight pairs of arc-shaped inner electrodes (201) and the inner surfaces of the annular resonant mass (102) together constitute eight pairs of microcapacitors A; Eight pairs of arc-shaped outer electrodes (202) are bonded to the upper surface of the glass substrate, and the eight pairs of arc-shaped outer electrodes (202) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of arc-shaped outer electrodes (202) are symmetrically distributed on both sides of the eight straight beam segments C (106), and the inner surfaces of the eight pairs of arc-shaped outer electrodes (202) and the outer surfaces of the annular resonant mass (102) together constitute eight pairs of microcapacitors B; Eight pairs of single-sided comb-shaped electrodes A (203) are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes A (203) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of single-sided comb-shaped electrodes A (203) are embedded one-to-one with the inner side of the eight pairs of double-sided comb-shaped beam segments A (107), and the eight pairs of single-sided comb-shaped electrodes A (203) and the eight pairs of double-sided comb-shaped beam segments A (107) constitute eight pairs of microcapacitors C. Eight pairs of single-sided comb-shaped electrodes B (204) are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes B (204) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of single-sided comb-shaped electrodes B (204) are embedded one-to-one with the outer side of the eight pairs of double-sided comb-shaped beam segments A (107), and the eight pairs of single-sided comb-shaped electrodes B (204) and the eight pairs of double-sided comb-shaped beam segments A (107) constitute eight pairs of microcapacitors D. Eight pairs of single-sided comb-shaped electrodes C (205) are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes C (205) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of single-sided comb-shaped electrodes C (205) are embedded in the inner side of eight pairs of double-sided comb-shaped beam segments B (108) in a one-to-one correspondence, and the eight pairs of single-sided comb-shaped electrodes C (205) and the eight pairs of double-sided comb-shaped beam segments B (108) constitute eight pairs of microcapacitors E in a one-to-one correspondence; Eight pairs of single-sided comb-shaped electrodes D (206) are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes D (206) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of single-sided comb-shaped electrodes D (206) are embedded one-to-one with the outer side of the eight pairs of double-sided comb-shaped beam segments B (108), and the eight pairs of single-sided comb-shaped electrodes D (206) and the eight pairs of double-sided comb-shaped beam segments B (108) constitute eight pairs of microcapacitors F in a one-to-one correspondence; Eight pairs of single-sided comb-shaped electrodes E (207) are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes E (207) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of single-sided comb-shaped electrodes E (207) are embedded in the inner side of eight pairs of double-sided comb-shaped beam segments C (109) in a one-to-one correspondence, and the eight pairs of single-sided comb-shaped electrodes E (207) and the eight pairs of double-sided comb-shaped beam segments C (109) constitute eight pairs of microcapacitors G in a one-to-one correspondence; Eight pairs of single-sided comb-shaped electrodes F (208) are bonded to the upper surface of the glass substrate, and the eight pairs of single-sided comb-shaped electrodes F (208) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of single-sided comb-shaped electrodes F (208) are embedded one-to-one with the outer side of the eight pairs of double-sided comb-shaped beam segments C (109), and the eight pairs of single-sided comb-shaped electrodes F (208) and the eight pairs of double-sided comb-shaped beam segments C (109) constitute eight pairs of microcapacitors H.

2. The dual-mode high-precision micromechanical gyroscope structure with annular topological comb teeth according to claim 1, characterized in that: The electrode portion further includes eight pairs of block anchor points A (209), eight pairs of block anchor points B (210), eight pairs of block anchor points C (211), eight pairs of block anchor points D (212), eight pairs of block anchor points E (213), eight pairs of block anchor points F (214), eight pairs of block anchor points G (215), eight pairs of block anchor points H (216), eight pairs of block anchor points I (217), eight pairs of block anchor points J (218), eight pairs of block anchor points K (219), and eight pairs of block anchor points L (220); all eight pairs of block anchor points A (209) are bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points A (209) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of block anchor points A (209) are one-to-one The eight pairs of single-sided comb-shaped electrodes A (203) are fixed to the tail end; the eight pairs of block anchor points B (210) are all bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points B (210) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of block anchor points B (210) are fixed one-to-one to the head end of the eight pairs of single-sided comb-shaped electrodes A (203); the eight pairs of block anchor points C (211) are all bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points C (211) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of block anchor points C (211) are fixed one-to-one to the tail end of the eight pairs of single-sided comb-shaped electrodes B (204); the eight pairs of block anchor points D (212) are all bonded to the upper surface of the glass substrate. The upper surface of the glass substrate is bonded with eight pairs of block anchor points D (212) symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of block anchor points D (212) are fixed one-to-one to the head end of the eight pairs of single-sided comb-shaped electrodes B (204); the eight pairs of block anchor points E (213) are all bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points E (213) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of block anchor points E (213) are fixed one-to-one to the tail end of the eight pairs of single-sided comb-shaped electrodes C (205); the eight pairs of block anchor points F (214) are all bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points F (214) are symmetrically distributed around the center line of the cylindrical central anchor point (101). Distribution; eight pairs of block anchor points F (214) are fixed one-to-one with the head end of eight pairs of single-sided comb-shaped electrodes C (205); eight pairs of block anchor points G (215) are all bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points G (215) are symmetrically distributed around the center line of the cylindrical central anchor point (101); eight pairs of block anchor points G (215) are fixed one-to-one with the tail end of eight pairs of single-sided comb-shaped electrodes D (206); eight pairs of block anchor points H (216) are all bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points H (216) are symmetrically distributed around the center line of the cylindrical central anchor point (101); eight pairs of block anchor points H (216) are fixed one-to-one with the head end of eight pairs of single-sided comb-shaped electrodes D (206);Eight pairs of block anchor points I (217) are bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points I (217) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of block anchor points I (217) are fixed one-to-one to the tail end of the eight pairs of single-sided comb-shaped electrodes E (207); eight pairs of block anchor points J (218) are bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points J (218) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of block anchor points J (218) are fixed one-to-one to the head end of the eight pairs of single-sided comb-shaped electrodes E (207); Eight pairs of block anchor points K (219) are bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points K (219) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of block anchor points K (219) are fixed one-to-one to the tail end of the eight pairs of single-sided comb-shaped electrodes F (208); eight pairs of block anchor points L (220) are bonded to the upper surface of the glass substrate, and the eight pairs of block anchor points L (220) are symmetrically distributed around the center line of the cylindrical central anchor point (101); the eight pairs of block anchor points L (220) are fixed one-to-one to the head end of the eight pairs of single-sided comb-shaped electrodes F (208).

3. A dual-mode high-precision micromechanical gyroscope structure with annular topological comb teeth according to claim 1 or 2, characterized in that: The heights of the cylindrical central anchor point (101), the annular resonant mass (102), the eight spoke-shaped inner elastic support beams, and the eight spoke-shaped outer elastic support beams are all the same; the dimensions of the eight spoke-shaped inner elastic support beams are the same; the dimensions of the eight spoke-shaped outer elastic support beams are the same, and the lengths of the eight pairs of double-sided comb-shaped beam segments B (108) are correspondingly greater than the lengths of the eight pairs of double-sided comb-shaped beam segments A (107), and the eight pairs of double-sided comb teeth... The length of the shaped beam segment C (109) is greater than the length of the eight pairs of double-sided comb-shaped beam segments B (108); the dimensions of the eight pairs of arc-shaped inner electrodes (201) are consistent; the dimensions of the eight pairs of arc-shaped outer electrodes (202) are consistent, and the inner surface area of ​​the eight pairs of arc-shaped outer electrodes (202) is equal to the outer surface area of ​​the eight pairs of arc-shaped inner electrodes (201); the dimensions of the eight pairs of single-sided comb-shaped electrodes A (203) are consistent; the dimensions of the eight pairs of single-sided comb-shaped electrodes B (204) are consistent. The dimensions of the eight pairs of single-sided comb-shaped electrodes B (204) are consistent, and the lengths of the eight pairs of single-sided comb-shaped electrodes A (203) are correspondingly equal to the lengths of the eight pairs of single-sided comb-shaped electrodes C (205); the dimensions of the eight pairs of single-sided comb-shaped electrodes C (205) are consistent, and the lengths of the eight pairs of single-sided comb-shaped electrodes C (205) are correspondingly greater than the lengths of the eight pairs of single-sided comb-shaped electrodes B (204); the dimensions of the eight pairs of single-sided comb-shaped electrodes D (206) are consistent, and the lengths of the eight pairs of single-sided comb-shaped electrodes D (206 ...). The lengths of the eight pairs of single-sided comb-shaped electrodes C (205) are correspondingly equal to the lengths of the eight pairs of single-sided comb-shaped electrodes E (207); the eight pairs of single-sided comb-shaped electrodes E (207) are identical in size, and the lengths of the eight pairs of single-sided comb-shaped electrodes E (207) are correspondingly greater than the lengths of the eight pairs of single-sided comb-shaped electrodes D (206); the eight pairs of single-sided comb-shaped electrodes F (208) are identical in size, and the lengths of the eight pairs of single-sided comb-shaped electrodes F (208) are correspondingly equal to the lengths of the eight pairs of single-sided comb-shaped electrodes E (207).

4. A dual-mode high-precision micromechanical gyroscope structure with annular topological comb teeth according to claim 1 or 2, characterized in that: The cylindrical central anchor point (101), the annular resonant mass (102), the eight spoke-shaped inner elastic support beams, and the eight spoke-shaped outer elastic support beams are all made of single-crystal silicon wafers. The cylindrical central anchor point (101), the annular resonant mass (102), the eight spoke-shaped inner elastic support beams, and the eight spoke-shaped outer elastic support beams are all manufactured as a single unit using bulk silicon processing technology.

5. The dual-mode high-precision micromechanical gyroscope structure with annular topological comb teeth according to claim 2, characterized in that: The dimensions of the eight pairs of block anchors A (209), the eight pairs of block anchors B (210), the eight pairs of block anchors C (211), the eight pairs of block anchors D (212), the eight pairs of block anchors E (213), the eight pairs of block anchors F (214), the eight pairs of block anchors G (215), the eight pairs of block anchors H (216), the eight pairs of block anchors I (217), the eight pairs of block anchors J (218), the eight pairs of block anchors K (219), and the eight pairs of block anchors L (220) are all the same.

Images