A vacuum drying system for preparing a display panel

Abstract

The application belongs to the field of inkjet printing, and discloses a vacuum drying system for preparing a display panel, comprising a vacuum box, the vacuum box having a sealed vacuum chamber therein; a vacuum pump is used for vacuumizing the chamber in the vacuum box; a condensation mechanism comprises a condensation plate, a positioning assembly, a first water cooling machine and a first connecting assembly; a bearing mechanism comprises a bearing table and a transmission assembly; a lifting mechanism comprises a fixing assembly, a sliding assembly and a supporting assembly; wherein the fixing assembly comprises a first fixing plate and a second fixing plate, the sliding assembly comprises a first sliding plate, a second sliding plate, a motor, a transmission shaft, a first commutator and a second commutator; the transmission assembly drives the bearing table to move up and down through the synchronous sliding of the first sliding plate and the second sliding plate, adjusts the distance between the substrate placed on the bearing table and the condensation plate, can meet the demand of large-size substrate, and ensures the uniformity of airflow and the air pumping rate during air pumping.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of inkjet printing, and in particular to a vacuum drying system for preparing a display panel. BACKGROUND

[0002] Inkjet printing has been increasingly widely applied in many emerging fields, such as new display, RFID, thin-film solar cell, wearable flexible device, PCB, smart skin, etc. In particular, inkjet printing technology is used to realize low-cost and large-area printing of OLED / μLED / QLED new display devices, which becomes the most potential process in the preparation of new display devices, and has the advantages of high material utilization rate, no need for mask plate, low equipment cost, easy realization of large-size manufacturing, etc.

[0003] In the inkjet printing process, the ink droplets are printed on the substrate in a wet film state, and need to be dried and solidified to form a usable functional layer. In the inkjet printing of new display, the ink is usually heat-sensitive ink, so the industry adopts vacuum drying method to reduce the boiling point of the droplets. However, further research shows that the existing vacuum drying device has the technical problems that the lifting mechanism cannot meet the needs of large substrates, the air extraction device cannot guarantee the uniformity of air flow during air extraction, and the air extraction rate cannot be adjusted. SUMMARY

[0004] The embodiments of the present application provide a vacuum drying system for preparing a display panel, so as to solve the technical problems that the lifting mechanism cannot meet the needs of large substrates, the air extraction device cannot guarantee the uniformity of air flow during air extraction, and the air extraction rate cannot be adjusted in the related art, and can meet the needs of large-size substrates, guarantee the uniformity of air flow during air extraction, and guarantee the air extraction rate.

[0005] To achieve the above-mentioned purpose, the embodiment of the present application provides a vacuum drying system for preparing a display panel, the vacuum drying system for preparing a display panel comprises: a vacuum box 100, wherein the vacuum box 100 has a sealed vacuum chamber, wherein the vacuum chamber is used to provide a vacuum drying space for the substrate; a vacuum pump 200, which is used to evacuate the chamber in the vacuum box 100; a condensing mechanism 300, comprising: a condensing plate 301, a positioning assembly 302, a first water cooler 303, and a first connecting assembly 304; wherein the condensing plate 301 is fixed to the vacuum chamber by the positioning assembly 302 The first plane in the interior, the condensing plate 301 is provided with a first channel inside, the first channel is connected to the first water cooler 303 through the first connecting component 304, and the temperature of the condensing plate 301 can be adjusted in real time through the first water cooler 303; the carrying mechanism 400 includes a carrying platform 401 and a transmission component 402, one end of the transmission component 402 is fixedly connected to the carrying platform 401, and the other end is connected to the lifting mechanism 500; the lifting mechanism 500 includes a fixing component 501, a sliding component 502 and a supporting component 503; wherein, the fixing component 501 includes The first fixed plate and the second fixed plate are respectively fixed to the two sides of the vacuum box 100. The sliding assembly 502 includes a first sliding plate, a second sliding plate, a motor 5021, a transmission shaft 5022, a first commutator 5023 and a second commutator 5024. The first sliding plate and the second sliding plate are respectively connected to the first fixed plate and the second fixed plate in a sliding manner. One end of the first commutator 5023 is connected to the first sliding plate, and the other end is connected to one end of the second commutator 5024 through the transmission shaft 5022. The second commutator 5024 is connected to the first sliding plate. The other end is connected to the second sliding plate; the motor 5021 is connected to the first commutator 5023, and drives the first sliding plate and the second sliding plate to slide synchronously through the transmission shaft 5022; wherein, the first sliding plate and the second sliding plate are both fixedly connected to the support assembly 503, and the support assembly 503 is fixedly connected to the transmission assembly 402; the transmission assembly 402 drives the supporting platform 401 to move up and down through the synchronous sliding of the first sliding plate and the second sliding plate, thereby adjusting the distance between the substrate placed on the supporting platform 401 and the condensation plate 301.

[0006] In some embodiments, the sliding assembly 502 further comprises a steering plate 5025, the first sliding block and the second sliding block are respectively connected to one end of the support assembly 503, and the first end and the second end of the first sliding block and the second sliding block are respectively connected to the steering plate 5025, the support assembly 503 comprises four support plates, and the four support plates are respectively connected to the four steering plates 5025; the transmission assembly 402 comprises four transmission shafts, one end of the four transmission shafts is fixedly connected to the bearing table 401 for bearing the bearing table 401, and the other end of the four transmission shafts is respectively connected to the four support plates; the four transmission shafts drive the substrate on the bearing table 401 to move up and down through the synchronous sliding of the first sliding plate and the second sliding plate; and the first sliding plate and the second sliding plate are located at the same height.

[0007] In some embodiments, the bearing mechanism 400 further comprises a second connecting assembly 403, the bearing table 401 is internally provided with a second channel, the second channel is connected to a second water cooling machine 404 through the second connecting assembly 403, and the temperature of the bearing table 401 can be adjusted in real time through the second water cooling machine 404.

[0008] In some embodiments, the bearing mechanism 400 further comprises a first limiting assembly 404, the first limiting assembly 404 comprises a support shaft 4041 and a limiting shaft 4042, the bearing table 401 is provided with a through hole, the support shaft 4041 is arranged in the through hole and used for supporting a substrate and limiting the position of the bearing table 401 in a plane where a substrate conveying direction is located, and the diameter of the limiting shaft 4042 is greater than that of the through hole and used for limiting the maximum distance between the bearing table 401 and the condensing plate 301; the bearing mechanism 400 further comprises a second limiting assembly 405, the second limiting assembly is arranged on the bearing table 401 and used for limiting the position of the substrate in the plane where the conveying direction is located.

[0009] In some embodiments, the vacuum pump 200 includes a dry vacuum pump 201; the vacuum drying system for preparing a display panel also includes a vacuum control mechanism 600, and the vacuum control mechanism 600 includes: a second pipe 602, a third pipe 603, a fourth pipe 604, a fifth pipe 605, a sixth pipe 606, a first valve 607, a second valve 608, a third valve 609, a fourth valve 6010 and a plurality of first pipes 601 arranged evenly; one end of each of the plurality of first pipes 601 is connected to the bottom of the vacuum box 100, and the other end is connected to the second pipe 602; the second pipe 602 is connected to the first end of the sixth pipe 606 through the first valve 607, and the second end of the sixth pipe 606 is connected to the dry vacuum pump 201; three parallel pipes are provided between the second pipe 602 and the sixth pipe 606: the third pipe 603, the fourth pipe 604 and the fourth valve 605. Five pipelines 605, the three parallel pipelines are connected to the second pipeline 602 at one end and to the sixth pipeline 606 at the other end; wherein, the third pipeline 603 is provided with a second valve 608, and the second valve 608 is used to control the vacuum flow of the third pipeline 603; the fourth pipeline 604 is provided with a third valve 609, and the third valve 609 is used to control the on-off state of the fourth pipeline 604; the fifth pipeline 605 is provided with a fourth valve 6010, and the fourth valve 6010 is used to control the on-off state of the fifth pipeline 605; when the first valve 607 is opened and the second valve 608, the third valve 609 and the fourth valve 6010 are all closed, vacuum can be drawn through the second pipeline 602 and the sixth pipeline 606; when the first valve 607 is closed, the vacuum flow can be controlled in real time through the second valve 608, the third valve 609 and / or the fourth valve 6010.

[0010] In some embodiments, the vacuum pump 200 also includes a molecular pump 202; one end of the molecular pump 202 is connected to the vacuum box 100, and the other end is connected to the sixth pipe 606 through the tenth pipe 6018, and the seventh pipe is provided with a vacuum gauge 6019 and a fifth valve 6011; wherein, when the first valve 607, the second valve 608, the third valve 609, and the fourth valve 6010 are all closed and the vacuum gauge 6019 detects that the air pressure in the vacuum box 100 reaches a preset threshold, the molecular pump 202 is controlled by the fifth valve 6011 to evacuate the chamber in the vacuum box 100.

[0011] In some embodiments, the vacuum control mechanism further comprises a seventh pipeline 6012, one end of the seventh pipeline 6012 is in communication with the second pipeline 602, the other end of the seventh pipeline 6012 is connected with two branches in parallel, a flow meter 6013 and a sixth valve 6014 are arranged on each of the two branches, the other end of each of the two branches is connected with a gas supply device 6015, the sixth valve 6014 is used to control the on-off state of the branch, the flow rates of the flow meters 6013 on the two branches are different, and the on-off state of the sixth valve 6014 is used to supply gas to the second pipeline 602 through different flow rates.

[0012] In some embodiments, the side wall of the vacuum box 100 is provided with an eighth pipeline 6016, one end of the eighth pipeline 6016 is connected with the vacuum box 100, the other end of the eighth pipeline 6016 is connected with the transmission cavity, and a seventh valve 6017 is arranged on the eighth pipeline 6016, when the vacuum box 100 receives the substrate transmitted by the transmission cavity, the seventh valve 6017 is opened to make the cavity pressure in the vacuum box 100 consistent with the cavity pressure in the transmission cavity.

[0013] In some embodiments, the vacuum drying system for preparing a display panel further comprises a gas supply mechanism 700, the gas supply mechanism 700 comprises a ninth pipeline 701, an eighth valve 702, a ninth valve 703, a tenth valve 704 and an eleventh valve 705, one end of the ninth pipeline 701 is connected with the vacuum box 100, the other end of the ninth pipeline 701 is connected with two first branches in parallel, the eighth valve 702 is arranged on one of the first branches, the ninth valve 703 and the tenth valve 704 are arranged on the other first branch, and the tenth valve 704 is used to adjust the flow rate of the branch, the other end of each of the two first branches is connected with two second branches in parallel, the eleventh valve 705 is arranged on each of the second branches, the other end of one of the second branches is used to supply air, and the other end of the other second branch is used to supply nitrogen.

[0014] In some embodiments, the vacuum box 100 is placed on a rack, and the rack is provided with a maintenance mechanism 800; the maintenance mechanism 800 comprises a flange 801, a knob 802, a first rotating arm 803, a second rotating arm 804, a first rotating shaft 805, and a second rotating shaft 806; the flange 801 is fixedly connected with an upper cover plate of the vacuum box 100, the knob 802 is threadedly connected with the flange 801 through the first rotating arm 803, the first rotating arm 803 is rotationally connected with the second rotating arm 804 through the first rotating shaft 805, and the second rotating arm 804 is rotationally connected with the rack through the second rotating shaft 806; wherein the knob 802 can rotate around the first rotating arm 803 to drive the upper cover plate to move away from the cavity of the vacuum box 100, and then the cooperative movement of the first rotating arm 803 and the second rotating arm 804 can drive the upper cover plate to move towards the rack; the rack is provided with a limiting block 807, the limiting block has two mutually perpendicular surfaces, a first surface is used to limit the position of the vacuum box 100 in the conveying direction of the substrate, and a second surface is used to limit the position of the upper cover plate of the vacuum box 100 in the width direction of the substrate.

[0015] The technical scheme provided in the application has the beneficial effects of:

[0016] The vacuum drying system for preparing a display panel provided in the embodiment of the application is fixedly connected with a support assembly through a first sliding plate and a second sliding plate, the support assembly is fixedly connected with a transmission assembly, the transmission assembly is fixedly connected with a bearing table, the transmission assembly drives the lifting movement of the bearing table through the synchronous sliding of the first sliding plate and the second sliding plate, the distance between the substrate placed on the bearing table and the condensing plate is adjusted, large-size substrates can be carried, the distance between the substrate and the condensing plate 301 is adjusted through the stable lifting movement of the substrate, and the system is suitable for various process requirements; further, the temperature of the condensing plate is adjusted in real time by a water cooling machine, the problem that the specification parameters of the condensing plate are fixed and the indicators such as the pumping speed cannot be flexibly fine-adjusted according to actual requirements in the related art is solved; a plurality of first pipes 601 are uniformly distributed relative to the inner cavity of the vacuum chamber, the problem that the air flow uniformity during pumping cannot be ensured and the pumping speed cannot be adjusted by the pumping device is solved, the air flow uniformity during pumping is ensured, and the pumping speed is improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the application, the drawings needed to be used in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative effort on the basis of these drawings.

[0018] Figure 1A schematic structural diagram of a vacuum drying system for preparing a display panel provided in an embodiment of the present application;

[0019] Figure 2 A schematic diagram of the internal structure of the vacuum box 100 provided in an embodiment of the present application;

[0020] Figure 3 A schematic structural diagram of a vacuum control mechanism 600 provided in an embodiment of the present application;

[0021] Figure 4 A schematic structural diagram of a seventh pipeline 6012 provided in an embodiment of the present application;

[0022] Figure 5 A schematic structural diagram of a gas delivery mechanism 700 provided in an embodiment of the present application;

[0023] Figure 6 A schematic diagram of the structure of the maintenance mechanism 800 provided in an embodiment of the present application;

[0024] Figure 7 A schematic diagram of the structure of the maintenance mechanism 800 provided in an embodiment of the present application.

[0025] In the figure: 100-vacuum box; 200-vacuum pump; 300-condensing mechanism; 301-condensing plate; 302-positioning assembly; 303-first water cooler; 304-first connecting assembly; 400-carrying mechanism; 401-carrying platform; 402-transmission assembly; 403-second connecting assembly; 404-first limiting assembly; 4041-support shaft; 4042-limiting shaft; 405-second limiting assembly; 500-lifting mechanism; 501-fixing assembly; 502-sliding assembly; 503-support assembly; 5021-motor; 5022-transmission shaft; 5023-first commutator; 5024-second commutator; 5025-steering plate; 600-vacuum control mechanism; 601-first pipeline; 602-second pipeline-603- The third pipeline; 604-the fourth pipeline; 605-the fifth pipeline; 606-the sixth pipeline; 607-the first valve; 608-the second valve; 609-the third valve; 6010-the fourth valve; 6011-the fifth valve; 6012-the seventh pipeline; 6013-the flow meter; 6014-the sixth valve; 6015-the gas supply device; 6016-the eighth pipeline; 6017-the seventh valve; 6018-the tenth pipeline; 6019-the vacuum gauge; 700-the gas transmission mechanism; 701-the ninth pipeline; 702-the eighth valve; 703-the ninth valve; 704-the proportional valve; 705-the eleventh valve; 800-the maintenance assembly; 801-the flange; 802-the knob; 803-the first rotating arm; 804-the second rotating arm; 805-the first rotating shaft; 806-the second rotating shaft. DETAILED DESCRIPTION

[0026] The technical solutions and advantages of the embodiments of the present application will be more clearly understood from the following description of the embodiments of the present application with reference to the accompanying drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present application.

[0027] The embodiment of the present application provides a vacuum drying system for preparing a display panel. Through cooperation of a motor, a commutator and a transmission shaft, synchronous sliding of two ends is realized, and then lifting movement of a bearing mechanism is driven, so that a large-size substrate can be carried. The distance between the substrate and a condensing plate 301 is adjusted through stable lifting movement of the substrate, which is suitable for various process requirements, and solves the problem that the lifting mechanism in the related art cannot meet the requirements of the large-size substrate.

[0028] Referring to Figures 1-2The vacuum drying system for preparing a display panel in the embodiment of the present application includes a vacuum box 100 , a vacuum pump 200 , a condensing mechanism 300 , a carrying mechanism 400 , and a lifting mechanism 500 . Specifically, the vacuum box 100 has a sealed vacuum chamber therein, and the vacuum chamber is used to provide a vacuum drying space for the substrate; the vacuum pump 200 is used to evacuate the chamber in the vacuum box 100; the condensing mechanism 300 includes: a condensing plate 301, a positioning component 302, a first water cooler 303, and a first connecting component 304; wherein, the condensing plate 301 is fixed to the first plane in the vacuum chamber through the positioning component 302, and the positioning component 302 includes four positioning pins, and the condensing plate 301 extends four fourth protrusions laterally, and the four fourth protrusions are used to be connected to the four positioning pins in a one-to-one correspondence; one end of the positioning pin is fixedly connected to the condensing plate 301, and the other end is fixedly connected to the vacuum box 100, and a corresponding groove is provided at the bottom of the vacuum box 100, and the bottom of the positioning pin 302 cooperates with the groove, and the outer sleeve of the positioning pin 302 is provided with a fixing ring, and the positioning pin 302 is fixedly connected to the vacuum box 100 through the fixing ring. A first channel is provided inside the condensing plate 301, and the first channel is connected to the first water cooler 303 through the first connecting component 304, and the temperature of the condensing plate 301 can be adjusted in real time through the first water cooler 303; the carrying mechanism 400 includes a carrying platform 401 and a transmission component 402, one end of the transmission component 402 is fixedly connected to the carrying platform 401, and the other end is connected to the lifting mechanism 500; the lifting mechanism 500 includes a fixing component 501, a sliding component 502 and a supporting component 503; wherein, the fixing component 501 includes a first fixing plate and a second fixing plate, and the first fixing plate and the second fixing plate are respectively fixed to two sides of the vacuum box 100, and the sliding component 502 includes a first sliding plate, a second sliding plate, a motor 5021, a transmission shaft 5022, a first commutator 5023 and a second commutator 5024; The first sliding plate and the second sliding plate are slidably connected to the first fixed plate and the second fixed plate respectively; one end of the first commutator 5023 is connected to the first sliding plate, and the other end is connected to one end of the second commutator 5024 through the transmission shaft 5022, and the other end of the second commutator 5024 is connected to the second sliding plate; the motor 5021 is connected to the first commutator 5023, and drives the first sliding plate and the second sliding plate to slide synchronously through the transmission shaft 5022; wherein, the first sliding plate and the second sliding plate are fixedly connected to the support assembly 503, and the support assembly 503 is fixedly connected to the transmission assembly 402; the transmission assembly 402 drives the supporting platform 401 to move up and down through the synchronous sliding of the first sliding plate and the second sliding plate, thereby adjusting the distance between the substrate placed on the supporting platform 401 and the condensation plate 301.

[0029] In some embodiments, the sliding assembly 502 further comprises a steering plate 5025, one end of the first sliding block connected with the support assembly 503, one end of the second sliding block connected with the support assembly 503, both the first end and the second end extend out of the first end and the second end, the first end and the second end are connected with the steering plate 5025, the support assembly 503 comprises four support plates, the four support plates are connected with the four steering plates 5025 one by one; the transmission assembly 402 comprises four transmission shafts, one end of the four transmission shafts is fixedly connected with the bearing table 401 for bearing the bearing table 401; the other end of the four transmission shafts is connected with the four support plates one by one; the four transmission shafts drive the substrate on the bearing table 401 to move up and down through the synchronous sliding of the first sliding plate and the second sliding plate; wherein, the first sliding plate and the second sliding plate are located at the same height. In some examples, the bearing table 401 extends out four first protrusions in the transverse direction, and the four first protrusions are used to be connected with the four transmission shafts one by one. The first protrusion and the fourth protrusion are located at different positions in the plane where the substrate transmission direction is located. The transmission shaft comprises a straight rod, a fixed seat, and a bellows; the fixed seat is sleeved outside the straight rod, the fixed seat body is a cylinder, the lower end of the fixed seat body extends out a second protrusion with a size larger than the diameter of the fixed seat body, the vacuum box 100 is provided with a through hole, the fixed seat body is arranged in the through hole, and the second protrusion is fixedly connected with the bottom of the vacuum box 100; the bellows body is a cylinder, the lower end of the bellows body extends out a third protrusion with a size larger than the through hole of the vacuum box 100, the third protrusion is provided with a sealing ring, the length of the bellows is greater than the maximum distance from the vacuum box 100 to the bearing table 401, the third protrusion of the bellows abuts against the vacuum box 100, and since the third protrusion is provided with the sealing ring, the gas in the vacuum box 100 cannot be leaked.

[0030] In the embodiments of the present application, through the cooperation of the motor, the commutator and the transmission shaft, the synchronous sliding of the two sliding plates is realized, and the synchronous sliding of the four support plates is driven, and then the lifting movement of the bearing table is driven. Due to the contact of the four first protrusions of the bearing table, the stable lifting movement of the bearing table can be realized, so that the bearing table can bear the large-size substrate. By adjusting the distance between the substrate and the condensing plate 301 through the stable lifting movement of the substrate, various process requirements can be met, and the lifting mechanism in the related art cannot meet the demand of large-size substrate.

[0031] The supporting mechanism 400 also includes a second connecting component 403. A second channel is provided inside the supporting platform 401. The second channel is connected to the second water cooler 404 through the second connecting component 403. The temperature of the supporting platform 401 can be adjusted in real time through the second water cooler 404. The first channel is evenly arranged on the condensing plate, and the second channel is evenly arranged on the supporting plate; the inlet and outlet of the first channel and the inlet and outlet of the second channel are at different positions on the plane where the substrate transmission direction is located. Preferably, the first channel and the second channel each have only one inlet and outlet. The second connecting component 403 includes a first air pipe, a limiting plate and a bellows. The first air pipe includes an air inlet pipe and an exhaust pipe. The air inlet pipe and the exhaust pipe are sequentially passed through the bellows and the limiting plate. The limiting plate is fixedly connected to the vacuum box 100. The bellows is similar to the bellows of the aforementioned transmission shaft. The aforementioned fixing seat can also adopt the limiting plate structure here.

[0032] The supporting mechanism 400 also includes a first limiting assembly 404, which includes a support shaft 4041 and a limiting shaft 4042. The supporting platform 401 is provided with a through hole, and the support shaft 4041 is provided in the through hole, and is used to support the substrate and limit the position of the supporting platform 401 in the plane of the substrate transmission direction. The diameter of the limiting shaft 4042 is larger than the diameter of the through hole, and is used to limit the maximum distance between the supporting platform 401 and the condenser plate 301. The limiting shaft 4042 supports the supporting platform 401, and the support shaft 4041 is also used to provide a guiding function when the supporting platform 401 moves axially along the limiting shaft 4041. The supporting mechanism 400 also includes a second limiting assembly 405, which is provided on the supporting platform 401 and is used to limit the position of the substrate in the plane of the transmission direction.

[0033] The bottom of the vacuum box 100 is provided with a groove, the bottom of the limiting shaft 4042 is matched with the groove, the outer part of the limiting shaft 4042 is provided with a fixing ring, and the limiting shaft 4042 is fixedly connected with the vacuum box 100 through the fixing ring. The bearing table 401 protrudes at least four second limiting assemblies 405 on one side close to the condensation plate 301, and the four second limiting assemblies 405 are respectively used for abutting against four side walls of the substrate along to limit the position of the substrate in the plane where the transmission direction is located. Preferably, the number of the second limiting assemblies 405 is eight, and the eight second limiting assemblies 405 are arranged in the circumferential direction. Further, the second limiting assembly 405 is a cylinder, and an end close to the condensation plate is formed into a cone from top to bottom. When the lifting movement of the first limiting assembly 404 causes the substrate to move in the direction close to the bearing table, the cone is used for guiding the substrate, and the cylinder is used for limiting the substrate to limit the position of the substrate in the plane where the transmission direction is located, so that the second limiting assembly 405 and the substrate are in line contact, thereby being capable of reducing the contact area between the second limiting assembly 405 and the substrate and reducing the damage to the substrate.

[0034] Referring to Figure 1 and Figure 3 In some embodiments, the vacuum pump 200 includes a dry vacuum pump 201; the vacuum drying system for preparing a display panel further includes a vacuum control mechanism 600, the vacuum control mechanism 600 includes a second pipeline 602, a third pipeline 603, a fourth pipeline 604, a fifth pipeline 605, a sixth pipeline 606, a first valve 607, a second valve 608, a third valve 609, a fourth valve 6010, and a plurality of first pipelines 601 arranged uniformly relative to the vacuum chamber; one end of the plurality of first pipelines 601 is connected with the bottom of the vacuum box 100, and the other end is in communication with the second pipeline 602; the second pipeline 602 is in communication with the first end of the sixth pipeline 606 through the first valve 607, the second end of the sixth pipeline 606 is connected with the dry vacuum pump 201; three parallel pipelines, the third pipeline 603, the fourth pipeline 604 and the fifth pipeline 605, are arranged between the second pipeline 602 and the sixth pipeline 606, and one end of the three parallel pipelines is in communication with the second pipeline 602 and the other end is in communication with the sixth pipeline 606.

[0035] Among them, the sum of the inner diameters of the third pipeline 603, the fourth pipeline 604, and the fifth pipeline 605 is equal to the inner diameter of the sixth pipeline 606; the third pipeline 603 is provided with a second valve 608, and the second valve 608 is used to control the vacuum flow of the third pipeline 603; the fourth pipeline 604 is provided with a third valve 609, and the third valve 609 is used to control the on-off state of the fourth pipeline 604; the fifth pipeline 605 is provided with a fourth valve 6010, and the fourth valve 6010 is used to control the on-off state of the fifth pipeline 605; when the first valve 607 is opened and the second valve 608, the third valve 609 and the fourth valve 6010 are all closed, vacuum can be drawn through the second pipeline 602 and the sixth pipeline 606; when the first valve 607 is closed, the vacuum flow can be controlled in real time through the second valve 608, the third valve 609 and / or the fourth valve 6010. It should be noted that the inner diameters of the second pipe 602 and the sixth pipe 606 are the same, and the sum of the inner diameters of all the first pipes 601 is equal to the inner diameter of the second pipe 602. Preferably, the number of the plurality of first pipes 601 is four.

[0036] In some examples, the first valve 607, the third valve 609, and the fourth valve 6010 are all control valves, and the second valve 608 is a proportional valve. The proportional valve can control both the on / off state of the pipeline in which it is located and the vacuum flow rate of the pipeline. When the first valve 607 is closed, the vacuum flow rate can be controlled in real time through the second valve 608, the third valve 609, and / or the fourth valve 6010. Specifically, the flow rate of the pipeline in which the second valve 608 controls the flow rate, and the on / off state of the fourth valve 6010 and the third valve 609 controls the flow rate of the corresponding branch. Thus, the pumping speed of the dry vacuum pump 201 can be continuously adjusted.

[0037] In some examples, a screen is provided at the connection point between the first pipe 601 and the bottom of the vacuum box 100 to isolate glass fragments in the vacuum chamber and prevent the glass fragments from entering the vacuum pump 200 along the pipe and affecting the vacuuming effect.

[0038] In the embodiment of the present application, multiple first pipes 601 are evenly distributed relative to the interior of the vacuum chamber, ensuring uniform airflow during pumping while also increasing the pumping rate. When the first valve 607 is open and the second, third, and fourth valves 608, 609, and 6010 are all closed, vacuum pumping can be achieved at the maximum pumping speed of the dry vacuum pump 201. When the first valve 607 is closed, the flow rate in the pipe to which it is attached is controlled by the second valve 608, while the on / off states of the fourth and third valves 6010, 609, control the flow rate in the corresponding branch. This allows for continuous adjustment of the pumping speed of the dry vacuum pump 201.

[0039] In some embodiments, the vacuum pump 200 further includes a molecular pump 202; one end of the molecular pump 202 is connected to the vacuum box 100, and the other end is connected to the sixth pipe 606 via a tenth pipe 6018. The seventh pipe is provided with a vacuum gauge 6019 and a fifth valve 6011. When the first valve 607, the second valve 608, the third valve 609, and the fourth valve 6010 are all closed and the vacuum gauge 6019 detects that the air pressure in the vacuum box 100 reaches a preset threshold, the molecular pump 202 is controlled by the fifth valve 6011 to evacuate the chamber in the vacuum box 100. The end of the molecular pump 202 connected to the vacuum box 100 may also be provided with a twelfth valve. Specifically, the twelfth valve may be a three-position gate valve that can realize the on / off state and flow control of the molecular pump 202. In the embodiment of the present application, the molecular pump 202 achieves higher vacuum accuracy and can achieve a lower pressure state in the vacuum chamber.

[0040] See also Figure 3 and Figure 4 In some embodiments, the vacuum control mechanism further includes a seventh pipe 6012; one end of the seventh pipe 6012 is connected to the second pipe 602, and the other end is connected in parallel to two branches; each of the two branches is provided with a flow meter 6013 and a sixth valve 6014; the other ends of the two branches are connected to a gas supply device 6015; the sixth valve 6014 is used to control the on / off state of the branch; the flow rates of the flow meters 6013 on the two branches are different; the on / off state of the sixth valve 6014 is used to supply gas to the second pipe 602 at different flow rates. When the first valve 607 is closed, the flow rate of the pipeline can be adjusted in real time via the second valve 608, and in conjunction with the gas supply from the seventh pipe 6012, a stable pressure state is achieved within the vacuum chamber.

[0041] See also Figure 1 In some embodiments, an eighth conduit 6016 is provided on the sidewall of the vacuum chamber 100. One end of the eighth conduit 6016 is connected to the vacuum chamber 100 and the other end is connected to the transfer chamber. A seventh valve 6017 is provided on the eighth conduit 6016. When the vacuum chamber 100 receives a substrate transferred from the transfer chamber, the seventh valve 6017 is opened to ensure that the chamber pressures in the vacuum chamber 100 and the transfer chamber are the same. The seventh valve 6017 is a control valve.

[0042] See also Figure 5The vacuum drying system for preparing a display panel also includes a gas delivery mechanism 700, which includes a ninth pipeline 701, an eighth valve 702, a ninth valve 703, a tenth valve 704, and an eleventh valve 705. One end of the ninth pipeline 701 is connected to the vacuum chamber 100, and the other end is connected in parallel to two first branches, one of which is provided with an eighth valve 702, and the other first branch is provided with a ninth valve 703 and a tenth valve 704. The tenth valve 704 is used to regulate the flow rate of the branch. The other ends of the two first branches are connected in parallel to two second branches, each of which is provided with an eleventh valve 705. The other end of one second branch is used to deliver air, and the other end of the other second branch is used to deliver nitrogen. The eighth valve 702, the ninth valve 703, and the eleventh valve 705 are control valves, and the tenth valve 704 is a proportional valve.

[0043] See also Figure 1 、 Figure 6 and Figure 7 In some embodiments, the vacuum box 100 is placed on a frame, and a maintenance mechanism 800 is provided on the frame; the maintenance mechanism 800 includes a flange 801, a knob 802, a first rotating arm 803, a second rotating arm 804, a first rotating shaft 805, and a second rotating shaft 806; the flange 801 is fixedly connected to the upper cover of the vacuum box 100, the knob 802 passes through the first rotating arm 803 and is threadedly connected to the flange 801, the first rotating arm 803 and the second rotating arm 804 are rotatably connected through the first rotating shaft 805, and the second rotating arm 804 is connected through the second rotating shaft 806 is rotatably connected to the frame; wherein the knob 802 can rotate about the first rotating arm 803 to drive the upper cover plate to move away from the chamber of the vacuum box 100, and the coordinated movement of the first rotating arm 803 and the second rotating arm 804 can drive the upper cover plate to move toward the frame; the frame is provided with a limit block 807, which has two mutually perpendicular surfaces: the first surface is used to limit the position of the vacuum box 100 in the conveying direction of the substrate, and the second surface is used to limit the position of the upper cover plate of the vacuum box 100 in the width direction of the substrate. In some examples, the knob 802 is provided with a handle to facilitate rotation of the knob 802 and improve the controllability of the knob 802.

[0044] In the description of this application, it should be noted that the terms "upper" and "lower" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be internal communication between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0045] It should be noted that, in this application, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprising a ..." does not exclude the presence of other identical elements in the process, method, article or device comprising the element.

[0046] The foregoing is merely a list of specific embodiments of the present application, intended to enable those skilled in the art to understand or implement the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application is not limited to the embodiments shown herein, but is intended to conform to the broadest scope consistent with the principles and novel features of the present application.

Claims

1. A vacuum drying system for preparing a display panel, characterized in that: The vacuum drying system comprises: A vacuum box (100), wherein the vacuum box (100) has a sealed vacuum chamber, and the vacuum chamber is used to provide a vacuum drying space for the substrate; A vacuum pump (200) is used to evacuate the vacuum chamber in the vacuum box (100); the vacuum pump (200) includes a dry vacuum pump (201); the vacuum drying system further includes a vacuum control mechanism (600), the vacuum control mechanism (600) including: a second pipeline (602), a third pipeline (603), a fourth pipeline (604), a fifth pipeline (605), a sixth pipeline (606), a first valve (607), a second valve (608), a third valve (609), a fourth valve (6010), and a plurality of evenly arranged first pipelines (601); the plurality of first pipelines (601) One end is connected to the bottom of the vacuum box (100), and the other end is connected to the second pipe (602); the second pipe (602) is connected to the first end of the sixth pipe (606) through the first valve (607), and the second end of the sixth pipe (606) is connected to the dry vacuum pump (201); three parallel pipes are provided between the second pipe (602) and the sixth pipe (606): a third pipe (603), a fourth pipe (604) and a fifth pipe (605), and the three parallel pipes are connected to the second pipe (602) at one end and to the sixth pipe (606) at the other end; Wherein, the third pipeline (603) is provided with a second valve (608), and the second valve (608) is used to control the vacuum flow of the third pipeline (603); the fourth pipeline (604) is provided with a third valve (609), and the third valve (609) is used to control the on-off state of the fourth pipeline (604); the fifth pipeline (605) is provided with a fourth valve (6010), and the fourth valve (6010) is used to control the on-off state of the fifth pipeline (605); when the first valve (607) is opened and the second valve (608), the third valve (609) and the fourth valve (6010) are all closed, vacuum can be drawn through the second pipeline (602) and the sixth pipeline (606); when the first valve (607) is closed, the vacuum flow can be controlled in real time through the second valve (608), the third valve (609) and / or the fourth valve (6010); A condensation mechanism (300) comprises a condensation plate (301), a positioning assembly (302), a first water cooler (303), and a first connecting assembly (304); wherein the condensation plate (301) is fixed to a first plane in the vacuum chamber via the positioning assembly (302); a first channel is provided inside the condensation plate (301); the first channel is connected to the first water cooler (303) via the first connecting assembly (304); and the temperature of the condensation plate (301) can be adjusted in real time via the first water cooler (303); The bearing mechanism (400) comprises a bearing platform (401) and a transmission assembly (402), wherein one end of the transmission assembly (402) is fixedly connected to the bearing platform (401) and the other end is connected to the lifting mechanism (500); The lifting mechanism (500) comprises a fixing assembly (501), a sliding assembly (502) and a supporting assembly (503); wherein the fixing assembly (501) comprises a first fixing plate and a second fixing plate, the first fixing plate and the second fixing plate being fixed to two sides of the vacuum box (100) respectively, and the sliding assembly (502) comprises a first sliding plate, a second sliding plate, a motor (5021), a transmission shaft (5022), a first commutator (5023) and a second commutator (5024); the first sliding plate and the second sliding plate are respectively connected to the first fixing plate and the second fixing plate in a sliding manner; one end of the first commutator (5023) is connected to the first sliding plate, and the other end is connected to one end of the second commutator (5024) through the transmission shaft (5022), and the other end of the second commutator (5024) is connected to the second sliding plate; the motor (5021) is connected to the first commutator (5023), and drives the first sliding plate and the second sliding plate to slide synchronously through the transmission shaft (5022); The first sliding plate and the second sliding plate are both fixedly connected to the support assembly (503), and the support assembly (503) is fixedly connected to the transmission assembly (402); the transmission assembly (402) drives the supporting platform (401) to move up and down through the synchronous sliding of the first sliding plate and the second sliding plate, thereby adjusting the distance between the substrate placed on the supporting platform (401) and the condensation plate (301).

2. The vacuum drying system for preparing a display panel according to claim 1, wherein: The sliding assembly (502) further includes a steering plate (5025), one end of the first sliding plate connected to the support assembly (503) and one end of the second sliding plate connected to the support assembly (503) both extend out of a first end and a second end, the first end and the second end are both connected to the steering plate (5025), the support assembly (503) includes four support plates, and the four support plates are connected to the four steering plates (5025) in a one-to-one correspondence; the transmission assembly (402) includes four transmission shafts, one end of the four transmission shafts is fixedly connected to the bearing platform (401) for supporting the bearing platform (401); the other ends of the four transmission shafts are connected to the four support plates in a one-to-one correspondence; the four transmission shafts drive the substrate on the bearing platform (401) to perform a lifting movement through the synchronous sliding of the first sliding plate and the second sliding plate; wherein the first sliding plate and the second sliding plate are located at the same height.

3. The vacuum drying system for preparing a display panel according to claim 1, wherein: The carrying mechanism (400) further comprises a second connecting component (403), a second channel is provided inside the carrying platform (401), the second channel is connected to a second water cooler via the second connecting component (403), and the temperature of the carrying platform (401) can be adjusted in real time via the second water cooler.

4. The vacuum drying system for preparing a display panel according to claim 1, wherein: The bearing mechanism (400) further comprises a first limiting assembly (404), the first limiting assembly (404) comprising a support shaft (4041) and a limiting shaft (4042); the bearing platform (401) is provided with a through hole, the support shaft (4041) is passed through the through hole, and is used to support the substrate and limit the position of the bearing platform (401) in the plane of the substrate transmission direction; the diameter of the limiting shaft (4042) is greater than the diameter of the through hole, and is used to limit the maximum distance between the bearing platform (401) and the condensation plate (301); The carrying mechanism (400) further comprises a second position-limiting component (405), which is arranged on the carrying platform (401) and is used to limit the position of the substrate in the plane of the transmission direction.

5. The vacuum drying system for preparing a display panel according to claim 1, wherein: The vacuum pump (200) further comprises a molecular pump (202); one end of the molecular pump (202) is connected to the vacuum box (100), and the other end is connected to the sixth pipe (606) via a tenth pipe (6018); a vacuum gauge (6019) and a fifth valve (6011) are provided on the tenth pipe (6018); wherein, when the first valve (607), the second valve (608), the third valve (609), and the fourth valve (6010) are all closed and the vacuum gauge (6019) detects that the air pressure in the vacuum box (100) reaches a preset threshold value, the molecular pump (202) is controlled via the fifth valve (6011) to evacuate the vacuum chamber in the vacuum box (100).

6. The vacuum drying system for preparing a display panel according to claim 1, wherein: The vacuum control mechanism further comprises a seventh pipeline (6012); one end of the seventh pipeline (6012) is connected to the second pipeline (602), and the other end is connected in parallel to two branches; a flow meter (6013) and a sixth valve (6014) are provided on each of the two branches; the other ends of the two branches are connected to an air supply device (6015); wherein the sixth valve (6014) is used to control the on / off state of the branch; the flow rates of the flow meters (6013) on the two branches are different; the on / off state of the sixth valve (6014) is used to supply air to the second pipeline (602) at different flow rates.

7. The vacuum drying system for preparing a display panel according to claim 1, wherein: An eighth pipe (6016) is provided on the side wall of the vacuum box (100), one end of the eighth pipe (6016) is connected to the vacuum box (100), and the other end is connected to the transmission chamber, and a seventh valve (6017) is provided on the eighth pipe (6016); when the vacuum box (100) receives the substrate transmitted by the transmission chamber, the seventh valve (6017) is opened to make the chamber air pressure in the vacuum box (100) and the chamber air pressure in the transmission chamber consistent.

8. The vacuum drying system for preparing a display panel according to claim 1, wherein: The vacuum drying system further comprises an air delivery mechanism (700), wherein the air delivery mechanism (700) comprises a ninth pipeline (701), an eighth valve (702), a ninth valve (703), a tenth valve (704) and an eleventh valve (705); one end of the ninth pipeline (701) is connected to the vacuum box (100), and the other end is connected in parallel to two first branches, one first branch is provided with an eighth valve (702), and the other first branch is provided with a ninth valve (703) and a tenth valve (704), and the tenth valve (704) is used to adjust the flow rate of the branch; the other ends of the two first branches are connected in parallel to two second branches, each of the second branches is provided with an eleventh valve (705); the other end of one second branch is used to deliver air, and the other end of the other second branch is used to deliver nitrogen.

9. The vacuum drying system for preparing a display panel according to claim 1, wherein: The vacuum box (100) is placed on a frame, and a maintenance mechanism (800) is provided on the frame; the maintenance mechanism (800) comprises a flange (801), a knob (802), a first rotating arm (803), a second rotating arm (804), a first rotating shaft (805), and a second rotating shaft (806); the flange (801) is fixedly connected to the upper cover of the vacuum box (100), the knob (802) passes through the first rotating arm (803) and is threadedly connected to the flange (801), the first rotating arm (803) and the second rotating arm (804) are rotationally connected via the first rotating shaft (805), and the second rotating arm (804) is rotationally connected to the frame via the second rotating shaft (806); The knob (802) can rotate around the first rotating arm (803) to drive the upper cover plate to move in a direction away from the vacuum chamber of the vacuum box (100), and the coordinated movement of the first rotating arm (803) and the second rotating arm (804) can drive the upper cover plate to move in a direction close to the frame; A limit block (807) is provided on the frame, and the limit block has two surfaces perpendicular to each other, the first surface is used to limit the position of the vacuum box (100) in the conveying direction of the substrate, and the second surface is used to limit the position of the upper cover plate of the vacuum box (100) in the width direction of the substrate.

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