A material handling control method, device, apparatus, system and storage medium

Abstract

Embodiments of the present application disclose a material handling control method, device, equipment, system and storage medium; the method can comprise: when receiving the preparation feeding instruction sent by the process equipment, obtaining the material storage state information of the feeding port of the process equipment and the temporary storage site corresponding to the feeding port; obtaining the conveying duration required by the handling equipment to execute a handling task; corresponding to the conveying duration being greater than the single process duration of the process equipment, determining the description information of the first handling command according to the material storage state information of the feeding port of the process equipment and the temporary storage site corresponding to the feeding port; transmitting the description information to the RTD through the MES, so that the RTD generates a corresponding number of first handling commands and sets the trigger interval duration between each first handling command, and then instructs the MCS to execute material handling according to the generated first handling command and the trigger interval duration through the MES.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a material handling control method, apparatus, equipment, system and storage medium. Background Technology

[0002] In the semiconductor manufacturing industry, such as silicon wafer manufacturing and integrated circuit production, many process equipment have short processing times. To improve equipment uptime, multiple temporary material storage positions (also known as buffer positions) are usually set up at the loading and unloading ports of the equipment. The required materials are placed in the buffer positions in advance to wait for the process equipment to perform the corresponding processing, thereby shortening the waiting time for the process equipment to process materials.

[0003] Currently, automated production systems all achieve automatic material handling and loading / unloading. Typically, taking loading as an example, after the load port of the process equipment issues a Ready To Load (RTL) command, the Manufacturing Execution System (MES) sends the first material handling command to the Material Control System (MCS). The handling equipment in the MCS, such as Automated Guided Vehicles (AGVs) and / or Overhead Hoist Transports (OHTs), executes the first material handling command to move the required materials to the load port of the process equipment. Once the materials delivered to the load port are transferred to a temporary storage location, the load port of the process equipment will issue another RTL command and begin the next material handling operation.

[0004] Regarding the current material handling scheme, if the material transport time of the handling equipment exceeds the process time of the process equipment, then after the process equipment completes its processing of the current material, it needs to wait for a period of time to receive the next material and perform processing. During the waiting time, the process equipment is in an idle state. Frequent idle periods reduce the utilization rate of the process equipment. Summary of the Invention

[0005] In view of this, embodiments of the present invention aim to provide a material handling control method, apparatus, equipment, system, and storage medium; which can reduce the number of times process equipment is idle and improve the utilization rate of process equipment.

[0006] The technical solution of this invention is implemented as follows:

[0007] In a first aspect, embodiments of the present invention provide a material handling control method, the method comprising:

[0008] When a preparation loading instruction is received from the process equipment, the material storage status information of the loading port of the process equipment and the corresponding temporary material storage location is obtained.

[0009] Obtain the transport time required for the handling equipment to perform one handling task;

[0010] Since the conveying time is longer than the single process time of the process equipment, the description information for issuing the first conveying command in batches is determined based on the material storage status information of the loading port of the process equipment and the material temporary storage position corresponding to the loading port; wherein, the description information includes the number of the first conveying commands to be issued in batches and the trigger interval between each first conveying command.

[0011] The description information is transmitted from the Manufacturing Execution System (MES) to the Real-Time Dispatch System (RTD), so that the RTD generates a corresponding number of first handling commands in batches and sets the trigger interval between each first handling command. Then, the MES instructs the Material Control System (MCS) to perform material handling according to the generated first handling commands and the trigger interval.

[0012] In some examples, the transport time required for the transport equipment to perform one transport task includes: a first time T1 for the material storage system STK to transfer materials to the inner outlet, a second time T2 for transferring materials from the inner outlet to the outer outlet, a third time T3 for the transport equipment to move to the outer outlet and load materials, a fourth time T4 for the transport equipment carrying materials to move from the outer outlet to the loading port of the process equipment EQP, a fifth time T5 for transferring the materials loaded by the transport equipment at the loading port of EQP and placing them at the loading port, and a sixth time T6 for transferring the materials placed at the loading port to the temporary material storage location.

[0013] In some examples, obtaining the material storage status information of the feed port of the process equipment and the corresponding temporary material storage location includes:

[0014] By monitoring the load-bearing induction signals of the feed port and temporary material storage location of the process equipment, the feed port and temporary material storage location that carry materials and the feed port and temporary material storage location that do not carry materials in the process equipment can be determined.

[0015] In some examples, the description information for determining the batch issuance of the first handling command based on the material storage status information of the loading port of the process equipment and the corresponding temporary material storage location includes:

[0016] The number of first handling commands to be issued in batches is determined based on the material storage status information of the feed port of the process equipment and the corresponding temporary material storage location.

[0017] The trigger interval between each first transport command is obtained based on the time difference between the transport time and the single process time of the process equipment.

[0018] In some examples, the description information for determining the batch issuance of the first handling command based on the material storage status information of the loading port of the process equipment and the corresponding temporary material storage location includes:

[0019] The number of first handling commands to be issued in batches is determined based on the number of loading ports without material and the number of temporary material storage locations in the material storage status information.

[0020] The trigger interval between each first transport command is obtained based on the time difference between the transport time and the single process time of the process equipment.

[0021] In some examples, obtaining the trigger interval duration between each first transport command based on the duration difference between the transport duration and the single process duration of the process equipment includes:

[0022] Since the conveying time is much longer than the single process time of the process equipment, the trigger interval is set to 0;

[0023] The total movement time of the conveying equipment in the conveying time is greater than the single process time of the process equipment. The trigger interval is determined to be the sum of the time for transferring the material loaded by the conveying equipment to the corresponding loading port at the loading port of the process equipment EQP and the time for transferring the material placed at the loading port to the buffer position.

[0024] Since the total movement time of the conveying equipment in the conveying time is less than the single process time of the process equipment, the trigger interval is determined to be the sum of the time for transferring the material loaded by the conveying equipment to the corresponding loading port at the loading port of the process equipment EQP, the time for transferring the material placed at the loading port to the buffer position, and the set time compensation value.

[0025] The total movement time of the conveying equipment is the sum of the time it takes for the conveying equipment to move to the outer outlet and load the material and the time it takes for the conveying equipment carrying the material to move from the outer outlet to the loading port of the EQP.

[0026] In some examples, the method further includes:

[0027] When the material in the buffer position of the process equipment is transferred to the main body of the process chamber of the process equipment, the RTU instruction for preparing to unload is sent from the loading port of the process equipment.

[0028] The MES sends the RTU instruction to the RTD, so that the RTD generates a second handling command according to the RTU instruction, and the MES instructs the MCS to move the material packaging away from the loading port of the process equipment according to the second handling command.

[0029] Secondly, embodiments of the present invention provide a material handling control device, the device comprising: a receiving section, a first acquiring section, a second acquiring section, a determining section, and a reporting section; wherein...

[0030] The receiving section is configured to receive the preparation loading instruction sent by the process equipment;

[0031] The first acquisition part is configured to acquire the material storage status information of the loading port of the process equipment and the material temporary storage position corresponding to the loading port when a preparation loading instruction is received from the process equipment.

[0032] The second acquisition part is configured to acquire the transport time required for the transport equipment to perform one transport task;

[0033] The determining part is configured to correspond to the conveying time being greater than the single process time of the process equipment. Based on the material storage status information of the loading port of the process equipment and the material storage location corresponding to the loading port, the description information for issuing the first conveying command in batches is determined. The description information includes the number of first conveying commands to be issued in batches and the trigger interval between each first conveying command.

[0034] The reporting section is configured to report the description information to the Manufacturing Execution System (MES) and transmit the description information to the Real-Time Dispatch System (RTD) through the MES. This enables the RTD to generate a corresponding number of first handling commands in batches and set the trigger interval between each first handling command. Then, the MES instructs the Material Control System (MCS) to perform material handling according to the generated first handling commands and the trigger interval.

[0035] Thirdly, embodiments of the present invention provide a computing device, the computing device including a processor and a memory; the processor is configured to execute instructions stored in the memory to cause the computing device to perform the material handling control method as described in the first aspect and any example of the first aspect.

[0036] Fourthly, embodiments of the present invention provide a material handling control system, the system comprising: a Manufacturing Execution System (MES), an Equipment Automation Control System (EAP), process equipment, a Real-Time Dispatch System (RTD), and a Material Control System (MCS); wherein,

[0037] The EAP is used to receive the preparation loading instruction sent by the process equipment;

[0038] In addition, when a preparation loading instruction is received from the process equipment, the material storage status information of the loading port of the process equipment and the corresponding temporary material storage location is obtained.

[0039] In addition, the time required for the handling equipment to perform one handling task;

[0040] And, corresponding to the fact that the conveying time is greater than the single process time of the process equipment, the description information of the batch issuance of the first conveying command is determined based on the material storage status information of the loading port of the process equipment and the material temporary storage position corresponding to the loading port; wherein, the description information includes the number of the first conveying commands to be issued in batch and the trigger interval between each first conveying command.

[0041] And, the description information is reported to the MES;

[0042] The MES is used to transmit the description information to the RTD;

[0043] The RTD is used to generate a corresponding number of first transport commands in batches according to the description information, set the trigger interval between each first transport command, and report it to the MES.

[0044] The MES is also used to send the first transport command generated in batches by RTD and the trigger interval duration to the MCS;

[0045] The MCS is used to execute the first batch of transport commands generated according to the trigger interval to perform material transport.

[0046] Fifthly, embodiments of the present invention provide a computer storage medium, characterized in that the storage medium stores at least one instruction, the at least one instruction being executed by a processor to implement the material handling control method as described in the first aspect and any example of the first aspect.

[0047] In a sixth aspect, embodiments of the present invention provide a computer program product including computer instructions stored in a computer-readable storage medium; a processor of an electronic device reads the computer instructions from the computer-readable storage medium and executes the computer instructions, causing the electronic device to perform to implement the material handling control method as described in the first aspect and any example of the first aspect.

[0048] This invention provides a material handling control method, apparatus, equipment, system, and storage medium. Upon receiving a material handling instruction from a process device, multiple first material handling commands are generated in batches based on the single process duration of the process device and the status information of the process device's load port and corresponding loading buffer. These commands are then executed by multiple material handling devices. This ensures that the process device remains in a state of processing materials while waiting for the next RTL instruction, preventing the process device from being idle and improving the utilization rate of the process device. Attached Figure Description

[0049] Figure 1 This is a schematic diagram of the implementation environment provided for an embodiment of the present invention;

[0050] Figure 2 This is a schematic flowchart of a material handling control method provided in an embodiment of the present invention;

[0051] Figure 3 This is a schematic diagram of the composition of the process equipment provided in an embodiment of the present invention;

[0052] Figure 4 This is a schematic diagram of the composition of a material storage system provided in an embodiment of the present invention;

[0053] Figure 5 This is a schematic diagram of the composition of a material handling control device provided in an embodiment of the present invention;

[0054] Figure 6 This is a schematic diagram of the structure of a computing device provided in an embodiment of the present invention. Detailed Implementation

[0055] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

[0056] The terms "first" and "second" used in the embodiments of this invention are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first" and "second" may explicitly or implicitly include one or more of that feature.

[0057] See Figure 1 The diagram shown illustrates an implementation environment in which the technical solutions of the embodiments of the present invention can be carried out. Figure 1 In this system, the Equipment Automation Program (EAP) can interact with the process equipment (EQP, Equipment), monitor its status, and acquire its handling requests, reporting these requests to the Manufacturing Execution System (MES). The MES can interact with the Real-Time Dispatch System (RTD), enabling the RTD to generate a first handling command based on the handling requests forwarded by the MES and send it back to the MES. The MES then issues the first handling command to the Manufacturing Execution System (MCS). The MCS executes the first handling command, causing the AGVs and / or OHTs (Automatic Guided Vehicles) acting as handling equipment to move the required materials from the Stocker (STK) system to the process equipment. Understandably, the process equipment (EQP) can be any process execution device at any process node in the manufacturing process, such as a crystal pulling furnace, multi-wire cutting machine, grinding equipment, polishing equipment, cleaning equipment, etc., and this embodiment of the invention does not limit this.

[0058] Specifically, taking a material handling request as an Prepare for Loading (RTL) instruction as an example, after the process equipment issues an RTL instruction to the EAP, it needs to wait for the AGV and / or OHT to complete the material handling required by that RTL instruction before issuing the next RTL instruction. During the waiting period for the next RTL instruction, if the processing time of the process equipment is less than the waiting time, the process equipment will be idle for a portion of the waiting period, reducing the utilization rate of the process equipment.

[0059] In view of this, embodiments of the present invention aim to provide a material handling control scheme that, upon receiving a material handling instruction from a process equipment, can generate multiple first material handling commands in batches based on the single process duration of the process equipment and the status information of the load port, unload port, and corresponding loading and unloading buffer bits of the process equipment. This allows multiple material handling devices to execute the first material handling commands respectively. Consequently, while waiting for the next RTL instruction, the process equipment maintains a state of processing materials, avoiding situations where the process equipment is idle and improving the utilization rate of the process equipment.

[0060] Based on this, see Figure 2 This illustrates an embodiment of the present invention that aims to provide a material handling control method, which can be implemented by, for example... Figure 1 The EAP implementation shown herein includes the following method:

[0061] S201: When a Ready to Load (RTL) instruction is received from the process equipment, the material storage status information of the loading port of the process equipment and the corresponding temporary material storage location is obtained.

[0062] In this embodiment of the invention, combined with Figure 1 In the illustrated implementation environment, the EAP controls the EQP (Enterprise Equipment) to perform production processing according to a predefined process through communication interaction, and also provides remote control and status monitoring of the EQP. In some examples, the EAP can send instructions to the EQP, which may be generated by the MES (Manufacturing Execution System) or the EAP itself, to instruct the EQP on various aspects of the process. Furthermore, the EAP can receive request instructions from the EQP. The EAP processes these request instructions and replies or feeds back the results to the EQP. If the EAP cannot process a request instruction itself, it can report it to the MES for processing or distribution to a destination capable of handling the request instruction.

[0063] In some examples, the EAP can at least monitor the current operating status of the EQP, such as process status, idle status, rest status, and sleep status. Furthermore, the EAP can also monitor the material storage status of the EQP's loading and unloading ports and their corresponding buffer positions, such as whether the loading and unloading ports currently contain material, and whether the corresponding buffer positions contain material. In addition, the EAP can monitor other types of EQP statuses based on production and manufacturing needs, which will not be elaborated upon in this embodiment.

[0064] In some examples, such as Figure 3 The diagram shows the composition of an exemplary process apparatus 30. Typically, the process apparatus may include a loading section (Loader) 31, a process chamber body 32, and an unloading section (UnLoader) 33. Taking Loader 31 as an example, it may include a loading port and a buffer position, such as... Figure 3 As shown in the example, loading ports L11 and L12 are connected to the AGV and OHT, respectively. After the AGV and OHT transport the materials to be processed to the process equipment, the materials can be transferred from the AGV and / or OHT and placed at the corresponding loading ports using automated conveyor or transfer devices, such as robotic arms or conveyor belts. Figure 3 As shown in the example, there are two buffer positions. The material to be processed, already transferred to the loading port L11 or L12, will be transferred from the loading port to the buffer position. After the process is completed in the process chamber body 32 of the process equipment, the material to be processed in the buffer position will be transferred to the process chamber body 32 to perform the process. Figure 3In this configuration, the material on buffer position BU 11 can be directly transferred to the main body of the process chamber 32, such as... Figure 3 As indicated by the arrow, material at buffer position BU 12 can only be transferred to buffer position BU 11 before it can be transferred to the main body of the process chamber 32. In the above example, the EAP can monitor the status of the EQP to obtain information on the material storage status of the process equipment's loading port and the corresponding temporary material storage location.

[0065] S202: Obtain the transport time required for the handling equipment to perform one handling task;

[0066] In this embodiment of the invention, the duration of communication transmission of various types of information, electrical signals, and instructions between systems is ignored, and combined with Figure 4 The STK structure diagram shown illustrates the typical transport time required for a transport device to perform one transport task, which includes: a first time T1 for the STK to transfer material to the inner outlet Port-1; a second time T2 for transferring material from the inner outlet Port-1 to the outer outlet Port-2; a third time T3 for the AGV and / or OHT to move to the outer outlet Port-2 and load material; a fourth time T4 for the AGV and / or OHT carrying material to move from the outer outlet Port-2 to the loading port of the process equipment EQP; a fifth time T5 for transferring the material loaded by the AGV and / or OHT to the corresponding loading ports L11 and / or L12 at the loading port of the process equipment EQP; and a sixth time T6 for transferring the material placed at the loading port to the buffer position. EAP can obtain these various timeframes by statistically analyzing historical processing data of the process equipment. The transport time T required for the transport device to perform one transport task is... trans =T1+T2+T3+T4+T5+T6. Since STK is usually not located near EQP, but may be in different factories or warehouses, the physical distance between STK and EQP is usually quite far. Based on this, in T... trans In the meantime, T3 and T4 are significantly longer than the others.

[0067] S203: Corresponding to the fact that the conveying time is longer than the single process time of the process equipment, based on the material storage status information of the loading port of the process equipment and the material storage location corresponding to the loading port, determine the description information for issuing the first conveying command in batches; wherein, the description information includes the number of first conveying commands to be issued in batches and the trigger interval between each first conveying command.

[0068] In this embodiment of the invention, the single process duration of the process equipment is set to T. op If T trans Less than T opThis indicates that during the process, there is sufficient time to move the material from STK to the feed port and then to the buffer position. Under these circumstances, the process equipment is unlikely to enter an Idle state. However, for process equipment with shorter process durations, T will occur. trans Greater than T op If this happens, it means that when the process equipment completes the process, the material is most likely still in transit and cannot be fed into the loading port in time. In this case, the process equipment is likely to be in an Idle state.

[0069] To reduce the frequency of idle state in process equipment, or even to avoid it altogether, when T trans Greater than T op At the same time, multiple first handling commands can be issued in batches for execution by MCS, and a trigger interval can be set for each first handling command, so that the loading port of the process equipment can always keep material in place and avoid the process equipment from entering an idle state.

[0070] S204: The description information is transmitted from the Manufacturing Execution System (MES) to the Real-Time Dispatch System (RTD) so that the RTD generates a corresponding number of first handling commands in batches and sets the trigger interval between each first handling command. Then, the MES instructs the Material Control System (MCS) to perform material handling according to the generated first handling commands and the trigger interval.

[0071] In this embodiment of the invention, since the first transport command is generated by the RTD and sent to the MCS for execution by the MES, the EAP can report the description information obtained in S203 to the MES, and the MES can transmit it to the RTD. The RTD triggers and generates the first transport commands in batches according to the description information, sets the trigger interval between each first transport command, and transmits it to the MES. The MES sends the batch-generated first transport commands from the RTD and the trigger interval to the MCS, so that the MCS executes the batch-generated first transport commands according to the trigger interval, thereby avoiding the idle state of the process equipment.

[0072] Through the above Figure 2 The technical solution shown, upon receiving a material handling instruction from the process equipment, generates multiple first material handling commands in batches based on the single process duration of the process equipment and the status information of the load port and corresponding loading buffer bits. This allows multiple material handling devices to execute the first material handling commands respectively. Consequently, while waiting for the next RTL instruction, the process equipment remains in a state of processing materials, avoiding idle states and improving the utilization rate of the process equipment.

[0073] for Figure 2 In some possible implementations of the technical solution shown, obtaining the material storage status information of the feed port of the process equipment and the corresponding temporary material storage location includes:

[0074] By monitoring the load-bearing induction signals of the feed port and temporary material storage location of the process equipment, the feed port and temporary material storage location that carry materials and the feed port and temporary material storage location that do not carry materials in the process equipment can be determined.

[0075] Specifically, for the above implementation, sensors can be installed at the feed port and buffer position of the process equipment. These sensors generate a load-bearing sensing signal using pressure or image signals. This signal indicates whether the feed port and buffer position are carrying material. More specifically, after the material from the feed port is transferred to the buffer position, the process equipment sends an RTL command to the EAP through the feed port. Upon receiving the RTL command, the EAP receives the load-bearing sensing signals from the feed port and the material buffer position to determine which feed ports and buffer positions are carrying material and which are not. Based on this RTL command, the MES issues a first handling command to instruct the handling equipment to move the required material to the feed port of the process equipment.

[0076] for Figure 2 In some possible implementations of the technical solution shown, the step of determining the description information for issuing the first handling command in batches based on the material storage status information of the loading port of the process equipment and the corresponding temporary material storage location includes:

[0077] The number of first handling commands to be issued in batches is determined based on the number of loading ports without material and the number of temporary material storage locations in the material storage status information.

[0078] The trigger interval between each first transport command is obtained based on the time difference between the transport time and the single process time of the process equipment.

[0079] Specifically, after receiving the RTL instruction, the EAP needs to send a first handling command to the MCS via the MES. This allows the MCS's handling equipment to execute the first handling command to transport the required materials to the loading port of the process equipment. For the process equipment, loading ports and temporary material storage locations that do not currently hold materials require material handling. If a handling device is configured to carry the same amount of material as a single loading port or buffer position, then the same number of handling devices as the number of loading ports and buffer positions without material holdings needs to be assigned for material handling. In other words, if each first handling command is executed by a single handling device, then the number of first handling commands that need to be issued in batches is the same as the number of loading ports and buffer positions without material holdings.

[0080] Furthermore, if the transport time exceeds the single process duration of the process equipment, the equipment may enter an idle state. To avoid this, multiple transport devices need to be deployed within a short timeframe to ensure that materials are transported to the loading port in a timely manner within the process duration of the equipment. In other words, a trigger interval needs to be set between the first transport commands issued in batches.

[0081] Based on this, in some examples, obtaining the trigger interval duration between each first transport command based on the duration difference between the transport duration and the single process duration of the process equipment includes:

[0082] Since the conveying time is much longer than the single process time of the process equipment, the trigger interval is set to 0;

[0083] The total movement time of the handling equipment in the conveying time is greater than the single process time of the process equipment. The trigger interval is determined to be the sum of the time for transferring the material loaded by the handling equipment (AGV and / or OHT) at the loading port of the process equipment EQP and placing it at the corresponding loading port and the time for transferring the material placed at the loading port to the buffer position.

[0084] Since the total movement time of the conveying equipment in the aforementioned conveying time is less than the single process time of the process equipment, the trigger interval is determined to be the sum of the time for transferring the material loaded by the conveying equipment (AGV and / or OHT) at the loading port of the process equipment EQP and placing it at the corresponding loading port, the time for transferring the material placed at the loading port to the buffer position, and the set time compensation value; wherein, the total movement time of the conveying equipment is the sum of the time for the conveying equipment to move to the outer outlet and load the material and the time for the conveying equipment carrying the material to move from the outer outlet to the loading port of the EQP.

[0085] In the example above, specifically, during the transport time T... trans Much greater than the single process time T of the process equipment op In the case of (Case 1), for example This means the material handling equipment is moving slowly, requiring multiple pieces of equipment to move the material simultaneously to the loading port within the process time of the equipment. In this case, the trigger interval is 0. Regarding case one, even if multiple transport commands are triggered simultaneously, the STK shipments are queued sequentially. For example, the material is first moved from STK to port-1, and then to port-2. Therefore, the AGV / OHT also queues sequentially to move the material out from port-2. Within a certain time period, multiple transport devices will move sequentially along the transport route. Upon reaching the loading port L11, the material will be continuously transported to the loading port in sequence, reducing intermediate waiting time and improving equipment utilization.

[0086] When the total movement time of the transport equipment during the transport duration is greater than the single process duration of the process equipment (Case 2), it indicates that the transport speed of the transport equipment is slower, but faster than the transport speed indicated in Case 1. Therefore, the trigger interval should be relatively small. In this embodiment of the invention, the trigger interval is the sum of the time for transferring the material loaded by the transport equipment (AGV and / or OHT) at the loading port of the process equipment EQP and placing it at the corresponding loading port, and the time for transferring the material placed at the loading port to the buffer position.

[0087] If the total movement time of the transport equipment is less than the single process time of the process equipment (Case 3), it means that the transport speed of the transport equipment is faster than that described in Case 2. Therefore, compared to Case 2, the trigger interval can be appropriately extended. For example, a set duration compensation value can be added to the trigger interval described in Case 2. In this embodiment of the invention, the set duration compensation value can be selected as the difference between the single process time of the process equipment and the total movement time of the transport equipment. Of course, the duration compensation value can also be adjusted according to the actual transport speed.

[0088] Through the above technical solutions, implementation methods and examples, when material handling is required, if the handling time is longer than the single process time of the process equipment, then according to the material storage status information of the loading port of the process equipment and the corresponding temporary material storage position, the first handling command is issued in batches and the trigger interval between the first handling commands is set, so that the loading port of the process equipment can always keep the material placed, and the process equipment is prevented from entering the idle state.

[0089] In some possible implementations of the aforementioned technical solution, the method further includes:

[0090] When the material in the buffer position of the process equipment is transferred to the main body of the process chamber of the process equipment, the ready unloading (RTU) instruction sent by the loading port of the process equipment is received.

[0091] The MES sends the RTU instruction to the RTD, so that the RTD generates a second handling command according to the RTU instruction, and the MES instructs the MCS to move the material packaging away from the loading port of the process equipment according to the second handling command.

[0092] Specifically, after the material in the buffer position is transferred to the main process chamber of the process equipment, the material package, such as an empty open wafer cassette (OC), will be placed at the loading port. The loading port of the process equipment triggers an RTU command based on the material package it carries, in order to remove the material package. During the dispatching process of the transport equipment, if the material in the buffer position is quickly transferred to the main process chamber of the process equipment, and the material package at the loading port has not yet been processed, then the buffer position of the process equipment can also trigger an RTU. This allows the transport equipment to be in transit, reducing the waiting time between transports.

[0093] Based on the same inventive concept as the aforementioned technical solution, see [link to inventive concept]. Figure 5 This illustration shows a material handling control device 50 provided by an embodiment of the present invention. The device includes: a receiving section 501, a first acquiring section 502, a second acquiring section 503, a determining section 504, and a reporting section 505; wherein,

[0094] The receiving part 501 is configured to receive the preparation loading instruction sent by the process equipment;

[0095] The first acquisition part 502 is configured to acquire the material storage status information of the loading port of the process equipment and the material temporary storage position corresponding to the loading port when it receives the preparation loading instruction sent by the process equipment.

[0096] The second acquisition part 503 is configured to acquire the transport time required for the transport equipment to perform one transport task;

[0097] The determining part 504 is configured to correspond to the conveying time being greater than the single process time of the process equipment. Based on the material storage status information of the loading port of the process equipment and the material storage location corresponding to the loading port, it determines the description information for issuing the first conveying command in batches. The description information includes the number of first conveying commands to be issued in batches and the trigger interval between each first conveying command.

[0098] The reporting section 505 is configured to report the description information to the Manufacturing Execution System (MES) and transmit the description information to the Real-Time Dispatch System (RTD) through the MES. This enables the RTD to generate a corresponding number of first handling commands in batches and set the trigger interval between each first handling command. Then, the MES instructs the Material Control System (MCS) to perform material handling according to the generated first handling commands and the trigger interval.

[0099] In some examples, the transport time required for the transport equipment to perform one transport task includes: a first time T1 for the material storage system STK to transfer materials to the inner outlet, a second time T2 for transferring materials from the inner outlet to the outer outlet, a third time T3 for the transport equipment to move to the outer outlet and load materials, a fourth time T4 for the transport equipment carrying materials to move from the outer outlet to the loading port of the process equipment EQP, a fifth time T5 for transferring the materials loaded by the transport equipment at the loading port of EQP and placing them at the loading port, and a sixth time T6 for transferring the materials placed at the loading port to the temporary material storage location.

[0100] In some examples, the first acquisition portion 502 is configured as follows:

[0101] By monitoring the load-bearing induction signals of the feed port and temporary material storage location of the process equipment, the feed port and temporary material storage location that carry materials and the feed port and temporary material storage location that do not carry materials in the process equipment can be determined.

[0102] In some examples, the second acquisition section 503 is configured as follows:

[0103] The number of first handling commands to be issued in batches is determined based on the material storage status information of the feed port of the process equipment and the corresponding temporary material storage location.

[0104] The trigger interval between each first transport command is obtained based on the time difference between the transport time and the single process time of the process equipment.

[0105] In some examples, the second acquisition section 503 is configured as follows:

[0106] The number of first handling commands to be issued in batches is determined based on the number of loading ports without material and the number of temporary material storage locations in the material storage status information.

[0107] The trigger interval between each first transport command is obtained based on the time difference between the transport time and the single process time of the process equipment.

[0108] In some examples, the second acquisition section 503 is configured as follows:

[0109] Since the conveying time is much longer than the single process time of the process equipment, the trigger interval is set to 0;

[0110] The total movement time of the conveying equipment in the conveying time is greater than the single process time of the process equipment. The trigger interval is determined to be the sum of the time for transferring the material loaded by the conveying equipment to the corresponding loading port at the loading port of the process equipment EQP and the time for transferring the material placed at the loading port to the buffer position.

[0111] Since the total movement time of the conveying equipment in the conveying time is less than the single process time of the process equipment, the trigger interval is determined to be the sum of the time for transferring the material loaded by the conveying equipment to the corresponding loading port at the loading port of the process equipment EQP, the time for transferring the material placed at the loading port to the buffer position, and the set time compensation value.

[0112] The total movement time of the conveying equipment is the sum of the time it takes for the conveying equipment to move to the outer outlet and load the material and the time it takes for the conveying equipment carrying the material to move from the outer outlet to the loading port of the EQP.

[0113] In some examples, the receiving portion 501 is also configured to receive a ready-to-unload RTU command sent by the loading port of the process equipment when the material in the buffer position of the process equipment is transferred to the process chamber body of the process equipment.

[0114] The reporting section 505 is also configured to report the RTU instruction to the MES and issue the RTU instruction to the RTD through the MES, so that the RTD generates a second handling command according to the RTU instruction and instructs the MCS to move the material packaging from the loading port of the process equipment according to the second handling command through the MES.

[0115] Please refer to Figure 6 This diagram illustrates a structural block diagram of a computing device provided in an exemplary embodiment of this application. The computing device in this application may include one or more components such as a processor 610 and a memory 620.

[0116] Optionally, the processor 610 connects various parts within the computing device using various interfaces and lines, and performs various functions and processes data by running or executing instructions, programs, code sets, or instruction sets stored in the memory 620, and by calling data stored in the memory 620. Optionally, the processor 610 can be implemented using at least one hardware form of Digital Signal Processing (DSP), Field-Programmable Gate Array (FPGA), or Programmable Logic Array (PLA). The processor 610 can integrate one or a combination of several of the following: Central Processing Unit (CPU), Graphics Processing Unit (GPU), Neural-network Processing Unit (NPU), and baseband chip. Specifically, the CPU primarily handles the operating system, user interface, and applications; the GPU is responsible for rendering and drawing the content required to be displayed on the touch screen; the NPU is used to implement Artificial Intelligence (AI) functions; and the baseband chip is used to handle wireless communication. It is understandable that the aforementioned baseband chip may not be integrated into the processor 610, but may be implemented using a separate chip.

[0117] The memory 620 may include random access memory (RAM) or read-only memory (ROM). Optionally, the memory 620 may include a non-transitory computer-readable storage medium. The memory 620 may be used to store instructions, programs, code, code sets, or instruction sets. The memory 620 may include a program storage area and a data storage area, wherein the program storage area may store instructions for implementing an operating system, instructions for at least one function (such as touch function, sound playback function, image playback function, etc.), instructions for implementing the material handling control methods described in the above embodiments, etc.; the data storage area may store data created according to the use of the computing device, etc.

[0118] In addition, those skilled in the art will understand that the structure of the computing device shown in the above figures does not constitute a limitation on the computing device. The computing device may include more or fewer components than shown, or combine certain components, or have different component arrangements. For example, the computing device may also include a display screen, camera assembly, microphone, speaker, radio frequency circuit, input unit, sensors (such as accelerometer, angular velocity sensor, light sensor, etc.), audio circuit, WiFi module, power supply, Bluetooth module, etc., which will not be described in detail here.

[0119] This application also provides a computer-readable storage medium storing at least one instruction, which is executed by a processor to implement the material handling control method described in the above embodiments.

[0120] This application also provides a computer program product including computer instructions stored in a computer-readable storage medium; a processor of a computing device reads the computer instructions from the computer-readable storage medium and executes the computer instructions, causing the computing device to perform the material handling control method provided in various optional implementations of the above aspects.

[0121] Those skilled in the art will recognize that the functions described in the embodiments of this application in one or more of the above examples can be implemented using hardware, software, firmware, or any combination thereof. When implemented using software, these functions can be stored in a computer-readable medium or transmitted as one or more instructions or code on a computer-readable medium. Computer-readable media include computer storage media and communication media, wherein communication media include any medium that facilitates the transfer of a computer program from one place to another. Storage media can be any available medium that can be accessed by a general-purpose or special-purpose computer.

[0122] It should be noted that the technical solutions described in the embodiments of the present invention can be combined arbitrarily without conflict.

[0123] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A material handling control method, characterized in that, The method includes: When a preparation loading instruction is received from the process equipment, the material storage status information of the loading port of the process equipment and the corresponding temporary material storage location is obtained. Obtain the transport time required for the handling equipment to perform one handling task; Since the conveying time is longer than the single process time of the process equipment, the description information for issuing the first conveying command in batches is determined based on the material storage status information of the loading port of the process equipment and the material temporary storage position corresponding to the loading port; wherein, the description information includes the number of the first conveying commands to be issued in batches and the trigger interval between each first conveying command. The description information is transmitted from the Manufacturing Execution System (MES) to the Real-Time Dispatch System (RTD), so that the RTD generates a corresponding number of first handling commands in batches and sets the trigger interval between each first handling command. Then, the MES instructs the Material Control System (MCS) to perform material handling according to the generated first handling commands and the trigger interval. The number of first handling commands to be issued in batches is determined based on the number of loading ports without material and the number of temporary material storage locations in the material storage status information. The trigger interval between each first transport command is obtained based on the time difference between the transport time and the single process time of the process equipment.

2. The method according to claim 1, characterized in that, The transport time required for the transport equipment to perform one transport task includes: a first time T1 for the material storage system STK to transfer the material to the inner outlet, a second time T2 for transferring the material from the inner outlet to the outer outlet, a third time T3 for the transport equipment to move to the outer outlet and load the material, a fourth time T4 for the transport equipment carrying the material to move from the outer outlet to the loading port of the process equipment EQP, a fifth time T5 for transferring the material loaded by the transport equipment at the loading port of EQP and placing it at the loading port, and a sixth time T6 for transferring the material placed at the loading port to the temporary material storage location.

3. The method according to claim 1, characterized in that, The step of obtaining the material storage status information of the feed port of the process equipment and the corresponding temporary material storage location includes: By monitoring the load-bearing induction signals of the feed port and temporary material storage location of the process equipment, the feed port and temporary material storage location that carry materials and the feed port and temporary material storage location that do not carry materials in the process equipment can be determined.

4. The method according to claim 1, characterized in that, The step of obtaining the trigger interval duration between each first transport command based on the duration difference between the transport duration and the single process duration of the process equipment includes: Since the conveying time is much longer than the single process time of the process equipment, the trigger interval is set to 0; The total movement time of the conveying equipment in the conveying time is greater than the single process time of the process equipment. The trigger interval is determined to be the sum of the time for transferring the material loaded by the conveying equipment to the corresponding loading port at the loading port of the process equipment EQP and the time for transferring the material placed at the loading port to the buffer position. Since the total movement time of the conveying equipment in the conveying time is less than the single process time of the process equipment, the trigger interval is determined to be the sum of the time for transferring the material loaded by the conveying equipment to the corresponding loading port at the loading port of the process equipment EQP, the time for transferring the material placed at the loading port to the buffer position, and the set time compensation value. The total movement time of the conveying equipment is the sum of the time it takes for the conveying equipment to move to the outer outlet and load the material and the time it takes for the conveying equipment carrying the material to move from the outer outlet to the loading port of the EQP.

5. The method according to claim 1, characterized in that, The method further includes: When the material in the buffer position of the process equipment is transferred to the main body of the process chamber of the process equipment, the RTU instruction for preparing to unload is sent from the loading port of the process equipment. The MES sends the RTU instruction to the RTD, so that the RTD generates a second handling command according to the RTU instruction, and the MES instructs the MCS to move the material packaging away from the loading port of the process equipment according to the second handling command.

6. A material handling control device, characterized in that, The device includes: a receiving section, a first acquiring section, a second acquiring section, a determining section, and a reporting section; wherein, The receiving section is configured to receive the preparation loading instruction sent by the process equipment; The first acquisition part is configured to acquire the material storage status information of the loading port of the process equipment and the material temporary storage position corresponding to the loading port when a preparation loading instruction is received from the process equipment. The second acquisition part is configured to acquire the transport time required for the transport equipment to perform one transport task; The determining part is configured to correspond to the conveying time being greater than the single process time of the process equipment. Based on the material storage status information of the loading port of the process equipment and the material storage location corresponding to the loading port, the description information for issuing the first conveying command in batches is determined. The description information includes the number of first conveying commands to be issued in batches and the trigger interval between each first conveying command. The reporting section is configured to report the description information to the Manufacturing Execution System (MES) and transmit the description information to the Real-Time Dispatch System (RTD) through the MES. This enables the RTD to generate a corresponding number of first handling commands in batches and set the trigger interval between each first handling command. Then, the MES instructs the Material Control System (MCS) to perform material handling according to the generated first handling commands and the trigger interval. The number of first handling commands to be issued in batches is determined based on the number of loading ports without material and the number of temporary material storage locations in the material storage status information. The trigger interval between each first transport command is obtained based on the time difference between the transport time and the single process time of the process equipment.

7. A computing device, characterized in that, The computing device includes a processor and a memory; the processor is configured to execute instructions stored in the memory to cause the computing device to perform the material handling control method as described in any one of claims 1 to 5.

8. A material handling control system, characterized in that, The system includes: a Manufacturing Execution System (MES), an Equipment Automation Control System (EAP), process equipment, a Real-Time Dispatch System (RTD), and a Material Control System (MCS); wherein... The EAP is used to receive the preparation loading instruction sent by the process equipment; In addition, when a preparation loading instruction is received from the process equipment, the material storage status information of the loading port of the process equipment and the corresponding temporary material storage location is obtained. In addition, the time required for the handling equipment to perform one handling task; And, corresponding to the fact that the conveying time is greater than the single process time of the process equipment, the description information of the batch issuance of the first conveying command is determined based on the material storage status information of the loading port of the process equipment and the material temporary storage position corresponding to the loading port; wherein, the description information includes the number of the first conveying commands to be issued in batch and the trigger interval between each first conveying command. And, the description information is reported to the MES; The MES is used to transmit the description information to the RTD; The RTD is used to generate a corresponding number of first transport commands in batches according to the description information, set the trigger interval between each first transport command, and report it to the MES. The MES is also used to send the first transport command generated in batches by RTD and the trigger interval duration to the MCS; The MCS is used to execute the first batch of material handling commands generated according to the trigger interval to perform material handling. The number of first handling commands to be issued in batches is determined based on the number of loading ports without material and the number of temporary material storage locations in the material storage status information. The trigger interval between each first transport command is obtained based on the time difference between the transport time and the single process time of the process equipment.

9. A computer storage medium, characterized in that, The storage medium stores at least one instruction, which is executed by a processor to implement the material handling control method as described in any one of claims 1 to 5.

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