Protective film attaching device and method for attaching protective film

Abstract

The present disclosure provides a protective film attaching device and a protective film attaching method, and relates to the technical field of semiconductors. The protective film attaching device is used for attaching a protective film to a protected surface of a photomask, the protective film comprises a film sheet and a film frame surrounding the film sheet, and the protective film attaching device comprises a top plate, a bearing frame and a film attaching structure. The side of the top plate facing the photomask is provided with a support, which is configured to abut against the photomask during film attaching. The bearing frame is a hollow structure and is configured to support the photomask in such a way that the protected surface of the photomask faces away from the top plate. The film attaching structure is configured to carry the protective film and move the protective film towards the top plate after passing through the bearing frame, and when the support is in contact with the photomask, the attachment surface of the film frame is attached to the protected surface of the photomask. The orthographic projection of the support on the protective film falls on the film frame. In this way, the forces acting on different surfaces of the photomask can be partially offset, thereby reducing the risk of deformation of the photomask during film attaching.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor technology, and in particular to a protective film bonding apparatus and a protective film bonding method. Background Technology

[0002] The photomask is a crucial component in photolithography. It typically uses transparent quartz glass as a substrate, on which patterns are created through a series of processes including spraying, photolithography, etching, and development to form a photomask. To prevent dust particles and other contaminants from settling on the photomask and affecting subsequent processes, a protective film is usually applied. However, during the application of the protective film, deformation of the photomask can occur, and even nanoscale deformation can lead to serious consequences.

[0003] Therefore, there is an urgent need to provide a solution to improve the problem of photomask deformation during the protective film lamination process. Summary of the Invention

[0004] The following is an overview of the subject matter described in detail in this disclosure. This overview is not intended to limit the scope of the claims.

[0005] This disclosure provides a protective film bonding device and a protective film bonding method.

[0006] According to some embodiments, a first aspect of this disclosure provides a protective film bonding device for bonding the protective film to a protected surface of a photomask. The protective film includes a film sheet and a frame surrounding the film sheet. The protective film bonding device includes:

[0007] A top plate, wherein a support member is provided on the side of the top plate facing the photomask, the support member being configured to abut against the photomask during the film application process;

[0008] A support frame, which is a hollow structure and is configured to support the photomask such that the protected surface of the photomask faces away from the top plate;

[0009] A film-attaching structure is configured to support the protective film, allowing the protective film to move toward the top plate after passing through the support frame, and when the support member contacts the photomask, the bonding surface of the film frame is bonded to the protected surface of the photomask;

[0010] The orthographic projection of the support member onto the protective film falls on the film frame.

[0011] According to some embodiments of this disclosure, multiple supports are provided, and the distances of the multiple supports to the center of the photomask are all equal.

[0012] According to some embodiments of this disclosure, both the photomask and the membrane frame are rectangular in shape, and four supports are provided, with the orthographic projection of each support onto the protective film located at the vertex of the rectangular membrane frame.

[0013] According to some embodiments of this disclosure, both the photomask and the membrane frame are rectangular in shape, and six support members are provided;

[0014] The membrane frame has a support member on each of two opposite sides of its rectangle, and the orthographic projection of the support member on the protective membrane is located on the perpendicular bisector of the side on which it is located.

[0015] Two support members are respectively provided on the other two opposite sides of the rectangle of the membrane frame, and the distance between the orthographic projection of the two support members on the same side onto the vertical line of that side is equal.

[0016] According to some embodiments of this disclosure, the bonding device further includes: a plurality of support pillars, each of which is disposed at the apex of the top plate.

[0017] According to some embodiments of this disclosure, the support frame includes:

[0018] The base has an opening in the middle for the film-attachment structure to pass through, and the base is adjustablely fixed to the support column;

[0019] A bracket, which is disposed on the base;

[0020] A limiting component is provided on the bracket to limit the photomask on the bracket.

[0021] According to some embodiments of this disclosure, the bonding device further includes a driving mechanism for driving the film structure to move up and down.

[0022] According to some embodiments of this disclosure, the film structure includes:

[0023] A tray, wherein the tray is provided with a groove for positioning and placing the protective film;

[0024] A lifting structure is provided, which connects the drive mechanism and the tray to enable the tray to move up and down relative to the top plate.

[0025] According to some embodiments of this disclosure, the lifting structure includes:

[0026] The outer casing has a cavity, and the cavity is closed at one end away from the top plate and open at one end towards the top plate;

[0027] A push rod is disposed inside the housing and connected to the drive mechanism. Under the action of the drive mechanism, the push rod can move up and down relative to the top plate and can extend out of the housing.

[0028] According to some embodiments, a second aspect of this disclosure provides a method for bonding a protective film. This method utilizes the protective film bonding device described in any one of the above embodiments to bond the protective film to the protected surface of a photomask. The method includes:

[0029] The photomask is placed on the support frame of the protective film bonding device, and the protected surface of the photomask on the support frame is away from the top plate of the protective film bonding device;

[0030] The protective film is placed on the film-adhesive structure of the protective film bonding device, the protective film comprising a film sheet and a film frame surrounding the film sheet;

[0031] The film-attached structure is moved toward the top plate until the photomask contacts the support on the top plate, and the bonding surface of the film frame is bonded to the protected surface of the photomask, wherein the orthographic projection of the support on the protective film falls on the film frame.

[0032] In the protective film bonding device and method disclosed herein, a support member corresponding to the film frame of the protective film is provided on the top plate so that the force on the upper and lower surfaces of the photomask is concentrated at the position corresponding to the film frame during the film bonding process, thereby making the upper and lower surfaces of the photomask uniform and reducing the risk of deformation of the photomask during the film bonding process. Attached Figure Description

[0033] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the present disclosure and, together with the description, serve to explain the principles of these embodiments. In these drawings, similar reference numerals are used to denote similar elements. The drawings described below are some embodiments of the present disclosure, but not all embodiments. Other drawings will be readily available to those skilled in the art from these drawings without inventive effort.

[0034] Figure 1 This is a schematic diagram of a protective film bonding device according to an exemplary embodiment.

[0035] Figure 2 This is a cross-sectional view of a portion of the structure of a protective film bonding device according to an exemplary embodiment.

[0036] Figure 3This is a distribution diagram of the orthographic projection of a support member onto a photomask covered with a protective film, according to an exemplary embodiment.

[0037] Figure 4 This is a plan view of a support member relative to the center of a top plate, according to an exemplary embodiment.

[0038] Figure 5 This is a plan view of another support member relative to the center of the top plate, according to an exemplary embodiment.

[0039] Figure 6 This is a cross-sectional view of a portion of the structure of a protective film bonding device according to an exemplary embodiment.

[0040] Figure 7 This is a distribution diagram of the orthographic projection of a support member onto a photomask covered with a protective film, according to an exemplary embodiment.

[0041] Figure 8 This is a plan view of a support member relative to the center of a top plate, according to an exemplary embodiment.

[0042] Figure 9 This is a plan view of another support member relative to the center of the top plate, according to an exemplary embodiment.

[0043] Figure 10 This is illustrated according to an exemplary embodiment. Figure 7 Cross-sectional view along the MN direction.

[0044] Figure 11 This is a schematic diagram of the assembly of the support member and the top plate according to an exemplary embodiment.

[0045] Figure 12 This is a schematic diagram illustrating a method for applying a protective film according to an exemplary embodiment.

[0046] Explanation of reference numerals in the attached figures:

[0047] 10-Protective film application device; 11-Top plate; 12-Support frame; 121-Base; 122-Bracket; 13-Film application structure; 131-Tray; 132-Outer shell; 14-Support component; 141-First column; 142-Second column; 15-Column; A1-First distance; A2-Second distance; A3-Third distance; A4-Fourth distance; O1-Center of vertex;

[0048] 20 - Photomask; 21 - Protected surface of the photomask;

[0049] 30-Protective membrane; 30a-First protective membrane; 30b-Second protective membrane; 31-Membrane sheet; 32-Membrane frame;

[0050] Figure 4 and Figure 5 In the middle: 14a - First support member; 14b - Second support member; 14c - Third support member; 14d - Fourth support member; B1 - First vertex; B2 - Second vertex; B3 - Third vertex; B4 - Fourth vertex;

[0051] Figure 8 and Figure 9 In the diagram, 14a′-first support member; 14b′-second support member; 14c′-third support member; 14d′-fourth support member; 14e′-fifth support member; 14f′-sixth support member; B1′-first vertex; B2′-second vertex; B3′-third vertex; B4′-fourth vertex. Detailed Implementation

[0052] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this disclosure can be arbitrarily combined with each other.

[0053] In related technologies, when applying a protective film to a photomask, the photomask is usually first fixed on the top plate of the bonding device, and then the protective film is moved to adhere to the protected surface of the photomask. During this bonding process, the upper surface of the photomask facing the top plate and the lower surface of the photomask away from the top plate are misaligned when the protective film is applied to the photomask, causing the photomask to deform.

[0054] In view of this, embodiments of the present disclosure provide a protective film bonding device for bonding a protective film to the protected surface of a photomask. The protective film includes a film sheet and a film frame surrounding the film sheet. The protective film bonding device includes a top plate, a support frame, and a bonding structure. A support member is provided on the side of the top plate facing the photomask, and the support member is configured to abut against the photomask during the bonding process. The support frame is a hollow structure and is configured to support the photomask such that the protected surface of the photomask faces away from the top plate. The bonding structure is configured to carry the protective film, allowing the protective film to move towards the top plate after passing through the support frame. When the support member contacts the photomask, the bonding surface of the film frame is bonded to the protected surface of the photomask. The orthographic projection of the support member onto the protective film falls on the film frame.

[0055] Thus, during the film application process, the film application structure drags the protective film towards the top plate. During this movement, it passes through the support frame containing the photomask, carrying both the photomask and the protective film towards the top plate. When the support on the top plate abuts against the photomask, the film application structure stops moving, attaching the bonding surface of the protective film frame to the photomask. At this point, the support directly applies a force away from the top plate to the photomask's surface facing the top plate, while the film application structure directly applies a force towards the top plate to the protective film frame. That is, the protective surface of the photomask, the surface away from the top plate, receives a force towards the top plate. Since the orthographic projection of the support onto the protective film falls on the protective film frame, the effective force-bearing areas of the two opposing surfaces of the photomask at least partially overlap. This at least partially cancels out the effects of the external forces on different surfaces of the photomask, thereby reducing the risk of deformation of the photomask during the application process.

[0056] The embodiments of this disclosure will be described below with reference to the accompanying drawings and specific examples. An exemplary embodiment of this disclosure provides a protective film bonding device, such as... Figure 1 , Figure 2 and Figure 3 As shown, the protective film bonding device 10 includes a top plate 11, a support frame 12, and a film bonding structure 13. A support member 14 is provided on the side of the top plate 11 facing the photomask 20. During the film bonding process, the support member 14 abuts against the upper surface of the photomask 20 facing the top plate 11, applying a force away from the top plate 11 to the upper surface of the photomask 20. The support frame 12 supports the photomask 20. The support frame 12 has a hollow structure, and the hollow structure corresponds to the protected surface 21 of the photomask 20, leaving the protected surface 21 of the photomask 20 exposed. During the film bonding process, the photomask 20 is positioned on the support frame 12 with the protected surface 21 facing away from the top plate 11. The film-applying structure 13 supports a protective film 30, which has a film sheet 31 and a film frame 32. During the application process, the protective film 30 is placed on the film-applying structure 13, with the bonding surface (the surface with adhesive) facing the top plate 11. The film-applying structure 13 can carry the protective film 30 and move towards the top plate 11, i.e., move upwards. After the film-applying structure 13 passes through the hollow structure of the support frame 12 carrying the photomask 20, the film-applying structure 13 carries the protective film 30 and the photomask 20 together and moves towards the top plate 11. At this time, Under the influence of gravity, the photomask 20 comes into contact with the protective film 30, but the two are not tightly bonded together. Then, the film-applying structure 13 continues to move upward toward the top plate 11 until the photomask 20 abuts against the support member 14 on the top plate 11 on the upper surface of the top plate 11. The film-applying structure 13 then stops moving upward. It should be noted that the position of the support member 14 on the top plate 11 corresponds to the film frame 32 of the protective film 30. That is, the orthographic projection of the film frame 32 on the top plate 11 covers or falls on the orthographic projection of the support member 14 on the top plate 11.

[0057] When the film-applying structure 13 stops moving upward, it presses the photomask 20 against the top plate 11. At this time, the upper surface of the photomask 20 facing the top plate 11 is subjected to a downward (opposite to the top plate 11) pressure from the support member 14 on the top plate 11. Meanwhile, the film-applying structure 13 directly applies an upward (towards the top plate 11) pressure to the film frame 32. Consequently, the film frame 32 applies an upward pressure to the photomask 20. Furthermore, because the orthographic projection of the film frame 32 onto the top plate 11 covers or falls on the support member 14 on the top plate 11... As can be seen from the orthographic projection on 1, the force-bearing area of ​​the support member 14 on the photomask 20 and the second force-bearing area of ​​the film frame 32 on the photomask 20 overlap spatially. In this way, the downward pressure exerted by the support member 14 on the photomask 20 is offset by the upward pressure exerted by the film frame 32 on the photomask 20. This reduces the risk of deformation of the photomask 20 under the action of external forces during the film application process. The external forces here include the downward pressure exerted by the support member 14 on the photomask 20 and the upward pressure exerted by the film frame 32 on the photomask 20.

[0058] Based on the protective film bonding device in the above embodiments, this embodiment also designs the planar distribution of the support members on the top plate. In some embodiments, multiple support members are provided, and the distances from the multiple support members to the center of the photomask are all equal.

[0059] As an example, such as Figure 4 As shown, four support members 14 are provided on the top plate 11, namely, the first support member 14a, the second support member 14b, the third support member 14c, and the fourth support member 14d. The first distance from the first support member 14a to the center O1 of the top plate 11 is A1, the second distance from the second support member 14b to the center O1 of the top plate 11 is A2, the third distance from the third support member 14c to the center O1 of the top plate 11 is A3, and the fourth distance from the fourth support member 14d to the center O1 of the top plate 11 is A4, and A1 = A2 = A3 = A4. Figure 2It can be seen that after the protective film 30 is attached to the photomask 20, the center O1 of the top plate 11 corresponds to the center O2 of the photomask 20. That is, the center O1 of the top plate 11 and the center O2 of the photomask 20 are on the same straight line (this straight line is perpendicular to the plane where the photomask 20 and the top plate 11 are located). The photomask 20 is relatively parallel to the top plate 11, and the thickness of the photomask 20 is uniform. Therefore, when the distance from each support member 14 to the center O1 of the top plate 11 is equal, the distance from each support member to the center O2 of the photomask 20 is also equal. In other words, the first support member 14a, the second support member 14b, the third support member 14c, and the fourth support member 14d are located on a sphere with the center O2 of the photomask 20 as the center. The distance from each support member 14 to the center of the sphere, i.e. the center O2 of the photomask 20, is equal. This makes the downward pressure exerted by the support member 14 on the photomask 20 more evenly distributed on the upper surface of the photomask 20 and more effectively counteracted by the upward pressure exerted by the membrane frame 32 on the photomask 20, thereby reducing the risk of local deformation of the photomask 20.

[0060] As is well known, photomasks of different sizes and shapes are required according to different product needs. Therefore, the protective film used to protect the photomask will also be set to different sizes and shapes. The size and collision of the protective film and the photomask affect the design of the support on the top plate. Therefore, based on the above embodiments, this embodiment will next introduce the distribution of the support relative to the protective film frame.

[0061] For example, in some embodiments, the photomask and the membrane frame are both rectangular in shape, and four supports are provided, with the orthographic projection of each support onto the protective membrane located at the vertex of the rectangular membrane frame.

[0062] As an example, such as Figure 4 As shown, the photomask 20 is rectangular in shape, and the protective film 30, which needs to be applied to the protected surface 21 of the photomask 20, is also rectangular in shape. That is, the protective film 30 has a rectangular film 31 and a rectangular frame 32 surrounding the outer periphery of the film 31. The rectangle corresponding to the frame 32 includes four vertices: a first vertex B1, a second vertex B2, a third vertex B3, and a fourth vertex B4, distributed clockwise. The top plate 11 can also be rectangular or other shapes, as long as the orthographic projection of the top plate 11 onto the protective film 30 and / or the photomask 20 covers the protective film 30 and / or the photomask 20. Four support members 14 are provided on the top plate 11, each corresponding to one of the four vertices of the rectangular frame 32.

[0063] Specifically, such as Figure 4 and Figure 5As shown, the orthographic projection of the first support member 14a on the membrane frame 32 falls on or covers the first vertex B1, the orthographic projection of the second support member 14b on the membrane frame 32 falls on or covers the second vertex B2, the orthographic projection of the third support member 14 on the membrane frame 32 falls on or covers the third vertex B3, and the orthographic projection of the fourth support member 14 on the membrane frame 32 falls on or covers the fourth vertex B4. For example, if the long side of the membrane frame 32 is 145 mm and the short side is 112 mm, then the distance between the first support member 14a and the second support member 14b (or the third support member 14c and the fourth support member 14d) corresponding to the two vertices of the long side of the membrane frame 32 is 145 nm, and the perpendicular bisector between the first support member 14a and the second support member 14b (or the third support member 14c and the fourth support member 14d) passes through the center point O1 of the top plate 11; the distance between the second support member 14b and the third support member 14c (or the fourth support member 14d and the first support member 14a) corresponding to the two vertices of the short side of the membrane frame 32 is 112 nm, and the perpendicular bisector between the second support member 14b and the third support member 14c (or the fourth support member 14d and the first support member 14a) passes through the center point O1 of the top plate 11.

[0064] For example, unlike the embodiment with four supports on the top plate, in other embodiments, both the photomask and the membrane frame are rectangular, and six supports are provided. One support is provided on each of two opposite sides of the rectangular membrane frame, and the orthographic projection of the support onto the protective film lies on the perpendicular bisector of that side. Two supports are provided on each of the other two opposite sides of the rectangular membrane frame, and the orthographic projections of the two supports on the same side are equidistant from the perpendicular bisector of that side. This distribution of supports allows for a more uniform force on the surface of the photomask facing the top plate, making it easier to counteract the force exerted by the membrane frame on the surface of the photomask facing away from the top plate, reducing the impact of external forces on the photomask, and thus improving the problem of deformation caused by external forces.

[0065] As an example, such as Figure 6 , Figure 7 and Figure 8As shown, the photomask 20 is rectangular in shape, and the protective film 30 that needs to be applied to the protected surface 21 of the photomask 20 is also rectangular in shape. That is to say, the protective film 30 has a rectangular film 31 and a rectangular frame 32 surrounding the outer periphery of the film 31. The rectangle corresponding to the frame 32 includes four vertices, namely the first vertex B1′, the second vertex B2′, the third vertex B3′, and the fourth vertex B4′ distributed clockwise. The line connecting the first vertex B1′ and the second vertex B2′ is the long side of the rectangular frame 32, the line connecting the second vertex B2′ and the third vertex B3′ is the short side of the rectangular frame 32, the line connecting the third vertex B3′ and the fourth vertex B4′ is the long side of the rectangular frame 32, and the line connecting the fourth vertex B4′ and the first vertex B1′ is the short side of the rectangular frame 32.

[0066] The shape of the top plate 11 is not limited to a rectangle, and the top plate 11 can also be set to other shapes, as long as the orthographic projection of the top plate 11 on the protective film 30 and / or the photomask 20 covers the protective film 30 and / or the photomask 20. The top plate 11 is provided with six support members 14 corresponding to the membrane frame 32, namely the first support member 14a′, the second support member 14b′, the third support member 14c′, the fourth support member 14d′, the fifth support member 14e′ and the sixth support member 14f′. Specifically, the orthographic projections of the first support member 14a′ and the second support member 14b′ on the membrane frame 32 are respectively located on the long side formed by connecting the first vertex B1′ and the second vertex B2′, and the perpendicular bisector of the line connecting the first support member 14a′ and the second support member 14b′ passes through the center O1 of the top plate 11; the orthographic projection of the third support member 14c′ on the membrane frame 32 is respectively located on the short side formed by connecting the second vertex B2′ and the third vertex B3′, and the third support member 14c′ is located at the midpoint of the short side, i.e., the perpendicular bisector of the line connecting the second vertex B2′ and the third vertex B3′ passes through the center O1 of the top plate 11 and the third support member 14c′. The orthographic projections of the fourth support member 14d′ and the fifth support member 14e′ on the membrane frame 32 are respectively located on the long side formed by connecting the third vertex B3′ and the fourth vertex B4′, and the perpendicular bisector of the line connecting the fourth support member 14d′ and the fifth support member 14e′ passes through the center O1 of the top plate 11; the orthographic projection of the sixth support member 14f′ on the membrane frame 32 is respectively located on the short side formed by connecting the fourth vertex B4′ and the first vertex B1′, and the sixth support member 14f′ is located at the midpoint of the short side, that is, the perpendicular bisector of the line connecting the fourth vertex B4′ and the first vertex B1′ passes through the center O1 of the top plate 11 and the sixth support member 14f′.

[0067] For example, such as Figure 9As shown, the length of the long side of the membrane frame 32 is 146 mm, and the length of the short side of the membrane frame 32 is 112 mm. Specifically, the distance between the first support member 14a′ and the second support member 14b′ is 100 mm, the distance from the first support member 14a′ to the first vertex B1′ is 23 mm, and the distance from the second support member 14b′ to the second vertex B2′ is 23 mm; the distance from the third support member 14c′ to the second vertex B2′ is 56 mm, and the distance from the third support member 14c′ to the third vertex B3′ is 23 mm; the distance between the fourth support member 14d′ and the fifth support member 14e′ is 100 mm, the distance from the fourth support member 14d′ to the third vertex B3′ is 23 mm, and the distance from the fifth support member 14e′ to the fourth vertex B4′ is 23 mm; the distance from the sixth support member 14f′ to the first vertex B1′ is 56 mm, and the distance from the sixth support member 14f′ to the fourth vertex B4′ is 23 mm.

[0068] It should be understood that the shapes of the photomask 20 and the membrane frame 32 are not limited to the rectangles in the above embodiments, but can also be set to other shapes according to product requirements, such as circles or other polygons. Furthermore, the size of the membrane frame 32 of the protective film 30 is not limited to the schemes in the above examples, and can be designed according to the specific dimensions of the photomask 20. In addition, the number and distribution of the support members 14 are not limited to the schemes in the above examples. The support members 14 can be set to three, five, seven, or other numbers. The design of the support members 14 takes into account that the orthographic projection of each support member 14 on the protective film 30 falls on the membrane frame 32, and that the center distance from each support member 14 to the top plate 11 is equal. Further details will not be elaborated here.

[0069] In some embodiments, such as Figure 10 As shown, the support member 14 includes a first column 141 and a second column 142 connected to the first column 141. The first column 141 is cylindrical, and the second column 142 is an arc-shaped column. The arc surface of the second column 142 is smoothly connected to the surface of the first column 141, and the apex of the arc surface of the second column 142 is in contact with the surface of the photomask 20 facing the top plate 11. In this way, the contact area between the support member 14 and the photomask 20 is greatly reduced, thereby reducing the impact of the pressure applied by the support member 14 on the photomask 20 and reducing the risk of deformation of the photomask 20.

[0070] like Figure 11 As shown, in at least one example, the support member 14 is threadedly connected to the top plate 11, and the top plate 11 has a corresponding threaded hole. The first column 141 of the support member 14 is also threaded. It should be understood that the support member 14 can also be fixed to the top plate 11 in other ways, such as by adhesive.

[0071] In addition to designing the support components on the top plate, this embodiment also designs other structures of the protective film bonding device. In some embodiments, the bonding device further includes multiple support pillars, each disposed at a apex of the top plate. Thus, the support pillars support the top plate, ensuring its stability during the film bonding process and thereby improving the quality of the film bonding.

[0072] As an example, such as Figure 1 As shown, the protective film bonding device 10 includes a film bonding structure 13, a support frame 12, and a top plate 11 arranged sequentially. The support frame 12 is located between the film bonding structure 13 and the top plate 11. Generally, the top plate 11 is located at the top. Specifically, when the photomask 20 and the protective film 30 are rectangular, the top plate 11 is also rectangular. The bonding device is provided with four pillars 15, each pillar 15 is located at the apex of the top plate 11, and each pillar 15 is perpendicular to the horizontal plane, thus increasing the stability of the top plate 11. The pillars 15 are L-shaped profiles, and the L-shaped cross-section corresponds to the apex corner of the rectangular top plate 11, which further increases the stability of the top plate 11.

[0073] It should be understood that the design of the support column 15 is not limited to the above embodiment. The support column 15 can be set in three, five, six or other forms, which can be designed according to the shape of the top plate 11. Furthermore, the selection of the support column 15 is not limited to L-shaped cross-section profiles. Cylindrical profiles or conical profiles can also be selected. These can be designed according to the actual situation, and will not be elaborated here.

[0074] In addition to describing the support column for the top plate in the laminating device, this embodiment also designs other structures in the laminating device. In some examples, the support frame includes a base, a bracket, and a limiting member. The base has an opening in the middle for the laminating structure to pass through, and the base is adjustablely fixed to the support column. The bracket is disposed on the base. The limiting member is disposed on the bracket for positioning the photomask on the bracket.

[0075] As an example, such as Figure 1As shown, the base 121 in the support frame 12 is an open frame. When the photomask 20 is rectangular, the base 121 is also rectangular in shape, and the opening of the base 121 is also rectangular. On the side of the base 121 facing the top plate 11, brackets 122 are respectively provided at the positions corresponding to the four vertices of the rectangular base 121. The brackets 122 extend towards the top plate 11, and the space enclosed by the brackets 122 and the opening on the base 121 form the hollow structure of the support frame 12. The brackets 122 and the base 121 are integrally formed, or the brackets 122 are fixed to the base 121 by fasteners, or the brackets 122 are fixed to the base 121 by limiting methods (snap-on or rigid fit). In addition, the bracket 122 is also provided with a limiting member for fixing the photomask 20. This limiting member can be integrally formed with the bracket 122 or fixed to the bracket 122. This limiting member allows the photomask 20 to be stably positioned on the bracket 122, and under the push of the film-applying structure 13, the photomask 20 is safely detached from the bracket 122 and moves with the film-applying structure 13. For example, the limiting member can be a limiting frame located on the support frame. The limiting frame is located on the bracket 122, and the longitudinal section of the limiting frame is L-shaped, which can block the lateral displacement of the photomask 20 without restricting the upward movement of the photomask 20. As another example, the limiting member can also be a groove provided on the bracket 122. The corners of the photomask 20 are stuck in the groove, limiting the lateral movement of the photomask 20 without affecting the upward movement of the photomask 20.

[0076] In some embodiments, the bonding device further includes a drive mechanism for driving the film structure to move up and down.

[0077] Based on the above embodiments, such as Figure 1 As shown, the film-applying structure 13 includes a tray 131 and a lifting structure. The tray 131 has a groove for positioning and placing the protective film 30; the lifting structure connects the drive mechanism and the tray 131, so that the tray 131 can move up and down relative to the top plate 11. The lifting structure includes, but is not limited to, a worm gear lifting structure, a rack and pinion lifting structure, a cylinder or an electric push rod.

[0078] For example, in some embodiments, such as Figure 1 As shown, the lifting structure includes a housing 132 and a push rod. The housing 132 has a chamber, which is closed at the end away from the top plate 11 and open at the end facing the top plate 11. The push rod is disposed inside the housing 132, with one end connected to a drive mechanism. Under the action of the drive mechanism, the push rod can move up and down relative to the top plate 11 and can extend out of the housing 132. The other end of the push rod is connected to a tray 131, which is moved up and down toward the top plate 11 by the drive mechanism, such as a motor.

[0079] This disclosure also provides a method for bonding a protective film, which utilizes the protective film bonding device of any of the above embodiments to bond the protective film to the protected surface of a photomask. The method includes placing the photomask on a support frame of the protective film bonding device, with the protected surface of the photomask on the support frame facing away from the top plate of the protective film bonding device. The protective film is placed on the bonding structure of the protective film bonding device, the protective film comprising a film sheet and a frame surrounding the film sheet. The bonding structure is moved toward the top plate until the photomask contacts a support member on the top plate, and the bonding surface of the frame is bonded to the protected surface of the photomask, wherein the orthographic projection of the support member onto the protective film falls on the frame.

[0080] The method for applying the protective film is described below with reference to the accompanying drawings and specific embodiments. For example... Figure 1 and Figure 12 As shown, Figure 12 This is a schematic diagram illustrating a method for applying a protective film according to an exemplary embodiment, the method comprising the following steps:

[0081] Step S100: Place the photomask 20 on the support frame 12 of the protective film bonding device 10, and the protected surface 21 of the photomask 20 on the support frame 12 is away from the top plate 11 of the protective film bonding device 10.

[0082] Step S200: Place the protective film 30 on the film-applying structure 13 of the protective film applicator 10. The protective film 30 includes a film sheet 31 and a film frame 32 surrounding the film sheet 31.

[0083] Step S300: Move the film-attached structure 13 toward the top plate 11 until the photomask 20 contacts the support member 14 on the top plate 11, and the bonding surface of the film frame 32 is bonded to the protected surface 21 of the photomask 20, wherein the orthographic projection of the support member 14 on the protective film 30 falls on the film frame 32.

[0084] Steps S100 and S200 can be performed simultaneously or in a different order, which is not limited here. In step S300, when the film-applying structure 13 passes through the support frame 12, the protective film 30 contacts the protected surface 21 of the photomask 20. The film-applying structure 13 continues to move towards the top plate 11, dragging the protective film 30 and the photomask 20, until the photomask 20 and the support member 14 on the top plate 11 press against the photomask 20, and the film frame 32 is attached to the protected surface 21 of the photomask 20. The film-applying structure 13 stops its upward movement, and the orthographic projection of the support member 14 on the protective film 30 falls on the film frame 32. Thus, at the instant the photomask 20 is pressed against by the support member 14, the upper and lower surfaces of the photomask 20 are simultaneously subjected to the pressure applied by the support member 14 and the pressure applied by the membrane frame 32, respectively. Furthermore, the orthographic projection of the support member 14 on the protective membrane 30 falls on the membrane frame 32. This causes the pressures on the upper and lower surfaces of the photomask 20 from different directions to partially cancel each other out, thereby improving the problem of deformation of the photomask 20 under the action of external forces.

[0085] In embodiments of this disclosure, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that an article or device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or device. Without further limitation, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the article or device that includes that element.

[0086] Although embodiments of this disclosure have been described, those skilled in the art, upon learning the basic inventive concept, can make further changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the embodiments as well as all changes and modifications falling within the scope of this disclosure.

[0087] Obviously, those skilled in the art can make various modifications and variations to the embodiments of this disclosure without departing from the spirit and scope of this disclosure. Thus, if these modifications and variations to the embodiments of this disclosure fall within the scope of the claims of this disclosure and their equivalents, then the intent of the embodiments of this disclosure also includes these modifications and variations.

Claims

1. A protective film bonding device for bonding the protective film to the protected surface of a photomask, the protective film comprising a film sheet and a frame surrounding the film sheet, characterized in that, The fitting device comprises: a top plate, which is provided with a support on a side facing the photomask, the support being configured to abut the photomask during the process of fitting the protective film; a bearing frame, which is a hollow structure and is configured to support the photomask in such a way that the protected surface of the photomask faces away from the top plate; a film fitting structure, which is configured to carry the protective film and move the protective film towards the top plate after passing through the bearing frame, and make the fitting surface of the film frame fit on the protected surface of the photomask when the support contacts the photomask; wherein the orthographic projection of the support on the protective film falls on the film frame.

2. The device for attaching a protective film according to claim 1, wherein The support is provided with a plurality of supports, and the distance from each of the supports to the center of the photomask is equal.

3. The device for attaching a protective film according to claim 2, wherein The photomask and the film frame are both rectangular in shape, the support is provided with four supports, and the orthographic projection of each of the supports on the protective film is located at the vertex of the rectangular film frame.

4. The device for attaching a protective film according to claim 2, wherein The photomask and the film frame are both rectangular in shape, and the support is provided with six supports. The film frame is provided with one support on each of the opposite edges of the rectangle, and the orthographic projection of the support on the protective film is located on the perpendicular bisector of the edge. The film frame is provided with two supports on each of the other two opposite edges of the rectangle, and the orthographic projection of the two supports on the protective film to the perpendicular bisector of the edge is equal.

5. The device for attaching a protective film according to any one of claims 1 to 4, characterized in that, The fitting device further comprises: a plurality of supports, which are respectively arranged at the vertices of the top plate.

6. The device for attaching a protective film according to claim 5, wherein The bearing frame comprises: a base, which is provided with an opening in the middle for the film fitting structure to pass through, and the base is adjustably fixed on the supports; a bracket, which is arranged on the base; a limiting piece, which is arranged on the bracket to limit the photomask on the bracket.

7. The apparatus for attaching a protective film according to claim 5, wherein The fitting device further comprises: a driving mechanism, which is used to drive the film fitting structure to move up and down.

8. The device for attaching a protective film according to claim 7, wherein The film fitting structure comprises: a tray, which is provided with a mold groove for positioning the protective film; a lifting structure, which connects the driving mechanism and the tray to make the tray move up and down relative to the top plate.

9. The device for attaching a protective film according to claim 8, wherein The lifting structure comprises: a housing, which forms a chamber, one end of the chamber facing away from the top plate is closed, and the other end facing the top plate is open; a push rod, which is arranged in the housing, the push rod is connected with the driving mechanism, and under the action of the driving mechanism, the push rod can move up and down relative to the top plate and can extend out of the housing.

10. A method of attaching a protective film, characterized by, The method for fitting the protective film on the protected surface of the photomask by using the fitting device of the protective film according to any one of claims 1-9, the method comprising: arranging the photomask on the bearing frame of the fitting device of the protective film, and the protected surface of the photomask on the bearing frame faces away from the top plate of the fitting device of the protective film; placing the protective film on the film fitting structure of the fitting device of the protective film, the protective film comprising a film piece and a film frame surrounding the film piece; The film structure is moved towards the top plate until the photomask is in contact with a support on the top plate and the fitting surface of the film frame is fitted on the protected surface of the photomask, wherein the orthographic projection of the support on the protective film falls on the film frame.

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