Vacuum system

Abstract

A vacuum system comprises a vacuum chamber, a first vacuum pump connected to the vacuum chamber, a second vacuum pump connected to the vacuum chamber, and a communication switching structure for connecting the first vacuum pump and the second vacuum pump to each other. The vacuum system can realize single leak detection of the first vacuum pump or the second vacuum pump, and improve the accuracy of vacuum leak detection.

Description

Technical Field

[0001] This invention relates to the field of vacuum technology, and more particularly to a vacuum system. Background Technology

[0002] Condensation pumps are the most important equipment for creating high vacuum environments; however, during long-term use, their vacuum components will age and deteriorate, inevitably leading to vacuum leaks. Currently, common leak detectors only detect leaks in the vacuum chamber; therefore, a method is needed to detect leaks in the condensation pump as well. Summary of the Invention

[0003] The technical problem solved by this invention is to provide a vacuum system to improve the leak detection effect of vacuum systems.

[0004] To solve the above-mentioned technical problems, the present invention provides a vacuum system, comprising: a vacuum chamber; a first vacuum pump connected to the vacuum chamber; a second vacuum pump connected to the vacuum chamber; and a connecting structure, the connecting structure comprising a first end, a second end, and a third end, the first end being connected to the first vacuum pump, the second end being connected to the second vacuum pump, and the third end being used to connect to a leak detector.

[0005] Optionally, the connection adapter structure includes a three-way adapter, which includes a first end, a second end, and a third end. The first end is connected to a first vacuum pump, the second end is connected to a second vacuum pump, and the third end is connected to a leak detector.

[0006] Optionally, it also includes a manual valve located in the third end of the three-way adapter.

[0007] Optionally, it also includes: a first pipe, the two ends of which are respectively connected to the first vacuum pump and the first end of the tee adapter.

[0008] Optionally, it also includes: a second pipe, the two ends of which are respectively connected to the leak detector and the third end of the tee adapter.

[0009] Optionally, it also includes: a third pipe and a fourth pipe connected together, wherein the third pipe is connected to the second end of the tee adapter, and the fourth pipe is connected to the second vacuum pump.

[0010] Optionally, it may also include: a first pneumatic valve located within the third conduit.

[0011] Optionally, it also includes a fifth pipe, the two ends of which are connected to the vacuum chamber and the fourth pipe, respectively, and the vacuum chamber is connected to the second vacuum pump through the fourth pipe and the fifth pipe.

[0012] Optionally, it may also include a second pneumatic valve located within the fifth pipe.

[0013] Optionally, it may also include a gate valve located between the first vacuum pump and the vacuum chamber.

[0014] Optionally, the first vacuum pump includes a condenser pump; the second vacuum pump includes a dry pump.

[0015] Optionally, the leak detector is a helium leak detector.

[0016] Optionally, it also includes: a leak detection port disposed on the vacuum chamber, the leak detection port being used to connect to a leak detector.

[0017] Compared with the prior art, the technical solution of the present invention has the following beneficial effects:

[0018] The technical solution of the present invention includes a connecting structure comprising a first end, a second end, and a third end. The first end is connected to a first vacuum pump, the second end is connected to a second vacuum pump, and the third end is used to connect to a leak detector. Therefore, the first vacuum pump and the leak detector can be connected independently, so that the leak detector can independently detect vacuum leaks in the first vacuum pump. This allows for rapid leak detection of the first vacuum pump without damaging the vacuum level of the vacuum chamber, improving the accuracy of leak detection in the vacuum system, thereby shortening maintenance time, saving maintenance costs, and saving manpower.

[0019] Furthermore, the connection adapter structure includes a three-way adapter, and a manual valve is provided in the third end of the three-way adapter. When both the gate valve and the first pneumatic valve are closed, the manual valve can control the connection status between the first vacuum pump and the leak detector, thereby enabling the leak detector to perform separate leak detection on the pipeline between the first vacuum pump and the second pneumatic valve. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of a vacuum system in one embodiment;

[0021] Figure 2 and Figure 3 This is a schematic diagram of the vacuum system in an embodiment of the present invention. Detailed Implementation

[0022] As described in the background section, current common leak detectors only detect leaks in vacuum chambers. A method is needed to detect leaks in condenser pumps as well. This will be analyzed and explained in conjunction with specific embodiments.

[0023] Figure 1 This is a schematic diagram of the structure of a vacuum system in one embodiment.

[0024] Please refer to Figure 1The vacuum system includes: a vacuum chamber 100; a first vacuum pump 101 connected to the vacuum chamber 100; a second vacuum pump 103 connected to the vacuum chamber 100; a leak detector 104 connected to the vacuum chamber 100; a valve 101 disposed between the vacuum chamber 100 and the first vacuum pump 101; a first pipe 105, a second pipe 106, and a third pipe 107, wherein both ends of the first pipe 105 are respectively connected to one end of the first vacuum pump 101 and one end of the third pipe 107. The two ends of the second pipe 106 are respectively connected to the vacuum chamber 100 and one end of the third pipe 107, and the other end of the third pipe 107 is connected to the second vacuum pump 103; the two ends of the fourth pipe 108 are respectively connected to the vacuum chamber 100 and the leak detector 104; a first pneumatic valve 109 is provided in the first pipe 105; a second pneumatic valve 110 is provided in the second pipe 106; and a manual valve (not shown) is provided in the fourth pipe 108.

[0025] In the vacuum system, the leak detector 104 is connected to the vacuum chamber 100 via the fourth pipe 108, and the connection between the leak detector 104 and the vacuum chamber 100 is controlled by the manual valve. The first vacuum pump 102 is a condenser pump. When it is necessary to detect whether the first vacuum pump 102 is leaking vacuum, the following operations are typically performed: After the vacuum chamber 100 is evacuated, the manual valve located in the fourth pipe 108 is opened to connect the leak detector 104 to the vacuum chamber 100; then, the gate valve 101 located between the vacuum chamber 100 and the first vacuum pump 101 is forcibly opened to connect the first vacuum pump 101 to the vacuum chamber 100. The leak is then detected by the leak detector 104.

[0026] However, on the one hand, the leak detection result of the leak detector 104 cannot distinguish whether there is a vacuum leak in the vacuum chamber 100 or a vacuum leak in the first vacuum pump 102. When the vacuum chamber 100 also has a vacuum leak, the leak detection result of the leak detector 104 for the first vacuum pump 102 will be inaccurate. On the other hand, when the first vacuum pump 102 has a vacuum leak, it will cause a pressure difference between the first vacuum pump 102 and the vacuum chamber 100. Forcibly opening the valve 101 will affect the vacuum chamber 100. On the one hand, if the vacuum leakage rate of the first vacuum pump 102 is large, the pressure difference between the first vacuum pump 102 and the vacuum chamber 100 will be too large, making it impossible to forcibly open the valve 101. It is necessary to pressurize the vacuum chamber 100 to disrupt the vacuum level inside the vacuum chamber 100. The valve 101 can only be opened when the pressure difference between the first vacuum pump 102 and the vacuum chamber 100 is small. At this time, disrupting the vacuum environment inside the vacuum chamber 100 will increase the cost of restarting the machine.

[0027] To address the aforementioned problems, the present invention provides a vacuum system. The connecting structure includes a first end, a second end, and a third end. The first end is connected to a first vacuum pump, the second end is connected to a second vacuum pump, and the third end is connected to a leak detector. Therefore, the first vacuum pump and the leak detector can be connected independently, allowing the leak detector to independently detect vacuum leaks in the first vacuum pump. This enables rapid leak detection of the first vacuum pump without compromising the vacuum level of the vacuum chamber, improving the accuracy of leak detection in the vacuum system, thereby shortening maintenance time, saving maintenance costs, and saving manpower.

[0028] To make the above-mentioned objectives, features and beneficial effects of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0029] Figure 2 and Figure 3 This is a schematic diagram of the vacuum system in an embodiment of the present invention.

[0030] Please refer to Figure 2 and Figure 3 , Figure 3 for Figure 2 An enlarged schematic diagram of the connecting structure is shown. The vacuum system includes: a vacuum chamber 200; a first vacuum pump 202 connected to the vacuum chamber 200; a second vacuum pump 210 connected to the vacuum chamber 200; and a connecting structure 203, which includes a first end, a second end, and a third end. The first end is connected to the first vacuum pump 202, the second end is connected to the second vacuum pump 210, and the third end is used to connect to a leak detector 204.

[0031] The leak detector 204 is an external device, which can be connected to the third end of the connecting adapter structure 203 when leak detection is required.

[0032] The connection and adapter structure 203 includes a first end, a second end, and a third end. The first end is connected to the first vacuum pump 202, the second end is connected to the second vacuum pump 210, and the third end is used to connect to the leak detector 204. Therefore, the first vacuum pump 202 and the leak detector 204 can be connected independently, so that the leak detector 204 can independently detect vacuum leaks in the first vacuum pump 202, improving the accuracy of leak detection in the vacuum system. This allows for rapid leak detection of the first vacuum pump 202 without damaging the vacuum chamber 200, improving the accuracy of leak detection in the vacuum system, thereby shortening maintenance time, saving maintenance costs, and saving manpower.

[0033] Please continue to refer to this. Figure 2 and Figure 3 In this embodiment, the connecting adapter structure 203 includes a three-way adapter, which includes a first end A, a second end B and a third end C. The first end A is connected to the first vacuum pump 202, the second end B is connected to the second vacuum pump 210, and the third end C is connected to the leak detector 204.

[0034] In this embodiment, the material of the tee adapter includes stainless steel.

[0035] In this embodiment, the vacuum system further includes a manual valve 214 disposed in the third end C of the three-way adapter.

[0036] The manual valve 214 is closed when the first vacuum pump 202 is operating normally. When it is necessary to test for leaks in the first vacuum pump 202, simply open the manual valve 214 to connect the first vacuum pump 202 to the leak detector 204. The manual valve 214 can control the connection between the first vacuum pump 202 and the leak detector 204, thereby enabling the leak detector 204 to perform separate leak testing on the pipeline between the first vacuum pump 202 and the second pneumatic valve 207.

[0037] In this embodiment, the vacuum system further includes: a first pipe 212, the two ends of which are respectively connected to the first vacuum pump 202 and the first end A of the three-way adapter; a second pipe 213, the two ends of which are respectively connected to the leak detector 204 and the third end C of the three-way adapter; a third pipe 206 and a fourth pipe 209 connected together, the third pipe 206 being connected to the second end B of the three-way adapter, and the fourth pipe 209 being connected to the second vacuum pump 210; and a fifth pipe 208, the two ends of which are respectively connected to the vacuum chamber 200 and the fourth pipe 209.

[0038] In this embodiment, the first pipe 212, the second pipe 213, the third pipe 206, the fourth pipe 209, and the fifth pipe 208 are made of stainless steel.

[0039] The vacuum chamber 200 is connected to the second vacuum pump 210 through the fourth pipe 209 and the fifth pipe 208; the first vacuum pump 202 and the second vacuum pump 210 are connected through the first pipe 212, the connecting transition structure 203, the third pipe 206 and the fourth pipe 209.

[0040] In this embodiment, the vacuum system further includes a first pneumatic valve 205 located within the third pipe 206.

[0041] The first pneumatic valve 205 is used to control the connection state between the first vacuum pump 202 and the second vacuum pump 210.

[0042] In this embodiment, the vacuum system further includes a second pneumatic valve 207 located within the fifth pipe 208.

[0043] The second pneumatic valve 207 is used to control the connection between the vacuum chamber 200 and the second vacuum pump 210.

[0044] In this embodiment, the vacuum system further includes a gate valve 201 located between the first vacuum pump 202 and the vacuum chamber 200.

[0045] The gate valve 201 is used to control the connection between the vacuum chamber 200 and the first vacuum pump 202.

[0046] In this embodiment, the first vacuum pump 202 includes a condenser pump; the second vacuum pump 210 includes a dry pump.

[0047] The condenser pump is a two-stage pump, and the dry pump is a one-stage pump. After the dry pump draws a certain vacuum level into the vacuum chamber 200, the condenser pump is turned on to draw out the water vapor in the vacuum chamber 200, so that the vacuum level in the vacuum chamber 200 can be further reduced to reach the preset high vacuum level.

[0048] In this embodiment, the leak detector 204 is a helium leak detector.

[0049] When the vacuum system needs to perform leak testing on the first vacuum pump 202 alone, the gate valve 201 and the first pneumatic valve 205 are closed, and the connection between the first vacuum pump 202 and the leak detector 204 is controlled by the manual valve 214, thereby enabling the leak detector 204 to perform leak testing on the first vacuum pump 202 alone.

[0050] The helium leak detector works as follows: after the helium leak detector is connected to the first vacuum pump 202, it will spray a certain amount of helium gas at possible leak points outside the first vacuum pump 202. The helium gas will be drawn into the helium leak detector through the leak point. The helium detector inside the helium leak detector will detect the helium molecules and then sound an alarm, thus determining that the point is a leak point.

[0051] In this embodiment, the vacuum system further includes a leak detection port (not shown) disposed on the vacuum chamber 200, which is used to connect to a leak detector. When the vacuum chamber 200 needs to be leak-tested, the leak detector can be connected.

[0052] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A vacuum system, characterized in that, include: Vacuum cavity; The first vacuum pump connected to the vacuum chamber; A second vacuum pump connected to the vacuum chamber; A connecting and connecting structure is provided, comprising a first end, a second end, and a third end. The first end is connected to a first vacuum pump, the second end is connected to a second vacuum pump, and the third end is used to connect to a leak detector. A second pneumatic valve is disposed between the vacuum chamber and the second vacuum pump.

2. The vacuum system as described in claim 1, characterized in that, The connection adapter structure includes a three-way adapter, which includes a first end, a second end, and a third end. The first end is connected to a first vacuum pump, the second end is connected to a second vacuum pump, and the third end is connected to a leak detector.

3. The vacuum system as described in claim 2, characterized in that, Also includes: The manual valve is located in the third end of the three-way adapter.

4. The vacuum system as described in claim 2, characterized in that, Also includes: The first pipe has its two ends connected to the first vacuum pump and the first end of the tee adapter, respectively.

5. The vacuum system as described in claim 2, characterized in that, Also includes: The second pipe has a leak detector at one end and the third end of a tee adapter at the other.

6. The vacuum system as described in claim 2, characterized in that, Also includes: The third and fourth pipes are connected, with the third pipe connected to the second end of the tee adapter and the fourth pipe connected to the second vacuum pump.

7. The vacuum system as claimed in claim 6, characterized in that, Also includes: The first pneumatic valve is located inside the third pipe.

8. The vacuum system as described in claim 6, characterized in that, Also includes: The fifth pipe has its two ends connected to the vacuum chamber and the fourth pipe, respectively. The vacuum chamber is connected to the second vacuum pump through the fourth and fifth pipes. The second pneumatic valve is located inside the fifth pipe.

9. The vacuum system as claimed in claim 1, characterized in that, Also includes: A gate valve located between the first vacuum pump and the vacuum chamber.

10. The vacuum system as claimed in claim 1, characterized in that, The first vacuum pump includes a condenser pump; the second vacuum pump includes a dry pump.

11. The vacuum system as claimed in claim 1, characterized in that, The leak detector is a helium leak detector.

12. The vacuum system as claimed in claim 1, characterized in that, Also includes: A leak detection port is provided on the vacuum chamber, which is used to connect to a leak detector.

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