Mutual backup device and control method for pest control equipment

Abstract

This invention relates to a mutual backup device and control method for pest control equipment, belonging to the field of silicon wafer processing technology. It includes TOOL Ⅰ and TOOL Ⅱ, where TOOL Ⅰ and TOOL Ⅱ are the main equipment for LPCVD. TOOL Ⅰ is equipped with a pest control device Ⅱ connected to it via a pipeline. An air inlet pipe Ⅰ connects the pest control device Ⅱ to TOOL Ⅰ, and a three-way solenoid valve Ⅱ is installed on the air inlet pipe Ⅰ. Similarly, TOOL Ⅱ is equipped with a pest control device Ⅰ connected to it via a pipeline. A make-up flow pipe Ⅰ connects the three-way solenoid valve Ⅱ to the pest control device Ⅰ, and an air inlet pipe Ⅱ connects the pest control device Ⅰ to TOOL Ⅱ, with a three-way solenoid valve Ⅰ installed on the air inlet pipe Ⅱ. When one or both pest control devices malfunction, the pipeline switches to the air inlet of the other pest control device, ensuring continuous and uninterrupted exhaust processing of the main equipment.

Description

Technical Field

[0001] This invention relates to the field of silicon wafer processing technology, and more specifically to a mutual backup device for pest control equipment and its control method. Background Technology

[0002] Silicon wafer cutting generates a large amount of fine silicon dust. Long-term inhalation can damage the respiratory mucosa and easily lead to pneumoconiosis and allergic asthma. Therefore, silicon wafer cutting requires dust removal equipment to ensure the health of operators and a dust-free workshop environment.

[0003] Low-pressure chemical vapor deposition (LPCVD) is a commonly used thin film preparation technique that uses chemical reactions to convert gaseous precursors into solid thin films under low pressure. LPCVD technology has advantages such as high purity, high uniformity, high quality, and high controllability, and therefore it is widely used in microelectronics, optoelectronics, materials science, and other fields.

[0004] The basic principle of LPCVD technology is to introduce a gaseous precursor into a reaction chamber and carry out a chemical reaction at high temperature to generate a solid thin film. The pressure inside the reaction chamber is typically between 10⁻³ and 10⁻¹ Torr. This low-pressure environment helps reduce collisions between gas molecules, thereby improving the reaction rate and the quality of the thin film.

[0005] Low-pressure chemical vapor deposition (LPCVD) is widely used for the deposition of silicon oxide, nitrides, and polycrystalline silicon. The process is performed in a tube furnace and requires relatively high temperatures. Furthermore, in the silicon wafer LPCVD industry, toxic gas removal is necessary. The original LPCVD main equipment used a separate toxic gas removal device. If this device malfunctioned or malfunctioned, the main LPCVD would alarm and shut down, causing product abnormalities. Process gases would not be properly treated and would be emitted. Maintenance of the toxic gas removal device required the main equipment to be shut down, disrupting continuous production. Summary of the Invention

[0006] This invention addresses the shortcomings of existing technologies by providing a mutual backup device and control method for pest control equipment. When one or two pest control devices malfunction, the pipeline is switched to the air intake of another pest control device to ensure continuous and uninterrupted exhaust processing of the main equipment.

[0007] The above-mentioned technical problems of the present invention are mainly solved by the following technical solutions:

[0008] A mutual backup device for pest control equipment includes TOOL Ⅰ and TOOL Ⅱ. TOOL Ⅰ and TOOL Ⅱ are the main equipment for LPCVD. TOOL Ⅰ is equipped with a pest control device Ⅱ connected to TOOL Ⅰ by a pipeline. An air inlet pipe Ⅰ is provided between the pest control device Ⅱ and TOOL Ⅰ. A three-way solenoid valve Ⅱ is provided on the air inlet pipe Ⅰ. TOOL Ⅱ is equipped with a pest control device Ⅰ connected to TOOL Ⅱ by a pipeline. A make-up pipe Ⅰ is provided between the three-way solenoid valve Ⅱ and the pest control device Ⅰ. An air inlet pipe Ⅱ is provided between the pest control device Ⅰ and TOOL Ⅱ. A three-way solenoid valve Ⅰ is provided on the air inlet pipe Ⅱ. A make-up pipe Ⅱ is provided between the three-way solenoid valve Ⅰ and the pest control device Ⅱ.

[0009] Preferably, the pest control equipment I and pest control equipment II are provided with pest control equipment III on their sides. The pest control equipment III is provided with an air inlet pipe III. A three-way solenoid valve III is provided between the air inlet pipe III and the replenishment pipe I, and between the air inlet pipe III and the replenishment pipe II.

[0010] Preferably, exhaust gas recovery pipes are provided on the outside of TOOLⅠ and TOOLⅡ, and exhaust gas emission pipes are provided between each of the exhaust gas recovery pipes and the pest control equipment Ⅰ, pest control equipment Ⅱ, and pest control equipment Ⅲ.

[0011] Preferably, a diverter pipe I and a diverter pipe II are respectively provided between the intake pipe III and the three-way solenoid valve III.

[0012] Preferably, a flow meter is provided between the three-way solenoid valve I and TOOL II, and between the three-way solenoid valve II and TOOL I.

[0013] A control method for a mutual backup device for pest control equipment includes the following operating steps:

[0014] Step 1: When both the pest control equipment I and the pest control equipment II are operating normally, the harmful gases from TOOL I enter the pest control equipment II through the air inlet pipe I for treatment; the harmful gases from TOOL II enter the pest control equipment I through the air inlet pipe II for treatment.

[0015] Step 2: When the pest control equipment I malfunctions, the state of the three-way solenoid valve II is that the air inlet pipe I is open and the make-up pipe I is closed, while the state of the three-way solenoid valve I is that the air inlet pipe II is closed and the make-up pipe II is open. The harmful gases from TOOL I and TOOL II are treated by the pest control equipment II.

[0016] Step 3: When the pest control equipment II malfunctions, the state of the three-way solenoid valve II is that the air inlet pipe I is blocked and the make-up pipe I is open. The state of the three-way solenoid valve I is that the air inlet pipe II is open and the make-up pipe II is blocked. The harmful gases from TOOL I and TOOL II are treated by the pest control equipment I.

[0017] As a preferred embodiment, when the flow meter alarms that the single unit of the hazard removal equipment I or hazard removal equipment II is overloaded in handling harmful gases, the inlet pipe II or inlet pipe I is blocked. The make-up pipe I or make-up pipe II, through the three-way solenoid valve III, allows the harmful gases to enter the hazard removal equipment III from the inlet pipe III for treatment via the split pipe I or split pipe II respectively.

[0018] As a preferred embodiment, when both the pest control equipment I and the pest control equipment II malfunction, both the intake pipe II and the intake pipe I are blocked. The make-up pipe I and the make-up pipe II are connected to the three-way solenoid valve III, so that the harmful gas enters the pest control equipment III from the intake pipe III through the diversion pipe I and the diversion pipe II respectively for treatment.

[0019] The present invention can achieve the following effects:

[0020] This invention provides a mutual backup device for pest control equipment and its control method. Compared with the prior art, when one or two pest control devices fail, the pipeline can be switched to the air inlet of another pest control device to ensure that the main equipment can exhaust continuously without interruption. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of the present invention.

[0022] Figure 2 This is a schematic diagram of the overload current diversion structure of the present invention.

[0023] In the diagram: Flow meter 1, TOOL I 2, Make-up pipe I 3, TOOL II 4, Three-way solenoid valve I 5, Exhaust gas recovery pipe 6, Exhaust gas discharge pipe 7, Inlet pipe II 8, Pest control equipment I 9, Pest control equipment II 10, Make-up pipe II 11, Inlet pipe I 12, Three-way solenoid valve II 13, Diverter pipe I 14, Three-way solenoid valve III 15, Pest control equipment III 16, Inlet pipe III 17, Diverter pipe II 18. Detailed Implementation

[0024] The technical solution of the invention will be further described in detail below through embodiments and in conjunction with the accompanying drawings.

[0025] Example: Figure 1 and Figure 2As shown, a mutual backup device for pest control equipment includes TOOL Ⅰ2 and TOOL Ⅱ4. TOOL Ⅰ2 and TOOL Ⅱ4 are the main equipment for LPCVD. TOOL Ⅰ2 is equipped with a pest control device Ⅱ10 connected to TOOL Ⅰ2 via a pipeline. An air inlet pipe Ⅰ12 is provided between the pest control device Ⅱ10 and TOOL Ⅰ2. A three-way solenoid valve Ⅱ13 is provided on the air inlet pipe Ⅰ12. TOOL Ⅱ4 is equipped with a pest control device Ⅰ9 connected to TOOL Ⅱ4 via a pipeline. A make-up flow pipe Ⅰ3 is provided between the three-way solenoid valve Ⅱ13 and the pest control device Ⅰ9. An air inlet pipe Ⅱ8 is provided between the pest control device Ⅰ9 and TOOL Ⅱ4. A three-way solenoid valve Ⅰ5 is provided on the air inlet pipe Ⅱ8. A make-up flow pipe Ⅱ11 is provided between the three-way solenoid valve Ⅰ5 and the pest control device Ⅱ10. Flow meters 1 are provided between the three-way solenoid valve Ⅰ5 and TOOL Ⅱ4, and between the three-way solenoid valve Ⅱ13 and TOOL Ⅰ2. Pest control equipment I9 and Pest control equipment II10 are equipped with pest control equipment III16 on their sides. Pest control equipment III16 is equipped with an air inlet pipe III17. A three-way solenoid valve III15 is installed between air inlet pipe III17 and make-up pipe I3, and between air inlet pipe III17 and make-up pipe II11. A diversion pipe I14 and a diversion pipe II18 are installed between air inlet pipe III17 and three-way solenoid valve III15, respectively. Exhaust gas recovery pipe 6 is installed on the outside of TOOL I2 and TOOL II4. Exhaust gas discharge pipe 7 is installed between exhaust gas recovery pipe 6 and pest control equipment I9, pest control equipment II10, and pest control equipment III16, respectively.

[0026] A control method for a mutual backup device for pest control equipment includes the following control steps:

[0027] When both the pest control equipment I9 and the pest control equipment II10 are operating normally, the harmful gas from TOOL I2 enters the pest control equipment II10 through the inlet pipe I12 for treatment; the harmful gas from TOOL II4 enters the pest control equipment I9 through the inlet pipe II8 for treatment.

[0028] When the pest control equipment I9 malfunctions, the three-way solenoid valve II13 will be in the state where the inlet pipe I12 is open and the make-up pipe I3 ​​is closed. The three-way solenoid valve I5 will be in the state where the inlet pipe II8 is closed and the make-up pipe II11 is open. The harmful gases from TOOL I2 and TOOL II4 will be treated by the pest control equipment II10.

[0029] When the pest control equipment II10 malfunctions, the state of the three-way solenoid valve II13 is that the air inlet pipe I12 is blocked and the make-up pipe I3 ​​is open. The state of the three-way solenoid valve I5 is that the air inlet pipe II8 is open and the make-up pipe II11 is blocked. The harmful gases from TOOL I2 and TOOL II4 are treated through the pest control equipment I9.

[0030] When the flow meter 1 issues an early warning that the single unit of the pest control equipment I9 or II10 is overloaded in handling harmful gases, the inlet pipe II8 or inlet pipe I12 becomes blocked. The make-up pipe I3 ​​or make-up pipe II11, through the three-way solenoid valve III15, allows the harmful gases to enter the pest control equipment III16 from the inlet pipe III17 via the diverter pipe I14 or diverter pipe II18 for treatment.

[0031] When both the pest control equipment I9 and the pest control equipment II10 malfunction, the air inlet pipes II8 and I12 become blocked. The make-up pipes I3 and II11, through the three-way solenoid valve III15, allow the harmful gases to enter the pest control equipment III16 from the air inlet pipe III17 via the diverter pipes I14 and II18 for treatment.

[0032] In summary, the mutual backup device and its control method for the pest control equipment enable the pipeline to switch to the air intake of another pest control equipment when one or two pest control devices fail, ensuring continuous and uninterrupted exhaust processing of the main equipment.

[0033] The above description is only a specific embodiment of the present invention, but the structural features of the present invention are not limited thereto. Any changes or modifications made by those skilled in the art within the scope of the present invention are covered by the patent scope of the present invention.

Claims

1. A control method for a mutual backup device for pest control equipment, characterized in that: The mutual backup device for the pest control equipment includes TOOLⅠ (2) and TOOLⅡ (4). TOOLⅠ (2) and TOOLⅡ (4) are the main equipment of LPCVD. TOOLⅠ (2) is equipped with a pest control device Ⅱ (10) connected to TOOLⅠ (2) by a pipeline. An air inlet pipe Ⅰ (12) is provided between the pest control device Ⅱ (10) and TOOLⅠ (2). A three-way solenoid valve Ⅱ (13) is provided on the air inlet pipe Ⅰ (12). TOOLⅡ (4) is equipped with a pest control device Ⅰ (9) connected to TOOLⅡ (4) by a pipeline. A make-up pipe Ⅰ (3) is provided between the three-way solenoid valve Ⅱ (13) and the pest control device Ⅰ (9). An air inlet pipe Ⅱ (8) is provided between the pest control device Ⅰ (9) and TOOLⅡ (4). A three-way solenoid valve Ⅰ (5) is provided on the air inlet pipe Ⅱ (8). A make-up pipe Ⅱ (11) is provided between the three-way solenoid valve Ⅰ (5) and the pest control device Ⅱ (10). The pest control equipment I (9) and pest control equipment II (10) are provided with pest control equipment III (16) on their sides. The pest control equipment III (16) is provided with an air inlet pipe III (17). A three-way solenoid valve III (15) is provided between the air inlet pipe III (17) and the replenishment pipe I (3) and between the air inlet pipe III (17) and the replenishment pipe II (11). A diversion pipe I (14) and a diversion pipe II (18) are respectively provided between the air inlet pipe III (17) and the three-way solenoid valve III (15). A flow meter (1) is provided between the three-way solenoid valve I (5) and TOOL II (4), and between the three-way solenoid valve II (13) and TOOL I (2); The control method for the mutual backup device of the pest control equipment includes the following operating steps: Step 1: When both the pest control equipment I (9) and the pest control equipment II (10) are operating normally, the harmful gas from TOOL I (2) enters the pest control equipment II (10) through the air inlet pipe I (12) for treatment; the harmful gas from TOOL II (4) enters the pest control equipment I (9) through the air inlet pipe II (8) for treatment. Step 2: When the hazard removal equipment I (9) malfunctions, the state of the three-way solenoid valve II (13) is that the air inlet pipe I (12) is open and the make-up pipe I (3) is closed. The state of the three-way solenoid valve I (5) is that the air inlet pipe II (8) is closed and the make-up pipe II (11) is open. The harmful gases from TOOL I (2) and TOOL II (4) are treated by the hazard removal equipment II (10). Step 3: When the hazard removal equipment II (10) malfunctions, the state of the three-way solenoid valve II (13) is that the air inlet pipe I (12) is blocked and the make-up pipe I (3) is open. The state of the three-way solenoid valve I (5) is that the air inlet pipe II (8) is open and the make-up pipe II (11) is blocked. The harmful gases from TOOL I (2) and TOOL II (4) are treated by the hazard removal equipment I (9).

2. The control method for the mutual backup device of the pest control equipment according to claim 1, characterized in that: The TOOLⅠ (2) and TOOLⅡ (4) are provided with exhaust gas recovery pipes (6) on the outside. The exhaust gas recovery pipes (6) are provided with exhaust gas emission pipes (7) between the exhaust gas recovery pipes (6) and the pest control equipment Ⅰ (9), the pest control equipment Ⅱ (10), and the pest control equipment Ⅲ (16).

3. The control method for the mutual backup device of the pest control equipment according to claim 2, characterized in that: When the flow meter (1) warns that the single unit of the pest control equipment I (9) and the pest control equipment II (10) is overloaded in handling harmful gases, the inlet pipe II (8) or the inlet pipe I (12) is blocked. The make-up pipe I (3) or the make-up pipe II (11) passes through the three-way solenoid valve III (15), so that the harmful gases pass through the diversion pipe I (14) or the diversion pipe II (18) and enter the pest control equipment III (16) from the inlet pipe III (17) for treatment.

4. The control method for the mutual backup device of the pest control equipment according to claim 2, characterized in that: When both the pest control equipment I (9) and the pest control equipment II (10) malfunction, the air inlet pipe II (8) and the air inlet pipe I (12) are blocked. The make-up pipe I (3) and the make-up pipe II (11) pass through the three-way solenoid valve III (15), so that the harmful gas passes through the diversion pipe I (14) and the diversion pipe II (18) respectively and enters the pest control equipment III (16) through the air inlet pipe III (17) for treatment.

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