A method and apparatus for adjusting the reference position of a heating plate
By combining a horizontal detector with a tooling structure in a semiconductor coating equipment, the horizontal and centering adjustment of the heating plate is achieved, solving the problems of long detection time and high cost in the prior art, reducing production costs and improving efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- PIOTECH (SHENYANG) SEMICONDUCTOR EQUIPMENT CO LTD
- Filing Date
- 2023-08-22
- Publication Date
- 2026-05-12
AI Technical Summary
In existing semiconductor coating equipment, the use of a visual inspection plate for heating plate centering and adjustment results in long procurement time and high cost, which affects production efficiency.
By combining a level detector with a tooling structure, the level of the heating plate is adjusted and centered under vacuum and normal pressure. The level detector is used to detect the horizontal attitude of the heating plate, simplifying the detection process.
It reduces the production cost of wafer coating equipment, improves production efficiency, and avoids the time and expense of purchasing expensive testing equipment.
Smart Images
Figure CN116988047B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing technology, and more specifically, to a method and device for adjusting the reference position of a heating plate. Background Technology
[0002] Existing semiconductor coating equipment typically uses a circular heating plate to heat wafers or other types of thin-film substrates. This requires aligning the internal chamber of the coating equipment with the center of the heating plate, ensuring the heating plate is horizontal. To achieve precise adjustment, current technologies employ a level detector for horizontal adjustment under vacuum and a visual inspection plate for centering under vacuum. The visual inspection plate uses visualization technology to capture the three-dimensional coordinates of the heating plate and other structures for centering, resulting in a complex structure, long inspection and procurement times, and high procurement costs. This hinders the rapid deployment of coating equipment into production, increasing production costs. Summary of the Invention
[0003] The purpose of this application is to provide a method and device for adjusting the reference position of a heating plate, which achieves horizontal and centering adjustment by combining a horizontal detector with a tooling structure, thereby greatly reducing the production cost of wafer coating equipment.
[0004] The embodiments of this application are implemented as follows:
[0005] In a first aspect, embodiments of this application provide a method for adjusting the reference position of a heating plate, used to align and adjust the spatial position of a heating plate within the internal chamber of a coating equipment, including:
[0006] Install a level detector on the heating plate;
[0007] The level of the heating plate is adjusted in a vacuum environment, and the level detector is used to confirm that the heating plate is in a horizontal position.
[0008] Under normal pressure, the level of the heating plate is adjusted, and the level detector is used to confirm that the heating plate is in a horizontal position.
[0009] Under normal pressure, the heating plate is centered and adjusted so that the center of the heating plate is aligned with the center of the internal cavity of the coating equipment, which is determined as the reference position of the heating plate.
[0010] As an optional implementation, the level detector is a level detection disk parallel to the surface of the heating plate;
[0011] After installing a level detector on the heating plate, the method further includes:
[0012] A reference fixture is mounted on the horizontal opening at the top of the internal chamber, and the reference fixture forms a reference detection surface above the horizontal detection plate that is parallel to the plane where the horizontal opening is located.
[0013] As an optional implementation, a first adjustment component for adjusting the levelness of the heating plate is provided outside the internal cavity;
[0014] The step of adjusting the level of the heating plate in a vacuum environment, and confirming that the heating plate is in a horizontal position by detecting it with the level detector, includes:
[0015] The horizontal position of the heating plate is adjusted by the first adjusting component; the vertical distance from the detection point on the reference fixture to the horizontal detection plate is detected by the horizontal detection plate; wherein, the detection point includes at least three points on the same plane on the reference fixture, the first adjusting component is at least three vertically extending first screws evenly distributed around the central axis of the heating plate, and the first screws are rotated to move the heating plate in the vertical direction to adjust the vertical distance;
[0016] The first adjustment component is locked to lock the horizontal orientation of the heating plate.
[0017] As an optional implementation, an adapter is installed on a base outside the coating equipment, and the heating plate is connected to the adapter via a connector. The adapter is provided with a second adjustment component for adjusting the level of the heating plate.
[0018] The step of adjusting the level of the heating plate under normal pressure and confirming that the heating plate is in a horizontal position by detecting it with the level detector includes:
[0019] The horizontal position of the heating plate is adjusted by the second adjustment component; the vertical distance from the detection point on the reference tool to the horizontal detection plate is detected by the horizontal detection plate; the second adjustment component consists of at least three vertically extending second screws evenly distributed around the central axis of the heating plate, and rotating the second screws causes the heating plate to move in the vertical direction to adjust the vertical distance;
[0020] The second adjustment component is locked to lock the horizontal orientation of the heating plate.
[0021] As an optional implementation, a third adjustment component for adjusting the center position of the heating plate is provided outside the internal cavity;
[0022] The step of centering the heating plate under normal pressure, aligning its center with the center of the internal chamber of the coating equipment, and determining this as the reference position of the heating plate, includes:
[0023] A centering fixture is installed on the heating plate such that the center of the centering fixture is located on the central axis of the heating plate; a reference fixture is installed in the internal chamber of the coating equipment such that the center of the reference fixture is located on the central axis of the internal chamber.
[0024] The center position of the heating plate is adjusted by the third adjustment component; wherein, the third adjustment component consists of at least three horizontally extending center adjustment screws; the center adjustment screws are rotated so that the center adjustment screws drive the heating plate to move in the horizontal direction to adjust the center position, so that the center of the reference fixture and the center of the centering fixture are connected to form a vertical line;
[0025] The detection rod passes through the center of the reference fixture and the centering fixture; the third adjustment component is then locked.
[0026] Secondly, embodiments of this application provide a heating plate reference position adjustment device, which uses the above method to adjust the reference position of the heating plate in the adjustment device, including a reference fixture, a centering fixture and a transfer fixture;
[0027] The reference fixture is disposed at the opening of the internal chamber of the coating equipment. The plane of the reference fixture coincides with the plane of the opening, and the center of the reference fixture coincides with the center of the opening of the internal chamber. It is used to adjust the levelness of the horizontal detection disk through the reference detection surface formed by the reference fixture.
[0028] The centering fixture is used to connect to the heating plate and the central axis of the centering fixture coincides with the central axis of the heating plate, for centering and positioning the heating plate.
[0029] The adapter is mounted on the external base of the coating equipment and connected to the heating plate, and is used to adjust the center position of the heating plate.
[0030] As an optional implementation, the adapter includes a horizontally mounted platform connected to both sides of the external base, with a connector on the mounting platform that connects to the heating plate; a first adjustment component is provided on the connector, the first adjustment component including at least three vertically arranged first screws connected to the heating plate; a second adjustment component is provided on the mounting platform, the second adjustment component including at least three vertically inserted second screws that connect to the connector; the first screws and the second screws are all spaced apart around the central axis of the heating plate, and rotating the first screw or the second screw drives the heating plate to move in the vertical direction.
[0031] As an optional implementation, a third adjustment component is provided on the connector. The third adjustment component includes at least three third screws that are horizontally inserted into the connector and abut against the heating plate. The third screws are spaced apart around the central axis of the heating plate. By rotating the third screws, the center of the heating plate is moved on the horizontal plane.
[0032] As an optional implementation, the reference fixture is disc-shaped; the reference fixture is provided with a snap-fit component in the circumferential direction that connects to the opening of the internal cavity, and the reference fixture is provided with a first through hole in the center.
[0033] As an optional implementation, the centering fixture includes at least three snap-fit connecting rods extending radially along the heating plate; the at least three snap-fit connecting rods are spaced apart around the center of the heating plate and connected to the outer periphery of the heating plate; a second through hole is provided at the center of the centering fixture; a detection rod can be inserted into the first through hole and the second through hole.
[0034] The beneficial effects of the embodiments of this application include:
[0035] This application provides a method for adjusting the reference position of a heating plate, used to align and adjust the spatial position of the heating plate within the internal chamber of a coating equipment. This application involves installing a level detector on the heating plate and adjusting its level under vacuum conditions. The level detector detects the horizontal orientation of the heating plate, facilitating rapid leveling. The method also involves adjusting the heating plate under normal pressure, using the level detector to detect its horizontal orientation. Under normal pressure, the heating plate is leveled and centered to align its center with the center of the coating equipment chamber, thus determining that the heating plate is in the reference position. Compared to techniques using multiple detection devices for leveling and alignment, this reference position adjustment method eliminates the need for time-consuming and expensive equipment procurement, making it easier to implement and effectively reducing wafer production costs.
[0036] The heating plate reference position adjustment device provided in this application embodiment uses the above-described method to adjust the reference position of the heating plate in the adjustment device, including a reference fixture, a centering fixture, and a transfer fixture. The adjustment device provided in this application embodiment has a simple structure and is easy to implement, avoiding the need to purchase other testing equipment. It achieves horizontal adjustment and centering adjustment through the combination of a horizontal detector and a fixture structure, which can greatly reduce the production cost of wafer coating equipment. Attached Figure Description
[0037] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0038] Figure 1 This is a flowchart of the heating plate reference position adjustment method according to an embodiment of this application;
[0039] Figure 2 This is one of the structural schematic diagrams of the heating plate reference position adjustment device according to an embodiment of this application;
[0040] Figure 3 This is a second schematic diagram of the heating plate reference position adjustment device according to an embodiment of this application;
[0041] Figure 4 This is the third schematic diagram of the heating plate reference position adjustment device according to an embodiment of this application;
[0042] Figure 5 This is the fourth schematic diagram of the heating plate reference position adjustment device according to an embodiment of this application;
[0043] Figure 6 This is the fifth schematic diagram of the heating plate reference position adjustment device in the embodiments of this application;
[0044] Figure 7 This is the sixth schematic diagram of the heating plate reference position adjustment device in the embodiments of this application;
[0045] Figure 8 This is the seventh schematic diagram of the heating plate reference position adjustment device in the embodiments of this application.
[0046] Icons: 100-Coating equipment; 101-Internal chamber; 102-Heating plate; 103-Horizontal detection plate; 104-Reference fixture; 105-Centering fixture; 106-Horizontal fixture; 107-Transfer fixture; 108-Base; 109-First adjustment component; 110-Second adjustment component; 111-Third adjustment component; 112-Connector. Detailed Implementation
[0047] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0048] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0049] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0050] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0051] This application provides a method for adjusting the reference position of a heating plate 102, used to align and adjust the spatial position of the heating plate 102 in the internal chamber 101 of a coating equipment 100, including:
[0052] S10. Install a level detector on the heating plate 102;
[0053] S20. Adjust the level of the heating plate 102 in a vacuum environment and use a level detector to confirm that the heating plate 102 is in a horizontal position.
[0054] S30. Under normal pressure, adjust the level of the heating plate 102 and use a level detector to confirm that the heating plate 102 is in a horizontal position.
[0055] S40. Under normal pressure, the heating plate 102 is centered and adjusted so that the center of the heating plate 102 is aligned with the center of the internal cavity 101 of the coating equipment 100, and this is determined as the reference position of the heating plate 102.
[0056] It should be noted that the adjustment method provided in this embodiment does not require the use of a visual detection plate for centering adjustment, and does not require entering a vacuum environment during the centering adjustment of the hot plate center and the center of the internal chamber 101 of the coating equipment 100. In this embodiment, the horizontal detection plate 103 can detect the distance between the reference detection surface on the reference tooling 104 and the plane where the heating plate 102 is located, and the detection data from at least three detection points is used to determine whether the heating plate 102 is in a horizontal state. Since the vacuum negative pressure in the internal chamber 101 affects the detection data of the horizontal detection plate 103, it causes a deviation from the detection data under normal pressure. This embodiment compensates for the deviation from the detection data under vacuum by leveling the heating plate 102 under normal pressure, thereby facilitating centering adjustment.
[0057] This application provides a method for adjusting the reference position of a heating plate 102, used to align and adjust the spatial position of the heating plate 102 within the internal chamber 101 of a coating equipment 100. This application involves installing a level detector on the heating plate 102 and adjusting its level under vacuum conditions. The level detector detects the horizontal orientation of the heating plate 102, facilitating rapid level adjustment. Under normal pressure, the heating plate 102 is leveled and aligned using the level detector. Under normal pressure, the heating plate 102 is leveled and centered to align its center with the center of the chamber of the coating equipment 100, thus determining that the heating plate 102 is in the reference position. Compared to techniques using multiple detection devices for leveling and alignment, the reference position adjustment method provided in this application does not require the time-consuming purchase of expensive detection equipment, is easy to implement, and can effectively reduce wafer production costs.
[0058] As an optional implementation, the level detector is a level detection plate 103 parallel to the surface of the heating plate 102. It should be noted that before installing the level detector on the heating plate 102, a level fixture 106 is attached to the surface of the heating plate 102, and then the level detection plate 103 parallel to the heating plate 102 is installed on the level fixture 106.
[0059] After installing a level detector on the heating plate 102, the method further includes:
[0060] A reference fixture 104 is mounted on the horizontal opening at the top of the internal chamber 101. The reference fixture 104 forms a reference detection surface above the horizontal detection disk 103 that is parallel to the plane where the horizontal opening is located.
[0061] The reference fixture 104 provides a reference detection surface to the horizontal detection plate 103, facilitating horizontal detection by the horizontal detection plate 103.
[0062] As an optional implementation, a first adjustment component 109 for adjusting the level of the heating plate 102 is provided outside the internal chamber 101;
[0063] Adjusting the level of the heating plate 102 in a vacuum environment and confirming that the heating plate 102 is in a horizontal position by detecting the level with a level detector; including:
[0064] The horizontal position of the heating plate 102 is adjusted by the first adjustment component 109; the vertical distance from the detection point on the reference fixture 104 to the horizontal detection plate 103 is detected by the horizontal detection plate 103; wherein, the detection point includes at least three points on the same plane on the reference fixture 104, and the first adjustment component 109 is at least three vertically extending first screws evenly distributed around the central axis of the heating plate 102. The first screws are rotated so that the first screws drive the heating plate 102 to move in the vertical direction to adjust the vertical distance;
[0065] Lock the first adjustment component 109 to lock the horizontal position of the heating plate 102.
[0066] The first adjustment component 109 of this application embodiment is disposed outside the internal chamber 101 of the coating equipment 100. Its heating plate 102 is connected to the connector 112 extending to the outside of the internal chamber 101. The first adjustment component 109 is disposed on the connector 112. By adjusting the position of the connector 112, the heating plate 102 is horizontally positioned.
[0067] As an optional implementation, a transition fixture 107 is installed on a base 108 outside the coating equipment 100, and the heating plate 102 is connected to the transition fixture 107 via a connector 112. A second adjustment component 110 for adjusting the level of the heating plate 102 is provided on the transition fixture 107.
[0068] Under normal pressure, the heating plate 102 is adjusted to be level, and the level is confirmed to be in a horizontal position by a level detector; including:
[0069] The horizontal position of the heating plate 102 is adjusted by the second adjustment component 110; the vertical distance from the detection point on the reference fixture 104 to the horizontal detection plate 103 is detected by the horizontal detection plate 103; the second adjustment component 110 consists of at least three vertically extending second screws evenly distributed around the central axis of the heating plate 102, and rotating the second screws causes the heating plate 102 to move in the vertical direction to adjust the vertical distance;
[0070] Lock the second adjustment component 110 to lock the horizontal position of the heating plate 102.
[0071] It should be noted that the adapter 107 in this embodiment is connected to the heating plate 102 via a connector 112. The horizontal adjustment of the heating plate 102 can be achieved by providing a second adjustment component 110 on the adapter 107. The first adjustment component 109 and the second adjustment component 110 each include multiple first screws and multiple second screws. By rotating the first or second screws to move them vertically, the position of the heating plate 102 in the vertical direction is moved. Since the first adjustment component 109 and the second adjustment component 110 have at least three screws evenly distributed around the central axis of the heating plate 102, the coordinated rotation of the screws allows the heating plate 102 to be horizontal in both vacuum and normal pressure environments.
[0072] As an optional implementation, a third adjustment component 111 for adjusting the center position of the heating plate 102 is provided outside the internal chamber 101;
[0073] It should be noted that, under normal pressure, before centering and adjusting the heating plate 102, the reference fixture 104 needs to be removed from the coating equipment 100 and taken out; the horizontal detection plate 103 needs to be removed from the internal chamber 101 of the coating equipment 100 and taken out.
[0074] Under normal pressure, the heating plate 102 is centered and adjusted so that its center is aligned with the center of the internal chamber 101 of the coating equipment 100, which is then determined as the reference position of the heating plate 102; including:
[0075] A centering fixture 105 is installed on the heating plate 102, such that the center of the centering fixture 105 is located on the central axis of the heating plate 102; a reference fixture 104 is installed in the internal chamber 101 of the coating equipment 100, such that the center of the reference fixture 104 is located on the central axis of the internal chamber 101.
[0076] The center position of the heating plate 102 is adjusted by the third adjustment component 111; wherein, the third adjustment component 111 consists of at least three horizontally extending center adjustment screws; the center adjustment screws are rotated so that the center adjustment screws drive the heating plate 102 to move in the horizontal direction to adjust the center position, so that the center of the reference fixture 104 and the center of the centering fixture 105 are connected to form a vertical line.
[0077] A detection rod is used to penetrate the center of the reference fixture 104 and the centering fixture 105; the third adjustment component 111 is locked.
[0078] It should be noted that the first adjusting component 109 locks the heating plate 102 to a horizontal position under vacuum. Under normal pressure, leveling is achieved using the second adjusting component 110 mounted on the adapter 107. After alignment, the third adjusting component 111 used for alignment is locked. When removing the adapter 107, this ensures the heating plate 102 is in the reference position.
[0079] This application provides a reference position adjustment device for a heating plate 102. The reference position of the heating plate 102 in the adjustment device is adjusted by the above method, including a reference fixture 104, a centering fixture 105 and a transition fixture 107.
[0080] The reference fixture 104 is disposed at the opening of the internal chamber 101 of the coating equipment 100. The plane of the reference fixture 104 coincides with the plane of the opening, and the center of the reference fixture 104 coincides with the center of the opening of the internal chamber 101. It is used to adjust the levelness of the horizontal detection disk 103 through the reference detection surface formed by the reference fixture 104.
[0081] The centering fixture 105 is used to connect to the heating plate 102 and the central axis of the centering fixture 105 coincides with the central axis of the heating plate 102, and is used to center and position the heating plate 102.
[0082] The adapter 107 is mounted on the external base 108 of the coating equipment 100 and connected to the heating plate 102 for adjusting the center position of the heating plate 102.
[0083] It should be noted that a horizontal fixture 106 can be attached to the surface of the heating plate 102, and a horizontal detection plate 103 parallel to the heating plate 102 can be installed on the horizontal fixture 106.
[0084] The heating plate 102 reference position adjustment device provided in this application embodiment adjusts the reference position of the heating plate 102 using the above-described method. It includes a reference fixture 104, a centering fixture 105, and a transition fixture 107. The adjustment device provided in this application embodiment has a simple structure and is easy to implement, avoiding the need to purchase other testing equipment. It achieves horizontal and centering adjustments through the combination of a horizontal detector and the fixture structure, which can significantly reduce the production cost of the wafer coating equipment 100.
[0085] Reference Figure 5 As shown, as an optional implementation, the reference tool 104 is disc-shaped; the reference tool 104 is provided with a snap-fit component in the circumferential direction that connects to the opening of the internal cavity 101, and the reference tool 104 is provided with a first through hole in the center.
[0086] Reference Figure 6As shown, as an optional implementation, the centering fixture 105 includes at least three snap-fit connecting rods extending radially along the heating plate 102; the at least three snap-fit connecting rods are distributed at intervals around the center of the heating plate 102 and connected to the outer periphery of the heating plate 102; a second through hole is provided at the center of the centering fixture 105; a detection rod can be inserted into the first through hole and the second through hole to achieve accurate centering.
[0087] Reference Figure 7 The diagram shown is a structural schematic of the horizontal tooling 106 in an embodiment of this application.
[0088] Reference Figure 8 The diagram shown is a structural schematic of the adapter 107 according to an embodiment of this application. The adapter 107 includes a horizontally mounted platform connected to both sides of the external base 108. A connector 112 connected to the heating plate 102 is provided on the mounting platform. A first adjustment component 109 is provided on the connector 112. The first adjustment component 109 includes at least three vertically arranged first screws connected to the heating plate 102. A second adjustment component 110 is provided on the mounting platform. The second adjustment component 110 includes at least three vertically inserted second screws on the mounting platform and connected to the connector 112. The first screws and the second screws are spaced apart around the central axis of the heating plate 102. Rotating the first screw or the second screw drives the heating plate 102 to move in the vertical direction.
[0089] As an optional implementation, a third adjustment component 111 is provided on the connector 112. The third adjustment component 111 includes at least three third screws that are horizontally inserted into the connector 112 and abut against the heating plate 102. The third screws are spaced apart around the central axis of the heating plate 102. By rotating the third screws, the center of the heating plate 102 is moved on the horizontal plane.
[0090] It should be noted that the reference fixture 104, centering fixture 105, horizontal fixture 106, and adapter fixture 107 in the embodiments of this application can be configured as needed by those skilled in the art, and no special limitations are made here.
[0091] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A method for adjusting the reference position of a heating plate, used to align and adjust the spatial position of a heating plate in the internal chamber of a coating equipment, characterized in that... include: Install a level detector on the heating plate; The horizontal detector is a horizontal detection disk that is parallel to the surface of the heating plate; A reference fixture is mounted on the horizontal opening at the top of the internal chamber, and the reference fixture forms a reference detection surface above the horizontal detector that is parallel to the plane where the horizontal opening is located; In a vacuum environment, at least three vertically extending first screws evenly distributed around the central axis of the heating plate are used to adjust the movement of the heating plate; the vertical distance from the detection point on the reference fixture to the horizontal detection plate is detected by the horizontal detection plate; wherein, the detection point includes at least three points on the same plane on the reference fixture; the first screws are locked to lock the horizontal posture of the heating plate; Under normal pressure, at least three vertically extending second screws evenly distributed around the central axis of the heating plate are used to adjust the movement of the heating plate; the vertical distance from the detection point on the reference tool to the horizontal detection plate is detected by the horizontal detection plate; the second screws are locked to lock the horizontal posture of the heating plate; Under normal pressure, the heating plate is centered and adjusted so that the center of the heating plate is aligned with the center of the internal cavity of the coating equipment, which is determined as the reference position of the heating plate.
2. The heating plate reference position adjustment method according to claim 1, characterized in that, An adapter fixture is installed on a base outside the coating equipment, and the heating plate is connected to the adapter fixture via a connector. The second screw is installed on the adapter fixture.
3. The method for adjusting the reference position of the heating plate according to claim 1, characterized in that, A third adjustment component for adjusting the center position of the heating plate is provided outside the internal cavity. The step of centering the heating plate under normal pressure, aligning its center with the center of the internal chamber of the coating equipment, and determining this as the reference position of the heating plate, includes: A centering fixture is installed on the heating plate such that the center of the centering fixture is located on the central axis of the heating plate; a reference fixture is installed in the internal chamber of the coating equipment such that the center of the reference fixture is located on the central axis of the internal chamber. The center position of the heating plate is adjusted by the third adjustment component; wherein, the third adjustment component consists of at least three horizontally extending center adjustment screws; the center adjustment screws are rotated so that the center adjustment screws drive the heating plate to move in the horizontal direction to adjust the center position, so that the center of the reference fixture and the center of the centering fixture are connected to form a vertical line; A detection rod is used to penetrate the center of the reference fixture and the centering fixture; the third adjustment component is then locked.
4. A heating plate reference position adjustment device, wherein the reference position of the heating plate in the adjustment device is adjusted by the method described in any one of claims 1-3, characterized in that, This includes reference fixtures, centering fixtures, and adapter fixtures; The reference fixture is disposed at the opening of the internal chamber of the coating equipment. The plane of the reference fixture coincides with the plane of the opening, and the center of the reference fixture coincides with the center of the opening of the internal chamber. It is used to adjust the levelness of the horizontal detection disk through the reference detection surface formed by the reference fixture. The centering fixture is used to connect to the heating plate and the central axis of the centering fixture coincides with the central axis of the heating plate, for centering and positioning the heating plate. The adapter is mounted on the external base of the coating equipment and connected to the heating plate, and is used to adjust the center position of the heating plate.
5. The heating plate reference position adjustment device according to claim 4, characterized in that, The adapter includes a horizontally arranged mounting platform connected to both sides of the external base, and a connector for connecting to the heating plate is provided on the mounting platform. The connector is provided with a first adjustment component, the first adjustment component including at least three vertically arranged first screws connected to the heating plate; the mounting platform is provided with a second adjustment component, the second adjustment component including at least three vertically inserted second screws through the mounting platform and connected to the connector. The first screw and the second screw are both distributed at intervals around the central axis of the heating plate. By rotating the first screw or the second screw, the heating plate is moved in the vertical direction.
6. The heating plate reference position adjustment device according to claim 5, characterized in that, A third adjustment component is provided on the connector. The third adjustment component includes at least three third screws that are horizontally inserted into the connector and abut against the heating plate. The third screws are spaced apart around the central axis of the heating plate. By rotating the third screws, the center of the heating plate is moved on the horizontal plane.
7. The heating plate reference position adjustment device according to claim 4, characterized in that, The reference fixture is disc-shaped; the reference fixture is provided with a snap-fit component on its circumference that connects to the opening of the internal cavity, and the reference fixture is provided with a first through hole at its center.
8. The heating plate reference position adjustment device according to claim 7, characterized in that, The centering fixture includes at least three snap-fit connecting rods extending radially along the heating plate; the at least three snap-fit connecting rods are spaced apart around the center of the heating plate and connected to the outer periphery of the heating plate; a second through hole is provided at the center of the centering fixture; a detection rod can be inserted into the first through hole and the second through hole.