Apparatus and method for cleaning a charging device

Abstract

The embodiment of the present application discloses an apparatus and method for cleaning a feeding device, the feeding device comprising a first part and a second part arranged coaxially with each other, the apparatus comprising: a holding module for accommodating and holding the feeding device; a cleaning module for cleaning the feeding device; wherein the holding module comprises a cleaning cavity and a driving unit, the driving unit is arranged to be capable of holding the first part and the second part of the feeding device, and to be capable of moving at least one of the first part and the second part in a direction separate from the first part and the second part, so that the first part and the second part are cleaned by the cleaning module in a state of being at least partially separated in the cleaning cavity.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and more particularly to equipment and methods for cleaning and feeding devices. Background Technology

[0002] In the prior art, silicon wafers used to produce the aforementioned semiconductor electronic components such as integrated circuits are mainly manufactured by slicing single-crystal silicon rods pulled using the Czochralski method. The Czochralski method involves melting polycrystalline silicon in a quartz crucible to obtain a silicon melt, immersing a single-crystal seed crystal in the silicon melt, and continuously lifting the seed crystal away from the surface of the silicon melt, thereby growing a single-crystal silicon rod at the phase interface during the movement.

[0003] The crystal pulling process typically includes processes such as material preparation, secondary feeding, temperature stabilization, impregnation, diameter reduction, shoulder formation, shoulder rotation, equal diameter formation, and finishing. For the secondary feeding process, the polycrystalline silicon material added to the crucible exhibits anti-expansion characteristics—that is, the solid volume is larger than the liquid volume—and its volume decreases after melting. Therefore, it is necessary to fill the crucible with molten silicon again by adding material a second time.

[0004] Currently, the secondary feeding pipe is mainly cleaned manually, which not only results in poor cleaning effect and low cleaning efficiency, but also may damage the feeding pipe. Summary of the Invention

[0005] In view of this, the embodiments of the present invention aim to provide an apparatus and method for cleaning a feeding device; it can replace manual cleaning operations, avoid the situation where the feeding device is not completely cleaned due to improper manual cleaning operations, and thus eliminate the contamination of materials by the cleaned feeding device in subsequent use. In addition, compared with manual cleaning operations, the apparatus not only improves cleaning efficiency and reduces cleaning costs, but also reduces the probability of the feeding device being damaged during the cleaning process.

[0006] The technical solution of this invention is implemented as follows:

[0007] In a first aspect, embodiments of the present invention provide an apparatus for a cleaning feeding device, the feeding device comprising a first part and a second part coaxially disposed therebetween, the apparatus comprising:

[0008] A retaining module is used to accommodate and retain the feeding device;

[0009] A cleaning module, used to clean the feeding device;

[0010] The holding module includes a cleaning chamber and a driving unit. The driving unit is configured to hold the first part and the second part of the feeding device and to move at least one of the first part and the second part in a direction of separation between the first part and the second part, so that the first part and the second part are cleaned by the cleaning module while at least partially separated in the cleaning chamber.

[0011] In some optional examples, the drive unit includes a first drive member for holding the first part and a second drive member for holding the second part.

[0012] The second drive member is configured to drive the second part to move in a direction away from the first part while the first part is held by the first drive member, so as to separate the second part from the first part at least partially.

[0013] In some optional examples, the second drive is also configured to drive the first part to rotate and rise and fall with the second part by driving the second part.

[0014] In some alternative examples, the first actuating element is disposed on the inner wall of the cleaning chamber, and the first actuating element is configured to switch between a first state and a second state.

[0015] In the first state, the first drive member retracts into the inner wall of the cleaning chamber without contacting the feeding device; in the second state, the first drive member extends from the inner wall of the cleaning chamber to hold the first part of the feeding device.

[0016] In some optional examples, the cleaning module includes a liquid cleaning unit for supplying cleaning fluid into the cleaning chamber to clean the feeding device located within the cleaning chamber.

[0017] In some optional examples, the cleaning module may also include an ultrasonic cleaning unit that cooperates with the liquid cleaning unit.

[0018] In some optional examples, the cleaning module further includes a gas cleaning unit for supplying gas into the cleaning chamber to purge the feeding device located within the cleaning chamber.

[0019] In some optional examples, the device further includes a filtration module for filtering the cleaning fluid discharged from the cleaning chamber.

[0020] In some optional examples, the device also includes a recycling module for recovering the filtered cleaning fluid for reuse.

[0021] In a second aspect, embodiments of the present invention provide a method for cleaning a feeding device, the method being performed using the device according to the first aspect.

[0022] This invention provides an apparatus and method for cleaning a feeding device. The holding module of the apparatus is configured to at least partially separate the two parts of the feeding device within the cleaning chamber, so that the cleaning module of the apparatus can more thoroughly clean the feeding device in the partially separated state. The apparatus can replace manual cleaning operations, avoiding the situation where the feeding device is not completely cleaned due to improper manual cleaning operations. Therefore, it eliminates the possibility of material contamination from the cleaned feeding device during subsequent use. In addition, compared with manual cleaning operations, the apparatus not only improves cleaning efficiency and reduces cleaning costs, but also reduces the probability of the feeding device being damaged during the cleaning process. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of a feeding device provided in an embodiment of the present invention.

[0024] Figure 2 This is a schematic diagram of the structure of a crystal pulling furnace provided in an embodiment of the present invention.

[0025] Figure 3 This is a schematic diagram of a device for a cleaning and feeding apparatus provided in an embodiment of the present invention.

[0026] Figure 4 This is another structural schematic diagram of a device for a cleaning and feeding apparatus provided in an embodiment of the present invention.

[0027] Figure 5 This is another structural schematic diagram of a device for a cleaning and feeding apparatus provided in an embodiment of the present invention. Detailed Implementation

[0028] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

[0029] In conventional techniques, a feeding device used to perform a secondary feeding operation during crystal pulling typically comprises two coaxially arranged parts. Material can be contained in the feeding device and added to the crucible by moving the two parts of the feeding device relative to each other in the axial direction.

[0030] See Figure 1 and Figure 2 ,in Figure 1A schematic diagram of a feeding device 20 used in conventional technology for performing secondary feeding is shown. Figure 2 It shows including Figure 1 The schematic diagram of the structure of the crystal pulling furnace is shown below. The feeding device 20 includes a through first feeding pipe 201, a traction member 202, a feeding member 203, and a foldable bulk material assembly 204. The traction member 202 passes through the first feeding pipe 201, the feeding member 203 is disposed inside the first feeding pipe 201 and is arranged in a spiral manner around the traction member 202, and the bulk material assembly 204 is connected to the traction member 202 and is located below the feeding member 203. The bulk material assembly 204 is configured to rotate around the traction member 202.

[0031] The feeding component 203 can be configured to move relative to the first feeding pipe 201 or can be fixedly mounted on the inner wall of the first feeding pipe 201. When the feeding component 203 is configured to move relative to the first feeding pipe 201, the feeding component 203 is spirally arranged around the traction component 202 and fixedly mounted on the traction component 202.

[0032] like Figure 1 and Figure 2 As shown, when secondary feeding is required into the quartz crucible 50 using the feeding device 20, one end of the traction member 202 can be connected to the traction rope 40 that moves and rotates the seed crystal via the first hook 30. Since the traction rope 40 can move up and down and rotate around itself with the seed crystal rotation system (not shown in the figure), the traction member 202 can move with the movement of the traction rope 40. In addition, when adding the material to be conveyed 60 (e.g., polycrystalline silicon raw material) into the first feeding tube 201, the bottom end of the first feeding tube 201, i.e., the lower end in the figure, must first be sealed with the bottom end of the material distribution assembly 204 to prevent the material to be conveyed 60 in the first feeding tube 201 from flowing out from the outlet end of the first feeding tube 201 before being added to the quartz crucible 50. There are no specific requirements for the order in which the material to be conveyed 60 is added. It can be added after the first feeding tube 201 is installed on the hanging wall 80 inside the crystal pulling furnace through the second hook 70, or it can be added before the first feeding tube 201 is installed on the hanging wall 80 inside the crystal pulling furnace through the second hook 70.

[0033] When it is necessary to add the material 60 to be conveyed into the quartz crucible 50, the traction rope 40 can be moved downward by controlling the seed crystal rotation system. The bulk material assembly 204, which is fixedly connected to the traction component 202, can then move downward accordingly. When it moves to a certain distance from the surface of the molten S1, it can stop moving. This distance can be adjusted according to the actual situation. When the bulk material assembly 204 stops moving downward, a channel is formed between the discharge end of the first feeding pipe 201 and the bulk material assembly 204, allowing the material 60 to flow out.

[0034] At this time, if the feeding component 203 is fixedly mounted on the traction component 202 in a spiral manner, the traction rope 40 can be rotated by the seed crystal rotation system, so that the feeding component 203 can rotate at a certain speed along with the traction rope 40. The material 60 to be conveyed in the first feeding tube 201 can then fall into the quartz crucible 50 by the spiral feeding of the feeding component 203. This feeding method relies not only on the gravity of the material 60 to be conveyed, but also mainly on the spiral feeding method of the feeding component 203. Since the rotation speed of the feeding component 203 can be controlled by the seed crystal rotation system, the feeding speed of the feeding component 203 can be effectively controlled. If the feeding component 203 is fixedly connected to the inner wall of the first feeding tube 201, the material 60 to be conveyed on the feeding component 203 can be fed from the upper end to the lower end of the spirally mounted feeding component 203 by its own gravity.

[0035] A foldable bulk material assembly 204 is also provided below the discharge end of the first feeding pipe 201. To prevent the bulk material assembly 204 from contacting the guide cylinder 90 and causing damage, the bulk material assembly 204 passes through the guide cylinder 90 during use of the feeding device 20. Before passing through the guide cylinder 90, the bulk material assembly 204 needs to be retracted so that it no longer touches the guide cylinder 90. When it is necessary to fill the quartz crucible 50, the bulk material assembly 204 should be in an extended state to facilitate the material 60 to be conveyed falling from the bulk material assembly 204 to the edge of the quartz crucible 50. To facilitate the retraction and extension of the bulk material assembly 204, the connecting end of the bulk material assembly 204 is rotatably connected to the traction member 202 along the axial direction, allowing the connecting end of the bulk material assembly 204 to rotate along the axial direction of the traction member 202. The bulk material assembly 204 and the traction member 202 can be connected, for example, by a rotating shaft.

[0036] Cleaning of the feeding device 20 is usually done manually by the operator. During the cleaning process, the operator needs to hold a cleaning device, such as a lint-free cloth, and use a cleaning agent, such as alcohol, to repeatedly wipe the various components of the feeding device. The entire manual cleaning process is cumbersome, and the operator often has to consume a lot of cleaning devices and cleaning agents, resulting in high cleaning costs and low efficiency. Moreover, given that some components of the feeding device are large and have complex internal structures, the operator may not be able to reach all parts of these components. Taking the first feeding tube 201 as an example, because the first feeding tube 201 is long, even though it has a through structure, some parts of its inner wall near the middle cannot be reached by the operator. With the feeding component 203 fixedly set on the inner wall of the first feeding tube 201, there are even more "dead corners" that cannot be cleaned. If a feeding device 20 that has not been thoroughly cleaned is used for secondary feeding, it will contaminate the material and affect the quality of subsequent products.

[0037] In view of this, embodiments of the present invention propose an apparatus for cleaning a feeding device; the apparatus can replace manual cleaning operations, avoiding the situation where the feeding device is not completely cleaned due to improper manual cleaning operations, thus eliminating the contamination of materials by the cleaned feeding device in subsequent use. In addition, compared with manual cleaning operations, the apparatus not only improves cleaning efficiency and reduces cleaning costs, but also reduces the probability of the feeding device being damaged during the cleaning process.

[0038] See Figure 3 This invention provides a device 10 for cleaning a feeding device 20, the feeding device 20 including a first part P1 and a second part P2 coaxially arranged with each other, the device comprising:

[0039] Holding module 11, the holding module 11 being used to accommodate and hold the feeding device 20;

[0040] Cleaning module 12, the cleaning module 12 is used to clean the feeding device 20;

[0041] The holding module 12 includes a cleaning chamber 111 and a driving unit 112. The driving unit 112 is configured to hold the first part P1 and the second part P2 of the feeding device 20 and to move at least one of the first part P1 and the second part P2 in the direction of separation of the first part P1 and the second part P2, so that the first part P1 and the second part P2 are cleaned by the cleaning module 12 while at least partially separated in the cleaning chamber 111.

[0042] The device 10 proposed in this embodiment of the invention can be used, for example, to clean the feeding device 20 described above. The first part P1 includes a first feeding pipe and a feeding component, and the second part P2 includes a traction component and a foldable bulk material assembly. The traction component passes through the first feeding pipe, the feeding component is disposed inside the first feeding pipe, and the bulk material assembly is connected to the traction component and located below the feeding component.

[0043] like Figure 3 As shown, the device 10 includes a holding module 11 for accommodating and holding the feeding device 20, and a cleaning module 12 for cleaning the feeding device 20. The holding module 11 includes a cleaning chamber 111, which may be a cylindrical shape with one end open. The feeding device 20 can enter the cleaning chamber 111 through the open end and be completely accommodated in the cleaning chamber 111.

[0044] The holding module 11 also includes a drive unit 112 for holding the first part P1 and the second part P2 of the feeding device 20. The drive unit 112 can be configured to drive the first part P1 and the second part P2 of the feeding device 20 to partially or completely separate from each other within the cleaning chamber 111, so as to expose the second part P2 at least partially from the first part P1 into the cleaning chamber 111. After separation, the first part P1 and the second part P2 can be cleaned more thoroughly by the cleaning module without affecting the cleaning effect due to mutual interference.

[0045] For example, the drive unit 112 may be configured to drive the second part P2 of the feeding device 20 to move away from the first part P1 while keeping the first part P1 of the feeding device 20 stationary; or the drive unit 112 may be configured to drive the first part P1 of the feeding device 20 to move away from the second part P2 while keeping the second part P2 of the feeding device 20 stationary; or the drive unit 112 may be configured to drive the first part P1 and the second part P2 of the feeding device 20 to move in a direction away from each other at the same time, thereby achieving the purpose of at least partially separating the first part P1 from the second part P2.

[0046] This invention provides an apparatus 10 for cleaning a feeding device; the holding module 11 of the apparatus 10 is configured to at least partially separate the two parts of the feeding device 20 within the cleaning chamber 111, so that the cleaning module 12 of the apparatus can more thoroughly clean the feeding device 20 in the partially separated state; the apparatus 10 can replace manual cleaning operations, avoiding the situation where the feeding device 20 is not completely cleaned due to improper manual cleaning operations, thus eliminating the contamination of materials by the cleaned feeding device in subsequent use. In addition, compared with manual cleaning operations, the apparatus not only improves cleaning efficiency and reduces cleaning costs, but also reduces the probability of the feeding device being damaged during the cleaning process.

[0047] Regarding the implementation of the drive unit, according to a preferred embodiment of the present invention, see [reference needed]. Figure 3 The drive unit 112 includes a first drive member 112a for holding the first part P1 and a second drive member 112b for holding the second part P2.

[0048] The second drive member 112b is configured to drive the second part P2 to move in a direction away from the first part P1 while the first part P1 is held by the first drive member 112a, so as to at least partially separate from the first part P1.

[0049] For example, with Figure 1 Taking the feeding device 20 shown as an example, during the process of inserting the feeding device 20 into the vertically positioned cleaning chamber 111 through its open opening, the first driving member 112a can hold the first part P1 by abutting against the hook wall 80 disposed on the outside of the first part P1. It is understood that the first driving member 112a can also hold the first part P1 in other ways, for example, the first driving member 112a can be formed in the form of a roughly annular clamp and hold the first part P1 by clamping it to the outside. When the first part P1 is held by the holding module 11, the second driving member 112b connected to the second part P2 can drive the second part P2 to continue descending within the cleaning chamber 111 until it is fully or partially exposed from the first part P1, for example, as... Figure 3 As shown, the feeder of the second part P2 is fully exposed from the first part, and then the cleaning module 12 is used to thoroughly clean the first part P1 and the second part P2.

[0050] According to another preferred embodiment of the present invention, the second driving member 112b is further configured to drive the first part P1 to rotate and rise and fall with the second part P2 by driving the second part P2.

[0051] See Figure 4 The second drive member 112b of the device 10 is directly connected to the second part P2 of the feeding device 20. Since the first part P1 and the second part P2 are coaxially arranged, and the maximum radial dimension of the second part P2 in the unfolded state is greater than the diameter of the first feeding tube of the first part P1, the first part P1 can be carried by the second part P2 and can move together with the second part P2.

[0052] Specifically, for example, the first part P1 carried by the second part P2 can be rotated by driving the second part P2 to rotate with the second part P2. Similarly, the first part P1 carried by the second part P2 can be moved up and down by driving the second part P2 to move up and down with the second part P2. Thus, when the feeding device 20 to be cleaned enters the cleaning chamber 111, the second driving member 112b can drive the second part P2 to rotate, thereby causing the first part P1 to rotate together. This allows impurities and other contaminants attached to the components of the feeding device 20 to leave the feeding device 20 due to the centrifugal force generated by the rotation, thereby achieving the purpose of initially cleaning the feeding device 20. In addition, the above-mentioned rotation operation can be added to the cleaning device 20 after cleaning, so as to use the centrifugal force generated by the rotation to remove the cleaning liquid from the components of the feeding device 20.

[0053] For a specific implementation of the first driving element 112a, see the preferred embodiment of the present invention. Figure 3 The first driving member 112a is disposed on the inner wall of the cleaning chamber 111, and the first driving member 112a is configured to switch between a first state and a second state.

[0054] In the first state, the first driving member 112a retracts into the inner wall of the cleaning chamber 111 and does not contact the feeding device 20, such as Figure 4 As shown; in the second state, the first drive member 112a extends from the inner wall of the cleaning chamber to hold the first portion of the feeding device, as... Figure 5 As shown.

[0055] See Figure 3 The first driving member 112a is disposed in an extendable manner within the cleaning chamber 111 near the opening. Figure 3 In the example shown, the first drive member 112a is a pair of horizontally symmetrical protrusions. One end of each protrusion is embedded in the inner wall of the cleaning cavity, and the other end is used to directly contact the first part P1 and has a shape adapted to the first part P1, for example, as shown. Figure 3 As shown, the free end of the first drive member 112a is wedge-shaped to better fit the hook wall of the first part P1.

[0056] To fully accommodate the feeding device 20, the inner diameter of the cleaning chamber 111 is designed to be larger than the maximum radial dimension of the feeding device 20, for example, larger than the outer diameter of the bulk material assembly located at the lower end of the feeding device 20 and in the unfolded state. When the feeding device 20 is inserted into the cleaning chamber from its open end, the first drive member 112a can be embedded in the wall of the cleaning chamber 111, such as... Figure 4As shown, to avoid interference with the feeding device 20 entering the cleaning chamber 111, after the maximum diameter portion of the feeding device 20 has completely passed the first driving member 112a, the first driving member 112a can be allowed to extend horizontally from the wall of the cleaning chamber 111, as shown. Figure 5 As shown, the first drive member 112a is prepared to abut against the hook wall of the first part P1, thereby holding the first part P1. That is to say, the first drive member 112a can have two states to save space in the cleaning chamber 111 and thus reduce the overall volume of the device 10.

[0057] As an example, the extension and retraction of the first drive member 112a can be achieved by means of hydraulic, pneumatic, electric, etc., which will not be elaborated here.

[0058] As a further example, in an embodiment where the drive unit 112 is configured to drive the first part P1 of the feeding device 20 to move away from the second part P2 while keeping the second part P2 stationary, the first drive member 112a can not only extend and retract in the horizontal direction, but also move up and down along a channel, for example, opened on the inner wall of the cleaning chamber 111, in the extended state, so as to drive the first part P1 to move up and down by carrying it, thereby achieving separation of the first part and the second part while the second part remains stationary.

[0059] In order to clean the feeding device 20, preferably, the cleaning module 12 includes a liquid cleaning unit 121, which is used to provide cleaning liquid into the cleaning chamber 111 to clean the feeding device located in the cleaning chamber.

[0060] like Figure 3 As shown, when the feeding device 20 to be cleaned is placed in the cleaning chamber 111 and the first part P1 and the second part P2 are also separated, the liquid cleaning unit 121 can inject cleaning liquid into the cleaning chamber 111 through the liquid supply port WO. The liquid level of the cleaning liquid can, for example, reach the point where the entire feeding device is submerged, so as to thoroughly clean the feeding device. The cleaning liquid can be water, for example. Compared with the conventional technology where the operator manually cleans the feeding device with alcohol and lint-free cloth, the device 10 uses water as the cleaning liquid, which can achieve a better cleaning effect at a more reasonable cost.

[0061] To achieve better cleaning results, preferably, the cleaning module 12 further includes an ultrasonic cleaning unit (not shown in the figure) that cooperates with the liquid cleaning unit 121.

[0062] In addition to the liquid cleaning unit, a gas cleaning unit can also be added. Therefore, preferably, such as Figure 3As shown, the cleaning module 12 also includes a gas cleaning unit 122, which is used to supply gas into the cleaning chamber 111 to purge the feeding device 20 located in the cleaning chamber 111.

[0063] For example, the air supply port (not shown in the figure) of the gas cleaning unit 122 can be located near the opening in the cleaning chamber 111. When the feeding device 20 to be cleaned is placed into the cleaning chamber 111, the gas cleaning unit 122 can be turned on to blow away some of the contaminants or impurities on the feeding device 20 and pre-clean the feeding device 20. When the cleaned feeding device 20 is taken out of the cleaning chamber, the gas cleaning unit 122 can also be turned on to blow away the feeding device 20 to dry the residual cleaning liquid on the feeding device 20 and make the feeding device 20 dry quickly.

[0064] To further reduce cleaning costs, preferably, see Figure 3 The device 10 also includes a filtration module 13, which is used to filter the cleaning liquid discharged from the cleaning chamber 111.

[0065] See Figure 3 The filter module 13 can be located below the cleaning chamber 111. After a single cleaning operation is completed, the drain port (not shown in the figure) located at the bottom of the cleaning chamber 111 can be opened to allow the used cleaning liquid to be discharged from the cleaning chamber 111. The cleaning liquid discharged from the cleaning chamber 111 can flow through the filter module 13 due to gravity and be filtered by the filter module 13. The filtered cleaning liquid can be reused in subsequent cleaning operations.

[0066] According to a preferred embodiment of the present invention, the device 10 further includes a recycling module 14 for recycling the filtered cleaning liquid for reuse.

[0067] like Figure 3 As shown, the recycling module 14 includes a collection tank CH and a recycling pipeline, and the recycling module 14 is connected to the liquid cleaning unit 121. After the cleaning liquid is filtered by the filter module 13, it can flow into the collection tank CH located below the filter module 13, and then circulate to the liquid cleaning unit through the recycling pipeline, so that the liquid cleaning unit can supply it into the cleaning chamber 111 in the new round of cleaning operation. More preferably, the liquid cleaning unit 121 and the recycling module 14 can always operate to provide dynamic filtration and circulation of the cleaning liquid, so that the cleaning liquid in the cleaning chamber 111 is always in a relatively clean state, containing less or even no impurities cleaned from the feeding device 20.

[0068] This invention also provides a method for cleaning the feeding device 20, which is performed using the device 10 described above.

[0069] By using the method provided in this embodiment of the invention to clean the feeding device, the situation where the feeding device is not completely cleaned due to improper manual cleaning operation is avoided. Therefore, the contamination of materials by the cleaned feeding device in subsequent use is eliminated. In addition, compared with manual cleaning operation, the equipment not only improves cleaning efficiency and reduces cleaning costs, but also reduces the probability of the feeding device being damaged during the cleaning process.

[0070] It should be noted that the technical solutions described in the embodiments of the present invention can be combined arbitrarily without conflict.

[0071] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. An apparatus for cleaning a feeding device, the feeding device comprising a first part and a second part coaxially arranged with each other, wherein, The first part includes a first feeding pipe and a feeding component; the second part includes a traction component and a foldable bulk material assembly. The traction component passes through the first feeding pipe, the feeding component is disposed within the first feeding pipe, and the bulk material assembly is connected to the traction component and located below the feeding component. The device is characterized in that it includes: A retaining module is used to accommodate and retain the feeding device; A cleaning module, used to clean the feeding device; in, The holding module includes a cleaning chamber and a drive unit. The drive unit is configured to hold the first part and the second part of the feeding device and to move at least one of the first part and the second part in a direction of separation, so that the first part and the second part are cleaned by the cleaning module while at least partially separated within the cleaning chamber. The drive unit includes a first drive member for holding the first part and a second drive member for holding the second part. The second driving member is configured to drive the second portion to move in a direction away from the first portion while the first portion is held by the first driving member, so as to at least partially separate it from the first portion. The first driving member is disposed on the inner wall of the cleaning chamber, and the first driving member is configured to switch between a first state and a second state. In the first state, the first drive member retracts into the inner wall of the cleaning chamber without contacting the feeding device; in the second state, the first drive member extends from the inner wall of the cleaning chamber to hold the first part of the feeding device.

2. The device according to claim 1, characterized in that, The second driving member is also configured to drive the first part to rotate and rise and fall with the second part by driving the second part.

3. The device according to claim 1, characterized in that, The cleaning module includes a liquid cleaning unit, which provides cleaning fluid into the cleaning chamber to clean the feeding device located within the cleaning chamber.

4. The device according to claim 3, characterized in that, The cleaning module also includes an ultrasonic cleaning unit that works in conjunction with the liquid cleaning unit.

5. The device according to claim 3, characterized in that, The cleaning module also includes a gas cleaning unit, which is used to supply gas into the cleaning chamber to purge the feeding device located in the cleaning chamber.

6. The device according to claim 1, characterized in that, The device also includes a filtration module for filtering the cleaning fluid discharged from the cleaning chamber.

7. The device according to claim 6, characterized in that, The device also includes a recycling module for recycling the filtered cleaning solution.

8. A method for cleaning a feeding device, characterized in that, The method is performed using the device according to any one of claims 1 to 7.

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