Motorized crown block automated handling track
By setting a gantry frame and a quick-release structure on one side of the small oven, the problem of fixed position of the existing overhead crane track is solved, enabling rapid adjustment and flexible equipment relocation, thereby improving the baking efficiency and process adaptability of semiconductor manufacturing processes.
Patent Information
- Application Number
- CN202310249424.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2022-05-20
- Filing Date
- 2023-03-15
- Publication Date
- 2026-02-10
- Estimated Expiration
- 2043-03-15
AI Technical Summary
The existing overhead crane tracks cannot be flexibly adjusted, making equipment relocation and process adjustments inconvenient, and the large ovens have low baking efficiency.
A gantry frame is assembled on one side of a small oven, and a quick-release structure is used to connect the overhead crane track. The overhead crane is moved on the track, and a track-changing device is used to achieve quick assembly, disassembly, and position adjustment.
It enables flexible baking in small ovens and rapid deployment of overhead crane tracks, supports easy equipment relocation and process adjustment, and improves chip baking efficiency and flexibility.
Smart Images

Figure CN117088052B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to a mobile overhead crane automated transport track, in which a gantry frame is assembled on one side of a small oven, enabling the rapid and mobile construction of the overhead crane track according to the manufacturing process. This invention belongs to the field of automated transport track technology. Background Technology
[0002] According to investigations, it is known that chip manufacturing processes all use large ovens. Chips processed by semiconductor manufacturing equipment must first be temporarily placed in a warehouse until the large oven can handle the required quantity, at which point they are transferred to the large oven for baking. This process involves a long waiting period before baking in the large oven, making the large oven less flexible in application and resulting in a longer baking time. Furthermore, it is known that overhead crane tracks are either suspended from the ceiling or fixed to the ground using a gantry. Their positions are fixed and cannot be flexibly adjusted according to process requirements. For example, the known invention patent application No. TW107111313, an automated transport layout system, is a type of suspended overhead crane track. As disclosed in claim 1: "...at least one track assembly suspended in the area; at least one track assembly suspended in the area; at least one displacement assembly movably connected to at least one of the track assemblies; at least one pick-and-place assembly movably connected to at least one of the displacement assemblies...". It is known that at least one track component is suspended in a specific area, and the track component is combined with at least one displacement component and at least one pick-and-place component to carry out automated transportation operations. Therefore, when the machinery and equipment need to be moved to a new factory or the process needs to be adjusted, the suspended overhead crane track will be difficult to move with the machinery and equipment, and there is indeed a need to improve it.
[0003] Therefore, in view of the existing problems of the above-mentioned automated overhead crane transport tracks, how to develop a more ideal and practical innovative structure is what consumers are eagerly looking forward to, and it is also the goal and direction that relevant companies need to strive to achieve in their research and development. Summary of the Invention
[0004] The main objective of this invention is to provide a mobile overhead crane automated transport track, in which a gantry frame is assembled on one side of a small oven. Each semiconductor process equipment has a small oven next to it, which can bake in small batches. The gantry frames of the small ovens can be quickly laid with overhead crane tracks to complete the process construction. When the process changes, the small ovens can be quickly moved to the new process location, and the gantry frames of the small ovens can be quickly laid with overhead crane tracks to complete the construction of the new process.
[0005] To achieve the above objectives, the present invention employs the following technical means:
[0006] The present invention provides a mobile overhead crane automated transport track, comprising:
[0007] Multiple small ovens are used for small-batch baking. Once a small batch of chips has been processed, they are sent into the small ovens for baking.
[0008] A gantry frame is fixed to one side of the small oven. A crane track is provided between all the gantry frames by a plurality of quick-release structures. A plurality of cranes are moved on the crane track to transport the chip to each process.
[0009] Preferably, the small oven is disposed next to a semiconductor manufacturing equipment, and each semiconductor manufacturing equipment performs one chip manufacturing process.
[0010] Preferably, the overhead crane tracks are connected to form one or more chip manufacturing production lines.
[0011] Preferably, the overhead crane tracks are connected to form one or more chip manufacturing cycles, and the movement path of the overhead crane is changed between the chip manufacturing cycles by one or more track-changing devices, so that the overhead crane moves to the overhead crane track or a connecting track between processes.
[0012] Preferably, the one or more chip manufacturing cycles are further matched with the gantry frame combined with the small oven, using more than one floor-standing gantry frame.
[0013] Preferably, the quick-release structure includes a positioning sleeve, a positioning sleeve hole, a screw and a nut. The positioning sleeve has a through hole through which one end of the screw passes, and one end of the screw is locked in place by the nut.
[0014] Preferably, the gantry frame includes a plurality of rods, one of which is provided with a positioning sleeve hole, into which the positioning sleeve is placed, while the other rod is embedded with a nut, and then the screw is tightened to the nut by passing one end through the through hole and the positioning sleeve hole, thereby fixing the two rods.
[0015] Preferably, the semiconductor manufacturing equipment is a chip machine or a dispensing machine.
[0016] Compared with the prior art, the beneficial effects of the present invention are as follows:
[0017] This invention provides a mobile overhead crane automated transport track, comprising: a plurality of small ovens for small-batch baking, the small ovens being sequentially arranged beside a semiconductor process equipment. Each semiconductor process equipment performs a chip manufacturing process, and after the process is completed, a small batch of chips can be sent into the small ovens for baking; a gantry frame is fixed to one side of the small ovens by a plurality of quick-release structures, and an overhead crane track is arranged between the plurality of gantry frames by a plurality of quick-release structures. A plurality of overhead cranes are movable on the overhead crane track, and the chips are transported to each process by the overhead cranes. If the track does not have the cooperation of small ovens, a floor-mounted gantry frame can also be used for assistance. One series of processes and a plurality of other series of processes can be connected and converted by a track-changing device. Accordingly, the gantry frame and small ovens can be flexibly changed in position as needed, and the overhead crane track can be quickly disassembled and assembled with the quick-release structure, enabling the rapid completion of a new series of processes for another type of chip processing.
[0018] The present invention relates to a mobile overhead crane automated transport track, which utilizes small ovens for chip baking. These small ovens offer greater flexibility, allowing for small-batch baking of chips after semiconductor manufacturing equipment is completed. Multiple small ovens are located beneath the overhead crane track, arranging themselves according to baking volume to effectively improve chip baking efficiency. The gantry frame and small ovens are integrated, with multiple ovens arranged to match the manufacturing process. Thus, the overhead crane track can be easily deployed simply by fixing it to the gantry frame. When relocating to a new factory or adjusting the manufacturing process, the overhead crane track can be removed, and the small ovens and gantry frame can be easily moved to a new location. The overhead crane track can then be reinstalled, facilitating easy factory relocation or process adjustment. Alternatively, the chip machine, small ovens, gantry frame, and part of the overhead crane track can be combined into a single unit for relocation, making equipment or process adjustments highly flexible. Quick-release structures allow for rapid assembly and disassembly of the small ovens, the gantry frame itself, and the overhead crane track.
[0019] Regarding the technology, means, and effects of this invention, a preferred embodiment is described in detail below with reference to the accompanying drawings. It is believed that the above-mentioned objectives, structure, and features of this invention can be understood in depth and in detail from this description. Attached Figure Description
[0020] Figure 1 This is a three-dimensional schematic diagram of a small oven and a crane track according to one embodiment of the present invention.
[0021] Figure 2 This is a top-view plan view of a plurality of small ovens and semiconductor process equipment combined with a plurality of overhead crane tracks, according to one embodiment of the present invention.
[0022] Figure 3 This is a top-view plan view of the overhead crane track in one process of an embodiment of the present invention.
[0023] Figure 4 This is a top-view plan view of the overhead crane track for various processes according to another embodiment of the present invention.
[0024] Figure 5 This is a right-side perspective view of a small oven paired with a semiconductor manufacturing apparatus, representing one embodiment of the present invention.
[0025] Figure 6 This is a left-side perspective view of a small oven paired with a semiconductor manufacturing apparatus, representing one embodiment of the present invention.
[0026] Figure 7 This is a partial exploded perspective view of the quick-release structure for locking a gantry frame according to an embodiment of the present invention.
[0027] Figure 8 This is a partial perspective view of a gantry frame locking quick-release structure according to an embodiment of the present invention.
[0028] Explanation of icon numbers
[0029] 10 small ovens
[0030] 20 Gantry Frames
[0031] 21 rods
[0032] 30 Quick-release structure
[0033] 31 Positioning Sleeve
[0034] 311 Through Hole
[0035] 32 Positioning sleeve hole
[0036] 33 screws
[0037] 34 Nut
[0038] 40 overhead crane tracks
[0039] 50-day train
[0040] 60 Semiconductor manufacturing equipment
[0041] 70 Rail Changing Device
[0042] 80 Inter-process connection rails
[0043] 90 Floor-standing gantry frame
[0044] A1 chip manufacturing pipeline
[0045] B1 Chip Manufacturing Cycle
[0046] B2 chip manufacturing cycle
[0047] B3 chip manufacturing cycle Detailed Implementation
[0048] This invention provides a mobile overhead crane automated transport track.
[0049] To enable a better understanding of the purpose, features, and effects of this invention, the following detailed description is provided in conjunction with embodiments and illustrations:
[0050] See Figure 1 , Figures 5 to 8 As shown, the present invention provides a motorized overhead crane automated transport track, which includes:
[0051] Multiple small ovens 10 for small-batch baking: After a small batch of chips is processed, they can be sent into the small ovens 10 for baking; characterized in that:
[0052] One side of the small oven 10 is fixed with a gantry frame 20 by a plurality of quick-release structures 30. A crane track 40 is provided between all the gantry frames 20 by the plurality of quick-release structures 30. A plurality of cranes 50 are movable on the crane track 40. The cranes 50 are used to transport the chip to each process. When it is necessary to change the process or move the position, it is only necessary to remove the crane track 40, move the small oven 10 to the new position, and then put the crane track 40 back on the gantry frame 20 of the small oven 10.
[0053] See Figure 5 , Figure 6 As shown, the automated transport track of the motorized overhead crane includes a small oven 10 that is successively arranged next to a semiconductor process equipment 60. Each semiconductor process equipment 60 performs a chip manufacturing process. The semiconductor process equipment 60 is a chip machine or a dispensing machine or other process equipment.
[0054] See Figure 2 As shown, the motorized overhead crane automated transport track 40 is connected to form one or more chip manufacturing production lines (A1).
[0055] See Figure 3 , Figure 4 As shown, the automated transport track of the motorized overhead crane is connected to form one or more chip process cycles (B1, B2, B3). The movement path of the overhead crane 50 can be changed between the chip process cycles (B1, B2, B3) by one or more track changing devices 70, so that the overhead crane 50 can be moved to the overhead crane track 40 or an inter-process connecting track 80.
[0056] See Figure 3 , Figure 4As shown, the automated transport track of the motorized overhead crane, wherein one or more chip process cycles (B1, B2, B3) can be used in conjunction with the gantry frame 20 in conjunction with the small oven 10, or can be used in conjunction with one or more floor-mounted gantry frames 90.
[0057] See Figure 7 , Figure 8 As shown, the automated transport track of the motorized overhead crane includes a quick-release structure 30 comprising a positioning sleeve 31, a positioning sleeve hole 32, a screw 33, and a nut 34. The positioning sleeve 31 has a through hole 311 through which one end of the screw 33 passes, and one end of the screw 33 is locked to the nut 34 for fixation.
[0058] See Figures 5 to 8 As shown, the automated transport track of the motorized overhead crane includes a gantry frame 20 comprising a plurality of rods 21. One rod 21 is provided with a positioning sleeve hole 32, into which the positioning sleeve 31 is inserted. Another rod 21 is embedded with a nut 34, and a screw 33 is passed through the through hole 311 and the positioning sleeve hole 32 and locked to the nut 34, thereby fixing the two rods 21.
[0059] As can be seen from the above, the mobile overhead crane automated transport track of the present invention has a gantry frame assembled on one side of the small oven. Each semiconductor process equipment is provided with a small oven, which can bake in small batches. The gantry frames of the small ovens can be quickly laid with overhead crane tracks to complete the process construction. When the process changes, the small ovens can be quickly moved to the new process location, and the gantry frames of the small ovens can be quickly laid with overhead crane tracks to complete the construction of the new process.
[0060] The foregoing description focuses on the preferred embodiments of the present invention and their technical features; however, those skilled in the art may make changes and modifications to the present invention without departing from its spirit and principles, and all such changes and modifications should be covered within the scope defined by the claims of this application.
Claims
1. A motorized overhead crane automated transport track, characterized in that, include: Multiple small ovens for small-batch baking are used, where chips are baked after a small batch is processed; the feature is that: A gantry frame is fixed to one side of the small oven. A crane track is provided between all the gantry frames using a plurality of quick-release structures. A plurality of cranes are moved on the crane track to transport the chip to each process. The crane tracks are connected to form one or more chip process cycles. Between chip process cycles, the movement path of the cranes is changed by one or more track-changing devices, so that the cranes move to the crane track or a process-connecting track.
2. The automated transport track for motorized overhead cranes as described in claim 1, characterized in that, The small oven is subsequently disposed next to a semiconductor manufacturing equipment, each of which performs one of the chip manufacturing processes.
3. The automated transport track for motorized overhead cranes as described in claim 1, characterized in that, The overhead crane tracks are connected to form one or more chip manufacturing production lines.
4. The automated transport track for motorized overhead cranes as described in claim 1, characterized in that, The one or more chip manufacturing processes cyclically use the gantry frame combined with the small oven, and also use one or more floor-standing gantry frames.
5. The automated transport track for motorized overhead cranes as described in claim 1, characterized in that, The quick-release structure includes a positioning sleeve, a positioning sleeve hole, a screw, and a nut. The positioning sleeve has a through hole through which one end of the screw passes, and one end of the screw is locked in place by the nut.
6. The automated transport track for motorized overhead cranes as described in claim 5, characterized in that, The gantry frame includes a plurality of rods, one of which is provided with a positioning sleeve hole, into which the positioning sleeve is inserted, while the nut is embedded in another rod, and then the screw is tightened to the nut by passing one end through the through hole and the positioning sleeve hole, thereby fixing the two rods.
7. The automated transport track for motorized overhead cranes as described in claim 2, characterized in that, The semiconductor manufacturing equipment is a chip-making machine or a dispensing machine.
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