A furnace door structure for a diffusion furnace and the diffusion furnace

Abstract

This invention discloses a furnace door structure and a diffusion furnace for use in a diffusion furnace, comprising a metal furnace door, a suspension assembly, and a heat radiation barrier. The metal furnace door and the heat radiation barrier are movably connected via the suspension assembly. In this invention, the heat radiation barrier is suspended from the metal furnace door to form a combined furnace door structure, which can simultaneously avoid the fragility of a quartz furnace door or the contamination of the diffusion process caused by a metal furnace door. Due to the suspended installation method, the installation and disassembly of the heat radiation barrier and the metal furnace door are simpler, and adjustments are more convenient.

Description

Technical Field

[0001] The present invention relates to photovoltaic production equipment, in particular to a tubular diffusion furnace equipment. Background Art

[0002] The main body of a conventional diffusion furnace consists of a heating furnace and a quartz tube cavity. The front end of the quartz tube cavity is provided with a furnace mouth flange, and the rear end of the quartz tube cavity is provided with an air inlet pipe and an exhaust pipe. When the silicon wafer carrier and silicon wafer are fed into the quartz tube cavity, the furnace door moves from the side and fits tightly against the furnace mouth flange at the front end of the quartz tube cavity. The furnace door and the furnace mouth flange are sealed by a furnace door sealing ring to seal the quartz tube cavity. Current diffusion furnace soft landing process equipment typically uses quartz or metal for the furnace door. If the furnace door is made of quartz, the quartz tube cavity is easily broken during movement or squeezing when the furnace door is closed to seal the quartz tube cavity due to the brittleness of the quartz material. If the furnace door is made of metal, after the furnace door is closed, during the high-temperature diffusion process, metal impurities escape and contaminate the diffusion process occurring within the quartz tube cavity. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to overcome the deficiencies of the above-mentioned prior art and provide a furnace door structure for a diffusion furnace which is simpler to install and disassemble and more convenient to adjust.

[0004] Another technical problem to be solved by the present invention is to overcome the deficiencies of the above-mentioned prior art and provide a diffusion furnace with a furnace door that is easy to install and disassemble and is safe and reliable.

[0005] The furnace door structure for a diffusion furnace provided by the present invention comprises a metal furnace door, a suspension assembly and a heat radiation barrier. The metal furnace door and the heat radiation barrier are movably connected via the suspension assembly.

[0006] The furnace door structure for a diffusion furnace provided by the present invention also has the following subsidiary technical features:

[0007] It further includes that the suspension assembly includes a support plate and multiple adjustment support seats, the support plate is installed on the outside of the heat radiation blocking member, multiple slots are provided on the support plate, and the adjustment support seat is provided on the inner side of the metal furnace door, and the adjustment support seat corresponds to the slot one by one and is movably connected.

[0008] Furthermore, the shape of the support plate includes but is not limited to a T-shape, a triangle or a quadrilateral.

[0009] It further includes that the number of the card slots is two, three or four, and the card slots are evenly arranged or symmetrically arranged with the axis of the support plate as the center.

[0010] It further includes that the card slot is semicircular or gourd-shaped.

[0011] It further includes that the adjustment support seat includes a hollow base, and a top plate and a bottom plate installed in the hollow base, the hollow base is installed on the inner side of the metal furnace door, the top plate extends out of the hollow base, an adjustment spring is arranged between the top plate and the bottom plate, the hollow base is provided with a convex ring, the hollow base is clamped into the clamping groove, and the convex ring abuts against the inner side of the support plate.

[0012] It further includes that a spring adjusting screw is installed on the bottom plate, and the spring adjusting screw adjusts the distance between the bottom plate and the top plate, thereby adjusting the spring force of the adjustment spring.

[0013] It further includes that the top plate is provided with a protruding adjustment screw and a locking nut installed on the protruding adjustment screw, the locking nut protrudes from the top plate, and the locking nut is pressed against the heat radiation blocking member.

[0014] It further includes that the outer edge of the heat radiation blocking member is provided with multiple limit ribs, and gaps are provided between adjacent limit ribs. The peripheral structure of the support plate is pressed into the gap and rotated to conflict with the limit ribs. Multiple anti-rotation limit members are installed on the support plate, and the anti-rotation limit members are used to prevent the heat radiation blocking member and the support plate from rotating relative to each other.

[0015] It further includes that a plurality of elastic buckles are provided on the inner side of the support plate, and the elastic buckles are pressed against the inner side of the limiting retaining edge of the heat radiation blocking member.

[0016] Further comprising, the thermal radiation blocking member comprises a shell made of quartz and an opaque high-temperature resistant material filled in the shell.

[0017] It further includes that the metal furnace door is provided with an air inlet pipe, and inert gas is filled into the gap space between the metal furnace door and the heat radiation blocking member through the air inlet pipe.

[0018] According to the present invention, a diffusion furnace is provided, which includes a heating furnace, a quartz tube cavity and a furnace mouth flange located at the end of the quartz tube cavity. A furnace door structure is provided at the furnace mouth flange. The furnace door includes a metal furnace door, a suspension assembly and a heat radiation barrier. The metal furnace door and the heat radiation barrier are movably connected through the suspension assembly. The heat radiation barrier is located in the quartz tube cavity, and the metal furnace door is close to the outside of the furnace mouth flange.

[0019] It further includes that a sealing ring is provided on the metal furnace door, and the metal furnace door and the furnace mouth flange are sealed by the sealing ring.

[0020] Compared with the prior art, the furnace door structure and diffusion furnace provided by the present invention have the following advantages: First, the heat radiation barrier of the present invention is suspended on the metal furnace door to form a combined furnace door structure, which can simultaneously avoid the furnace door being made of fragile quartz material or the use of metal material that may cause contamination to the diffusion process. Due to the use of a hanging installation method, the installation and removal of the heat radiation barrier and the metal furnace door are simpler and more convenient to adjust. Secondly, the specially designed adjustment support seat assembly of the present invention can adjust the buffering force of the heat radiation barrier in various directions and positions, and can also adjust the posture of the suspended heat radiation barrier so that it is parallel to the metal furnace door in the vertical direction, preventing the heat radiation barrier from being squeezed or collided and broken. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a cross-sectional view of the diffusion furnace of the present invention.

[0022] Figure 2 It is a three-dimensional diagram of the furnace door of the present invention.

[0023] Figure 3 It is a three-dimensional diagram of the furnace door of the present invention from another perspective.

[0024] Figure 4 It is a three-dimensional exploded view of the furnace door of the present invention.

[0025] Figure 5 3D is a perspective view of the heat radiation barrier of the present invention.

[0026] Figure 6 It is a three-dimensional diagram of the support plate in the present invention.

[0027] Figure 7 This is a three-dimensional diagram of the support plate during installation in the present invention.

[0028] Figure 8 This is a three-dimensional diagram from another perspective during the installation process of the support plate in the present invention.

[0029] Figure 9 It is the front view of the adjustment support seat in the present invention.

[0030] Figure 10 It is a cross-sectional view of the adjustment support seat in the present invention.

[0031] Explanation of the reference numerals: 1-metal furnace door; 11-sealing ring; 12-air inlet pipe; 2-heat radiation blocking member; 21-limiting rib; 22-convex ring; 3-suspension assembly; 31-support plate; 311-slot; 312-elastic buckle; 313-anti-rotation limiting member; 32-adjusting support seat; 321-hollow base; 322-top plate; 323-bottom plate; 324-adjusting spring; 325-elastic force adjusting screw; 326-extension adjusting screw; 327-locking nut; 10-heating furnace; 20-quartz tube cavity; 30-furnace mouth flange. DETAILED DESCRIPTION

[0032] To clearly illustrate the solutions of the present invention, preferred embodiments are provided below and described in detail with reference to the accompanying drawings. The following description is merely illustrative in nature and is not intended to limit the application or use of the present disclosure. It should be understood that throughout the drawings, corresponding reference numerals indicate identical or corresponding parts and features.

[0033] like Figures 1 to 10 As shown, the present invention provides a furnace door structure for a diffusion furnace, comprising a metal furnace door 1, a suspension assembly 3 and a heat radiation barrier 2, wherein the metal furnace door 1 and the heat radiation barrier 2 are movably connected via the suspension assembly 3. In order to avoid the furnace door being made of quartz material, which is fragile, or being made of metal material, which may cause pollution to the diffusion process, the present invention adopts a combined furnace door structure, which comprises a metal furnace door 1, and the heat radiation barrier 2 is suspended at the front end of the metal furnace door 1. The main body of the heat radiation barrier 2 is a quartz door made of quartz material, and is filled with opaque and high-temperature resistant materials such as glass fiber. These materials will not cause pollution to the diffusion process. The present invention adopts a hanging installation method in the above structure, which makes the installation and disassembly of the heat radiation barrier 2 simpler and more convenient to adjust.

[0034] See also Figures 1 to 10In the above embodiment of the present invention, the suspension assembly 3 further includes a support plate 31 and multiple adjustable support seats 32. The support plate 31 is mounted on the outside of the heat radiation barrier 2 and is provided with multiple slots 311. The adjustable support seats 32 are located on the inside of the metal furnace door 1, and the adjustable support seats 32 correspond to the slots 311 one by one and are movably connected. In this embodiment, the support plate 31 is T-shaped and mainly includes a column and two cantilevered arms located above the column. Each cantilevered arm has an open semicircular slot, and the column has a gourd-shaped slot. There are three adjustable support seats 32: two on the top and one on the bottom. The two upper adjustable support seats 32 are connected to the two open slots, respectively, and the lower adjustable support seat 32 is connected to the gourd-shaped slot. The support plate 31 in the present invention can have a variety of structural forms, including but not limited to two corners, a triangle, or a quadrilateral. In this embodiment, the support plate 31 has a triangular structure, forming a T-shaped structure. Alternatively, an I-shaped, Y-shaped, triangular, or quadrilateral structure may be employed, as well as an elliptical, rectangular, oblong, or trapezoidal structure. The number of the card slots 311 is consistent with the number of the adjustment support seats 32, and the number may be two, three, or four, etc. The card slots 311 are evenly arranged or arranged bilaterally symmetrically with the axis of the support plate 31 as the center. The support plate 31 facilitates the processing of the card slot structure and facilitates hanging. In the present invention, the card slots 311 may also all be semicircular or gourd-shaped.

[0035] See also Figures 1 to 10 , the above-mentioned embodiment given by the present invention further includes that the outer edge of the heat radiation barrier 2 is provided with multiple sections of limiting ribs 21, and gaps are provided between adjacent limiting ribs 21. The peripheral structure of the support plate 31 is pressed into the gap and rotated at a certain angle to conflict with the limiting ribs 21. In this embodiment, a convex ring 22 is further provided below the limiting rib 21, and a mounting groove is formed between the convex ring 22 and the limiting rib 21. The support plate 31 is snapped into the mounting groove. The above structure facilitates the installation and fixation of the support plate 31. Of course, the present invention can also be provided without the convex ring 22. A mounting groove structure can also be formed between the limiting rib 21 and the inner wall of the heat radiation barrier 2, which can still play the role of fixing the support plate 31. The limiting rib 21 is set as a multi-section structure, which is convenient for the installation of the support plate 31.

[0036] See also Figures 1 to 10In the above-described embodiment of the present invention, a plurality of elastic clips 312 are further provided on the inner side of the support plate 31. These elastic clips 312 abut against the interior of the limiting rib 21 of the thermal radiation barrier 2. In this embodiment, due to the mounting groove structure formed by the raised ring 22 and the limiting rib 21, the elastic clips 312 abut against the raised ring 22, which in this case forms part of the inner wall of the thermal radiation barrier 2. The elastic clips 312 provide elastic support, preventing the support plate 31 from shaking in the mounting groove.

[0037] See also Figures 1 to 10 , the above-mentioned embodiment of the present invention further includes that a plurality of anti-rotation limit members 313 are installed on the support plate 31, and the anti-rotation limit members 313 conflict with the end of the limiting retaining edge 21. The anti-rotation limit members 313 are used to prevent the thermal radiation blocking member 2 and the support plate 31 from rotating relative to each other. The anti-rotation limit members 313 prevent the support plate 31 from rotating after being installed in place. A plurality of mounting holes are provided on the support plate 31. After the support plate 31 is installed in place, the anti-rotation limit members 313 are fixed to the mounting holes to prevent the support plate 31 from rotating.

[0038] When installing the support plate 31 in the present invention, the elastic clip 312 is installed in advance, the three corners of the T-shaped support plate 31 are staggered with the limiting rib 21, and the three ends of the support plate 31 are inserted into the installation groove from the gap between adjacent limiting ribs 21. Then, the support plate 31 is rotated at an appropriate angle so that the support plate 31 and the elastic clip 312 are stuck in the installation groove formed by the limiting rib 21 and the protruding ring 22, and then the anti-rotation limiter 313 is installed.

[0039] See also Figures 1 to 10In the above embodiment of the present invention, the adjustable support seat 32 further includes a hollow base 321, a top plate 322 and a bottom plate 323 mounted within the hollow base 321, an adjustment spring 324 disposed between the top plate 322 and the bottom plate 323, and the hollow base 321 is mounted on the inner side of the metal furnace door 1. The top plate 322 extends from the hollow base 321. The hollow base 321 is provided with a raised ring 329, which engages with the slot 311 and abuts against the inner side of the support plate 31. The raised ring 329 acts as a limiter, preventing the hollow base 321 from disengaging from the slot 311. Regarding the suspended thermal radiation barrier 2 structure, when the thermal radiation barrier 2 moves or is squeezed, the support force exerted by the adjustable support seat 32 at different locations on the metal furnace door 1 on the thermal radiation barrier 2 varies. In addition to providing vertical support force for the thermal radiation barrier 2, the adjustment support seat 32 may also be subjected to horizontal extrusion force or tension from the thermal radiation barrier 2. By adjusting the elastic force of the adjustment spring 324 of each adjustment support seat 32 accordingly, the buffering force of the thermal radiation barrier 2 in various directions and positions can be adjusted to achieve better buffering of the thermal radiation barrier 2 in various directions and positions, and prevent the thermal radiation barrier 2 from being squeezed and broken.

[0040] See also Figures 1 to 10 In the above embodiment of the present invention, a spring force adjustment screw 325 is further installed on the bottom plate 323. The spring force adjustment screw 325 drives the bottom plate 323 to move along the inner cavity of the hollow base 321. The spring force adjustment screw 325 adjusts the distance between the bottom plate 323 and the top plate 322, thereby adjusting the spring force of the adjustment spring 324. The spring force adjustment screw 325 is mainly capable of adjusting the distance between the bottom plate 323 and the top plate 322, thereby adjusting the spring force of the adjustment spring 324. The top plate 322 in the present invention can slide along the inner cavity of the hollow base 321, thereby providing a buffer for the thermal radiation barrier 2. By adjusting the spring force of the adjustment spring 324, the buffering force can be adjusted.

[0041] See also Figures 1 to 10In the above-described embodiment of the present invention, the top plate 322 is further provided with an extension adjustment screw 326 and a lock nut 327 mounted thereon. The lock nut 327 protrudes from the top plate 322 and abuts against the thermal radiation barrier 2. The suspended thermal radiation barrier 2 may be vertically non-parallel to the metal furnace door 1. This situation is detrimental to maintaining the slightly positive pressure air curtain and can easily cause the end face of the thermal radiation barrier 2 to collide with the stepped surface within the quartz tube cavity, leading to breakage. By adjusting the extension of the extension adjustment screws 326 at various locations on the support base 32, the posture of the suspended thermal radiation barrier 2 can be adjusted to maintain vertical parallelism with the metal furnace door 1. For a more optimized structure, the extension adjustment screw 326 may be hollow in the middle, facilitating the insertion of a thinner tightening wrench to adjust the inner spring adjustment screw 325.

[0042] See also Figures 1 to 10 , the above embodiment given by the present invention further includes that the thermal radiation barrier 2 includes a shell made of quartz and an opaque high-temperature resistant material filled in the shell, and the metal furnace door 1 is provided with an air inlet pipe 12, and inert gas is filled into the gap space between the metal furnace door 1 and the thermal radiation barrier 2 via the air inlet pipe 12. The inert gas in this embodiment is nitrogen. In order to avoid metal contamination of the metal furnace door 1, a nitrogen air inlet pipe 12 is provided on the metal furnace door 1, and nitrogen is filled into the gap space between the metal furnace door 1 and the thermal radiation barrier 2 via the air inlet pipe 12. The end face of the thermal radiation barrier 2 is close to or attached to the step end face inside the quartz tube cavity, and this space forms a micro-positive pressure air curtain to prevent the diffusion process gas from reaching there and corroding the metal furnace door 1, thereby contaminating the diffusion process.

[0043] To install the heat radiation barrier 2 onto the metal furnace door 1, simply align the slot of the heat radiation barrier 2 with the adjustable support seat 32 on the metal furnace door 1, lift it to a certain height, apply pressure inward, and then lower it. To remove the heat radiation barrier 2 from the metal furnace door 1, simply apply pressure inward, lift it to a certain height, and then remove it. After removing the heat radiation barrier 2, the adjustable support seat 32 can be adjusted.

[0044] See also Figures 1 to 10In an embodiment of a diffusion furnace provided by the present invention, the furnace comprises a heating furnace 10, a quartz tube cavity 20, and a furnace mouth flange 30 located at the end of the quartz tube cavity 20. The furnace mouth flange 30 is provided with a furnace door structure, which is the furnace door structure described in the above embodiment. The heat radiation barrier 2 is located in the quartz tube cavity 20, and the metal furnace door 1 is closely adjacent to the outside of the furnace mouth flange 30. The diffusion furnace of the present invention can be any of various models of products with mature prior art technology. These different models of diffusion furnaces can all adopt the furnace door structure of the present invention. Therefore, the structure of the diffusion furnace of the present invention is not limited to the above structure.

[0045] See also Figure 1 and Figure 3 In the above embodiment of the present invention, a sealing ring 11 is further provided on the metal furnace door 1 , and the metal furnace door 1 and the furnace mouth flange 30 are sealed by the sealing ring 11 .

[0046] In summary, the above contents are merely embodiments of the present invention and are intended only to illustrate the principles of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A furnace door structure for a diffusion furnace, characterized in that: It comprises a metal furnace door, a suspension assembly and a heat radiation blocking member, wherein the metal furnace door and the heat radiation blocking member are movably connected via the suspension assembly; Among them, the suspension assembly includes a support plate and a plurality of adjustment support seats, the support plate is installed on the outer side of the heat radiation blocking member, a plurality of slots are arranged on the support plate, and the adjustment support seat is arranged on the inner side of the metal furnace door, and the adjustment support seat corresponds to the slot one by one and is movably connected.

2. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The shape of the support plate includes but is not limited to a T-shape, a triangle or a quadrilateral.

3. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The number of the card slots is two, three or four, and the card slots are evenly arranged or bilaterally symmetrically arranged with the axis of the support plate as the center.

4. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The card slot is in a semicircular shape or a gourd hole shape.

5. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The adjustment support seat includes a hollow base, and a top plate and a bottom plate installed in the hollow base. The hollow base is installed on the inner side of the metal furnace door, and the top plate extends out of the hollow base. An adjustment spring is arranged between the top plate and the bottom plate. The hollow base is provided with a convex ring, and the hollow base is inserted into the slot, and the convex ring abuts against the inner side of the support plate.

6. The furnace door structure for a diffusion furnace according to claim 5, characterized in that: An elastic force adjusting screw is installed on the bottom plate, and the elastic force adjusting screw adjusts the distance between the bottom plate and the top plate, thereby adjusting the elastic force of the adjusting spring.

7. The furnace door structure for a diffusion furnace according to claim 5, characterized in that: The top plate is provided with a protruding adjustment screw and a locking nut mounted on the protruding adjustment screw, the locking nut protrudes from the top plate, and the locking nut abuts against the heat radiation blocking member.

8. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The outer edge of the thermal radiation blocking member is provided with multiple limit ribs, and gaps are provided between adjacent limit ribs. The peripheral structure of the support plate is pressed into the gap and rotated to conflict with the limit ribs. Multiple anti-rotation limit members are installed on the support plate, and the anti-rotation limit members are used to prevent the thermal radiation blocking member and the support plate from rotating relative to each other.

9. The furnace door structure for a diffusion furnace according to claim 8, characterized in that: A plurality of elastic buckles are arranged on the inner side of the support plate, and the elastic buckles are pressed against the inner side of the limiting retaining edge of the heat radiation blocking member.

10. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The thermal radiation blocking member includes a shell made of quartz and an opaque high-temperature resistant material filled in the shell.

11. The furnace door structure for a diffusion furnace according to claim 1, characterized in that: The metal furnace door is provided with an air inlet pipe, and inert gas is filled into the gap space between the metal furnace door and the heat radiation blocking member through the air inlet pipe.

12. A diffusion furnace, comprising a heating furnace, a quartz tube cavity and a furnace mouth flange located at the end of the quartz tube cavity, wherein a furnace door structure is arranged at the furnace mouth flange, characterized in that: The furnace door structure is the furnace door structure for a diffusion furnace as described in any one of claims 1 to 11 above, the heat radiation blocking member is located in the quartz tube cavity, and the metal furnace door is located outside the furnace mouth flange.

13. The diffusion furnace according to claim 12, characterized in that: The metal furnace door is provided with a sealing ring, and the metal furnace door and the furnace mouth flange are sealed by the sealing ring.

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