Methods and apparatus for measuring the deflection angle and deflection accuracy of high-speed acousto-optic deflectors

Abstract

This invention discloses a method and apparatus for measuring the deflection angle and deflection accuracy of a high-speed acousto-optic deflector. The method includes: acquiring current change data of a photodetector and constructing a current-time curve; moving the photodetector and observing its current change to determine the scanning start and end points of the high-speed acousto-optic deflector; determining the deflection angles at the scanning start and end points respectively, constructing a deflection angle-time curve, and obtaining the deflection accuracy of the high-speed acousto-optic deflector; constructing a current-deflection angle relationship curve based on the current-time curve and the deflection angle-time curve; acquiring real-time current data of the photodetector and obtaining real-time deflection angle data by referring to the relationship curve. By detecting the high-frequency deflection of the high-speed acousto-optic deflector using a photodetector, interference from low-frequency noise is reduced, the deflection accuracy of the high-speed acousto-optic deflector is obtained, and real-time deflection angle data of the photodetector is acquired, simplifying the measurement device structure and measurement steps.

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