A device and method for treating ammonia nitrogen and organic wastewater in the integrated circuit industry

Abstract

The present invention discloses an apparatus and method for treating ammonia nitrogen and organic wastewater from the integrated circuit industry. The apparatus comprises: a SBR reactor, a UASB reactor, a hydrolysis and acidification tank, an activated carbon adsorption tower, an ammonia nitrogen wastewater collection tank, a first regulating tank, a second regulating tank, domestic sewage and organic wastewater collection tanks, a WTW (Weighted Weight) analyzer, an online ammonia nitrogen / nitrous oxide analyzer, an online H2O2 analyzer, an online COD analyzer, an aeration pump, a rotor flowmeter, a first water inlet pump, a second water inlet pump, a third water inlet pump, a fourth water inlet pump, a fifth water inlet pump, a sixth water inlet pump, and a PLC automatic control system. The present invention has the following advantages: 1. High total nitrogen and organic matter removal rates, low carbon source demand and aeration volume, low sludge production, and a more environmentally friendly and energy-efficient approach. 2. It can simultaneously treat three types of semiconductor industry wastewater (ammonia nitrogen wastewater, organic wastewater, and domestic wastewater) while occupying a small footprint. 3. Utilizing a mud-film symbiotic process, the system is highly resistant to microbial toxic wastewater loads and is more stable.

Description

Technical Field

[0001] The present invention relates to a method for treating ammonia nitrogen and organic wastewater in the integrated circuit industry, which belongs to the field of biological wastewater treatment. Specifically, it is a device and method for treating ammonia nitrogen and organic wastewater in the integrated circuit industry, which is suitable for removing nitrogen and organic matter from wastewater in the semiconductor integrated circuit industry. Background Art

[0002] In recent years, with the rapid development of information and communications technology, the integrated circuit industry, represented by chip manufacturing, has experienced rapid growth in China at an annual rate of over 12%. Semiconductor factory wastewater can generally be divided into five major categories: ammonia-containing wastewater, fluoride-containing wastewater, copper-containing wastewater, grinding wastewater, and acid-base wastewater. Ammonia nitrogen wastewater primarily originates from the etching, cleaning, and degumming processes in the integrated circuit manufacturing process, with ammonia nitrogen and hydrogen peroxide as the primary pollutants. Organic wastewater primarily originates from the photolithography and resist-splitting processes, with primary pollutants such as ketones, alcohols, and esters, characterized by high molecular weight and poor biodegradability. Based on the proven management experience of existing projects, separate wastewater treatment systems should be established to treat different types of wastewater. Treatment methods for ammonia nitrogen wastewater include physical stripping, biological methods, and membrane separation.

[0003] The stripping method involves stripping ammonia nitrogen wastewater with sodium hydroxide and sulfuric acid to convert it into ammonium sulfate. The treated wastewater then enters other treatment processes, such as fluorine treatment, before being discharged after meeting standards. However, the ammonium sulfate produced by stripping ammonia nitrogen wastewater is increasingly subject to national regulation, with total volume controls imposed on qualified treatment facilities. This has led to a significant increase in the cost of ammonium sulfate treatment in integrated circuit factories. Another approach is to use biochemical activated sludge treatment. However, in integrated circuit chip factories, ammonia nitrogen wastewater is not a relatively independent wastewater. Depending on the chip production process, it may also contain microbial toxic substances such as H2O2, which can affect treatment effectiveness. Furthermore, traditional nitrification and denitrification processes require high aeration energy consumption and carbon sources. Organic wastewater, due to its poor biodegradability, is difficult to use as a carbon source, significantly increasing costs.

[0004] Partial nitrification / denitrification coupled with anaerobic ammonium oxidation / denitrification is a novel denitrification process. The simultaneous, short-term nitrification, denitrification, and anaerobic ammonium oxidation (ANAMMOX) achieve highly efficient removal of ammonia nitrogen and organic matter. This process offers numerous advantages: high ammonia nitrogen removal efficiency while reducing aeration energy consumption; low carbon source requirements; and low sludge production, which reduces sludge disposal costs. This process is widely used in treating domestic wastewater, but its application in treating integrated circuit (IC) semiconductor wastewater is limited. The separation and recovery of IC wastewater provides excellent influent conditions for this process. Summary of the Invention

[0005] Therefore, in order to solve the above-mentioned deficiencies, the present invention provides a device and method for treating ammonia nitrogen and organic wastewater in the integrated circuit industry. Technical problems to be solved: 1. The traditional biological method for treating integrated circuit ammonia nitrogen wastewater has high aeration energy consumption, requires an external carbon source, and produces a large amount of residual sludge, which increases the treatment cost. 2. The composition of the wastewater after separation and collection is still complex, and there are toxic and harmful substances to microorganisms, which affects the performance of the reactor. 3. Integrated circuit wastewater has poor biodegradability, and traditional biological treatment is difficult to achieve a high pollutant removal rate. 4. The performance of anaerobic ammonia oxidation will be affected by the organic carbon source, and separation treatment can effectively solve this problem.

[0006] The present invention is achieved by constructing a device for treating ammonia nitrogen and organic wastewater in the integrated circuit industry, characterized in that it includes the following: an SBR reactor (1), a UASB reactor (2), a hydrolysis acidification tank (3), an activated carbon adsorption tower (4), an ammonia nitrogen wastewater collection tank (5), a first regulating tank (6), a second regulating tank (7), a domestic sewage and organic wastewater collection tank (8), a WTW (9), an ammonia nitrogen / nitrous oxide online meter (10), an H2O2 online meter (11), a COD online meter (12), an aeration pump (13), a rotor flowmeter (14), a first water inlet pump (15), a second water inlet pump (16), a third water inlet pump (17), a fourth water inlet pump (18), a fifth water inlet pump (19), a sixth water inlet pump (20), a PLC automatic control system (21), a first water inlet pump (15), a second water inlet pump (16), a third water inlet pump (17), a fourth water inlet pump (18), a fifth water inlet pump (19), a sixth water inlet pump (20), a PLC automatic control system (22), a first water inlet pump (15), a second water inlet pump (16), a third water inlet pump (17), a fourth water inlet pump (18), a fifth water inlet pump (19), a sixth water inlet pump (20 ... 1); the hydrolysis and acidification tank (3) is connected to the SBR reactor (1) via the third water inlet pump (17); the second regulating tank (7) is connected to the UASB reactor (2) via the fifth water inlet pump (19); the ammonia nitrogen wastewater collection tank (5) is connected to the activated carbon adsorption tower (4) via the first water inlet pump (15); the activated carbon adsorption tower (4) is also connected to the first regulating tank (6); the first regulating tank (6) is connected to the SBR reactor (1) and the second regulating tank (7) respectively; the domestic sewage and organic wastewater collection tank (8) are connected to the hydrolysis and acidification tank (3) via the fourth water inlet pump (18); the first water inlet pump (15), the second water inlet pump (16), the third water inlet pump (17), the fourth water inlet pump (18), the fifth water inlet pump (19), and the sixth water inlet pump (20) are respectively connected to the PLC automatic control system (21).

[0007] According to the present invention, a device for treating ammonia nitrogen and organic wastewater in the integrated circuit industry is characterized in that the SBR reactor (1) comprises a stirrer (1-1), a water outlet solenoid valve (1-2), a microporous aeration disk (1-3), a polyurethane sponge filler (1-4), a dissolved oxygen probe (1-5), a pH probe (1-6), and a filler attachment bracket (1-7); the polyurethane sponge filler (1-4) is arranged in the SBR reactor (1) through the filler attachment bracket (1-7); the microporous aeration disk (1-3) is arranged at the bottom of the SBR reactor (1), the water outlet solenoid valve (1-2) is arranged on the side, and the dissolved oxygen probe (1-5) and the pH probe (1-6) are located in the SBR reactor (1).

[0008] According to the present invention, a device for treating ammonia nitrogen and organic wastewater in the integrated circuit industry is characterized in that a UASB reactor (2) comprises a water inlet (2-1), a polyethylene mesh filler (2-2), a granular sludge bed (2-3), a sludge suspension and attachment layer (2-4), a three-phase separator (2-5), a water outlet triangular weir (2-6), a water outlet (2-7), and light-isolating cotton (2-8); the water inlet (2-1) is located at the bottom of the UASB reactor (2), the outer side of the UASB reactor (2) is provided with light-isolating cotton (2-8), the upper part of the UASB reactor (2) is provided with a water outlet triangular weir (2-6) and a water outlet (2-7), and the interior of the UASB reactor (2) is provided with a polyethylene mesh filler (2-2), a granular sludge bed (2-3), a sludge suspension and attachment layer (2-4), and a three-phase separator (2-5).

[0009] According to the present invention, a device for treating ammonia nitrogen and organic wastewater in the integrated circuit industry is characterized in that the SBR reactor (1) is a mud film symbiotic type reactor, the reactor is equipped with two sponge filler racks, and the stirring rod of the stirrer is also attached with sponge fillers. The surface of the sponge filler is different from the internal microorganisms, and the stratification phenomenon of nitrifying bacteria and denitrifying bacteria makes the reactor have a good denitrification effect. The method has strong adaptability to different types of wastewater, and is particularly suitable for the treatment of high-concentration ammonia nitrogen wastewater and wastewater with trace microbial toxicity. It can effectively reduce the occurrence of sludge swelling. The equipment and infrastructure required for the mud film symbiotic method are simple, the operation and management are convenient, and the investment and operating costs are low.

[0010] According to the present invention, a device for treating ammonia nitrogen and organic wastewater in the integrated circuit industry is characterized in that the UASB reactor (2) is divided into three zones, namely: a granular sludge zone, a sludge suspension and attachment zone, and a three-phase separation zone. The granular sludge zone is located at the bottom, and the sludge suspension and attachment zone is located in the middle. It is filled with spherical mesh fillers with a diameter the same as the inner diameter of the reactor. The functions of this zone are: to ensure sludge adhesion and growth, to improve the denitrification effect; to intercept sludge to prevent clogging of the water outlet. The top is the three-phase separation zone.

[0011] A method for treating ammonia nitrogen and organic wastewater from the integrated circuit industry is characterized by comprising the following steps: ammonia nitrogen wastewater contains a relatively high concentration of H2O2 and a relatively low concentration of toxic and harmful substances, which can be toxic to microorganisms in a bioreactor; first, the ammonia nitrogen wastewater passes through an activated carbon adsorption tower (4) and enters a first regulating tank (6), in which the H2O2 concentration is monitored and the pH value of the wastewater is adjusted; at the same time, in order to improve the biodegradability of the wastewater, the domestic sewage and the organic wastewater are combined and collected, and then enter a hydrolysis acidification tank (3) to degrade the macromolecular organic matter that is difficult to biodegrade into small molecular organic matter that is easily biodegradable, and an online COD meter continuously monitors the COD concentration in the hydrolysis acidification tank;

[0012] Next, the ammonia nitrogen wastewater in the first regulating tank (6) and the wastewater in the hydrolysis acidification tank (3) enter the SBR reactor (1), where short-range nitrification and denitrification occur, and nitrogen conversion and nitrogen removal as well as organic matter removal are carried out. The process includes: water intake, reaction, sedimentation, drainage and idleness;

[0013] Next, the water treated by the SBR reactor (1) is discharged into the second regulating tank (7); at the same time, the wastewater in the first regulating tank (6) also enters the second regulating tank (7) to provide ammonia nitrogen. The second regulating tank completes the monitoring of ammonia nitrogen and nitrous oxide concentrations, adjusts pH, and adds NaHCO3;

[0014] Next, the wastewater in the second regulating tank (7) enters the UASB reactor for anaerobic ammonium oxidation and denitrification to complete further denitrification;

[0015] Specifically, the inoculum sludge for the SBR reactor is nitrification sludge from the traditional biochemical treatment of ammonia-nitrogen wastewater from integrated circuits. The sludge is gray-brown in color. After inoculation, the MLSS is 3500-4000 mg / L, and the MLVSS / MLSS is 0.5-0.7. The inoculum sludge for the UASB reactor is 65-70% granular sludge from the stable anaerobic ammonium oxidation (ANAMMOX) parent reactor and 35-40% denitrification sludge. The ANAMMOX sludge is dark red with a particle size of 0.8-2.4 mm, while the denitrification sludge is dark brown. After inoculation, the MLSS is 4500-7000 mg / L.

[0016] The operation process and parameters of the SBR reactor are as follows: control the inflow of ammonia nitrogen wastewater in the first regulating tank (6) and the wastewater in the hydrolysis acidification tank (3) to maintain a carbon-nitrogen ratio of 5 to 10 after the water is inflow; after the water is inflow, anoxic stirring is first performed for 60 to 90 minutes to remove the residual nitrate nitrogen, nitrite nitrogen and COD in the previous stage through denitrification; next, the aeration pump is turned on and the DO concentration during the aerobic period is maintained at 1.5 to 3.5 mg / L for 120 to 240 minutes; the purpose is to achieve short-term nitrification, converting ammonia nitrogen into nitrate nitrogen and removing organic matter COD at the same time. The principle of achieving short-term nitrification in this process is that low DO inhibits NOB;

[0017] Next, anoxic stirring is performed for 60 to 90 minutes to further remove COD and nitrous oxide. In addition, the purpose of anoxic stirring is to completely remove DO in the effluent and reduce the side effects of anaerobic ammonium oxidation. After the reaction is completed, the water is drained after settling for 25 to 35 minutes, with a drainage ratio of 50% to 65%.

[0018] The operating process and parameters of the UASB reactor are as follows: after inoculation with sludge, the hydraulic retention time (HRT) is continuously shortened to allow the sludge to gradually adapt to the sewage quality and undergo anaerobic ammonium oxidation and denitrification reactions, with HRT = 5 to 16 h.

[0019] This invention has the following advantages: 1. High total nitrogen and organic matter removal rates, low carbon source requirements and aeration volumes, and low sludge production, making it more environmentally friendly and energy-efficient. 2. It can simultaneously treat three types of wastewater from the semiconductor industry (ammonia nitrogen wastewater, organic wastewater, and domestic wastewater), while occupying a small footprint. 3. It utilizes a mud-membrane symbiotic process, which provides strong resistance to microbial toxic wastewater loads and greater stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a diagram of the reactor apparatus;

[0021] Figure 2 It is a detailed diagram of the SBR reactor apparatus;

[0022] Figure 3 This is a detailed diagram of the UASB reactor setup.

[0023] Among them: 1—SBR reactor; 2—UASB reactor; 3—hydrolysis acidification tank; 4—activated carbon adsorption tower; 5—ammonia nitrogen wastewater collection tank; 6—first regulating tank; 7—second regulating tank; 8—domestic sewage and organic wastewater collection tank; 9—WTW; 10—ammonia nitrogen / nitrous oxide online meter; 11—H2O2 online meter; 12—COD online meter; 13—aeration pump; 14—rotameter; 15—first water inlet pump; 16—second water inlet pump; 17—third water inlet pump; 18—fourth water inlet pump; 19—fifth water inlet pump; 20—sixth water inlet pump; 21—PLC automatic control system;

[0024] 1-1—Agitator; 1-2—Water outlet solenoid valve; 1-3—Microporous aeration disk; 1-4—Polyurethane sponge filler; 1-5—Dissolved oxygen probe; 1-6—pH probe; 1-7—Filler attachment bracket;

[0025] 2-1—water inlet; 2-2—polyethylene mesh filler; 2-3—granular sludge bed; 2-4—sludge suspension and attachment layer; 2-5—three-phase separator; 2-6—outlet triangular weir; 2-7—outlet; 2-8—light-isolating cotton. DETAILED DESCRIPTION

[0026] The following will be combined with the Figure 1-Figure 3 The present invention is described in detail, and the technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0027] The present invention provides a device for treating ammonia nitrogen and organic wastewater in the integrated circuit industry through improvement. Figure 1 As shown, it includes the following: SBR reactor 1, UASB reactor 2, hydrolysis acidification tank 3, activated carbon adsorption tower 4, ammonia nitrogen wastewater collection tank 5, first regulating tank 6, second regulating tank 7, domestic sewage and organic wastewater collection tank 8, WTW 9, ammonia nitrogen / nitrous acid online meter 10, H2O2 online meter 11, COD online meter 12, aeration pump 13, rotor flowmeter 14, first water inlet pump 15, second water inlet pump 16, third water inlet pump 17, fourth water inlet pump 18, fifth water inlet pump 19, sixth water inlet pump 20, PLC automatic control system 21. Detailed, as Figure 2 As shown, the SBR reactor 1 includes the following: agitator 1-1, water outlet solenoid valve 1-2, microporous aeration plate 1-3, polyurethane sponge filler 1-4, dissolved oxygen probe 1-5, pH probe 1-6, filler attachment bracket 1-7. Figure 3 As shown, the UASB reactor 2 includes the following: a water inlet 2-1, a polyethylene mesh filler 2-2, a granular sludge bed 2-3, a sludge suspension and attachment layer 2-4, a three-phase separator 2-5, a water outlet triangular weir 2-6, a water outlet 2-7, and light-isolating cotton 2-8.

[0028] like Figure 1As shown, the SBR reactor 1 is a mud-film symbiotic reactor. The reactor is equipped with two sponge filler racks, and the stirring rod of the stirrer is also attached with sponge fillers. It has the following advantages: 1. Good treatment effect. The microorganisms on the surface of the sponge filler are different from those inside. The stratification phenomenon of nitrifying bacteria and denitrifying bacteria makes the reactor have a better denitrification effect. 2. Strong adaptability. This method has strong adaptability to different types of wastewater, and is especially suitable for the treatment of high-concentration ammonia nitrogen wastewater and wastewater with trace microbial toxicity. 3. It can effectively reduce the occurrence of sludge bulking. The equipment and infrastructure required for the mud-film symbiotic method are simple, the operation and management are convenient, and the investment and operating costs are low.

[0029] UASB Reactor 2 is divided into three zones: a granular sludge zone, a sludge suspension and attachment zone, and a three-phase separation zone. The granular sludge zone is located at the bottom. The sludge suspension and attachment zone is located in the middle and is filled with spherical mesh fillers with a diameter equal to the reactor's inner diameter. This zone serves to: ensure sludge attachment and growth, enhancing denitrification efficiency; and to intercept sludge to prevent clogging of the water outlet. At the top is the three-phase separation zone.

[0030] The present invention also provides a method for treating ammonia nitrogen and organic wastewater in the integrated circuit industry, comprising the following steps:

[0031] Ammonia nitrogen wastewater contains high concentrations of H2O2 and lower concentrations of toxic and hazardous substances, which can be toxic to microorganisms in the bioreactor. First, the ammonia nitrogen wastewater passes through an activated carbon adsorption tower 4 and enters a first regulating tank 6, where the H2O2 concentration is monitored and the wastewater pH is adjusted. To improve the biodegradability of the wastewater, domestic sewage and organic wastewater are combined and collected before entering a hydrolysis and acidification tank 3, where they degrade difficult-to-biodegrade macromolecules into easily biodegradable small molecules. An online COD meter continuously monitors the COD concentration in the hydrolysis and acidification tank.

[0032] Next, the ammonia nitrogen wastewater in the first regulating tank 6 and the wastewater in the hydrolysis and acidification tank 3 enter the SBR reactor 1, where short-cut nitrification and denitrification occur, converting and removing nitrogen and organic matter. The process includes water intake, reaction, sedimentation, drainage, and idleness.

[0033] Next, the water treated by the SBR reactor 1 is discharged into the second regulating tank 7. At the same time, the wastewater in the first regulating tank 6 also enters the second regulating tank 7 to provide ammonia nitrogen. The second regulating tank is used to monitor the concentration of ammonia nitrogen and nitrous oxide, adjust the pH, and add NaHCO3.

[0034] Next, the wastewater in the second regulating tank 7 enters the UASB reactor for anaerobic ammonium oxidation and denitrification to complete further denitrification.

[0035] Specifically, the inoculum sludge for the SBR reactor consists of nitrification sludge from conventional biochemical treatment of ammonia-nitrogen wastewater from integrated circuits. The sludge is gray-brown in color. After inoculation, the MLSS is 3500-4000 mg / L, and the MLVSS / MLSS ratio is 0.5-0.7. The inoculum sludge for the UASB reactor consists of 65%-70% granular sludge from the stable ANAMMOX parent reactor and 35%-40% denitrification sludge. The ANAMMOX sludge is dark red with a particle size of 0.8-2.4 mm, while the denitrification sludge is dark brown. After inoculation, the MLSS is 4500-7000 mg / L.

[0036] The SBR reactor's operating process and parameters are as follows: The inflow of ammonia nitrogen wastewater from the first regulating tank 6 and the wastewater from the hydrolysis and acidification tank 3 is controlled to maintain a carbon-nitrogen ratio of 5 to 10 after inflow. After inflow, the reactor undergoes anoxic stirring for 60 to 90 minutes to remove residual nitrate nitrogen, nitrite nitrogen, and COD from the previous stage through denitrification. Next, the aeration pump is activated, and the DO concentration is maintained at 1.5 to 3.5 mg / L during the aerobic period for 120 to 240 minutes. This aims to achieve short-term nitrification, converting ammonia nitrogen into nitrate nitrogen while simultaneously removing organic matter and COD. This process achieves short-term nitrification by suppressing NOB with low DO.

[0037] Next, anoxic stirring is carried out for 60 to 90 minutes to further remove COD and nitrous oxide. In addition, the purpose of anoxic stirring is to completely remove DO in the effluent and reduce the side effects of anaerobic ammonia oxidation. After the reaction is completed, the water is drained after settling for 25 to 35 minutes, and the drainage ratio is 50% to 65%.

[0038] The UASB reactor operation process and parameters are as follows: After inoculation with sludge, the hydraulic retention time (HRT) is continuously shortened to allow the sludge to gradually adapt to the sewage quality and initiate anaerobic ammonium oxidation and denitrification reactions. HRT is 5 to 16 hours.

[0039] Technical Principle

[0040] 1. After semiconductor wastewater is separated and recovered, the ammonia nitrogen wastewater is filtered through an activated carbon filter column to remove H2O2 and trace heavy metals that are harmful to microorganisms, and the organic wastewater and domestic sewage are hydrolyzed and acidified;

[0041] 2. The above two wastewaters enter the SBR reactor together for short-range nitrification and denitrification;

[0042] 3. Collect the short-range nitrification effluent and ammonia nitrogen wastewater in a certain proportion in the collection tank and mix them into the required ratio for anaerobic ammonium oxidation reaction;

[0043] 4. The nitric nitrogen produced by anaerobic ammonium oxidation continues to denitrify, thereby completing the further removal of nitrogen and COD.

[0044] The present invention will be described in detail below with reference to the accompanying drawings and implementation examples, but the present invention is not limited to the following embodiments.

[0045] Example 1: The wastewater treatment process is as follows: Ammonia nitrogen wastewater is collected in a collection tank 5 and first passes through an activated carbon adsorption tower 4 before entering a first regulating tank 6. Within this regulating tank, the H2O2 concentration is monitored and the wastewater pH is adjusted to 8.5-9.0. Domestic sewage and organic wastewater are combined and collected before entering a hydrolysis and acidification tank 3 to degrade difficult-to-biodegrade macromolecules into easily biodegradable small molecules. An online COD meter continuously monitors the COD concentration in the hydrolysis and acidification tank. The purpose of combining domestic sewage is to provide trace elements for microorganisms. Next, the ammonia nitrogen wastewater in the first regulating tank 6 and the wastewater in the hydrolysis and acidification tank 3 enter the SBR reactor 1, where short-cut nitrification and denitrification occur, converting and removing nitrogen and organic matter. The process includes water intake, reaction, sedimentation, drainage, and idle time. Next, the water treated in the SBR reactor 1 is discharged into a second regulating tank 7. Simultaneously, the wastewater from the first regulating tank 6 also enters the second regulating tank 7 to provide ammonia nitrogen. The second regulating tank is used to monitor the concentration of ammonia nitrogen and nitrous oxide, adjust the pH, and add NaHCO3. The pH is adjusted to 7.5-8.2. In order to meet the raw materials required for the anaerobic ammonia oxidation reaction, the flow rate of the water inlet pump 20 is continuously adjusted to meet the stoichiometric ratio of ammonia nitrogen and nitrous oxide in the water collection tank 7 to NH4 + -N:NO2 - -N=1:(1.2~1.5). In addition, the carbon-nitrogen ratio of the wastewater in the collection tank 7 is less than 0.6. Next, the wastewater in the second regulating tank 7 enters the UASB reactor for anaerobic ammonium oxidation and denitrification to complete further denitrification.

[0046] Example 2: Operation of the SBR and UASB Reactors: The inlet pump 16 is turned on, water is introduced into the SBR, and anoxic stirring is performed for 60-90 minutes to remove residual nitrate, nitrite, and COD from the previous stage through denitrification. Next, the aeration pump 13 is turned on, and the aeration rate is controlled by adjusting the rotor flowmeter 14. The DO concentration during the aerobic period is maintained at 1.5-3.5 mg / L to achieve short-term nitrification, converting ammonia nitrogen into nitrate nitrogen while also removing some organic matter (COD). Next, aeration is stopped, and anoxic stirring is performed for 60-90 minutes to further remove COD and nitrous oxide. Furthermore, the anoxic process aims to completely remove DO in the effluent and minimize side effects on anaerobic ammonium oxidation. After the reaction is complete, the water is allowed to settle for 25-35 minutes before draining, with a drainage ratio of 50%-65%. The number of SBR cycles per day and the drainage ratio should be adjusted continuously based on the hydraulic retention time of the UASB reactor to ensure that the volume of wastewater in the second regulating tank 7 does not exceed the tank capacity. The UASB reactor continuously shortens the hydraulic retention time (HRT) to allow the sludge to gradually adapt to the sewage quality and undergo anaerobic ammonium oxidation and denitrification reactions. HRT is 5 to 16 hours.

[0047] The above description of the disclosed embodiments is intended to enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A method for treating ammonia nitrogen and organic wastewater in the integrated circuit industry, characterized in that: It includes the following steps: Ammonia nitrogen wastewater contains a high concentration of H2O2 and a low concentration of toxic and harmful substances, which will be toxic to the microorganisms in the bioreactor. First, the ammonia nitrogen wastewater passes through the activated carbon adsorption tower (4) and enters the first regulating tank (6). In this regulating tank, the H2O2 concentration is monitored and the pH of the wastewater is adjusted. At the same time, in order to improve the biodegradability of the wastewater, the domestic sewage and the organic wastewater are combined and collected, and then enter the hydrolysis acidification tank (3) to degrade the difficult-to-biodegrade large-molecule organic matter into easily biodegradable small-molecule organic matter. The online COD meter continuously monitors the COD concentration in the hydrolysis acidification tank. Next, the ammonia nitrogen wastewater in the first regulating tank (6) and the wastewater in the hydrolysis acidification tank (3) enter the SBR reactor (1), where short-range nitrification and denitrification occur, and nitrogen conversion and nitrogen removal as well as organic matter removal are carried out; The process includes: water intake, reaction, sedimentation, drainage and idleness; Next, the water treated by the SBR reactor (1) is discharged into the second regulating tank (7); at the same time, the wastewater in the first regulating tank (6) also enters the second regulating tank (7) to provide ammonia nitrogen; The second regulating tank is used to monitor the concentration of ammonia nitrogen and nitrous oxide, adjust the pH, and add NaHCO3; Next, the wastewater in the second regulating tank (7) enters the UASB reactor for anaerobic ammonium oxidation and denitrification to complete further denitrification; Specifically, the inoculum sludge for the SBR reactor is the nitrification sludge from the traditional biochemical treatment of integrated circuit ammonia nitrogen wastewater. The sludge is gray-brown. After inoculation, the MLSS is 3500-4000 mg / L and the MLVSS / MLSS is 0.5-0.

7. The inoculum sludge for the UASB reactor is 65%-70% granular sludge from the stable operation anaerobic ammonium oxidation (ANAMMOX) mother reactor and 35%-40% denitrification sludge. Anaerobic ammonium oxidation sludge is dark red with a particle size of 0.8 to 2.4 mm, while denitrification sludge is dark brown with MLSS of 4500 to 7000 mg / L after inoculation. The operation process and parameters of the SBR reactor are as follows: the inflow of ammonia nitrogen wastewater in the first regulating tank (6) and the wastewater in the hydrolysis acidification tank (3) is controlled to maintain the carbon-nitrogen ratio of the water at 5-10; after the water is introduced, anoxic stirring is first performed for 60-90 minutes to remove the residual nitrate nitrogen, nitrite nitrogen and COD in the previous stage by denitrification; next, the aeration pump is turned on and the DO concentration during the aerobic period is maintained at 1.5-3.5 mg / L for 120 minutes to 240 minutes; the purpose is to achieve short-range nitrification, convert ammonia nitrogen into nitrate nitrogen, and remove organic matter COD at the same time; The principle of this process to achieve short-range nitrification is that low DO inhibits NOB; Next, anoxic stirring is performed for 60 to 90 minutes to further remove COD and nitrous oxide. In addition, the purpose of anoxic stirring is to completely remove DO in the effluent and reduce the side effects of anaerobic ammonium oxidation. After the reaction is completed, the water is drained after settling for 25 to 35 minutes, with a drainage ratio of 50% to 65%. The operating process and parameters of the UASB reactor are as follows: after inoculating the sludge, the hydraulic retention time is continuously shortened to allow the sludge to gradually adapt to the sewage quality and undergo anaerobic ammonium oxidation and denitrification reactions, with HRT = 5 to 16 h.

2. The method for treating ammonia nitrogen and organic wastewater in the integrated circuit industry according to claim 1, characterized in that: The method adopts the following device for treatment, which includes: SBR reactor (1), UASB reactor (2), hydrolysis acidification tank (3), activated carbon adsorption tower (4), ammonia nitrogen wastewater collection tank (5), first regulating tank (6), second regulating tank (7), domestic sewage and organic wastewater collection tank (8), WTW (9), ammonia nitrogen / nitrous acid online meter (10), H2O2 online meter (11), COD online meter (12), aeration pump (13), rotor flowmeter (14), first water inlet pump (15), second water inlet pump (16), third water inlet pump (17), fourth water inlet pump (18), fifth water inlet pump (19), sixth water inlet pump (20), PLC automatic control system (21); hydrolysis acidification tank (3) The third water inlet pump (17) is connected to the SBR reactor (1), the second regulating tank (7) is connected to the UASB reactor (2) via the fifth water inlet pump (19), the ammonia nitrogen wastewater collection tank (5) is connected to the activated carbon adsorption tower (4) via the first water inlet pump (15), the activated carbon adsorption tower (4) is also connected to the first regulating tank (6), the first regulating tank (6) is connected to the SBR reactor (1) and the second regulating tank (7), respectively, the domestic sewage and organic wastewater collection tank (8) are connected to the hydrolysis acidification tank (3) via the fourth water inlet pump (18), the first water inlet pump (15), the second water inlet pump (16), the third water inlet pump (17), the fourth water inlet pump (18), the fifth water inlet pump (19), and the sixth water inlet pump (20) are respectively connected to the PLC automatic control system (21).

3. The method for treating ammonia nitrogen and organic wastewater in the integrated circuit industry according to claim 2, characterized in that: The SBR reactor (1) comprises an agitator (1-1), a water outlet solenoid valve (1-2), a microporous aeration disk (1-3), a polyurethane sponge filler (1-4), a dissolved oxygen probe (1-5), a pH probe (1-6), and a filler attachment bracket (1-7); the polyurethane sponge filler (1-4) is arranged in the SBR reactor (1) via the filler attachment bracket (1-7); the microporous aeration disk (1-3) is arranged at the bottom of the SBR reactor (1), the water outlet solenoid valve (1-2) is arranged on the side, and the dissolved oxygen probe (1-5) and the pH probe (1-6) are located in the SBR reactor (1).

4. The method for treating ammonia nitrogen and organic wastewater in the integrated circuit industry according to claim 2, characterized in that: The UASB reactor (2) comprises a water inlet (2-1), a polyethylene mesh filler (2-2), a granular sludge bed (2-3), a sludge suspension and attachment layer (2-4), a three-phase separator (2-5), a water outlet triangular weir (2-6), a water outlet (2-7), and light-isolating cotton (2-8); the water inlet (2-1) is located at the bottom of the UASB reactor (2), the outer side of the UASB reactor (2) is provided with light-isolating cotton (2-8), the upper part of the UASB reactor (2) is provided with a water outlet triangular weir (2-6) and a water outlet (2-7), and the interior of the UASB reactor (2) is provided with a polyethylene mesh filler (2-2), a granular sludge bed (2-3), a sludge suspension and attachment layer (2-4), and a three-phase separator (2-5).

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