A FOUP locking device

Abstract

The present invention belongs to the field of semiconductor equipment technology, and more specifically, relates to a FOUP locking device. The device includes a fixing unit, a driving unit, and a locking unit. The two ends of the driving unit are respectively connected to the fixing unit and the locking unit. When the driving unit is working, the locking unit and the driving unit rotate together; the FOUP locking device is used to lock the FOUP on the loading table of the loading port. A fixed support panel is provided on the loading table, and the FOUP locking device is fixed on the fixed support panel. When the device moves, the cylinder rod and the locking point are in the same direction, and the cylinder is in a retracted state, which can effectively utilize the performance of the cylinder. At the same time, when the FOUP is in the locked state, from the vertical direction, the locking point is slightly higher than the bottom fixing point of the locking point. The cylinder contraction force can more effectively lock the FOUP. The fixing units of this device are all fixed at the top, which is more convenient in practical applications.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor equipment, and more particularly, relates to a FOUP locking device. Background Art

[0002] After semiconductor wafers are produced, they are placed in a dedicated wafer storage cassette (FOUP) to facilitate subsequent processing steps. During processing, the FOUP is typically placed on a load port for wafer transfer. However, the docking of the FOUP and the load port door cannot always be performed smoothly, so the FOUP must be securely locked in place.

[0003] The FOUP locking device described in existing patent CN110323168A utilizes a combination of a mounting unit, a drive unit, a linkage unit, and a latch unit for locking. In the first embodiment, a cylinder rod moves laterally and linearly within a long guide hole in the mounting unit, driving a latch connected to a connecting rod to rotate and latch the retaining portion, achieving locking. This complex structure, with numerous connecting rods, increases the number of potential failure points. The second embodiment simplifies the structure of the first embodiment by switching the long guide hole from horizontal to vertical and the movement of the latch shaft up and down within the long guide hole. This locking method involves both rotational and linear motion of the pivot within the long guide hole, reducing its service life. The latch has a large angle in the locked position, which can easily cause abnormal stress on the cylinder rod if a mistake is made during extraction of a FOUP in the locked state. When the FOUP is locked, the cylinder rod is extended and not aligned with the connection point on the latch, potentially affecting the locking effect. Because the movement must occur within a long guide hole, the mounting requirements for the fixed unit are high, with multiple connecting rods, connecting shafts, retaining rings, and complex structural parts. The mounting method is bottom-mounted, which makes installation and replacement inconvenient in actual applications. Summary of the Invention

[0004] The FOUP locking device described in existing patents involves multiple connecting rods, connecting shafts, and retaining rings, resulting in a complex structure. Under adverse conditions, the locking mechanism is prone to driver failure, requiring high installation requirements and inconvenient replacement. The present invention proposes a FOUP locking device that utilizes a cylinder hook connection method, enabling the locking mechanism to perform a rocker-like motion to lock the FOUP. This method eliminates the need for long guide holes, thus preventing mechanical failures caused by this motion.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A FOUP locking device includes a fixing unit, a driving unit, and a locking unit. The two ends of the driving unit are respectively connected to the fixing unit and the locking unit. When the driving unit is in operation, the locking unit and the driving unit rotate together. The FOUP locking device is used to lock the FOUP on the loading table of the loading port. The loading table is provided with a fixed support panel, and the FOUP locking device is fixed to the fixed support panel.

[0007] This technical solution is further optimized, and the fixing unit includes a fixing plate and a cylinder fixing connecting shaft, the fixing plate is fixed on the fixed support panel, and the cylinder fixing connecting shaft connects the holes on the upper part of the two fixing plates and can rotate freely.

[0008] This technical solution is further optimized. The driving unit includes a cylinder, a U-shaped connecting block, and a locking free connecting shaft. The cylinder is fixedly connected to the cylinder fixed connecting shaft. The U-shaped connecting block is fixed on the cylinder rod of the cylinder and is rotatably connected to the locking unit through the locking free connecting shaft. The two ends of the locking free connecting shaft are fixed by buckles.

[0009] This technical solution is further optimized in that large nylon washers are provided at both ends of the cylinder fixed connection shaft.

[0010] This technical solution is further optimized, and the locking unit includes a lock, a lock fixed connecting shaft, an upper fixed plate and a lower fixed plate. The upper hole of the lock is connected to the lock free connecting shaft, and the lower hole of the lock is connected to the lock fixed connecting shaft. The lock fixed connecting shaft is fixed to the fixed support panel of the loading port through the upper fixed plate and the lower fixed plate.

[0011] This technical solution is further optimized in that small nylon washers are provided on both sides of the locking fixed connecting shaft.

[0012] Compared to existing technologies, the above-described technical solution has the following beneficial effects: Compared with existing technologies, this device has a simpler structure and utilizes a cylinder hook-type connection method, which enables the latch to move in a rocker-like manner to lock the FOUP. This method eliminates the need for long guide holes, thus avoiding mechanical failures caused by this movement. Furthermore, the latch's fixed position has been optimized, reducing the angular difference between the latch's position and the direction of FOUP extraction, thereby minimizing the impact on the cylinder rod of erroneous operations such as extracting a FOUP while locked. During movement, the cylinder rod and the latch's fixed point are aligned, and the cylinder is retracted, effectively utilizing the cylinder's performance. Furthermore, when the FOUP is locked, the latch's fixed position slightly exceeds the latch's bottom fixed point, vertically speaking. This allows for more effective locking of the FOUP through the cylinder's retracting force. The device's fixing unit utilizes an upper fixing mechanism, making it more convenient in practical applications. This invention reduces the probability of FOUP locking device failure and offers a simple, rational structure and easier operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a side view of the FOUP locking device installed on the load port equipment;

[0014] Figure 2 This is a schematic diagram of the three-dimensional structure of the FOUP locking device;

[0015] Figure 3 This is a schematic diagram of the exploded three-dimensional structure of the FOUP locking device;

[0016] Figure 4 This is a partial cross-sectional view of the lower end of the FOUP, showing the FOUP unlocked;

[0017] Figure 5 A partial cross-sectional view of the lower end of the FOUP, showing the FOUP in a locked state.

[0018] Description of reference numerals:

[0019] 100: FOUP, 110: FOUP bottom, 111: holding portion, 200: loading port, 210: loading docking panel, 220: loading tabletop, 221: fixed support panel, 300: locking device, 10: locking unit, 11: locking, 12: locking fixed connecting shaft, 13: small nylon washer, 14: upper fixing plate, 15: lower fixing plate, 20: driving unit, 21: cylinder, 22: U-shaped connecting block, 23: locking free connecting shaft, 24: retaining ring, 30: fixing unit, 31: cylinder fixed connecting shaft, 32: fixing plate, 33: large nylon washer. DETAILED DESCRIPTION

[0020] In order to explain the technical content, structural features, achieved objectives and effects of the technical solution in detail, the following is a detailed description in conjunction with specific embodiments and accompanying drawings.

[0021] A preferred embodiment of the present invention is a FOUP and a device, see Figure 1 Figure 3 shows a side view of the FOUP locking device installed on the load port equipment. A FOUP 100 is docked on the loading table 220 of the load port 200. The FOUP locking device 300 secures the FOUP, preventing damage to the wafers, such as tilting and shaking, when the FOUP door is opened or closed.

[0022] See Figure 2 and Figure 3The figures show a schematic diagram of the three-dimensional structure of the FOUP locking device and a schematic diagram of the exploded three-dimensional structure of the FOUP locking device, respectively. The three-dimensional structure of the FOUP locking device includes a fixing unit 30, a drive unit 20, and a locking unit 10. The fixing unit 30 mainly consists of a fixing plate 32 and a cylinder fixed connecting shaft 31. A fixed support panel 221 is provided on the loading table 220. The loading table 220 and the fixed support panel 221 are an integrated structure. The fixing plate 32 secures the locking device 300 to the fixed support panel 221 of the loading port via screws. The cylinder fixed connecting shaft 31 connects the holes on the upper portions of the two fixing plates 32 and can rotate freely. The drive unit 20 consists of a cylinder 21, a U-shaped connecting block 22, and a locking free connecting shaft 23. The cylinder 21 is fixedly connected to the cylinder fixed connecting shaft 31. Large nylon washers 33 are located at each end of the cylinder fixed connecting shaft 31 to prevent friction between the cylinder 21 and the fixing plate 32, which could generate metal particles and cause contamination. The U-shaped connecting block 22 is fixed on the cylinder rod and is connected to the upper hole of the lock 11 through the lock free connecting shaft 23. The two ends of the lock free connecting shaft 23 are fixed by buckles 24 to prevent the lock free connecting shaft 23 from falling during movement. The lock unit is composed of the lock 11, the lock fixed connecting shaft 12, the upper fixed plate 14 and the lower fixed plate 15. The upper hole of the lock is connected to the lock free connecting shaft 23, and the lower hole of the lock is connected to the lock fixed connecting shaft 12. The lock fixed connecting shaft 12 is fixed to the loading port fixed support panel 221 through the upper fixed plate 14 and the lower fixed plate 15. There are small nylon washers 13 on both sides of the lock fixed connecting shaft 12 to prevent the lock 11 from rubbing with the fixed support panel 221 to produce metal particles. As Figure 4 As shown, the upper fixing plate 14 and the lower fixing plate 15 are connected by bolts, and the lock fixing shaft is fixed to the fixed support panel 221. There is a square hole on the fixed support panel 221 for the lock movement position. At this time, the lock fixing connecting shaft 12 and the cylinder fixing connecting shaft 31 in the fixing mechanism form two fixed fulcrums.

[0023] See Figure 4 The figure shows the schematic diagram of the FOUP locking device and the lower part of the FOUP when the FOUP is unlocked. At this time, the cylinder rod is extended. When the FOUP needs to be locked, the cylinder rod can be retracted by controlling the cylinder. The locking device will perform a double rocker movement with two fixed fulcrums as support. The lock will buckle the holding part 111 to achieve Figure 5 The FOUP locking status is displayed.

[0024] like Figure 5As shown, the fixing position of the lock 11 has been optimized. After the optimization, the lock will tilt slightly to the left when locked, so that the three fixed axes form a triangle, and the FOUP is locked under the tension generated when the cylinder contracts. On the other hand, due to the small tilt angle, when the FOUP is accidentally lifted when the FOUP is locked, the lock will also rotate to an upright state, reducing the generation of abnormal tension, thereby reducing the impact on the cylinder rod. When the device is in motion, the cylinder rod and the lock fixing point are in the same direction, and when the FOUP is locked, the cylinder is in a contracted state, which can effectively utilize the cylinder performance to achieve a locking effect. The structure of the device is simple, the fixing units are all fixed at the top, and all are conventionally operated, which is more convenient in actual application.

[0025] This device optimizes the unlocking and locking positions of the latch. Comparing the cylinder's front and rear positions, it can be seen that although a rocker-like motion is made, the angle change is minimal, reducing the abnormal forces that may be caused by large movements. Furthermore, when in the locked position, the latch is slightly tilted to the left, and the tilt angle is small. This serves two purposes. First, the three connecting axes of the locking device form an inner triangle, and the cylinder contracts to generate a pulling force to the lower left at the locking position, effectively locking the FOUP. Second, if the FOUP is accidentally lifted while locked, the latch will rotate to an upright position. A small tilt angle also reduces the generation of abnormal pulling forces.

[0026] The FOUP locking device described in this patent utilizes the cylinder-fixed connecting shaft and the latch-fixed connecting shaft to form two fixed points. The extension and retraction of the cylinder rod then causes the drive unit and latch unit to perform a double-rocker-like motion, allowing the upper portion of the latch to engage the FOUP's bottom retaining portion, thereby securing and releasing the FOUP. This method eliminates the need for a long guide hole structure and optimizes the latch's fixed position. By reducing the angular difference between the latch position and the direction of FOUP extraction, the impact on the cylinder rod of errors such as extracting a FOUP in the locked state is reduced. During movement, the cylinder rod and the latch's fixed point align in the same direction, and the cylinder is retracted, effectively utilizing the cylinder's performance. Furthermore, when the FOUP is locked, the latch's fixed position slightly exceeds the latch's bottom fixed point, vertically speaking. This allows for more effective locking of the FOUP through the cylinder's retracting force. The device's fixed unit utilizes an upper fixing point, making it more convenient in practical applications.

[0027] This invention more effectively secures the FOUP. It also optimizes the locking position, preventing abnormal stress on the cylinder rod when locked. The overall structure is simple, with fewer potential failure points, easier operation, and ease of installation and replacement.

[0028] It should be noted that, in this document, relational terms such as first and second, etc., are used solely to distinguish one entity or operation from another, and do not necessarily require or imply any actual relationship or order between these entities or operations. Furthermore, the terms "include," "comprise," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or terminal device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, method, article, or terminal device. Without further limitation, elements defined by the phrase "include..." or "comprising..." do not exclude the presence of additional elements in the process, method, article, or terminal device comprising the elements. Furthermore, in this document, "greater than," "less than," "exceeding," etc., are understood to exclude the number itself; "above," "below," "within," etc., are understood to include the number itself.

[0029] Although the above embodiments have been described, those skilled in the art may make additional changes and modifications to these embodiments once they know the basic creative concepts. Therefore, the above descriptions are merely embodiments of the present invention and do not limit the scope of patent protection of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention's description and drawings, or directly or indirectly applied in other related technical fields, are also included in the scope of patent protection of the present invention.

Claims

1. A FOUP locking device, characterized in that: The device includes a fixing unit, a driving unit, and a locking unit. The two ends of the driving unit are connected to the fixing unit and the locking unit respectively. When the driving unit is in operation, the locking unit and the driving unit rotate together. The FOUP locking device is used to lock the FOUP on the loading table of the loading port. The loading table is provided with a fixed support panel, and the FOUP locking device is fixed to the fixed support panel. The fixing unit includes a fixing plate and a cylinder fixing connecting shaft, wherein the fixing plate is fixed on the fixed support panel, and the cylinder fixing connecting shaft connects the holes on the upper part of the two fixing plates and can rotate freely; The driving unit includes a cylinder, a U-shaped connecting block, and a lock free connecting shaft. The cylinder is fixedly connected to the cylinder fixed connecting shaft. The U-shaped connecting block is fixed on the cylinder rod of the cylinder and is rotatably connected to the lock unit through the lock free connecting shaft. Both ends of the lock free connecting shaft are fixed by buckles. The locking unit includes a lock, a lock fixed connecting shaft, an upper fixed plate and a lower fixed plate. The upper hole of the lock is connected to the lock free connecting shaft, and the lower hole of the lock is connected to the lock fixed connecting shaft. The lock fixed connecting shaft is fixed to the fixed support panel of the loading port through the upper fixed plate and the lower fixed plate.

2. The FOUP locking device according to claim 1, wherein: Large nylon washers are provided at both ends of the cylinder fixed connection shaft.

3. The FOUP locking device according to claim 2, wherein: There are small nylon washers on both sides of the locking fastener fixing connecting shaft.

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