A wiring structure and scanning control method of a focal plane optical switch optical grating antenna array

Abstract

This invention discloses a wiring structure and scanning control method for a focal plane optical switch grating antenna array, belonging to the field of planar optical waveguide technology. The wiring structure includes multiple optical switch structural units arranged in an array, an optical waveguide bus layer, a first electrode wiring layer, and a second electrode wiring layer. Both the first and second electrode wiring layers include electrode wirings, electrodes, and control signal input contacts. The optical waveguide bus layer includes at least one optical waveguide bus and an optical coupling input terminal. The optical waveguide bus connects all optical switches in the array in series, and the coupling waveguide ends of the optical switches are connected to the grating transmitting antennas. The optical waveguide bus is located between the first and second electrodes and is parallel to the coupling waveguides of the optical switches. This invention eliminates the need for selection switches, enabling independent control of the operating state of any optical switch in the array. Furthermore, when the number of optical waveguide buses is greater than one, multiple optical switches can operate in parallel to improve the array scanning speed and flexibility.

Description

Technical Field

[0001] This invention relates to a wiring structure and scanning control method for a focal plane optical switch grating antenna array, belonging to the field of planar optical waveguide technology. Background Technology

[0002] The use of planar waveguide technology for optical path control and the transmission of optical signals into space via gratings as antennas has garnered significant attention in the industry. This technology can be applied to scenarios such as lidar optical signal scanning, space optical communication transmission / reception, optical tracking systems, and large-scale optical routing. Among these, optical phased array (OPA) scanning chips based on silicon-based photonic integrated circuit technology have received extensive research as a potential solution for achieving a fully solid-state, chip-based optical signal spatial scanning mechanism. However, to date, OPA technology faces challenges such as antenna crosstalk, sidelobe interference, high link loss in multi-link transmission, difficulty in precise phase control of multiple optical paths, and high power consumption in phase control. These issues require considerable research and overcoming, making commercial application unlikely in the short term.

[0003] Focal plane optical switch antenna arrays are a novel solution for spatial optical scanning based on silicon-based photonic integrated circuit technology. The optical antenna array chip is located on the focal plane of a lens, with antennas acting as "pixel" units. Optical switches control the transmitting units, allowing each "pixel" unit to emit independently. Based on geometric optics principles, and with lens-assisted transmission, a one-to-one correspondence is achieved between each antenna "pixel" unit on the focal plane and the spatial projection plane. This scheme, which uses grating antennas combined with lenses to transmit / receive beams to different locations in space to obtain relevant information about target points, is also known as lens-assisted beam steering (LABS). The optical chip located on the focal plane of the lens is called a focal plane optical switch grating antenna array. This solution provides a new approach to achieving all-solid-state spatial beam scanning and has promising applications in all-solid-state integrated lidar beam scanning, space optical communication, and optical routing.

[0004] The wiring of a LABS-based focal plane optical switch grating antenna array involves the arrangement of both optical and electrical transmission lines. Optically, it mainly includes longitudinal and transverse optical waveguide buses. The longitudinal waveguide buses are distributed on the left and right sides of the array perimeter, while there is one transverse waveguide bus in each row inside the array, connecting all the optical switches in that row. During operation, light first enters from the longitudinal waveguide bus. A separate row selection switch selects the light to the corresponding transverse waveguide bus, then controls a switch on that transverse waveguide bus to emit the light. This row selection switch only changes the light transmission path, routing it from the longitudinal waveguide bus to the corresponding transverse waveguide bus; it does not have the function of emitting the beam outwards. Therefore, for an N×N array, N+2 optical waveguide buses and an additional N row selection switches are needed for row selection. These N switches, located independently outside the transmitting array, will introduce additional power consumption and increase the chip footprint. Electrically, this mainly includes row electrodes and column electrodes. Each row selection switch is individually controlled by one electrode, requiring N row electrodes. The switch control within the transmission array is simplified: all switches in each column are controlled by one column electrode, totaling N column electrodes. When a voltage is applied to a column electrode, all optical switches connected in series in that column close. Combined with the row selection switch control, this allows light input to the optical switches in one row, while the other rows receive no light, achieving light emission at a specific location. This electrical wiring method cannot achieve individual control of the optical switch states within the array, limiting its functional flexibility. Summary of the Invention

[0005] To overcome the shortcomings of the prior art, the present invention provides a wiring structure and scanning control method for a focal plane optical switch grating antenna array. It uses an optical waveguide bus to connect all optical switches in the array to achieve optical signal traversal. The working state of any optical switch in the array can be independently controlled without the need for row selection switches. Moreover, when there are multiple optical waveguide buses, the optical switches on multiple optical waveguide buses can work in parallel to improve the scanning speed and flexibility of the array.

[0006] The technical solution adopted in this invention is as follows.

[0007] On one hand, the present invention provides a focal plane optical switch grating antenna array wiring structure, including multiple optical switch units arranged in an array, each optical switch unit including a first control terminal and a second control terminal for inputting different voltage control signals, and the coupling waveguide end of each optical switch unit is connected to a grating transmitting antenna.

[0008] It also includes an optical waveguide bus layer, a first electrode trace layer, and a second electrode trace layer;

[0009] The first electrode trace layer includes row electrode traces respectively set for each row of optical switch units, and first electrodes respectively set for each optical switch unit and connected to the first control terminal; one end of the row electrode trace is provided with a first control signal input contact, and the first electrode corresponding to each optical switch unit in each row of optical switch units is respectively connected to the row electrode trace of the corresponding row.

[0010] The second electrode trace layer includes column electrode traces respectively set for each column of optical switch units, and second electrodes respectively set for each optical switch unit and connected to the second control terminal; one end of the column electrode trace is provided with a second control signal input contact, and the second electrode corresponding to each optical switch unit in each column of optical switch units is respectively connected to the column electrode trace of the corresponding column.

[0011] At least one optical waveguide bus is deployed in the optical waveguide bus layer, with one end of the bus serving as an optical coupling input. Each optical waveguide bus is connected in series with at least one row of optical switching units, and each row of optical switching units is connected in series by one and only one optical waveguide bus. The optical waveguide bus is located between the first electrode and the second electrode and is parallel to the coupling waveguide of the optical switching unit.

[0012] When the first electrode is energized, all the first electrodes in the corresponding row will have the same potential; when the second electrode is energized, all the second electrodes in the corresponding column will have the same potential; using the above wiring structure, the operating state of any optical switch in the array can be independently controlled.

[0013] Optionally, there are two optical waveguide buses. One optical waveguide bus connects the optical switch units in the odd-numbered rows in series, and the other optical waveguide bus connects the optical switch units in the even-numbered rows in series. The switches on different optical waveguide buses can be controlled simultaneously and separately, improving array scanning efficiency.

[0014] Optionally, each optical waveguide bus can be connected in a serpentine pattern with optical switch units in different rows. That is, adjacent rows of optical switch units connected in series by the same optical waveguide bus are connected end to end, which simplifies the overall wiring.

[0015] Optionally, for optical switch units in different rows connected in series, each optical waveguide bus includes a transverse straight waveguide, a longitudinal straight waveguide, and a bent waveguide; the transverse straight waveguide is used to connect optical switch units in the same row in series, and the two ends of the longitudinal straight waveguide are respectively connected to the same side ends of the two transverse straight waveguides through bent waveguides.

[0016] Optionally, when there are two or more optical waveguide buses, the optical paths of different optical waveguide buses are connected by cross-junctions to reduce crosstalk and optical loss, so that the optical transmission in different waveguide buses does not interfere with each other.

[0017] Optionally, when there are 2 optical waveguide buses, for an N*N optical switch unit array, where N is an even number, each optical waveguide bus contains N / 2 lateral straight waveguides, N-2 bent waveguides, and N / 2-1 cross knots.

[0018] Optionally, the first control signal input contacts are arranged in an interleaved manner between adjacent row electrode traces; the second control signal input contacts are arranged in an interleaved manner between adjacent column electrode traces. Since the size of the control signal input contacts is often larger than the spacing between two adjacent rows or two adjacent columns of optical switch unit structures, an interleaved arrangement method is adopted to avoid increasing the size of the chip.

[0019] Optionally, the optical switch unit adopts a Si-Photonics MEMS optical switch unit, whose two electrode plates share the same electrode with the first electrode and the second electrode, respectively. Alternatively, an MZI optical switch or a microring resonator optical switch can also be used; simply connect the first electrode and the second electrode of this invention to their two voltage signal input terminals.

[0020] Optionally, when the number of optical waveguide buses is two or more, such as M, the M row electrode traces corresponding to the M rows of optical switch units connected in series from different optical waveguide buses share the same first control signal input contact. This allows multiple optical switches in different rows of the same column to be controlled simultaneously, enabling multi-point simultaneous outward scanning, significantly increasing the imaging frame rate, and simplifying control.

[0021] In a second aspect, the present invention provides a scanning control method for an optical switch array based on the wiring structure of the focal plane optical switch grating antenna array described in the first aspect, which includes point-by-point scanning and random scanning.

[0022] The point-by-point scanning includes: inputting control optical signals to each optical waveguide bus; for each optical switch unit to be selected in sequence, inputting the first control signal and the second control signal in sequence through the row electrode trace and column electrode trace connected to the optical switch unit to be selected, so that the corresponding optical switch unit is switched to the on state, until the scanning of all optical switch units is completed.

[0023] The random scanning includes: inputting control optical signals to each optical waveguide bus; for randomly selected optical switch units to be selected, inputting the first control signal and the second control signal through the row electrode traces and column electrode traces connected to the optical switch units to be selected, respectively, to complete the scanning of the randomly selected optical switch units.

[0024] Beneficial effects

[0025] Compared with the prior art, the wiring structure of the focal plane optical switch grating antenna array of the present invention uses an optical waveguide bus to connect all optical switches in the array in series to realize optical signal traversal; combined with the optical switch array scanning control method, there is no need to set a row selection switch, so that the working state of any optical switch in the array can be individually controlled.

[0026] With multiple optical waveguide buses, during point-by-point scanning, multiple optical switches on the multiple optical waveguide buses can scan simultaneously, thereby reducing the scanning time of the entire array and improving the imaging frame rate. During random scanning, multiple optical waveguide buses are controlled by an algorithm to generate multiple random scanning points simultaneously, and then each optical waveguide bus selects a corresponding optical switch for scanning. That is, the entire array can emit multiple beams outward simultaneously and work in parallel, which can significantly improve the efficiency and flexibility of scanning.

[0027] For the overlapping optical paths of multiple optical waveguide buses, cross-junctions are used to achieve cross-transmission, which can ensure that the optical transmission in the waveguide bus does not interfere with each other, thereby reducing crosstalk and optical loss. Attached Figure Description

[0028] Figure 1 The diagram shown is an overall schematic diagram of the wiring structure of an 8×8 optical switch array in one embodiment of the present invention.

[0029] Figure 2 As shown Figure 1 Schematic diagram of the optical waveguide bus design in the embodiment;

[0030] Figure 3 As shown Figure 1 A schematic diagram of the first electrode routing layer design in the embodiment;

[0031] Figure 4 As shown Figure 1 Schematic diagram of the second electrode routing layer design in the embodiment;

[0032] Figure 5 As shown Figure 1 A schematic diagram of the Si-Photonics MEMS optical switch unit structure in the embodiment;

[0033] Figure 6 The image shows the pair. Figure 1 A schematic diagram of the overall wiring structure after simplification of the row electrode traces in the embodiment;

[0034] In the figure: 1. Optical coupling input terminal; 2. Lateral straight waveguide; 3. Bent waveguide; 4. Cross knot; 5. Longitudinal straight waveguide; 6. First control signal input contact; 7. Row electrode trace; 8. First electrode; 9. Second control signal input contact; 10. Column electrode trace; 11. Second electrode; 12. Micro spring; 13. Coupled waveguide; 14. Grating transmitting antenna. Detailed Implementation

[0035] Specific embodiments of the present invention are given below. These specific embodiments are only used to further illustrate the present invention in detail and do not limit the scope of protection of the present invention.

[0036] Example 1

[0037] This embodiment introduces a focal plane optical switch grating antenna array wiring structure, which includes multiple optical switch units arranged in an array. Each optical switch unit includes a first control terminal and a second control terminal for inputting different voltage control signals. The coupling waveguide end of each optical switch unit is connected to the grating transmitting antenna. It also includes an optical waveguide bus layer, a first electrode wiring layer and a second electrode wiring layer.

[0038] The first electrode trace layer includes row electrode traces respectively set for each row of optical switch units, and first electrodes respectively set for each optical switch unit and connected to the first control terminal; one end of the row electrode trace is provided with a first control signal input contact, and the first electrode corresponding to each optical switch unit in each row of optical switch units is respectively connected to the row electrode trace of the corresponding row.

[0039] The second electrode trace layer includes column electrode traces respectively set for each column of optical switch units, and second electrodes respectively set for each optical switch unit and connected to the second control terminal; one end of the column electrode trace is provided with a second control signal input contact, and the second electrode corresponding to each optical switch unit in each column of optical switch units is respectively connected to the column electrode trace of the corresponding column.

[0040] At least one optical waveguide bus is deployed in the optical waveguide bus layer, with one end of the bus serving as an optical coupling input. Each optical waveguide bus is connected in series with at least one row of optical switching units, and each row of optical switching units is connected in series by one and only one optical waveguide bus. The optical waveguide bus is located between the first electrode and the second electrode and is parallel to the coupling waveguide of the optical switching unit.

[0041] An optical switch is an optical path selection and control unit. In practical applications, optical switches can be Si-Photonics MEMS optical switches, MZI optical switches, or microring resonator optical switches, etc. For Si-Photonics MEMS optical switches, their two electrodes can be directly used as the first and second electrodes. For MZI optical switches or microring resonator optical switches, electrodes can be connected to their two voltage signal input terminals, which are used to receive different voltage signals to control the switching state, respectively, serving as the first and second electrodes.

[0042] Example 2

[0043] This embodiment uses a Si-Photonics MEMS optical switch as an example to introduce a technical solution for the wiring of a focal plane optical switch grating antenna array. The overall wiring structure design of an 8×8 Si-Photonics MEMS optical switch grating array is as follows: Figure 1 As shown:

[0044] It includes multiple Si-Photonics MEMS optical switch units arranged in an array, an optical waveguide bus layer, a first electrode wiring layer, and a second electrode wiring layer.

[0045] Si-Photonics MEMS optical switch unit structure as follows: Figure 5 As shown, each optical switch unit includes a first control terminal and a second control terminal for inputting different voltage control signals. For Si-Photonics MEMS optical switches, the first and second control terminals are the contacts connecting the two electrode plates of the optical switch. These two electrode plates can be directly used as the first and second electrodes described in this embodiment. For simplicity and a more vivid description in conjunction with the accompanying drawings, the first and second electrodes are referred to as the lower electrode and the upper electrode, respectively, according to the orientation shown in the figure. The Si-Photonics MEMS optical switch also includes a microspring 12 and a coupling waveguide 13. The microspring 12 provides restoring force for the actuator, ensuring smooth switching of the switch state. The grating transmitting antenna 14 connected to the end of the thermally insulated coupling waveguide 13 can couple light from the optical waveguide bus to the upper layer. When the switch is closed, the grating transmitting antenna 14 can diffract light from the chip plane into free space.

[0046] The first electrode routing layer design is as follows: Figure 3 As shown, the first electrode trace layer includes row electrode traces 7 respectively provided for each row of optical switch units, and first electrodes 8, i.e., lower electrodes, respectively provided for each optical switch unit and connected to the first control terminal; one end of the row electrode trace 7 is provided with a first control signal input contact 6, and the first electrode 8 corresponding to each optical switch unit in each row of optical switch units is respectively connected to the row electrode trace 7 of the corresponding row.

[0047] The second electrode routing layer design is as follows: Figure 4 As shown, the second electrode trace layer includes column electrode traces 10 respectively provided for each column of optical switch units, and second electrodes 11 respectively provided for each optical switch unit and connected to the second control terminal, i.e., upper electrodes; one end of the column electrode trace 10 is provided with a second control signal input contact 9, and the second electrode 11 corresponding to each optical switch unit in each column of optical switch units is respectively connected to the column electrode trace 10 of the corresponding column.

[0048] The first control signal input contact 6 and the second control signal input contact 9 are actually pad points on the chip. Since the size of the pad point is often larger than the spacing between the two adjacent rows and two adjacent columns of switching devices, in order to avoid increasing the vertical and horizontal dimensions of the chip, the first control signal input contact 6 in the two adjacent rows and the second control signal input contact 9 in the two adjacent columns are arranged in an alternating manner.

[0049] In this invention, the number of optical waveguide buses can be set as needed. One end of the optical waveguide bus is an optical coupling input terminal 1, and light is input from the optical coupling input terminal 1 outside the array. In practical applications, the optical coupling input terminal 1 can be implemented using various coupling methods such as grating couplers and end-face coupling. If the number of optical waveguide buses is set to one, then this one optical waveguide bus will sequentially connect all rows of optical switch units in a serpentine manner, with adjacent rows connected end-to-end. In this case, to select a certain optical switch unit, an optical signal is input to the optical coupling input terminal 1 of the optical waveguide bus, and a voltage control signal is input through the row electrode traces and column electrode traces connected to the electrodes of the optical switch unit. This enables the conduction control of the optical switch unit, meaning that this invention can achieve individual control of any optical switch unit in the array.

[0050] In this embodiment, the optical waveguide bus layer is configured with two serpentine optical waveguide buses, and the structure of the optical waveguide bus layer is as follows: Figure 2 As shown: In all optical switch units, one optical waveguide bus connects all optical switch units in the odd-numbered rows of the array, and the other optical waveguide bus connects all optical switches in the even-numbered rows of the array. In each optical switch unit connected in series, the optical waveguide bus is located between the first electrode 8 and the second electrode 11, and is parallel to the coupling waveguide 13 of the optical switch unit.

[0051] The serpentine optical waveguide bus includes a transverse straight waveguide 2, a curved waveguide 3, a longitudinal straight waveguide 5, and a cross-shaped junction 4. All optical switches in the same row of the transverse straight waveguide 2 array are connected in series. Two adjacent odd-numbered or even-numbered transverse straight waveguides 2 are connected by the curved waveguide 3 and the longitudinal straight waveguide 5. At the point where the two serpentine optical waveguide buses overlap, the cross-shaped junction 4 is used to ensure that the optical transmission in the two optical waveguide buses does not interfere with each other, so as to reduce crosstalk and optical loss.

[0052] When the above-mentioned optical waveguide wiring method is used, for an N×N optical switch array (N is an even number), each optical waveguide bus contains N / 2 horizontal straight waveguides, N-2 90° bent waveguides and N / 2-1 cross junctions.

[0053] During operation, the switching state is changed by altering the voltage of the upper and lower electrodes of the MEMS optical switch unit. In the on state, electrostatic attraction causes the second electrode of the MEMS optical switch unit to move downwards, reducing the distance between the first and second electrodes. When the distance decreases to approximately 100 nm, light couples from the lower optical waveguide bus to the upper coupling waveguide 13, and then diffracts through the grating transmitting antenna 14 connected to the end of the coupling waveguide into the free space outside the chip plane. In the off state, the distance between the first and second electrodes is large, and light cannot generate effective vertical coupling, so it continues to propagate along the lower optical waveguide bus to the next switch.

[0054] Specifically, taking an electrostatic MEMS parallel plate actuator as an example, it mainly utilizes the electrostatic attraction effect. Only when the voltage applied between the upper and lower electrodes is greater than the attraction voltage V of the parallel plate structure can the actuator achieve this effect. p Only when the electrostatic force overcomes the restoring force of the microspring can the upper electrode be pulled closer to the lower electrode until the two electrodes make contact. When the applied voltage is less than the pull-in voltage, the restoring force of the microspring will always balance the electrostatic force, keeping the upper electrode in an equilibrium position, where vertical coupling of light will not occur.

[0055] Apply to the i-th row electrode The voltage applied to the j-th column electrode Voltage, at this time all MEMS lower electrode voltages in the i-th row are The electrode voltage of all Si-Photonics MEMS in column j is... However, only the optical switch located in the i-th row and j-th column has a potential difference of V between its upper and lower plates. p The voltage between the upper and lower plates of the other switches does not reach the pull-in voltage and remains in the off state.

[0056] Example 3

[0057] Based on the wiring structure of Embodiment 2, this embodiment introduces an optical switch array scanning control method, which includes point-by-point scanning and random scanning. The point-by-point scanning includes: inputting control optical signals to each optical waveguide bus; for each optical switch unit to be selected in sequence, inputting the first control signal and the second control signal in sequence through the row electrode trace and column electrode trace connected to the optical switch unit to be selected, so that the corresponding optical switch unit is switched to the on state, until the scanning of all optical switch units is completed.

[0058] The random scanning includes: inputting control optical signals to each optical waveguide bus; for randomly selected optical switch units to be selected, inputting the first control signal and the second control signal through the row electrode traces and column electrode traces connected to the optical switch units to be selected, respectively, to complete the scanning of the randomly selected optical switch units.

[0059] For an array with N+N control signal input contacts, this control method can realize the individual control of any optical switch in the array. For two optical waveguide buses that do not interfere with each other, an optical switch can be selected for scanning for each optical waveguide bus. That is, the entire array can emit two beams outward simultaneously when it is working, thus improving the spatial scanning efficiency.

[0060] During point-to-point scanning, the optical switches on the two optical waveguide buses can be controlled to scan simultaneously, thereby reducing the scanning time of the entire array by half and doubling the imaging frame rate. During random scanning, two random scanning points can also be generated simultaneously through algorithm control to increase the rate.

[0061] Example 4

[0062] This embodiment also provides a wiring structure for a focal plane optically switched grating antenna array with simplified row electrode routing:

[0063] like Figure 6 As shown, there are two optical waveguide buses. One bus connects the optical switch units in odd-numbered rows in a serpentine pattern, while the other bus connects the optical switch units in even-numbered rows in a serpentine pattern. The first control signal input point 6 is simplified so that adjacent odd-numbered and even-numbered row electrode traces share a single pad point as the first control signal input point 6. This allows for simultaneous transmission of voltage signals to the first electrodes connected to the two row electrode traces, enabling switching control of two optical switch units connected in series on different optical waveguide buses in the same column. This achieves the goal of simultaneously emitting two scan points. In this case, there are N / 2 + N first control signal input pad points. For point-by-point scanning, this control method can also double the imaging frame rate and is simpler to control.

[0064] However, this method lacks flexibility in scanning. Although it can control two optical switches simultaneously, these switches must be on adjacent rows controlled by the same first electrode, which may not effectively improve the scanning rate during random scanning. However, considering the sequential nature of optical switches on the same optical waveguide bus—that is, the optical switch closest to the input end will emit light from the bus after closing—even if the subsequent optical switch enters the closed state, it will not generate a scan point. This limitation can be used to generate two scan points under certain conditions.

[0065] In addition to the embodiments mentioned above, the optical waveguide bus of the present invention can also be configured with three or more lines, selected as needed. The wiring method is as follows: the optical switch units in rows 1*n, 2*n, and 3*n (n = 1, 2, 3, ..., K, where the number of rows in the optical switch array is less than or equal to 3K) are respectively connected in a serpentine series by three optical waveguide buses. The optical switch units on the three optical waveguide buses can be controlled simultaneously and independently. The control method is the same as that for two optical waveguide buses and will not be elaborated further. When pad point decomposition is used, the pad points of every three adjacent row electrode traces are merged into one pad point.

[0066] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A focal plane optical switch grating antenna array wiring structure, comprising multiple optical switch units arranged in an array, each optical switch unit comprising a first control terminal and a second control terminal for inputting different voltage control signals, and the end of the coupling waveguide (13) of each optical switch unit being connected to a grating transmitting antenna (14); characterized in that, It also includes an optical waveguide bus layer, a first electrode trace layer, and a second electrode trace layer; The first electrode trace layer includes row electrode traces (7) respectively provided for each row of optical switch units, and first electrodes (8) respectively provided for each optical switch unit and connected to the first control terminal; one end of the row electrode trace (7) is provided with a first control signal input contact (6), and the first electrode (8) corresponding to each optical switch unit in each row of optical switch units is respectively connected to the row electrode trace (7) of the corresponding row. The second electrode trace layer includes column electrode traces (10) respectively provided for each column of optical switch units, and second electrodes (11) respectively provided for each optical switch unit and connected to the second control terminal; one end of the column electrode trace (10) is provided with a second control signal input contact (9), and the second electrode (11) corresponding to each optical switch unit in each column of optical switch units is respectively connected to the column electrode trace (10) of the corresponding column. The optical waveguide bus layer is provided with at least one optical waveguide bus, one end of which is an optical coupling input terminal (1); each optical waveguide bus is connected in series with at least one row of optical switch units, and each row of optical switch units is connected in series by one and only one optical waveguide bus; the optical waveguide bus is located between the first electrode (8) and the second electrode (11) and is parallel to the coupling waveguide (13) of the optical switch unit.

2. The wiring structure of the focal plane optical switch grating antenna array according to claim 1, characterized in that, The optical waveguide bus consists of two lines, one of which connects to the optical switch units in the odd-numbered rows, and the other connects to the optical switch units in the even-numbered rows.

3. The wiring structure of the focal plane optical switch grating antenna array according to claim 1 or 2, characterized in that, Each of the aforementioned optical waveguide buses consists of optical switch units in different rows connected in a serpentine manner.

4. The wiring structure of the focal plane optical switch grating antenna array according to claim 3, characterized in that, Each of the optical waveguide buses includes a transverse straight waveguide (2), a longitudinal straight waveguide (5), and a curved waveguide (3); the transverse straight waveguide (2) is used to connect the same row of optical switch units in series, and the two ends of the longitudinal straight waveguide (5) are respectively connected to the same side ends of the two transverse straight waveguides through the curved waveguide (3).

5. The wiring structure of the focal plane optical switch grating antenna array according to claim 4, characterized in that, When there are two or more optical waveguide buses, the optical paths of different optical waveguide buses are connected by a cross knot (4).

6. The wiring structure of the focal plane optical switch grating antenna array according to claim 5, characterized in that, When the number of optical waveguide buses is 2, for an N*N scale optical switch unit array, where N is an even number, each optical waveguide bus contains N / 2 transverse straight waveguides (2), N-2 curved waveguides (3) and N / 2-1 cross knots (4).

7. The wiring structure of the focal plane optical switch grating antenna array according to claim 1, characterized in that, Between adjacent row electrode traces (7), the first control signal input contacts (6) are arranged in an alternating manner; between adjacent column electrode traces (10), the second control signal input contacts (9) are arranged in an alternating manner.

8. The wiring structure of the focal plane optical switch grating antenna array according to claim 1, characterized in that, The optical switch unit adopts a Si-Photonics MEMS optical switch unit, and its two electrode plates share the same electrode with the first electrode (8) and the second electrode (11), respectively.

9. The wiring structure of the focal plane optical switch grating antenna array according to claim 1, characterized in that, The M row electrode traces corresponding to the M row optical switch units, which are connected in series by different optical waveguide buses from the M waveguide buses, share the same first control signal input contact.

10. A scanning control method for an optical switch array based on the wiring structure of a focal plane optical switch grating antenna array according to any one of claims 1-9, characterized in that, Includes point-by-point scanning and random scanning; The point-by-point scanning includes: inputting control optical signals to each optical waveguide bus; for each optical switch unit to be selected in sequence, inputting the first control signal and the second control signal in sequence through the row electrode trace and column electrode trace connected to the optical switch unit to be selected, so that the corresponding optical switch unit is switched to the on state, until the scanning of all optical switch units is completed. The random scanning includes: inputting control optical signals to each optical waveguide bus; for randomly selected optical switch units to be selected, inputting the first control signal and the second control signal through the row electrode traces and column electrode traces connected to the optical switch units to be selected, respectively, to complete the scanning of the randomly selected optical switch units.

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