Electrodes and EDM equipment

By dividing the electrodes and constructing a parallel capacitive coupling circuit using electrostatic induction power supply, the problem of inter-electrode capacitance affecting machining quality is solved, achieving high-efficiency and high-precision EDM.

CN117245158BActive Publication Date: 2025-09-16SOUTHERN UNIVERSITY OF SCIENCE AND TECHNOLOGY
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Patent Information

Application Number
CN202311006031.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-08-10
Publication Date
2025-09-16
Estimated Expiration
2043-08-10

AI Technical Summary

Technical Problem

In existing electrospark machining, inter-electrode capacitance affects the quality of the machined surface. The existing split-electrode method increases system complexity and is not conducive to large-scale parallel discharge. The high-resistivity material method has great limitations.

Method used

The system uses split electrodes and electrostatic induction to supply power, and constructs a parallel capacitive coupling loop through a dielectric layer and multiple conductive units to reduce inter-electrode parasitic capacitance and simplify wire connections.

Benefits of technology

Achieve high-precision and high-efficiency electrical machining, reduce system wiring complexity, and improve discharge frequency and machining efficiency.

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Abstract

The present invention proposes an electrode and an electric spark machining device, wherein the electrode includes a first conductive layer, a dielectric layer, and a second conductive layer; the first conductive layer is used to electrically connect to a power source; the dielectric layer is made of a dielectric material; the second conductive layer includes a plurality of conductive units, the plurality of conductive units are arranged at intervals, and the plurality of conductive units are all used to release electrical energy; wherein the dielectric layer is located between the first conductive layer and the second conductive layer, the first conductive layer has a first wall facing the second conductive layer, and the area of ​​the orthographic projection of the wall of each conductive unit facing the first conductive layer on the first wall is smaller than the area of ​​the first wall. The electrode of the present invention is divided into electrodes and uniformly powered by electrostatic induction, which can reduce the wiring complexity of the electric machining system while achieving parallel discharge, and can reduce the parasitic capacitance between the electrodes, thereby facilitating high-precision and high-efficiency machining.
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Description

Technical Field

[0001] The present invention relates to the field of electrical machining, and in particular to an electrode. Background Art

[0002] Electrospark (EDM) machining is a common machining method widely used for the precision machining of conductive or semi-conductive materials such as metals and semiconductors. Because the energy stored in the interelectrode capacitance is released into the interelectrode gap during discharge, the large interelectrode capacitance generated during EDM over a large area increases the discharge energy required for finishing, making it difficult to achieve ideal surface quality.

[0003] In the related art, in order to reduce the influence of inter-electrode capacitance on processing, the method of splitting electrodes can be used to generate parallel discharges while splitting the discharge energy, which has achieved a certain improvement in the processing surface quality. Based on the method of splitting electrodes, a corresponding parallel discharge circuit is proposed, which has achieved good results in improving the efficiency and accuracy of large-area processing or array structure processing. At present, one method of achieving parallel discharge by splitting electrodes requires connecting each electrode unit to the power supply with a wire separately, which increases the complexity of the system and reduces the engineering practicality of the method, and is not conducive to a large number of parallel discharges. Another method is to use a high-resistivity material as an electrode. However, this method is limited to use in large-area discharge processing, and the improvement effect on processing performance is relatively small. Summary of the Invention

[0004] The main purpose of the present invention is to propose an electrode and an electrospark machining device. The electrode is divided into two parts and is uniformly powered by electrostatic induction. This can reduce the wiring complexity of the electrical machining system while achieving parallel discharge, and can reduce the inter-electrode parasitic capacitance of the electrode, thereby facilitating high-precision and high-efficiency machining.

[0005] To achieve the above objectives, the embodiments of the present invention adopt the following technical solutions:

[0006] An electrode for electrical machining, the electrode comprising a first conductive layer, a dielectric layer, and a second conductive layer;

[0007] The first conductive layer is used for electrically connecting to a power source;

[0008] The dielectric layer is made of a dielectric material;

[0009] The second conductive layer includes a plurality of conductive units, the plurality of conductive units are arranged at intervals, and the plurality of conductive units are used to release electrical energy;

[0010] The dielectric layer is located between the first conductive layer and the second conductive layer. The first conductive layer has a first wall facing the second conductive layer. The area of ​​the orthographic projection of the wall of each conductive unit facing the first conductive layer on the first wall is smaller than the area of ​​the first wall.

[0011] In some embodiments, the first conductive layer, the dielectric layer, and the conductive units can collectively define a plurality of capacitors, each of which is configured to store and transfer electrical energy.

[0012] In some embodiments, the first conductive layer and the second conductive layer are arranged opposite to each other along a first direction, and along the first direction, the minimum distance between each conductive unit and the first conductive layer is the same.

[0013] In some embodiments, the first wall surface and the dielectric layer are arranged opposite to each other along a first direction, and along the first direction, a projection of the dielectric layer on the first wall surface covers the first wall surface.

[0014] In some embodiments, the second conductive layer has a second wall surface facing the dielectric layer, the second wall surface is arranged opposite to the dielectric layer along the second direction, and a projection of the dielectric layer on the second wall surface covers the second wall surface along the second direction.

[0015] In some embodiments, the first wall surface is a curved surface; and / or the wall surface of each conductive unit facing the first conductive layer is a curved surface; and / or the wall surface of each conductive unit facing away from the first conductive layer is a curved surface.

[0016] In some embodiments, the second conductive layer has a second wall surface facing the dielectric layer, and along a direction parallel to the second wall surface, the spacing between the conductive units is the same at all locations.

[0017] In some embodiments, one end of the dielectric layer contacts the first conductive layer, and the other opposite end contacts the second conductive layer.

[0018] In some embodiments, the electrodes are configured such that after the first conductive layer obtains energy from a power source, the plurality of conductive units can release electrical energy simultaneously.

[0019] An embodiment of the second aspect of the present invention further provides an electrospark machining device, which includes the electrode of any of the above embodiments and a power supply; the power supply is electrically connected to the first conductive layer.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] In the technical solution of the present invention, the first conductive layer is used to electrically connect to the power supply; the dielectric layer is made of a dielectric material; the second conductive layer is used to release electrical energy, and the second conductive layer includes a plurality of conductive units, which are arranged at intervals; wherein the dielectric layer is located between the first conductive layer and the second conductive layer, the first conductive layer has a first wall facing the second conductive layer, and the area of ​​the orthographic projection of the wall of each conductive unit facing the first conductive layer on the first wall is smaller than the area of ​​the first wall. Since the interior of the electrode has a structure of first conductive layer-dielectric layer-second conductive layer, and the second conductive layer includes a plurality of conductive units, a plurality of parallel capacitors can be constructed. These parallel capacitors are respectively coupled with the inter-electrode capacitance to construct a parallel discharge circuit topology based on capacitor coupling, thereby realizing parallel discharge. See Figure 8 Compared with the parallel discharge electrodes in the prior art that connect each split electrode to the power supply through a separate wire, since the electrode of the present invention splits the conductive layer on the discharge side and supplies power through the method of capacitive coupling electrostatic induction, only one set of wires is needed to connect the capacitive electrode and the workpiece to the discharge power supply to achieve multiple parallel discharges, and there is no need to use a wire to connect each electrode unit to the power supply. On the one hand, the electrode of the present invention effectively disperses the discharge energy by splitting the electrodes for parallel discharge, thereby reducing the inter-electrode parasitic capacitance and the influence of the inter-electrode capacitance on the processing, which is beneficial to the precision processing of the workpiece and the improvement of the processing surface quality; on the other hand, the electrode splitting method of the present invention can effectively reduce the arrangement of the wires and reduce the wiring complexity of the electrical machining system, making it easy to achieve a higher number of parallel discharges and increase the discharge frequency, thereby helping to reduce the difficulty of electrode arrangement and improve the discharge efficiency. Therefore, the electrode of the present invention can reduce the wiring complexity of the electrical machining system while achieving parallel discharge by splitting the electrodes and uniformly supplying power through electrostatic induction, and can reduce the inter-electrode parasitic capacitance of the electrodes, facilitating high-precision and high-efficiency processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0023] Figure 1 A schematic side view of an electrode provided in a first embodiment of the present invention;

[0024] Figure 2 A schematic three-dimensional diagram of an electrode provided in a second embodiment of the present invention;

[0025] Figure 3An exploded schematic diagram of an electrode provided in a second embodiment of the present invention;

[0026] Figure 4 An exploded schematic diagram of an electrode provided in a third embodiment of the present invention;

[0027] Figure 5 An exploded schematic diagram of an electrode provided in a fourth embodiment of the present invention;

[0028] Figure 6 An exploded schematic diagram of an electrode provided in a fifth embodiment of the present invention;

[0029] Figure 7 An exploded schematic diagram of an electrode provided in a sixth embodiment of the present invention;

[0030] Figure 8 This is a schematic structural diagram of the combination of the electrode, power supply, and workpiece provided in the first embodiment of the present invention.

[0031] Description of Figure Numbers:

[0032] 100-electrode;

[0033] 110 - first conductive layer; 111 - first wall surface;

[0034] 120-dielectric layer;

[0035] 130 - second conductive layer; 131 - conductive unit; 132 - second wall;

[0036] 200-power supply;

[0037] 300-workpieces;

[0038] X1-first direction;

[0039] X2 - second direction.

[0040] The purpose, features and advantages of the present invention will be further described with reference to the accompanying drawings and in conjunction with the embodiments. DETAILED DESCRIPTION

[0041] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0042] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0043] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or", "and / or" or "and / or" appear in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement it. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0044] In the related art, in order to reduce the influence of inter-electrode capacitance on processing, the method of splitting electrodes can be used to generate parallel discharges while splitting the discharge energy, which has achieved a certain improvement in the processing surface quality. Based on the method of splitting electrodes, a corresponding parallel discharge circuit is proposed, which has achieved good results in improving the efficiency and accuracy of large-area processing or array structure processing. At present, one method of achieving parallel discharge by splitting electrodes requires connecting each electrode unit to the power supply with a wire separately, which increases the complexity of the system and reduces the engineering practicality of the method, and is not conducive to a large number of parallel discharges. Another method is to use a high-resistivity material as an electrode. However, this method is limited to use in large-area discharge processing, and the improvement effect on processing performance is relatively small.

[0045] In view of this, see Figures 1-8In an embodiment of the present invention, an electrode 100 is provided for electrical machining. As for the application of the electrode 100, in some specific embodiments, the electrode 100 can be used for electrical spark machining of a workpiece 300, and the effect of machining the workpiece 300 is achieved through the electro-erosion effect of the pulse discharge between the electrode 100 connected to one end of the power supply 200 and the workpiece connected to the other end of the power supply 200 in the present invention. Among them, the electro-erosion effect is manifested as an intermittent discharge phenomenon between the electrode 100 and the workpiece 300. After a large amount of discharge, the workpiece 300 is broken down by the discharge at the desired position, and spark discharge occurs, thereby locally melting, evaporating, corroding or dissolving the surface of the workpiece 300 to produce the desired shape. Therefore, electrical spark machining has the characteristics of high energy density of pulse discharge; short duration of pulse discharge; no contact with the workpiece to be machined; simple machining process, etc.

[0046] The electrode 100 includes a first conductive layer 110 , a dielectric layer 120 , and a second conductive layer 130 .

[0047] See also Figure 1-Figure 2 The first conductive layer 110 is used to electrically connect to the power source 200. It can be understood that the first conductive layer 110 is used to obtain electrical energy provided by the power source 200.

[0048] Dielectric layer 120 is made of a dielectric material. It is understood that due to the properties of dielectric materials, dielectric layer 120 can produce polarization under the action of an electric field, forming corresponding positive and negative charges within it, forming a dielectric. Therefore, the main function of dielectric layer 120 can be to isolate and act as a medium for storing electrical energy. It can store charge under the action of an electric field and will undergo polarization as the capacitor operates, forming a reverse potential difference between it and the electric field, thereby achieving the effect of energy storage.

[0049] See also Figure 1-Figure 2, the second conductive layer 130 includes a plurality of conductive units 131. The plurality of conductive units 131 are arranged at intervals. It can be understood that the second conductive layer 130 includes a plurality of electrode 100 units, and the plurality of electrode 100 units are divided from each other, thereby achieving the effect of inter-electrode capacitance division. Specifically, the interior of the electrode 100 has a structure of a first conductive layer 110-dielectric layer 120-second conductive layer 130, and the second conductive layer 130 includes a plurality of conductive units 131, so that a plurality of parallel capacitors can be constructed. These parallel capacitors are respectively coupled with the inter-electrode capacitance to construct a parallel discharge circuit topology based on capacitive coupling, thereby achieving parallel discharge. Based on the above-mentioned electrode 100 segmentation setting, since the discharge electrode 100 is segmented, the large inter-electrode capacitance originally between the power supply 200 and the electrode 100 is divided into a plurality of parallel capacitors at the electrode 100, and the capacitance after each segmentation is smaller than the inter-electrode capacitance before segmentation. It should be noted that, in some embodiments, the multiple parallel capacitors formed after segmentation may be equivalent or unequal capacitors, depending on the arrangement of the electrodes 100. Furthermore, in different embodiments, the second conductive layer 130 may be defined solely by a plurality of spaced conductive units 131, or may be defined jointly by a plurality of conductive units 131 and a base plate connected to the conductive units 131.

[0050] According to the configuration of the second conductive layer 130 described above, the multiple conductive units 131 are all used to release electrical energy. It is understood that each conductive unit 131 is capable of releasing the electrical energy stored in the electrode 100. Specifically, in some embodiments, the second conductive layer 130 can be close to the workpiece 300 to be processed during processing. Before discharge, a high voltage can exist between the electrode 100 and the workpiece 300. When the two electrodes 100 are close, the dielectric between them is broken down, spark discharge occurs, and the workpiece 300 can be electrically processed by electro-erosion.

[0051] According to the arrangement of the first conductive layer 110, the dielectric layer 120 and the second conductive layer 130, it can be understood that the above three can jointly define a capacitor structure, so that the electrode 100 of the present invention can be used as a capacitive electrode 100 and has the characteristics of a capacitor. Among them, the first conductive layer 110 and the second conductive layer 130 can be regarded as the plates opposite to each other on both sides of the capacitor, and the dielectric layer 120 can be regarded as an insulating layer between the two plates. And the dielectric layer 120 can be used to isolate the two plates (the first conductive layer 110 and the second conductive layer 130) and reduce the conduction of electrical energy. It can be seen from the above description that the electrode 100 of the present invention has the characteristics of a capacitor, so the first conductive layer 110 and the second conductive layer 130 can be made of a conductive material. Exemplarily, the material can be a metal, specifically an aluminum alloy, a galvanized iron plate, a copper plate, etc. According to different processing requirements, the dielectric material can be one of a solid material, a liquid material and a gaseous material. The dielectric material can have a high dielectric constant and low dielectric loss to achieve a better capacitive effect. For example, the material of the dielectric layer 120 can be one of ceramic, polyethylene, and polypropylene. It should be noted that in the electrode 100 of the present invention, the materials of the first conductive layer 110, the dielectric layer 120, and the second conductive layer 130 can be selected based on the actual discharge requirements and discharge conditions of the electrode 100. Different materials can have different properties, and no further limitation is given here.

[0052] By properly designing the size and shape of the first conductive layer 110, the dielectric material, and the second conductive layer 130, as well as the number and segmentation of the plurality of conductive units 131, a corresponding number of parallel EDM processes can be generated to meet the corresponding processing requirements of the workpiece 300. For example, according to different processing requirements, see Figure 3-4 In some embodiments, the cross-sectional shape of the first conductive layer 110, or the dielectric material, or the second conductive layer 130 along a direction parallel to the first wall 111 can be rectangular, circular, elliptical, or other polygonal. To ensure that the electrode 100 has a better capacitance and discharge effect, in some embodiments, the cross-sectional shape of the first conductive layer 110, or the dielectric material, or the second conductive layer 130 along a direction parallel to the first wall 111 can be the same, and the cross-sectional edges of the three can be aligned.

[0053] In addition, according to different processing requirements, see Figure 3-6 In different embodiments, the second conductive layer 130 may have different cross-sectional shapes and different arrangements. Figure 3-Figure 4 In some embodiments, the plurality of conductive units 131 may be in the form of a plurality of uniformly distributed rectangular structures, see Figure 5 In some embodiments, the plurality of conductive units 131 may be in a plurality of nested ring structures, see Figure 6In some embodiments, the plurality of conductive units 131 may be arranged in a sector-shaped structure distributed along the circumference of the second conductive layer 130. Furthermore, to meet diverse processing requirements, the second conductive layer 130 may be divided into different conductive regions, and different conductive regions may have different structures or distributions of the conductive units 131.

[0054] See also Figures 1-6 According to the present invention, the electrode 100 can have the characteristics of a capacitor. To achieve the dielectric effect within the capacitor, the dielectric layer 120 is located between the first conductive layer 110 and the second conductive layer. The first conductive layer 110 has a first wall 111 facing the second conductive layer 130. It can be understood that the first wall 111 is located on the side of the first conductive layer 110 close to the second conductive layer 130. When the electrode 100 is energized, the power supply 200 is connected to the first conductive layer 110, so that there can be charges around the first wall 111, and this charge can form electrical energy transfer within the electrode 100. The area of ​​the orthographic projection of the wall of each conductive unit 131 facing the first conductive layer 110 on the first wall 111 is smaller than the area of ​​the first wall 111. It can be understood that the wall of each conductive unit 131 facing the first conductive layer 110 can serve as a plate wall for receiving charges, and this wall and the first wall 111 together define the corresponding facing wall area of ​​the capacitive electrode 100. Therefore, the area of ​​the direct projection of the wall surface of each conductive unit 131 facing the first conductive layer 110 on the first wall surface 111 corresponds to the area of ​​each conductive unit 131 opposite the first wall surface 111. This area is smaller than the area of ​​the first wall surface 111, indicating that the capacitance between the relative first wall surface 111 and the second conductive layer 130 is divided into multiple capacitors due to the presence of multiple conductive units 131. Since the area opposite to each conductive unit 131 is smaller than the area of ​​the first wall surface 111, the capacitance of the multiple capacitors formed by the division is smaller than the capacitance between the electrodes without division.

[0055] For further information, see Figure 7 In some embodiments, the orthographic projection area of ​​the wall surface of the second conductive layer 130 facing the first conductive layer 110 on the first wall surface 111 may be smaller than the area of ​​the first wall surface 111. It will be understood that in this embodiment, the overall projected area of ​​the second conductive layer 130 is smaller than the area of ​​the first wall surface 111. Therefore, the reduction in the orthographic area of ​​the second conductive layer 130 relative to the first conductive layer 110 can further reduce the inter-electrode capacitance.

[0056] According to the combination of the above embodiments, it can be seen that the first conductive layer 110 is used to electrically connect to the power source 200; the dielectric layer 120 is made of a dielectric material; the second conductive layer 130 is used to release electrical energy, and the second conductive layer 130 includes a plurality of conductive units 131, and the plurality of conductive units 131 are arranged at intervals; wherein the dielectric layer 120 is located between the first conductive layer 110 and the second conductive layer, and the first conductive layer 110 has a first wall 111 facing the second conductive layer 130, and the area of ​​the orthographic projection of the wall of each conductive unit 131 facing the first conductive layer 110 on the first wall 111 is smaller than the area of ​​the first wall 111. Since the interior of the electrode 100 has a structure of first conductive layer 110-dielectric layer 120-second conductive layer 130, and the second conductive layer 130 includes a plurality of conductive units 131, a plurality of parallel capacitors can be constructed. These parallel capacitors are respectively coupled with the inter-electrode capacitance to construct a parallel discharge circuit topology based on capacitive coupling, thereby realizing parallel discharge. See. Figure 8 Compared to the prior art parallel discharge electrode 100 in which each split electrode 100 is connected to the power supply 200 through a separate wire, the electrode 100 of the present invention splits the conductive layer on the discharge side and supplies power through the method of capacitive coupling electrostatic induction. Therefore, only one set of wires is needed to connect the capacitive electrode 100 and the workpiece 300 to the discharge power supply 200 to achieve multiple parallel discharges, and there is no need to connect each electrode 100 unit to the power supply 200 with a wire. On the one hand, the electrode 100 of the present invention effectively disperses the discharge energy by splitting the electrodes 100 for parallel discharge, thereby reducing the influence of the inter-electrode parasitic capacitance and the inter-electrode capacitance on the processing, which is beneficial to the precision processing of the workpiece 300 and the improvement of the processing surface quality; on the other hand, the electrode 100 segmentation method of the present invention can effectively reduce the arrangement of the wires and reduce the wiring complexity of the electrical processing system, making it easy to achieve a higher number of parallel discharges and increase the discharge frequency, thereby reducing the difficulty of arranging the electrode 100 and improving the discharge efficiency. Therefore, the electrode 100 of the present invention can reduce the wiring complexity of the electrical machining system while achieving parallel discharge by dividing the electrodes and uniformly supplying power by electrostatic induction, and can also reduce the inter-electrode parasitic capacitance of the electrodes, thereby facilitating high-precision and high-efficiency machining.

[0057] In order to make the electrode 100 have an equivalent and uniform discharge effect after the second conductive layer 130 is divided, so that the processing surface quality is better. Figure 4In some embodiments, the first conductive layer 110, the dielectric layer 120, and the conductive units 131 can collectively define a plurality of capacitors, each of which is configured to store and transmit electrical energy. As can be seen from the description of the above embodiments, the first conductive layer 110 and the second conductive layer 130 can be considered as the opposing plates of a capacitor, and the dielectric layer 120 can be considered as the insulating layer between the two plates.

[0058] According to different processing requirements. In some embodiments, the multiple capacitors formed by the first conductive layer 110-dielectric layer 120-multiple conductive units 131 can have the same capacitance, so that the above-mentioned multiple capacitors can be used as equivalent parallel capacitors, or the multiple capacitors can be arranged in parallel so that the multiple capacitors can be evenly arranged. In other embodiments, the multiple capacitors can have different capacitances or different arrangements to meet different discharge requirements of the capacitors.

[0059] Furthermore, the plurality of conductive units 131 of the second conductive layer 130 can define a plurality of equivalent capacitors. Figure 2 In some embodiments, the first conductive layer 110 and the second conductive layer 130 are arranged relative to each other along the first direction X1. Along the first direction X1, the minimum distance between each conductive unit 131 and the first conductive layer 110 can be equal. It can be understood that in this embodiment, the minimum distance between each conductive unit 131 and the first conductive layer 110 corresponds to the distance between the two plates of each corresponding capacitor, which is inversely proportional to the capacitance of the capacitor. Based on this setting, and by controlling other factors that affect the capacitance, the capacitance of the multiple capacitors defined by the multiple conductive units 131 can be equal or substantially equal. It should be noted that in this embodiment, the minimum distance between each conductive unit 131 and the first conductive layer 110 can be zero.

[0060] In order to make the dielectric layer 120 play a good dielectric role in the electrode 100, see Figure 2-7 In some embodiments, the first wall 111 and the dielectric layer 120 are arranged opposite each other along a first direction X1. Along the first direction X1, the projection of the dielectric layer 120 on the first wall 111 can cover the first wall 111. It will be understood that in this embodiment, the first direction X1 is the direction in which the first wall 111 is directly opposite the dielectric layer 120. The projection of the dielectric layer 120 on the first wall 111 along the first direction X1 corresponds to the area directly opposite the first wall 111 by the dielectric layer 120. The fact that the projection covers the first wall 111 indicates that the dielectric layer 120 covers the effective charge transfer range from the first conductive layer 110 to the dielectric layer 120, thereby achieving a uniform and good charge transfer effect.

[0061] Similar to the above embodiment, the dielectric layer 120 plays a good dielectric role in the electrode 100. Figure 2-7 In some embodiments, the second conductive layer 130 may have a second wall surface 132 facing the dielectric layer 120, with the second wall surface 132 and the dielectric layer 120 arranged opposite each other along the second direction X2. It will be appreciated that, similar to the first wall surface 111, the second wall surface 132 is located on the side of the second conductive layer 130 that is close to the dielectric layer 120. When the electrode 100 is energized, the charge stored in the dielectric layer 120 can be transferred to the second wall surface 132 along the second direction X2, thereby forming a charge transfer from the first conductive layer 110 to the second conductive layer 130. Along the second direction X2, the projection of the dielectric layer 120 on the second wall surface 132 may cover the second wall surface 132. It can be understood that, in this embodiment, the second direction X2 is the direction in which the second wall 132 is opposite to the dielectric layer 120, and the projection of the dielectric layer 120 on the second wall 132 along the second direction X2 corresponds to the area of ​​the dielectric layer 120 opposite to the second wall 132. The projection covering the second wall 132 indicates that the dielectric layer 120 is covered within the effective charge transfer range from the dielectric layer 120 to the second conductive layer 130, thereby achieving a uniform and good charge transfer effect.

[0062] In different embodiments, the walls of the first conductive layer 110, the dielectric layer 120, and the second conductive layer 130 can be flat or curved. To achieve efficient charge transfer between each conductive unit 131 and the first conductive layer 110, in some embodiments, the walls of the first conductive layer 110 facing each conductive unit 131 and the walls of each conductive unit 131 facing the first conductive layer 110 can be flat. Figure 2-7 In some embodiments, the wall surface of each conductive unit 131 facing the first conductive layer 110 can be parallel to the first wall surface 111. It is understood that in this embodiment, because the wall surface of the first conductive layer 110 facing the conductive unit 131 is parallel to the first wall surface 111, the potential difference between the two is relatively uniform, which is conducive to forming a parallel equivalent discharge effect between the conductive units 131. Based on different processing requirements, in other embodiments, at least one conductive unit 131 can have a wall surface facing the first conductive layer 110 that is not parallel to the first wall surface 111.

[0063] Accordingly, in other embodiments, the first wall surface 111 may be a curved surface; and / or the wall surface of each conductive unit 131 facing the first conductive layer 110 may be a curved surface; and / or the wall surface of each conductive unit 131 facing away from the first conductive layer 110 may be a curved surface. The above-mentioned arrangement allows the wall surface of the electrode 100 used to transmit electrical energy to be made into any three-dimensional curved surface shape, thereby enabling the electrode 100 to adapt to different processing requirements. Similarly, the above-mentioned first wall surface 111, the wall surface of each conductive unit 131 facing the first conductive layer 110, and the wall surface of each conductive unit 131 facing away from the first conductive layer 110 may also be flat, and can also achieve the effect of adapting to processing requirements.

[0064] See also Figure 2-5 In some embodiments, the second conductive layer 130 has a second wall surface 132 facing the dielectric layer 120, and the spacing between each conductive unit 131 can be the same along the direction parallel to the second wall surface 132. It can be understood that the above arrangement makes the gaps between each conductive unit 131 equal, so that the capacitance corresponding to each conductive unit 131 can be more uniform. In response to different discharge requirements, the spacing between each conductive unit 131 can be unequal along the direction parallel to the second wall surface 132. Furthermore, in some embodiments, the second conductive layer 130 can be divided into different conductive regions, and the spacing between each conductive unit 131 in different conductive regions can be different. For example, see Figure 6 In this embodiment, the distribution density of the conductive units 131 in the middle area is different from the distribution density of the conductive units 131 in the surrounding areas, so as to adapt to special processing requirements.

[0065] See also Figure 1-Figure 2 In some embodiments, one end of the dielectric layer 120 contacts the first conductive layer 110, and the other end contacts the second conductive layer 130. It is understandable that the dielectric layer 120 is located between the first conductive layer 110 and the second conductive layer 130, and contacts both of them. That is, in this embodiment, no other layered blocks are provided between the dielectric layer 120 and the first conductive layer 110, and between the dielectric layer 120 and the second conductive layer 130, and the charge transfer can be facilitated. It should be noted that in this embodiment, when the dielectric layer 120 is in liquid or gaseous state, it can also be considered that the two ends of the dielectric layer 120 can contact the first conductive layer 110 and the second conductive layer 130. In other embodiments, to meet different requirements, other layers can be provided between the dielectric layer 120 and the first conductive layer 110, or between the dielectric layer 120 and the second conductive layer 130.

[0066] As can be seen from the above description, the multiple conductive units 131 can all be used to release electrical energy. In some embodiments, the machining process of the workpiece 300 requires relatively uniform discharge across the electrode 100 to achieve better machined surface quality. To this end, in some embodiments, the electrode 100 can be configured so that after the first conductive layer 110 receives energy from the power source 200, the multiple conductive units 131 can simultaneously release electrical energy. It will be understood that in some embodiments, after the first conductive layer 110 receives energy from the power source 200, the electrical energy can be stored in the dielectric layer 120. After the electrode 100 produces a breakdown effect, the electrical energy is transferred to each conductive unit 131, and at this time, the multiple conductive units 131 can simultaneously release electrical energy. Accordingly, to meet different workpiece 300 machining requirements, different parts of the electrode 100 can be required to discharge at different times or to discharge different amounts. To this end, in other embodiments, the electrode 100 can be configured so that after the first conductive layer 110 receives energy from the power source 200, the multiple conductive units 131 can release electrical energy separately. Furthermore, in an embodiment where each conductive unit 131 can release electrical energy separately, in order to facilitate controlling the discharge of each portion of the conductive unit 131 separately, each conductive unit 131 may be further connected to a controller.

[0067] The embodiment of the second aspect of the present invention further provides an electrospark machining device, which includes the electrode 100 of any of the above embodiments, and a power supply 200. The power supply 200 is electrically connected to the first conductive layer 110. It can be understood that, corresponding to the description of the above embodiments, in this embodiment, the power supply 200 is used to provide electrical energy to the first conductive layer 110. Thanks to the improvement of the above-mentioned electrode 100, the electrospark machining device of the embodiment of the second aspect of the present invention has the same technical effect as the electrode 100 in the above-mentioned embodiments. At the same time, see Figure 8 Based on the improvement of the electrode 100 according to the present invention, in some embodiments, the electrode 100 only needs to connect the wire to one end of the power supply 200 at the first conductive layer 110, and the other end of the power supply 200 is connected to the workpiece, so as to achieve parallel discharge of the electrode 100 and the processing effect of the electric spark machining equipment, thereby simplifying the complexity of the wiring arrangement of the electric spark machining equipment.

[0068] The above are only preferred embodiments of the present invention and are not intended to limit the patent scope of the present invention. All equivalent structural transformations made using the contents of the present invention's description and drawings, or direct / indirect applications in other related technical fields within the application concept of the present invention are included in the patent protection scope of the present invention.

Claims

1. An electrode for electrical machining, characterized in that: The electrode comprises: a first conductive layer for electrically connecting to a power source; a dielectric layer made of a dielectric material; The second conductive layer includes a plurality of conductive units, the plurality of conductive units are arranged at intervals, and the plurality of conductive units are used to release electrical energy; The dielectric layer is located between the first conductive layer and the second conductive layer, the first conductive layer has a first wall facing the second conductive layer, and the area of ​​the orthographic projection of the wall of each conductive unit facing the first conductive layer on the first wall is smaller than the area of ​​the first wall.

2. The electrode according to claim 1, characterized in that The first conductive layer, the dielectric layer, and the conductive units can together define a plurality of capacitors, each of which is used to store and transfer electrical energy.

3. The electrode according to claim 1, characterized in that The first conductive layer and the second conductive layer are arranged opposite to each other along a first direction. Along the first direction, the minimum distance between each conductive unit and the first conductive layer is the same.

4. The electrode according to claim 1, characterized in that The first wall surface and the dielectric layer are arranged opposite to each other along a first direction. Along the first direction, a projection of the dielectric layer on the first wall surface covers the first wall surface.

5. The electrode according to claim 1, characterized in that The second conductive layer has a second wall surface facing the dielectric layer. The second wall surface is arranged opposite to the dielectric layer along a second direction. Along the second direction, a projection of the dielectric layer on the second wall surface covers the second wall surface.

6. The electrode according to claim 1, characterized in that The first wall surface is a curved surface; and / or, The wall surface of each conductive unit facing the first conductive layer is a curved surface; and / or, A wall surface of each conductive unit facing away from the first conductive layer is a curved surface.

7. The electrode according to claim 1, characterized in that The second conductive layer has a second wall surface facing the dielectric layer. Along a direction parallel to the second wall surface, the spacing between the conductive units is the same at all locations.

8. The electrode according to claim 1, characterized in that One end of the dielectric layer contacts the first conductive layer, and the other end opposite thereto contacts the second conductive layer.

9. The electrode according to claim 1, characterized in that The electrodes are configured such that after the first conductive layer obtains energy provided by the power source, the multiple conductive units can release electrical energy simultaneously.

10. An electric spark machining device, characterized in that: include: The electrode according to any one of claims 1 to 9; as well as A power source is electrically connected to the first conductive layer.

Citation Information

Patent Citations

  • Methods and apparatus for electrical, mechanical and / or chemical removal of conductive material from a microelectronic substrate

    CN1706035A

  • Electrical discharge machining device

    JP2006130653A