Electrical discharge machining device

Abstract

The present invention relates to an electro-discharge machining device, which comprises at least a carrier and an electro-discharge machining unit. The carrier is used to carry at least one workpiece to be machined. The electro-discharge machining unit comprises an electrode, a jig and a power supply unit. When the electro-discharge machining unit performs an electro-discharge machining process on a machining target area of the workpiece to be machined along a machining travel direction, a discharge section of the electrode moves relative to the machining target area of the workpiece to be machined. The present invention can improve the machining process, save the overall machining time and save the time required for replacing the electrode.

Description

Technical Field

[0001] This invention relates to a processing apparatus, and more particularly to an electrical discharge machining apparatus. Background Technology

[0002] With the booming development of the semiconductor industry, electrical discharge machining (EDM) technology is commonly used to process ingots or wafers. EDM is a manufacturing process that uses electrical discharge to generate sparks, shaping the workpiece into a desired form. Two electrodes are separated by a dielectric material and a voltage is applied, generating a periodically changing, rapidly varying current discharge to process the workpiece. EDM uses two electrodes: one called the tool electrode or discharge electrode, and the other called the workpiece electrode, which is connected to the workpiece. During EDM, there is no actual contact between the discharge electrode and the workpiece electrode.

[0003] When the potential difference between two electrodes increases, the electric field between them also increases until the electric field strength exceeds the dielectric strength. At this point, dielectric collapse occurs, current flows through the electrodes, and some material is removed. When the current stops, new dielectric material flows into the electric field between the electrodes, removing the previously removed material and restoring the dielectric insulating effect. After the current flows again, the potential difference between the two electrodes returns to its state before dielectric collapse, thus allowing for a new cycle of dielectric collapse.

[0004] However, existing electrical discharge machining (EDM) technologies suffer from drawbacks such as poor surface roughness and numerous surface cracks that can extend along non-cutting directions, leading to unexpected breakage. Furthermore, existing EDM techniques, for example, ingot cutting, use a fixture to hold the ingot's periphery, i.e., radially, to prevent rolling or displacement. However, since the cutting surface is also radial, conventional techniques can only cut the ingot exposed outside the fixture, failing to cut the area where the fixture overlaps with the ingot. Therefore, conventional techniques require stopping the machine and readjusting the position before cutting can resume. In addition, existing EDM technologies can only cut or thin one wafer at a time, resulting in a very slow process. Moreover, existing EDM technologies use only a single cutting wire, and since current EDM equipment lacks a quick-release design, if the cutting wire breaks unexpectedly, it requires a significant downtime for replacement. Summary of the Invention

[0005] In view of this, one or more objectives of the present invention is to provide an electrical discharge machining apparatus to solve the many problems of the above-mentioned prior art.

[0006] To achieve the aforementioned objectives, the present invention provides an electrical discharge machining (EDM) apparatus, comprising at least: a stage for supporting at least one workpiece; and an EDM unit for performing an EDM process on a target area of ​​the workpiece on the stage along a machining travel direction, the EDM unit comprising: at least one electrode; a fixture composed of at least two support members and at least two holding members respectively connected in correspondence, wherein the sides of the plurality of electrodes respectively abut against the two support members, such that a discharge section of the electrode is suspended, wherein the discharge section of the electrode extends along a second direction perpendicular to a first direction; and a power supply unit that provides a first power source to the electrode and the workpiece during the EDM process, thereby applying discharge energy to the target area of ​​the workpiece via the discharge section of the electrode, wherein when the EDM unit performs the EDM process along the machining travel direction, the discharge section of the electrode and the target area of ​​the workpiece move relative to each other along the second direction.

[0007] The discharge section of the electrode and the processing target area of ​​the workpiece move reciprocally or cyclically relative to each other along the second direction.

[0008] The two supporting members and the two holding members move reciprocally or cyclically together with the electrode, so that the electrode applies the discharge energy to the workpiece in the discharge section.

[0009] The electrical discharge machining unit adjusts the tension value of the electrode by causing the two supporting members or the two holding members to move relative to each other.

[0010] It also includes a stabilizing component to stabilize the movement of the electrode relative to the workpiece.

[0011] The electrode can be linear or plate-shaped.

[0012] The platform moves along the first direction, the second direction, or the processing direction.

[0013] The platform rotates around the first direction, the second direction, or the processing direction.

[0014] The electrical discharge machining apparatus also includes a slag removal unit. When the electrical discharge machining unit performs the electrical discharge machining procedure on the workpiece, the slag removal unit provides an external force to remove the residue generated by the electrode applying the discharge energy to the workpiece.

[0015] The direction or position of the external force provided by the slag removal unit is dynamically adjusted according to the shape of the workpiece to remove the residue.

[0016] The electrical discharge machining apparatus also includes a force measurement unit for measuring the tension value of the electrode.

[0017] The electrical discharge machining apparatus also includes a vibration measurement unit for measuring the vibration value of the electrode.

[0018] The power supply unit of the electrical discharge machining unit further includes providing a second power source to the electrode, thereby providing a DC power source or a radio frequency power source to the electrode.

[0019] The platform also includes a clamping element for fixing the workpiece to be processed.

[0020] The workpiece to be processed has a planar area and is connected to the platform or the clamping member through the planar area.

[0021] The clamping member is attached to the outer shape of the workpiece.

[0022] The clamping component has a plate with a comb-like structure.

[0023] The platform has a comb-like structure.

[0024] The platform is connected to the clamping member via a locking structure.

[0025] The two plates of the clamping member are connected to each other through a snap-fit ​​structure.

[0026] The clamping component has two or more contact surfaces with the workpiece.

[0027] The platform or clamping element is connected to the workpiece by an adhesive layer.

[0028] The adhesive layer is discontinuously applied to the platform or the clamping member.

[0029] The adhesive layer is a conductive adhesive.

[0030] The clamping member axially supports one side of the workpiece to be processed, and the discharge energy forms a processing groove in the processing target area of ​​the workpiece to be processed by an adhesive layer to bond the two walls of the processing groove.

[0031] The electrical discharge machining unit performs the electrical discharge machining process on the workpiece on the platform along with the clamping component along the machining travel direction.

[0032] The clamping member holds a buffer member, and the buffer member fixes the workpiece to be processed through a conductive adhesive layer. The electrical discharge machining unit performs the electrical discharge machining process on the workpiece to be processed on the platform along the processing travel direction.

[0033] The clamping member holds a conductive frame to fix the workpiece, and the electrical discharge machining unit performs the electrical discharge machining process on the workpiece on the platform along the machining travel direction.

[0034] The stage, the clamping member, or the workpiece further includes a conductive gain layer to improve the electrical contact between the workpiece and the stage or between the workpiece and the clamping member.

[0035] It also includes a heat source supply for providing a heat source to the workpiece before, during or after the electrical discharge machining process.

[0036] The two load-bearing components are either plate structures or sleeve structures.

[0037] The two supporting components each include a first sheet and a second sheet, and the electrode is clamped between the first sheet and the second sheet.

[0038] The two supporting members each have a through groove, and the two holding members each have a protrusion corresponding to the through groove. The two supporting members are connected to the protrusions of the two holding members by the through groove.

[0039] The two supporting members each have a through hole, and the two holding members each have a screw hole. The two supporting members are screwed into the screw holes of the two holding members by means of a bolt passing through the through hole.

[0040] The two holding members each have a groove structure, and the two bearing members are inserted into the groove structure of the two holding members to be correspondingly connected to the two holding members.

[0041] Each of the two holding members has a conductive structure, which is electrically connected to the electrode that abuts against the two supporting members.

[0042] The two holding members simultaneously fix the two bearing members and the electrode.

[0043] The electrical discharge machining unit also includes an attachment member, which is connected to the electrode at the edge of the two supporting members.

[0044] The attachment component is electrically connected to the first power source or a second power source of the power supply unit.

[0045] The two ends of the electrode are respectively connected to the same or different of the two supporting components.

[0046] The edges of the two load-bearing components have chamfered corners.

[0047] The work to be processed on the platform is a semiconductor ingot or wafer.

[0048] In this process, the electrical discharge machining device sequentially or simultaneously cuts or polishes the workpiece carried on the platform.

[0049] The workpiece to be processed is formed by electrically bonding together multiple workpieces.

[0050] The discharge energy forms a processing groove in the processing target area of ​​the workpiece, and the processing groove is filled with a filler material.

[0051] The discharge energy forms a processing groove in the processing target area of ​​the workpiece, and an adhesive tape is attached to both sides of the processing groove to reduce the shaking phenomenon in the processing target area of ​​the workpiece.

[0052] In this process, the electrical discharge machining (EDM) procedure applies the discharge energy to the target area of ​​the workpiece in a fluid.

[0053] The fluid contains ozone or oxygen.

[0054] The fluid contains air bubbles.

[0055] In this process, the bubble undergoes an implosion due to an internal and external pressure difference.

[0056] The bubble contains ozone or oxygen.

[0057] The fluid in question is an electrolyte.

[0058] In this process, the electrical discharge machining (EDM) procedure applies the discharge energy to the target area of ​​the workpiece in a vacuum environment.

[0059] The electrical discharge machining apparatus further includes an ultrasonic generator or a piezoelectric oscillator to cause the stage, the workpiece, the electrode, or the fluid to vibrate.

[0060] The electrode is a plurality of electrodes, and the plurality of electrodes are arranged in parallel along the first direction.

[0061] It also includes an orientation correction component, which adjusts the relative orientation of the electrode and the workpiece to correct the processing direction when the processing direction of the electrode is deviated.

[0062] As described above, the electrical discharge machining apparatus of the present invention has one or more advantages or technical effects:

[0063] (1) The fixture is composed of at least two load-bearing components and at least two holding components respectively connected together. The quick-release design can greatly reduce the time required to replace the electrodes and adjust the tension of the discharge electrodes.

[0064] (2) It has a slag removal unit that can provide external force to one or more processing target areas, and the direction or position of the external force can be dynamically adjusted according to the shape of the workpiece to be processed, which helps to remove the residue generated by the electrical discharge machining process.

[0065] (3) The clamping component has a variety of clamping modes. The comb-like structure can firmly clamp the workpiece, which can effectively solve the problem that traditional electrical discharge machining technology cannot cut the overlapping area between the clamping component and the workpiece. In addition, the locking structure can also achieve the functions of disassembly and adjustment.

[0066] (4) The orientation correction component can correct the machining direction of the electrode and the workpiece, thereby avoiding deviation of the machining direction.

[0067] (5) The clamping parts or stage form a comb-like structure, which helps to carry out the electrical discharge machining process and can correspondingly avoid damage.

[0068] (6) The stabilizing component can reduce electrode jitter, can also serve as a guide post, and can be used as an electrical contact.

[0069] (7) The heat source can reduce the unnecessary cracks or crack expansion caused by thermal shock, and can also form a positive cycle to help the electrical discharge machining process.

[0070] (8) The conductive gain layer can improve the electrical contact between the workpiece and the clamping part or the stage.

[0071] (9) The adhesive layer can prevent the workpiece from shaking during the EDM process and can also prevent burrs from forming before the EDM process ends. In addition, the conductive adhesive layer can provide electrical contact between the workpiece and the clamping part or the stage.

[0072] To enable you to have a better understanding of the technical features and effects of this invention, preferred embodiments and detailed descriptions are provided below. Attached Figure Description

[0073] Figure 1 A front view schematic diagram illustrating an embodiment of the electrical discharge machining apparatus of the present invention is shown, wherein... Figure 1 (A) and (B) represent different implementation states.

[0074] Figure 2 A top view schematic diagram illustrating a partial structural embodiment of the electrical discharge machining apparatus of the present invention is shown, wherein... Figure 2 (A), (B) and (C) are different implementation states.

[0075] Figure 3A side view schematic diagram illustrating a partial structural embodiment of the electrical discharge machining apparatus of the present invention is shown, wherein... Figure 3 (A) and (B) represent different implementation states.

[0076] Figure 4 A side view schematic diagram illustrating an embodiment of the present invention in which the workpiece to be processed is composed of multiple workpieces to be processed connected together.

[0077] Figure 5 The diagram is a top view showing an embodiment of the electrical discharge machining unit of the present invention performing an electrical discharge machining process on multiple workpieces.

[0078] Figure 6 This is a schematic diagram illustrating different embodiments of the cross-section of the electrode of the present invention.

[0079] Figure 7 This is a side view schematic diagram of an embodiment in which the two ends of the electrode of the present invention are respectively connected to different load-bearing components.

[0080] Figure 8 This is a top view schematic diagram of an embodiment in which the two ends of the electrode of the present invention are respectively connected to different supporting components.

[0081] Figure 9 These are schematic diagrams illustrating different embodiments of the processing grooves of the present invention filled with filler material, wherein... Figure 9 (A), (B) and (C) are different implementation states.

[0082] Figure 10 (A) and (B) are schematic diagrams of two embodiments of the electrical discharge machining apparatus of the present invention having a stabilizing component, wherein... Figure 10 (A) and (B) represent different implementation states.

[0083] Figure 11 This is a schematic diagram of an embodiment in which multiple electrodes are provided in the limiting groove of the bearing member of the present invention.

[0084] Figure 12 This is a side view schematic diagram of an embodiment of the load-bearing component of the present invention, which is a plate-type structure.

[0085] Figure 13 This is a top view schematic diagram of an embodiment of the present invention in which the load-bearing component is a plate-type structure.

[0086] Figure 14 This is a side view schematic diagram of an embodiment of the present invention in which multiple load-bearing components are screwed to a holding component.

[0087] Figure 15 This is a side view schematic diagram of an embodiment of the retaining member of the present invention, which is assembled with a bearing member by a groove structure.

[0088] Figure 16 This is a top view schematic diagram of an embodiment of the holding member of the present invention having a conductive structure connected to an electrode.

[0089] Figure 17 For insulation structure set at Figure 16 A top view schematic diagram of the conductive structure and the implementation state between the electrodes.

[0090] Figure 18 This is a schematic diagram illustrating an embodiment of the clamping member of the present invention radially clamping the workpiece to be processed, wherein... Figure 18 (A) is a side view. Figure 18 (B) is the top view.

[0091] Figure 19 This is a side view schematic diagram of an embodiment of the clamping member of the present invention axially clamping the workpiece, wherein... Figure 19 (A) and (B) represent different implementation states.

[0092] Figure 20 This is a side view schematic diagram of an embodiment in which the clamping member of the present invention fixes the workpiece to be processed on one side of its plate.

[0093] Figure 21 This is a side view schematic diagram of an embodiment of the clamping member of the present invention radially clamping the workpiece, wherein... Figure 21 (A), (B), (C) and (D) are different implementation states.

[0094] Figure 22 This is a side view schematic diagram of an embodiment of the present invention that improves electrical contact through a conductive gain layer, wherein... Figure 22 (A), (B) and (C) are different implementation states.

[0095] Figure 23 This is a side view schematic diagram of an embodiment of the present invention using a comb-like structure to assist in the electrical discharge machining process, wherein... Figure 23 (A), (B) and (C) are different implementation states.

[0096] Figure 24 This is a side view schematic diagram of an embodiment of the present invention in which the clamping member is detachably installed through a locking structure, wherein... Figure 24 (A) and (B) are schematic diagrams obtained from different perspectives.

[0097] Figure 25 This is a side view schematic diagram of an embodiment of the present invention in which the clamping member is detachably installed through a locking structure and a snap-fit ​​structure, wherein... Figure 25 (A) and (B) are schematic diagrams obtained from different perspectives.

[0098] Figure 26This is a schematic diagram illustrating an embodiment of the electrical discharge machining apparatus of the present invention clamping a workpiece, wherein... Figure 26 (A) to (D) represent different implementation states.

[0099] Figure 27 This is a schematic diagram illustrating an embodiment of the present invention in which electrodes are arranged in parallel using multiple supporting members, wherein... Figure 27 (A) The electrodes are arranged in parallel along the machining travel direction F (i.e., multiple electrodes sequentially perform electrical discharge machining on a single machining target area). Figure 27 (B) The electrodes are arranged in parallel along the first direction X (i.e., multiple electrodes simultaneously perform electrical discharge machining on multiple processing target areas).

[0100] Figure 28 This is a top view schematic diagram of an embodiment of the present invention in which the electrodes are made parallel to each other through the separator pillars, wherein... Figure 28 (A) is a schematic diagram of the supporting components surrounding the electrodes on both sides. Figure 28 (B) is a schematic diagram of the load-bearing components that bridge the two sides of the electrode.

[0101] Figure 29 This is a top view schematic diagram of an embodiment of the electrical discharge machining apparatus of the present invention having a slag removal unit, wherein... Figure 29 (A) and (B) are schematic diagrams of different implementation states.

[0102] Figure 30 This is a schematic diagram illustrating an embodiment of the jig rotating the electrode in the electrical discharge machining apparatus of the present invention.

[0103] Figure 31 This is a schematic diagram of an embodiment of the electrical discharge machining apparatus of the present invention having a tension control module.

[0104] Figure 32 This is a schematic diagram illustrating an embodiment of the electrical discharge machining apparatus of the present invention having an orientation correction component.

[0105] Explanation of reference numerals in the attached figures:

[0106] 10: Electrical Discharge Machining Equipment

[0107] 11: Comb-like structure

[0108] 11': Comb-like structure

[0109] 13: Planar area

[0110] 15: Circular groove

[0111] 20: Platform

[0112] 21: Support plate

[0113] 22: Stabilizing components

[0114] 23: Board body

[0115] 24: Clamping components

[0116] 25: Conductive frame

[0117] 26: Adhesive layer

[0118] 27: Buffer component

[0119] 28: Contact surface

[0120] 29: Comb teeth opening

[0121] 29': Comb teeth opening

[0122] 30: Electrical Discharge Machining Unit

[0123] 31: Electrical contacts

[0124] 32: Electrode

[0125] 33: Divider column

[0126] 34: Power Supply Unit

[0127] 34': Another power supply unit

[0128] 35: Connection Structure

[0129] 36: Jig

[0130] 40: Load-bearing components

[0131] 41: Shaft hole

[0132] 42: Limiting groove

[0133] 43: Through slot

[0134] 44a: First sheet

[0135] 44b: Second sheet

[0136] 45: Through hole

[0137] 46: Attached components

[0138] 47: Chamfer

[0139] 50: Holding member

[0140] 52: base body

[0141] 53: Bump

[0142] 54: Conductive structure

[0143] 55: Coupling

[0144] 56: Insulation structure

[0145] 57: Trench Structure

[0146] 58: Motor

[0147] 59: Bolt

[0148] 60: Tension Measurement Unit

[0149] 62: Vibration Measurement Unit

[0150] 64: Slag Discharge Unit

[0151] 65: Sprayer Head

[0152] 66: Tension Control Module

[0153] 68: Controller

[0154] 70: Heat source supply

[0155] 88: Orientation Correction Component

[0156] 89: Detection Components

[0157] 90: Conductive gain layer

[0158] 100: Work to be processed

[0159] 110: Processing target area

[0160] 120: Machining grooves

[0161] 124: Filler material

[0162] 126: Tape

[0163] 281: Guide groove

[0164] 240: Locking structure

[0165] 242: Bolt

[0166] 243: Snap-fit ​​structure

[0167] 244: Nut

[0168] 246: Card Block

[0169] 248: Snap-in hole

[0170] A: Both sides

[0171] B: Discharge section

[0172] D: Spacing

[0173] H: Depth

[0174] h: depth

[0175] X: First direction

[0176] Y: Second direction

[0177] Z: Third-party direction

[0178] F: Processing direction

[0179] P1: First power supply

[0180] P2: Second power supply Detailed Implementation

[0181] To facilitate understanding of the technical features, content, advantages, and effects of this invention, the invention is described in detail below with reference to accompanying drawings and embodiments. The drawings used are for illustrative purposes only and do not necessarily represent the actual scale and precise configuration of the invention. Therefore, the scale and configuration of the accompanying drawings should not be used to interpret or limit the scope of the invention in actual implementation. Furthermore, for ease of understanding, the same elements in the following embodiments are indicated by the same symbols.

[0182] Furthermore, unless otherwise specified, the terms used throughout this specification and claims generally have their ordinary meaning in the context of this art, the disclosure herein, and the specific content. Certain terms used to describe the invention will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the invention.

[0183] The use of terms such as "first," "second," and "third" in this document does not specifically refer to any order or sequence, nor is it intended to limit the invention. Rather, it is merely used to distinguish components or operations described using the same technical terms.

[0184] Secondly, when this article uses terms such as "contains", "includes", "has", or "contains", these are all open-ended terms, meaning that they include but are not limited to.

[0185] Figure 1 This is a front view schematic diagram of the electrical discharge machining apparatus of the present invention, wherein... Figure 1 (A) has a wraparound electrode design. Figure 1 (B) The electrode is a bridging design. Figure 2 This is a top view schematic diagram of a partial structure of the electrical discharge machining apparatus of the present invention, wherein... Figure 2 (A) has a plurality of electrodes and is a ring-shaped design. Figure 2 (B) has a single electrode and is designed in a ring shape. Figure 2 (C) has a single electrode and is a bridging design. Figure 3 This is a side view schematic diagram of a partial structure of the electrical discharge machining apparatus of the present invention, wherein... Figure 3 (A) is a discharge machining program that uses multiple electrodes to simultaneously process multiple target areas. Figure 3 (B) is a discharge machining procedure for a single electrode on a single target area. Please refer to [link / reference]. Figures 1 to 3 The electrical discharge machining (EDM) apparatus 10 of the present invention includes at least a stage 20 and an electrical discharge machining unit 30. The stage 20 is used to support at least one workpiece 100. The two ends of the electrode 32 are respectively connected across (e.g., Figure 1 (B) and Figure 2 (as shown in (C)) or around (as shown in) Figure 1 (A) Figure 2 (A) Figure 2 (As shown in (B)) on the two fixtures 36, the discharge section B of the electrode 32 is suspended. The electrode 32 of the electrical discharge machining unit 30 extends along the second direction Y, such that the discharge section B of the electrode 32 is parallel to the second direction Y, wherein the second direction Y is perpendicular to the first direction X and the machining travel direction F. The discharge section B of the electrode 32 moves reciprocally or cyclically relative to the machining target area 110 of the workpiece 100 (e.g., along...). Figure 1 The second direction Y (shown as a relative displacement) is used to perform an electrical discharge machining (EDM) process on the target area 110 of the workpiece 100 on the stage 20 along the machining travel direction F using the electrode 32. The power supply unit 34 of the EDM unit 30 provides a first power supply P1 to the electrode 32 and the workpiece 100 during the EDM process, so as to apply discharge energy to the target area 110 of the workpiece 100 via the electrode 32 located in the discharge section B.

[0186] The workpiece 100 described above can be any conductor or semiconductor structure, such as an ingot or wafer, and its shape can be, for example, a cylindrical or sheet-like block. The workpiece 100 defines at least one processing target area 110, for example, a single processing target area 110 (e.g., ...). Figure 3 (as shown in (B)) or multiple processing target areas 110 (such as...) Figure 3 (As shown in (A)). Taking a plurality of processing target areas 110 as an example, these processing target areas 110 are arranged in parallel at any suitable processing position in the workpiece 100. The distance D between these processing target areas 110 corresponds to (for example, the same as) the cutting thickness, thinning thickness or cutting spacing of the workpiece 100, and its value can be selectively adjusted according to the actual process requirements, and is not limited to being equal or unequal to each other.

[0187] like Figures 1 to 3As shown, the electrical discharge machining (EDM) unit 30 is used to perform electrical discharge machining (EDM) procedures on the target area 110 of the workpiece 100 on the stage 20 along a machining travel direction F. For example, it may sequentially or simultaneously perform cutting and / or electric discharge grinding (EDG) on the target area 110 of the workpiece 100. This invention is not limited to the stage 20 moving the workpiece 100 toward the electrode 32 of the EDM unit 30 or the EDM unit 30 driving the electrode 32 toward the workpiece 100. As long as the EDM unit 30 and the workpiece 100 on the stage 20 can move relative to each other along the aforementioned machining travel direction F, this invention is applicable. In other words, the platform 20 of the present invention can be a fixed platform or a movable or rotatable platform. The present invention is illustrated by exemplifying the platform 20 as a working platform with a support plate 21, but the present invention is not limited thereto. The platform 20 of the present invention may selectively omit the support plate 21 or replace the support plate 21 with an adhesive layer described later. Similarly, the workpiece 100 of the present invention is not limited to being composed of a single workpiece. The workpiece 100 of the present invention may also be composed of, for example, multiple workpieces connected together, wherein these workpieces may be selectively joined together, for example, by an adhesive layer 26 (e.g., ...). Figure 4 (As illustrated in the embodiment example), the adhesive layer 26 is, for example, a conductive adhesive that facilitates electrical contact. However, the present invention is not limited thereto; as long as the adhesive layer 26 described above or later can achieve an adhesive effect, regardless of whether it is conductive, it falls within the scope of protection claimed by the present invention. Furthermore, the electrical discharge machining unit 30 of the present invention can also selectively perform electrical discharge machining processes (e.g., on one or more workpieces 100) sequentially or simultaneously. Figure 5 (As shown). Among them, Figure 4 A side view diagram illustrating a process where multiple workpieces are bonded together for electrical discharge machining. Figure 5 The diagram is a top view showing the electrical discharge machining process of the electrical discharge machining apparatus of the present invention performing electrical discharge machining on multiple workpieces.

[0188] like Figures 1 to 3 As shown, the electrical discharge machining unit 30 includes at least one electrode 32, a power supply unit 34, and a fixture 36. The number of electrodes 32 may be, for example, one (e.g., ...). Figure 2 (B) Figure 2 (C) and Figure 3 (as shown in (B)) or a plurality of such processing target areas 110, used to process one or a plurality of processing target areas 110 defined on the workpiece 100 (e.g., ...). Figure 2 (A) and Figure 3(A) shows the electrical discharge machining process. Taking a plurality of electrodes 32 having a discharge segment B extending along the second direction Y as an example, these electrodes 32 are arranged parallel to each other along the first direction X or along the processing travel direction F in a linear (or strip-like) or plate-like (or sheet-like) conductive structure, such as conductive wires or foils. The number of electrodes 32 is selectively chosen according to actual needs. The distance D between these electrodes 32 in the first direction X corresponds to the cutting or thinning thickness of the workpiece 100. The transverse cross-sections of these electrodes 32 can be any shape, either the same or different from each other, such as linear or plate-like, or any symmetrical (e.g., Figure 6 The shape can be circular, square, rectangular, or asymmetrical. The power supply unit 34 is electrically connected to the electrode 32 and the workpiece 100 via electrical contacts 31. The power supply unit 34 can be a single power output or multiple power outputs to supply the first power supply P1. The power supply unit 34 can also be connected to the electrode 32 in series or parallel, as long as discharge energy can be applied to the processing target area 110 of the workpiece 100 via the electrode 32, it is suitable for use in this invention. The material of the discharge electrode 32 can be, for example, selected from the group consisting of copper, brass, molybdenum, tungsten, graphite, steel, aluminum, and zinc. The thickness of the discharge electrode 32 is approximately less than 300 μm, preferably ranging from approximately 30 μm to approximately 300 μm. However, it should be noted that although the present invention is illustrated by the example of a plurality of electrodes 32, it is not limited thereto; a single electrode, such as... Figure 2 (B) Figure 2 (C) and Figure 3 As shown in (B), it also falls within the scope of protection claimed in this invention. Since those skilled in the art should understand how to apply the technical means of this invention to a single electrode or multiple electrodes based on the disclosure of this invention and the prior art, further details are omitted here.

[0189] Please see Figures 1 to 3The fixture 36 is composed of at least two supporting members 40 and at least two retaining members 50 respectively connected in a corresponding manner. The two sides A of the electrode 32 are movably or fixedly abutted against the two supporting members 40, so that the discharge section B of the electrode 32 is suspended in the air, wherein the two supporting members 40 are separated by a distance. The dimensions of the two supporting members 40 and the height of the electrode 32 they support are not particularly limited to be the same or different, as long as the discharge section B of the electrode 32 can be suspended in the air, it is applicable to this invention. The retaining members 50 are selectively detachable or fixedly and securely connected to the supporting members 40. The retaining members 50 are disposed on a base 52, wherein the base 52 can be a structure that fixes the position of the retaining members 50, or the base 52 can be a motion mechanism that allows the retaining members 50 to move or rotate, thereby correspondingly driving the supporting members 40 to move or rotate, so that the discharge section B of the electrode 32 can move left and right reciprocally. Taking the seat 52 as an example of a motion mechanism, the motion mechanism can be, for example, any moving mechanism capable of reciprocating left and right, such as a sliding mechanism, or, for example, any rotating mechanism capable of reciprocating or cyclic rotation, such as a motor, to correspondingly drive the holding member 50 to perform moving or rotating movements. In this way, the supporting member 40 and the holding member 50 can selectively reciprocate or cyclically move together with the electrode 32, so that the electrode 32 applies discharge energy to the workpiece 100 in the discharge section B. To ensure better adhesion of the electrode 32 to the supporting member 40, the edge of the supporting member 40 selectively has a chamfer 47, such as... Figure 2 and Figure 12 As shown.

[0190] In the electrical discharge machining (EDM) process, the power supply unit 34 provides a first power supply P1 to the electrode 32 and the workpiece 100, thereby applying discharge energy to the processing target area 110 of the workpiece 100 via the discharge section B of the electrode 32. When the EDM unit 30 performs the EDM process on the processing target area 110 of the workpiece 100 along the processing travel direction (cutting / polishing direction) F, the discharge section B of the electrode 32 and the processing target area 110 of the workpiece 100 move relative to each other along the second direction Y, for example, in a reciprocating or cyclical manner. That is, one of the electrode 32 and the workpiece 100 can be fixed, while the other can move relative to each other. Alternatively, both the electrode 32 and the workpiece 100 can move relative to each other. The processing travel direction F can be, for example, perpendicular to the first direction X or the second direction Y, or inclined to the first direction X or the second direction Y. For example, taking the workpiece 100 moving relative to the electrode 32 as an example, the stage 20 of the present invention is, for example, a movable or rotatable moving stage, and moves, for example, along the first direction X, the second direction Y or the processing direction F, or rotates about the first direction X, the second direction Y or the processing direction F as the axis.

[0191] In this invention, such as Figures 1 to 3 As shown, electrodes 32 arranged parallel to each other along the first direction X can, for example, be movably surrounding two carrier members 40 spaced apart by a distance, such that the discharge section B of the electrode 32 is suspended, and can reciprocate or circulate along the second direction Y as the two carrier members 40 move. Alternatively, the electrode 32 can, for example, be fixedly connected to or surrounding two carrier members 40 spaced apart by a distance. The electrical discharge machining apparatus 10 selectively has a connection structure 35, and the connection structure 35 extends along the first direction X to connect multiple electrodes 32 arranged parallel to each other along the first direction X. The connection structure 35 can increase the structural stability of the discharge electrodes 32 during the electrical discharge machining process. Therefore, the connection structure 35 can be made of a non-conductive material to prevent multiple electrodes 32 from making electrical contact with each other. However, if the connection structure 35 is made of a conductive material, the connection structure 35 can be used as an electrical contact 31. That is, the head and tail ends of each electrode 32 are respectively connected to the same one of the two carrier members 40 (e.g., Figure 1 (as shown in A) or different (such as Figure 7 As shown), this allows the discharge section B of electrode 32 to be suspended in the air, and it can reciprocate along the second direction Y as the two supporting members 40 reciprocate. Figure 7 As shown, electrode 32 is not limited to surrounding the two support members 40; electrode 32 may also selectively span only the top side of the two support members 40.

[0192] like Figure 9 As shown in (A), in the electrical discharge machining (EDM) process, the EDM unit 30 applies discharge energy to the machining target area 110 of the workpiece 100 via the discharge section B of the electrode 32 along the machining travel direction F. Therefore, a plurality of machining grooves 120 can be formed on the machining target area 110 of the workpiece 100 along the machining travel direction F. The depth h of the machining grooves 120 increases as the EDM process progresses until the entire EDM process is completed. For example, Figure 9As shown in (A), the present invention can also selectively perform a filling process, thereby selectively filling the processing groove 120 with filler material 124, which can reduce the vibration of the workpiece 100 and maintain the original as-cut / thinning distance of the workpiece 100, and also prevent the thin sheets of the workpiece 100 after cutting or grinding from colliding with each other. The filler material 124 can be an insulating material such as air, deionized water, oil, or glue, or other suitable insulating substances as a dielectric material. However, the material of the filler material 124 of the present invention is not limited to insulating materials; any material (e.g., semi-insulating or non-insulating materials) that can be used to fill the processing groove 120 is within the scope of protection claimed by the present invention. Moreover, depending on the actual process requirements, the electrical discharge machining process and the filling process can be performed synchronously, sequentially, or alternately. For example, after forming a processing groove 120 of a certain depth and before the processing groove 120 completely penetrates the workpiece 100, the present invention can also selectively perform a filling process on the processing groove 120, such as... Figure 9 As shown in (B), for example, a dispensing step is performed on the processing groove 120, where adhesive is used as a filler material 124 to adhere to the processing surfaces on both sides of the processing groove 120. This can reduce the shaking phenomenon of the workpiece 100 caused by the formation of the processing groove 120. The adhesive can be a conductive or non-conductive adhesive, and the adhesive is not limited to partially or completely filling the processing groove 120. As long as it can achieve the bonding effect, it falls within the scope of protection claimed in this invention. Or, as... Figure 9As shown in (C), the present invention can also selectively use metal foil or metal blocks as filler material 124, and insert filler material 124 into the processing groove 120. The metal foil or metal block can be, for example, a conductive material such as copper foil or copper sheet, thereby reducing the shaking phenomenon of the workpiece 100. Similarly, the metal foil or metal block is not limited to partially or completely filling the processing groove 120, and the filler material 124 is not limited to conductive materials such as metal foil or metal block. Insulating blocks and other objects can also be selectively used as filler material 124. As long as it can achieve the filling effect, it falls within the scope of protection claimed by the present invention. In addition, the present invention can selectively apply adhesive tape to the workpiece 100 with the processing groove 120, for example, by attaching conductive or non-conductive adhesive tape 126 to both sides of the processing groove 120 of the workpiece 100. This not only provides a fastening effect to reduce the shaking of the processing target area 110 of the workpiece 100, but also, if the processing groove 120 is filled with a filler material 124 such as metal foil or metal block, the filler material 124 can also act as a support component to support both sides of the processing groove 120. This can effectively prevent the thin sheet of the workpiece 100 from cracking or being crushed by external force during or after processing. For example, if the filler material 124 is a conductive material such as metal foil or metal block, and the electrical discharge machining (EDM) process and the filling process are performed alternately, the present invention may, for example, perform an EDM process for a first period to form a portion of the processing groove 120, followed by a second filling process, for example, inserting the filler material 124 such as metal foil or metal block into the processing groove 120 and applying tape 126. Similarly, the present invention may subsequently perform a third EDM process to form another portion of the processing groove 120, followed by a fourth filling process, and so on. In this way, the processing groove 120 can be partially or completely filled. In addition, the present invention is not limited to applying discharge energy to the processing target area 110 of the workpiece 100 in the above-mentioned liquid or gaseous fluid to perform the EDM process. The EDM process of the present invention can also be performed in a vacuum environment. The vacuum environment can reduce discharge loss and impurity contamination, and can also increase the precision and controllability of the EDM process. Alternatively, the aforementioned liquid or gaseous fluids may contain, for example, oxygen or ozone. By performing the electrical discharge machining (EDM) process in an oxygen- or ozone-containing environment, not only can the EDM speed and quality be improved, but it also helps to remove carbides or residues generated on the electrode surface, thereby reducing electrode wear. In short, the EDM process of this invention can not only dry-cut the workpiece 100 in a gaseous fluid environment or a vacuum environment, but also wet-cut the workpiece 100 by immersing it in a liquid fluid tank (such as a liquid tank or a heated liquid tank) or by spraying liquid fluid onto the workpiece 100 in a wet environment.For example, the fluid described above can be selectively an electrolyte such as electrolyzed water (not shown), thereby enabling the present invention to perform a discharge processing procedure, for example, in an electrolyte environment. Since electrode 32 is electrically connected to power supply unit 34 (e.g.) Figure 1 The cathode (shown) is electrically connected to the anode of the power supply unit 34, and the workpiece 100 is electrically connected to it. Therefore, an electrolytic reaction can be generated simultaneously during the electrical discharge machining process. This invention utilizes the cathodic protection phenomenon of the electrolytic reaction to prevent the metal components of the electrode 32 from dissolving in the electrolyte during the electrical discharge machining process, thus reducing the likelihood of electrode 32 breaking. The electrolytic reaction causes the water in the electrolyte to generate hydrogen gas on the processing target area 110 of the workpiece 100. The generation of hydrogen bubbles helps to remove residues from the processing groove 120, improving the cleaning effect of the workpiece 100. Moreover, based on the principle that like charges repel each other, it prevents negatively charged residues from adhering to the electrode 32 or the processing groove 120. Although this invention uses electrolyzed water as an example of an electrolyte, any gaseous or liquid fluid that can generate an electrolytic reaction falls within the scope of protection claimed in this invention.

[0193] like Figure 10 As shown in (A) and (B), during the electrical discharge machining process, the discharge section B of electrode 32 advances along the machining travel direction F to apply discharge energy to the machining target area 110 of the workpiece 100, and the discharge section B of electrode 32 and the machining target area 110 of the workpiece 100 simultaneously move relative to each other along the second direction Y (e.g., ...). Figure 10 (A) and (B) are indicated by the hollow double arrows and single arrows, respectively. Therefore, to avoid the vibration phenomenon generated by the electrode 32 during the electrical discharge machining process, the electrical discharge machining apparatus 10 of the present invention selectively has a stabilizing member 22. The stabilizing member 22 is provided, for example, on the stage 20 or the fixture 36. The position of the stabilizing member 22 is, for example, located between the two sides A of the electrode 32. The shape of the stabilizing member 22 is not particularly limited, as long as it can reduce the vibration of the electrode 32, it can be applied to the present invention. For example, the contact surface 28 where the stabilizing member 22 contacts the electrode 32 can be, for example, a plane. By supporting, for example, the electrode 32 in a suspended state, the vibration phenomenon can be reduced. Alternatively, the contact surface 28 where the stabilizing member 22 contacts the electrode 32 can selectively have a guide groove 281, such as... Figure 10As shown in (B), the depth of the guide groove 281 is, for example, sufficient to movably accommodate the electrode 32. The number of guide grooves 281 corresponds to the number of electrodes 32, thereby maintaining the distance between the electrodes 32, reducing swaying along the first direction X, effectively stabilizing the electrodes 32 and providing a guiding effect. The guide groove 281 not only supports the suspended electrode 32, but also stabilizes the electrode 32 and provides a guiding effect when the electrode 32 moves reciprocally or cyclically relative to the workpiece 100. In addition, the stabilizing member 22 can also be optionally designed with a highly telescopic structure, thereby changing the height of the contact surface 28 between the stabilizing member 22 and the electrode 32 according to the depth of the processing groove 120. The strip structure between two adjacent guide grooves 281 of the stabilizing member 22 can also be used as a separator as described later, thereby separating multiple electrodes 32 and making them parallel to each other. The stabilizing member 22 may be made of a non-conductive material to prevent multiple electrodes 32 from making electrical contact with each other. However, if the stabilizing member 22 is made of a conductive material, it may also be used as an electrical contact 31.

[0194] In this invention, the shape of the load-bearing member 40 is not particularly limited, and it can be, for example, a plate-type structure (such as...). Figure 12 and Figure 13 (as shown) or sleeve structure (such as Figures 1 to 10 (As shown). The surface selectivity of the bearing member 40 is, for example, having a plurality of limiting grooves 42, wherein the electrode 32 is limited in the limiting grooves 42, and the electrodes 32 in different limiting grooves 42 can be electrically independent or can be connected sequentially and electrically connected to each other. In such a way... Figures 1 to 13 In the illustrated embodiment, the limiting grooves 42 are arranged parallel to each other along the first direction X with a spacing D, thereby allowing the electrodes 32 to be arranged parallel to each other along the first direction X. However, the present invention is not limited to this. Depending on the requirements of the actual electrical discharge machining process, in a feasible embodiment of the present invention, the limiting grooves 42 may also be arranged parallel to each other along the machining travel direction F, thereby allowing the electrodes 32 to be arranged parallel to each other along the machining travel direction F. The width of the limiting grooves 42 corresponds to the width of the electrodes 32. For example, the width of the limiting grooves 42 is slightly larger than the width of the electrodes 32, thereby allowing the electrodes 32 to be confined within the limiting grooves 42. The two supporting members 40 may, for example, have limiting grooves 42. If there is no need for relative movement between the electrodes 32 and the supporting members 40, for example, if the supporting members 40 do not need to rotate, the present invention may also selectively use attachment members 46 (such as...) Figure 7 and Figure 8As shown, electrode 32 is fixed in limiting groove 42. Attachment member 46 is connected to electrode 32, for example, at the edge of bearing member 40. Attachment member 46 may have a plurality of protrusions whose positions and dimensions correspond to those of limiting groove 42, or it may be adhesive. Furthermore, attachment member 46 may selectively be electrically connected to a first power supply P1 supplied by power supply unit 34 or a second power supply P2 of another power supply unit 34', wherein the second power supply P2 may be, for example, a DC power supply or radio frequency power. That is, attachment member 46 may also selectively serve as... Figure 1 Use of electrical contact 31.

[0195] Please see Figure 11 The implementation example is shown below, and please also refer to the following: Figures 1 to 10 As shown, taking the support member 40 of the fixture 36 as an example of a cylindrical sleeve structure, a plurality of limiting grooves 42 are arranged in parallel along the first direction X (i.e., the axial direction of the support member 40) and penetrate into the support member 40 along the third direction Z (i.e., the radial direction of the support member 40) to a depth H. Therefore, a single electrode or a plurality of electrodes 32 (e.g., ...) can be stacked in the same limiting groove 42. Figure 11 (As shown). The depth H of the limiting groove 42 can be determined according to actual needs. The depth H of the limiting grooves 42 is not limited to being the same for all of them; that is, the depth H of a plurality of limiting grooves 42 arranged parallel to the first direction X can also be different for each other. Taking a wraparound design of the electrode 32 as an example, the electrodes 32 are in contact with each other to form a stacked state, and are stacked in the limiting groove 42 by wrapping around the supporting member 40. Furthermore, the number of electrodes 32 in different limiting grooves 42 is not limited to being the same for all of them; that is, the number of electrodes 32 located in different limiting grooves 42 can also be different for each other. In other words, the number of electrodes 32 arranged parallel to the first direction X can be the same for all of them arranged parallel to the third direction Z, or the number of electrodes 32 arranged parallel to the first direction X can be different for all of them arranged parallel to the third direction Z. The third direction Z is, for example, perpendicular to the first direction X, that is, the radial direction Z of the supporting member 40, and parallel to the radial direction of the workpiece 100. However, depending on the actual process requirements, the electrical discharge machining process can be a vertical cut or polishing along the radial direction of the workpiece 100, or an oblique cut or polishing along the radial direction of the workpiece 100 at an angle. Therefore, when actually performing the electrical discharge machining process, the stage 20 or the fixture 36 can be adjusted, for example, to adjust the third direction Z to be parallel to the machining travel direction F.

[0196] The retaining member 50 can be selectively detachable or fixedly and securely connected to the bearing member 40. The connection configuration between the bearing member 40 and the retaining member 50 is not particularly limited, as long as it allows the bearing member to be connected to the retaining member 50, or allows the bearing member 40 to selectively move or rotate via the movement or rotation of the retaining member 50, it is applicable to this invention. Figure 2 (As shown) or other shaped sleeves, the support member 40 can be fitted onto the protrusion 53 of the retaining member 50 via the shaft hole 41. Furthermore, to reduce the time required to replace the electrode 32 in case of accidental breakage, the present invention can, for example, first fit the shaft hole 41 of the support member 40 onto a dummy support member also having a protrusion. In this way, the user can quickly remove the support member 40, which surrounds the electrode 32, from the dummy support member and fit the shaft hole 41 of the support member 40 onto the protrusion 53 of the retaining member 50, or insert the protrusion 53 of the retaining member 50 into the shaft hole 41 of the support member 40, thus quickly completing the assembly of the jig 36.

[0197] Taking slab structures as an example, such as Figure 12 and Figure 13 The different implementations shown, among which Figure 13 The perspective is perpendicular to Figure 12 The supporting member 40 includes a first sheet 44a and a second sheet 44b, and the electrode 32 is clamped between the first sheet 44a and the second sheet 44b. Figure 12 For example, electrode 32 is first wound around first sheet 44a, and second sheet 44b is then bonded to first sheet 44a. Second sheet 44b, for example, is bonded to the fitting groove of first sheet 44a, thereby providing the aforementioned limiting groove 42 to clamp electrode 32. The supporting member 40 may optionally have a through groove 43, which allows the supporting member 40 to be fitted onto the protrusion 53 of the holding member 50. The through groove 43 is not limited to single-sided or double-sided openings; any type of through groove 43 or assembly method is applicable in this invention as long as it allows the supporting member 40 and the holding member 50 to be assembled together. Figure 13 For example, electrode 32 is clamped between first sheet 44a and second sheet 44b. The supporting member 40, for example, has a slot 43, which allows it to be fitted onto the protrusion 53 of the holding member 50. The second sheet 44b can be used as a separator between the multi-layered wound electrodes 32, and the distance D between the multi-layered electrodes 32 in the first direction X can be adjusted by changing the thickness of the second sheet 44b. Alternatively, as... Figure 14In the illustrated embodiment, the supporting member 40 can be selectively connected to the retaining member 50 via a screw connection, for example, by means of a screw thread. For instance, the supporting member 40 has through holes 45, and the protrusions 53 of the retaining member 50 each have screw holes. The supporting member 40 is screwed into the screw holes of the retaining member 50 by means of a bolt 59 passing through the through holes 45. Alternatively, as... Figure 15 In the embodiment shown, the retaining member 50 may also selectively have, for example, a groove structure 57, into which the bearing member 40 is inserted to be connected to the retaining member 50.

[0198] In addition, such as Figure 16 In the illustrated embodiment, the retaining member 50 may also have, for example, a conductive structure 54. The conductive structure 54, for example, spans multiple electrodes 32 along the first direction X, thereby electrically connecting to the electrodes 32 abutting against the supporting member 40. Thus, the first power supply P1 provided by the power supply unit 34 in the aforementioned embodiment can selectively connect to the electrodes 32, for example, via the conductive structure 54; that is, the conductive structure 54 can selectively serve as... Figure 1 The electrical contact 31 is used. Additionally, an insulating structure 56 may be selectively provided between the electrodes 32 to prevent electrical contact between them. For example, such as... Figure 17 In the embodiment shown, the insulating structure 56 may be selectively disposed, for example, between the electrode 32 and the conductive structure 54. The material of the insulating structure 56 is not particularly limited, as long as it provides the aforementioned insulating effect, it is suitable for use in this invention.

[0199] Furthermore, in various embodiments of the present invention, the heights of the electrodes 32 located in different limiting grooves 42 are not necessarily the same, and the heights of the electrodes 32 located in different limiting grooves 42 may also be different. Alternatively, the heights of the electrodes 32 on different supporting members 40 are not necessarily the same, and the heights of the electrodes 32 located in different supporting members 40 may also be different. That is, as... Figure 11 As shown in the embodiment, the electrodes 32 can not only be arranged parallel to each other along the first direction X, but can also be selectively arranged parallel to each other along the third direction Z at the same height or different heights. The electrodes 32 located in the same limiting groove 42 can be stacked on top of each other or arranged in parallel.

[0200] In addition, such as Figure 11As shown, since multiple electrodes 32 located in the same limiting groove 42 are arranged parallel along the third direction Z (processing travel direction F), when these electrodes 32 arranged parallel along the third direction Z sequentially cut or polish the processing target area 110 of the workpiece 100 along the processing travel direction F, the subsequent electrode 32 will repeatedly pass through the position already passed by the preceding electrode 32. In other words, taking the processing travel direction F from top to bottom as an example, even if the preceding electrode 32 (e.g., the lower electrode) experiences a wire breakage, the subsequent electrode 32 (e.g., the upper electrode) can still replace the preceding electrode 32 in applying discharge energy. Figure 1 The processing target area 110 of the workpiece 100 shown is thus avoided by means of an electrode replacement function, which prevents adverse effects such as process interruption caused by electrode breakage.

[0201] The workpiece 100 is placed on a stage 20, which includes a clamping member 24 for fixing the workpiece 100. This clamping member 24, for example, has two plates 23 and optionally includes a support plate 21. Figure 18 As shown in (A) and (B), the plate 23 of the clamping member 24 can optionally be a stepped structure. This stepped design allows for contact with and abutment against more parts of the workpiece 100, achieving a more stable clamping effect. However, the shape of the clamping member 24 of this invention is not particularly limited; as long as it can clamp the workpiece 100, it falls within the scope of protection claimed in this invention. For example, if the workpiece 100 is a block (such as a crystal ingot), the clamping member 24 can, for example, clamp the periphery of the crystal ingot cylinder, such as... Figure 18 As shown in (A) and (B), this is to prevent rolling or displacement, and to ensure that the processing target area 110 of the workpiece 100 is located outside the clamping member 24. Alternatively, the clamping member 24 may, for example, clamp both ends of the ingot, that is, axially clamp both sides of the ingot, such as... Figure 19 As shown in (A) and (B), displacement is prevented, and the processing target area 110 of the workpiece 100 is positioned between the two clamping members 24. The clamping members 24 can be, for example, two spaced plates 23, used to clamp the workpiece 100. By ensuring that the clamping members 24 and the workpiece 100 have two or more contact surfaces, rolling or displacement of the workpiece 100 can be effectively prevented. The support plate 21 of the stage 20 or the clamping members 24 can also optionally be connected to the workpiece 100 with an adhesive layer 26, such as... Figure 19 As shown in (A) and (B), this effectively prevents the workpiece 100 from shaking (vibrating) during the electrical discharge machining process or from developing burrs before the end of the process. The adhesive layer 26, for example, is a conductive adhesive, which provides both conductivity and fixation. The adhesive layer 26 can be continuous or discontinuous on the stage 20 or the clamping member 24, such as... Figure 19(A) shows a continuous bonding between the workpiece 100 and the support plate 21 of the stage 20, or as shown in Figure 2. Figure 19 (B) shows a discontinuous adhesive layer between the workpiece 100 and the support plate 21 of the stage 20. Taking the discontinuous type as an example, the adhesive layer 26 is provided intermittently on the support plate 21 of the stage 20, and its position corresponds, for example, to the processing target area 110, that is, the adhesive layer 26 is located below the processing target area 110. However, in this invention, the position of the adhesive layer 26 is not limited to being directly below the processing target area 110; as long as it can adhere the workpiece 100, it falls within the scope of protection claimed in this invention.

[0202] like Figure 20 In the embodiment shown, the clamping member 24 can also be composed of a single plate 23 and a support plate 21, for example. The single plate 23 is used to support one side of the workpiece 100, and the support plate 21 is used to support the bottom side of the workpiece 100. In other embodiments, the clamping member 24 of the present invention may omit the support plate 21, and only the single plate 23 is located on the stage 20. In addition, the present invention can selectively use the adhesive layer 26 to bond the two walls of the processing groove 120 of the processing target area 110 of the workpiece 100, which can avoid the shaking phenomenon of the workpiece 100 during the EDM process and also avoid the formation of burrs before the end of the EDM process. The workpiece 100 is not limited to being fixed to one side of the clamping member 24 via the adhesive layer 26 at both ends of the axial direction or the radial periphery. As mentioned above, the adhesive layer 26 can be continuous or discontinuous on the workpiece 100. The adhesive layer 26 is provided on the workpiece 100 in a spaced manner, and its position is, for example, but not limited to, corresponding to the processing target area 110 of the workpiece 100.

[0203] like Figure 21 In the embodiment shown in (A), the clamping member 24 may be composed of, for example, multiple plates 23, or a combination of plates 23 and a support plate 21. It may also clamp a buffer member 27, which fixes the workpiece 100 to be processed via an adhesive layer 26. The electrical discharge machining unit 30 performs an electrical discharge machining process on the workpiece 100 on the stage 20 along the processing travel direction F (e.g., perpendicular to or parallel to the paper surface). Alternatively, the workpiece 100 may be processed together with the buffer member 27. The adhesive layer 26 may be selectively, for example, a conductive adhesive layer. The workpiece 100 may not be fixed to the buffer member 27 via the adhesive layer 26 at its axial ends or radial periphery. The buffer member 27 may also be made of a conductive material. However, since the purpose of the buffer member 27 is to allow the clamping member 24 to indirectly clamp the workpiece 100 for the electrical discharge machining process, the buffer member 27 is not limited to a specific structure or material. Anything that achieves the aforementioned purpose falls within the scope of protection claimed in this invention.

[0204] like Figure 21 In embodiments shown in (B), (C), and (D), the clamping member 24 can also, for example, fix the workpiece 100 by clamping the conductive frame 25. The electrical discharge machining unit 30 performs an electrical discharge machining process on the workpiece 100 on the stage 20 along the machining travel direction F (e.g., perpendicular to the paper plane or parallel to the paper plane), and can even perform an electrical discharge machining process on the workpiece 100 together with the conductive frame 25. The workpiece 100 is not limited to being fixed to the clamping member 24 by its axial ends or radial periphery via the conductive frame 25; as long as an electrical discharge machining process can be performed, it falls within the scope of protection claimed in this invention. Moreover, depending on the actual process requirements, the conductive frame 25 of this invention can selectively be partially attached to the periphery of the workpiece 100 (e.g., ...). Figure 21 (C) and (D) shown) or all of them are attached to the periphery of the workpiece 100 to be processed (as shown in the figure). Figure 21 (as shown in (B)).

[0205] Furthermore, to improve the efficiency of the electrical discharge machining process, the present invention can also enhance the electrical contact between the workpiece 100 and the clamping member 24, or enhance the electrical contact between the workpiece 100 and the stage 20, through a conductive gain layer. For example, Figure 22 As shown, the present invention can first form a conductive gain layer 90 on the workpiece 100 by surface modification (e.g., electrical discharge machining or laser), and then clamp the workpiece 100 with the clamping member 24. The composition of the conductive gain layer 90 depends on the composition of the workpiece 100. The formation position of the conductive gain layer 90 is, for example, corresponding to the position where the workpiece 100 is clamped (i.e., the contact surface). For example, the conductive gain layer 90 can be formed at the position where the workpiece 100 contacts the plates 23 on both sides of the clamping member 24 and / or the support plate 21 below it. In other embodiments, if the support plate 21 below the clamping member 24 is omitted, the present invention can also, for example, have the conductive gain layer 90 directly contact the stage 20. By surface modification of the workpiece 100, the present invention can improve the electrical contact between the workpiece 100 and the clamping member 24 (or the stage 20). Alternatively, the present invention can also form the conductive gain layer 90 by means of plating or coating to provide good electrical contact. Even more so, the aforementioned Figure 21(B) The conductive frame 25 can also be formed into a conductive gain layer 90 by a coating process, or it can itself be a conductive gain layer 90, to provide good electrical contact. The conductive gain layers 90 at the aforementioned locations can be, for example, made of the same or different conductive materials, as long as they provide good electrical contact, they are suitable for this invention. Furthermore, the components of the clamping member 24 of this invention, such as the plate 23 and / or the carrier plate 21, can themselves be made of conductive gain material, for example, different or the same conductive materials, such as different or the same metal materials, as long as they provide good electrical contact, they are suitable for this invention, thereby particularly improving the discharge processing efficiency of semiconductors or defective conductors awaiting processing 100. The work function of the aforementioned conductive gain layer 90 is, for example, about 4.5 eV or less, but it is not limited to this; anything that helps improve electrical contact is suitable for this invention.

[0206] Furthermore, in the electrical discharge machining (EDM) process, the EDM unit can perform EDM on the workpiece 100 on the stage 20 along with the clamping member 24 along the machining travel direction F. However, as... Figure 23 (A) and Figure 18 As shown in (A) and (B), the clamping member 24 of the present invention may, for example, include two plates 23 and a support plate 21, wherein the two plates 23 may selectively have a comb-like structure 11. For example, at least one of the two plates 23 forms a comb-like structure 11, thus becoming a comb plate. The position of the comb teeth opening 29 of the comb-like structure 11 corresponds, for example, to the position of the processing target area 110, that is, to the position of the electrode 32. However, the present invention is not limited thereto. The support plate 21 of the present invention may also selectively have a comb-like structure 11', such as... Figure 23 (B) shows the implementation configuration. If the support plate 21 is omitted, the comb-like structure 11' can also be directly formed on the platform 20, as shown below. Figure 23 (C) shows the embodiment. In other words, depending on the actual structural design requirements, the clamping member 24 or the stage 20 of the present invention may selectively have a comb-like structure, or both the clamping member 24 and the stage 20 may have a comb-like structure. The position of the comb tooth opening 29' of the comb-like structure 11' corresponds, for example, to the position of the processing target area 110. This not only securely clamps the workpiece 100 for the electrical discharge machining process, but also prevents the electrode 32 from damaging the clamping member 24 and the stage 20. Furthermore, the comb-like structure of the present invention is not limited to a specific size, material, number of comb tooth openings, or orientation. As long as the stage 20 and / or the clamping member 24 can clamp the workpiece 100 during the electrical discharge machining process, it falls within the scope of protection claimed by the present invention.

[0207] In this invention, the clamping member 24 is not limited to being fixed or detachable and located on the stage 20. Taking a detachable design as an example, the two plates 23 of the clamping member 24 can be detachably connected to each other, for example, by a lock-in structure 240, and the lower plate 23 can also be detachably connected to the stage 20, for example, by a lock-in structure 240. Both the lower plate 23 and the support plate 21 in the aforementioned figures are for load-bearing purposes, and therefore can be replaced by the support plate 21. However, for simplicity, only the plate 23 is used as an example. The clamping member 24 of this invention can adjust the distance between the two plates 23 (i.e., the width of the clamping opening) by means of the lock-in structure 240 to clamp workpieces 100 of different sizes. The lock-in structure 240 can, for example, but not limited to, include bolts 242 and nuts 244, such as... Figure 24 As shown in (A) and (B), this not only allows for the detachable clamping of the workpiece 100, but also enables the adjustment of the clamping opening width according to the dimensions of the workpiece 100. Furthermore, the locking structure 240 of this invention can be any structural design that allows the clamping member 24 to be detachably mounted on the platform 20; that is, as long as a detachable effect is achieved, it falls within the scope of protection claimed by this invention. In addition, the two plates 23 of the clamping member 24 of this invention can also selectively be connected via a snap-fit ​​structure 243, such as snap-fit ​​blocks 246 (e.g., protrusions) and snap-fit ​​holes 248 (e.g., through holes) that can be interlocked, for quick docking. For example, as... Figure 25 As shown in (A) and (B), the lower plate 23 has, for example, a snap-fit ​​block 246, while the upper plate 23 has a corresponding snap-fit ​​hole 248. This allows the two plates 23 to be easily fitted together. Then, using bolts 242 and nuts 244, the upper plate 23 can be securely pressed against the workpiece 100. This not only achieves rapid disassembly and installation but also increases structural strength. Furthermore, as... Figure 24 (A) and (B) and Figure 25 In embodiments shown in (A) and (B), the two plates 23 of the clamping member 24 may selectively have a comb-like structure 11, and the stage 20 may also selectively have a comb-like structure 11'. The position of the comb teeth opening 29' of the comb-like structure 11' corresponds, for example, to the position of the processing target area 110. This not only securely clamps the workpiece 100 for the electrical discharge machining process, but also prevents damage to the plates 23 of the clamping member 24 or the stage 20.

[0208] In addition, such as Figure 26 As shown, the radial cross-section of the workpiece 100 is not limited to a circle; it can be of any shape, such as a circle with a planar region 13. The workpiece 100 can be selectively connected to the stage 20 via the planar region 13 (e.g., ...). Figure 26(as shown in (A) and (C)), or connected to the clamping member 24 via planar region 13 (as shown in (A)). Figure 26 (As shown in (B)). This invention is not limited to using the clamping member 24 in conjunction with the stage 20 to clamp the workpiece 100 (e.g. Figure 26 As shown in (A) and (B), the present invention can also, for example, omit the clamping member 24 and directly clamp the workpiece 100 to be processed with the stage 20 (as shown in (A) and (B)). Figure 26 (As shown in (C) and (D)), or the workpiece 100 is held by a support plate (not shown) on the stage 20. Where the workpiece 100 is held on two or more sides, whether by the clamping member 24 and / or the stage 20, the workpiece 100 can be securely held and rolling or displacement can be prevented. The clamping member 24 or the stage 20 (or the support plate on the stage 20) of the present invention may selectively have a shape corresponding to the shape of the workpiece 100, for example, having an arcuate groove 15 to correspond to the arcuate contour of the workpiece 100, such as... Figure 26 As shown in (A) to (D). In other words, when the clamping member 24 clamps the workpiece 100, the outer shape of the clamping member 24 can be attached to the outer shape of the workpiece 100 (e.g., conformal attachment) to obtain a better clamping effect, and can further prevent the workpiece 100 from rolling or displacing during the electrical discharge machining process.

[0209] In other feasible embodiments, the electrical discharge machining unit 30 of the present invention can, for example, drive the discharge sections B of multiple electrodes 32 to move reciprocally or cyclically by reciprocating or cyclically rotating two or more support members 40. The connection configuration between the support members 40 and the electrodes 32 can be as follows: Figure 27 In the embodiments shown in (A) and (B), each electrode 32 surrounds four support members 40. Figure 27 These are schematic diagrams illustrating two embodiments of the present invention in which electrodes are arranged in parallel using multiple supporting members. Figure 27 (A) The electrodes 32 are arranged parallel to each other along the machining travel direction F, so that multiple electrodes 32 can sequentially perform electrical discharge machining on a single machining target area 110. Figure 27(B) In this configuration, electrodes 32 are arranged parallel to each other along the first direction X, allowing multiple electrodes 32 to simultaneously perform electrical discharge machining on a plurality of processing target areas 110. These electrodes 32 share two of the four support members 40, so the two sides A of these electrodes 32 are in contact with each other in a stacked state and move together against the two shared support members 40. The remaining support members 40 are arranged in pairs at different heights, so that the electrodes 32 are arranged parallel to each other at a certain interval. Thus, when the support members 40 reciprocate or circulate, the discharge section B of these electrodes 32 will also be displaced relative to the workpiece 100, and will be located at different heights by means of the paired support members 40 at different heights, that is, arranged parallel to each other at the interval. The two shared support members 40 may reciprocate or circulate synchronously at the same speed, so the reciprocating or circulating speed of these electrodes 32 along the second direction Y will also be the same.

[0210] In other equally feasible embodiments, the electrical discharge machining unit 30 of the present invention can, for example, drive the discharge sections B of the multiple electrodes 32 to move reciprocally or cyclically by reciprocating or cyclically rotating two support members 40. For example, the configuration of the support members 40 and the electrodes 32 can be as follows: Figure 28 In embodiments shown in (A) and (B), the two sides A of these electrodes 32 are in contact with each other to form a stacked state and are movably abutted against the two support members 40. The discharge sections B of these electrodes 32 are arranged parallel to each other at a distance by the partition posts 33. Thus, when the support members 40 reciprocate or rotate cyclically, the discharge sections B of these electrodes 32 are also displaced relative to the workpiece 100 and are separated by the partition posts 33 and arranged parallel to each other. The electrodes 32 are movably abutted against the partition posts 33. The position of the partition posts 33 is fixed, but can be a fixed or rolling design, and has a limiting groove to serve as a guide post. The partition posts 33 can also be selectively made of conductive material, so that the electrodes 32 can be electrically connected to the power supply unit 34 through the partition posts 33; that is, the partition posts 33 can also be selectively used as... Figure 1 The electrical contact 31 shown is used. Furthermore, the separator 33 can also be made of insulating material to prevent electrical connection between the electrodes 32. The two supporting members 40 rotate synchronously or cyclically at the same speed, so the electrodes 32 will also move at the same speed along the second direction Y.

[0211] In addition, such as Figure 29 In embodiments shown in (A) and (B), the electrical discharge machining unit 30 selectively has an adjustable tension value, and for example, by causing relative displacement between the two load-bearing members 40 or the two holding members 50 (e.g. Figure 29(As shown by the double arrows on the lower left and right sides of (A) and (B), for example, moving them towards or away from each other, thereby adjusting the tension value of electrode 32. Figure 29 As shown in (A) and (B), the electrical discharge machining unit 30 further includes a force measurement unit 60, such as a tension meter, for measuring the tension value of the electrode 32. Figure 29 As shown in (A) and (B), the electrical discharge machining apparatus further includes a vibration measurement unit 62 for measuring the vibration value of the electrode 32.

[0212] like Figure 29 As shown in (A) and (B), the electrical discharge machining unit 30 further includes a slag removal unit 64. When the electrical discharge machining unit 30 performs an electrical discharge machining process on the workpiece 100, the slag removal unit 64 provides one or more external forces to remove the residue generated by the electrode 32 applying discharge energy to the workpiece 100. The direction or position of the external force generated by the slag removal unit 64 is adjusted to correspond to the shape of the workpiece 100, so that the direction or position of the external force corresponds to the discharge section B of the electrode 32. The slag removal unit 64 can be, for example, an airflow generator, a waterflow generator, an ultrasonic generator, a piezoelectric oscillator, or a magnetic force generating component. The external force can be, for example, airflow, waterflow, ultrasonic oscillation, piezoelectric oscillation, attraction, or magnetism. The slag removal unit 64 is not limited to being disposed on the fixture 36 and the stage 20, but can even be disposed around the discharge section B of the electrode 32. Taking the slag removal unit 64 as an example, which is an ultrasonic generator or a piezoelectric oscillator, the slag removal unit 64 can be disposed on the fixture 36 and the stage 20, for example. By directly generating external force to act on the fixture 36 and the stage 20, the external force generated by the slag removal unit 64 can also cause the fixture 36, the workpiece 100, or the electrode 32 to vibrate, and for example, vibrate simultaneously, which can provide an auxiliary effect in removing residue. In addition, as described above, the present invention can selectively apply discharge energy to the processing target area 110 of the workpiece 100 in a liquid or gaseous fluid to perform a discharge processing procedure. Taking the liquid or gaseous fluid as containing oxygen or ozone as an example, the ultrasonic generator or piezoelectric oscillator in the slag removal unit 64 of the present invention can not only cause the stage 20, the workpiece 100, and the electrode 32 to vibrate, but can also, for example, cause the oxygen or ozone in the fluid to generate tiny bubbles. However, the present invention is not limited to this. For example, it can introduce bubbles containing oxygen or ozone into liquid or gaseous fluids to make the fluid contain tiny bubbles. Furthermore, the present invention can selectively use ultrasonic generators, piezoelectric oscillators, or various feasible methods such as fluid velocity pressure differences to change the internal and external pressure differences of these bubbles, thereby causing them to implode, which facilitates the electrical discharge machining process.

[0213] like Figure 29As shown in (B), the slag removal unit 64 of the present invention can also selectively adjust the direction or position of the applied external force according to the shape of the workpiece 100 to remove the residue generated by the discharge energy applied to the workpiece 100 by the electrode 32. For example, taking the slag removal unit 64 as a water flow generator that can spray water to remove residue as an example, the slag removal unit 64 is, for example, a nozzle 65 with multiple movable positions, and the direction of water spray can be adjusted according to the shape of the workpiece 100. For example, if the workpiece 100 is a crystal ingot, the multiple nozzles 65 of the slag removal unit 64 are distributed on the arc surface of the crystal ingot, and are selectively distributed on both sides of the arc surface of the crystal ingot. Furthermore, the multiple nozzles 65 of the slag removal unit 64 can also, for example, selectively adjust the shape of the arc or the position of the nozzle according to the real-time depth position of the discharge machining, thereby achieving the effect of dynamically adjusting the water spray according to the shape of the workpiece 100. Similarly, although the above example only uses the slag discharge unit 64 as a water flow generator, those skilled in the art should understand how to modify any feasible slag discharge unit 64 to achieve the effect of the dynamic water spray design of the present invention or to achieve the effect of dynamically adjusting the water spray according to the shape of the workpiece 100. Therefore, it will not be described in detail here.

[0214] In other equally feasible embodiments, such as Figure 29As shown in (A) and (B), the electrical discharge machining unit 30 of the present invention may also selectively include, for example, a heat source supply source 70, to provide a heat source to the workpiece 100 before, during, or after the electrical discharge machining process performed by the electrical discharge machining unit 30, thereby partially (locally) heating or heating the workpiece 100 as a whole. That is, the heat source supply source 70 can provide energy before or during the electrical discharge machining process to increase the efficiency of the electrical discharge machining process, and can also provide repair, polishing, and annealing effects after the electrical discharge machining process. The heat source supply source 70 may be, for example, one or more of a laser unit, a microwave unit, a radio frequency unit, or an infrared light source. By raising the temperature of the workpiece 100 (such as a solid structure), its material brittleness can be reduced and the roughness of its cut or thinned surface can be reduced to reduce unnecessary cracks or crack expansion caused by thermal shock. In addition, if multiple identical or different heat source supply sources 70 are used, by raising the temperature of the workpiece 100, the absorption rate of electromagnetic energy can be mutually enhanced, thereby forming a positive cycle. For example, taking the heat source supply 70 as a laser unit and a microwave unit, the laser energy provided by the heat source supply 70 (laser unit) can generate free electrons in the processing target area 110 of the workpiece 100. The generation of these free electrons can absorb more microwave energy provided by the heat source supply 70 (microwave unit) compared to other areas (non-processing target area), thus raising the temperature of the processing target area 110. Since the temperature rise helps the processing target area 110 absorb more laser energy to generate more free electrons, and absorb more electromagnetic energy provided by the microwave unit (such as microwave or radio frequency radiation source), a positive cycle is formed.

[0215] In short, such as Figure 30 As shown, the present invention can employ various methods to make the discharge section B of electrode 32 and the processing target area 110 of workpiece 100 move relative to each other along the processing direction F. The first method is that workpiece 100 moves along the processing direction F while electrode 32 remains stationary in the processing direction F. The second method is that electrode 32 moves along the processing direction F while workpiece 100 remains stationary in the processing direction F. The third method is that electrode 32 and workpiece 100 move in opposite directions along the processing direction F.

[0216] Similarly, the present invention can also employ various methods to move the discharge section B of electrode 32 relative to the processing target area 110 of workpiece 100 along the second direction Y. The first method is that the workpiece 100 moves along the second direction Y while the electrode 32 remains stationary in the second direction Y. The second method is that the electrode 32 moves along the second direction Y while the workpiece 100 remains stationary in the second direction Y. The third method is that the electrode 32 and the workpiece 100 move in opposite directions along the second direction Y. In the second method, where the discharge section B and the processing target area 110 move relative to each other along the second direction Y, the present invention can also, for example, use a jig 36 to reciprocate or cyclically rotate the electrode 32, causing the electrode 32 to move left and right (reciprocating) or continuously (cyclically), or the electrode 32 can be fixed on the jig 36, but the electrode 32 can be indirectly moved by moving the jig 36 left and right (reciprocating) along the second direction Y as shown in the figures using the base 52.

[0217] It should be noted, however, that while the present invention lists various movement methods for performing electrical discharge machining (EDM) processes, this is not intended to limit the invention. For example, the scope of protection claimed by the present invention may also cover situations where the workpiece 100 moves along the machining travel direction F while the electrode 32 remains stationary in both the machining travel direction F and the second direction Y, or where the electrode 32 moves along the machining travel direction F while the workpiece 100 remains stationary in both the machining travel direction F and the second direction Y. That is, any movement method that allows for EDM processes falls within the scope of protection claimed by the present invention.

[0218] In addition, in this invention, the technical means by which the fixture 36 reciprocates or cyclically rolls the electrode 32 can be employed as follows: Figure 30 and Figure 31 As shown, the electrode 32 may, for example, surround (cross over both sides) the two fixtures 36 or cross over the two fixtures 36 on only one side. The two fixtures 36 are rotatably mounted on the base 52, and the two fixtures 36 are connected to two motors 58, for example, via two couplings 55, so that the two fixtures 36 can rotate correspondingly by the operation of the two motors 58, and the electrode 32 can reciprocate or circulate along the second direction Y. Since the discharge section B of the electrode 32 is suspended, the present invention selectively includes a tension control module 66 (e.g., Figure 31 As shown, it includes, for example, a tension measuring unit 60 and a controller 68. The tension measuring unit 60 measures the tension value of the electrode 32. The controller 68 is electrically connected to two motors 58, thereby controlling the two motors 58 according to the tension value of the electrode 32, so that the two motors 58 rotate at the same speed, thereby adjusting the tension value of the electrode 32, so that the electrode 32 maintains a specified tension value when moving along the second direction Y. In addition, the present invention can also calculate, for example, the time for the two motors 58 to exchange their rotation directions based on the length and moving speed of the electrode 32, thereby achieving the effect of reciprocating movement of the electrode 32.

[0219] like Figure 32 As shown in the embodiment, the electrical discharge machining apparatus of the present invention may optionally include an orientation correction component 88, used to adjust the relative orientation of the electrode 32 and the workpiece 100 to correct the machining direction F of the electrode 32 when the machining travel direction F of the electrode 32 deviates or is offset. For example, the orientation correction component 88 may be a telescopic push rod (e.g., a manual or electric telescopic push rod), which, by pushing the stage 20, the electrode 32, or other components in the electrical discharge machining apparatus that can change the relative orientation of the electrode 32 or the workpiece 100, can achieve, for example, the effect of adjusting the relative orientation of the electrode 32 and the workpiece 100 along the first direction X. For example, the present invention may use a detection component 89 to detect in real time whether the machining travel direction F of the electrode 32 has deviated. Among them, the detection component 89 is, for example, a discharge change detection component or a photoelectric detection component or an image detection component with a light emitter and a light receiver, used to know whether the processing direction F of the electrode 32 has shifted by means of light interruption or light intensity change.

[0220] In summary, the electrical discharge machining apparatus of the present invention has the following advantages:

[0221] (1) The fixture is composed of at least two load-bearing components and at least two holding components respectively connected together. The quick-release design can greatly reduce the time required to replace the electrodes and adjust the tension of the discharge electrodes.

[0222] (2) It has a slag removal unit that can provide external force to one or more processing target areas, and the direction or position of the external force can be dynamically adjusted according to the shape of the workpiece to be processed, which helps to remove the residue generated by the electrical discharge machining process.

[0223] (3) The clamping component has a variety of clamping modes. The comb-like structure can firmly clamp the workpiece, effectively solving the problem that traditional electrical discharge machining technology cannot cut the overlapping area between the clamping component and the workpiece. Furthermore, the locking structure can also achieve the functions of disassembly and adjustment.

[0224] (4) The orientation correction component can correct the machining direction of the electrode and the workpiece, thereby avoiding deviation of the machining direction.

[0225] (5) The clamping parts or stage form a comb-like structure, which helps to carry out the electrical discharge machining process and can correspondingly avoid damage.

[0226] (6) The stabilizing component can reduce electrode jitter, can also serve as a guide post, and can be used as an electrical contact.

[0227] (7) The heat source can reduce the unnecessary cracks or crack expansion caused by thermal shock, and can also form a positive cycle to help the electrical discharge machining process.

[0228] (8) The conductive gain layer can improve the electrical contact between the workpiece and the clamping part or the stage.

[0229] (9) The adhesive layer can prevent the workpiece from shaking during the EDM process and can also prevent burrs from forming before the EDM process ends. In addition, the conductive adhesive layer can provide electrical contact between the workpiece and the clamping part or the stage.

[0230] The above description is merely illustrative and not restrictive. Any equivalent modifications or alterations made without departing from the spirit and scope of this invention should be included in the appended claims.

Claims

1. An electrical discharge machining apparatus, characterized in that, At least includes: A stage for supporting at least one workpiece to be processed, wherein the stage further includes a clamping member for securing the workpiece, wherein the clamping member has at least one plate having a comb-like structure; and An electrical discharge machining (EDM) unit is used to perform an EDM process on a target area of ​​a workpiece on a workpiece on a workpiece on a workpiece along a machining travel direction. The EDM unit includes: At least one electrode; A fixture, comprising at least two supporting members and at least two retaining members respectively connected in a corresponding manner, wherein two sides of an electrode abut against the two supporting members respectively, such that a discharge section of the electrode is suspended, wherein the discharge section of the electrode extends along a second direction perpendicular to a first direction; and A power supply unit provides a first power source to the electrode and the workpiece during the electrical discharge machining process, so as to apply a discharge energy to the processing target area of ​​the workpiece through the discharge section of the electrode. When the electrical discharge machining unit performs the electrical discharge machining process along the processing travel direction, the discharge section of the electrode and the processing target area of ​​the workpiece move relative to each other along the second direction. The discharge section of the electrode and the processing target area of ​​the workpiece move relative to each other in a reciprocating or cyclic manner along the second direction. The two supporting members and the two holding members move reciprocating or cyclically together with the electrode, so that the electrode applies the discharge energy to the workpiece through the discharge section.

2. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining unit adjusts the tension value of the electrode by causing relative displacement between the two support members or the two holding members.

3. The electrical discharge machining apparatus as described in claim 1, characterized in that, It also includes a stabilizing component for stabilizing the movement of the electrode relative to the workpiece.

4. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrode can be linear or plate-shaped.

5. The electrical discharge machining apparatus as described in claim 1, characterized in that, The platform moves along the first direction, the second direction, or the processing direction.

6. The electrical discharge machining apparatus as described in claim 1, characterized in that, The stage rotates around the first direction, the second direction, or the processing direction.

7. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining apparatus also includes a slag removal unit. When the electrical discharge machining unit performs the electrical discharge machining procedure on the workpiece, the slag removal unit provides an external force to remove the residue generated by the electrode applying the discharge energy to the workpiece.

8. The electrical discharge machining apparatus as described in claim 7, characterized in that, The direction or position of the external force provided by the slag removal unit is dynamically adjusted according to the shape of the workpiece to remove the residue.

9. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining apparatus also includes a force measurement unit for measuring the tension value of the electrode.

10. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining apparatus also includes a vibration measurement unit for measuring the vibration value of the electrode.

11. The electrical discharge machining apparatus as described in claim 1, characterized in that, The power supply unit of the electrical discharge machining unit further includes providing a second power source to the electrode, thereby providing a DC power source or a radio frequency power source to the electrode.

12. The electrical discharge machining apparatus as described in claim 1, characterized in that, The workpiece to be processed has a planar area and is connected to the stage or the clamping member through the planar area.

13. The electrical discharge machining apparatus as described in claim 1, characterized in that, The shape of the clamping component is attached to the shape of the workpiece.

14. The electrical discharge machining apparatus as described in claim 1, characterized in that, The platform has a comb-like structure.

15. The electrical discharge machining apparatus as described in claim 1, 12, or 13, characterized in that, The platform is connected to the clamping member through a locking structure.

16. The electrical discharge machining apparatus as described in claim 1, 12, or 13, characterized in that, The clamping component comprises two plates that are connected to each other via a snap-fit ​​structure.

17. The electrical discharge machining apparatus as described in claim 1, 12, or 13, characterized in that, The clamping component has two or more contact surfaces with the workpiece.

18. The electrical discharge machining apparatus as described in claim 1, 12, or 13, characterized in that, The platform or clamping element is connected to the workpiece by an adhesive layer.

19. The electrical discharge machining apparatus as described in claim 18, characterized in that, The adhesive layer is discontinuously applied to the platform or the clamping member.

20. The electrical discharge machining apparatus as described in claim 18, characterized in that, The adhesive layer is a conductive adhesive.

21. The electrical discharge machining apparatus as described in claim 1, characterized in that, The clamping member axially supports one side of the workpiece to be processed, and the discharge energy forms a processing groove in the processing target area of ​​the workpiece to be processed by an adhesive layer to bond the two walls of the processing groove.

22. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining unit performs the electrical discharge machining process on the workpiece on the platform along with the clamping component in the machining travel direction.

23. The electrical discharge machining apparatus as described in claim 1, characterized in that, The clamping member holds a buffer component, and the buffer component fixes the workpiece to be processed through a conductive adhesive layer. The electrical discharge machining unit performs the electrical discharge machining process on the workpiece to be processed on the platform along the processing travel direction.

24. The electrical discharge machining apparatus as described in claim 1, characterized in that, The clamping member holds a conductive frame to fix the workpiece, and the electrical discharge machining unit performs the electrical discharge machining process on the workpiece on the platform along the machining travel direction.

25. The electrical discharge machining apparatus as described in claim 1, characterized in that, The stage, the clamping member, or the workpiece further includes a conductive gain layer to improve the electrical contact between the workpiece and the stage or between the workpiece and the clamping member.

26. The electrical discharge machining apparatus as described in claim 1, characterized in that, It also includes a heat source supply for providing a heat source to the workpiece before, during or after the electrical discharge machining process.

27. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two load-bearing components are either a plate structure or a sleeve structure.

28. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two load-bearing components each include a first sheet and a second sheet, and the electrode is clamped between the first sheet and the second sheet.

29. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two supporting members each have a through groove, and the two retaining members each have a protrusion corresponding to the through groove. The two supporting members are connected to the protrusions of the two retaining members by the through groove.

30. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two supporting members each have a through hole, and the two retaining members each have a screw hole. The two supporting members are screwed into the screw holes of the two retaining members by passing a bolt through the through hole.

31. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two holding members each have a groove structure, and the two bearing members are inserted into the groove structure of the two holding members to be correspondingly connected to the two holding members.

32. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two holding members each have a conductive structure, which is electrically connected to the electrode that abuts against the two supporting members.

33. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two holding members simultaneously fix the two bearing members and the electrode.

34. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining unit also includes an attachment member, which is connected to the electrode at the edge of the two supporting members.

35. The electrical discharge machining apparatus as described in claim 34, characterized in that, The attachment component is electrically connected to the first power source or a second power source of the power supply unit.

36. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two ends of the electrode are respectively connected to the same or different of the two supporting components.

37. The electrical discharge machining apparatus as described in claim 1, characterized in that, The edges of the two load-bearing components have chamfered corners.

38. The electrical discharge machining apparatus as described in claim 1, characterized in that, The work to be processed on the platform is a semiconductor ingot or wafer.

39. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining device sequentially or simultaneously cuts or polishes the workpiece carried by the platform during the electrical discharge machining process.

40. The electrical discharge machining apparatus as described in claim 1, characterized in that, The workpiece to be processed is formed by electrically bonding together multiple workpieces.

41. The electrical discharge machining apparatus as described in claim 1, characterized in that, The discharge energy forms a processing groove in the processing target area of ​​the workpiece, and the processing groove is filled with a filler material.

42. The electrical discharge machining apparatus as described in claim 1, characterized in that, The discharge energy forms a processing groove in the processing target area of ​​the workpiece, and an adhesive tape is attached to both sides of the processing groove to reduce the shaking phenomenon of the processing target area of ​​the workpiece.

43. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining process applies the discharge energy to the target area of ​​the workpiece in a fluid.

44. The electrical discharge machining apparatus as described in claim 43, characterized in that, The fluid contains ozone or oxygen.

45. The electrical discharge machining apparatus as described in claim 43, characterized in that, The fluid contains air bubbles.

46. ​​The electrical discharge machining apparatus as described in claim 45, characterized in that, The bubble undergoes an implosion during the electrical discharge machining process due to an internal and external pressure difference.

47. The electrical discharge machining apparatus as described in claim 45, characterized in that, The bubble contains ozone or oxygen.

48. The electrical discharge machining apparatus as described in claim 43, characterized in that, The fluid in question is an electrolyte.

49. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining process applies the discharge energy to the target area of ​​the workpiece in a vacuum environment.

50. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining apparatus further includes an ultrasonic generator or a piezoelectric oscillator to cause the stage, the workpiece, and the electrode to oscillate.

51. The electrical discharge machining apparatus as described in claim 43, characterized in that, The electrical discharge machining apparatus further includes an ultrasonic generator or a piezoelectric oscillator to cause the stage, the workpiece, the electrode, or the fluid to vibrate.

52. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrode is a plurality of electrodes, and the plurality of electrodes are arranged in parallel along the first direction.

53. The electrical discharge machining apparatus as described in claim 1, characterized in that, It also includes an orientation correction component, which adjusts the relative orientation of the electrode and the workpiece to correct the machining direction when the machining direction of the electrode is deviated.

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