A detection optical system
By using a multi-reflective surface design in the detection optical system, the scanning field of view of the MEMS galvanometer is expanded, solving the problem of limited field of view in the prior art and achieving a wider scanning range.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- RAYTRON(WUXI) TECH CO LTD
- Filing Date
- 2022-06-17
- Publication Date
- 2026-05-12
AI Technical Summary
In existing technologies, the scanning field of view of MEMS galvanometers is limited, which cannot meet the application requirements of some scenarios.
The detection optical system design includes a transmitting component, a galvanometer, a first reflective element, and a second reflective element. The galvanometer reflects the light beam to multiple reflective surfaces, thereby expanding the scanning field of view.
It expands the scanning field of view, enabling scanning and detection of a larger target area.
Smart Images

Figure CN117289239B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of optical systems, and in particular to a detection optical system. Background Technology
[0002] The application of micro-electro-mechanical system (MEMS) galvanometers in lidar enables rapid scanning of target areas. However, current technologies limit the scanning field of view of such galvanometers, preventing the achievement of large field-of-view scanning and thus failing to meet the application requirements of some scenarios. Summary of the Invention
[0003] The purpose of this invention is to provide a detection optical system that increases the scanning field of view.
[0004] To achieve the above objectives, the present invention provides the following technical solution:
[0005] A detection optical system includes a transmitting component, a galvanometer, a first reflecting element, a second reflecting element, and a receiving component, wherein the receiving component is used to receive light emitted by the detection optical system to the outside world and reflected back from the outside world;
[0006] The transmitting component is used to emit a first beam and a second beam, respectively, so that the first beam and the second beam are incident on the galvanometer, the first beam is reflected by the galvanometer and then incident on the first reflecting element, and the second beam is reflected by the galvanometer and then incident on the second reflecting element.
[0007] The first reflective element includes at least two first reflective surfaces for reflecting light, and the light reflected by each first reflective surface has a different field of view. The second reflective element includes at least one second reflective surface for reflecting light, and the field of view of the light reflected by the second reflective surface is between the field of view of the light reflected by two adjacent first reflective surfaces, such that the combined field of view of the light reflected by each first reflective surface and the field of view of the light reflected by the second reflective surface is greater than the field of view of the light reflected by the galvanometer.
[0008] Preferably, the light reflected from each of the first reflective surfaces has a different field of view in the first axis, and the field of view of the light reflected from the second reflective surface in the first axis is between the field of view of the light reflected from two adjacent first reflective surfaces in the first axis, such that the combined field of view of the light reflected from each of the first reflective surfaces and the field of view of the light reflected from the second reflective surface in the first axis is greater than the field of view of the light reflected from the galvanometer in the first axis.
[0009] Preferably, the first axial direction is the horizontal direction corresponding to the horizontal vibration of the galvanometer or the vertical direction corresponding to the vertical vibration of the galvanometer.
[0010] Preferably, the first reflective element includes a first reflective surface located in the middle, a first reflective surface located on the left side, and a first reflective surface located on the right side, and the second reflective element includes a second reflective surface located on the left side and a second reflective surface located on the right side;
[0011] The field of view of the light emitted by the second reflective surface located on the left is between the field of view of the light reflected by the first reflective surface located in the middle and the field of view of the light reflected by the first reflective surface located on the left.
[0012] The field of view of the light emitted by the second reflective surface on the right is between the field of view of the light reflected by the first reflective surface in the middle and the field of view of the light reflected by the first reflective surface on the right.
[0013] Preferably, the normal of the first reflective surface located on the left is biased to the left, and the normal of the first reflective surface located on the right is biased to the right.
[0014] Preferably, the normal of the second reflective surface located on the left is biased to the left, and the normal of the second reflective surface located on the right is biased to the right.
[0015] Preferably, the field of view of the detection optical system is equal to (the mechanical half-angle of the galvanometer + the rotation angle of the outermost first reflecting surface of the first reflecting element around the axis) × 4.
[0016] Preferably, the first reflecting element is a prism having at least two surfaces, the surfaces of which form the first reflecting surface; or the second reflecting element is a prism having at least one surface, the surfaces of which form the second reflecting surface.
[0017] Preferably, it includes at least two receiving components, each of which receives light emitted by the detection optical system and reflected back from different directions.
[0018] Preferably, it further includes a first beam splitter and a second beam splitter, and the receiving component includes a first receiving component and a second receiving component;
[0019] The first beam emitted by the transmitting component passes through the first beam splitter and is then incident on the galvanometer. The light returning from the outside is reflected by the first reflecting element and the galvanometer in sequence and then incident on the first beam splitter. The first beam splitter is used to separate the returning light from the first beam emitted by the transmitting component, so that the returning light is incident on the first receiving component.
[0020] The second beam emitted by the transmitting component passes through the second beam splitter and is then incident on the galvanometer. The light returning from the outside is reflected by the second reflector and the galvanometer in sequence and then incident on the second beam splitter. The second beam splitter is used to separate the returning light from the second beam emitted by the transmitting component, so that the returning light is incident on the second receiving component.
[0021] As can be seen from the above technical solution, the detection optical system provided by the present invention includes a transmitting component for emitting a first light beam and a second light beam, which are respectively incident on a galvanometer. The first light beam is reflected by the galvanometer and then incident on a first reflecting element, and the second light beam is reflected by the galvanometer and then incident on a second reflecting element. The first reflecting element includes at least two first reflecting surfaces for reflecting light, and the light reflected by each first reflecting surface has a different field of view. The second reflecting element includes at least one second reflecting surface for reflecting light, and the field of view of the light reflected by the second reflecting surface is between the field of view of the light reflected by two adjacent first reflecting surfaces, such that the combined field of view of the light reflected by each first reflecting surface and the field of view of the light reflected by the second reflecting surface is greater than the field of view of the light reflected by the galvanometer. A receiving component is used to receive light emitted by the detection optical system and then reflected back from the outside. The detection optical system of the present invention can emit light toward the target area by oscillating the galvanometer to scan and detect the target area. The first and second reflective elements are used to make the field of view of the light emitted by the detection optical system larger than the field of view of the galvanometer itself, thereby expanding the scanning field of view. Attached Figure Description
[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0023] Figure 1 This is a schematic diagram of a detection optical system provided in an embodiment of the present invention;
[0024] Figure 2 for Figure 1 The diagram shows the field of view of the detection optical system.
[0025] Figure 3 A schematic diagram of a first reflective element provided in an embodiment of the present invention;
[0026] Figure 4 This is a schematic diagram of a second reflective element provided in an embodiment of the present invention;
[0027] Figure 5 A schematic diagram of a detection optical system provided in another embodiment of the present invention;
[0028] Figure 6-1 This is a schematic diagram of a beam splitter element provided in an embodiment of the present invention;
[0029] Figure 6-2 for Figure 6-1 The optical path diagram of the beam splitter shown is as follows;
[0030] Figure 7-1 This is a schematic diagram of a beam-splitting element provided in another embodiment of the present invention;
[0031] Figure 7-2 for Figure 7-1 The optical path diagram of the beam splitter shown is as follows;
[0032] Figure 8 A schematic diagram of a detection optical system provided in another embodiment of the present invention;
[0033] Figure 9 for Figure 8 The diagram shows the field of view of the detection optical system.
[0034] The reference numerals in the accompanying drawings include:
[0035] Galvanometer-100, first reflective element-101, second reflective element-102, first transmitting assembly-103, second transmitting assembly-104, first reflecting surface on the left-side-106, first reflecting surface in the middle-side-107, first reflecting surface on the right-side-108, second reflecting surface on the left-side-109, second reflecting surface on the right-side-110, receiving assembly-111;
[0036] The field of view of the light reflected by the first reflecting surface is -201, and the field of view of the light reflected by the second reflecting surface is -202.
[0037] First beam splitter - 112, second beam splitter - 113, first receiving component - 114, second receiving component - 115, target object - 116;
[0038] First high-reflectivity coating - 601, light-passing aperture - 611, matting treatment area - 621;
[0039] First antireflective coating - 602, second high reflective coating - 612, second antireflective coating - 622. Detailed Implementation
[0040] To enable those skilled in the art to better understand the technical solutions of this invention, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this invention.
[0041] This embodiment provides a detection optical system, including a transmitting component, a galvanometer, a first reflecting element, a second reflecting element, and a receiving component. The receiving component is used to receive the light emitted by the detection optical system to the outside world and reflected back from the outside world.
[0042] The transmitting component is used to emit a first beam and a second beam, respectively, so that the first beam and the second beam are incident on the galvanometer, the first beam is reflected by the galvanometer and then incident on the first reflecting element, and the second beam is reflected by the galvanometer and then incident on the second reflecting element.
[0043] The first reflective element includes at least two first reflective surfaces for reflecting light, and the light reflected by each first reflective surface has a different field of view. The second reflective element includes at least one second reflective surface for reflecting light, and the field of view of the light reflected by the second reflective surface is between the field of view of the light reflected by two adjacent first reflective surfaces, such that the combined field of view of the light reflected by each first reflective surface and the field of view of the light reflected by the second reflective surface is greater than the field of view of the light reflected by the galvanometer.
[0044] When a light beam is incident on a galvanometer, the direction of the beam reflected from the galvanometer is changed by the oscillation of the galvanometer. Based on this, the detection optical system can emit light toward the target area and scan and detect the target area.
[0045] The first beam emitted by the transmitting component is incident on the galvanometer, which reflects the first beam to the first reflecting element. The first beam is then reflected by the first reflecting element and emitted again. The field of view of the beam reflected by each of the first reflecting surfaces of the first reflecting element is different.
[0046] The second beam emitted by the transmitting component is incident on the galvanometer, which reflects the second beam to the second reflecting element. The second beam is then reflected by the second reflecting element and emitted again. The field of view of the beam reflected by the second reflecting surface of the second reflecting element lies between the field of view angles of the light reflected from two adjacent first reflecting surfaces of the first reflecting element. This ensures that the combined field of view angles of the light reflected from each of the first reflecting surfaces and the second reflecting surface is greater than the field of view angle of the light reflected by the galvanometer itself.
[0047] The detection optical system of this embodiment can emit light toward the target area by oscillating the galvanometer to scan and detect the target area. The first and second reflective elements are used to make the field of view of the light emitted by the detection optical system larger than the field of view of the galvanometer itself, thereby expanding the scanning field of view.
[0048] Optionally, the light reflected from each of the first reflective surfaces has a different field of view in the first axis, and the field of view of the light reflected from the second reflective surface in the first axis is between the field of view of the light reflected from two adjacent first reflective surfaces in the first axis. This results in the combined field of view of the light reflected from each of the first reflective surfaces and the light reflected from the second reflective surface in the first axis being larger than the field of view of the light reflected from the galvanometer in the first axis. If the galvanometer swings, causing the detection optical system to emit light to scan along the first axis, the detection optical system in this embodiment utilizes a first reflective element and a second reflective element to ensure that the field of view of the light emitted by the detection optical system in the first axis is larger than the field of view of the galvanometer itself in the first axis. This expands the scanning field of view of the detection optical system in the first axis, thereby increasing the scanning field of view along the first axis.
[0049] Optionally, the first axis can be the horizontal direction corresponding to the horizontal vibration of the galvanometer. The detection optical system utilizes the first and second reflective elements to extend the field of view of the emitted light scanning in the horizontal direction. Alternatively, the first axis can be the vertical direction corresponding to the vertical vibration of the galvanometer, thereby extending the field of view of the detection optical system scanning in the vertical direction.
[0050] The field of view of the light reflected by the first reflecting surface of the first reflecting element is controlled by setting the angle of the first reflecting surface. In this embodiment, the number of first reflecting surfaces and the angle of the first reflecting surfaces included in the first reflecting element are not limited. In practical applications, the number of first reflecting surfaces included in the first reflecting element and the angle of each first reflecting surface are set according to the requirements for expanding the field of view of the detection optical system.
[0051] The field of view of the light reflected by the second reflecting surface of the second reflecting element is controlled by setting the angle of the second reflecting surface. In this embodiment, the number of second reflecting surfaces or the angle of the second reflecting surfaces are not limited. In practical applications, the field of view of the detection optical system will be expanded according to the requirements of the field of view expansion and other factors.
[0052] The field of view of light reflected by each of the first reflective surfaces of the first reflective element is set, and the number of second reflective surfaces and the angle of each second reflective surface of the second reflective element are set.
[0053] In one optional embodiment, the first reflective element includes a first reflective surface located in the middle, a first reflective surface located on the left, and a first reflective surface located on the right; the second reflective element includes a second reflective surface located on the left and a second reflective surface located on the right; the field of view of the light emitted by the second reflective surface located on the left is between the field of view of the light reflected by the first reflective surface located in the middle and the field of view of the light reflected by the first reflective surface located on the left; the field of view of the light emitted by the second reflective surface located on the right is between the field of view of the light reflected by the first reflective surface located in the middle and the field of view of the light reflected by the first reflective surface located on the right.
[0054] For example, refer to Figure 1 , Figure 1 This is a schematic diagram of a detection optical system according to an embodiment. As shown in the figure, the detection optical system includes a first emitting component 103, a second emitting component 104, a galvanometer 100, a first reflecting element 101, a second reflecting element 102, and a receiving component. As shown, the first emitting component 103 emits a first light beam, which is incident on the galvanometer 100 and reflected by the galvanometer 100 to the first reflecting element 101. The first reflecting element 101 includes a first reflecting surface 107 located in the middle, a first reflecting surface 106 located on the left, and a first reflecting surface 108 located on the right. During the oscillation of the galvanometer 100, the first light beam reflected by the galvanometer 100 sequentially incident on each of the first reflecting surfaces. The second emitting component 104 emits a second light beam, which is incident on the galvanometer 100 and reflected by the galvanometer 100 to the second reflecting element 102. The second reflecting element 102 includes a second reflecting surface 109 located on the left and a second reflecting surface 110 located on the right. During the oscillation of the galvanometer 100, the second light beam reflected by the galvanometer 100 sequentially incident on each of the second reflecting surfaces. The light beam emitted from the first reflecting element 101 or the second reflecting element 102 is emitted toward the target object 116.
[0055] Please refer to Figure 2 , Figure 2 for Figure 1 The diagram shows the field of view of the detection optical system. Figure 1 The detection optical system shown utilizes a first reflective element 101 and a second reflective element 102 to extend the horizontal field of view. For example... Figure 2 As shown, the field of view 202 of the light reflected by the second reflective surface of the second reflective element 102 fills the space between the field of view 201 of the light reflected by two adjacent first reflective surfaces of the first reflective element 101. The field of view 201 of the light reflected by each first reflective surface of the first reflective element 101 and the field of view 202 of the light reflected by each second reflective surface of the second reflective element 102 combine to form the complete field of view of the detection optical system.
[0056] Optionally, the normal of the first reflective surface 106 located on the left may be biased to the left, and the normal of the first reflective surface 108 located on the right may be biased to the right. An example may be provided. Figure 3 , Figure 3 The figure shows a schematic diagram of a first reflective element provided in one embodiment. The first reflective element 101 has a first reflective surface 107 located in the middle and a first reflective surface 106 located on the left side connected. The first reflective surface 107 located in the middle and a first reflective surface 108 located on the right side connected. The normal of the first reflective surface 106 located on the left side is biased to the left, and the normal of the first reflective surface 108 located on the right side is biased to the right.
[0057] Optionally, the normal of the second reflective surface 109 located on the left may be biased to the left, and the normal of the second reflective surface 110 located on the right may be biased to the right, such that the field of view of the light reflected by the second reflective surface 109 on the left is on the left, and can be between the field of view of the light reflected by the first reflective surface in the middle and the field of view of the first reflective surface on the left; and the field of view of the light reflected by the second reflective surface 110 on the right is on the right, and can be between the field of view of the light reflected by the first reflective surface in the middle and the field of view of the first reflective surface on the right. An example may be provided. Figure 4 , Figure 4 The figure shows a schematic diagram of a second reflective element provided in one embodiment. The second reflective element 102 has a second reflective surface 109 on the left side and a second reflective surface 110 on the right side connected. The normal of the second reflective surface 109 on the left side is biased to the left, and the normal of the second reflective surface 110 on the right side is biased to the right.
[0058] Therefore, the field of view of the detection optical system = (mechanical half-angle of the galvanometer + rotation angle of the outermost first reflecting surface of the first reflecting element around the axis) × 4. For Figure 1 In the detection optical system shown, if the galvanometer 100 vibrates horizontally (i.e., swings around the vertical Y-axis), and the first reflecting surfaces on both sides of the first reflecting element 101 are symmetrical, then the extended back field of view angle = (mechanical half-angle of the galvanometer's horizontal axis + rotation angle θ of the outermost reflecting surface of the first reflecting element around the vertical axis) × 4. Wherein, the reference... Figure 3 As shown, the outermost reflecting surface of the first reflecting element 101 is either the first reflecting surface 106 located on the left or the first reflecting surface 108 located on the right, and the rotation angle of the outermost reflecting surface of the first reflecting element 101 around the vertical axis is θ.
[0059] In this embodiment, the structure of the emitting component is not limited. Optionally, the emitting component may include a light source and a collimating component, which is used to collimate the light emitted by the light source. In this embodiment, the optical structure of the collimating component is not limited; for example, the collimating component may be a collimating optical lens. Optionally, the light source may be a laser.
[0060] In this embodiment, the structure of the receiving component is not limited, as long as it can receive light returned from the outside. Optionally, the receiving component may include a converging component and a photodetector, with the converging component used to focus the received light onto the photodetector. In this embodiment, the optical structure of the converging component is not limited; for example, the converging component may be a focusing optical lens.
[0061] In this embodiment, the number of receiving components is not limited. In practical applications, the number of receiving components is set according to the field of view of the detection optical system and the field of view of a single receiving component, ensuring that light emitted by the detection optical system and reflected back from different directions can be received. Preferably, the detection optical system may include at least two receiving components, each receiving component receiving light emitted by the detection optical system and reflected back from different directions. For example, Figure 1 The detection optical system shown includes three receiving components 111, which ensure that the light emitted by the detection optical system and returned from different directions can be received.
[0062] for Figure 1 The detection optical system shown has a non-axial transmitting and receiving component. In other embodiments, the transmitting and receiving components can also be coaxial. As an optional embodiment, the detection optical system may further include a first beam splitter and a second beam splitter, and the receiving component includes a first receiving component and a second receiving component. The first beam emitted by the transmitting component passes through the first beam splitter and is then incident on the galvanometer. Light returning from the outside is reflected sequentially by the first reflecting element and the galvanometer before being incident on the first beam splitter. The first beam splitter separates the returning light from the first beam emitted by the transmitting component, allowing the returning light to be incident on the first receiving component. The second beam emitted by the transmitting component passes through the second beam splitter and is then incident on the galvanometer. Light returning from the outside is reflected sequentially by the second reflecting element and the galvanometer before being incident on the second beam splitter. The second beam splitter separates the returning light from the second beam emitted by the transmitting component, allowing the returning light to be incident on the second receiving component. The coaxial design of the transmitting and receiving components allows for a compact system structure and reduces the size of the detection optical system.
[0063] Examples are available for reference. Figure 5 , Figure 5A schematic diagram of a detection optical system provided in another embodiment is shown in the figure. The detection optical system includes a first emitting component 103, a second emitting component 104, a galvanometer 100, a first reflecting element 101, a second reflecting element 102, a first beam splitter 112, a second beam splitter 113, a first receiving component 114, and a second receiving component 115. A first beam emitted from the first emitting component 103 passes through the first beam splitter 112 and is incident on the galvanometer 100. Light returning from the outside is reflected sequentially by the first reflecting element 101 and the galvanometer 100 before being incident on the first beam splitter 112, and then reflected by the first beam splitter 112 to the first receiving component 114. A second beam emitted from the second emitting component 104 passes through the second beam splitter 113 and is incident on the galvanometer 100. Light returning from the outside is reflected sequentially by the second reflecting element 102 and the galvanometer 100 before being incident on the second beam splitter 113, and then reflected by the second beam splitter 113 to the second receiving component 115.
[0064] Optionally, the first or second beam-splitting element can transmit the beam emitted by the transmitting component and reflect the returning light, thereby separating the returning light from the beam emitted by the transmitting component. Figure 5 The detection optical system shown is for reference. Figure 6-1 and Figure 6-2 , Figure 6-1 This is a schematic diagram of a beam-splitting element provided in one embodiment. Figure 6-2 for Figure 6-1 The optical path diagram of the beam splitter is shown in the figure. The beam splitter is provided with a light-transmitting hole 611. An anti-reflection film can be provided in the light-transmitting hole 611. A first high-reflection film 601 is provided on the surface of the beam splitter facing the return light, excluding the light-transmitting hole 611. The surface of the beam splitter facing away from the return light, excluding the light-transmitting hole 611, is an extinction treatment area 621.
[0065] Optionally, the first or second beam-splitting element can reflect the beam emitted by the transmitting component and transmit the returning light, thereby separating the returning light from the beam emitted by the transmitting component. (See reference...) Figure 7-1 and Figure 7-2 , Figure 7-1 This is a schematic diagram of a beam-splitting element provided in yet another embodiment. Figure 7-2 for Figure 7-1 The optical path diagram of the beam splitter is shown in the figure. A second high-reflectivity film 612 is provided in the middle region of the beam splitter, and a first anti-reflection film 602 and a second anti-reflection film 622 are respectively provided on the two side surfaces of the beam splitter, excluding the middle region.
[0066] Examples are available for reference. Figure 8 , Figure 8A schematic diagram of a detection optical system according to another embodiment is shown. A first emitting component 103 emits a first light beam, which is incident on a galvanometer 100 and reflected by the galvanometer 100 to a first reflecting element 101. The first reflecting element 101 is vertically positioned, and as the galvanometer 100 oscillates around a horizontal axis, the first light beam reflected by the galvanometer 100 sequentially incident on each of the first reflecting surfaces. A second emitting component 104 emits a second light beam, which is incident on the galvanometer 100 and reflected by the galvanometer 100 to a second reflecting element 102. The second reflecting element 102 is vertically positioned, and as the galvanometer 100 oscillates around a horizontal axis, the second light beam reflected by the galvanometer 102 sequentially incident on each of the second reflecting surfaces.
[0067] Figure 8 The detection optical system shown utilizes a first reflective element 101 and a second reflective element 102 to extend the field of view in the vertical direction. Please refer to... Figure 9 , Figure 9 for Figure 8 The schematic diagram of the field of view of the detection optical system shown is as follows: Figure 9 As shown, the field of view 202 of the light reflected by the second reflective surface of the second reflective element 102 fills the space between the field of view 201 of the light reflected by two adjacent first reflective surfaces of the first reflective element 101. The field of view 201 of the light reflected by each first reflective surface of the first reflective element 101 and the field of view 202 of the light reflected by each second reflective surface of the second reflective element 102 combine to form the complete field of view of the detection optical system.
[0068] As an optional implementation, the first reflective element may include a first reflective surface located on the left and a first reflective surface located on the right. The field of view of the light emitted by the second reflective surface is between the field of view of the light reflected by the first reflective surface located on the left and the field of view of the light reflected by the first reflective surface located on the right. The field of view of the light reflected by each of the first reflective surfaces of the first reflective element and the field of view of the light reflected by the second reflective surface of the second reflective element are combined to form the complete field of view of the detection optical system, which can also extend the scanning field of view of the detection optical system. Optionally, the normal of the first reflective surface located on the left of the first reflective element is biased to the left, and the normal of the first reflective surface located on the right is biased to the right, such that the field of view of the light reflected by the first reflective surface located on the left of the first reflective element is located on the left, the field of view of the light reflected by the first reflective surface located on the right of the first reflective element is located on the right, and the field of view of the light reflected by the second reflective surface is in the middle, and the three are combined to form the complete field of view of the detection optical system.
[0069] Optionally, the first reflecting element may be a prism comprising at least two surfaces, the surfaces of which form the first reflecting surface. Alternatively, the second reflecting element may be a prism comprising at least one surface, the surface of which forms the second reflecting surface. The reflecting surface can be formed by depositing a reflective film on the surface of the prism.
[0070] The detection optical system in this embodiment can be applied to lidar.
[0071] The detection optical system provided by this invention has been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this invention. The descriptions of the embodiments above are merely for the purpose of helping to understand the method and core ideas of this invention. It should be noted that those skilled in the art can make various improvements and modifications to this invention without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this invention.
Claims
1. A detection optical system, characterized in that, It includes a transmitting component, a galvanometer, a first reflecting element, a second reflecting element, and a receiving component, wherein the receiving component is used to receive the light emitted by the detection optical system and reflected back from the outside. The transmitting component is used to emit a first beam and a second beam, respectively, so that the first beam and the second beam are incident on the galvanometer, the first beam is reflected by the galvanometer and then incident on the first reflecting element, and the second beam is reflected by the galvanometer and then incident on the second reflecting element. The first reflecting element includes at least two first reflecting surfaces. During the oscillation of the galvanometer, the first light beam reflected by the galvanometer is sequentially incident on the at least two first reflecting surfaces. The first reflecting surfaces are used to reflect light out, and the light reflected by each of the first reflecting surfaces has a different field of view. The second reflecting element includes at least one second reflecting surface. During the oscillation of the galvanometer, the second light beam reflected by the galvanometer is sequentially incident on the at least one second reflecting surface. The second reflecting surface is used to reflect light out, and the field of view of the light reflected by the second reflecting surface is between the field of view of the light reflected by two adjacent first reflecting surfaces, such that the combined field of view of the light reflected by each of the first reflecting surfaces and the field of view of the light reflected by the second reflecting surface is greater than the field of view of the light reflected by the galvanometer.
2. The detection optical system according to claim 1, characterized in that, The light reflected from each of the first reflective surfaces has a different field of view in the first axis. The field of view of the light reflected from the second reflective surface in the first axis is between the field of view of the light reflected from two adjacent first reflective surfaces in the first axis, such that the combined field of view of the light reflected from each of the first reflective surfaces and the field of view of the light reflected from the second reflective surface in the first axis is greater than the field of view of the light reflected from the galvanometer in the first axis.
3. The detection optical system according to claim 2, characterized in that, The first axial direction is either the horizontal direction corresponding to the horizontal vibration of the galvanometer or the vertical direction corresponding to the vertical vibration of the galvanometer.
4. The detection optical system according to claim 1, characterized in that, The first reflective element includes a first reflective surface located in the middle, a first reflective surface located on the left side, and a first reflective surface located on the right side; the second reflective element includes a second reflective surface located on the left side and a second reflective surface located on the right side. The field of view of the light emitted by the second reflective surface located on the left is between the field of view of the light reflected by the first reflective surface located in the middle and the field of view of the light reflected by the first reflective surface located on the left. The field of view of the light emitted by the second reflective surface on the right is between the field of view of the light reflected by the first reflective surface in the middle and the field of view of the light reflected by the first reflective surface on the right.
5. The detection optical system according to claim 4, characterized in that, The normal of the first reflecting surface located on the left is biased to the left, and the normal of the first reflecting surface located on the right is biased to the right.
6. The detection optical system according to claim 4, characterized in that, The normal of the second reflecting surface located on the left is biased to the left, and the normal of the second reflecting surface located on the right is biased to the right.
7. The detection optical system according to claim 1, characterized in that, The field of view of the detection optical system is equal to (the mechanical half-angle of the galvanometer + the rotation angle of the outermost first reflecting surface of the first reflecting element around the axis) × 4.
8. The detection optical system according to any one of claims 1-7, characterized in that, The first reflecting element is a prism having at least two surfaces, the surfaces of which form the first reflecting surface; or the second reflecting element is a prism having at least one surface, the surfaces of which form the second reflecting surface.
9. The detection optical system according to any one of claims 1-7, characterized in that, It includes at least two receiving components, each of which receives light emitted by the detection optical system and reflected back from different directions.
10. The detection optical system according to any one of claims 1-7, characterized in that, It also includes a first beam splitter and a second beam splitter, and the receiving component includes a first receiving component and a second receiving component; The first beam emitted by the transmitting component passes through the first beam splitter and is then incident on the galvanometer. The light returning from the outside is reflected by the first reflecting element and the galvanometer in sequence and then incident on the first beam splitter. The first beam splitter is used to separate the returning light from the first beam emitted by the transmitting component, so that the returning light is incident on the first receiving component. The second beam emitted by the transmitting component passes through the second beam splitter and is then incident on the galvanometer. The light returning from the outside is reflected by the second reflector and the galvanometer in sequence and then incident on the second beam splitter. The second beam splitter is used to separate the returning light from the second beam emitted by the transmitting component, so that the returning light is incident on the second receiving component.