A filtration system for electronic sulfuric acid production

Abstract

The application relates to a filtering system for electronic sulfuric acid production applied to the field of sulfuric acid production. Through the arrangement of a main filtering module, a circulating filtering module and a filter detection cylinder, the sulfuric acid raw material liquid or finished product liquid can be automatically detected after each filtration, the filter detection cylinder can adhere to the particulate impurities in the liquid, and the arrangement of the sensing assembly can effectively sense the existence of the particulate impurities, so as to judge whether the filtration is up to the standard. When the filtration is not up to the standard, the circulating filtering module can be used for repeated filtration for multiple times. Compared with the prior art, the effect of filtering and detecting simultaneously is achieved, the incomplete filtration or over-filtration is effectively avoided, and the filtering efficiency and filtering effect are effectively ensured.

Description

Technical Field

[0001] The present invention relates to a filtration system, and more particularly to a filtration system for electronic sulfuric acid production applied in the field of sulfuric acid production. Background Technology

[0002] Microelectronic-grade sulfuric acid is one of the commonly used raw material solutions in the microelectronics industry. Existing microelectronic-grade sulfuric acid production systems typically include filtration systems to reduce trace amounts of ash and metal ions in the product. However, to further improve product quality, existing microelectronic-grade sulfuric acid production processes require additional technical means such as raw material filtration and finished product filtration; otherwise, the quality of the refined sulfuric acid will be directly affected.

[0003] For the filtration of raw materials and finished products, existing technologies simply use filtration equipment for filtration. However, there is a lack of inspection and testing of the filtration status of the raw materials or finished products during the filtration process. This makes it difficult to understand the filtration status in a timely manner, affecting the filtration effect and efficiency. On the one hand, in order to ensure the filtration effect, multiple filtrations are often performed, and filtration may continue even when the filtration standard has been exceeded. This affects the filtration efficiency. On the other hand, the number of filtrations is generally fixed, and there are cases where the filtration is completed before the filtration standard is reached, which also affects the filtration effect. Summary of the Invention

[0004] In view of the above-mentioned prior art, the technical problem to be solved by the present invention is that the filtration efficiency and effect of the raw material liquid in sulfuric acid production are somewhat deficient.

[0005] To address the aforementioned problems, this invention provides a filtration system for electronic sulfuric acid production, comprising a main filtration module and a circulating filtration module sequentially installed on the main sulfuric acid production line. The main filtration module includes a filter and a filter cartridge connected sequentially to the main production line. The circulating filtration module includes a circulating pipe connected in parallel to the main production line, and a filter and a filter cartridge sequentially installed on the circulating pipe. A solenoid valve and a check valve are respectively installed at the two ends of the circulating pipe connected to the main production line. A return pipe is also connected to the circulating pipe. The filter and the filter cartridge are located between the two ends of the return pipe. Solenoid valves are installed at the inlet and outlet ends of the circulating pipe and the inlet and outlet ends of the return pipe. The filter cartridge includes an outer casing, two liquid guide tubes respectively fixedly connected to the left and right ends of the outer casing, and two mounting rings respectively fixedly connected to the inner ends of the liquid guide tubes of the outer casing. A particle sensing sleeve is installed between the two mounting rings.

[0006] In the aforementioned filtration system for electronic sulfuric acid production, the main filtration module, the circulating filtration module, and the accompanying filter cartridge enable automatic detection of the filtration status after each filtration of the sulfuric acid raw material or finished product. If the filtration fails to meet the standards, the system can be repeatedly filtered through the circulating filtration module. Compared to existing technologies, this achieves the effect of simultaneous filtration and detection, effectively preventing incomplete or over-filtration, thereby ensuring filtration efficiency and effectiveness.

[0007] As a further improvement of this application, the inner diameter of the outer casing is not less than twice the inner diameter of the liquid guide tube, and the end of the liquid guide tube extends into the interior of the outer casing.

[0008] As a further improvement of this application, the particle sensing sleeve includes multiple sets of particle sensing units arranged in a ring array. Each particle sensing unit includes a push roller and a sensing roller that are in contact with each other, and both are mounted between two mounting rings via an electric rotating shaft.

[0009] As a further improvement of this application, two adjacent sets of particle sensing units are in contact with each other, the pushing roller and the sensing roller rotate in opposite directions, and both rotate toward the point of contact between them.

[0010] As a further improvement of this application, multiple scrapers are fixedly connected to the inner wall of the outer casing cylinder. The multiple scrapers are in frictional contact with multiple push rollers and sensing rollers respectively. The scrapers are inclined and the angle between the scrapers and the vertical direction is 30-60°.

[0011] As a further improvement of this application, a pressure sensor is installed inside the sensing roller, the contact of the pressure sensor is set on the inner wall of the sensing roller, the cylindrical surface of the sensing roller is an elastic structure, the sensing roller is saturated with compressed air, and the push roller is a rigid structure.

[0012] As another improvement of this application, a sensing component is installed inside the sensing roller. The sensing component includes a sensing tube coaxially arranged with the sensing roller, a pressure-sensing strip attached to the inner wall of the sensing roller, and a support rod fixedly connected between the middle of the sensing tube and the middle of the pressure-sensing strip. The end of the sensing tube movably passes through the sensing roller and is fixedly connected to the mounting ring. The pressure-sensing strip and the liquid guide tube are saturated with light-shielding liquid.

[0013] As a further improvement to this application, the sensing tube includes two outer thick tubes and a pre-shielding thin tube fixedly connected between the two outer thick tubes. A laser emitter and a laser receiver are respectively installed at the ends of the two outer thick tubes that are far apart from each other. The liquid guide tube includes a tube body and a follower plate fixedly connected to the end of the tube body. The tube body is fixedly inserted through the middle of the pre-shielding thin tube and is flush with the inner wall of the pre-shielding thin tube.

[0014] As a further improvement to this application, the outer protective thick tube and the pre-shielding thin tube are coaxially arranged, the end face of the pressure-sensing strip and the sensing roller, as well as the follower plate, are all elastic structures, while the other parts of the pressure-sensing strip and the tube body are all rigid structures.

[0015] In summary, through the setup of the main filtration module, the circulating filtration module, and the accompanying filter cartridge, the sulfuric acid raw material or finished product liquid is automatically tested after each filtration. The accompanying filter cartridge can adhere to particulate impurities in the liquid, and with the addition of sensing components, the presence of particulate impurities can be effectively detected, thereby determining whether the filtration meets the standards. If the filtration does not meet the standards, it can be repeated multiple times through the circulating filtration module. Compared with existing technologies, this achieves the effect of simultaneous filtration and testing, effectively avoiding incomplete or over-filtration, thus effectively ensuring filtration efficiency and filtration effect. Attached Figure Description

[0016] Figure 1 This is a main system block diagram of the first embodiment of this application;

[0017] Figure 2 This is a schematic diagram of the circulating filter module according to the first embodiment of this application;

[0018] Figure 3 This is a perspective view of the filter cartridge according to the first embodiment of this application;

[0019] Figure 4 This is a half-sectional perspective view of the filter cartridge according to the first embodiment of this application;

[0020] Figure 5 This is a perspective view of the internal structure of the filter cartridge according to the first embodiment of this application;

[0021] Figure 6 This is a cross-sectional view of the filter cartridge according to the first embodiment of this application;

[0022] Figure 7 This is a cross-sectional view of the particle sensing sleeve according to the first embodiment of this application;

[0023] Figure 8 This is a perspective view of the particle sensing unit according to the second embodiment of this application;

[0024] Figure 9 This is a perspective view of the sensing component according to the second embodiment of this application;

[0025] Figure 10 This is a side cross-sectional view of the sensing component according to the second embodiment of this application.

[0026] Explanation of the labels in the diagram:

[0027] 1 Production main pipe, 101 Circulation pipe, 102 Return pipe, 2 Main filter module, 3 Circulation filter module, 4 Filter, 5 Filter inspection cylinder, 51 Outer cover cylinder, 52 Liquid guide cylinder, 53 Mounting ring, 54 Scraper, 6 Particle sensing unit, 61 Push roller, 62 Sensing roller, 7 Sensing component, 71 Pressure sensing strip, 721 Outer protective coarse pipe, 722 Pre-shielded fine pipe, 73 Liquid guide pipe, 731 Pipe body, 732 Follower plate, 74 Support rod. Detailed Implementation

[0028] The two embodiments of this application will be described in detail below with reference to the accompanying drawings.

[0029] First implementation method:

[0030] Figure 1-2 A filtration system for electronic sulfuric acid production is shown, comprising a main filtration module 2 and a circulating filtration module 3 sequentially installed on a main sulfuric acid production pipe 1. The main filtration module 2 includes a filter 4 and a filter cartridge 5 sequentially connected to the main production pipe 1. The circulating filtration module 3 includes a circulation pipe 101 connected in parallel to the main production pipe 1, and the filter 4 and filter cartridge 5 sequentially installed on the circulation pipe 101. A solenoid valve and a check valve are respectively installed at the two ends of the circulation pipe 101 connected to the main production pipe 1. A return pipe 102 is also connected to the circulation pipe 101. The filter 4 and filter cartridge 5 are located between the two ends of the return pipe 102. The inlet and outlet ends of the circulation pipe 101 and the return pipe 102 are connected to the main production pipe 102. Solenoid valves are installed at both the inlet and outlet ends. When the raw material liquid or finished product liquid is filtered by the main filter module 2 and passes the test of the filter cartridge 5, it can directly continue to flow along the main production pipe 1 to the next sulfuric acid production step. When the filter cartridge 5 detects that there are still obvious particulate impurities, the solenoid valve on the circulation pipe 101 opens, changing the flow direction of the raw material liquid or finished product liquid, so that it enters the circulation filter module 3 for filtration again. If there are still obvious particles, it flows back to the circulation filter module 3 through the return pipe 102 for repeated circulation filtration until the corresponding filter cartridge 5 detects that there are no obvious impurities. Then it flows back to the main production pipe 1 through the circulation pipe 101 and flows to the next production step.

[0031] like Figure 3 The filter cartridge 5 includes an outer cover 51, two liquid guide tubes 52 respectively fixedly connected to the left and right ends of the outer cover 51, and two mounting rings 53 respectively fixedly connected to the inner end of the liquid guide tubes 52 located in the outer cover 51. A particle sensing sleeve is installed between the two mounting rings 53.

[0032] The inner diameter of the outer casing 51 is not less than twice the inner diameter of the liquid guiding cylinder 52, so that there is still a certain space outside the particle sensing sleeve, so that the particle sensing sleeve is not easy to rub against the inner wall of the liquid guiding cylinder 52 and wear when rotating. The end of the liquid guiding cylinder 52 extends into the interior of the outer casing 51.

[0033] like Figure 4-5 The particle sensing sleeve includes multiple sets of particle sensing units 6 arranged in a ring array. Each particle sensing unit 6 includes a pressing roller 61 and a sensing roller 62 that are in contact with each other, and both are mounted between two mounting rings 53 via an electric rotating shaft. A pressure sensor is installed inside the sensing roller 62, such as... Figure 7 Two adjacent sets of particle sensing units 6 are in contact with each other. The pushing roller 61 and sensing roller 62 rotate in opposite directions and both rotate toward the contact point. This allows the particulate impurities adhering to the surfaces of the pushing roller 61 and sensing roller 62 to move toward the contact point as they rotate. When the particles are large, the contact point will be subjected to a large resistance and squeezing force from the impurities. The pressure sensor can detect this force. When the pressure data generated by the pressure sensor is large, it can be determined that the filtration of the finished liquid or raw material liquid has not met the standard and there are still many particulate impurities. When the pressure data on the pressure sensor is small or there is no pressure data, it indicates that the filtration has met the standard.

[0034] like Figure 6 Multiple scrapers 54 are fixedly connected to the inner wall of the outer casing 51. The multiple scrapers 54 are in frictional contact with multiple push rollers 61 and sensing rollers 62 respectively. The scrapers 54 are inclined and the angle between the scrapers 54 and the vertical direction is 30-60°. Since the push rollers 61 and sensing rollers 62 are directly exposed, impurities in the liquid will adhere to their surfaces. With each rotation, when the impurities are transported to the side close to the inner wall of the outer casing 51, the scrapers 54 can effectively scrape off the impurities, so that when the particle sensing unit 6 is transported to the particle sensing sleeve again, the surface is not covered with large particles of impurities, thus making it less likely to interfere with the detection.

[0035] The contacts of the pressure sensor are located on the inner wall of the sensing roller 62, and the cylindrical surface of the sensing roller 62 is an elastic structure. The sensing roller 62 is saturated with compressed air, while the push roller 61 is a rigid structure.

[0036] In the aforementioned filtration system for electronic sulfuric acid production, the main filtration module 2, the circulating filtration module 3, and the accompanying filter cartridge 5 enable automatic detection of the filtration status after each filtration of the sulfuric acid raw material or finished product. Each time the raw material or finished product passes through the accompanying filter cartridge 5, if particulate impurities are present, some of these impurities adhere to the surface of the particle sensing unit 6. As each particle sensing unit 6 rotates, the impurities cause uneven contact between the push roller 61 and the sensing roller 62, resulting in the pressure sensor inside the sensing roller 62 receiving force data, thus enabling particle detection. Data indicating substandard filtration allows the raw material to undergo repeated filtration through the circulating filtration module 3. Compared to existing technologies, this achieves simultaneous filtration and detection, effectively preventing incomplete or excessive filtration, thereby ensuring filtration efficiency and effectiveness.

[0037] Second implementation method:

[0038] This embodiment uses the sensing component 7 and its related structure to replace the pressure sensor in the first embodiment, while the rest remains the same as in the first embodiment.

[0039] Figure 8-9 As shown, a sensing component 7 is installed inside the sensing roller 62. The sensing component 7 includes a sensing tube coaxially arranged with the sensing roller 62, a pressure-sensing strip 71 attached to the inner wall of the sensing roller 62, and a support rod 74 fixedly connected between the middle of the sensing tube and the middle of the pressure-sensing strip 71. The end of the sensing tube movably passes through the sensing roller 62 and is fixedly connected to the mounting ring 53. The pressure-sensing strip 71 and the liquid guide tube 73 are saturated with a light-shielding liquid, which is a dark-colored liquid, preferably black. The sensing tube includes two outer protective thick tubes 721 and a pre-shielding thin tube 722 fixedly connected between the two outer protective thick tubes 721. A laser emitter and a laser receiver are respectively installed at the far ends of the two outer protective thick tubes 721. Figure 10 The liquid guide tube 73 includes a tube body 731 and a follower plate 732 fixedly connected to the end of the tube body 731. The tube body 731 is fixedly inserted through the middle of the pre-shielding capillary tube 722 and is flush with the inner wall of the pre-shielding capillary tube 722. When impurities adhere to the surface of the particle sensing unit 6, during the rotation of the push roller 61 and the sensing roller 62, when a larger piece of impurity reaches contact with the two, due to the resistance of the impurities, the corresponding part of the sensing roller 62 and the end of the pressure-sensing strip 71 will be concave inward, causing the light-shielding liquid to move along the liquid guide tube 73 toward the pre-shielding capillary tube 722, causing the follower plate 732 to be squeezed and expanded. When the expansion degree of the follower plate 732 is large and crosses the center, it will block the laser light emitted by the laser emitter, so that the laser receiver cannot receive the laser signal. Therefore, based on whether the laser signal is received, it can be determined whether the raw material liquid and the finished liquid meet the filtration standards.

[0040] The outer thick tube 721 and the pre-shielding thin tube 722 are coaxially arranged. The end face of the pressure-sensing strip 71 and the sensing roller 62, as well as the follower plate 732, are all elastic structures. The other parts of the pressure-sensing strip 71 and the tube body 731 are all rigid structures. When the contact surface between the pressure-sensing strip 71 and the sensing roller 62 is deformed by the pressure of particulate impurities, the shading liquid will be squeezed and concentrated towards the follower plate 732, causing it to deform and achieve the shading effect.

[0041] The pressure-sensing strip 71 is positioned to contact the pressure roller 61 and the sensing roller 62. When there are particulate impurities on the surface of the pressure roller 61 and the sensing roller 62, compared to the pressure sensor in the first embodiment, the long strip structure of the pressure-sensing strip 71 can fully sense the pressure during the rotation of the sensing roller 62. In contrast, a larger number of pressure sensors are required to achieve comprehensive sensing. This design can adapt to different needs, and the appropriate implementation method can be selected according to actual requirements.

[0042] In light of current practical needs, the above-described embodiments adopted in this application are not limited to these. Any changes made within the scope of knowledge possessed by those skilled in the art without departing from the concept of this application still fall within the protection scope of this invention.

Claims

1. A filtration system for electronic sulfuric acid production, characterized in that: The system includes a main filtration module (2) and a circulating filtration module (3) sequentially installed on the main sulfuric acid production line (1). The main filtration module (2) includes a filter (4) and a filter cartridge (5) sequentially connected to the main production line (1). The circulating filtration module (3) includes a circulating pipe (101) connected in parallel to the main production line (1) and a filter (4) and a filter cartridge (5) sequentially installed on the circulating pipe (101). A solenoid valve and a check valve are respectively installed at the two ends of the circulating pipe (101) connected to the main production line (1). The circulating pipe (101) also has... A return pipe (102) is connected. The filter (4) and the filter cartridge (5) are located between the two ends of the return pipe (102). Solenoid valves are installed at the inlet and outlet ends of the circulation pipe (101) and the inlet and outlet ends of the return pipe (102). The filter cartridge (5) includes an outer cover (51), two liquid guide tubes (52) fixedly connected to the left and right ends of the outer cover (51) respectively, and two mounting rings (53) fixedly connected to the inner end of the liquid guide tubes (52) located in the outer cover (51) respectively. A particle sensing sleeve is installed between the two mounting rings (53). The particle sensing sleeve includes multiple sets of particle sensing units (6) arranged in a ring array. Each particle sensing unit (6) includes a push roller (61) and a sensing roller (62) that are in contact with each other. Both are installed between two mounting rings (53) via an electric rotating shaft. Adjacent sets of particle sensing units (6) are in contact with each other. The push roller (61) and the sensing roller (62) rotate in opposite directions and both rotate toward the point of contact.

2. The filtration system for electronic sulfuric acid production according to claim 1, characterized in that: The inner diameter of the outer casing (51) is not less than twice the inner diameter of the liquid guide tube (52), and the end of the liquid guide tube (52) extends into the interior of the outer casing (51).

3. A filtration system for electronic sulfuric acid production according to claim 1, characterized in that: Multiple scrapers (54) are fixedly connected to the inner wall of the outer cover cylinder (51). The multiple scrapers (54) are in contact with each other through friction with multiple push rollers (61) and sensing rollers (62). The scrapers (54) are inclined and the angle between the scrapers (54) and the vertical direction is 30-60°.

4. A filtration system for electronic sulfuric acid production according to claim 3, characterized in that: A pressure sensor is installed inside the sensing roller (62), and the contact of the pressure sensor is set on the inner wall of the sensing roller (62). The cylindrical surface of the sensing roller (62) is an elastic structure. The sensing roller (62) is saturated with compressed air, and the push roller (61) is a rigid structure.

5. A filtration system for electronic sulfuric acid production according to claim 3, characterized in that: The sensing roller (62) is equipped with a sensing component (7). The sensing component (7) includes a sensing tube coaxially arranged with the sensing roller (62), a pressure-sensing strip (71) attached to the inner wall of the sensing roller (62), and a support rod (74) fixedly connected between the middle of the sensing tube and the middle of the pressure-sensing strip (71). The end of the sensing tube moves through the sensing roller (62) and is fixedly connected to the mounting ring (53). The pressure-sensing strip (71) and the liquid guide tube (73) are saturated with light-shielding liquid.

6. A filtration system for electronic sulfuric acid production according to claim 5, characterized in that: The sensing tube includes two outer thick tubes (721) and a pre-shielding thin tube (722) fixedly connected between the two outer thick tubes (721). A laser emitter and a laser receiver are respectively installed at the ends of the two outer thick tubes (721) that are far apart from each other. The liquid guide tube (73) includes a tube body (731) and a follower plate (732) fixedly connected to the end of the tube body (731). The tube body (731) is fixedly inserted through the middle of the pre-shielding thin tube (722) and is flush with the inner wall of the pre-shielding thin tube (722).

7. A filtration system for electronic sulfuric acid production according to claim 6, characterized in that: The outer protective thick tube (721) and the pre-shielding thin tube (722) are coaxially arranged. The end face of the pressure-sensing strip (71) and the sensing roller (62) and the follower plate (732) are all elastic structures, while the other parts of the pressure-sensing strip (71) and the tube body (731) are all rigid structures.

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