Vacuum automatic control system and method for vacuum diffusion welding

Abstract

The present application provides a vacuum automatic control system and method for vacuum diffusion welding, the system comprising: vacuum diffusion welding equipment, vacuum adjustment equipment, vacuum measuring equipment, temperature measuring equipment, mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve; the vacuum diffusion welding equipment comprises an equipment molding cavity; the vacuum measuring equipment is used to measure the actual vacuum degree in the equipment molding cavity, and send the actual vacuum degree to the vacuum adjustment equipment; the temperature measuring equipment is used to measure the actual temperature in the equipment molding cavity and the oil temperature of the diffusion pump, and send the actual temperature and oil temperature to the vacuum adjustment equipment; the vacuum adjustment equipment is used to control the on and off of the mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve according to the actual vacuum degree, actual temperature and oil temperature. Improve the stability of the vacuum degree in the equipment molding cavity.

Description

Technical Field

[0001] The present application relates to the field of vacuum diffusion welding, and in particular to a vacuum automatic control system and method for vacuum diffusion welding. Background Art

[0002] In order to meet the needs of the welding market, welding technology has been continuously improved, and a special welding process called vacuum diffusion welding has emerged. Vacuum diffusion welding is a precision process that does not require processing after welding. During diffusion welding, the solid joint surfaces of two parts are connected by temperature, pressure, time and vacuum conditions that are lower than the melting point of the base material to achieve the distance between atoms, diffuse atoms, and achieve interatomic embedding diffusion bonding. It is suitable for welding between dissimilar and homogeneous materials.

[0003] During the application of vacuum diffusion welding equipment, the welding products have high requirements for the vacuum degree in the equipment molding cavity. High or low vacuum degree will affect the welding quality of subsequent products, causing the vacuum system to run for a long time, affecting its service life. At present, during the long heating welding process of vacuum diffusion welding equipment, the cavity cannot reach a reasonable vacuum setting value, and the vacuum degree in the cavity is not stable enough.

[0004] Therefore, during the vacuum diffusion welding process, how to automatically control the vacuum degree in the molding cavity of the vacuum diffusion welding equipment to stably maintain the vacuum degree at the set value is an urgent problem to be solved. Summary of the invention

[0005] The purpose of the present application is to provide a vacuum automatic control system and method for vacuum diffusion welding in view of the deficiencies in the above-mentioned prior art, so as to solve the practical problems that the vacuum degree in the cavity of the vacuum diffusion welding equipment in the prior art cannot reach a reasonable vacuum setting value during a long period of heating and welding, and the vacuum degree in the cavity is unstable.

[0006] To achieve the above purpose, the technical solution adopted in the embodiment of the present application is as follows:

[0007] In a first aspect, an embodiment of the present application provides a vacuum automatic control system for vacuum diffusion welding, the system comprising at least: vacuum diffusion welding equipment, vacuum adjustment equipment, vacuum measuring equipment, temperature measuring equipment, mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve; wherein the vacuum diffusion welding equipment comprises an equipment molding cavity;

[0008] The mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve are respectively connected to the vacuum adjustment device for communication;

[0009] The vacuum measuring device is located in the device molding cavity, and the vacuum measuring device is communicatively connected with the vacuum adjusting device;

[0010] The temperature measuring device is located in the molding cavity of the device, and the temperature measuring device is communicatively connected with the vacuum adjustment device;

[0011] The vacuum measuring device is used to measure the actual vacuum degree in the molding cavity of the device, and send the actual vacuum degree to the vacuum adjustment device; the temperature measuring device is used to measure the actual temperature in the molding cavity of the device and the oil temperature of the diffusion pump, and send the actual temperature and the oil temperature to the vacuum adjustment device;

[0012] The vacuum adjustment device is used to control the on and off of the mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve according to the actual vacuum degree, actual temperature and oil temperature.

[0013] As an optional implementation, the vacuum automatic control system for vacuum diffusion welding further includes: upper-level industrial control equipment and an editable logic controller;

[0014] The upper industrial control device is communicatively connected with the editable logic controller;

[0015] The editable logic controller is in communication connection with the vacuum diffusion welding equipment;

[0016] The vacuum adjustment device is communicatively connected with the vacuum diffusion welding device;

[0017] The vacuum diffusion welding device is used to receive vacuum control parameters from the upper industrial control device via the editable logic controller, and send the vacuum control parameters to the vacuum adjustment device;

[0018] The vacuum adjustment device is specifically used to control the on and off of the mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve according to the vacuum control parameters, the actual vacuum degree, the actual temperature and the oil temperature.

[0019] As an optional implementation method, the vacuum adjustment device is specifically used to determine whether the vacuum degree of the molding cavity of the device is greater than or equal to the first preset threshold value in the vacuum control parameters and less than or equal to the second preset threshold value in the vacuum control parameters according to the actual vacuum degree. If so, the roughing valve, the Roots pump, the mechanical pump, the maintaining valve and the maintaining pump are controlled to be turned on, and the diffusion pump is controlled to be turned on when the vacuum degree of the front stage of the diffusion pump is less than the third preset threshold value in the vacuum control parameters.

[0020] As an optional implementation method, the vacuum adjustment device is also specifically used to determine whether the vacuum degree of the molding cavity of the device is less than the first preset threshold value and the oil temperature is greater than or equal to the fourth preset threshold value in the vacuum control parameter according to the actual vacuum degree. If so, the mechanical pump, the roughing valve and the Roots pump are controlled to be disconnected in sequence, and the front-stage valve and the high vacuum valve are controlled to be opened.

[0021] As an optional implementation, the vacuum adjustment device is also specifically used to determine whether the actual temperature of the device molding cavity is less than or equal to the fifth preset threshold in the vacuum control parameter based on the actual temperature. If so, the high vacuum valve and the diffusion pump are controlled to be disconnected.

[0022] As an optional implementation, the vacuum adjustment device is further used to determine whether the oil temperature of the diffusion pump is less than or equal to the sixth preset threshold in the vacuum control parameter based on the oil temperature, and if so, control the maintenance valve and the maintenance pump to be disconnected.

[0023] As an optional implementation method, the vacuum adjustment device is specifically used to control the mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore-stage valve and maintenance valve to be disconnected after the vacuum diffusion welding equipment completes welding, and to control the atmospheric backfill valve to open.

[0024] In a second aspect, an embodiment of the present application provides a vacuum automatic control method for vacuum diffusion welding, the method being applied to a vacuum adjustment device in a vacuum automatic control system for vacuum diffusion welding as described in any one of the first aspects above; the method comprising:

[0025] Obtaining the actual vacuum degree in the molding cavity of the device sent by the vacuum measuring device, the actual temperature in the molding cavity of the device sent by the temperature measuring device, and the oil temperature of the diffusion pump;

[0026] The on / off of the mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve are controlled according to the actual vacuum degree, actual temperature and oil temperature.

[0027] As an optional implementation, the method further includes:

[0028] Obtain vacuum control parameters sent by vacuum diffusion welding equipment;

[0029] According to the vacuum control parameters, the actual vacuum degree, the actual temperature and the oil temperature, the on and off of the mechanical pump, the diffusion pump, the Roots pump, the maintaining pump, the high vacuum valve, the roughing valve, the fore valve, the maintaining valve and the atmospheric backfilling valve are controlled.

[0030] As an optional implementation, controlling the on / off of the mechanical pump, the diffusion pump, the Roots pump, the maintenance pump, the high vacuum valve, the roughing valve, the fore valve, the maintenance valve and the atmospheric backfill valve according to the vacuum control parameter, the actual vacuum degree, the actual temperature and the oil temperature includes:

[0031] Determining, according to the actual vacuum degree, whether the vacuum degree of the molding cavity of the equipment is greater than or equal to a first preset threshold value in the vacuum control parameter and less than or equal to a second preset threshold value in the vacuum control parameter;

[0032] If so, the roughing valve, the Roots pump, the mechanical pump, the maintaining valve and the maintaining pump are controlled to be turned on, and the diffusion pump is controlled to be turned on when the front stage vacuum degree of the diffusion pump is less than the third preset threshold value in the vacuum control parameter.

[0033] The beneficial effects of this application are:

[0034] The present application provides a vacuum automatic control system and method for vacuum diffusion welding, by setting a vacuum adjustment device, a vacuum measuring device and a temperature measuring device in the vacuum automatic control system for vacuum diffusion welding, the vacuum adjustment device automatically controls the on and off of a mechanical pump, a diffusion pump, a Roots pump, a maintenance pump, a high vacuum valve, a roughing valve, a front valve, a maintenance valve and an atmospheric backfill valve according to the actual vacuum degree in the equipment molding cavity of the vacuum diffusion welding equipment sent by the vacuum measuring device, the actual temperature in the equipment molding cavity sent by the temperature measuring device and the oil temperature of the diffusion pump. The vacuum adjustment device automatically controls the vacuum extraction process and the vacuum degree maintenance process in the equipment molding cavity of the vacuum diffusion welding equipment by automatically switching the on and off states of each pump and valve, so that the vacuum degree in the equipment molding cavity is stable within a preset reasonable range of vacuum degree, improves the stability of the vacuum degree in the equipment molding cavity, and efficiently improves the use efficiency of each pump, reducing production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0036] Figure 1 A schematic diagram of the structure of a vacuum automatic control system for vacuum diffusion welding provided in an embodiment of the present application;

[0037] Figure 2 A schematic structural diagram of another vacuum automatic control system for vacuum diffusion welding provided in an embodiment of the present application;

[0038] Figure 3 A schematic flow chart of a vacuum automatic control method for vacuum diffusion welding provided in an embodiment of the present application;

[0039] Figure 4 A schematic flow chart of another vacuum automatic control method for vacuum diffusion welding provided in an embodiment of the present application;

[0040] Figure 5 A schematic diagram of the flow chart of the control valve and pump on-off of the vacuum automatic control method for vacuum diffusion welding provided in an embodiment of the present application;

[0041] Figure 6 A schematic diagram of another flow chart of controlling the on / off of a control valve and a pump in a vacuum automatic control method for vacuum diffusion welding provided in an embodiment of the present application;

[0042] Figure 7 A schematic diagram of another flow chart of controlling the on / off of a control valve and a pump in a vacuum automatic control method for vacuum diffusion welding provided in an embodiment of the present application;

[0043] Figure 8 A schematic diagram of another flow chart of controlling the on / off of a control valve and a pump in the vacuum automatic control method for vacuum diffusion welding provided in an embodiment of the present application;

[0044] Fig. 9 A schematic flow chart of another vacuum automatic control method for vacuum diffusion welding provided in an embodiment of the present application. DETAILED DESCRIPTION

[0045] To make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. It should be understood that the drawings in the present application only serve the purpose of explanation and description and are not used to limit the scope of protection of the present application. In addition, it should be understood that the schematic drawings are not drawn in real proportion. The flowchart used in this application shows the operations implemented according to some embodiments of the present application. It should be understood that the operations of the flowchart can be implemented out of sequence, and the steps without logical context can be reversed in order or implemented simultaneously. In addition, those skilled in the art can add one or more other operations to the flowchart under the guidance of the content of the present application, or remove one or more operations from the flowchart.

[0046] In addition, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0047] It should be noted that the term "comprising" will be used in the embodiments of the present application to indicate the existence of the features declared thereafter, but does not exclude the addition of other features.

[0048] At present, during the long-term heating and welding process, vacuum diffusion welding equipment has the disadvantages that the reasonable vacuum setting value cannot be reached in the cavity and the vacuum degree in the cavity is unstable.

[0049] Based on the above problems, the embodiment of the present application proposes a vacuum automatic control system for vacuum diffusion welding, which at least includes: vacuum diffusion welding equipment, vacuum adjustment equipment, vacuum measuring equipment, temperature measuring equipment, mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, front valve, maintenance valve and atmospheric backfill valve; wherein, the vacuum diffusion welding equipment includes an equipment molding cavity, and the vacuum adjustment equipment controls the on and off of the mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, front valve, maintenance valve and atmospheric backfill valve according to the actual vacuum degree in the equipment molding cavity, the actual temperature in the equipment molding cavity and the oil temperature of the diffusion pump. The vacuum degree in the molding cavity of the vacuum diffusion welding equipment is automatically controlled to improve the stability of the vacuum degree in the cavity.

[0050] Figure 1 A schematic diagram of the structure of a vacuum automatic control system for vacuum diffusion welding provided in an embodiment of the present application is shown in FIG. Figure 1 As shown, the vacuum automatic control system 100 of vacuum diffusion welding at least includes: vacuum diffusion welding equipment 101, vacuum adjustment equipment 102, vacuum measuring equipment 103, temperature measuring equipment 104, mechanical pump 105, diffusion pump 106, Roots pump 107, maintenance pump 108, high vacuum valve 109, roughing valve 110, fore valve 111, maintenance valve 112 and atmospheric backfill valve 113; wherein, the vacuum diffusion welding equipment 101 includes an equipment molding cavity 1011.

[0051] The mechanical pump 105 , the diffusion pump 106 , the Roots pump 107 , the maintenance pump 108 , the high vacuum valve 109 , the roughing valve 110 , the fore valve 111 , the maintenance valve 112 and the atmospheric backfill valve 113 are respectively connected to the vacuum adjustment device 102 in communication.

[0052] Optional, see Figure 1 , the vacuum adjustment device 102 is respectively connected to the mechanical pump 105, the diffusion pump 106, the roots pump 107, the maintenance pump 108, the high vacuum valve 109, the roughing valve 110, the fore valve 111, the maintenance valve 112 and the atmospheric backfill valve 113. Among them, the mechanical pump 105 and the roots pump 107 are used to provide the necessary fore vacuum for the diffusion pump 106, the diffusion pump adopts the oil diffusion principle and is used to extract high vacuum, the maintenance pump 108 is used to assist the mechanical pump 105 and the roots pump 107 to maintain the normal operation of the diffusion pump 106; the high vacuum valve, the roughing valve, the fore valve and the maintenance valve are used to switch different pumps into the vacuum automatic control system of vacuum diffusion welding; the atmospheric backfill valve is used to backfill the atmosphere to balance the air pressure inside and outside the equipment molding cavity 1011.

[0053] The vacuum measuring device 103 is located in the device molding cavity 1011 , and is communicatively connected to the vacuum adjusting device 102 ; the temperature measuring device 104 is located in the device molding cavity 1011 , and is communicatively connected to the vacuum adjusting device 102 .

[0054] Optional, continue to refer to Figure 1 The vacuum measuring device 103 is located in the device molding cavity 1011 and is in communication connection with the vacuum adjusting device 102; the temperature measuring device 104 is located in the device molding cavity 1011 and is in communication connection with the vacuum adjusting device 102. The vacuum measuring device 103 may include a vacuum gauge, a full-scale vacuum gauge, and a Pirani gauge; the temperature measuring device 104 may include a plurality of thermocouples.

[0055] The vacuum measuring device 103 is used to measure the actual vacuum degree in the equipment molding cavity 1011, and send the actual vacuum degree to the vacuum adjustment device 102. The temperature measuring device 104 is used to measure the actual temperature in the equipment molding cavity 1011 and the oil temperature of the diffusion pump 106, and send the actual temperature and oil temperature to the vacuum adjustment device 102.

[0056] Optionally, the vacuum measuring device 103 measures the actual vacuum degree in the equipment molding cavity 1011, and sends the actual vacuum degree in the equipment molding cavity 1011 to the vacuum adjustment device 102; the temperature measuring device 104 measures the actual temperature in the equipment molding cavity 1011 and the oil temperature of the diffusion pump 106, and sends the actual temperature in the equipment molding cavity 1011 and the oil temperature of the diffusion pump 106 to the vacuum adjustment device 102.

[0057] The vacuum adjustment device 102 is used to control the on and off of the mechanical pump 105, the diffusion pump 106, the Roots pump 107, the maintenance pump 108, the high vacuum valve 109, the roughing valve 110, the fore valve 111, the maintenance valve 112 and the atmospheric backfill valve 113 according to the actual vacuum degree, the actual temperature and the oil temperature.

[0058] Optionally, the vacuum adjustment device 102 controls the on / off states of the mechanical pump 105, the diffusion pump 106, the Roots pump 107, the maintenance pump 108, the high vacuum valve 109, the roughing valve 110, the front valve 111, the maintenance valve 112, and the atmospheric backfill valve 113 according to the received actual vacuum degree in the device molding cavity 1011, the actual temperature in the device molding cavity 1011, and the oil temperature of the diffusion pump 106. During the vacuum diffusion welding process, the vacuum adjustment device 102 automatically controls the vacuum extraction process in the device molding cavity 1011 of the vacuum diffusion welding device 101 and the vacuum degree maintenance process in the device molding cavity 1011 by automatically switching the on and off states of each pump and valve.

[0059] In this embodiment, a vacuum adjustment device, a vacuum measuring device and a temperature measuring device are provided in the vacuum automatic control system of vacuum diffusion welding. The vacuum adjustment device automatically controls the on and off of the mechanical pump, the diffusion pump, the Roots pump, the maintenance pump, the high vacuum valve, the roughing valve, the front valve, the maintenance valve and the atmospheric backfill valve according to the actual vacuum degree in the molding cavity of the equipment in the vacuum diffusion welding equipment sent by the vacuum measuring device, the actual temperature in the molding cavity of the equipment sent by the temperature measuring device and the oil temperature of the diffusion pump. The vacuum adjustment device automatically controls the vacuum extraction process and the vacuum degree maintenance process in the molding cavity of the equipment in the vacuum diffusion welding equipment by automatically switching the on and off states of each pump and valve, so that the vacuum degree in the molding cavity of the equipment is stabilized within a preset reasonable range of vacuum degree, thereby improving the stability of the vacuum degree in the molding cavity of the equipment, and efficiently improving the use efficiency of each pump, thereby reducing production costs.

[0060] As an optional implementation, the vacuum automatic control system 100 for vacuum diffusion welding further includes: a host industrial control device 116 and a programmable logic controller (PLC) 115 .

[0061] The upper-level industrial control device 116 is connected in communication with the editable logic controller 115 ; the editable logic controller 115 is connected in communication with the vacuum diffusion welding device 101 ; and the vacuum adjustment device 102 is connected in communication with the vacuum diffusion welding device 101 .

[0062] Optional, Figure 2 A schematic diagram of the structure of another vacuum automatic control system for vacuum diffusion welding provided in an embodiment of the present application is shown in FIG. Figure 2As shown, the vacuum automatic control system 100 for vacuum diffusion welding further includes: a host industrial control device 116 and a PLC controller 115 .

[0063] Reference Figure 2 , the upper industrial control device 116 is connected to the PLC controller 115 for communication; the PLC controller 115 is connected to the vacuum diffusion welding device 101 for communication; the vacuum diffusion welding device 101 is connected to the vacuum adjustment device 102 for communication. Through the communication connection relationship among the upper industrial control device 116, the PLC controller 115, the vacuum diffusion welding device 101 and the vacuum adjustment device 102, the data transmission communication between the upper industrial control device 116 and the vacuum adjustment device 102 is realized.

[0064] The vacuum diffusion welding device 101 is used to receive vacuum control parameters from the upper industrial control device 116 via the editable logic controller 115 , and send the vacuum control parameters to the vacuum adjustment device 102 .

[0065] Optional, see Figure 2 Before the vacuum automatic control system 100 of vacuum diffusion welding is operated, a vacuum control parameter is pre-set in the upper industrial control device 116, and the vacuum control parameter is used to indicate the opening and closing states of each pump and valve under a specific threshold condition. The upper industrial control device 116 sends the preset vacuum control parameter to the PLC controller 115, and the PLC controller 115 sends the preset vacuum control parameter to the vacuum diffusion welding device 101, and the vacuum diffusion welding device 101 sends the preset vacuum control parameter to the vacuum adjustment device 102. The preset vacuum control parameter is transmitted from the upper industrial control device 116 to the vacuum adjustment device 102 through the PLC controller 115 and the vacuum diffusion welding device 101.

[0066] The vacuum adjustment device 102 is specifically used to control the on and off of the mechanical pump 105, the diffusion pump 106, the Roots pump 107, the maintenance pump 108, the high vacuum valve 109, the roughing valve 110, the fore valve 111, the maintenance valve 112 and the atmospheric backfill valve 113 according to the vacuum control parameters, the actual vacuum degree, the actual temperature and the oil temperature.

[0067] Optionally, the vacuum adjustment device 102 controls the on-off of the mechanical pump 105, the diffusion pump 106, the Roots pump 107, the maintaining pump 108, the high vacuum valve 109, the roughing valve 110, the front valve 111, the maintaining valve 112 and the atmospheric backfilling valve 113 according to the preset vacuum control parameters, the actual vacuum degree in the equipment molding cavity 1011, the actual temperature in the equipment molding cavity 1011 and the oil temperature of the diffusion pump 106, so as to automatically control the vacuum extraction process in the equipment molding cavity 1011 and the vacuum degree maintenance process in the equipment molding cavity 1011 in the vacuum diffusion welding equipment 101.

[0068] In this embodiment, by setting a host industrial control device and a PLC controller in the vacuum automatic control system of vacuum diffusion welding, the vacuum control parameters preset on the host industrial control device are transmitted to the vacuum adjustment device through the PLC controller and the vacuum diffusion welding device; the vacuum control parameters are used as a reference for the vacuum adjustment device to adjust the on-off state of each pump and valve, and the vacuum adjustment device adjusts the on-off state of each pump and valve according to the actual vacuum degree, actual temperature, oil temperature of the diffusion pump and specific threshold conditions in the vacuum control parameters in the molding cavity of the device. By transmitting the preset vacuum control parameters to the vacuum adjustment device through the host industrial control device, the PLC controller and the vacuum diffusion welding device, the accuracy of the vacuum adjustment device in adjusting the on-off state of each pump and valve and the stability of the vacuum degree in the molding cavity of the device are improved.

[0069] As an optional embodiment, the vacuum adjustment device 102 is specifically used to determine whether the vacuum degree of the equipment molding cavity 1011 is greater than or equal to the first preset threshold value in the vacuum control parameters and less than or equal to the second preset threshold value in the vacuum control parameters according to the actual vacuum degree. If so, the roughing valve 110, the Roots pump 107, the mechanical pump 105, the maintaining valve 112 and the maintaining pump 108 are controlled to be opened, and the diffusion pump 106 is controlled to be opened when the vacuum degree of the front stage of the diffusion pump 106 is less than the third preset threshold value in the vacuum control parameters.

[0070] Optional, continue to refer to Figure 1 The vacuum adjustment device 102 determines the on / off state of the roughing valve 110, the roots pump 107, the mechanical pump 105, the maintenance valve 112, and the maintenance pump 108 according to the magnitude relationship between the actual vacuum degree in the equipment molding cavity 1011 sent by the vacuum measuring device 103 and the first preset threshold value and the second preset threshold value in the vacuum control parameter. Specifically, if the actual vacuum degree in the equipment molding cavity 1011 is greater than or equal to the first preset threshold value in the vacuum control parameter and less than or equal to the second preset threshold value in the vacuum control parameter, the vacuum adjustment device 102 controls the roughing valve 110, the roots pump 107, the mechanical pump 105, the maintenance valve 112, and the maintenance pump 108 to open, and provides the front stage vacuum degree for the diffusion pump 106. And the vacuum adjustment device 102 determines the on / off state of the diffusion pump 106 according to the magnitude relationship between the front stage vacuum degree of the diffusion pump 106 and the third preset threshold value in the vacuum control parameter. Specifically, if the front stage vacuum degree of the diffusion pump 106 is less than the third preset threshold value in the vacuum control parameter, the vacuum adjustment device 102 controls the diffusion pump 106 to open.

[0071] Exemplarily, the first preset threshold value may be 5 Pa, the second preset threshold value may be 800 Pa, and the third preset threshold value may be 30 Pa, that is, when the actual vacuum degree of the equipment molding cavity 1011 is greater than or equal to 5 Pa and less than or equal to 800 Pa, the vacuum adjustment device 102 controls the roughing valve 110, the Roots pump 107, the mechanical pump 105, the maintaining valve 112 and the maintaining pump 108 to open, and provide the fore-stage vacuum degree for the diffusion pump 106; when the fore-stage vacuum degree of the diffusion pump 106 is less than 30 Pa, the vacuum adjustment device 102 controls the diffusion pump 106 to open.

[0072] In this embodiment, the vacuum adjustment device determines the on-off state of the roughing valve, the Roots pump, the mechanical pump, the maintenance valve, and the maintenance pump according to the magnitude relationship between the actual vacuum degree in the molding cavity of the device and the first preset threshold value and the second preset threshold value in the vacuum control parameter. The vacuum adjustment device also determines the on-off state of the diffusion pump according to the magnitude relationship between the front-stage vacuum degree of the diffusion pump and the third preset threshold value in the vacuum control parameter. By controlling the on-off state of the roughing valve, the Roots pump, the mechanical pump, the maintenance valve, the maintenance pump, and the diffusion pump through the vacuum adjustment device, the precise control of the front-stage vacuum extraction process in the molding cavity of the device is achieved, and the efficiency of the front-stage vacuum extraction is improved.

[0073] As an optional embodiment, the vacuum adjustment device 102 is also specifically used to determine whether the vacuum degree of the equipment molding cavity 1011 is less than the first preset threshold value and the oil temperature is greater than or equal to the fourth preset threshold value in the vacuum control parameters according to the actual vacuum degree. If so, the mechanical pump 105, the roughing valve 110 and the Roots pump 107 are controlled to be disconnected in sequence, and the front-stage valve 111 and the high vacuum valve 109 are controlled to be opened.

[0074] Optional, continue to refer to Figure 1 The vacuum adjustment device 102 also determines the on / off states of the mechanical pump 105, the roughing valve 110 and the Roots pump 107 based on the relationship between the actual vacuum degree in the device molding cavity 1011 sent by the vacuum measuring device 103 and the first preset threshold value in the vacuum control parameters, and the relationship between the oil temperature of the diffusion pump 106 sent by the temperature measuring device 104 and the fourth preset threshold value in the vacuum control parameters. Specifically, if the actual vacuum degree in the equipment molding cavity 1011 is less than the first preset threshold value in the vacuum control parameters, and the oil temperature of the diffusion pump 106 is greater than or equal to the fourth preset threshold value in the vacuum control parameters, the vacuum adjustment device 102 controls the mechanical pump 105, the roughing valve 110 and the Roots pump 107 to be disconnected in sequence; the vacuum adjustment device 102 controls the on-off state of the front-stage valve 111 and the high vacuum valve 109 according to the on-off state of the mechanical pump 105, the roughing valve 110 and the Roots pump 107. After the mechanical pump 105, the roughing valve 110 and the Roots pump 107 are all disconnected, the vacuum adjustment device 102 controls the front-stage valve 111 and the high vacuum valve 109 to open, so as to extract high vacuum for the equipment molding cavity 1011.

[0075] Exemplarily, the first preset threshold value may be 5 Pa, and the fourth preset threshold value may be 260°C, that is, when the actual vacuum degree of the equipment molding cavity 1011 is less than 5 Pa, and the oil temperature of the diffusion pump 106 is greater than or equal to 260°C, the vacuum adjustment device 102 controls the mechanical pump 105, the roughing valve 110 and the Roots pump 107 to be disconnected in sequence.

[0076] In this embodiment, the vacuum adjustment device determines the on / off state of the mechanical pump, the roughing valve, and the Roots pump according to the magnitude relationship between the actual vacuum degree in the molding cavity of the device and the first preset threshold value in the vacuum control parameter, and the magnitude relationship between the oil temperature of the diffusion pump and the fourth preset threshold value in the vacuum control parameter. The vacuum adjustment device controls the on / off state of the fore valve and the high vacuum valve according to the on / off state of the mechanical pump, the roughing valve, and the Roots pump. The vacuum adjustment device controls the mechanical pump, the roughing valve, and the Roots pump to be disconnected, and the fore valve and the high vacuum valve to be opened, so as to extract a high vacuum for the molding cavity of the device.

[0077] As an optional embodiment, the vacuum adjustment device 102 is also specifically used to determine whether the actual temperature of the device molding cavity 1011 is less than or equal to the fifth preset threshold in the vacuum control parameter based on the actual temperature. If so, the high vacuum valve 109 and the diffusion pump 106 are controlled to be disconnected.

[0078] Optional, continue to refer to Figure 1 The vacuum adjustment device 102 also determines the on / off state of the high vacuum valve 109 and the diffusion pump 106 according to the magnitude relationship between the actual temperature of the device molding cavity 1011 sent by the temperature measurement device 104 and the fifth preset threshold value in the vacuum control parameter. Specifically, after the heating of the device molding cavity 1011 is completed, during the cooling process, if the actual temperature of the device molding cavity 1011 is less than or equal to the fifth preset threshold value in the vacuum control parameter, the vacuum adjustment device 102 controls the high vacuum valve 109 and the diffusion pump 106 to be disconnected in sequence. Among them, the fifth preset threshold value in the vacuum control parameter can be the disconnection temperature of the high vacuum valve 109 preset on the upper industrial control device 116.

[0079] In this embodiment, the vacuum adjustment device determines the on / off state of the high vacuum valve and the diffusion pump according to the magnitude relationship between the actual temperature of the molding cavity of the device and the fifth preset threshold value in the vacuum control parameter. When the actual temperature of the molding cavity of the device is less than or equal to the fifth preset threshold value in the vacuum control parameter, the vacuum adjustment device controls the high vacuum valve and the diffusion pump to be disconnected in sequence. The vacuum adjustment device controls the on / off state of the high vacuum valve and the diffusion pump through the fifth preset threshold value and the actual temperature in the molding cavity of the device.

[0080] As an optional implementation, the vacuum adjustment device 102 is also specifically used to determine whether the oil temperature of the diffusion pump 106 is less than or equal to the sixth preset threshold in the vacuum control parameter based on the oil temperature. If so, the maintenance valve 112 and the maintenance pump 108 are controlled to be disconnected.

[0081] Optional, continue to refer to Figure 1 The vacuum adjustment device 102 also determines the on / off state of the maintenance valve 112 and the maintenance pump 108 according to the magnitude relationship between the oil temperature of the diffusion pump 106 and the sixth preset threshold value in the vacuum control parameter. Specifically, if the oil temperature of the diffusion pump 106 is less than or equal to the sixth preset threshold value in the vacuum control parameter, the vacuum adjustment device 102 controls the maintenance valve 112 and the maintenance pump 108 to be disconnected in sequence.

[0082] Exemplarily, the sixth preset threshold may be 100° C., that is, when the oil temperature of the diffusion pump 106 is less than or equal to 100° C., the vacuum adjustment device 102 controls the maintaining valve 112 and the maintaining pump 108 to be disconnected in sequence.

[0083] In this embodiment, the vacuum adjustment device determines the on-off state of the maintenance valve and the maintenance pump according to the magnitude relationship between the oil temperature of the diffusion pump and the sixth preset threshold value in the vacuum control parameter. When the oil temperature of the diffusion pump is less than or equal to the sixth preset threshold value in the vacuum control parameter, the vacuum adjustment device controls the maintenance valve and the maintenance pump to be disconnected in sequence. The vacuum adjustment device controls the on-off state of the maintenance valve and the maintenance pump through the sixth preset threshold value and the oil temperature of the diffusion pump.

[0084] As an optional embodiment, the vacuum adjustment device 102 is also specifically used to control the mechanical pump 105, the diffusion pump 106, the Roots pump 107, the maintenance pump 108, the high vacuum valve 109, the roughing valve 110, the fore-stage valve 111 and the maintenance valve 112 to be disconnected after the vacuum diffusion welding equipment 101 completes welding, and to control the atmospheric backfill valve 113 to be opened.

[0085] Optionally, after the vacuum diffusion welding device 101 finishes welding, the vacuum adjustment device 102 controls the mechanical pump 105, the diffusion pump 106, the roots pump 107, the maintenance pump 108, the high vacuum valve 109, the roughing valve 110, the front valve 111 and the maintenance valve 112 to all be disconnected, and the vacuum adjustment device 102 controls the atmospheric backfill valve 113 to be opened. Among them, the vacuum automatic control system 100 of vacuum diffusion welding also includes a plurality of limit switches. After the vacuum adjustment device 102 controls all valves and pumps to be disconnected, the limit switch sends a feedback signal to the PLC controller 115, and the PLC controller 115 transmits the feedback signal to the vacuum adjustment device 102 through the vacuum diffusion welding device 101. The vacuum adjustment device 102 controls the atmospheric backfill valve 113 to be opened according to the feedback signal, so that the air pressure inside and outside the molding cavity 1011 of the device is balanced.

[0086] In this embodiment, after the vacuum diffusion welding device finishes welding, the vacuum adjustment device controls the atmospheric backfill valve to open according to the feedback signal. By opening the atmospheric backfill valve, the air pressure inside and outside the molding cavity of the device is balanced.

[0087] The present application also provides a vacuum automatic control method for vacuum diffusion welding. Figure 3 The flowchart of the vacuum automatic control method for vacuum diffusion welding provided in the embodiment of the present application is a schematic diagram, which is applied to the vacuum adjustment device 102 in the vacuum automatic control system 100 for vacuum diffusion welding described in the above embodiment; Figure 3 As shown, the method includes:

[0088] S301, obtaining the actual vacuum degree in the molding cavity of the device sent by the vacuum measuring device, the actual temperature in the molding cavity of the device sent by the temperature measuring device, and the oil temperature of the diffusion pump.

[0089] Optional, see Figure 1 The vacuum adjustment device 102 is respectively connected to the vacuum measuring device 103 and the temperature measuring device 104 for communication. The vacuum adjustment device 102 receives the actual vacuum degree in the device molding cavity 1011 sent by the vacuum measuring device 103 and the actual temperature in the device molding cavity 1011 sent by the temperature measuring device 104 as well as the oil temperature of the diffusion pump 106.

[0090] S302, controlling the on / off of the mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve according to the actual vacuum degree, actual temperature and oil temperature.

[0091] Optionally, during the vacuum diffusion welding process, the vacuum adjustment device 102 controls the on / off of the mechanical pump 105, the diffusion pump 106, the Roots pump 107, the maintenance pump 108, the high vacuum valve 109, the roughing valve 110, the front valve 111, the maintenance valve 112, and the atmospheric backfill valve 113 according to the actual vacuum degree in the device molding cavity 1011, the actual temperature in the device molding cavity 1011, and the oil temperature of the diffusion pump 106. By automatically switching the on and off states of each pump and valve, the vacuuming process and the vacuum degree maintenance process in the device molding cavity 1011 are automatically controlled.

[0092] In this embodiment, the vacuum adjustment device controls the switching of the on / off states of the mechanical pump, the diffusion pump, the Roots pump, the maintenance pump, the high vacuum valve, the roughing valve, the front stage valve, the maintenance valve and the atmospheric backfill valve according to the actual vacuum degree in the molding cavity of the received device, the actual temperature in the molding cavity of the device and the oil temperature of the diffusion pump. The vacuum extraction process and the vacuum maintenance process in the molding cavity of the device are automatically controlled to improve the stability of the vacuum degree in the molding cavity of the device.

[0093] Figure 4A schematic flow chart of another vacuum automatic control method for vacuum diffusion welding provided in an embodiment of the present application is shown as follows: Figure 4 As shown, the program also includes:

[0094] S401, obtaining vacuum control parameters sent by vacuum diffusion welding equipment.

[0095] Optional, see Figure 2 , the vacuum adjustment device 102 is connected to the vacuum diffusion welding device 101 in communication, the vacuum diffusion welding device 101 is connected to the PLC controller 115 in communication, and the PLC controller 115 is connected to the upper industrial control device 116 in communication. The upper industrial control device 116 has pre-set vacuum control parameters, and the upper industrial control device 116 sends the preset vacuum control parameters to the vacuum diffusion welding device 101 via the PLC controller 115, and the vacuum adjustment device 102 receives the vacuum control parameters sent by the vacuum diffusion welding device 101. Among them, the preset vacuum control parameters can indicate the opening and closing states of each pump and valve under specific threshold conditions.

[0096] S402, according to the vacuum control parameters, actual vacuum degree, actual temperature and oil temperature, control the on and off of the mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve.

[0097] Optionally, the vacuum adjustment device 102 controls the on-off of the mechanical pump 105, the diffusion pump 106, the Roots pump 107, the maintaining pump 108, the high vacuum valve 109, the rough pumping valve 110, the front valve 111, the maintaining valve 112 and the atmospheric backfilling valve 113 according to the received vacuum control parameters, the actual vacuum degree in the equipment molding cavity 1011, the actual temperature in the equipment molding cavity 1011 and the oil temperature of the diffusion pump 106, so as to automatically control the vacuum pumping process in the equipment molding cavity 1011 and the vacuum degree maintaining process in the equipment molding cavity 1011.

[0098] In this embodiment, the vacuum adjustment device receives the preset vacuum control parameters sent by the vacuum diffusion welding device, and controls the switching of the on-off state of the mechanical pump, the diffusion pump, the Roots pump, the maintenance pump, the high vacuum valve, the roughing valve, the fore valve, the maintenance valve, and the atmospheric backfill valve based on the actual vacuum degree in the molding cavity of the device, the actual temperature in the molding cavity of the device, and the oil temperature of the diffusion pump. The vacuum adjustment device can achieve precise control of the on-off state of each pump and valve.

[0099] The following is a detailed description of the process of controlling the on and off of the mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve based on vacuum control parameters, actual vacuum degree, actual temperature and oil temperature.

[0100] Figure 5 A schematic diagram of the flow chart of the control valve and pump on-off of the vacuum automatic control method for vacuum diffusion welding provided in the embodiment of the present application, as shown in FIG. Figure 5 As shown, the step of controlling the on / off of the mechanical pump, the diffusion pump, the Roots pump, the maintenance pump, the high vacuum valve, the roughing valve, the fore valve, the maintenance valve and the atmospheric backfill valve in the above step S402 according to the vacuum control parameters, the actual vacuum degree, the actual temperature and the oil temperature includes:

[0101] S501. Determine whether the vacuum degree of a molding cavity of an equipment is greater than or equal to a first preset threshold value in a vacuum control parameter and less than or equal to a second preset threshold value in a vacuum control parameter according to an actual vacuum degree.

[0102] Optionally, the vacuum adjustment device 102 determines the relationship between the actual vacuum degree in the device molding cavity 1011 sent by the vacuum measuring device 103 and the first preset threshold and the second preset threshold in the vacuum control parameter. The vacuum adjustment device 102 determines whether the actual vacuum degree in the device molding cavity 1011 is greater than or equal to the first preset threshold in the vacuum control parameter and less than or equal to the second preset threshold in the vacuum control parameter. The first preset threshold may be 5 Pa, and the second preset threshold may be 800 Pa, which is not limited in this application.

[0103] S502: If yes, control the roughing valve, the Roots pump, the mechanical pump, the maintaining valve and the maintaining pump to be turned on, and control the diffusion pump to be turned on when the front stage vacuum degree of the diffusion pump is less than the third preset threshold value in the vacuum control parameter.

[0104] Optionally, if the actual vacuum degree of the molding cavity 1011 of the equipment is greater than or equal to the first preset threshold and less than or equal to the second preset threshold, the vacuum adjustment device 102 controls the roughing valve 110, the roots pump 107, the mechanical pump 105, the maintenance valve 112 and the maintenance pump 108 to open, and provides the front-stage vacuum degree for the opening of the diffusion pump 106; the front-stage vacuum degree of the diffusion pump 106 changes as the roots pump 107, the mechanical pump 105 and the maintenance pump 108 extract vacuum, and the vacuum adjustment device 102 determines the on-off state of the diffusion pump 106 according to the magnitude relationship between the front-stage vacuum degree of the diffusion pump 106 and the third preset threshold. When the front-stage vacuum degree of the diffusion pump 106 is less than the third preset threshold, the vacuum adjustment device 102 controls the diffusion pump 106 to open. Among them, the third preset threshold can be 30 Pa, which is not limited in this application.

[0105] In this embodiment, the vacuum adjustment device determines the on / off state of the roughing valve, the Roots pump, the mechanical pump, the maintenance valve, and the maintenance pump according to the magnitude relationship between the actual vacuum degree in the molding cavity of the device and the first preset threshold value and the second preset threshold value. The vacuum adjustment device also determines the on / off state of the diffusion pump according to the magnitude relationship between the fore-stage vacuum degree of the diffusion pump and the third preset threshold value. The vacuum adjustment device provides fore-stage vacuum conditions for the opening of the diffusion pump by controlling the opening of the roughing valve, the Roots pump, the mechanical pump, the maintenance valve, and the maintenance pump, and accurately controls the process of extracting the fore-stage vacuum in the molding cavity of the device, thereby improving the efficiency of extracting the fore-stage vacuum.

[0106] Figure 6 Another schematic diagram of the flow of controlling valves and pumps for the vacuum automatic control method of vacuum diffusion welding provided in the embodiment of the present application is as follows: Figure 6 As shown, the above step S402 controls the on / off of the mechanical pump, the diffusion pump, the Roots pump, the maintenance pump, the high vacuum valve, the roughing valve, the fore valve, the maintenance valve and the atmospheric backfill valve according to the vacuum control parameters, the actual vacuum degree, the actual temperature and the oil temperature, and also includes:

[0107] S601. Determine, based on the actual vacuum degree, whether the vacuum degree of the molding cavity of the equipment is less than a first preset threshold and the oil temperature is greater than or equal to a fourth preset threshold in the vacuum control parameters.

[0108] Optionally, the vacuum adjustment device 102 determines the relationship between the actual vacuum degree in the equipment molding cavity 1011 and the first preset threshold value, and the vacuum adjustment device 102 determines whether the actual vacuum degree in the equipment molding cavity 1011 is less than the first preset threshold value in the vacuum control parameters; the vacuum adjustment device 102 also determines the relationship between the oil temperature of the diffusion pump 106 and the fourth preset threshold value, and the vacuum adjustment device 102 determines whether the oil temperature of the diffusion pump 106 is greater than or equal to the fourth preset threshold value in the vacuum control parameters.

[0109] Among them, the first preset threshold value may be 5 Pa, and the fourth preset threshold value may be 260° C., which is not limited in the present application.

[0110] S602: If yes, the mechanical pump, the roughing valve and the Roots pump are disconnected in sequence, and the fore valve and the high vacuum valve are opened.

[0111] Optionally, if the actual vacuum degree of the equipment molding cavity 1011 is less than the first preset threshold value, and the oil temperature of the diffusion pump 106 is greater than or equal to the fourth preset threshold value, the vacuum adjustment device 102 controls the mechanical pump 105, the roughing valve 110 and the Roots pump 107 to be disconnected in sequence; when the mechanical pump 105, the roughing valve 110 and the Roots pump 107 are all disconnected, the vacuum adjustment device 102 controls the front stage valve 111 and the high vacuum valve 109 to be opened, so as to extract high vacuum for the equipment molding cavity 1011. Among them, the front stage valve 111 and the high vacuum valve 109 are in an interlocking relationship, and the high vacuum valve 109 can only be opened when the front stage valve 111 is opened.

[0112] In this embodiment, the vacuum adjustment device determines the on / off state of the mechanical pump, the roughing valve and the Roots pump according to the magnitude relationship between the actual vacuum degree in the molding cavity of the device and the first preset threshold value and the magnitude relationship between the oil temperature of the diffusion pump and the fourth preset threshold value; and then determines the on / off state of the fore valve and the high vacuum valve according to the on / off state of the mechanical pump, the roughing valve and the Roots pump. The vacuum adjustment device realizes the process of extracting high vacuum from the molding cavity of the device by disconnecting the mechanical pump, the roughing valve and the Roots pump in sequence, and opening the fore valve and the high vacuum valve in sequence.

[0113] Figure 7 A schematic diagram of another flow chart of controlling valves and pumps on and off in a vacuum automatic control method for vacuum diffusion welding provided in an embodiment of the present application, as shown in FIG. Figure 7 As shown, the step of controlling the on and off of the mechanical pump, the diffusion pump, the Roots pump, the maintenance pump, the high vacuum valve, the roughing valve, the fore valve, the maintenance valve and the atmospheric backfill valve according to the vacuum control parameters, the actual vacuum degree, the actual temperature and the oil temperature in the above step S402 also includes:

[0114] S701. Determine whether the actual temperature of the molding cavity of the equipment is less than or equal to a fifth preset threshold value in the vacuum control parameters according to the actual temperature.

[0115] Optionally, the vacuum adjustment device 102 determines the magnitude relationship between the actual temperature of the device molding cavity 1011 and the fifth preset threshold value; the vacuum adjustment device 102 determines whether the actual temperature of the device molding cavity 1011 is less than or equal to the fifth preset threshold value. The fifth preset threshold value may be a preset disconnection temperature of the high vacuum valve 109.

[0116] S702: If yes, the high vacuum valve and the diffusion pump are controlled to be disconnected.

[0117] Optionally, if the actual temperature of the equipment molding cavity 1011 is less than or equal to a fifth preset threshold, ie, the preset disconnection temperature of the high vacuum valve 109 , the vacuum adjustment device 102 controls the high vacuum valve 109 and the diffusion pump 106 to disconnect in sequence.

[0118] In this embodiment, the vacuum adjustment device determines the on / off state of the high vacuum valve and the diffusion pump according to the magnitude relationship between the actual temperature of the molding cavity of the device and the fifth preset threshold, i.e., the preset high vacuum valve disconnection temperature. When the actual temperature of the molding cavity of the device is less than or equal to the preset high vacuum valve disconnection temperature, the vacuum adjustment device controls the high vacuum valve and the diffusion pump to disconnect in sequence, so as to realize the automatic closing of the high vacuum extraction process of the molding cavity of the device.

[0119] Figure 8 A schematic diagram of another flow chart of controlling the on-off of a control valve and a pump in a vacuum automatic control method for vacuum diffusion welding provided in an embodiment of the present application is shown in FIG. Figure 8 As shown, the above step S402 controls the on / off of the mechanical pump, the diffusion pump, the Roots pump, the maintenance pump, the high vacuum valve, the roughing valve, the fore valve, the maintenance valve and the atmospheric backfill valve according to the vacuum control parameters, the actual vacuum degree, the actual temperature and the oil temperature, and also includes:

[0120] S801. Determine, based on the oil temperature, whether the oil temperature of the diffusion pump is less than or equal to a sixth preset threshold value in the vacuum control parameter.

[0121] Optionally, the vacuum adjustment device 102 determines the relationship between the oil temperature of the diffusion pump 106 and the sixth preset threshold; the vacuum adjustment device 102 determines whether the oil temperature of the diffusion pump 106 is less than or equal to the sixth preset threshold. The sixth preset threshold may be 100°C, which is not limited in this application.

[0122] S802: If yes, control the maintaining valve and the maintaining pump to be disconnected.

[0123] Optionally, if the oil temperature of the diffusion pump 106 is less than or equal to a sixth preset threshold, the vacuum adjustment device 102 controls the maintaining valve 112 and the maintaining pump 108 to be disconnected in sequence.

[0124] In this embodiment, the vacuum adjustment device determines the on / off state of the maintenance valve and the maintenance pump according to the magnitude relationship between the oil temperature of the diffusion pump and the sixth preset threshold value. When the oil temperature of the diffusion pump is less than or equal to the sixth preset threshold value, the vacuum adjustment device controls the maintenance valve and the maintenance pump to be disconnected in sequence.

[0125] Fig. 9 A schematic flow chart of another vacuum automatic control method for vacuum diffusion welding provided in an embodiment of the present application is shown as follows: Fig. 9 As shown, the method also includes:

[0126] S901. After the vacuum diffusion welding equipment finishes welding, control the mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve and maintenance valve to disconnect.

[0127] Optionally, after the vacuum diffusion welding equipment finishes heating and welding, the vacuum adjustment equipment 102 controls the mechanical pump 105, the diffusion pump 106, the Roots pump 107, the maintenance pump 108, the high vacuum valve 109, the roughing valve 110, the fore valve 111 and the maintenance valve 112 to be all disconnected.

[0128] S902, control the atmospheric backfill valve to open.

[0129] Optionally, the vacuum adjustment device 102 controls the atmospheric backfill valve 113 to open, so that the air pressure inside and outside the molding cavity 1011 of the device is balanced.

[0130] In this embodiment, the vacuum adjustment device controls the atmospheric backfill valve to open after the vacuum diffusion welding device finishes welding, and balances the air pressure inside and outside the molding cavity of the device by opening the atmospheric backfill valve.

[0131] The above are only specific implementation methods of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be covered by the protection scope of the present application.

Claims

1. A vacuum automatic control system for vacuum diffusion welding, characterized in that: The vacuum automatic control system of the vacuum diffusion welding at least includes: vacuum diffusion welding equipment, vacuum adjustment equipment, vacuum measuring equipment, temperature measuring equipment, mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve; wherein, the vacuum diffusion welding equipment includes an equipment molding cavity; The mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve are respectively connected to the vacuum adjustment device for communication; The vacuum measuring device is located in the device molding cavity, and the vacuum measuring device is communicatively connected with the vacuum adjusting device; The temperature measuring device is located in the molding cavity of the device, and the temperature measuring device is communicatively connected with the vacuum adjustment device; The vacuum measuring device is used to measure the actual vacuum degree in the molding cavity of the device, and send the actual vacuum degree to the vacuum adjustment device; the temperature measuring device is used to measure the actual temperature in the molding cavity of the device and the oil temperature of the diffusion pump, and send the actual temperature and the oil temperature to the vacuum adjustment device; The vacuum automatic control system for vacuum diffusion welding also includes: upper industrial control equipment and an editable logic controller; The upper industrial control device is communicatively connected with the editable logic controller; The editable logic controller is in communication connection with the vacuum diffusion welding equipment; The vacuum adjustment device is communicatively connected with the vacuum diffusion welding device; The vacuum diffusion welding device is used to receive vacuum control parameters from the upper industrial control device via the editable logic controller, and send the vacuum control parameters to the vacuum adjustment device; The vacuum adjustment device is used to control the on and off of the mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve according to the vacuum control parameters, the actual vacuum degree, the actual temperature and the oil temperature.

2. The system according to claim 1, characterized in that The vacuum adjustment device is specifically used to determine whether the vacuum degree of the molding cavity of the device is greater than or equal to the first preset threshold value in the vacuum control parameters and less than or equal to the second preset threshold value in the vacuum control parameters according to the actual vacuum degree. If so, the roughing valve, the Roots pump, the mechanical pump, the maintaining valve and the maintaining pump are controlled to be turned on, and the diffusion pump is controlled to be turned on when the vacuum degree of the front stage of the diffusion pump is less than the third preset threshold value in the vacuum control parameters.

3. The system according to claim 2, characterized in that The vacuum adjustment device is also specifically used to determine whether the vacuum degree of the molding cavity of the device is less than the first preset threshold value and the oil temperature is greater than or equal to the fourth preset threshold value in the vacuum control parameter according to the actual vacuum degree. If so, the mechanical pump, the roughing valve and the Roots pump are controlled to be disconnected in sequence, and the front-stage valve and the high vacuum valve are controlled to be opened.

4. The system according to claim 2, characterized in that The vacuum adjustment device is specifically used to determine whether the actual temperature of the device molding cavity is less than or equal to the fifth preset threshold in the vacuum control parameter according to the actual temperature, and if so, control the high vacuum valve and the diffusion pump to be disconnected.

5. The system according to claim 2, characterized in that The vacuum adjustment device is specifically further used to determine whether the oil temperature of the diffusion pump is less than or equal to a sixth preset threshold value in the vacuum control parameter according to the oil temperature, and if so, control the maintenance valve and the maintenance pump to be disconnected.

6. The system according to claim 2, characterized in that The vacuum adjustment device is also specifically used to control the mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve and maintenance valve to disconnect after the vacuum diffusion welding equipment completes welding, and to control the atmospheric backfill valve to open.

7. A vacuum automatic control method for vacuum diffusion welding, characterized in that: A vacuum adjustment device used in a vacuum automatic control system for vacuum diffusion welding according to any one of claims 1 to 6; the method comprising: Obtaining the actual vacuum degree in the molding cavity of the device sent by the vacuum measuring device, the actual temperature in the molding cavity of the device sent by the temperature measuring device, and the oil temperature of the diffusion pump; The on / off of the mechanical pump, diffusion pump, Roots pump, maintenance pump, high vacuum valve, roughing valve, fore valve, maintenance valve and atmospheric backfill valve are controlled according to the actual vacuum degree, actual temperature and oil temperature.

8. The method according to claim 7, characterized in that The method further comprises: Obtain vacuum control parameters sent by vacuum diffusion welding equipment; According to the vacuum control parameters, the actual vacuum degree, the actual temperature and the oil temperature, the on and off of the mechanical pump, the diffusion pump, the Roots pump, the maintaining pump, the high vacuum valve, the roughing valve, the fore valve, the maintaining valve and the atmospheric backfilling valve are controlled.

9. The method according to claim 8, characterized in that The on-off of the mechanical pump, the diffusion pump, the Roots pump, the maintenance pump, the high vacuum valve, the roughing valve, the fore valve, the maintenance valve and the atmospheric backfill valve is controlled according to the vacuum control parameter, the actual vacuum degree, the actual temperature and the oil temperature, including: Determining, according to the actual vacuum degree, whether the vacuum degree of the molding cavity of the equipment is greater than or equal to a first preset threshold value in the vacuum control parameter and less than or equal to a second preset threshold value in the vacuum control parameter; If so, the roughing valve, the Roots pump, the mechanical pump, the maintaining valve and the maintaining pump are controlled to be turned on, and the diffusion pump is controlled to be turned on when the front stage vacuum degree of the diffusion pump is less than the third preset threshold value in the vacuum control parameter.

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